WO2012162933A1

WO2012162933A1 - Method for manufacturing color filter substrate, optical mask, and photoreaction layer

Info

Publication number: WO2012162933A1
Application number: PCT/CN2011/077471
Authority: WO
Inventors: 陈孝贤; 李冠政
Original assignee: 深圳市华星光电技术有限公司
Priority date: 2011-06-03
Filing date: 2011-07-22
Publication date: 2012-12-06
Also published as: US20120308919A1; CN102213785A

Abstract

A method for manufacturing a color filter substrate, comprising the steps of: providing a substrate (10); providing a photoreaction layer (20) covered on the substrate (10); providing an optical mask (30) disposed above the photoreaction layer (20); providing different frequency bands of light to irradiate the photoreaction layer (20) through the optical mask (30) to form color resist areas (201, 203, 205) and a black matrix (207) respectively on the photoreaction layer (20). Also disclosed are the optical mask (30) and the photoreaction layer (20) for manufacturing the color filter substrate. The manufacturing method has the advantages of shortening the processing cycle period, and improving aperture ratio and display contrast.

Description

Method for manufacturing color filter substrate, optical mask and photoreactive layer

[Technical Field]

The present invention relates to the field of liquid crystal display, and in particular to a method for manufacturing a color filter substrate, an optical mask, and a photoreactive layer.

【Background technique】

Liquid crystal displays (LCDs) are not only light, thin, and small, but also have the advantages of low power consumption, no radiation, and relatively low manufacturing cost. Therefore, they are currently dominant in flat panel display. LCD monitors are ideal for desktop computers, palmtop computers, personal digital assistants (PDAs), cellular phones, televisions, and a variety of office automation and audiovisual devices.

The liquid crystal display panel is a main component of the liquid crystal display device. The current mainstream liquid crystal display panel is formed by laminating a thin film transistor (TFT) substrate and a color filter (CF) substrate, and A liquid crystal layer is disposed between the two substrates. The setting accuracy of the red color resisting region, the green color resisting region, the blue color resisting region, and the black shading region (Black Matrix, BM) on the color filter substrate easily affects the aperture ratio and contrast of the display device, thereby affecting the display. The quality of the device is therefore very important for the fabrication of the color resistive regions and black shading regions on the color filter substrate.

At present, the manufacturing method of the color filter substrate is mostly manufactured by BM/R/G/B/ITO/PS, and it is impossible to achieve the effect of component color by one exposure, so it is necessary to apply coating and exposure in several steps. And the development and other steps can form different color resist layers; it is also limited by this, so it is necessary to open different masks according to the precision of the machine, and perform the alignment exposure on different machines. The accuracy problem will result in a decrease in the aperture ratio during design. In addition, because of the multi-layer production, the area of the R/G/B layer of the BM stack will cause the height to be inconsistent with the active area of the pixel (hereinafter referred to as the AA area), resulting in different liquid crystal tilt angles, resulting in light leakage. Reduce the contrast.

Therefore, the current method for manufacturing a color filter substrate has a drawback that the process is complicated and the aperture ratio is lowered and the display contrast is lowered. In summary, how to design a simplified color filter substrate manufacturing method, and improve the aperture ratio and display contrast is one of the problems that the industry has to solve.

[Summary of the Invention]

The technical problem to be solved by the present invention is to provide a basic manufacturing method of a color filter, an optical mask, and a photoreactive layer to simplify the process, increase the aperture ratio, and display contrast.

In order to solve the above technical problem, one technical solution for the present invention is to provide a method for manufacturing a color filter substrate, the manufacturing method comprising the steps of: providing a substrate; providing a photoreactive layer, wherein the photoreactive layer is covered Providing an optical mask on the substrate, the optical mask is disposed above the photoreactive layer; and providing light of different frequency bands to illuminate the photoreactive layer through the optical mask to respectively A color resisting region and a black shading region are formed on the photoreactive layer.

The substrate is a glass substrate.

Wherein, the color resisting region formed on the photoreactive layer comprises a red color resisting region, a green color resisting region and a blue color resisting region.

Wherein, the red color resisting region, the green color resisting region and the blue color resisting region are arranged in an array on the photoreactive layer, and the black light blocking region is disposed between two adjacent color resisting regions to isolate adjacent Two of the color resisting regions.

Wherein, the color resisting region formed on the photoreactive layer after being illuminated and the black shading region receiving light of other frequency bands will not undergo color change again.

The optical mask includes a plurality of optical band pass filtering units arranged in a matrix, and each of the optical band pass filtering units includes:

a plurality of first light-transmitting regions, each of the first light-transmitting regions selectively transmitting light of a predetermined frequency band to limit light passing through other frequency bands;

a plurality of second light-transmitting regions disposed between the two adjacent first light-transmitting regions to isolate two adjacent first light-transmitting regions, and the second The light transmissive area allows light transmission in multiple frequency bands. The plurality of first light-transmitting regions of the optical mask respectively include a first-band light-transmitting region, a second-band light-transmitting region, and a third-band light-transmitting region;

Providing the first band of light, the second band of light, and the third band of light to illuminate the photoreactive layer through the optical mask, wherein:

The first frequency band light transmitting region is only transparent to the first frequency band light, and the light reactive layer forms a color resisting region of a first color of the red, green and blue primary colors under the illumination of the first frequency band;

The light-transmitting region of the second frequency band is only transparent to the light of the second frequency band, and the light-reactive layer forms a color resisting region of the second color of the three primary colors of red, green and blue under the illumination of the light of the second frequency band;

The third frequency band light transmitting region is only transparent to the third frequency band light, and the light reactive layer forms a color resisting region of a third color among the three primary colors of red, green and blue under the illumination of the third frequency band;

When the first band light, the second band light, and the third band light are simultaneously transmitted through the second light transmitting region, the photoreactive layer forms a black light shielding region.

The photoreactive layer forms a red color resisting region under the illumination of the first frequency band, and the photoreactive layer forms a green color resisting region under the illumination of the second frequency band, the photoreaction The layer forms a blue color resistive region under illumination of the third frequency band of light.

Among them, a single wavelength laser diode is used as a light source to provide desired illumination light.

Wherein, the optical mask is an optical band pass filter lens array.

In order to solve the above technical problem, one technical solution for the present invention is to provide an optical mask for preparing a color filter substrate, the optical mask comprising a plurality of optical band pass filtering units arranged in a matrix, Each of the optical band pass filtering units includes: a plurality of first light transmitting regions, each of the first light transmitting regions selectively transmitting light of a predetermined frequency band; a plurality of second light transmitting regions, the second The light-transmitting region allows light transmission of a plurality of frequency bands; wherein the second light-transmitting region is disposed between two adjacent first light-transmitting regions to isolate two adjacent first light-transmitting regions .

The plurality of first light transmissive regions include:

a light-transmitting area of the first frequency band, wherein the light-transmitting area of the first frequency band only transmits light of the first frequency band;

a second frequency band light transmitting area, wherein the second frequency band light transmitting area is only permeable to the second frequency band light; a light transmission area of the third frequency band, wherein the light transmission area of the third frequency band is only transparent to the third frequency band;

And the first frequency band light, the second frequency band light, and the third frequency band light are both transmitted through the second light transmitting area.

In order to solve the above technical problem, one technical solution adopted by the present invention is to provide a photoreactive layer for preparing a color resist layer of a color filter substrate, and the photoreaction is irradiated by incident light of a predetermined frequency band. The layer forms a color resisting region of one of the three primary colors of red, green and blue; and the light-reactive layer forms a black light-shielding region under illumination of a plurality of the predetermined frequency bands.

The incident light of the preset frequency band is divided into first frequency band light, second band light, and third band light;

The light-reactive layer forms a light-transmissive red color resisting region under illumination of the first-band light; and the light-reactive layer forms a light-transmissive green color resist under illumination of the second-band light The light-reactive layer forms a light-transmissive blue color resisting region in the light of the third frequency band; the light in the first frequency band, the light in the second frequency band, and the light in the third frequency band Under common illumination, the photoreactive layer forms a black shading zone.

Different from the prior art, the method for manufacturing a color filter substrate of the present invention is provided by disposing the photoreactive layer on the substrate, and the optical mask is disposed above the photoreactive layer to provide Light of different frequency bands is irradiated to the photoreactive layer through the optical mask to form a color resisting region and a black shading region on the photoreactive layer, respectively, so that the color resisting region and the black shading can be completed with only one exposure. The manufacturing of the zone simplifies the process steps and shortens the cycle time of the process; and, because the BM light-shielding layer and the R/G/B color-resist layer are prepared by one exposure, the BM shading is not considered in the design. The exposure accuracy of the layer and the R/G/B color resist layer can increase the aperture ratio at the time of design; in addition, since the process is simplified, the height difference between the area of the BM stack R/G/B color resist layer and the pixel AA area is lowered. , can further improve the contrast and light transmittance. [Description of the Drawings]

1 is a flow chart showing a method of manufacturing a color filter substrate of the present invention;

2 is a process diagram of a method of manufacturing a color filter substrate of the present invention;

3 is a schematic structural view of an optical mask of the present invention;

4 is a schematic cross-sectional structural view of an optical band pass filter unit of the optical mask shown in FIG. 3; FIG. 5 is a schematic view showing the structure of the photoreactive layer of the present invention before illumination;

6 is a schematic cross-sectional view showing a color filter substrate prepared by irradiating a photoreactive layer of the present invention.

【detailed description】

The invention will now be described with reference to the accompanying drawings.

1 and 2, FIG. 1 is a flow chart showing a method of manufacturing a color filter substrate of the present invention, and FIG. 2 is a flow chart showing a method of manufacturing the color filter substrate of the present invention.

The present invention provides a method of manufacturing a color filter substrate, the manufacturing method comprising the steps of: S10: providing a substrate 10;

In this step, the substrate 10 is generally coated with a glass substrate, and the glass substrate is cleaned to remove organic or inorganic substances on the surface thereof, and the surface of the glass substrate is kept flat.

S20: providing a photoreactive layer 20, the photoreactive layer 20 covering the substrate 10;

In this step, the photoreactive layer 20 is disposed on a surface of the glass substrate 10, and the photoreactive layer 20 is uniformly distributed on the glass substrate 10 and the surface is flat. The light-reactive layer 20 can generate different color regions under illumination of different frequency bands, that is, after the light-reactive layer 20 is irradiated with light of the same frequency band, the corresponding color region of the same color is generated in the region irradiated by light; The illuminated area corresponds to a color area that produces different colors. The color change of the photoreactive layer 20 after receiving the illumination is irreversible and can be kept stable, that is, after receiving the color change of the light irradiation in the same frequency band, the light received in the other frequency bands does not change color again.

S30: providing an optical mask 30, and an optical mask 30 is disposed above the photoreactive layer 20;

S40: providing light having different frequency bands to illuminate the photoreactive layer 20 through the optical mask 30, A color resisting region and a black light blocking region 207 are formed on the photoreactive layer 20, respectively.

3 and FIG. 4, FIG. 3 is a schematic structural view of the optical mask 30 of the present invention, and FIG. 4 is a schematic cross-sectional view of the optical band pass filtering unit 300 of the optical mask 30 shown in FIG.

Specifically, an optical mask 30 is provided in step S30, which includes a plurality of optical band pass filtering units 300 arranged in a matrix, each optical band pass filtering unit 300 includes a plurality of first light transmitting regions 301, 303, 305 and a plurality of second light transmitting regions 307. The first light-transmitting regions 301, 303, and 305 selectively pass light of a predetermined frequency band to restrict the passage of light of other frequency bands; and the second light-transmitting region 307 allows light of a plurality of frequency bands to pass.

In this embodiment, the first light-transmitting regions 301, 303, and 305 respectively include a first-band light-transmitting region 301, a second-band light-transmitting region 303, and a third-band light-transmitting region 305. The first band light transmission area 301 can only transmit light in the first frequency band; the second frequency band light transmission area 303 can only transmit light in the second frequency band; and the third frequency band transparent area 305 can only transmit light in the third frequency band.

The plurality of second light-transmitting regions 307 are disposed between the two adjacent first light-transmitting regions to isolate two adjacent first light-transmitting regions, and the second light-transmitting regions 307 allow light of a plurality of frequency bands to pass through. The first band light, the second band light, and the third band light are both transmitted through the second light transmitting region 307.

In the present embodiment, the optical mask 30 may be specifically provided as an optical band pass filter lens array having a plurality of functions of the optical band pass filtering unit 300 arranged in a matrix.

In step S40, specifically, a light source including the first band light, the second band light, and the third band light is provided to illuminate the photoreactive layer 20 through the optical mask 30, wherein:

The light-transmitting region 301 of the first frequency band can only transmit light of the first frequency band, and the light-reactive layer 20 forms a color resisting region of the first color of the three primary colors of red, green and blue under the illumination of the light of the first frequency band. For example, in the present embodiment, the photoreaction layer 20 can form a red color resistive region 201 under the illumination of the first band of light.

The second-band light-transmitting region 303 can only transmit light in the second frequency band, and the light-reactive layer forms a color-blocking region of the second color among the three primary colors of red, green and blue under the illumination of the light in the second frequency band. For example, in the present embodiment, the reaction layer 20 can form a green color resistive region 203 under irradiation of light in the second frequency band.

The third-band light-transmitting region 305 can only transmit light in the third frequency band, and the photo-reactive layer is illuminated in the third frequency band. The color resisting region forming the third color among the three primary colors of red, green and blue is shot. For example, in the present embodiment, the reaction layer

20 A blue color resistive region 205 is formed under illumination of the third frequency band of light.

When the first band light, the second band light, and the third band light are simultaneously transmitted through the second light transmitting region 307, the photoreactive layer 20 may form a black light blocking region 207.

In the embodiment of the present invention, the optical band pass filtering unit 300 that includes the light of different frequency bands is filtered by the optical band pass filtering unit 300 of the optical mask 30, and the light of the different frequency bands is irradiated to the light reaction layer 20, thereby corresponding to the light. The reaction layer 20 forms a color resisting region and a black light blocking region 207. The light source may select light having a full frequency band, that is, the first band light, the second band light, and the third band light required to satisfy the color change of the photoreactive layer 20.

Please refer to FIG. 5. FIG. 5 is a schematic structural view of the photoreactive layer 20 of the present invention before light irradiation. The photoreaction layer 20 is used to prepare a color resist layer of a color filter substrate, which has the following characteristics:

The light-reactive layer 20 can form a color resisting region of one of the three primary colors of red, green and blue under the illumination of the incident light of the preset frequency band;

The light-reactive layer can form a black light-shielding region under irradiation of incident light of a plurality of preset frequency bands.

Please refer to FIG. 6. FIG. 6 is a cross-sectional structural view of a color filter substrate prepared by irradiating a photoreactive layer of the present invention with light.

Specifically, the incident light of the preset frequency band is divided into first frequency band light, second band light, and third band light. And, the light of the first band light, the second band light, and the third band light is irradiated to the photoreactive layer 20 through the optical mask 30. The optical band pass filtering unit 300 of the optical mask 30 has a frequency selective passage effect on the incident light.

The light-transmitting region 301 of the first frequency band can only transmit light of the first frequency band, and the light-reactive layer 20 forms a light-transmissive red color resisting region 201 under the illumination of the light of the first frequency band;

The second band light transmitting region 303 can only transmit light in the second frequency band, and the light reflecting layer 20 forms a light transmissive green color resisting region 203 under the illumination of the second frequency band;

The third-band light-transmitting region 305 can only transmit light in the third frequency band, and the light-reactive layer 20 forms a light-transmissive blue color resisting region 205 under the illumination of the third-band light. That is, under the illumination of a preset frequency band, corresponding monochromatic color resisting regions 201, 203, 205 may be formed in the photoreactive layer 20; when the first band light, the second band light, and the third band light When irradiated at the same time, the photoreactive layer 20 can form a black light-shielding region 207.

In this step, the optical mask 30 can be illuminated by using a light source having a full-band light, and the optical band pass filtering unit 300 of the optical mask 30 can select and pass the light according to the frequency band to realize the irradiation of the photoreactive layer 20.

In addition, the present invention has other specific embodiments, such as: correspondingly setting the first frequency band transmission area 301, the second frequency band transmission area 303, and the third frequency band transmission area 305 of the first light transmission area of the optical mask 30 respectively. a laser diode having a single wavelength for emitting light of the first frequency band, the second band of light, and the third band of light is used as a light source to illuminate the photoreactive layer 20; and the second transparent region 307 of the optical mask 30 is disposed to have a simultaneous emission The second light-transmitting region 307 is irradiated as a light source by a single-band light, a second-band light, and a single-wavelength laser diode of the third-band light.

Different from the prior art, the present invention covers the photoreactive layer 20 on the substrate 10, and the optical mask 30 is disposed above the photoreactive layer 20, and provides light including different frequency bands through the optical mask 30 to the photoreactive layer 20. Irradiation is performed to form a color resisting region and a black shading region on the photoreactive layer 20, respectively, so that the fabrication of the color resisting region and the black shading region 207 can be completed in one exposure, thereby simplifying the process steps and shortening the process. And the preparation of the BM light-shielding layer and the R/G/B color resist layer can be completed by one exposure, so the exposure precision of the BM light-shielding layer and the R/G/B color resist layer need not be considered in design. The aperture ratio at the time of design can be improved; in addition, since the process is simplified, the difference in height between the region of the BM stack R/G/B color resist layer and the pixel AA region is lowered, and the contrast and light transmittance can be further improved.

The above is only the embodiment of the present invention, and is not intended to limit the scope of the invention, and equivalent transformations made by the description of the invention and the drawings are directly or indirectly applied to other related technical fields. Within the scope of patent protection of the present invention.

Claims

Rights request

A method of manufacturing a color filter substrate, characterized in that the manufacturing method comprises the steps of: providing a substrate;

Providing a photoreactive layer, the photoreactive layer covering the substrate;

Providing an optical mask, the optical mask being disposed above the photoreactive layer;

Light of different frequency bands is provided to illuminate the photoreactive layer through the optical mask to form a color resisting region and a black shading region on the photoreactive layer, respectively.

The method according to claim 1, wherein the substrate is a glass substrate.

3. The manufacturing method according to claim 1, wherein the color resisting region formed on the photoreactive layer comprises a red color resisting region, a green color resisting region, and a blue color resisting region.

The manufacturing method according to claim 3, wherein the red color resisting region, the green color resisting region, and the blue color resisting region are arranged in an array on the photoreactive layer, and the black shading region is disposed in the phase Between two adjacent color resisting regions to isolate adjacent two of the color resisting regions.

The manufacturing method according to claim 1, wherein the color resisting region formed by the light on the photoreactive layer and the black shading region receive light of other frequency bands without color change again. .

The manufacturing method according to claim 1, wherein the optical mask comprises a plurality of optical band pass filtering units arranged in a matrix, and each of the optical band pass filtering units comprises:

a plurality of second light-transmitting regions disposed between the two adjacent first light-transmitting regions to isolate two adjacent first light-transmitting regions, and the second The light transmissive area allows light transmission in multiple frequency bands.

The manufacturing method according to claim 6, wherein the plurality of first light-transmitting regions of the optical mask respectively comprise a first-band light-transmitting region, a second-band light-transmitting region, and a third frequency band Light transmission Area;

The manufacturing method according to claim 7, wherein the photoreactive layer forms a red color resisting region under illumination of the first frequency band, and the photoreactive layer is in the second frequency band Under the illumination, a green color resisting region is formed, and the photoreactive layer forms a blue color resisting region under the illumination of the third frequency band.

9. The manufacturing method according to claim 1, wherein the laser light of a single wavelength is used as a light source to provide a desired illumination light.

10. The manufacturing method according to claim 1, wherein the optical mask is an optical band pass filter lens array.

An optical mask for preparing a color filter substrate, wherein the optical mask comprises a plurality of optical band pass filtering units arranged in a matrix, each of the optical band pass filtering units comprising: a plurality of first light-transmitting regions, each of the first light-transmitting regions selectively transmitting light of a predetermined frequency band; and a plurality of second light-transmitting regions, wherein the second light-transmitting regions allow light transmission of a plurality of frequency bands ;

The second transparent region is disposed between the two adjacent first light-transmitting regions to isolate the two adjacent first light-transmitting regions.

The optical mask according to claim 11, wherein the plurality of first light transmitting regions The domain includes:

a second frequency band light transmitting area, wherein the second frequency band light transmitting area is only permeable to the second frequency band light;

a light transmission area of the third frequency band, wherein the light transmission area of the third frequency band is only transparent to the third frequency band;

A photoreactive layer for preparing a color resist layer of a color filter substrate, wherein the photoreactive layer forms a color of one of red, green and blue primary colors under irradiation of incident light of a predetermined frequency band Resistance zone

The light-reactive layer forms a black light-shielding region under irradiation of incident light of a plurality of the predetermined frequency bands.

14. The optical reaction layer according to claim 13, wherein

The incident light of the preset frequency band is divided into first frequency band light, second band light, and third band light; and, under the illumination of the first band of light, the photoreactive layer forms a light transmissive red color The light-reactive layer forms a light-transmissive green color resisting region under illumination of the second-band light; and the light-reactive layer forms a light-transmittable light under illumination of the third-band light a blue color resisting region; the light reflecting layer forms a black light blocking region under the common illumination of the first frequency band light, the second frequency band light, and the third frequency band light.

The optical reaction layer according to claim 13, wherein the color resisting region formed on the photoreactive layer after illumination and the black shading region receive light of other frequency bands does not reappear color change.