WO2013038263A3 - Способ оптического мониторинга поверхности в области воздействия лазерного излучения и устройство для его осуществления - Google Patents

Способ оптического мониторинга поверхности в области воздействия лазерного излучения и устройство для его осуществления Download PDF

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Publication number
WO2013038263A3
WO2013038263A3 PCT/IB2012/001793 IB2012001793W WO2013038263A3 WO 2013038263 A3 WO2013038263 A3 WO 2013038263A3 IB 2012001793 W IB2012001793 W IB 2012001793W WO 2013038263 A3 WO2013038263 A3 WO 2013038263A3
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WIPO (PCT)
Prior art keywords
radiation
laser
spectral
subject
laser radiation
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Application number
PCT/IB2012/001793
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English (en)
French (fr)
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WO2013038263A4 (ru
WO2013038263A2 (ru
Inventor
Юрий Александрович ЧИВЕЛЬ
Original Assignee
Chivel Yury
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Application filed by Chivel Yury filed Critical Chivel Yury
Priority to EP12831885.4A priority Critical patent/EP2905104A4/en
Publication of WO2013038263A2 publication Critical patent/WO2013038263A2/ru
Publication of WO2013038263A3 publication Critical patent/WO2013038263A3/ru
Publication of WO2013038263A4 publication Critical patent/WO2013038263A4/ru

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/034Observing the temperature of the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/032Observing, e.g. monitoring, the workpiece using optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/082Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0014Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation from gases, flames
    • G01J5/0018Flames, plasma or welding
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/025Interfacing a pyrometer to an external device or network; User interface
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/026Control of working procedures of a pyrometer, other than calibration; Bandwidth calculation; Gain control
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0806Focusing or collimating elements, e.g. lenses or concave mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0808Convex mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0818Waveguides
    • G01J5/0821Optical fibres
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/084Adjustable or slidable
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0846Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0859Sighting arrangements, e.g. cameras
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0871Beam switching arrangements; Photodetection involving different fields of view for a single detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0896Optical arrangements using a light source, e.g. for illuminating a surface
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/602Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using selective, monochromatic or bandpass filtering

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Radiation Pyrometers (AREA)
  • Laser Beam Processing (AREA)

Abstract

Изобретение относится к области измерительной техники и может быть использовано при измерении температуры поверхности в области лазерного воздействия. Задачей заявляемого изобретения является разработка способа оптического мониторинга поверхности в области воздействия лазерного излучения при сканировании поверхности с помощью гальвосканера с F-teta линзой и устройства для его осуществления, позволяющих получить полную информацию о состоянии поверхности при воздействии лазерного излучения. Спектральные линии регистрации теплового излучения поверхности пирометром, спектральные полосы регистрации теплового излучения поверхности видеокамерой и спектральные линии излучения источников подсветки располагаются в спектральной полосе пропускания гальваносканера по обе стороны спектральной линии лазерного излучения в ее непосредственной близости.. Устройство дополнительно содержит градиентное поворотное зеркало имеющее в центре эллиптическую область с покрытие имеющем 100% отражением на длине волны лазера а периферическая область зеркала обладает высоким пропусканием в области спектра вне полосы излучения лазера. Устройство дополнительно содержит градиентное поворотное зеркало имеющее центральное эллиптическое отверстие с 100% пропусканием лазерного излучения и с широкополосным отражающим покрытием на периферии зеркала. 4. Устройство дополнительно содержит источник подсветки поверхности в области лазерной обработки, оптически связанный с гальваносканером и видеокамерой причем длина волны излучения источника располагается вблизи линии излучения лазера и в спектральной полосе отражения зеркал гальваносканера.
PCT/IB2012/001793 2011-09-13 2012-09-13 Способ оптического мониторинга поверхности в области воздействия лазерного излучения и устройство для его осуществления WO2013038263A2 (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP12831885.4A EP2905104A4 (en) 2011-09-13 2012-09-13 METHOD FOR OPTICALLY MONITORING THE SURFACE IN THE FIELD OF LASER RADIATION ACTION AND DEVICE FOR IMPLEMENTING SAID METHOD

Applications Claiming Priority (2)

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RU2011137685/28A RU2520944C2 (ru) 2011-09-13 2011-09-13 Способ оптического мониторинга поверхности в области воздействия лазерного излучения и устройство для его осуществления
RU2011137685 2011-09-13

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WO2013038263A2 WO2013038263A2 (ru) 2013-03-21
WO2013038263A3 true WO2013038263A3 (ru) 2013-06-13
WO2013038263A4 WO2013038263A4 (ru) 2013-08-01

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DE102014101576B4 (de) 2014-02-07 2019-10-02 Dr. Mergenthaler Gmbh & Co. Kg Vorrichtung zur Bearbeitung von Werkstücken
GB201516681D0 (en) * 2015-09-21 2015-11-04 Renishaw Plc Addictive manufacturing apparatus and an optical module for use in an addictive manufacturing apparatus
CN108127206B (zh) * 2017-12-21 2020-07-07 武汉比天科技有限责任公司 一种激光钎焊工艺移植方法及可移植数据的激光钎焊装置
TWI723877B (zh) * 2020-05-13 2021-04-01 國家中山科學研究院 插件式同軸熱輻射影像量測系統

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Also Published As

Publication number Publication date
WO2013038263A4 (ru) 2013-08-01
RU2011137685A (ru) 2013-03-27
EP2905104A2 (en) 2015-08-12
WO2013038263A2 (ru) 2013-03-21
EP2905104A4 (en) 2016-08-10
RU2520944C2 (ru) 2014-06-27

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