WO2012151788A1 - 冲击波加速纳米颗粒诱导金属表面纳米化方法及装置 - Google Patents

冲击波加速纳米颗粒诱导金属表面纳米化方法及装置 Download PDF

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WO2012151788A1
WO2012151788A1 PCT/CN2011/077728 CN2011077728W WO2012151788A1 WO 2012151788 A1 WO2012151788 A1 WO 2012151788A1 CN 2011077728 W CN2011077728 W CN 2011077728W WO 2012151788 A1 WO2012151788 A1 WO 2012151788A1
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nanoparticle
controller
metal
workpiece
laser
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French (fr)
Inventor
任旭东
李应红
阮亮
汪诚
楚维
何卫峰
周鑫
皇甫喁卓
张永康
戴峰泽
张田
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Jiangsu University
Air Force Engineering University of PLA
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Jiangsu University
Air Force Engineering University of PLA
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/356—Working by laser beam, e.g. welding, cutting or boring for surface treatment by shock processing
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/082—Coating starting from inorganic powder by application of heat or pressure and heat without intermediate formation of a liquid in the layer
    • C23C24/085—Coating with metallic material, i.e. metals or metal alloys, optionally comprising hard particles, e.g. oxides, carbides or nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof

Definitions

  • the invention relates to the field of surface nanocrystallization of metal materials, in particular to a method for laser-induced shock wave acceleration of metal nanoparticles to realize nano-metal surface.
  • Metal nanocrystalline materials due to their fine grain size (usually less than 100 Nm), high interface density, showing unique mechanical and physical and chemical properties, opening up a new path for improving the comprehensive mechanical properties and service behavior of traditional materials.
  • the failure of materials mostly occurs on the surface of materials. If the fatigue, corrosion and wear of materials are extremely sensitive to the surface structure and properties of materials, the structure and properties of the materials directly affect their overall performance.
  • the metal surface nano-treatment technology utilizes the excellent properties of nano-metal materials to prepare a surface layer with nano-crystal structure on the surface of traditional engineering metal materials to improve the surface structure properties of metal materials.
  • fatigue properties, corrosion properties and friction and wear properties improve the overall mechanical properties of the material and extend the service life of the material. Therefore, the nano-surface of metal materials is of great significance for improving the service life of metal parts.
  • the first type is surface coating or deposition nanocrystallization, that is, the introduction of heterogeneous materials to form nanostructure coatings on the surface of materials.
  • the main technologies are: physical vapor deposition (PVD), Chemical vapor deposition (CVD), sputter coating, electroplating and spraying. Due to the shortcomings of weak adhesion between the coating and the substrate and between the coating particles, it is easy to cause the surface layer to peel off or fall off, which limits the industrial application of the method.
  • the second type is mechanical surface grinding and nanocrystallization, that is, mechanical deformation of the metal surface is severely deformed, thereby refining the surface structure and surface nanocrystallization.
  • the main technologies are: high energy shot peening, ultrasonic peening, rolling and other methods.
  • the surface nano-layer prepared by the method does not have a clear interface with the matrix structure, and does not fall off or separate, thereby greatly improving the performance of the material, but the method has some limitations, such as it is difficult to have a curved surface.
  • the shortcomings of surface nano-components and low production efficiency limit the promotion of industrialization.
  • Magnetic surface nanocrystallization method for ultrasonic high energy surface machining (publication number CN 2334033A) is to make the punch on the ultrasonic transducer directly contact with the surface to be treated of the metal member, input the ultrasonic vibration energy into the metal member, and cause a local high-strain rate of strong plastic deformation on the metal surface, thereby layering the metal surface.
  • the grain is refined to the nanometer scale.
  • the greatest advantage of the invention is that it does not require any projectiles or particles as an intermediate energy carrier, and can form a nanocrystal having the same chemical composition as the metal component substrate on the metal surface and significantly improve the surface finish of the metal member.
  • the disadvantage is that due to the limitation of the shape and size of the punch, the surface of the treated metal material is not flat, there are pits and bosses, and the roughness is high, which affects the surface properties to some extent.
  • the present invention is directed to the deficiencies of the above techniques, and provides a method for laser-induced shock wave acceleration of metal nanoparticles to achieve nano-metal surface.
  • the air compressor generates tremendous pressure to accelerate the metal nanoparticles into a closed working chamber with a venting device.
  • the black lacquer ejected from the tapered hole generates a shock wave under laser irradiation, and the laser-induced shock wave is continuously accelerated.
  • the metal nanoparticles have a certain speed, so that they impact the surface of the metal material at the maximum speed, and embed the surface of the metal material to form a nano layer, thereby realizing the conversion of the surface of the metal material.
  • shock wave accelerating metal nano-particles to induce nano-metal surface is: the laser is irradiated to the black paint sprayed from the tapered hole through the high-pressure resistant K9 glass, and the black paint absorbs the laser energy to expel the compressed air to form a high-intensity shock wave, high intensity.
  • the shock wave generates a great thrust to the metal nanoparticles with a certain speed to move downward at the initial velocity of several times of sound velocity. As the shock wave propagates continuously in the air, when the metal nanoparticle moves to the next position, the shock wave The generated thrust accelerates the metal nanoparticles.
  • the thrust generated by the shock wave accelerates the metal nanoparticles again, and the thrust generated by the shock wave propagating in the air continuously accelerates the metal nanoparticles.
  • the speed of the nanoparticles is getting faster and faster.
  • the surface of the metal material reaches the maximum speed of the metal nanoparticles, the surface of the metal material is impacted at this maximum speed, and the surface of the metal material is embedded to form a nano layer, and at the same time, due to the surface between the metal nanoparticles and the metal material.
  • the impact of the metal surface causes serious sexual degeneration forms a large number of dislocations, twin or subcrystalline structures leading to grain refinement, and the surface of the metal material itself forms nanocrystals, thereby improving the surface structure properties of the metal material, improving the overall mechanical properties of the material, and prolonging the service life of the material. .
  • the invention includes a control system, a light guiding system, a table control system, and an auxiliary system.
  • the control system includes an industrial controller, a digital controller, a laser controller, and a pressure controller.
  • the upper end of the digital controller is connected to the laser controller, the lower end is connected to the industrial controller, and the laser controller is connected to the high-power pulsed laser device.
  • the industrial controller controls the laser controller, the spot adjustment device and the five-axis linkage table through a digital controller.
  • the laser controller controls the high-power pulse laser device, and the pressure controller controls the pressure of the gas output in the gas storage tank.
  • the light guiding system comprises a light guiding tube, an impact head and a spot adjusting device.
  • the spot adjustment device is located between the high power pulsed laser device and the impact head and is connected to the digital controller.
  • the high power pulsed laser device is above the spot adjustment device, and the impact head is below the spot adjustment device.
  • the focusing lens is located in the impact head, and the light pipe is connected in series with the high power pulse laser device, the spot adjusting device and the impact head.
  • the workbench control system includes a digital controller, a workpiece, and a five-axis linkage workbench.
  • the workpiece is placed on the five-axis linkage table, and the digital controller adjusts the relative position of the workpiece and the nanoparticle nozzle by controlling the five-axis linkage table.
  • the auxiliary system comprises an air compressor, a paint feeding device, a nano particle nozzle, a powder feeding device, an exhaust device, a closed working chamber and a metal nanoparticle recovery device; the nanoparticle nozzle is located above the top of the closed working chamber, nanometer
  • the particle nozzle is hollow cylindrical and contains a circular inner cavity and an outer cavity.
  • the gasket A is located on the flange of the outer wall of the inner cavity, and the high-pressure resistant K9 glass is placed between the gasket A and the gasket B, and is fixed by the top cover.
  • the bottom of the inner cavity has two tapered holes symmetrically distributed along the axis, and the black paint input port on the upper left portion of the inner cavity is connected with the paint feeding device, and the nanoparticle input port A and the nanoparticle input port B symmetrically distributed along the axis of the upper portion of the outer cavity Connected to the powder feeding device through the air guiding tube respectively;
  • the powder feeding device is connected to the pressure controller through the air guiding tube;
  • the pressure controller is connected to the gas storage tank through the air guiding tube;
  • the exhaust device and the metal nanoparticle recovery device respectively Connected to the closed working chamber, the exhaust device is on the left side of the closed working chamber, the exhaust pipe is located in the lower part of the five-axis linkage table, and the metal nanoparticle recovery device is in the closed working chamber right
  • the exhaust device is used to discharge the gas in the closed working chamber, and the metal nanoparticle recovery device is used to recover excess metal nanoparticles.
  • the process conditions are that the distance from the nanoparticle nozzle to the surface of the workpiece is 5 mm to 8 mm; the particle size of the metal nanoparticles is 10 nm to 50 nm; the metal nanoparticles are titanium carbide, Silicon carbide, etc.; compressed gas is air; pressure is 0.5 Map ⁇ 3.0MPa; gas flow rate is 240 m / s ⁇ 1000m / s; black lacquer output pressure is 480 ⁇ 500kpa; tapered hole nozzle diameter is 2mm, cone angle is 28 °; high power pulse laser device laser pulse width is adjustable from 5ms to 100ms; The energy is adjustable from 10 J to 100 J; the spot size of the spot adjusting device is 0.5 mm to 12 mm.
  • the moving speed of the metal nanoparticles can reach 3340m/s ⁇ 6000m/s.
  • the metal nanoparticles hit the surface of the metal material at this speed and embed the surface to form a nano layer.
  • the metal nano-particles that cannot be embedded in the surface of the metal material The particles are recovered and reused by a metal nanoparticle recovery device.
  • the innovation of the technology of the present invention is that the high-speed gas generated by the compressed air gives the metal nanoparticles a large speed, and the black paint sprayed from the tapered hole absorbs the laser energy under the laser radiation, rapidly vaporizes, ionizes, and forms almost simultaneously.
  • a large number of dense high-temperature plasmas the plasma continues to absorb the laser energy to rapidly heat up and expand, and then explode to form a high-intensity shock wave.
  • the high-intensity shock wave generates a strong thrust on the metal nanoparticles to move downward at an initial velocity of several times the speed of sound.
  • the continuous propagation of shock waves in the air accelerates the metal nanoparticles continuously.
  • the speed of the metal nanoparticles is getting faster and faster, causing them to impact the surface of the metal material at the maximum speed and embedding the surface of the metal material to form a nano layer. Due to the impact of the surface of the metal nanoparticles and the metal material, the metal surface causes severe plastic deformation to form a large number of dislocations, twin or subcrystalline structures leading to grain refinement, and the surface of the metal material itself also forms nanocrystals.
  • the five-axis linkage table has three coordinate movements and two rotations, so the workpiece on the table can be moved and rotated, so that the workpieces are at different positions and different angles, so that components with large curvature changes can be made. Surface nanocrystallization.
  • the method directly injects metal nanoparticles into the surface of the metal material to form a thick layer of nano-layer with excellent performance, and the surface nano-effect is good.
  • the metal nanoparticles that have not been embedded in the surface of the metal material can be reused by the metal nanoparticle recovery device.
  • the surface of the metal material after the treatment of the method of the invention has small deformation and low roughness.
  • the method of the present invention can perform surface nanocrystallization (such as gears and cylindrical spring parts, etc.) on components with large curvature changes and complex shapes.
  • the method of the present invention does not cause defects such as corrosion and cracks on the surface of the metal material.
  • the method can realize automation, high production efficiency and fast surface nanometerization speed.
  • Figure 1 Schematic diagram of shock wave accelerated nanoparticle-induced metal surface nanocrystallization device
  • Figure 2 Schematic diagram of shock wave accelerated nanoparticle induced metal surface nanocrystallization
  • the workpiece is polished by surface polishing, then cleaned with acetone and alcohol, and the workpiece is fixed on the five-axis linkage table to adjust the vertical distance between the five-axis linkage table and the nanoparticle nozzle.
  • the black paint absorbs the laser energy to form a high-intensity shock wave.
  • the strong thrust generated by the shock wave accelerates the metal nanoparticles to impact the surface of the workpiece at the maximum speed and is embedded in the surface of the workpiece to form a nano layer.
  • the metal nanoparticle recovery device recovers excess metal nanoparticles and reuses them.
  • a shock wave accelerating nanoparticle-inducing metal surface nano-device includes an exhaust device 1, an industrial controller 2, a digital controller 3, a laser controller 4, a high-power laser device 5, and a spot adjusting device 8, Air compressor 9, air tank 10, air duct 11, pressure controller 12, paint delivery device 13, black paint input port 14, impact head 15, top cover 17, powder feeding device 18, nanoparticle input port A19, nano Particle nozzle 20, gasket A22, gasket B23, workpiece 25, nanoparticle input port B26, high pressure resistant K9 glass 27, five-axis linkage table 29, closed working chamber 30, metal nanoparticle recovery device 31.
  • the workpiece 25 is surface-polished, then washed with acetone, alcohol, and the workpiece 25 is fixed on the five-axis linkage table 29, and the vertical distance between the five-axis linkage table 29 and the nanoparticle nozzle 20 is adjusted.
  • the air compressor 9 and the exhaust device 1 are turned on, and the flowing gas generated by the air compressor 9 passes through the pressure gas storage tank 10 and the pressure controller 12, and the flowing gas accelerates the metal nanoparticles 28 into the closed working chamber 30, and the pressure controller 12 Adjust the pressure and flow rate of the air so that the parameters meet the test requirements.
  • the parameters of the high-power pulsed laser device 5 (parameters including laser energy, pulse width) and the parameters of the spot adjusting device 8 (spot diameter) are adjusted so that the parameters meet the test requirements.
  • the high-power pulsed laser device 5 emits a laser beam 7 which is radiated through the high-pressure-resistant K9 glass 27 to the black paint 21 supplied from the paint feeding device 13 and ejected from the tapered hole 24, and the black paint 21 absorbs the laser energy quickly.
  • the plasma 32 continues to absorb the laser energy to rapidly heat up and expand, and then explode to form a high-intensity shock wave 33, and high-intensity shock wave thrust acts on the metal nanoparticles 28 to count
  • the initial velocity of the sound velocity impacts the surface of the workpiece 25, and as the shock wave 33 continuously propagates in the air, the metal nanoparticle 28 is continuously accelerated, and the metal nanoparticle 28 is faster and faster, so that it impacts the surface of the metal material at the maximum speed.
  • the metal nanoparticle recovery device 31 recovers the excess metal nanoparticles 28 and reuses them.
  • the substrate is 45 steel.
  • the surface of the workpiece is polished and polished, then washed with acetone and alcohol, and the workpiece is fixed on the five-axis linkage table, and the vertical distance between the five-axis linkage table and the nanoparticle nozzle is adjusted, and the distance is 6 mm.
  • the air compressor, the exhaust device and the metal nanoparticle recovery device are turned on, and the flowing gas generated by the air compressor passes through the pressure controller and the powder feeding device, and the flowing gas accelerates the silicon carbide nanoparticles into the closed working chamber, and the pressure controller adjusts
  • the pressure and flow rate of the air were 1.5 MPa and the flow rate was 400 m/s.
  • laser energy is 90J
  • pulse width is 33ms
  • spot diameter is 4mm
  • laser beam is transmitted through high-pressure K9 glass radiation black paint
  • silicon carbide nanoparticles are induced by laser-induced high-intensity shock wave thrust.
  • it is injected into the surface of the workpiece to form a nano layer.
  • the silicon carbide nanoparticles can be well bonded to the surface of 45 steel by X-ray diffraction and electron microscopy, and the distribution is relatively uniform.
  • the thickness of the nano layer is 1 ⁇ 50 ⁇ m, and the surface grain size is 8 ⁇ 50nm.
  • the average size of the particles is about 24 Nm, the nano-layer of its surface is enough to ensure the mechanical properties of metal parts.

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Description

冲击波加速纳米颗粒诱导金属表面纳米化方法及装置 技术领域
本发明涉及金属材料表面纳米化领域，具体地是指一种激光诱导冲击波加速金属纳米颗粒实现金属表面纳米化的方法。
背景技术
金属纳米晶体材料由于其晶粒细小(通常小于100 nm)，界面密度高，表现出独特的力学及物理化学性能，为提高传统材料的综合力学性能和服役行为开辟了新的道路。
材料的失效大多发生在材料的表面，如材料的疲劳、腐蚀和磨损对材料的表面结构和性能极其敏感，所以材料表面的结构和性能直接影响其综合性能。作为一种表面改性新方法，金属表面纳米化处理技术就是利用纳米金属材料的优异性能，在传统工程金属材料表面制备出一层有纳米晶体结构的表面层，改善金属材料的表面结构性能，特别是疲劳性能，腐蚀性能和摩擦磨损性能，提高材料的综合力学性能，延长材料的使用寿命。故金属材料表面纳米化对提高金属零部件的使用寿命具有十分重要的意义。
金属材料表面纳米化的方法主要有两类，第一类为表面涂层或沉积纳米化，即引入异质材料从而在材料表面形成纳米结构涂层，主要技术有：物理蒸发沉积（PVD）、化学蒸发沉积（CVD），溅射镀膜，电镀和喷涂等。由于存在涂层和基体之间、涂层粒子之间结合力较弱的缺点，很容易引起表层剥落或脱落，限制了该类方法的工业化运用。第二类为机械表面研磨纳米化，即用机械方法使金属表面产生剧烈的塑形变性，从而细化表面组织，表面纳米化。主要技术有：高能喷丸、超声喷丸、滚压等方法。该类方法制备的表面纳米层与基体组织之间不存在明显的界面，不发生脱落或分离，从而大幅度提高材料的使用性能，但该类方法存在一些局限性，比如很难对有曲面的零部件进行表面纳米化，生产效率低等缺点限制了工业化的推广。
发明专利“超声波高能表面机械加工的金属表面纳米化方法（公开号 CN 2334033A）”是让超声波换能器上的冲头与金属件待处理表面直接接触，将超声波振动能量输入到金属件，并在金属表面造成高应变速率局部强烈塑性变性，从而将金属表面层晶粒细化到纳米尺度。该发明的最大优点在于无须任何弹丸或微粒作为中间能量载体，可以在金属表面形成一层化学成分与金属件基体完全相同的纳米晶以及显著提高金属件的表面光洁度，其不足之处在于由于冲头形状和尺寸的限制，处理后的金属材料表面不平整，有凹坑和凸台，粗糙度高，在一定程度上影响其表面性能。
 技术问题
本发明针对以上技术的不足，提供一种激光诱导冲击波加速金属纳米颗粒实现金属表面纳米化的方法。空气压缩机产生巨大压力将金属纳米颗粒进行加速并导入带有排气装置的密闭工作腔里，从锥形孔里喷出的黑漆在激光辐照下产生冲击波，利用激光诱导的冲击波不断加速具有一定速度的金属纳米颗粒，使其以最大速度冲击金属材料表面，并嵌入金属材料表面形成纳米层，实现金属材料表面纳米化的转换。
 技术解决方案
冲击波加速金属纳米颗粒诱导金属表面纳米化的具体方法是:激光透过耐高压K9玻璃辐射到从锥形孔喷出的黑漆上，黑漆吸收激光能量爆炸压缩空气形成高强度冲击波，高强度的冲击波对具有一定速度的金属纳米颗粒产生极大的推力使其以数倍声速的初速度向下运动，随着冲击波在空气中的不断传播，当金属纳米颗粒运动到下一个位置时，冲击波产生的推力给金属纳米颗粒加速，当金属纳米颗粒再运动到下一个位置时，冲击波产生的推力再次对金属纳米颗粒加速，在空气中传播的冲击波产生的推力不断的给金属纳米颗粒加速，金属纳米颗粒的速度越来越快，至金属材料表面时金属纳米颗粒获得最大速度，并以这个最大速度冲击金属材料表面，嵌入金属材料表面形成纳米层，同时由于金属纳米颗粒和金属材料表面之间的冲击作用使金属表面引起严重的塑性变性形成大量的位错、孪晶或亚晶结构导致晶粒细化，金属材料表面自身也形成纳米晶，从而改善金属材料的表面结构性能，提高材料的综合力学性能，延长材料的使用寿命。
以下为本发明的具体实施例，但不用来限制本发明。本发明包括控制系统、导光系统、工作台控制系统和辅助系统。
所述的控制系统包括工业控制器、数字控制器、激光控制器和压力控制器。数字控制器上端与激光控制器相连，下端与工业控制器相连，激光控制器与高功率脉冲激光装置相连。工业控制器通过数字控制器分别控制激光控制器、光斑调节装置和五轴联动工作台，激光控制器控制高功率脉冲激光装置，压力控制器控制储气罐里气体输出的压力。
所述的导光系统包括导光管、冲击头以及光斑调节装置。光斑调节装置位于高功率脉冲激光装置与冲击头之间并与数字控制器相连，高功率脉冲激光装置在光斑调节装置上面，冲击头在光斑调节装置下面。聚焦透镜位于冲击头内，导光管与高功率脉冲激光装置、光斑调节装置与冲击头串联起来。
所述的工作台控制系统包括数字控制器、工件和五轴联动工作台。工件位于五轴联动工作台上面，数字控制器通过控制五轴联动工作台来调节工件和纳米粒子喷头的相对位置。
所述辅助系统包括空气压缩机、送漆装置、纳米粒子喷头、送粉装置、排气装置、密闭工作腔和金属纳米颗粒回收装置；所述纳米粒子喷头位于密闭工作腔内部的顶上方，纳米粒子喷头为中空的圆柱形，含有圆环状内腔和外腔，垫片A位于内腔外壁的凸缘上，耐高压K9玻璃在垫片A于垫片B之间，并由顶盖固定，内腔底部有两个沿轴线对称分布的锥形孔，内腔左上部的黑漆输入端口与送漆装置相连，外腔上部沿轴线对称分布的纳米颗粒输入端口A和纳米颗粒输入端口B分别通过导气管与送粉装置相连；所述送粉装置通过导气管与压力控制器相连；所述压力控制器通过导气管与储气罐相连；所述排气装置和金属纳米颗粒回收装置分别与密闭工作腔相连，排气装置在密闭工作腔左边，其排气管位于五轴联动工作台的下部，金属纳米颗粒回收装置在密闭工作腔右边，排气装置用于排出密闭工作腔里的气体，金属纳米颗粒回收装置用于回收多余的金属纳米颗粒。
本发明的特征须在特定的工艺条件下实现，其工艺条件为纳米粒子喷头到工件表面的距离为5mm～8mm；金属纳米颗粒的粒度为10nm～50nm；所述的金属纳米颗粒为碳化钛、碳化硅等；压缩的气体为空气；气压压力为0.5 Map～3.0MPa；气体流速为240 m/s～1000m/s；黑漆的输出压力为480～500kpa；锥形孔的喷口直径为2mm，锥角为28°；高功率脉冲激光装置发出的激光脉宽为5ms～100ms可调；能量在10J～100J可调；光斑调节装置的光斑直径为0.5mm～12mm。在这种参数条件下，金属纳米颗粒的运动速度能达到3340m/s～6000m/s，金属纳米颗粒以这个速度冲击金属材料表面并嵌入其表面形成纳米层，未能嵌入金属材料表面的金属纳米颗粒，通过金属纳米颗粒回收装置回收再利用。
本发明技术的创新，在于借助压缩空气产生的高速气体给金属纳米颗粒一个很大的速度，从锥形孔喷出的黑漆在激光辐射下吸收激光能量迅速气化、电离，并几乎同时形成大量稠密的高温等离子体，等离子体继续吸收激光能量急剧升温膨胀，然后爆炸形成高强度冲击波，高强度的冲击波对金属纳米颗粒产生强大推力使其以数倍声速的初速度向下运动，随着冲击波在空气中的不断传播，不断的给金属纳米颗粒加速，金属纳米颗粒的速度越来越快，使其以最大速度冲击金属材料表面，并嵌入金属材料表面形成纳米层。由于金属纳米颗粒和金属材料表面的冲击作用使金属表面引起严重的塑性变性形成大量的位错、孪晶或亚晶结构导致晶粒细化，金属材料表面自身也形成纳米晶。五轴联动工作台有三个坐标的移动和两个转动，故可以移动和转动工作台上的工件，使工件处于不同的位置和不同的角度，从而可以对曲率变化较大形状复杂的零部件进行表面纳米化。
 有益效果
本发明的有益效果如下：
1、该方法直接将金属纳米颗粒射入金属材料表面形成一层较厚的性能优异的纳米层，表面纳米化效果好。未能嵌入金属材料表面的金属纳米颗粒，经金属纳米颗粒回收装置回收能再利用。
2、本发明方法处理后金属材料表面变形小，粗糙度低。
3、本发明方法可以对曲率变化较大形状复杂的零部件进行表面纳米化(如齿轮和圆柱弹簧零件等)。
4、本发明方法不会对金属材料表面产生腐蚀、裂纹等缺陷。
5、该方法可实现自动化，生产效率高，表面纳米化速度快。
 附图说明
图1：冲击波加速纳米颗粒诱导金属表面纳米化装置示意图
图2：冲击波加速纳米颗粒诱导金属表面纳米化原理示意图
图3：纳米粒子喷头半剖示意图
图中，1.排气装置；2.工业控制器；3.数字控制器；4.激光控制器；5.高功率脉冲激光装置；6.导光管；7.激光束；8.光斑调节装置；9.空气压缩机；10.储气罐；11.导气管；12.压力控制器；13.送漆装置；14.黑漆输入端口；15.冲击头；16.聚焦透镜；17.顶盖；18.送粉装置；19.纳米颗粒输入端口A；20.纳米粒子喷头；21.黑漆；22.垫片A；23.垫片B；24.锥形孔；25.工件；26.纳米颗粒输入端口B；27.耐高压K9玻璃；28.金属纳米颗粒；29.五轴联动工作台；30.密闭工作腔；31.金属纳米颗粒回收装置；32.等离子体；33.冲击波。
 本发明的实施方式
冲击波加速纳米颗粒诱导金属表面纳米化的方法的实施步骤如下：
A、工件进行表面打磨抛光，然后用丙酮、酒精清洗，并把工件固定在五轴联动工作台上，调整好五轴联动工作台到纳米粒子喷头之间的垂直距离。
B、启动空气压缩机和排气装置，通过压力控制器调节空气的压力和流速。
C、控制和调节送漆装置，使黑漆从锥形孔里呈雾状喷出。
D、调节高功率脉冲激光装置参数（参数包括激光能量、脉冲宽度）和光斑调节装置参数（光斑直径）。黑漆吸收激光能量爆炸形成高强度的冲击波，冲击波产生的强大推力对金属纳米颗粒不断加速，使其以最大速度冲击工件表面并嵌入工件表面形成纳米层。
E、金属纳米颗粒回收装置回收多余的金属纳米颗粒，重复利用。
F、清洗工件表面未气化电离的黑漆。
下面结合图1详细说明本发明，但不用来限制本发明。
如图1所述，一种冲击波加速纳米颗粒诱导金属表面纳米化装置包括排气装置1，工业控制器2，数字控制器3，激光控制器4，高功率激光装置5，光斑调节装置8，空气压缩机9，储气罐10，导气管11，压力控制器12，送漆装置13，黑漆输入端口14，冲击头15，顶盖17，送粉装置18，纳米颗粒输入端口A19，纳米粒子喷头20，垫片A22，垫片B23，工件25，纳米颗粒输入端口B26，耐高压K9玻璃27，五轴联动工作台29，密闭工作腔30，金属纳米颗粒回收装置31。
将工件25进行表面打磨抛光，然后用丙酮、酒精清洗，并把工件25固定在五轴联动工作台29上，调整好五轴联动工作台29到纳米粒子喷头20之间的垂直距离。开启空气压缩机9和排气装置1，空气压缩机9产生的流动气体通过压力储气罐10和压力控制器12，流动气体将金属纳米颗粒28加速并导入密闭工作腔30里，压力控制器12调节空气的压力和流速，使参数满足试验要求。同时调节高功率脉冲激光装置5参数（参数包括激光能量、脉冲宽度）和光斑调节装置8参数（光斑直径），使参数满足试验要求。高功率脉冲激光装置5发出激光束7，激光束7透过耐高压K9玻璃27辐射到由送漆装置13提供并从锥形孔24喷出的黑漆21上，黑漆21吸收激光能量迅速气化、电离，并几乎同时形成大量稠密的高温等离子体32，等离子体32继续吸收激光能量急剧升温膨胀，然后爆炸形成高强度冲击波33，高强度的冲击波推力作用于金属纳米颗粒28使其数倍声速的初速度冲击工件25表面，随着冲击波33在空气中的不断传播，不断的给金属纳米颗粒28加速，金属纳米颗粒28的速度越来越快，使其以最大速度冲击金属材料表面，并嵌入工件25表面形成纳米层，同时由于金属纳米颗粒28的冲击作用使工件25表面引起严重的塑性变性形成大量的位错、孪晶或亚晶结构导致晶粒细化，工件25表面自身也形成纳米晶。金属纳米颗粒回收装置31回收多余的金属纳米颗粒28，重复利用。
具体实施例一：基材为45钢。将工件进行表面打磨抛光，然后用丙酮、酒精清洗，并把工件固定在五轴联动工作台上，调整好五轴联动工作台到纳米粒子喷头之间的垂直距离，距离为6mm。开启空气压缩机、排气装置和金属纳米颗粒回收装置，空气压缩机产生的流动气体通过压力控制器和送粉装置，流动气体将碳化硅纳米颗粒加速并导入密闭工作腔里，压力控制器调节空气的压力和流速，压力为1.5MPa,流速为400m/s。调节高功率脉冲激光装置和光斑调节装置，激光能量为90J，脉冲宽度33ms，光斑直径4mm，激光束透过耐高压K9玻璃辐射黑漆上，碳化硅纳米颗粒在激光诱导的高强度冲击波推力作用下，射入工件表面，形成纳米层。
该方法处理后，经X射线衍射和电镜分析得碳化硅纳米颗粒能很好的结合到45钢表面，并且分布比较均匀，纳米层厚度为1~50μm，表层晶粒尺寸为8~50nm，晶粒平均尺寸约为24 nm，其表面的纳米层足以保证金属零部件所须得机械性能。

Claims (7)

  1. 冲击波加速纳米颗粒诱导金属表面纳米化装置，其特征在于，包括控制系统、导光系统、工作台控制系统和辅助系统；
    所述控制系统包括工业控制器（2）、数字控制器（3）、激光控制器（4）和压力控制器（12）；所述数字控制器（3）与激光控制器（4）和工业控制器（2）相连，所述激光控制器（4）与高功率脉冲激光装置（5）相连；所述工业控制器（2）通过数字控制器（3）分别控制激光控制器（4）、光斑调节装置（8）和五轴联动工作台（29），所述激光控制器（4）控制高功率脉冲激光装置（5），压力控制器（12）控制储气罐（10）里气体输出的压力；
    所述导光系统包括导光管（6）、冲击头（15）和光斑调节装置（8）；所述光斑调节装置（8）位于高功率脉冲激光装置（5）与冲击头（15）之间并与数字控制器（4）相连，高功率脉冲激光装置（5）在光斑调节装置（8）上方，冲击头（15）在光斑调节装置（8）下方；聚焦透镜（16）位于冲击头（15）内，高功率脉冲激光装置（5）通过导光管（6）与光斑调节装置（8）相连，光斑调节装置（8）通过导光管（6）与冲击头（15）相连；
    所述工作台控制系统包括数字控制器（4）、工件（25）和五轴联动工作台（29）；工件（25）位于五轴联动工作台（29）上方，数字控制器（3）通过控制五轴联动工作台（29）来调节工件（25）和纳米粒子喷头（20）的相对位置；
    所述辅助系统包括空气压缩机（9）、送漆装置（13）、纳米粒子喷头（20）、送粉装置（18）、排气装置（1）、密闭工作腔（30）和金属纳米颗粒回收装置（31）；所述纳米粒子喷头（20）位于密闭工作腔（30）内部的上方，纳米粒子喷头（20）为中空的圆柱形，含有圆环状内腔和外腔，垫片A（22）位于内腔内侧外壁的凸缘上，耐高压K9玻璃（27）在垫片A（22）于垫片B（23）之间，并由顶盖（17）固定，内腔底部有两个沿轴线对称分布的锥形孔（24），内腔左上部的黑漆输入端口（14）与送漆装置（13）相连，外腔上部沿轴线对称分布的纳米颗粒输入端口A（26）和纳米颗粒输入端口B（27）分别通过导气管（11）与送粉装置（18）相连；所述送粉装置（18）通过导气管（11）与压力控制器（12）相连；所述压力控制器（12）通过导气管（11）与储气罐（10）相连；所述排气装置（1）和金属纳米颗粒回收装置（31）分别与密闭工作腔（30）相连，排气装置（1）在密闭工作腔（30）左边，其排气管位于五轴联动工作台（29）的下部，金属纳米颗粒回收装置（31）在密闭工作腔（30）右边，排气装置（1）用于排出密闭工作腔（30）里的气体，金属纳米颗粒回收装置（31）回收多余的金属纳米颗粒（28）。
  2. 实施权利要求1所述冲击波加速纳米颗粒诱导金属表面纳米化装置的方法，其特征在于，具体步骤如下：
    A、工件（25）进行表面打磨抛光，然后用丙酮、酒精清洗，并把工件（25）固定在五轴联动工作台（29）上，调整好五轴联动工作台（29）到纳米粒子喷头（20）之间的垂直距离；
    B、启动空气压缩机（9）和排气装置（1），通过压力控制器（12）调节空气的压力和流速。
    C、控制和调节送漆装置（13），使黑漆（21）从锥形孔（24）里呈雾状喷出；
    D、调节高功率脉冲激光装置（5）参数和光斑调节装置（8）参数；黑漆（21）吸收激光能量爆炸形成高强度的冲击波（33），冲击波（33）产生的强大推力对金属纳米颗粒（28）不断加速，使其以最大速度冲击工件（25）表面并嵌入工件（25）表面形成纳米层；
    E、金属纳米颗粒回收装置（31）回收多余的金属纳米颗粒（28），重复利用；
    F、清洗工件（25）表面未气化电离的黑漆（21）。
  3. 根据权利要求2所述冲击波加速纳米颗粒诱导金属表面纳米化方法，其特征在于，所述纳米粒子喷头到工件表面的距离为5mm～8mm。
  4. 根据权利要求2所述冲击波加速纳米颗粒诱导金属表面纳米化方法，其特征在于，所述金属纳米颗粒的粒度为10nm～50nm；所述的金属纳米颗粒为碳化钛、碳化硅等。
  5. 根据权利要求2所述冲击波加速纳米颗粒诱导金属表面纳米化方法，其特征在于，所述压缩的气体为空气；气压压力为0.5 Map～3.0MPa；气体流速为240 m/s～1000m/s。
  6. 根据权利要求2所述冲击波加速纳米颗粒诱导金属表面纳米化方法，其特征在于，所述锥形孔的喷口直径为2mm，锥角为28°；黑漆的输出压力为480～500kpa。
  7. 根据权利要求2所述冲击波加速纳米颗粒诱导金属表面纳米化方法，其特征在于，所述高功率脉冲激光装置发出的激光脉宽为5ms～100ms可调；能量为10J～100J；光斑调节装置的光斑直径为0.5mm～12mm。
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