WO2013011711A1

WO2013011711A1 - Stage device and stage control system

Info

Publication number: WO2013011711A1
Application number: PCT/JP2012/054883
Authority: WO
Inventors: 小池　晴彦; 加来　靖彦
Original assignee: 株式会社安川電機
Priority date: 2011-07-15
Filing date: 2012-02-28
Publication date: 2013-01-24
Also published as: CN103648714A; CN103648714B; TWI522543B; TW201305457A; JP5618263B2; JPWO2013011711A1

Abstract

[Problem] To make positioning on the order of 1 nm possible using a universal servo amp and without using a linear amp. [Solution] The stage device (3) is provided with: two guide rails (12) having guiding surfaces; a slider (13), which has guided surfaces that correspond to the guiding surfaces and the movement direction of which is controlled by the guide rails (12); a linear motor (16) that generates the thrust of the slider (13); and a linear scale (17) that detects the position of the slider (13). The state of lubrication between the guiding surfaces and guided surfaces is controlled so as to be a mixed lubrication state comprising both boundary film lubrication and fluid film lubrication in at least one area, and to be a fluid film lubrication state in the other areas.

Description

Stage device and stage control system

The disclosed embodiment relates to a stage apparatus that moves a moving object to a target position and a stage control system including the stage apparatus, and particularly relates to a stage apparatus that requires high movement accuracy and a stage control system including the stage apparatus.

Generally, a stage device has a slider, a guide rail that regulates the moving direction of the slider, a drive device that generates thrust of the slider, and a position detection device that detects the position of the slider. For example, a linear motor or a linear scale is used as the drive device or the position detection device.

Conventionally, as a bearing that slidably supports the slider with respect to the guide rail, a rolling bearing that circulates balls and rollers (see, for example, Patent Document 1), or the slider is levitated by blowing compressed air, A non-contact air bearing (for example, see Patent Document 2) is known.

Japanese Patent Laid-Open No. 7-242912 JP 2004-36680 A

In recent years, for example, in printed circuit boards, semiconductors, liquid crystals, bio-related fields, etc., ultra-precision positioning accuracy of 1 nm level is required for stage devices.

When performing ultra-precision positioning at a level of 1 nm with a stage apparatus using a rolling bearing, a technique is known that performs positioning using the linear spring characteristics in the minute movement region of the ball or roller of the rolling bearing. However, in a stage apparatus using a rolling bearing, the guide rail bends by about several μm due to heat generated by rolling friction, and thus there is a problem that there is no position reproducibility. In addition, since minute thrust control is required even under linear spring characteristics, positioning is performed using a general-purpose servo amplifier that is easy to obtain and maintain (for example, a PWM control servo amplifier with a current detection resolution of about 11 bits). In this case, there is a problem that the positioning accuracy is only a submicron (0.1 μm = 100 nm) level.

On the other hand, in a stage device using an air bearing, since the slider and the guide rail are not in contact with each other, the position reproducibility is not lost due to heat generation as described above, but the friction between the slider and the guide rail is extremely small. Inertial force acts directly. For this reason, when the general-purpose servo amplifier is used, the ripple at the time of positioning stop (during servo lock) is increased, and the oscillation state is caused and the hunting width is increased. In addition, since the slider is completely levitated by the air, there is a problem that vibration is generated due to pulsation of air from the air source and compression / expansion of the air itself.

By adopting a special linear amplifier instead of a general-purpose servo amplifier, it is possible to suppress the above-mentioned problems except for the occurrence of vibration caused by air pulsation, etc. Since the size, price, power supply capacity, etc. are large compared to the servo amplifier, there is a problem that it is difficult to obtain because there are few varieties because it is not designed to deal with energy saving, which is a social problem at present.

The present invention has been made in view of such problems, and an object of the present invention is to provide a stage apparatus capable of positioning at a level of 1 nm using a general-purpose servo amplifier without using a linear amplifier. And providing a stage control system including the same.

In order to solve the above-described problem, according to one aspect of the present invention, a stage device that moves a moving object to a target position, which includes a guide rail having a guide surface, and a guided surface facing the guide surface. And a slider whose movement direction is regulated by the guide rail, a drive device that generates thrust of the slider, and a position detection device that detects the position of the slider, the guide surface and the guided surface The stage device to be controlled is applied so that the lubrication state becomes a mixed lubrication state including both boundary lubrication and fluid lubrication in at least some regions and the fluid lubrication state in other regions.

According to the stage apparatus and the stage control system of the present invention, it is possible to perform positioning at a 1 nm level using a general-purpose servo amplifier without using a linear amplifier.

1 is a system configuration diagram conceptually showing an overall configuration of a stage control system while showing a front section of a stage apparatus according to an embodiment. FIG. It is the elements on larger scale of the G section in FIG. It is explanatory drawing explaining an example of the surface processing of a guide member. It is a model figure explaining the spring elastic force by a guide member. It is the graph showing the relationship between a frictional force and the air pressure of compressed air, and the semilogarithm graph showing the relationship between a friction coefficient and the air pressure of compressed air. It is a graph showing a Stribeck curve. It is a graph showing the relationship between a thrust command and the displacement of the moving direction of a slider. It is a graph showing the relationship between the thrust command and the displacement in the moving direction of the slider, and the graph showing the relationship between the thrust and the displacement in the moving direction of the slider. It is a graph showing the relationship between 3σ of the positional deviation of a slider and the air pressure of compressed air. It is a mimetic diagram showing typically about the hunting width at the time of a slider stop. It is a schematic diagram which shows typically the detection position in 10 nm step feeding operation | movement. It is a schematic diagram which shows typically about the up-down direction fluctuation | variation by the vibration at the time of the slider stop in a micro movement operation | movement. The stage control system represents a front section of a stage device according to a modification in which the guide member is also attached to the inner surface of the side plate portion of one guide rail, and the guided member is also attached to the side surface of the one insertion portion of the slider. FIG. FIG. 6 is a front sectional view of a stage apparatus according to a modification in which guide members are also attached to the inner surfaces of the side plate portions of both guide rails, and a guided member is also attached to the side surfaces of both insertion portions of the slider. FIG. 5 is a system configuration diagram conceptually showing an entire configuration of a stage control system, along with a front section of a stage apparatus according to a modification in which the air pressure of compressed air is varied by an electropneumatic regulator. FIG. 6 is a front sectional view of a stage apparatus according to a modification in which the guide rail itself is made of CFRP and the slider itself is made of scissors. It is a front sectional view of a stage device concerning a modification which provides a magnetic attraction type linear motor as a drive device. It is a front sectional view of a stage device concerning a modification which provides a magnetic attraction type linear motor as a drive device. It is a front sectional view of a stage device concerning a modification which attaches a stage device to a ceiling. It is a front sectional view of a stage device concerning a modification which attaches a stage device to a wall.

Hereinafter, an embodiment will be described with reference to the drawings.

As shown in FIG. 1, a stage control system 1 according to this embodiment supplies a controller 2, a stage device 3 that moves a moving object (not shown) to a target position, a general-purpose servo amplifier 4, and compressed air. An air source 5, four

regulators

6, 7, 8, 9 that adjust the air pressure of compressed air supplied from the air source 5, and an electromagnetic valve 10 are provided.

The stage device 3 includes a guide rail 12 having a substantially U-shape in two cross-sectional views installed in parallel so as to extend on the surface plate 11 in the front-rear direction (front side in FIG. 1-depth direction on the page). A plate-like slider 13 whose movement direction is regulated by the rail 12, a top base 15 fixed to the slider 13 via two support members 14 provided on the slider 13, and a linear that generates thrust of the slider 13 A motor 16 (drive device) and a linear scale 17 (position detection device) for detecting the position of the slider 13 are provided.

Each guide rail 12 is provided with a concave strip 18, an upper plate 12u, a lower plate 12d, and a side plate 12s. The upper plate portion 12u, the lower plate portion 12d, and the side plate portion 12s are configured as separate bodies and are connected by an appropriate connecting member (for example, a screw or an adhesive). In addition, you may comprise the upper board part 12u, the lower board part 12d, and the side board part 12s integrally. A guide member 19 is affixed to the inner surface (surface on the concave strip 18 side) of the lower plate portion 12d of each guide rail 12 with, for example, a screw or an adhesive.

The guide member 19 softens carbon fiber 191 that is a kind of fiber reinforced plastic (FRP: Fiber Reinforced Plastics) and has good lubricity, as shown in FIG. It is made of fiber reinforced plastic (CFRP: Carbon Fiber Reinforced Plastics) hardened with an epoxy resin 192 that is elastically deformed. Specifically, the guide member 19 peels off the epoxy resin 192 on the surface, and is substantially parallel to the surface inside the epoxy resin 192 (front side in FIG. 2-depth direction on the paper surface, or FIG. 2). Surface processing is performed to expose a substantially circular carbon fiber 191 layer in a cross-sectional view extending in the left-right direction), and the carbon fiber 191 layer protrudes from the surface of the epoxy resin 192 on the surface. It is in a state. In other words, the protruding portion (exposed portion) of the carbon fiber 191 from the surface of the epoxy resin 192 is a “mountain”, and the surface of the epoxy resin 192 is a “valley”. That is, the surface of the guide member 19 has a surface roughness of 0.1 to 0.3 μm level. In this example, the protruding amount of the carbon fiber 191 from the surface of the epoxy resin 192 is about 0.3 μm, and the flatness of the surface of the guide member 19 is about 3 μm.

Here, an example of surface processing of the guide member 19 will be described with reference to FIG. As shown in FIG. 3A, the guide member 19 before the surface processing is in a state where the carbon fiber 191 layer is entirely covered with the epoxy resin 192. The surface of the guide member 19 in such a state is polished using a polishing machine P (or may be lapped using a lapping machine) as shown in FIG. The epoxy resin 192 on the surface is peeled off until the layer appears on the surface. At this time, since the carbon fiber 191 is hard and the epoxy resin 192 is soft, the epoxy resin 192 is several μm below (upper surface in FIG. 3) from the upper surface (upper surface in FIG. 3) of the carbon fiber 191 located on the front surface side. The carbon fiber 191 sinks into the epoxy resin 192 and returns to its original position after the polishing is completed. Therefore, as shown in FIG. 3C, the guide member 19 after the surface processing has a state in which the layer of the carbon fiber 191 is exposed on the surface, that is, a state in which the layer of the carbon fiber 191 protrudes from the surface of the epoxy resin 192. Become.

Returning to FIG. 1, the slider 13 is provided with insertion portions 20 inserted into the concave strip portions 18 of the guide rail 12 at both ends in the width direction (left-right direction in FIG. 1). On the lower surface of each insertion portion 20 (the lower surface in FIG. 1), a guided member 21 composed of a heel that is a kind of chalcedony is affixed with, for example, a screw or an adhesive. When each insertion portion 20 is inserted into the concave portion 18 of each guide rail 12, the inner surface 12ua (surface on the concave portion 18 side) of the upper plate portion 12u of each guide rail 12 and the upper surface 20a of each insertion portion 20. (Upper surface in FIG. 1) is opposed to the vertical direction (upper-lower direction in FIG. 1), and is affixed to the surface 19a of the guide member 19 affixed to each of the guide rails 12 and to each insertion portion 20. The surface 21a of the guided member 21 is opposed in the vertical direction, and the inner surface 12sa (surface on the concave strip 18 side) of the side plate portion 12s of each guide rail 12 and the side surface 20b of each insertion portion 20 are laterally directed ( It is relative to the left-right direction in FIG.

In the present embodiment, the inner surface 12ua of the upper plate portion 12u of each guide rail 12 and the inner surface 12sa of the side plate portion 12s and the surface 19a of the guide member 19 affixed to each guide rail 12 are described in the claims. It corresponds to the guide surface, and the upper surface 20a and the side surface 20b of each insertion portion 20 of the slider 13 and the surface 21a of each guided member 21 affixed to the slider 13 correspond to the guided surface described in the claims. To do. Note that the inner surface 12ua of the upper plate portion 12u and the inner surface 12sa of the side plate portion 12s and the surface 19a of the guide member 19 affixed to the guide rail 12 correspond to the guide surface. The upper surface 20a and the side surface 20b of each insertion portion 20 of the slider 13 and the surface 21a of each guided member 21 affixed to the slider 13 are equivalent to the guided surface. 13 is equivalent to having a guided surface. Hereinafter, the inner surface 12ua of the upper plate portion 12u of the guide rail 12 and the inner surface 12sa of the side plate portion 12s and the surface 19a of the guide member 19 attached to the guide rail 12 will be collectively referred to as “guide surfaces”. The upper surface 20a and the side surface 20b of the insertion portion 20 and the surface 21a of each guided member 21 attached to the slider 13 are collectively referred to as “guided surfaces”.

In addition, the slider 13 has compressed air ejection holes 22u connected to the air source 5 via the regulator 6 at both front and rear corners (in other words, four corners of the upper surface of the slider 13) of the upper surface 20a of each insertion portion 20. Compressed air ejection holes 22d connected to the air source 5 via the solenoid valve 10 and the

regulators

7 and 8 are provided at both front and rear corners of the surface 21a of each guided member 21 in the front and rear direction of the side surface 20b of each insertion portion 20. At both corners (in other words, both front and rear corners on both sides of the slider 13), there are compressed air ejection holes 22s connected to the air source 5 via the regulator 9. The number and arrangement positions of these compressed

air ejection holes

22u, 22d, and 22s (hereinafter collectively referred to as “compressed air ejection holes 22” as appropriate) may be changed as appropriate.

The compressed air ejection hole 22u changes the lubrication state between the surfaces supplied from the air source 5 via the regulator 6 toward the inner surface 12ua of the upper plate portion 12u of the guide rail 12 facing in the vertical direction. Compressed air with a predetermined pressure adjusted to be discharged. In fluid lubrication, when the friction coefficient is μ, the friction coefficient μ is very small (for example, μ <0.01). The inner surface 12ua of the upper plate portion 12u of the guide rail 12 in the fluid lubrication state and the upper surface 20a of the insertion portion 20 of the slider 13 are not in contact with each other and all the load is borne by the static pressure of the compressed air, That is, it will be in the non-contact state which interposes an air gap.

The compressed air ejection hole 22d is a fluid lubrication pressure (relatively high pressure supplied from the air source 5 through the regulator 7 and the electromagnetic valve 10 toward the surface 19a of the guide member 19 facing in the vertical direction. The compressed air of the first pressure) or the compressed air of the mixed lubrication pressure (second pressure) which is a relatively low pressure supplied via the regulator 8 and the electromagnetic valve 10 is ejected.

The fluid lubrication pressure is the air pressure of compressed air for bringing the lubrication state between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 into the fluid lubrication state. When the surface 19a of the guide member 19 and the surface 21a of the guided member 21 that are in a fluid lubrication state are viewed at the surface roughness level, the carbon fiber 191 protrudes from the surface of the epoxy resin 192 and the epoxy resin 192. Both the surfaces do not come into contact with the surface of the guided member 22 and are in the non-contact state.

The mixed lubrication pressure is the air pressure of the compressed air for making the lubrication state between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 into a mixed lubrication state including both boundary lubrication and fluid lubrication. The linear spring characteristic in which the relationship between the thrust of the linear motor 16 and the displacement generated thereby is a straight line in the minute movement region between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 in the mixed lubrication state. Compressed air pressure adjusted to occur. In boundary lubrication, the friction coefficient μ is larger than that of fluid lubrication (for example, μ> 0.1). In mixed lubrication, the friction coefficient μ is between fluid lubrication and boundary lubrication (for example, 0.01 <μ <0.1). As shown in FIG. 2, the surface 19a of the guide member 19 and the surface 21a of the guided member 21 in the mixed lubrication state are separated from the surface of the epoxy resin 192 in the carbon fiber 191 when viewed at the surface roughness level. A part of the projecting portion adheres (contacts) to the surface of the guided member 22 and the surface of the epoxy resin 192 hardly contacts the surface of the guided member 22, and the load is mainly borne by the static pressure of the compressed air. A state (hereinafter, referred to as “fine contact state” as appropriate) occurs, and a linear spring characteristic is generated between these surfaces in a minute movement region.

That is, when the lubrication state of the surface 19a of the guide member 19 and the surface 21a of the guided member 21 becomes a mixed lubrication state, as shown in FIG. 4, it adheres to the surface 21a of the guided member 21 (FIG. 4). A soft epoxy resin 192 around the carbon fiber 191 functions as a spring element S and elastically deforms in the load direction (upward-downward direction in FIG. 4). Then, the epoxy resin 192 functions as the spring element S when the slider 13 moves in the lateral direction orthogonal to the load direction by about several tens of nanometers with the carbon fiber 191 adhered to the surface 21a of the guided member 21. A spring elastic force is generated by elastically deforming in the lateral direction. At this time, since the epoxy resin 192 exists so that a plurality of spring elements S are connected, in the minute movement region where the movement amount of the slider 13 of about several tens of nanometers is minute as described above, A linear spring characteristic is generated between the surface 19 a and the surface 21 a of the guided member 21. It should be noted that a nonlinear spring characteristic is generated between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 in a moving range where the moving amount of the slider 13 is large to some extent.

Returning to FIG. 1, the compressed air ejection holes 22 s provide a lubrication state between the surfaces supplied from the air source 5 via the regulator 9 toward the inner surface 12 sa of the side plate portion 12 s of the guide rail 12 facing in the left-right direction. Compressed air having a predetermined pressure adjusted to achieve the fluid lubrication state is ejected. The inner surface 12sa of the side plate portion 12s of the guide rail 12 in the fluid lubrication state and the side surface 20b of the insertion portion 20 of the slider 13 are not in contact with each other and are in the non-contact state.

In the stage apparatus 3 configured as described above, the vertical direction is the load of the slider 13, the air pressure of the compressed air ejected from the compressed air ejection hole 22u, and the compressed air ejected from the compressed air ejection hole 22d. The posture is maintained by a balance between the air pressure and the spring elastic force by the guide member 19. In the left-right direction, the posture is maintained by a balance between the air pressure of the compressed air ejected from the compressed air ejection hole 22s on the left side of the figure and the air pressure of the compressed air ejected from the compressed air ejection hole 22s on the right side of the figure. Then, due to the thrust generated by the linear motor 16, the slider 13 moves in the front-rear direction along the guide rail 12.

Of the movements from the starting position of the slider 13 to the target position, when moving from the starting position to a position before the target position (for example, 100 nm before the target position), that is, when moving to the vicinity of the target position, The lubrication state of the guide surface of the guide rail 12 and the guided surface of the slider 13 is controlled by the air pressure of the compressed air supplied to the compressed

air ejection holes

22u, 22d, and 22s so that the fluid lubrication state is achieved in all regions. The Therefore, when the slider 13 is moved to the vicinity of the target position, the guide surface of each guide rail 12 and the guided surface of the slider 13 are all in a non-contact state.

On the other hand, when performing minute movement from the vicinity of the target position to the target position, that is, positioning the slider 13 in the vicinity of the target position, the lubrication state of the guide surfaces of the guide rails 12 and the guided surfaces of the sliders 13 is at least partially. It is controlled by the air pressure of the compressed air supplied to the compressed

air ejection holes

22u, 22d, and 22s so that the mixed lubrication state is obtained in this region and the fluid lubrication state is obtained in the other regions. Specifically, a mixed lubrication state occurs between the surface 19 a of each guide member 19 and the surface 21 a of each guided member 21, and the inner surface 12 ua of the upper plate portion 12 u of each guide rail 12 and each insertion portion 20 of the slider 13. Between each of the guide rails 12 and the inner surfaces 12sa of the side plate portions 12s of the guide rails 12 and the side surfaces 20b of the insertion portions 20 of the sliders 13, and the respective guide rails 12 in a mixed lubrication state. The linear spring characteristic is controlled in the minute movement region between the guide surface of the slider 13 and the guided surface of the slider 13. Therefore, when positioning the slider 13 in the vicinity of the target position, the surface 19 a of the guide member 19 affixed to the inner surface 12 da of the lower plate portion 12 d of each guide rail 12 and the lower surface 20 c of each insertion portion 20 of the slider 13. The adhered surface 21a of the guided member 21 is in a fine contact state, and the other guide surfaces and the guided surface are in a non-contact state.

Further, the moving direction of the slider 13, that is, the position in the front-rear direction is detected by the linear scale 17.

The servo amplifier 4 receives a detection signal based on the position detection result of the slider 13 from the linear scale 17, and supplies a drive current to the linear motor 16 based on a deviation (position deviation) between the detection signal and a movement command from the controller 2. The position of the slider 13 is controlled by outputting. At this time, the servo amplifier 4 determines whether or not the slider 13 has approached the vicinity of the target position by determining whether or not the position deviation has become below a predetermined level set in advance. When the position deviation is equal to or less than a predetermined level, it is determined that the slider 13 has approached the vicinity of the target position, and the controller 2 outputs a switching command to the effect that the compressed air is the compressed air of the mixed lubrication pressure. Note that the servo amplifier 4 may output a switching command to the effect that the compressed air is compressed air of mixed lubrication pressure.

The regulator 6 adjusts the air pressure of the compressed air supplied to the compressed air ejection hole 22u of the slider 13. The compressed air whose air pressure is adjusted by the regulator 6 is supplied to the compressed air ejection hole 22u at the predetermined pressure. The regulator 7 adjusts the air pressure of the compressed air supplied to the compressed air ejection hole 22 d of the slider 13. The compressed air whose air pressure is adjusted by the regulator 7 is supplied to the compressed air ejection hole 22d through the electromagnetic valve 10 at the above-described fluid lubrication pressure. The regulator 8 adjusts the air pressure of the compressed air supplied to the compressed air ejection hole 22 d of the slider 13. The compressed air whose air pressure has been adjusted by the regulator 8 is supplied to the compressed air ejection hole 22d through the electromagnetic valve 10 at the mixed lubrication pressure. The regulator 9 adjusts the air pressure of the compressed air supplied to the compressed air ejection hole 22 s of the slider 13. The compressed air whose air pressure is adjusted by the regulator 9 is supplied to the compressed air ejection hole 22s at the predetermined pressure.

The solenoid valve 10 switches the opening and closing of the two ports on the basis of a switching command from the controller 2, whereby the compressed air supplied to the compressed air ejection hole 22 d of the slider 13 is adjusted for air pressure by the regulator 7. The pressure is switched between the compressed air and the compressed air having the pressure for mixed lubrication whose air pressure is adjusted by the regulator 8. Specifically, when the slider 13 is moved to the vicinity of the target position, the controller 2 uses the compressed air as the compressed air for the fluid lubrication pressure at substantially the same timing as when the movement command is output. A switching command is output. Then, based on this switching command, the solenoid valve 10 opens the port on the regulator 7 side and closes the port on the regulator 8 side, so that the compressed air supplied to the compressed air ejection hole 22d is compressed to the fluid lubrication pressure. Switch to air. On the other hand, when positioning the slider 13 in the vicinity of the target position, if the controller 2 determines that the slider 13 has approached the vicinity of the target position by the servo amplifier 4, the compressed air is compressed into the compressed lubrication pressure. A switching command to the effect is output. Then, based on this switching command, the solenoid valve 10 closes the regulator 7 side port and opens the regulator 8 side port, thereby compressing the compressed air supplied to the compressed air ejection hole 22d to the pressure of the mixed lubrication pressure. Switch to air.

In the present embodiment, the compressed air is supplied to the compressed

air ejection holes

22u, 22d, and 22s of the slider 13, and the guide surface of each guide rail 12 is supplied by the compressed air pressure supplied to the compressed

air ejection holes

22u, 22d, and 22s. And the lubrication state between the slider 13 and the guided surface of the slider 13 are controlled. Specifically, the air pressure of the compressed air supplied from the air source 5 is adjusted by the

regulators

6, 7, 8, and 9, and the compressed air is adjusted by the air pressure adjusted by the

regulators

6, 7, 8, and 9. 13 Compressed air supplied to the compressed air ejection holes 22d by switching the opening and closing of the two ports of the solenoid valve 10 is switched to the regulator 7 By switching to compressed air of fluid lubrication pressure whose air pressure is adjusted in (1) or to compressed air of mixed lubrication pressure whose air pressure is adjusted by the regulator 8). Control the lubrication with the surface. In the present embodiment, the air source 5 and the

regulators

6, 7, 8, and 9 correspond to the air supply device described in the claims.

In the stage control system 1 configured as described above, the compressed air supplied to the compressed air ejection hole 22u among the compressed

air ejection holes

22u, 22d, and 22s of the slider 13 has its air pressure adjusted by the regulator 6. The compressed air fixed to the compressed air of a predetermined pressure and supplied to the compressed air ejection hole 22s is fixed to the compressed air of the predetermined pressure whose air pressure is adjusted by the regulator 9, but is supplied to the compressed air ejection hole 22d. The compressed air is switched between when the slider 13 moves to the vicinity of the target position and when the slider 13 is positioned near the target position. That is, when the slider 13 is moved to the vicinity of the target position, the controller 2 outputs a switching command to the compressed air jet hole 22d to the compressed air jet hole 22d to output the compressed air to the compressed air of the fluid lubrication pressure. The supplied compressed air is switched to compressed air having a fluid lubrication pressure whose air pressure is adjusted by the regulator 7. As a result, compressed air with fluid lubrication pressure is supplied to the compressed air ejection hole 22d via the electromagnetic valve 10, and the surface 19a of each guide member 19 and the surface 21a of each guided member 21 are in a fluid lubrication state (non-contact state). ) On the other hand, when positioning the slider 13 in the vicinity of the target position, the controller 2 outputs a switching command to the compressed air to the compressed air ejection hole 22d to the effect that the compressed air is compressed to the mixed lubrication pressure. The compressed air to be used is switched to the compressed air of the mixed lubrication pressure whose air pressure is adjusted by the regulator 8. As a result, compressed air with mixed lubrication pressure is supplied to the compressed air ejection holes 22d via the electromagnetic valve 10, and the surface 19a of each guide member 19 and the surface 21a of each guided member 21 are in a mixed lubrication state (fine contact state). ), And a linear spring characteristic is generated between these surfaces in a minute movement region.

Regarding the present embodiment described above, the results of examination by the inventors will be described.

(A) Study for controlling the lubrication state of opposing surfaces by the air pressure of compressed air First, in the stage device 3 according to the present embodiment, the surface 19a of the guide member 19 of the guide rail 12 and the guided member of the slider 13 The result of examination for controlling the lubrication state with the surface 21a of 21 by the air pressure of the compressed air will be described.

Here, first, the relationship between the friction force between the surface of the guide member 19 and the surface of the guided member 21 and the air pressure of the compressed air was measured. That is, the air pressure of the compressed air can be adjusted in units of 0.001 [MPa] by using the digital pressure switch ISE30A (manufactured by SMC Corporation), so the air pressure of the compressed air is changed from 0.07 [MPa] to 0. The frictional force generated between the surface of the guide member 19 and the surface of the guided member 21 at each air pressure was measured by changing the pressure in increments of 0.005 [MPa] to 180 [MPa]. The frictional force was measured using a force gauge AD-4932A-50N (manufactured by A & D Co., Ltd.). With the air pressure of the compressed air adjusted and the servo amplifier 4 that drives the linear motor 16 servo-off, the slider 13 was pushed with a force gauge from the lateral direction, and the frictional force generated until it moved about 100 [μm] was recorded. . In order to perform measurement at the same position during measurement, the origin return was performed for the slider 13 for each measurement. FIG. 5A shows the measurement result. In FIG. 5A, the vertical axis represents the frictional force [N], and the horizontal axis represents the compressed air pressure [MPa].

Next, using the measurement results, the relationship between the friction coefficient μ between the surface of the guide member 19 and the surface of the guided member 21 and the air pressure of the compressed air was derived. The friction coefficient μ was estimated using the frictional force and the mass of the mover. FIG. 5B shows the derivation result. In FIG.5 (b), the vertical axis | shaft is set to the friction coefficient (micro | micron | mu), and the horizontal axis | shaft is shown by the semi-logarithmic graph as the air pressure [MPa] of compressed air.

5 (a) and 5 (b) revealed the following. That is, if the compressed air pressure is less than 0.135 [MPa], the frictional force increases, but if the compressed air pressure is 0.140 [MPa] or higher, the frictional force is around 0.001 [N]. There was little change. The frictional force changed in the range from 0 [N] to 50 [N], and the friction coefficient μ changed in the range of about 0.1 to 0.001.

Therefore, in this measurement, the frictional force becomes very small in the vicinity of 0.135 [MPa], and the frictional force hardly changes even when the air pressure of the compressed air is further increased. Therefore, it is considered that the surface of the guide member 19 and the surface of the guided member 21 are in a fluid lubrication state (non-contact state).

Also, the curve representing the relationship between the friction coefficient μ and the compressed air pressure shown in FIG. 5B tended to resemble the Stribeck curve. FIG. 6 shows a general Stribeck curve (curved line) with the vertical axis representing the friction coefficient μ and the horizontal axis representing the dimensionless number of bearing characteristics. The Stribeck curve is a curve showing the relationship between the friction coefficient μ and the number of bearing characteristics, and is a curve based on accurate measured values. The number of bearing characteristics is represented by (viscosity η × speed q) / load W. The Stribeck curve is for explaining the characteristics of a bearing lubricated with oil, but can also be used in the same way when explaining the characteristics of an aerostatic bearing.

At this time, for example, based on “Tribology Learned from the Basics” by Hiroshi Hashimoto (Morikita Publishing Co., Ltd., 2006, p93-p95), the friction coefficient μ between the faces and the film with the number of bearing characteristics as a parameter. A graph of the thickness ratio Λ can be drawn. That is, the relationship between the load W of the aerostatic bearing and the gap h between the opposing surfaces is based on, for example, “The Story of Friction” by Kuichiro Tanaka (Japanese Standards Association, 1985, p189-p199).
W = 3qηL (b + 1/2) / h ³ (Expression 1)
It is expressed. In the above (Formula 1), b and L are constants depending on the structure. Moreover, when the relationship between the load W of the aerostatic bearing and the gap h is expressed using a constant K, the above (Equation 1) is
W = Kqη / h ³ (Expression 2)
It is expressed. Therefore, the number of bearing characteristics = (viscosity η × speed q) / load W is obtained by modifying the above (Equation 2),
ηq / W = h ³ / K (Formula 3)
It is expressed. As a result, the Stribeck curve can be represented by the gap h with the number of bearing characteristics as a parameter. That is, if the Stribeck curve is fs (ηq / W),
fs (ηq / W) = fs (h ³ / K) (Formula 4)
Therefore, by calculating the above (Formula 4), the Stribeck curve can be shown with the horizontal axis as the gap h.

Here, considering the film thickness ratio Λ, the opposing surfaces are A and B, the mean square surface roughness (distance) of surface A is σA, and the mean square surface roughness (distance) of surface B is σB. Then, the mean square surface roughness σ of these opposing surfaces A and B is
σ = SQRT (σA ² + σB ² ) (Formula 5)
It is expressed. And the film thickness ratio Λ is
Λ = h / σ (Formula 6)
Is defined. Thus, since the gap h can be considered as the distance between the average position of the roughness of the surface A and the average position of the roughness of the surface B, the film thickness ratio Λ It can be said that it is expressed in multiples.

Thus, by calculating the number of bearing characteristics as a parameter, draw a graph of the friction coefficient μ (curved line) and the film thickness ratio Λ (curved line) between the opposing surfaces as shown in FIG. Can do. Here, when the film thickness ratio Λ is 3 or more, the average position between the surface A and the surface B is separated by 3σ or more of the roughness, and the surface A and the surface B are completely separated from each other. The fluid lubrication state (non-contact state), that is, a state where the load between the surface A and the surface B is borne only by the static pressure of the compressed air. When the film thickness ratio Λ is 1 to 3, the mixed lubrication state (fine contact state) in which the surface A and the surface B are in minute contact, that is, the load between the surface A and the surface B is applied to the surface. It becomes a state to bear both by the contact at the roughness level and by the static pressure of the compressed air. Therefore, by adjusting the air pressure of the compressed air, the flying height of the slider 13, that is, the gap h between the surface 19 a of the guide member 19 and the surface 21 a of the guided member 21 can be adjusted. Since it can be adjusted, it is considered that the lubrication state between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 can be controlled.

Further, in this measurement, from a comparison result between a curve representing the relationship between the friction coefficient μ and the compressed air pressure shown in FIG. It is considered that the surface 19a of the guide member 19 and the surface 21a of the guided member 21 are in a mixed lubrication state (fine contact state) in a range from 1 to 0.140 [MPa].

(B) Examination of whether non-linear spring characteristics are generated between the opposing surfaces Next, in the stage device 3 according to the present embodiment, the surface 19a of the guide member 19 of the guide rail 12 and the guided member of the slider 13 The examination result about whether the nonlinear spring characteristic has arisen between the surface 21a of the member 21 is demonstrated.

Here, 0.117 out of the range of compressed air pressure in which the lubrication state between the surface of the guide member 19 and the surface of the guided member 21 is considered to be a mixed lubrication state based on the measurement result of the examination of (A) above. At [MPa], 0.118 [MPa], and 0.119 [MPa], the slider 13 is moved from the position of displacement 0 [nm] in both the positive direction (for example, forward) and the negative direction (for example, backward) in the moving direction. A fixed size was fed in increments of 5 [nm] with a width of 50 [nm]. Then, the thrust command [%] at each displacement was measured and recorded. 7A shows the measurement result at 0.117 [MPa], FIG. 7B shows the measurement result at 0.118 [MPa], and FIG. 7C shows 0.119 [MPa]. The measurement result in [MPa] is shown. 7 (a) to 7 (c), the vertical axis is the thrust command [%], and the horizontal axis is the displacement [nm] in the moving direction of the slider 13, and measurements are performed in the order of the arrows in each figure. The measurement results are shown.

7 (a) to 7 (c) revealed the following. That is, the relationship between the thrust command and the displacement of the slider 13 shown in FIGS. 7A to 7C shows a hysteresis characteristic. Further, as the air pressure of the compressed air is increased, the vertical width (thrust command direction) of the hysteresis curve (hysteresis curve) representing the relationship between the thrust command and the displacement of the slider 13 becomes smaller and flat, and the value is oscillatory. It became.

Therefore, in this measurement, since the curve representing the relationship between the thrust command and the displacement of the slider 13 draws a hysteresis curve, the air pressure of the compressed air is 0.117 [MPa], 0.118 [MPa], 0.119. When it is [MPa], it is considered that nonlinear spring characteristics are generated between the surface of the guide member 19 and the surface of the guided member 21. When the compressed air pressure was 0.117 [MPa], the most beautiful hysteresis curve was obtained.

(C) Examination as to whether linear spring characteristics are generated in the minute movement region between the opposing surfaces Next, in the stage device 3 according to the present embodiment, the guide member of the guide rail 12 in the mixed lubrication state A description will be given of the examination results as to whether or not a linear spring characteristic is generated in the minute movement region between the surface 19a of 19 and the surface 21a of the guided member 21 of the slider 13.

Here, first, out of the range of compressed air pressure in which the lubrication state between the surface of the guide member 19 and the surface of the guided member 21 is considered to be a mixed lubrication state based on the measurement result by the examination of (A) above, At 0.117 [MPa], which is the hysteresis curve with the cleanest shape in the measurement result by the examination of (B), the slider 13 is moved from the position of displacement 0 [nm] in the positive direction (for example, forward) and negative direction (for example, forward). For example, the sheet was fed at a fixed rate in increments of 1 [nm] with a width of 10 [nm] in both directions. Then, the thrust command [%] at each displacement was measured and recorded. FIG. 8A shows the measurement result. In FIG. 8A, the vertical axis is the thrust command [%] and the horizontal axis is the displacement [nm] in the moving direction of the slider 13, and measurement is performed from the measurement start point to the measurement end point in the order of the arrows in the figure. The measurement results are shown.

Next, a graph in which the thrust command [%] in the measurement result is converted to the thrust [N] was derived. FIG. 8B shows the derivation result. In FIG. 8B, the vertical axis represents thrust [N], and the horizontal axis represents displacement [nm] in the moving direction of the slider 13.

8 (a) and 8 (b) revealed the following. That is, when the measurement result was plotted on a graph, it was almost a straight line. In addition, after moving 10 [nm] in the positive direction from the measurement start point, moving 20 [nm] in the negative direction, and then moving further 10 [nm] in the positive direction, the thrust command becomes the measurement start point at the measurement end point. It showed a close value. Further, as a result of obtaining an approximate function as a linear function by the least square method from the relationship between the thrust and the displacement of the slider 13 shown in FIG. 8B, a function y = 0.4155x + 5.3366 was obtained.

Therefore, in this measurement, since the relationship between the thrust command (thrust) and the displacement of the slider 13 is linear, when the compressed air pressure is 0.117 [MPa], the guide member is in a mixed lubrication state. It is considered that a linear spring characteristic is generated in the minute movement region between the surface 19 and the surface of the guided member 21. Further, when the approximate function is obtained as a linear function by the least square method from the relationship between the thrust and the displacement of the slider 13, the slope is 0.4155, so the spring constant is 0.4155 × 10 ⁹ [N / m]. It became.

(D) Examination of performance in operation in minute movement region Next, in the stage apparatus 3 according to the present embodiment, a study result on performance in operation in the minute movement region will be described.

Here, after the positioning operation of the slider 13 is performed and the positioning of the slider 13 is completed, the deviation (positional deviation) between the detection signal from the linear scale 17 and the movement command from the controller 2 should be zero, but in reality it is a number. Since minute vibration (vibration at the time of stoppage) remains at about the pulse, the standard deviation σ is calculated by observing the position deviation signal that is oscillating for a certain period of time and performing statistical calculations, and the standard deviation σ is tripled. 3σ (hereinafter referred to as “3σ of position deviation”) was used to evaluate the performance in the operation in the minute movement region as the range of variation.

That is, the relationship between the positional deviation 3σ of the slider 13 and the compressed air pressure was measured. The air pressure of the compressed air can be adjusted in units of 0.001 [MPa] by using a digital pressure switch ISE30A (manufactured by SMC Corporation). The position deviation 3σ of the slider 13 is obtained on the controller 2 by a ladder program. In the controller 2, since the position command unit is set to [μm] and the number of digits after the decimal point is set to 3, position information in units of 1 [μm] can be acquired. In a state where the servo amplifier 4 that drives the linear motor 16 is in a servo-on state, position deviation information is fetched every H scan (high-speed scan), and 3σ of the position deviation is derived using a function for obtaining the standard deviation on the controller 2. Since the ladder program is configured so that H scan is set to 0.5 [ms] and 3σ is calculated every 10 [s], the number of position deviation samples is 20000. This time, when the air pressure of the compressed air is increased from 0.130 [MPa] to 0.194 [MPa] in increments of 0.001 [MPa], the change in the positional deviation of the slider 13 at each air pressure is 3σ. Was measured. When the position deviation of the slider 13 is used for the calculation of 3σ of the position deviation while the compressed air pressure is being changed, it is considered that an accurate value cannot be measured. s] The data was recorded after the lapse of the time. FIG. 9 shows the measurement results. 9A and 9B, the vertical axis is 3σ [nm] of the positional deviation of the slider 13, the horizontal axis is the air pressure [MPa] of compressed air, and in FIG. 9A, the positional deviation is 3σ. Is in the range of 0 [nm] to 1200 [nm], and in FIG. 9B, 3σ of the positional deviation is shown in the range of 0 [nm] to 20 [nm].

9 (a) and 9 (b) revealed the following. That is, when the air pressure of the compressed air is in the range of 0.130 [MPa] to 0.171 [MPa], the 3σ of the positional deviation of the slider 13 is stabilized between about 8 to 13 [nm]. When the compressed air pressure is in the range of 0.171 [MPa] to 0.194 [MPa], the positional deviation 3σ of the slider 13 is between 100 [nm] and 200 [nm] as the compressed air pressure increases. Although gradually increasing, 3σ of the positional deviation of the slider 13 suddenly increased when the compressed air pressure reached 0.194 [MPa]. Note that the surface 19a of the guide member 19 of the guide rail 12 and the surface of the guided member 21 of the slider 13 which were out of the measurement range in this measurement, but in a mixed lubrication state based on the measurement result of the study of (C) above. Similarly, in the case of 0.117 [MPa], which is the air pressure of the compressed air that seems to have been able to generate the linear spring characteristic in the minute movement region, the positional deviation 3σ of the slider 13 is approximately 8 to 13 It is considered to be stable between [nm].

In the present embodiment, the surface 19a of the guide member 19 is controlled by controlling the air pressure of the compressed air supplied to the compressed air ejection hole 22d of the slider 13 on the basis of the characteristics derived from the examinations (A) to (D). And the surface 21a of the guided member 21 are controlled to a desired lubrication state, and in a minute movement region between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 in the mixed lubrication state. Control to produce linear spring characteristics. As an example, since the curve representing the relationship between the friction coefficient μ and the air pressure of the compressed air shows a tendency similar to the Stribeck curve, the first inflection point appearing in the curve (the side where the air pressure is small). Is considered as the boundary between boundary lubrication and mixed lubrication, and the second inflection point (air pressure side) is considered as the boundary between mixed lubrication and fluid lubrication, and the above fluid lubrication pressure is determined from the second inflection point. A large air pressure is determined, and the pressure for mixed lubrication is determined to be an air pressure between two inflection points. As another example, based on the relationship between the gap h and the film thickness ratio Λ, the fluid lubrication pressure is determined as an air pressure corresponding to the gap h where the film thickness ratio Λ is 3 or more, and the mixed lubrication pressure is set as the film. The air pressure corresponding to the gap h where the thickness ratio Λ is 1 to 3 is determined. Then, the air pressure of the compressed air is adjusted by the regulator 7, and the compressed air is supplied to the compressed air ejection hole 22d through the electromagnetic valve 10 at the determined fluid lubrication pressure, so that the surface 19a of the guide member 19 and the guided member The lubrication state with the surface 21a of the member 21 is controlled to be a fluid lubrication state. Further, the air pressure of the compressed air is adjusted by the regulator 8, and the compressed air is supplied to the compressed air ejection hole 22 d through the electromagnetic valve 10 at the determined mixed lubrication pressure, so that the surface 19 a of the guide member 19 and the guided member The lubrication state with the surface 21a of the member 21 is set to a mixed lubrication state, and control is performed so that a linear spring characteristic is generated between these surfaces in a minute movement region.

As described above, in the stage control system 1 according to this embodiment, the guide surface of each guide rail 12 and the guided surface of the slider 13 are opposed to each other, and the slider 13 is positioned in the vicinity of the target position. In this case, the lubrication state between these surfaces becomes a mixed lubrication state between the surface 19a of each guide member 19 and the surface 21a of each guided member 21, and the inner surface 12ua of the upper plate portion 12u of each guide rail 12 and the slider. 13 so as to be in a fluid lubrication state between the top surface 20a of each insertion portion 20 and between the inner surface 12sa of the side plate portion 12s of each guide rail 12 and the side surface 20b of each insertion portion 20 of the slider 13. Is done.

Here, in a stage device using a rolling bearing, a method of positioning on the order of 1 nm using linear spring characteristics in a minute movement region of the rolling bearing is, for example, “Nonlinear characteristics of the mechanism and its control” by Shigeru Futami. The Journal of the Robotics Society of Japan, Vol 9, No. 4, pp. 439-497, 1991). In the stage device (single-axis stage mechanism) described in this document, a synchronous AC linear motor is used as a drive device for a slider (movable table). The slider is a linear motion type rolling bearing (rolling) using a ball. Guide). In a minute movement region where the slider movement amount is approximately 100 [nm] or less, a linear spring characteristic due to elastic deformation of the ball of the rolling bearing is exhibited, and in a slider movement amount range of 100 [nm] to 100 [μm]. The non-linear spring characteristic is shown. In addition, the spring constant in a minute movement region where the moving amount of the slider is approximately 100 [nm] or less is about 8.5 [N / μm].

Here, the thrust control resolution in a general-purpose servo amplifier is examined in a stage apparatus using a linear motor similar to the stage apparatus described in the above document. For example, when the mass of the movable part of the slider is 40 [kg] and the acceleration is about 1 [G], the maximum thrust of the linear motor is about 400 [N]. Assuming that the spring constant is about the same as that in the above document, the spring constant in the minute movement region where the moving amount of the slider is approximately 100 [nm] or less is about 8.5 [N / μm]. That is, the reaction force of the spring necessary for the slider to be displaced by 1 [nm] is 0.0085 [N]. If this is the minimum resolution of the thrust, the maximum thrust is
400 / 0.0085 ≒ 47059
Thus, it is understood that a resolution of about 16 bits (= 65536) is necessary. In a general-purpose servo amplifier, the current detection resolution is about 11 bits (= 2048), so the resolution of thrust is about the same, and the minimum resolution of thrust is
400/2048 ≒ 0.2 [N]
It becomes. If you simply think that the slider is displaced,
0.2 / 0.0085≈24 [nm]
Thus, the control is performed every about 24 [nm]. For this reason, when using a general-purpose servo amplifier that is easy to obtain and maintain but has a low current control resolution, the positioning accuracy is only a submicron (0.1 μm = 100 nm) level, and positioning is performed on the order of 1 nm. Therefore, it was necessary to use a linear amplifier excellent in current control linearity capable of controlling the thrust very finely.

On the other hand, in the present embodiment, the spring constant in the minute movement region can be set to 0.4155 × 10 ⁹ [N / m] ≈420 [N / μm] in the measurement based on the examination of (C). . That is, when the spring constant in the minute movement region in this embodiment is compared with the spring constant in the minute movement region in the above document,
420 / 8.5 ≒ 50
Thus, the spring constant in the minute movement region in this embodiment is about 50 times larger than the spring constant in the minute movement region in the above document. When the spring constant in the minute movement region is 420 [N / μm], the reaction force of the spring necessary for the slider 13 to be displaced by 1 [nm] is 0.42 [N]. Assuming that the slider 13 is simply displaced with a minimum thrust resolution of 0.2 [N] in the servo amplifier, the amount of displacement is
0.2 / 0.42≈0.48 [nm]
It becomes. Accordingly, even if the general-purpose servo amplifier 4 is used without using the linear amplifier, the surface 19a of each guide member 19 and the surface 21a of each guided member 21 that are in the mixed lubrication state are configured by appropriate materials, These surfaces are brought into a minute contact state to generate a spring elastic force, and it is possible to perform ultra-precise positioning at the 1 nm level using linear spring characteristics in a minute movement region. As a result, a linear proportional operation without hysteresis can be performed, and a back-and-forth backlash and a lack of movement amount with respect to a movement command can be prevented.

Further, by making the lubrication state of the surface 19a of each guide member 19 and the surface 21a of each guided member 21 into a mixed lubrication state, minute friction is generated between the slider 13 and each guide rail 12, Inertial force can be suppressed. As a result, even when the general-purpose servo amplifier 4 is used, it is possible to suppress the oscillating state by dulling the ripple when the positioning is stopped (during servo lock), and to minimize the hunting width. FIG. 10 is a schematic diagram schematically showing the hunting width when the slider is stopped. FIG. 10A is a schematic view of a general linear guide type stage apparatus, and FIG. 10B is a schematic view of a general air guide type stage apparatus. ) Is a schematic diagram of the stage apparatus 3 according to the present embodiment. In the general linear guide type stage apparatus shown in FIG. 10A, the hunting width when the slider is stopped is ± 5 [pulse] or more. In the general air guide type stage apparatus shown in FIG. The hunting width when the slider is stopped is considered to be ± 30 [pulse] or more. On the other hand, in the stage apparatus 3 according to this embodiment shown in FIG. 10C, the hunting width when the slider 13 is stopped is considered to be ± 2 to 3 [pulse]. It is thought that it can be minimized.

Further, since the slider 13 is not completely lifted in the mixed lubrication state, vibration caused by the pulsation of the compressed air from the air source 5 and the compression and expansion of the compressed air itself can be suppressed. FIG. 11 is a schematic diagram schematically showing the variation of the detection position in the 10 nm step feed operation. FIG. 11A is a schematic view of a general linear guide type stage apparatus, and FIG. 11B is a schematic view of a general air guide type stage apparatus. ) Is a schematic diagram of the stage apparatus 3 according to the present embodiment. In the general linear guide type stage apparatus shown in FIG. 11A, the variation of the detection position in the 10 nm step feed operation is about ± 5 [nm], and the general air guide type shown in FIG. In the stage apparatus, the variation of the detection position in the 10 nm step feed operation is considered to be ± 10 [nm] or more. On the other hand, in the stage apparatus 3 according to the present embodiment shown in FIG. 11C, the variation of the detection position in the 10 nm step feed operation is considered to be ± 2 to 3 [nm]. It is thought that the vibration of the can be suppressed. FIG. 12 is a schematic diagram schematically showing the vertical fluctuation caused by the vibration when the slider is stopped in the minute movement operation. FIG. 12A is a schematic view of a general linear guide type stage apparatus, and FIG. 12B is a schematic view of a general air guide type stage apparatus. ) Is a schematic diagram of the stage apparatus 3 according to the present embodiment. In the general linear guide type stage apparatus shown in FIG. 12A, the vertical fluctuation due to the vibration when the slider is stopped in the minute movement operation is about ± 5 [nm], which is generally shown in FIG. In such an air guide type stage apparatus, it is considered that the vertical fluctuation due to vibration when the slider is stopped in a minute movement operation is ± 30 [nm] or more. On the other hand, in the stage apparatus 3 according to the present embodiment shown in FIG. 12C, the vertical fluctuation due to vibration when the slider 13 is stopped in the minute movement operation is considered to be ± 2 to 3 [nm]. It is considered that the fluctuation in the vertical direction when the slider 13 is stopped in the minute movement operation can be suppressed.

Therefore, it is possible to perform positioning on the order of 1 nm using the general-purpose servo amplifier 4 without using a linear amplifier.

In the present embodiment, the slider 13 has the compressed

air ejection holes

22u, 22d, 22s for ejecting the compressed air toward the guide surface of the guide rail 12 on the guided surface. Then, a relatively low pressure of compressed air for mixed lubrication is ejected from the compressed air ejection hole 22 on the guided surface to be in the mixed lubrication state, and from the compressed air ejection hole 22 on the guided surface to be in the fluid lubrication state. The state of lubrication between the guide surface and the guided surface is controlled by the air pressure of the compressed air, such as by jetting compressed air having a relatively high pressure for fluid lubrication. Accordingly, the lubrication state between the guide surface and the guided surface can be controlled to a desired lubrication state, and the lubrication state can be switched by changing the air pressure of the compressed air during driving. Furthermore, the air pressure can be adjusted so that a linear spring characteristic is generated between the surface 19a of the guide member 19 in the mixed lubrication state and the surface 21a of the guided member 21.

In this embodiment, particularly, the air pressure of the compressed air is controlled so that a linear spring characteristic is generated between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 in the mixed lubrication state. By finely adjusting the air pressure of the compressed air, the reaction force of the linear spring in the minute movement region can be adjusted within the current control range of the general-purpose servo amplifier 4. As a result, the thrust that balances the reaction force of the linear spring in the minute movement region can be controlled even on the order of 1 nm, and fluctuations when the slider 13 is stopped can be greatly reduced, so that vibration when the slider 13 is stopped can be greatly suppressed. Thereby, ultra-precise positioning at the 1 nm level can be performed using the linear spring characteristic in the minute movement region. As a result, a linear proportional operation without hysteresis can be performed, and a back-and-forth backlash and a lack of movement amount with respect to a movement command can be prevented. Further, since the linear spring characteristic is generated, even if a minute reversing operation is performed, it is mechanically continuous and the occurrence of stick-slip can be suppressed. As a result, it is possible to improve the accuracy of the extremely low speed constant feed and the accuracy of the positioning operation. Further, by adjusting the air pressure, the gap between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 (the flying height of the slider 13) is changed, and the dynamic friction coefficient between them is changed (adhesion described above). And the strength of the linear spring in the minute movement region (static friction region) can be varied (the number of the linear springs to be adhered can be varied). As a result, the spring constant of the linear spring characteristics can be adjusted according to the device configuration, etc., so the strength of the linear spring in the minute movement region is adjusted according to the minute current control range and required performance of the servo amplifier. And the degree of design freedom can be improved. For example, when a general-purpose servo amplifier (such as a servo amplifier of PWM control system) is used, the sub-nm (0.1 nm = 100 pm) level is stopped when a high-resolution servo amplifier (such as a linear amplifier) is used. There is a possibility of safety.

In the present embodiment, in particular, the guide member 19 is composed of CFRP which is a kind of FRP. By configuring the guide member 19 with FRP, the strength of the guide member 19 can be increased. Moreover, since the temperature coefficient of the epoxy resin 192 is positive and the temperature coefficient of the carbon fiber 191 is negative, the temperature coefficient of the guide member 19 can be kept small by configuring the guide member 19 with CFRP. Thereby, since the deformation of the guide member 19 due to a temperature change can be reduced, the surface accuracy of the surface 19a of the guide member 19 can be improved. As a result, posture accuracy such as pitching, yawing and straightness in the operating state of the slider 13 can be improved.

Further, in the present embodiment, the guide member 19 is particularly subjected to surface processing for peeling the surface epoxy resin 192 and exposing the carbon fiber 191 layer (see FIG. 3). That is, in the guide member 19, a part of the protruding portion of the carbon fiber 191 exposed from the epoxy resin 192 adheres to the surface 21 a of the guided member 21. At this time, since the epoxy resin 192 holding the carbon fiber 191 is softer than the carbon fiber 191, if the carbon fiber 191 adhered to the surface 21a of the guided member 21 moves laterally by about several tens of nm, The epoxy resin 192 is elastically deformed to generate a spring elastic force. As described above, the spring constant in the minute movement region in the present embodiment is about 50 times larger than the spring constant in the minute movement region in the above-described document, and therefore, the surface 19a of the guide member 19 and the surface 21a of the guided member 21. By generating a spring elastic force between the two, a 1 nm level ultra-precise positioning can be performed using linear spring characteristics. Further, when the supply of compressed air is stopped, it is considered that the carbon fiber 191 sinks due to the elastic deformation of the epoxy resin 192 while the carbon fiber 191 of the guide member 19 and the surface 21a of the guided member 21 are adhered. . Therefore, even if the slider 13 is repeatedly raised and lowered by the supply / stop of compressed air, the original state can be restored within the elastic deformation range of the epoxy resin 192. ) Can be reduced. Further, since the carbon fiber 191 is hard and has good lubricity, it is difficult to wear even if it is in contact with the surface 21a of the guided member 21, and the epoxy resin 192 is almost in contact with the surface 21a of the guided member 21 in the mixed lubrication state. Therefore, the resin wear hardly occurs. Therefore, wear and dust generation of the guide rail 12 can be prevented. Furthermore, a part of the protruding portion of the carbon fiber 191 adheres to the surface 21a of the guided member 21, and the guide member 19 and the guided member 21 are connected to each other, so that minute vibrations are vertically generated therebetween. Even if it occurs, the distance between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 can be kept constant. Thereby, the vibration of the up-down direction between the guide member 19 and the to-be-guided member 21 can be suppressed significantly.

Further, particularly in the present embodiment, the guided member 21 is composed of a heel that is a kind of chalcedony. Thereby, the to-be-guided member 21 can be comprised with a hard material, and wear can be decreased. In addition, since chalcedony is a polycrystalline mineral in which very fine crystals of quartz are densely solidified, it has the advantage of being easy to process because it has less direction than single crystal materials such as quartz. As a result, it becomes easy to process pores such as the compressed air ejection holes 22 of the guided member 21 and to polish the surface. Amber is a material that may be used for chemical mortar, balance fulcrum, ashtray, table clock, flint, etc. by utilizing its high hardness with Mohs hardness of 6.5-7. By configuring the guided member 21 with this scissors, wear can be further reduced in terms of hardness and friction coefficient.

In addition, in the present embodiment, the following effects can be obtained. That is, generally, when the guide surface of the guide rail and the guided surface of the slider come into contact with each other during the movement, these surfaces wear, and thus the clearance between the guide rail and the slider during movement (the amount of flying of the slider) is to some extent (eg, (About 5 μm) must be secured, and the running accuracy of the slider may be reduced. In the present embodiment, the guide member 19 is made of CFRP having a small sliding friction, and the guided member 21 is made of a ridge having a small sliding friction, so that the surface 19a of the guide member 19 and the surface of the guided member 21 are temporarily moved during movement. Even when 21a comes into contact, the wear of these surfaces can be reduced, and the gap between the guide rail 12 and the slider 13 during movement (the flying height of the slider 13) should be set narrow (for example, 1 μm or less). Can do.

In the present embodiment, in particular, the surface of the guide member 19 that has the air source 5 and the

regulators

6, 7, 8, and 9 that adjust the air pressure of the compressed air supplied from the air source 5 is in a mixed lubrication state. Compressed air is supplied at an air pressure adjusted so that a linear spring characteristic is generated between 19 a and the surface 21 a of the guided member 21. As a result, the vibration when the slider 13 is stopped can be significantly suppressed as described above, so that the 1 nm level ultra-precise positioning can be performed using the linear spring characteristic in the minute movement region. As a result, a linear proportional operation without hysteresis can be performed, and a back-and-forth backlash and a lack of movement amount with respect to a movement command can be prevented. Further, by adjusting the air pressure, it becomes possible to adjust the spring constant of the linear spring characteristic according to the device configuration or the like as described above, so that the degree of freedom in design can be improved.

In the present embodiment, in particular, based on a switching command from the controller 2, the compressed air supplied to the compressed air ejection holes 22 d of the guided member 21 is compressed air with the fluid lubrication pressure adjusted by the regulator 7. The solenoid valve 10 is switched to the compressed air of the mixed lubrication pressure whose air pressure is adjusted by the regulator 8. By switching the opening and closing of the two ports of the solenoid valve 10 according to the switching command from the controller 2, when the slider 13 is moved to the vicinity of the target position, the compressed air at the fluid lubrication pressure is supplied to the compressed air ejection hole 22d. Then, when the lubrication state between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 is set to the fluid lubrication state and the slider 13 is positioned in the vicinity of the target position, the mixed lubrication pressure is applied to the compressed air ejection hole 22d. Thus, the lubrication state between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 can be changed to the mixed lubrication state. As a result, the slider 13 can be lifted and moved at high speed during movement, and the slider 13 can be brought into fine contact with each guide rail 12 during positioning to produce linear spring characteristics. Can be realized. Further, compared to the case where the air pressure of the compressed air is varied by the electropneumatic regulator as in the modification (3) described later, in this embodiment, the air pressure is changed by switching to a plurality of air pressures determined in advance. The accuracy can be improved and stabilized.

In the above-described embodiment, the solenoid valve 10 and the compressed air ejection hole 22d are connected to each other and affixed to the inner surface 12da of the lower plate portion 12d of each guide rail 12 by the air pressure of the compressed air supplied to the compressed air ejection hole 22d. The lubrication state between the surface 19a of the guide member 19 and the surface 21a of the guided member 21 attached to the lower surface 20c of each insertion portion 20 of the slider 13 is controlled, but is not limited thereto. For example, the guide member 19 is affixed to the inner surface 12ua of the upper plate portion 12u instead of the inner surface 12da of the lower plate portion 12d of each guide rail 12, and the guided member 21 is attached to the lower surface 20c of each insertion portion 20 of the slider 13. Each guide rail is attached to the upper surface by connecting the solenoid valve 10 and the compressed air ejection hole provided on the surface 21a of the guided member 21 and the compressed air pressure supplied to the compressed air ejection hole. 12 may control the lubrication state between the surface 19a of the guide member 19 affixed to the inner surface 12ua of the upper plate portion 12u and the surface 21a of the guided member 21 affixed to the upper surface 20a of each insertion portion 20 of the slider 13. . In this case, a regulator 6 may be connected to the compressed air ejection holes provided in the lower surface 20 c of each insertion portion 20 of the slider 13, and compressed air whose air pressure is adjusted by the regulator 6 may be supplied.

Further, the embodiment is not limited to the above contents, and various modifications can be made without departing from the spirit and technical idea thereof. Hereinafter, such modifications will be described in order.

(1) When a guide member is also affixed also to the inner surface of the side plate part of one guide rail, and a to-be-guided member is also affixed also to the side surface of one insertion part of a slider In the said embodiment, the guide member 19 is each guide rail. 12 is affixed to the inner surface 12da of the lower plate portion 12d and the guided member 21 is affixed to the lower surface 20c of each insertion portion 20 of the slider 13, but this is not restrictive. That is, the guide member 19 is also affixed to the inner surface 12sa of the side plate portion 12s of one guide rail 12 of the two guide rails 12, and the guided member 21 is inserted into one of the two insertion portions 20 of the slider 13. You may affix also to the side 20b of the part 20. FIG.

As shown in FIG. 13, the stage control system 1A according to this modification includes the controller 2, the stage device 3A, the servo amplifier 4, the air source 5, the

regulators

6, 7, 8, regulators 9 </ b> A, 24 a, 24 b, the above-described solenoid valve 10, and the solenoid valve 25.

The configuration of the stage apparatus 3A is substantially the same as the stage apparatus 3 according to the above embodiment. However, in the stage apparatus 3A, the inner surface 12da of the lower plate portion 12d of each guide rail 12 and one of the two guide rails 12 (in this example, the right guide rail 12 in FIG. 13). The aforementioned guide member 19 is attached to the inner surface 12sa of the side plate portion 12s. Further, on the lower surface 20c of each insertion portion 20 of the slider 13 and the side surface 20b of one insertion portion 20 (in this example, the right insertion portion 20 in FIG. 13) of the two insertion portions 20 of the slider 13, The aforementioned guided member 21 is affixed. When each insertion portion 20 is inserted into the concave portion 18 of each guide rail 12, the inner surface 12ua of the upper plate portion 12u of each guide rail 12 and the upper surface 20a of each insertion portion 20 face each other in the vertical direction. The surface 19a of the guide member 19 affixed to the inner surface 12da of the lower plate portion 12d of the rail 12 and the surface 21a of the guided member 21 affixed to the lower surface 20c of each insertion portion 20 are opposed to each other in the vertical direction. The inner surface 12sa of the side plate portion 12s of the rail 12 and the side surface 20b of the left insertion portion 20 are opposed to each other in the left-right direction. The surface 21b of the guided member 21 affixed to the side surface 20b of the insertion portion 20 faces in the left-right direction.

In this modification, the inner surface 12ua of the upper plate portion 12u of each guide rail 12, the surface 19a of the guide member 19 affixed to the inner surface 12da of the lower plate portion 12d of each guide rail 12, and the side plate portion 12s of the left guide rail 12 are used. The inner surface 12sa of the guide member 19 and the surface 19b of the guide member 19 affixed to the inner surface 12sa of the side plate portion 12s of the right guide rail 12 correspond to the guide surface described in the claims. As appropriate, the inner surface 12ua of the upper plate portion 12u of the guide rail 12, the surface 19a of the guide member 19 affixed to the inner surface 12da of the lower plate portion 12d of the guide rail 12, the inner surface 12sa of the side plate portion 12s of the left guide rail 12, The surface 19b of the guide member 19 affixed to the inner surface 12sa of the side plate portion 12s of the right guide rail 12 is collectively referred to as “guide surface”. Further, the upper surface 20 a of each insertion portion 20 of the slider 13, the surface 21 a of the guided member 21 attached to the lower surface 20 c of each insertion portion 20, the side surface 20 b of the left insertion portion 20, and the side surface 20 b of the right insertion portion 20. The surface 21b of the guided member 21 affixed to corresponds to the guided surface described in the claims. Hereinafter, the upper surface 20a of each insertion portion 20 of the slider 13, the surface 21a of the guided member 21 affixed to the lower surface 20c of each insertion portion 20, the side surface 20b of the left insertion portion 20, and the side surface of the right insertion portion 20, as appropriate. The surface 21b of the guided member 21 affixed to 20b is generically referred to as a “guided surface”.

In this modification, the slider 13 has the compressed air ejection holes 22u and 22d described above, and is connected to the air source 5 via the regulator 9A at both front and rear corners of the side surface 20b of the left insertion portion 20. The compressed air ejection holes 22 s (hereinafter referred to as “left compressed air ejection holes 22 s” as appropriate) are provided at the front and rear corners of the surface 21 b of the guided member 21 affixed to the side surface 20 b of the right insertion portion 20. A compressed air ejection hole 22s connected to the air source 5 through the electromagnetic valve 25 and the

regulators

24a and 24b (hereinafter referred to as “right compressed air ejection hole 22s” as appropriate).

The left compressed air ejection hole 22s indicates the lubrication state between the surfaces supplied from the air source 5 via the regulator 9A toward the inner surface 12sa of the side plate portion 12s of the left guide rail 12 facing in the left-right direction. Compressed air of a predetermined pressure controlled so as to be in a fluid lubrication state. The inner surface 12sa of the side plate portion 12s of the left guide rail 12 in the fluid lubrication state and the side surface 20b of the left insertion portion 20 of the slider 13 are not in contact with each other and are in the aforementioned non-contact state.

The compressed air ejection hole 22s on the right side is compressed air having the above-described fluid lubrication pressure supplied through the regulator 24a and the electromagnetic valve 25 toward the surface 19b of the guide member 19 facing in the left-right direction, or the regulator 24b. And the compressed air of the above-mentioned pressure for mixed lubrication supplied via the electromagnetic valve 25 is ejected. The surface 19b of the guide member 19 in the fluid lubrication state and the surface 21b of the guided member 21 are in the aforementioned non-contact state. The surface 19b of the guide member 19 in the mixed lubrication state and the surface 21b of the guided member 21 are in the above-described fine contact state, and a linear spring characteristic is generated in a minute movement region between these surfaces.

In the stage apparatus 3A, in the vertical direction, the load of the slider 13, the air pressure of the compressed air ejected from the compressed air ejection hole 22u, the air pressure of the compressed air ejected from the compressed air ejection hole 22d, and the guide member 19 are arranged. The posture is maintained by a balance with the aforementioned spring elastic force. The left-right direction depends on the balance between the air pressure of the compressed air ejected from the left compressed air ejection hole 22s, the air pressure of the compressed air ejected from the right compressed air ejection hole 22s, and the spring elastic force by the guide member 19. Maintain posture. Then, due to the thrust generated by the linear motor 16, the slider 13 moves in the front-rear direction along the guide rail 12.

Then, when positioning the slider 13 in the vicinity of the target position, the surface 19 a of the guide member 19 affixed to the inner surface 12 da of the lower plate portion 12 d of each guide rail 12 and the lower surface 20 c of each insertion portion 20 of the slider 13. The surface 19b of the guide member 19 affixed to the surface 21a of the affixed guided member 21 and the inner surface 12sa of the side plate portion 12s of the right guide rail 12 and the side surface 20b of the right insertion portion 20 of the slider 13 Between the inner surface 12 ua of the upper plate portion 12 u of each guide rail 12 and the upper surface 20 a of each insertion portion 20 of the slider 13, and the left side. Between the inner surface 12sa of the side plate portion 12s of the guide rail 12 and the side surface 20b of the insertion portion 20 on the left side of the slider 13, Compression supplied to the compressed

air ejection holes

22u, 22d, and 22s so that a linear spring characteristic is generated in the minute movement region between the guide surface of each guide rail 12 and the guided surface of the slider 13 in the combined lubrication state. It is controlled by the air pressure. Therefore, when positioning the slider 13 in the vicinity of the target position, the surface 19 a of the guide member 19 affixed to the inner surface 12 da of the lower plate portion 12 d of each guide rail 12 and the lower surface 20 c of each insertion portion 20 of the slider 13. Affixed to the surface 21a of the guided member 21 that is affixed, the surface 19b of the guide member 19 that is affixed to the inner surface 12sa of the side plate portion 12s of the right guide rail 12, and the side surface 20b of the right insertion portion 20 of the slider 13. The surface 21b of the guided member 21 is in a fine contact state, and the other guide surfaces and the guided surface are in a non-contact state.

The regulator 9A adjusts the air pressure of the compressed air supplied to the compressed air ejection hole 22s on the left side of the slider 13. The compressed air whose air pressure is adjusted by the regulator 9A is supplied to the left compressed air ejection hole 22s at the predetermined pressure. The regulator 24 a adjusts the air pressure of the compressed air supplied to the compressed air ejection hole 22 s on the right side of the slider 13. The compressed air whose air pressure is adjusted by the regulator 24 a is supplied to the compressed air ejection hole 22 s on the right side through the electromagnetic valve 25 at the fluid lubrication pressure. The regulator 24 b adjusts the air pressure of the compressed air supplied to the compressed air ejection hole 22 s on the right side of the slider 13. The compressed air whose air pressure has been adjusted by the regulator 24b is supplied to the compressed air ejection hole 22s on the right side through the electromagnetic valve 25 at the mixed lubrication pressure.

The solenoid valve 25 switches the opening and closing of the two ports on the basis of a switching command from the controller 2, whereby the compressed air supplied to the compressed air ejection hole 22 s on the right side of the slider 13 is adjusted to the air pressure by the regulator 24 a. Switching is performed between compressed air at the lubricating pressure and compressed air at the mixed lubricating pressure whose air pressure is adjusted by the regulator 24b. Specifically, when moving the slider 13 to the vicinity of the target position, the port on the regulator 24a side is opened based on the switching command to make the compressed air the compressed air of the fluid lubrication pressure. By closing the port on the regulator 24b side, the compressed air supplied to the compressed air ejection hole 22s on the right side is switched to compressed air having a fluid lubricating pressure. On the other hand, when positioning the slider 13 in the vicinity of the target position, the regulator 24a side port is closed and the regulator 24b side port is closed based on the switching command to make the compressed air the compressed air of the mixed lubrication pressure. By opening the port, the compressed air supplied to the compressed air ejection hole 22s on the right side is switched to the compressed air having the mixed lubrication pressure.

The configuration of the stage control system 1A other than the above is the same as the stage control system 1 according to the above embodiment. In this modification, the air source 5 and the

regulators

6, 7, 8, 9A, 24a, 24b correspond to the air supply device described in the claims.

In the stage control system 1A, when the slider 13 is moved to the vicinity of the target position, the controller 2 outputs a switching command to the

solenoid valves

10 and 25 to make the compressed air the compressed air for the fluid lubrication pressure. The compressed air supplied to the compressed air ejection hole 22d and the right compressed air ejection hole 22s is switched to the compressed air of the fluid lubrication pressure whose air pressure is adjusted by the

regulators

7 and 24a. As a result, compressed air with fluid lubrication pressure is supplied to the compressed air ejection hole 22d and the right compressed air ejection hole 22s via the

solenoid valves

10 and 25, and the surface of each guide member 19 and the surface of each guided member 21 Becomes a fluid lubrication state (non-contact state). On the other hand, when positioning the slider 13 in the vicinity of the target position, the controller 2 outputs a switching command to the

electromagnetic valves

10 and 25 to the effect that the compressed air is compressed air of the mixed lubrication pressure, and the compressed air ejection hole 22d. The compressed air supplied to the compressed air ejection hole 22s on the right side is switched to the compressed air of the mixed lubricating pressure whose air pressure is adjusted by the

regulators

8 and 24b. As a result, compressed air of mixed lubrication pressure is supplied to the compressed air ejection holes 22d and the right side compressed air ejection holes 22s via the

solenoid valves

10 and 25, and the surface of each guide member 19 and the surface of each guided member 21 Becomes a mixed lubrication state (fine contact state), and a linear spring characteristic is generated between these surfaces in a minute movement region.

According to this modification, the same effect as the above embodiment can be obtained. Further, in addition to the guide surface of the guide rail 12 and the guided surface of the slider 13 that are opposed to each other in the vertical direction, the guide surface of the guide rail 12 and the guided surface of the slider 13 that are opposed to each other in the left and right direction are brought into a minute contact state. Therefore, it is possible to suppress minute fluctuations in the vertical direction of the slider 13 and to suppress minute fluctuations in the horizontal direction of the slider 13.

(2) When the guide member is also affixed to the inner surfaces of the side plate portions of both guide rails and the guided member is also affixed to the side surfaces of both the insertion portions of the slider In the above-described embodiment, the guide member 19 is attached to each guide. Although the guide member 21 is attached to the inner surface 12da of the lower plate portion 12d of the rail 12 and the lower surface 20c of each insertion portion 20 of the slider 13, the present invention is not limited to this. That is, the guide member 19 may be attached to the inner surfaces 12sa of the side plate portions 12s of the two guide rails 12, and the guided member 21 may be attached to the side surfaces 20b of the two insertion portions 20 of the slider 13.

As shown in FIG. 14, the configuration of the stage apparatus 3B according to this modification is substantially the same as the stage apparatus 3A according to the modification (1). However, in the stage apparatus 3B, the above-described guide member 19 is attached to the inner surface 12da of the lower plate portion 12d of each guide rail 12 and the inner surface 12sa of the side plate portion 12s of each guide rail 12. The aforementioned guided member 21 is attached to the lower surface 20 c of each insertion portion 20 of the slider 13 and the side surfaces 20 b of the two insertion portions 20 of the slider 13. When each insertion portion 20 is inserted into the concave portion 18 of each guide rail 12, the inner surface 12ua of the upper plate portion 12u of each guide rail 12 and the upper surface 20a of each insertion portion 20 face each other in the vertical direction. The surface 19a of the guide member 19 affixed to the inner surface 12da of the lower plate portion 12d of the rail 12 and the surface 21a of the guided member 21 affixed to the lower surface 20c of each insertion portion 20 are opposed to each other in the vertical direction. The surface 19b of the guide member 19 affixed to the inner surface 12sa of the 12 side plate portions 12s and the surface 21b of the guided member 21 affixed to the side surface 20b of each insertion portion 20 are opposed to each other in the left-right direction.

In this modification, the inner surfaces 12ua of the upper plate portion 12u of each guide rail 12, the inner surfaces 12da of the lower plate portion 12d of each guide rail 12, and the

surfaces

19a and 19b of the guide member 19 affixed to the inner surface 12sa of the side plate portion 12s. Corresponds to the guide surface described in the claims. Hereinafter, the inner surface 12ua of the upper plate portion 12u of the guide rail 12 and the

surfaces

19a and 19b of the guide member 19 affixed to the inner surface 12da of the lower plate portion 12d of the guide rail 12 and the inner surface 12sa of the side plate portion 12s are referred to as “guide”. Collectively referred to as “surface”. Further, the upper surface 20a of each insertion portion 20 of the slider 13 and the

surfaces

21a and 21b of the guided member 21 attached to the lower surface 20c and the side surface 20b of each insertion portion 20 are guided surfaces according to claims. It corresponds to. Hereinafter, the upper surface 20a of each insertion portion 20 of the slider 13 and the

surfaces

21a and 21b of the guided member 21 attached to the lower surface 20c and the side surface 20b of each insertion portion 20 are collectively referred to as “guided surfaces”.

In this modification, the slider 13 has the compressed air ejection holes 22u and 22d described above. Further, both front and rear corners of the surface 21b of the guided member 21 attached to the side surface 20b of the insertion portion 20 on the left side of the slider 13 are connected to the air source 5 via an electromagnetic valve and two regulators. Compressed air ejection holes 22 s (hereinafter referred to as “left compressed air ejection holes 22 s” as appropriate) are provided, and at the front and rear corners of the surface 21 b of the guided member 21 affixed to the side surface 20 b of the right insertion portion 20. A compressed air ejection hole 22s (hereinafter referred to as “right compressed air ejection hole 22s” as appropriate) connected to the air source 5 via an electromagnetic valve and two regulators is provided.

In the stage device 3B, in the vertical direction, the load of the slider 13, the air pressure of the compressed air ejected from the compressed air ejection hole 22u, the air pressure of the compressed air ejected from the compressed air ejection hole 22d, and the guide member 19 are arranged. The posture is maintained by the balance with the spring elastic force described above. In the left-right direction, the air pressure of the compressed air ejected from the left compressed air ejection hole 22s and the spring elastic force by the guide member 19, and the air pressure of the compressed air ejected from the right compressed air ejection hole 22s and the guide member 19 are shown. The posture is maintained by the balance with the spring elastic force. Then, due to the thrust generated by the linear motor 16, the slider 13 moves in the front-rear direction along the guide rail 12.

Then, when positioning the slider 13 in the vicinity of the target position, the surface 19 a of the guide member 19 affixed to the inner surface 12 da of the lower plate portion 12 d of each guide rail 12 and the lower surface 20 c of each insertion portion 20 of the slider 13. Affixed to the surface 21a of the guided member 21 that is affixed, and to the surface 19a of the guide member 19 that is affixed to the inner surface 12sa of the side plate portion 12s of each guide rail 12 and the side surface 20b of each insertion portion 20 of the slider 13. Between the inner surface 12 ua of the upper plate portion 12 u of each guide rail 12 and the upper surface 20 a of each insertion portion 20 of the slider 13. A linear spring characteristic is present in the minute movement region between the guide surface of each guide rail 12 in the mixed lubrication state and the guided surface of the slider 13. Jill so on, compressed air ejection holes 22u, 22 d, are controlled by the air pressure of the compressed air supplied to the 22s. Therefore, when positioning the slider 13 in the vicinity of the target position, the surface 19 a of the guide member 19 affixed to the inner surface 12 da of the lower plate portion 12 d of each guide rail 12 and the lower surface 20 c of each insertion portion 20 of the slider 13. The surface 21 a of the guided member 21 that is affixed, the surface 19 b of the guide member 19 that is affixed to the inner surface 12 sa of the side plate portion 12 s of each guide rail 12, and the side surface 20 b of each insertion portion 20 of the slider 13. The surface 21b of the guide member 21 is in a fine contact state, and the other guide surfaces and the guided surface are in a non-contact state.

According to this modification, in the same manner as the modification (1), in addition to the guide surface of the guide rail 12 and the guided surface of the slider 13 opposed to each other in the vertical direction, the guide surface of the guide rail 12 opposed to the left and right directions. And the guided surface of the slider 13 can be brought into a fine contact state, so that a minute fluctuation in the vertical direction of the slider 13 can be suppressed and a minute fluctuation in the horizontal direction of the slider 13 can be suppressed.

(3) When the air pressure of the compressed air is varied by the electropneumatic regulator In the above-described embodiment, the configuration is such that the compressed air supplied to the compressed air ejection hole 22d of the guided member 21 is switched by the electromagnetic valve 10. The configuration is not limited, and the compressed air supplied to the compressed air ejection hole 22d of the guided member 21 may be varied by an electropneumatic regulator.

As shown in FIG. 15, the configuration of the stage control system 1 </ b> C according to the present modification is substantially the same as that of the stage control system 1 according to the above-described embodiment, but instead of the

regulators

7 and 8 and the electromagnetic valve 10, The difference is that an electropneumatic regulator 23 for changing the air pressure of the compressed air supplied from the air source 5 is provided.

Based on the variable command from the controller 2, the electropneumatic regulator 23 converts the air pressure of the compressed air supplied to the compressed air ejection hole 22d of the slider 13 into the fluid lubrication pressure and the mixed lubrication pressure. Make it variable. Specifically, when the slider 13 is moved to the vicinity of the target position, the controller 2 sets the compressed air pressure to the fluid lubrication pressure at substantially the same timing as when the movement command is output. The variable command is output. Then, based on this variable command, the electropneumatic regulator 23 changes the air pressure of the compressed air supplied to the compressed air ejection hole 22d to the fluid lubrication pressure. On the other hand, when positioning the slider 13 in the vicinity of the target position, if the controller 2 determines that the slider 13 is close to the target position, the air pressure of the compressed air is used for mixed lubrication. Outputs a variable command indicating pressure. The servo amplifier 4 may output a variable command indicating that the compressed air pressure is set to the mixed lubrication pressure. Then, based on this variable command, the electropneumatic regulator 23 switches the air pressure of the compressed air supplied to the compressed air ejection hole 22d to the mixed lubrication pressure. The compressed air whose air pressure has been varied by the electropneumatic regulator 23 is supplied to the compressed air ejection hole 22d at a fluid lubrication pressure or a mixed lubrication pressure. The compressed air ejection hole 22d is fluid lubrication pressure or mixed lubrication pressure supplied from the air source 5 through the electropneumatic regulator 23 toward the surface of the guide member 19 of the above-described guide rail 12 facing in the vertical direction. Of compressed air.

The configuration of the stage control system 1C other than the above is the same as the stage control system 1 according to the above-described embodiment. In the present modification, the air source 5, the

aforementioned regulators

6 and 9, and the electropneumatic regulator 23 correspond to the air supply device described in the claims.

In the stage control system 1C configured as described above, when the slider 13 is moved to the vicinity of the target position, the controller 2 issues an electropneumatic variable command indicating that the air pressure of the compressed air is the fluid lubrication pressure. The air pressure of the compressed air that is output to the regulator 23 and supplied to the compressed air ejection hole 22d is changed to the fluid lubrication pressure by the electropneumatic regulator 23. As a result, compressed air having a pressure for fluid lubrication is supplied to the compressed air ejection hole 22d, and the surface of each guide member 19 and the surface of each guided member 21 of the slider 13 are in a fluid lubrication state (non-contact state). Become. On the other hand, when positioning the slider 13 in the vicinity of the target position, the controller 2 outputs a variable command indicating that the air pressure of the compressed air is the mixed lubrication pressure to the electropneumatic regulator 23 and supplies it to the compressed air ejection hole 22d. The compressed air pressure is changed to the mixed lubrication pressure by the electropneumatic regulator 23. As a result, compressed air having a pressure for mixed lubrication is supplied to the compressed air ejection holes 22d, and the surface of each guide member 19 and the surface of each guided member 21 are in a mixed lubrication state (fine contact state). In the meantime, a linear spring characteristic occurs in the minute movement region.

In the present modification described above, based on the variable command from the controller 2, the air pressure of the compressed air supplied to the compressed air ejection hole 22d of the guided member 21 is varied between the fluid lubrication pressure and the mixed lubrication pressure. An electropneumatic regulator 23 is provided. Thereby, similarly to the above-described embodiment, it is possible to realize a stage control system 1C capable of high-speed movement and ultra-high accuracy positioning. Further, when the configuration is such that the compressed air is switched by the solenoid valve 10 as in the above-described embodiment, it can only be adjusted stepwise to a plurality of predetermined air pressures. 23, the air pressure of the compressed air can be continuously adjusted to a desired value.

The guide member 19 is also affixed to the inner surface 12sa of one or both of the side plate portions 12s of the two guide rails 12 as in the modified example (1) and the modified example (2) described above. In contrast to the case where the guided member 21 is also attached to one or both side surfaces 20b of the two insertion portions 20, the compression supplied to the compressed air ejection holes 22 of the guided member 21 as in the modified example of (3) above. A method of changing air with an electropneumatic regulator may be applied.

(4) When the guide rail itself is made of CFRP and the slider itself is made of heel In the above-described embodiment, the guide member 19 made of CFRP is pasted on the guide rail 12 and the slider 13 is made of heel. Although the guided member 21 is pasted, the present invention is not limited to this, and the guide rail itself may be made of CFRP, and the slider itself may be made of scissors.

As shown in FIG. 16, the stage device 3D according to the present modification includes a guide rail 12D having a substantially T shape in a cross-sectional view installed on the surface plate 11 so as to extend in the front-rear direction, and a moving direction of the guide rail 12D. The slider 13D is regulated, the linear motor 16 generates the thrust of the slider 13D, and the linear scale 17 detects the position of the slider 13D.

Similar to the guide member 19 according to the above-described embodiment, the guide rail 12D is made of CFRP that has been subjected to surface processing (see FIG. 3) that peels the epoxy resin 192 on the surface and exposes the carbon fiber 191 layer. And has an upright portion 12Dj and an upper plate portion 12Du. The upper surface 12Da of the upper plate portion 12Du, the lower surfaces 12Db and 12Dc on the left and right sides, and the left and right side surfaces 12Dd and 12De across the upright portion 12Dj correspond to the guide surfaces described in the claims. Hereinafter, the upper surface 12Da, the left and right lower surfaces 12Db and 12Dc, and the left and right side surfaces 12Dd and 12De are collectively referred to as “guide surfaces” as appropriate.

Like the guided member 21 according to the above-described embodiment, the slider 13D is configured by a ridge, and includes an upper plate portion 13Du, a left lower plate portion 13Da, a right lower plate portion 13Db, a left plate portion 13Dc, and a right plate portion. 13Dd. Note that the upper surface of the upper plate portion 12Da of the guide rail 12D is opposed to the lower surface 13D1 of the upper plate portion 13Du in the vertical direction, and the upper surface of the lower left plate portion 13Da of the upper surface portion 12Du is opposed to the lower surface 12Db on the left side of the upper plate portion 12Du. 13D2, the upper surface 13D3 of the right lower plate portion 13Db facing the lower surface 12Dc on the right side of the upper plate portion 12Du in the vertical direction, the right surface 13D4 of the left plate portion 13Dc facing the left side surface 12Dd of the upper plate portion 12Du, and the upper plate portion The left surface D5 of the right side plate portion 13Dd facing the right side surface 12De of 12Du corresponds to the guided surface described in the claims. Hereinafter, the lower surface 13D1 of the upper plate portion 13Du, the upper surface 13D2 of the left lower plate portion 13Da, the upper surface 13D3 of the right lower plate portion 13Db, the right surface 13D4 of the left plate portion 13Dc, and the left surface D5 of the right plate portion 13Dd are referred to as “guided surface”. ".

Further, the lower surface 13D1 of the upper plate portion 13Du of the slider 13D is provided with a compressed air ejection hole 22Du that ejects compressed air toward the upper surface 12Da of the upper plate portion 12Du of the guide rail 12D that is opposed in the vertical direction. The upper surface 13D2 of the plate portion 13Da is provided with a compressed air ejection hole 22Dd for injecting compressed air toward the lower surface 12Db on the left side of the upper plate portion 12Du of the guide rail 12D facing in the vertical direction, and the right lower plate portion 13Db The upper surface 13D3 is provided with a compressed air ejection hole 22Dd for ejecting compressed air toward the lower surface 12Dc on the right side of the upper plate portion 12Du of the guide rail 12D facing in the vertical direction. The right surface 13D4 of the left plate portion 13Dc has Compressed air ejection for ejecting compressed air toward the left side surface 12Dd of the upper plate portion 12Du of the guide rail 12D facing in the left-right direction 22Da is provided, and a compressed air ejection hole 22Db for ejecting compressed air toward the right side surface 12De of the upper plate portion 12Du of the guide rail 12D facing in the left-right direction is provided on the left surface D5 of the right side plate portion 13Dd. .

In the stage apparatus 3D configured as described above, the vertical direction is the air pressure of the compressed air ejected from the compressed air ejection hole 22Du, the aforementioned spring elastic force by the guide rail 12D, and the ejection from the compressed air ejection hole 22Dd. The posture is maintained by the balance with the air pressure of the compressed air. The posture in the left-right direction is maintained by a balance between the air pressure of the compressed air ejected from the compressed air ejection hole 22Da and the air pressure of the compressed air ejected from the compressed air ejection hole 22Db. Then, due to the thrust generated by the linear motor 16, the slider 13D moves in the front-rear direction along the guide rail 12D.

When the slider 13D is positioned near the target position, the lubrication state between the guide surface of the guide rail 12D and the guided surface of the slider 13D is such that the upper surface 12Da of the upper plate portion 12Du of the guide rail 12D and the slider 13D A mixed lubrication state is established with the lower surface 13D1 of the upper plate portion 13Du, a fluid lubrication state is established in other regions, and there is a minute amount between the guide surface of the guide rail 12D and the guided surface of the slider 13D in the mixed lubrication state. It is controlled by the air pressure of the compressed air supplied to the compressed air ejection holes 22Du, 22Dd, 22Da, and 22Db so that a linear spring characteristic is generated in the moving region. Therefore, when positioning the slider 13D in the vicinity of the target position, the upper surface 12Da of the upper plate portion 12Du of the guide rail 12D and the lower surface 13D1 of the upper plate portion 13Du of the slider 13D are in a fine contact state, and the other guide surfaces And the guided surface are in a non-contact state.

According to this modification, it is possible to obtain the same effect as that of the above-described embodiment.

In the modification (4), when the slider 13D is positioned near the target position, the lubrication state between the guide surface of the guide rail 12D and the guided surface of the slider 13D is determined by the upper plate of the guide rail 12D. Although the mixed lubrication state is controlled between the upper surface 12Da of the portion 12Du and the lower surface 13D1 of the upper plate portion 13Du of the slider 13D, the fluid lubrication state is controlled in other regions. However, the present invention is not limited to this. That is, when positioning the slider 13D in the vicinity of the target position, between the left side surface 12Dd of the upper plate portion 12Du of the guide rail 12D and the right surface 13D4 of the left side plate portion 13Dc of the slider 13D (or the upper plate of the guide rail 12D). The lubrication state between the right side surface 12De of the portion 12Du and the left surface D5 of the right side plate portion 13Dd of the slider 13D may also be controlled to be in a mixed lubrication state. In this case, when positioning the slider 13D in the vicinity of the target position, the upper surface 12Da of the upper plate portion 12Du of the guide rail 12D, the lower surface 13D1 of the upper plate portion 13Du of the slider 13D, and the upper plate portion 12Du of the guide rail 12D. The left side surface 12Dd and the right side surface 13D4 of the left side plate portion 13Dc of the slider 13D (or the right side surface 12De of the upper plate portion 12Du of the guide rail 12D and the left side surface D5 of the right side plate portion 13Dd of the slider 13D) are in a fine contact state.

Alternatively, when positioning the slider 13D in the vicinity of the target position, between the left side surface 12Dd of the upper plate portion 12Du of the guide rail 12D and the right surface 13D4 of the left side plate portion 13Dc of the slider 13D, and the upper plate of the guide rail 12D The lubrication state between the right side surface 12De of the portion 12Du and the left side surface D5 of the right side plate portion 13Dd of the slider 13D may also be controlled to be in a mixed lubrication state. In this case, when positioning the slider 13D in the vicinity of the target position, the upper surface 12Da of the upper plate portion 12Du of the guide rail 12D, the lower surface 13D1 of the upper plate portion 13Du of the slider 13D, and the left side of the upper plate portion 12Du of the guide rail 12D. The surface 12Dd and the right surface 13D4 of the left plate 13Dc of the slider 13D, and the right surface 12De of the upper plate 12Du of the guide rail 12D and the left surface D5 of the right plate 13Dd of the slider 13D are in a fine contact state.

Alternatively, when positioning the slider 13D in the vicinity of the target position, the lower surface 12Db on the left side of the upper plate portion 12Du of the guide rail 12D and the upper surface 13D2 of the lower left plate portion 13Da of the slider 13D and the guide rail 12D The lubrication state between the lower surface 12Dc on the right side of the upper plate portion 12Du and the upper surface 13D3 of the lower right plate portion 13Db of the slider 13D may also be controlled to be in a mixed lubrication state. In this case, when positioning the slider 13D in the vicinity of the target position, the lower surface 12Db on the left side of the upper plate portion 12Du of the guide rail 12D, the upper surface 13D2 of the lower plate portion 13Da on the left side of the slider 13D, and the upper surface of the guide rail 12D The right lower surface 12Dc of the plate portion 12Du and the upper surface 13D3 of the right lower plate portion 13Db of the slider 13D are also in a fine contact state.

In these cases, the same effect can be obtained.

(5) When a magnetic attraction type linear motor is provided as a driving device (part 1)
As shown in FIG. 17, the stage apparatus 3E according to the present modification includes two guide rails 12E installed in parallel so as to extend in the front-rear direction on a surface plate 11 having two guide members 19Eu attached to the upper surface. The slider 13E having a substantially inverted U shape in a cross-sectional view whose movement direction is regulated by the guide rail 12E, a magnetic attraction type linear motor 16E (driving device) that generates thrust of the slider 13E, and the position of the slider 13E are detected. The linear scale 17 is provided.

A guide member 19Es is affixed to the inner surface 12Ea of each guide rail 12E. Hereinafter, the guide member 19Eu attached to the upper surface 11a of the surface plate 11 and the guide member 19Es attached to the inner surface 12Ea of the guide rail 12 will be collectively referred to as “guide member 19E” as appropriate. The guide member 19E is made of CFRP that has been subjected to surface processing (see FIG. 3) that peels the epoxy resin 192 on the surface and exposes the carbon fiber 191 layer, like the guide member 19 according to the above-described embodiment. ing.

The slider 13E includes left and right side wall portions 13Es. A guided member 21Ed is attached to the lower surface 13E1 of the left and right side wall portions 13Es, and a guided member 21Es is disposed on the outer side surface 13E2 of the left and right side wall portions 13Es. It is affixed. Hereinafter, the guided member 21Ed and the guided member 21Es will be collectively referred to as “guided member 21E” as appropriate. Like the guided member 21 according to the above-described embodiment, the guided member 21 </ b> E is configured with a heel. The surface 21E1 of each guided member 21Ed is vertically opposed to the surface 19E1 of each guide member 19Eu affixed to the upper surface 11a of the surface plate 11, and the surface 21E2 of each guided member 21Es is each guide rail 12E. This is opposed to the surface of the guide member 19Es affixed to the inner surface 12Ea.

In this modification, the surface 19E1 of each guide member 19Eu affixed to the upper surface 11a of the surface plate 11 and the surface of the guide member 19Es affixed to the inner surface 12Ea of each guide rail 12E are the guide surfaces described in the claims. The surface 21E1 of the guided member 21Ed affixed to the lower surface 13E1 of each side wall 13Es of the slider 13E and the surface 21E2 of the guided member 21Es affixed to the outer side surface 13E2 of each side wall 13Es of the slider 13E, This corresponds to the guided surface described in the claims. Hereinafter, the surface 19E1 of each guide member 19Eu and the surface of each guide member 19Es are collectively referred to as “guide surfaces”, and the surface 21E1 of each guided member 21Ed and the surface 21E2 of each guided member 21Es are referred to as “guided surfaces”. Collectively.

In addition, the surface 21E1 of each guided member 21Ed of the slider 13E is provided with a compressed air ejection hole 22Ed that ejects compressed air toward the surface 19E1 of the guide member 19Eu facing in the vertical direction, and the left side wall of the slider 13E. The guide member 21Es affixed to the outer side surface 13E2 of the portion 13Es (hereinafter referred to as “left guided member 21Es” as appropriate) is attached to the inner surface 12Ea of the left guide rail 12E facing in the left-right direction. Compressed air ejection holes 22Es (hereinafter, referred to as “left compressed air ejection holes 22Es” as appropriate) for ejecting compressed air toward the surface 19E2 of the guide member 19Es are provided, and the outer side surface 13E2 of the right side wall portion 13Es. Guided member 21Es (hereinafter referred to as “right guided member 21Es” as appropriate) ) On the surface 21E2 of the right guide rail 12E facing in the left-right direction, compressed air ejection holes 22Es for ejecting compressed air toward the surface 19E2 of the guide member 19Es affixed to the inner surface 12Ea (hereinafter referred to as "right side" A compressed air ejection hole 22 Es ”).

In the stage device 3E, in the vertical direction, the load of the slider 13E, the air pressure of the compressed air ejected from the compressed air ejection hole 22Ed, the aforementioned spring elastic force by the guide member 19Eu, and the magnetic attraction force by the linear motor 16E Maintain posture by balance. The left and right directions are the air pressure of the compressed air ejected from the left compressed air ejection hole 22Es and the spring elastic force by the left guide member 19Es, the air pressure of the compressed air ejected from the right compressed air ejection hole 22Es and the right side. The posture is maintained by a balance with the spring elastic force of the guide member 19Es. Then, the slider 13E moves in the front-rear direction along the guide rail 12E by the thrust generated by the linear motor 16E.

When positioning the slider 13E in the vicinity of the target position, the lubrication state of the guide surface of the surface plate 11 and each guide rail 12E and the guided surface of the slider 13E is in a mixed lubrication state in all regions. Further, the pressure is controlled by the air pressure of the compressed air supplied to the compressed air ejection holes 22Ed and 22Es and the electromagnetic attraction force by the linear motor 16E. Specifically, a mixed lubrication state is established between the surface 19E1 of each guide member 19Eu and the surface 21E1 of each guided member 21Ed, and between the surface of each guide member 19Es and the surface 21E2 of each guided member 21Es. Control is performed so that a linear spring characteristic is generated in the minute movement region between the guide surface of each guide rail 12E in the mixed lubrication state and the guided surface of the slider 13E. Therefore, when positioning the slider 13E in the vicinity of the target position, the surface 19E1 of each guide member 19Eu, the surface 21E1 of each guided member 21Ed, and the surface of each guide member 19Es and the surface 21E2 of each guided member 21Es. Becomes a fine contact state.

(6) When a magnetic attraction type linear motor is provided as a driving device (part 2)
As shown in FIG. 18, the stage device 3F according to this modification includes a guide rail 12F installed on the surface plate 11 so as to extend in the front-rear direction, a slider 13F whose movement direction is restricted by the guide rail 12F, A magnetic attraction type linear motor 16F (driving device) that generates thrust of the slider 13F and a linear scale (position detecting device) (not shown) for detecting the position of the slider 13F are provided.

Guide members 19Fu are attached to the left and right ends of the upper surface 12Fa of the guide rail 12F, and guide members 19Fs are attached to the left and right side surfaces 12Fb of the guide rail 12F. Hereinafter, the guide member 19Fu and the guide member 19Fs are collectively referred to as “guide member 19F” as appropriate. The guide member 19F is made of CFRP that has been subjected to surface processing (see FIG. 3) that peels the epoxy resin 192 on the surface and exposes the carbon fiber 191 layer, like the guide member 19 according to the above-described embodiment. ing.

The slider 13F includes an upper plate portion 13Fu and left and right side plate portions 13Fs. A concave portion 26 is provided on the lower surface of the upper plate portion 13Fu. Guided members 21Fd are affixed to both the left and right sides of the recess 26 in the upper plate portion 13Fu, and the guided members 21Fs are affixed to the inner side surfaces 13Fa of the left and right side plate portions 13Fs. Hereinafter, the guided member 21Fd and the guided member 21Fs are collectively referred to as “guided member 21F” as appropriate. Like the guided member 21 according to the above-described embodiment, the guided member 21 </ b> F is configured by a scissors. The surface 21Fa of each guided member 21Fd is vertically opposed to the surface 19Fa of each guide member 19Fu attached to the upper surface 12Fa of the guide rail 12F, and the surface 21Fb of each guided member 21Fs is the surface of the guide rail 12F. It is opposed to each guide member 19Fs affixed to the side surface 12Fb in the left-right direction.

In the present modification, the surface 19Fa of the guide member 19Fu affixed to the left and right ends of the upper surface 12Fa of the guide rail 12F and the surface 19Fb of the guide member 19Fs affixed to the left and right side surfaces 12Fb of the guide rail 12F Is attached to the surface 21Fa of the guided member 21Fd that is affixed on both the left and right sides of the recess 26 in the upper plate portion 13Fu of the slider 13F and the inner side surface 13Fa of each side plate portion 13Fs of the slider 13F. The surface 21Fb of the guided member 21Fs corresponds to the guided surface described in the claims. Hereinafter, the surface 19Fa of each guide member 19Fu and the surface 19Fb of each guide member 19Fs are collectively referred to as “guide surfaces”, and the surface 21Fa of each guided member 21Fd and the surface 21Fb of each guided member 21Fs are “guided surfaces” as appropriate. Collectively.

In addition, the surface 21Fa of each guided member 21Fd of the slider 13F is provided with a compressed air ejection hole 22Fd that ejects compressed air toward the surface 19Fa of the guide member 19Fu facing in the vertical direction, and the left side plate portion 13Fs. The guide member 19Fs affixed to the left side surface of the guide rail 12F facing in the left-right direction is provided on the surface of the guided member 21Fs affixed to the inner side surface 13Fa (hereinafter referred to as “left guided member 21Fs” as appropriate). A compressed air ejection hole 22Fs for ejecting compressed air toward the surface 19Fb (hereinafter, referred to as “left compressed air ejection hole 22Fs” as appropriate) is provided, and is guided on the inner side surface 13Fa of the right side plate portion 13Fs. On the surface of the member 21Fs (hereinafter referred to as “right guided member 21Fs” as appropriate), A compressed air ejection hole 22Fs for ejecting compressed air toward the surface 19Fb of the guide member 19Fs affixed to the right side surface 12Fb of the drag 12F (hereinafter, referred to as “right compressed air ejection hole 22Fs” as appropriate) is provided. .

In the stage device 3F, the vertical direction includes the load of the slider 13F, the air pressure of the compressed air ejected from the compressed air ejection hole 22Fd, the aforementioned spring elastic force by the guide member 19Fu, and the magnetic attraction force by the linear motor 16F. Maintain posture by balance. The left and right directions are the air pressure of the compressed air ejected from the left compressed air ejection hole 22Fs and the spring elastic force by the left guide member 19Fs, the air pressure of the compressed air ejected from the right compressed air ejection hole 22Fs and the right side. The posture is maintained by the balance with the spring elastic force by the guide member 19Fs. Then, the slider 13F moves in the front-rear direction along the guide rail 12F by the thrust generated by the linear motor 16F.

When positioning the slider 13F in the vicinity of the target position, the compressed air jets so that the lubrication state between the guide surface of the guide rail 12F and the guided surface of the slider 13F becomes a mixed lubrication state in all regions. It is controlled by the air pressure of the compressed air supplied to the holes 22Fd and 22Fs and the electromagnetic attraction force by the linear motor 16F. Specifically, the mixed lubrication is performed between the surface 19Fa of each guide member 19Fu and the surface 21Fa of each guided member 21Fd, and between the surface 19Fb of each guide member 19Fs and the surface 21Fb of each guided member 21Fs. Thus, control is performed so that a linear spring characteristic is generated in the minute movement region between the guide surface of the guide rail 12F in the mixed lubrication state and the guided surface of the slider 13F. Therefore, when positioning the slider 13F in the vicinity of the target position, the surface 19Fa of each guide member 19Fu and the surface 21Fa of each guided member 21Fd, and the surface 19Fb of each guide member 19Fs and the surface of each guided member 21Fs 21Fb is in a fine contact state.

In the modification (6), the guide member 19Fs is attached to the left and right side surfaces 12Fb of the guide rail 12F, and the guided member 21Fs is attached to the inner side surface 13Fa of the left and right side plate portions 13Fs of the slider 13F. However, it is not limited to this. That is, the guide member 19Fs may be attached only to one side surface 12Fb of the guide rail 12F, and the guided member 21Fs may be attached only to the inner side surface 13Fa of one side plate portion 13Fs of the slider 13F. For example, when the guide member 19Fs is attached only to the right side surface 12Fb of the guide rail 12F, and the guided member 21Fs is attached only to the inner side surface 13Fa of the right side plate portion 13Fs of the slider 13F, the left compressed air ejection hole 22Fs is Compressed air is ejected at an air pressure at which the lubrication state between the opposing surfaces becomes a fluid lubrication state. Further, when the compressed air ejection hole 22Fs and the compressed air ejection hole 22Fd on the right side move to the vicinity of the target position, the compressed air is ejected at an air pressure at which the lubrication state between the opposing surfaces becomes a fluid lubrication state, When positioning the slider 13F in the vicinity of the target position, the compressed air is ejected at an air pressure at which the lubrication state between the opposing surfaces becomes a mixed lubrication state.

(7) When attaching a stage apparatus to a ceiling This modification is an optimal modification when attaching a stage apparatus to a ceiling. As shown in FIG. 19, the configuration of the stage apparatus 3G according to the present modification is substantially the same as the stage apparatus 3 according to the above-described embodiment. However, in the stage apparatus 3G, the surface opposite to the installation surface of the guide rail 12 of the surface plate 11 is fixed to the ceiling 27 in the upside down state in which the stage apparatus 3 shown in FIG. Therefore, the lower part in FIG. 1 corresponds to the upper part in FIG. 19, the upper part in FIG. 1 corresponds to the lower part in FIG. 19, the right side in FIG. 1 corresponds to the left side in FIG. The left side in 1 corresponds to the right side in FIG. And in the stage apparatus 3G, the above-mentioned guide member 19 is affixed on the inner surface 12ua of the upper plate part 12u of each guide rail 12. FIG. Further, the aforementioned guided member 21 is attached to the lower surface 20c (the lower surface in FIG. 19) of each insertion portion 20 of the slider 13. When each insertion portion 20 is inserted into the concave portion 18 of each guide rail 12, the surface of the guide member 19 affixed to the inner surface 12 ua of the upper plate portion 12 u of each guide rail 12 and the lower surface 20 c of each insertion portion 20. The surface 21a of the affixed guided member 21 is opposed to the vertical direction (upper-lower direction in FIG. 19), and the inner surface 12da of the lower plate portion 12d of each guide rail 12 and the upper surface 20a of each insertion portion 20 (see FIG. 19 in the vertical direction, and the inner surface 12sa of the side plate portion 12s of each guide rail 12 and the side surface 20b of each insertion portion 20 are in the left-right direction (left-right direction in FIG. 19). To do.

In this modification, the surface 19a of the guide member 19 affixed to the inner surface 12ua of the upper plate portion 12u of each guide rail 12, the inner surface 12da of the lower plate portion 12d of each guide rail 12, and the inner surface 12sa of the side plate portion 12s. This corresponds to the guide surface described in the claims. Hereinafter, the surface 19a of the guide member 19 affixed to the inner surface 12ua of the upper plate portion 12u of the guide rail 12 and the inner surface 12da of the lower plate portion 12d of the guide rail 12 and the inner surface 12sa of the side plate portion 12s are appropriately referred to as “guide surfaces”. Collectively. Moreover, the surface 21a of the guided member 21 affixed to the lower surface 20c of each insertion part 20 of the slider 13, and the upper surface 20a and the side surface 20b of each insertion part 20 are equivalent to the guided surface as described in a claim. To do. Hereinafter, the surface 21a of the guided member 21 affixed to the lower surface 20c of each insertion portion 20 of the slider 13 and the upper surface 20a and the side surface 20b of each insertion portion 20 are collectively referred to as “guided surfaces” as appropriate.

Further, in this modified example, on each surface 21 a of each guided member 21 of the slider 13, a compressed air ejection hole 22 Gu that ejects compressed air toward the surface 19 a of the guide member 19 facing in the vertical direction is provided for each insertion portion. 20 has an upper surface 20a, a compressed air ejection hole 22Gd for ejecting compressed air toward the inner surface 12da of the lower plate portion 12d of the guide rail 12 facing in the vertical direction, and a side surface 20b of each insertion portion 20 A compressed air ejection hole 22Gs that ejects compressed air toward the inner surface 12sa of the side plate portion 12s of the guide rail 12 facing in the left-right direction is provided.

In the stage device 3G, in the vertical direction, the load on the slider 13 and the like, the air pressure of the compressed air ejected from the compressed air ejection hole 22Gu, the aforementioned spring elastic force by the guide member 19, and the ejection from the compressed air ejection hole 22Gd The posture is maintained by the balance with the air pressure of the compressed air. In the left-right direction, the posture is maintained by a balance between the air pressure of the compressed air ejected from the compressed air ejection hole 22Gs on the left side of the figure and the air pressure of the compressed air ejected from the compressed air ejection hole 22Gs on the right side of the figure. Then, due to the thrust generated by the linear motor 16, the slider 13 moves in the front-rear direction along the guide rail 12.

When the slider 13 is positioned in the vicinity of the target position, the lubrication state of the guide surface of each guide rail 12 and the guided surface of the slider 13 depends on the surface 19 a of each guide member 19 and the surface of each guided member 21. 21a is in a mixed lubrication state, in a fluid lubrication state in other regions, and in a minute movement region between a guide surface of each guide rail 12 and a guided surface of the slider 13 in a mixed lubrication state. It is controlled by the air pressure of the compressed air supplied to the compressed air ejection holes 22Gu, 22Gd, 22Gs so that the characteristics are generated. Therefore, when positioning the slider 13 in the vicinity of the target position, the surface 19a of each guide member 19 and the surface 21a of each guided member 21 are in a fine contact state, and the other guide surfaces and guided surfaces are not in contact with each other. It becomes a non-contact state.

(8) When attaching a stage apparatus to a wall This modification is an optimal modification when attaching a stage apparatus to a wall. As shown in FIG. 20, the configuration of the stage apparatus 3H according to this modification is substantially the same as the stage apparatus 3 according to the above-described embodiment. However, in the stage device 3H, the surface opposite to the installation surface of the guide rail 12 of the surface plate 11 is fixed to the wall 28 in a state where the stage device 3 shown in FIG. Accordingly, the lower side in FIG. 1 corresponds to the left side in FIG. 20, the upper side in FIG. 1 corresponds to the right side in FIG. 20, the right side in FIG. 1 corresponds to the lower side in FIG. The left side in FIG. 1 corresponds to the upper side in FIG. And in the stage apparatus 3H, the above-mentioned guide member 19 is affixed on the inner surface 12sa of the side plate part 12s of the lower guide rail 12 in the figure. The aforementioned guided member 21 is attached to the lower surface 20b (the lower surface in FIG. 20) of the insertion portion 20 on the lower side of the slider 13 in the figure. When each insertion portion 20 is inserted into the recess 18 of each guide rail 12, the inner surface 12ua of the upper plate portion 12u of each guide rail 12 and the right surface 20a (the right surface in FIG. 20) of each insertion portion 20 Is in the left-right direction (left-right direction in FIG. 20), and the inner surface 12da of the lower plate portion 12d of each guide rail 12 and the left surface 20c (left-side surface in FIG. 20) of each insertion portion 20 are in the left-right direction. The upper surface 20b (upper surface in FIG. 20) of the side plate portion 12s of the side plate portion 12s of the upper guide rail 12 and the upper surface 20b (upper surface in FIG. 20) of FIG. The surface 21a of the guided member 21 affixed to the lower surface 20b of the guide member 19 and the lower surface 20b of the lower insertion part 20 shown in the figure. Are opposite to each other in the vertical direction.

In this modification, the inner surface 12ua of the upper plate portion 12u and the inner surface 12da of the lower plate portion 12d of each guide rail 12, the inner surface 12sa of the side plate portion 12s of the upper guide rail 12, and the lower guide rail 12 shown in the drawing. The surface 19a of the guide member 19 affixed to the inner surface 12sa of the side plate portion 12s corresponds to the guide surface described in the claims. The inner surface 12ua of the upper plate portion 12u and the inner surface 12da of the lower plate portion 12d of the guide rail 12, the inner surface 12sa of the side plate portion 12s of the upper guide rail 12 and the side plate portion 12s of the lower guide rail 12 are appropriately shown below. The surface 19a of the guide member 19 affixed to the inner surface 12sa is collectively referred to as a “guide surface”. Further, the right surface 20a and the left surface 20c of each insertion portion 20 of the slider 13, the upper surface 20b of the upper insertion portion 20 in the drawing, and the surface 21a of the guided member 21 attached to the lower surface 20b of the lower insertion portion 20 in the drawing. Corresponds to the guided surface described in the claims. Hereinafter, the surface 21a of the guided member 21 affixed to the right and left

surfaces

20a and 20c of each insertion portion 20 of the slider 13, the upper surface 20b of the upper insertion portion 20 and the lower surface 20b of the lower insertion portion 20 as appropriate. Are collectively referred to as “guided surfaces”.

Further, in the present modification, the right surface 20a of each insertion portion 20 of the slider 13 has a compressed air ejection hole 22Hu that ejects compressed air toward the inner surface 12ua of the upper plate portion 12u of the guide rail 12 facing in the left-right direction. The left surface 20c of each insertion portion 20 is provided with a compressed air ejection hole 22Hd for ejecting compressed air toward the inner surface 12da of the lower plate portion 12d of the guide rail 12 facing in the left-right direction. The upper surface 20b of the portion 20 is provided with a compressed air ejection hole 22Hs for ejecting compressed air toward the inner surface 12sa of the side plate portion 12s of the upper guide rail 12 in the up-down direction, and the surface 21a of the guided member 21 Is provided with a compressed air ejection hole 22Hs for ejecting compressed air toward the surface 19a of the guide member 19 facing in the vertical direction.

In the stage device 3H, in the vertical direction, the load on the slider 13 and the like, the air pressure of the compressed air ejected from the compressed air ejection hole 22Hs on the upper side in the figure, and the compression ejected from the compressed air ejection hole 22Hs on the lower side in the figure. The posture is maintained by a balance between the air pressure of the air and the aforementioned spring elastic force by the guide member 19. The horizontal direction is maintained by the balance between the air pressure of the compressed air ejected from the compressed air ejection hole 22Hu and the air pressure of the compressed air ejected from the compressed air ejection hole 22Hd. Then, due to the thrust generated by the linear motor 16, the slider 13 moves in the front-rear direction along the guide rail 12.

When the slider 13 is positioned in the vicinity of the target position, the lubrication state of the guide surface of each guide rail 12 and the guided surface of the slider 13 depends on the surface 19a of the guide member 19 and the surface 21a of the guided member 21. Between the guide surface of each guide rail 12 and the guided surface of the slider 13 in the mixed lubrication state, a linear spring characteristic is obtained in a minute movement region. The air pressure of the compressed air supplied to the compressed air ejection holes 22Hu, 22Hd, and 22Hs is controlled so as to occur. Therefore, when positioning the slider 13 in the vicinity of the target position, the surface 19a of the guide member 19 and the surface 21a of the guided member 21 are in a fine contact state, and the other guide surfaces and the guided surface are not in contact with each other. It becomes a state.

(9) Others In the above, the guide member 19 or the like of the guide rail 12 (or the guide rail 12D itself) is made of CFRP, which is a kind of FRP, and the guided member 21 or the like of the slider 13 (or the slider 13D itself). It was made up of cocoons, a kind of chalcedony, but is not limited to this. Contrary to the above, the guide member of the guide rail (or the guide rail itself) may be constituted by a hook or the like, and the guided member of the slider (or the slider itself) may be constituted by CFRP or the like.

In the above description, the guide member 19 and the like of the guide rail 12 (or the guide rail 12D itself) are made of CFRP, which is a kind of FRP, but are not limited thereto. That is, the guide member of the guide rail (or the guide rail itself) or the guided member of the slider (or the slider itself) is composed of other types of FRP such as glass fiber reinforced plastic (GFRP). May be. Or you may comprise with materials other than FRP, for example, the material which hardened the carbon nanotube with resin.

In the above description, the guided member 21 of the slider 13 (or the slider 13D itself) is configured with a heel that is a kind of chalcedony, but is not limited thereto. In other words, the guided member of the slider (or the slider itself) or the guide member of the guide rail (or the guide rail itself) is composed of other types of chalcedony such as red crest, green crest, jasper, blood stone, etc. Also good. Or you may comprise with materials other than a chalcedony, for example, quartz, ceramics, ruby, diamond-like carbon (DLC: Diamond-Like Carbon), etc.

In the above, the linear motor 16 or the like is used as the drive device, but the present invention is not limited to this, and another drive device may be used.

In the above description, the linear scale 17 is used as the position detection device. However, the position detection device is not limited to this, and other position detection devices may be used.

In addition to those already described above, the methods according to the above-described embodiments and modifications may be used in appropriate combination.

In addition, although not illustrated one by one, the above-described embodiment and each modified example are implemented with various modifications within a range not departing from the gist thereof.

DESCRIPTION OF SYMBOLS 1 Stage control system 1A, C Stage control system 2 Controller 3 Stage device 3A, B, D, E, F, G, H Stage device 4 Servo amplifier 5 Air source 6 Regulator 7 Regulator 8 Regulator 9 Regulator 9A Regulator 10 Solenoid valve 11 Surface plate 12 Guide rail 12d Lower plate portion 12s Side plate portion 12u Upper plate portion 12D Guide rail 12Dj Standing portion 12Du Upper plate portion 12E, F Guide rail 13 Slider 13D Slider 13Da Left lower plate portion 13Db Right lower plate portion 13Dc Left plate portion 1 3Dd Right side plate portion 13Du Upper plate portion 13E Slider 13Es Side plate portion 13F Slider 13Fs Side plate portion 13Fu Upper plate portion 14 Support member 15 Top base 16 Linear motor (drive device)
16E, F Linear motor (drive device)
17 Linear scale (position detection device)
18 Concave portion 19 Guide member 19 Es, Eu Guide member 19 Fs, Fu Guide member 20 Insertion portion 21 Guided member 21 Ed, Es Guided member 21 Fd, Fs Guided member 22 d, s, u Compressed air ejection holes 22 Da, Db, Dd , Du Compressed air ejection hole 22Ed, Es Compressed air ejection hole 22Fd, Fs Compressed air ejection hole 22Gd, Gs, Gu Compressed air ejection hole 22Hd, Hs, Hu Compressed air ejection hole 23 Electropneumatic regulator 24a, b Regulator 25 Solenoid valve 26 Concave portion 27 Ceiling 28 Wall 191 Carbon fiber 192 Epoxy resin F Adhering portion P Polishing machine S Spring element

Claims

A stage device that moves a moving object to a target position,
Guide surface (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua, 12da, 12sa, 19a ) Having guide rails (12; 12D; 12E; 12F);
12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surface (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21Eb; 21Fa, 21Fb; 21a, 20a 20b; 20a, 20c, 20b, 21a), sliders (13, 13D, 13E, 13F) whose movement direction is restricted by the guide rails (12; 12D; 12E; 12F);
A driving device (16; 16E; 16F) for generating a thrust of the slider (13, 13D, 13E, 13F);
A position detection device (17) for detecting the position of the slider (13, 13D, 13E, 13F),
12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21Eb; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, and 21a) are controlled so that the lubrication state is a mixed lubrication state including both boundary lubrication and fluid lubrication in at least some regions and the fluid lubrication state in other regions. Stage device (3; 3A; 3B) 3D; 3E; 3F; 3G; 3H).
The sliders (13, 13D, 13E, 13F)
The guide surfaces (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb) of the guide rail (12; 12D; 12E; 12F) 19a, 12da, 12sa; a plurality of compressed air ejection holes (22d, 22s, 22u; 22Da, 22Db, 22Dd, 22Du; 22Ed, 22Es; 22Fd, 22a, 12da, 12sa, 19a) 22Fs; 22Gd, 22Gs, 22Gu; 22Hd, 22Hs, 22Hu) to the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E ; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, has a 21a),
12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21Eb; 21Fa, 21Fb; 21a, 20a, The stage apparatus (3; 3A; 3B; 3D; 3E; 3F) according to claim 1, wherein the lubrication state with 20b; 20a, 20c, 20b, 21a) is controlled by the air pressure of the compressed air. 3G; 3H).
12a, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19Eb; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua , 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2; 21Fa, 21Fb The stage device according to claim 2, wherein the air pressure of the compressed air is controlled so that a linear spring characteristic is generated between 21 a, 20 a, 20 b and 20 a, 20 c, 20 b, 21 a). 3; 3A; 3B; 3D; 3E; 3F; 3G; 3H).
The guide surfaces (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, whose lubrication state is controlled to the mixed lubrication state 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, 21a)
The stage apparatus (3; 3A; 3B; 3D; 3E; 3F; 3G; 3H) according to any one of claims 1 to 3, wherein the stage apparatus is made of fiber-reinforced plastic.
The guide surfaces (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, whose lubrication state is controlled to the mixed lubrication state 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, 21a)
The stage apparatus (3; 3A; 3B; 3D; 3E; 3F; 3G; 3H) according to claim 4, wherein the stage apparatus is composed of the fiber-reinforced plastic obtained by hardening carbon fibers with an epoxy resin.
The guide surfaces (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, whose lubrication state is controlled to the mixed lubrication state 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, 21a)
6. A stage apparatus (3; 3A; 3B; 3D; 3E; 3F; according to claim 5, wherein surface processing is performed to exfoliate the epoxy resin on the surface to expose the carbon fiber layer. 3G; 3H).
The guide surfaces (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, whose lubrication state is controlled to the mixed lubrication state 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, 21a)
The stage apparatus (3; 3A; 3B; 3D; 3E; 3F; 3G; 3H) according to any one of claims 4 to 6, wherein the stage apparatus is composed of a chalcedony.
The guide surfaces (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, whose lubrication state is controlled to the mixed lubrication state 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, 21a)
The stage apparatus (3; 3A; 3B; 3D; 3E; 3F; 3G; 3H) according to claim 7, wherein the stage apparatus is configured by a bag.
Based on the controller (2), the stage device (3; 3A; 3B; 3D; 3E; 3F; 3G; 3H) for moving the moving object to the target position, and the movement command from the controller (2), the stage A servo amplifier (4) for controlling the position of the apparatus, and a stage control system comprising:
The stage device (3; 3A; 3B; 3D; 3E; 3F; 3G; 3H)
Guide surface (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua, 12da, 12sa, 19a ) Having guide rails (12; 12D; 12E; 12F);
12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surface (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21Eb; 21Fa, 21Fb; 21a, 20a 20b; 20a, 20c, 20b, 21a), sliders (13, 13D, 13E, 13F) whose movement direction is restricted by the guide rails (12; 12D; 12E; 12F);
A driving device (16; 16E; 16F) for generating a thrust of the slider (13, 13D, 13E, 13F);
A position detection device (17) for detecting the position of the slider (13, 13D, 13E, 13F),
12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21Eb; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, and 21a) are controlled so that the lubrication state is a mixed lubrication state including both boundary lubrication and fluid lubrication in at least some regions and the fluid lubrication state in other regions. Stage control system (1; 1) ; 1C).
The sliders (13, 13D, 13E, 13F)
The guide surfaces (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb) of the guide rail (12; 12D; 12E; 12F) 19a, 12da, 12sa; a plurality of compressed air ejection holes (22d, 22s, 22u; 22Da, 22Db, 22Dd, 22Du; 22Ed, 22Es; 22Fd, 22a, 12da, 12sa, 19a) 22Fs; 22Gd, 22Gs, 22Gu; 22Hd, 22Hs, 22Hu) to the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E ; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, has a 21a),
The compressed air ejection holes (22d, 22s, 22u; 22Da, 22Db, 22Dd, 22Du; 22Ed, 22Es; 22Fd, 22Fs; 22Gd, 22Gs, 22Gu; 22Hd, 22Hs, the slider (13, 13D, 13E, 13F) 22 Hu) is supplied with compressed air, and the guide surfaces (12 ua, 12 sa, 19 a; 12 ua, 19 a, 12 sa, 19 b; 12 ua, 19 a, 19 b; 12 Da, 12 Db, 12 Dc; 19 E1, 19 E2; 19 Fa, 19 Fb; 19 a, 12 da , 12sa; 12ua, 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2 ; 21 Fa 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, 21a) The air supply device (5, 6, 7, 8, 9; 5, 6, 7, The stage control system (1; 1A; 1C) according to claim 9, further comprising: 8, 9A, 24a, 24b; 5, 6, 9, 23).
The air supply device (5, 6, 7, 8, 9; 5, 6, 7, 8, 9A, 24a, 24b; 5, 6, 9, 23)
An air source (5);
Regulators (6, 7, 8, 9; 6, 7, 8, 9A, 24a, 24b; 6, 9, 23) for adjusting the air pressure of the compressed air supplied from the air source (5) ,
12a, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19Eb; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua , 12da, 12sa, 19a) and the guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2; 21Fa, 21Fb 11. The stage control according to claim 10, wherein the compressed air is supplied at an air pressure adjusted so as to produce a linear spring characteristic between 21a, 20a, 20b and 20a, 20c, 20b, 21a). System (1; 1A; 1C).
Guided surfaces (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21Eb; 21Fa, 21Fb; 21a, 20a, 20b; 20a , 20c, 20b, 21a) supplied to the compressed air ejection holes (22d, 22s, 22u; 22Da, 22Db, 22Dd, 22Du; 22Ed, 22Es; 22Fd, 22Fs; 22Gd, 22Gs, 22Gu; 22Hd, 22Hs, 22Hu) Based on a command from the controller (2) or the servo amplifier (4), the compressed air to be transmitted is guided to the guide surfaces (12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 9E2; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua, 12da, 12sa, 19a) and the guided surface (20a, 20b, 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, 21a), the compressed air at the first pressure, and the guide surface ( 12ua, 12sa, 19a; 12ua, 19a, 12sa, 19b; 12ua, 19a, 19b; 12Da, 12Db, 12Dc; 19E1, 19E2; 19Fa, 19Fb; 19a, 12da, 12sa; 12ua, 12da, 12sa, 19a) and the above Guided surface (20a, 20b 21a; 20a, 21a, 20b, 21b; 20a, 21a, 21b; 13D1, 13D2, 13D3, 13D4, 13D5; 21E1, 21E2; 21Fa, 21Fb; 21a, 20a, 20b; 20a, 20c, 20b, 21a) A solenoid valve (10; 10, 25) for switching to the compressed air at a second pressure for mixing lubrication;
The solenoid valve (10; 10, 25)
The compressed air supplied to the compressed air ejection holes (22d, 22s, 22u; 22Da, 22Db, 22Dd, 22Du; 22Ed, 22Es; 22Fd, 22Fs; 22Gd, 22Gs, 22Gu; 22Hd, 22Hs, 22Hu) When moving to the vicinity of the target position (13, 13D, 13E, 13F), switching to the compressed air of the first pressure is performed, and the slider (13, 13D, 13E, 13F) is positioned in the vicinity of the target position. 12. The stage control system (1; 1A) according to any one of claims 9 to 11, wherein the stage control system switches to compressed air at the second pressure.
The air pressure of the compressed air supplied to the compressed air ejection holes (22d, 22s, 22u) of the guided surfaces (20a, 20b, 21a) is commanded from the controller (2) or the servo amplifier (4). Based on the first pressure for bringing the guide surface (12ua, 12sa, 19a) and the guided surface (20a, 20b, 21a) into a fluid lubrication state, the guide surface (12ua, 12sa, 19a) and the An electropneumatic regulator (23) for changing the guided surfaces (20a, 20b, 21a) to a second pressure for making a mixed lubrication state;
The electropneumatic regulator (23)
The air pressure of the compressed air supplied to the compressed air ejection holes (22d, 22s, 22u) is changed to the first pressure when moving the slider (13) to the vicinity of the target position, and the vicinity of the target position. The stage control system (1C) according to any one of claims 9 to 11, wherein the second pressure is varied when positioning the slider (13).