WO2012136690A1 - Verfahren zur herstellung eines widerstandsheizelements sowie widerstandsheizelement - Google Patents
Verfahren zur herstellung eines widerstandsheizelements sowie widerstandsheizelement Download PDFInfo
- Publication number
- WO2012136690A1 WO2012136690A1 PCT/EP2012/056133 EP2012056133W WO2012136690A1 WO 2012136690 A1 WO2012136690 A1 WO 2012136690A1 EP 2012056133 W EP2012056133 W EP 2012056133W WO 2012136690 A1 WO2012136690 A1 WO 2012136690A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- heating element
- resistance heating
- shaped body
- powder
- sintered material
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 99
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 46
- 239000000843 powder Substances 0.000 claims abstract description 36
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 27
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 27
- 238000005245 sintering Methods 0.000 claims abstract description 12
- 238000000034 method Methods 0.000 claims description 26
- 229910052710 silicon Inorganic materials 0.000 claims description 14
- 239000010703 silicon Substances 0.000 claims description 14
- 238000000465 moulding Methods 0.000 claims description 12
- 238000000137 annealing Methods 0.000 claims description 7
- 230000015572 biosynthetic process Effects 0.000 claims description 7
- 238000009826 distribution Methods 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- -1 polysiloxanes Polymers 0.000 claims description 5
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000010285 flame spraying Methods 0.000 claims description 4
- 239000005011 phenolic resin Substances 0.000 claims description 4
- 229920003257 polycarbosilane Polymers 0.000 claims description 4
- 238000000197 pyrolysis Methods 0.000 claims description 4
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 claims description 3
- 238000007723 die pressing method Methods 0.000 claims description 3
- 238000000462 isostatic pressing Methods 0.000 claims description 3
- 229920001568 phenolic resin Polymers 0.000 claims description 3
- 229920001709 polysilazane Polymers 0.000 claims description 3
- 229920001296 polysiloxane Polymers 0.000 claims description 3
- 230000001681 protective effect Effects 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- 239000006229 carbon black Substances 0.000 claims description 2
- 239000007849 furan resin Substances 0.000 claims description 2
- 229910002804 graphite Inorganic materials 0.000 claims description 2
- 239000010439 graphite Substances 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 150000002118 epoxides Chemical class 0.000 claims 1
- 238000005496 tempering Methods 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 239000007788 liquid Substances 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 230000035508 accumulation Effects 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000002243 precursor Substances 0.000 description 2
- 238000009827 uniform distribution Methods 0.000 description 2
- 229920000049 Carbon (fiber) Polymers 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical group [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000004917 carbon fiber Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005056 compaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000113 differential scanning calorimetry Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000414 polyfuran Polymers 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 238000007613 slurry method Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 238000002076 thermal analysis method Methods 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
- H01C17/30—Apparatus or processes specially adapted for manufacturing resistors adapted for baking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/02—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material having positive temperature coefficient
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
- C04B41/90—Coating or impregnation for obtaining at least two superposed coatings having different compositions at least one coating being a metal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/40—Heating elements having the shape of rods or tubes
- H05B3/42—Heating elements having the shape of rods or tubes non-flexible
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/62—Heating elements specially adapted for furnaces
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/604—Pressing at temperatures other than sintering temperatures
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/612—Machining
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/72—Products characterised by the absence or the low content of specific components, e.g. alkali metal free alumina ceramics
- C04B2235/728—Silicon content
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/94—Products characterised by their shape
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/017—Manufacturing methods or apparatus for heaters
Definitions
- the invention relates to a method for producing a resistance heating element having the features of claim 1 and to a resistance heating element having the features of claim 16.
- Resistance heating elements are regularly used as heating elements for thermal analysis in so-called D SC furnaces (differential scanning calorimetry furnaces).
- the known resistance heating elements are therefore tubular and integrally formed and are contacted on their underside at an anode and a cathode or pads.
- One wall of the resistance heating element is provided with two slots which are formed spirally and thus form heating coils of the resistance heating element.
- a temperature of up to 1650 ° C is reached.
- a glow pattern should be distributed as homogeneously as possible over the area of the heating coils.
- a high purity of the material of the resistance heating element is of great importance, as for example in a determination of the purity of samples in the D SC furnace Unwanted unwanted additives out of the resistance heating element and could falsify a measurement.
- the known resistance heating elements are essentially formed of silicon carbide.
- a resistance heating element is manufactured by forming a material blank of a fiber material, such as carbon fibers, its shape stabilization by means of resin with final pyrolysis and infiltration of silicon in order to obtain a resistance heating element made of silicon carbide.
- cracks can result in particular by an inhomogeneous distribution of silicon in the molded body.
- a reduced stability in the operating state sSullivan of the resistance heating element is effected, since there is an uneven temperature distribution in the resistance heating by the inhomogeneous material concentrations.
- Operating temperature is limited to about 1400 ° C.
- the present invention is therefore based on the object to propose a method for producing a resistance heating element or a resistance heating element, which avoids the disadvantages known from the prior art.
- This object is achieved by a method having the features of claim 1 and a resistance heating element having the features of claim 16.
- the resistance heating element has a tubular shape, wherein the resistance heating element is formed integrally and wherein the resistance heating element is formed from silicon carbide, the method comprising the following steps:
- the one-piece molded body is pressed from a sintered material formed from a powder, it is possible to form moldings almost j eder shape, which have a substantially uniform distribution of the sintered material within the molding. This can avoid that undesired material concentrations occur within the shaped body, which promotes crack formation during the production of the resistance heating element or during operation. It is also possible to produce the molded article comparatively inexpensively, since the formation of the shaped article of sintered material can be carried out relatively easily. Furthermore, a reduced rejection reduces possible rejects during production, which also contributes to a reduction in costs.
- the resistance heating element thus produced contains substantially no free silicon, which makes it particularly suitable for use at over 1400 ° C.
- the shaped body of sintered material can be formed by isostatic pressing of the powder.
- isostatic pressing the powder is placed in a mold envelope, for example in a tubular shape, and subjected to pressure in a liquid medium. Due to the liquid medium, the pressure spreads evenly over the surface of the mold shell, resulting in a uniform compression of the powder.
- a pressure in the mechanical pressing may be 2000 bar or more.
- the molding can also be formed by semi-static pressing of the powder, that is to say parts of the molding or of the molding are then covered and are not subjected to pressure.
- the mold envelope or the powder to be pressed may be arranged around a mandrel, wherein ends of the mandrel each have an annular web.
- the powder can then be easily placed between the annular lands on the mandrel and covered with a flexible mold envelope. It is also conceivable to form the molded body so already in his from closing shape.
- the shaped body of sintered material can also be formed by die pressing of the powder. Both tubular shaped bodies can be formed by axial die pressing of the sintered material as well as plate-shaped shaped bodies.
- the annealing of the pressed shaped body made of sintered material can take place under a protective atmosphere.
- the annealing at, for example, 50 to 600 ° C leads to a hardening of the molding.
- the protective atmosphere may be formed by an inert gas or a vacuum.
- the shaped body of sintered material can be formed plate-shaped in a particularly simple embodiment. This can then be made a flat, straight resistance heating.
- the molded body of sintered material may have a round tube cross-section.
- the shaped body, the desired shape of the Wider- Stand heating element have. It is also conceivable that it is then possible to dispense with mechanical processing of the shaped body in the further production process.
- a circular pipe cross-section can be formed, since a seamless molded body can then be easily formed on a mandrel. In principle, however, the molded body can have any desired tubular shape.
- the shaped body of sintered material has a homogeneous distribution of powder. That is, within the material of the molded body then exist no significant density differences. Thus, an undesirable material accumulation of, for example, silicon between particle structures consisting of silicon carbide can be avoided. Cracking due to inhomogeneities can thus be avoided. Furthermore, a homogeneous powder mixture can be formed. Then there are no significant differences in a distribution within the material of the molding or no areas with accumulations of certain materials. Good mixing of the powder can be achieved, for example, with an Eirich mixer. A homogeneous powder mixture causes the same strength properties at each point of the material of the shaped body and thus avoids the formation of cracks.
- the powder can be sieved prior to pressing. Screening of the powder may, among other things, effect an improved mixing of the powder.
- a binder can be used.
- a binder or a so-called precursor can be a polymer which is crosslinked by applying a temperature and can thus fix the powder in the form of the shaped body.
- a Silicon carbide precursor are used, of which remains after the implementation of the manufacturing process only silicon carbide in the material of the resistive sheizelements.
- the sintered material may be formed of the materials phenol resin, furan resin, formadehyde resin, epoxies, silicon carbide, silicon, graphite, carbon black, polysilazanes, polycarbosilanes, polysiloxanes, polycarbosilazanes or molybdenum disilizate, or combinations of such powders.
- the phenolic resin may also be in powder or liquid form.
- stearic acid may be mixed as a lubricant and to prevent oxidation of the powder or sintered material.
- a powder mixture of silicon carbide, silicon, carbon and polycarbosilanes can be used.
- a mechanical processing of the shaped body can take place, wherein a closing shape of the resistance heating element can be formed by the mechanical processing.
- an inner diameter of the shaped body further drilled or turned and a cylinder or outer diameter are ground on, for example, a lathe, so that a uniform wall thickness of the shaped body of example, up to 1 mm is formed.
- the method can thus also allow the production of filigree heating coils.
- helical slots can be milled in the shaped body thus processed, such that a later heating coil of the resistance heating element is formed.
- the slots can be formed as bridges bridging, which ensure stability of the molded body during the manufacturing process. These webs can be easily severed after formation of the resistance heating and thus removed.
- a high-temperature treatment of the resistance heating element can take place. Sintering may take place in a tempera- range of 13 50 to 1900 ° C and the high-temperature treatment in a temperature range of 1900 to 2400 ° C are performed.
- the high-temperature treatment can serve, inter alia, for the decomposition of oxygen and nitrogen in the molding and be carried out under vacuum or inert gas. By means of the high-temperature treatment, dimensional deviations of the shaped body caused in particular by the process steps can be minimized.
- a CVD coating (chemical vapor deposition) of the resistance heating element with silicon carbide can take place.
- CVD coating is applied to the resistance heating element at, for example, 700 to 1500 C 0, a silicon carbide layer. Essentially, the silicon carbide layer completely surrounds the resistance heating element, so that any silicon that is included in the material of the resistance heating element can not escape from it.
- a particularly good contacting of the resistance heating element with connection contacts can be achieved if, after the sintering or the CVD coating, coating surfaces of the resistance heating element are coated by means of flame spraying.
- the pads can be so provided with an electrically good contactable aluminum layer.
- Aluminum can be well processed by means of flame spraying and does not melt away from it during operation of the resistance heating element.
- the resistance heating element according to the invention has a basically arbitrary shape, wherein the resistance heating element is integrally formed, wherein the resistance heating element is formed of silicon carbide, and wherein the resistance heating element has a homogeneous microstructure or a homogeneous distribution of silicon carbide.
- the homogeneous microstructure of silicon carbide within the Material structure of the resistance heating element causes a probability of cracking during operation of the resistance heating element is minimized.
- an operating safety of the resistance heating element can be substantially increased.
- the resistance heating element has a tubular shape.
- the silicon carbide in the material of the resistance heating element can be structured in accordance with a particle orientation of a powder.
- Fig. 1 A perspective view of a resistance heating element
- FIG. 2 shows a flow chart for an embodiment of the method.
- Fig. 1 shows a resistance heating element 1 0, which is tubular, formed with a round, circular cross-section.
- the resistance heating element 10 has a thin tube wall 1 1, which is broken through two slots 12 and 13.
- the slits 12 and 13 are straight in the region of a lower end 14 of the resistance heating element 10 in the longitudinal direction thereof and thus form two connection surfaces 1 5 and 16 for connecting the resistance heating element 10 to connection contacts of a connection device of a D SC furnace not shown here.
- the slots 12 and 13 extend in each case in a spiral shape Longitudinal along the circumference of the pipe wall 1 1 up to an upper end of the resistance heating element 10 10.
- the slots 12 and 13 thus form two heating coil 19 and 20, the cut at the upper end 1 8 in a Ringab 21 are interconnected.
- a heating of the resistance heating element 10 during operation s occurs essentially in the area of the heating coil 19 and 20.
- the resistance heating element is integrally formed and consists essentially of silicon carbide, within the material of the resistance heating element 10 production-related residual amounts of silicon, carbon and other materials to be involved can .
- a surface 22 of the resistance heating element 10 is almost completely coated with silicon carbide, wherein in the region of the connection surfaces 1 5 and 16 a layer of aluminum, not shown here, is applied.
- Fig. 2 shows a possible flowchart of an embodiment of the method.
- a mixing and sieving of various powdered sintered materials such as silicon carbide, silicon, carbon, polymers, such as polysilazanes, polycarbosilazanes, polycarbosilanes, polysiloxanes, or other prepolymers such as phenolic resin, polyinides, polyfurans, etc. and.
- This powder mixture is arranged around a round mandrel, so that a tubular shaped body is formed.
- the powder mixture is covered by a mold shell and pressed semiiso static, so that it comes to a compaction of the powder mixture.
- the shaped body thus formed is annealed at about 400 ° C and cured so that a mechanical processing of the shaped article can be carried out by grinding on a lathe.
- An inner and an outer diameter of the tubular, round shaped body is thereby processed so that the shaped body has a substantially uniform wall thickness of 3 mm. Further, slots for the formation of heating coils and pads in the pipe wall of the molded body are milled. Finally, a pyrolysis of the material of the molding at 850 to 1200 ° C, in which the material is partially converted to carbon, and sintering of the molded article at 1650 to 1900 ° C, wherein the shaped body is formed into the resistance heating element.
- the resistance heating element essentially consists now of silicon carbide. After sintering, an optional high-temperature treatment and a coating of the connection surfaces with aluminum by flame spraying follow.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Resistance Heating (AREA)
- Ceramic Products (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014503124A JP5756225B2 (ja) | 2011-04-06 | 2012-04-04 | 抵抗加熱素子を製造する方法及び抵抗加熱素子 |
US14/009,499 US20140091080A1 (en) | 2011-04-06 | 2012-04-04 | Method for producing a resistance heating element, and resistance heating element |
EP12713138.1A EP2695482A1 (de) | 2011-04-06 | 2012-04-04 | Verfahren zur herstellung eines widerstandsheizelements sowie widerstandsheizelement |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011006847A DE102011006847A1 (de) | 2011-04-06 | 2011-04-06 | Verfahren zur Herstellung eines Widerstandsheizelements sowie Widerstandsheizelement |
DE102011006847.3 | 2011-04-06 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2012136690A1 true WO2012136690A1 (de) | 2012-10-11 |
Family
ID=45937362
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2012/056133 WO2012136690A1 (de) | 2011-04-06 | 2012-04-04 | Verfahren zur herstellung eines widerstandsheizelements sowie widerstandsheizelement |
Country Status (5)
Country | Link |
---|---|
US (1) | US20140091080A1 (de) |
EP (1) | EP2695482A1 (de) |
JP (1) | JP5756225B2 (de) |
DE (1) | DE102011006847A1 (de) |
WO (1) | WO2012136690A1 (de) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20190341623A1 (en) * | 2018-05-01 | 2019-11-07 | National Technology & Engineering Solutions Of Sandia, Llc | Carbon coated nano-materials and metal oxide electrodes, and methods of making the same |
DE102018121902A1 (de) * | 2018-09-07 | 2020-03-12 | Isabellenhütte Heusler Gmbh & Co. Kg | Herstellungsverfahren für ein elektrisches Widerstandselement und entsprechendes Widerstandselement |
CN114851352B (zh) * | 2022-05-23 | 2023-11-28 | 松山湖材料实验室 | 电阻加热元件及其制造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1366244A (fr) * | 1962-06-18 | 1964-07-10 | Kanthal Ab | Perfectionnement aux éléments de résistances électriques en carbure de silicium et en siliciures métalliques |
EP0635993A2 (de) * | 1993-07-20 | 1995-01-25 | TDK Corporation | Keramisches Heizelement |
EP0886458A2 (de) * | 1997-05-23 | 1998-12-23 | Kabushiki Kaisha Riken | Molybdändisilizid Heizelement und Verfahren zu dessen Herstellung |
WO2006057404A1 (ja) * | 2004-11-29 | 2006-06-01 | Bridgestone Corporation | ヒータユニット |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3397375A (en) * | 1966-12-01 | 1968-08-13 | Carborundum Co | Heating element |
DE2310148C3 (de) * | 1973-03-01 | 1980-01-10 | Danfoss A/S, Nordborg (Daenemark) | Verfahren zur Herstellung eines elektrischen Widerstandselementes |
US4174971A (en) * | 1975-12-11 | 1979-11-20 | Bulten-Kanthal Aktiebolag | Silicon carbide body containing a molybdenum disilicide alloy |
DE2809278A1 (de) * | 1978-03-03 | 1979-09-06 | Kempten Elektroschmelz Gmbh | Dichte polykristalline formkoerper aus alpha-siliciumcarbid und verfahren zu ihrer herstellung durch drucklose sinterung |
DE3108259C2 (de) * | 1981-03-05 | 1984-06-28 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Verfahren zur Herstellung von Siliziumkarbidkörpern |
DE3243570C2 (de) * | 1982-11-25 | 1984-09-13 | Hutschenreuther Ag, 8672 Selb | Verfahren zum Herstellen eines dichten polykristallinen Formkörpers aus SiC |
US4820665A (en) * | 1986-12-16 | 1989-04-11 | Ngk Insulators, Ltd. | Ceramic sintered bodies and a process for manufacturing the same |
DE3707714A1 (de) * | 1987-03-11 | 1988-09-22 | Basf Ag | Verfahren zur herstellung hochfester und hochtemperaturbestaendiger porenfreier keramischer formteile aus siliziumcarbid |
JPH07106055A (ja) * | 1993-07-20 | 1995-04-21 | Tdk Corp | 急速昇温発熱素子およびその製造方法 |
WO1996020577A1 (fr) * | 1994-12-27 | 1996-07-04 | Tdk Corporation | Element de chauffe rapide et son procede de fabrication |
JPH09115651A (ja) * | 1995-10-13 | 1997-05-02 | Tokai Konetsu Kogyo Co Ltd | 炭化けい素発熱体 |
US20080016684A1 (en) * | 2006-07-06 | 2008-01-24 | General Electric Company | Corrosion resistant wafer processing apparatus and method for making thereof |
JP5322055B2 (ja) * | 2009-08-18 | 2013-10-23 | 独立行政法人産業技術総合研究所 | 多孔質発熱装置とその製造方法 |
-
2011
- 2011-04-06 DE DE102011006847A patent/DE102011006847A1/de not_active Withdrawn
-
2012
- 2012-04-04 WO PCT/EP2012/056133 patent/WO2012136690A1/de active Application Filing
- 2012-04-04 EP EP12713138.1A patent/EP2695482A1/de not_active Withdrawn
- 2012-04-04 US US14/009,499 patent/US20140091080A1/en not_active Abandoned
- 2012-04-04 JP JP2014503124A patent/JP5756225B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1366244A (fr) * | 1962-06-18 | 1964-07-10 | Kanthal Ab | Perfectionnement aux éléments de résistances électriques en carbure de silicium et en siliciures métalliques |
EP0635993A2 (de) * | 1993-07-20 | 1995-01-25 | TDK Corporation | Keramisches Heizelement |
EP0886458A2 (de) * | 1997-05-23 | 1998-12-23 | Kabushiki Kaisha Riken | Molybdändisilizid Heizelement und Verfahren zu dessen Herstellung |
WO2006057404A1 (ja) * | 2004-11-29 | 2006-06-01 | Bridgestone Corporation | ヒータユニット |
Also Published As
Publication number | Publication date |
---|---|
JP5756225B2 (ja) | 2015-07-29 |
US20140091080A1 (en) | 2014-04-03 |
EP2695482A1 (de) | 2014-02-12 |
JP2014510384A (ja) | 2014-04-24 |
DE102011006847A1 (de) | 2012-10-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0337285B1 (de) | Verfahren zur Herstellung eines fluid-durchlässigen keramischen Materials | |
WO2002038520A2 (de) | Keramischer verbundwerkstoff | |
EP2987779A1 (de) | Verfahren zur herstellung eines keramischen formkörpers sowie keramische formkörper | |
EP3689104A1 (de) | Hochtemperaturbauteil und verfahren zur herstellung | |
DE10014418C5 (de) | Verfahren zur Herstellung eines faserverstärkten Strukturbauteils und danach hergestellte Bremsscheibe | |
DE10164231A1 (de) | Verfahren zur Herstellung von Formkörpern aus faserverstärkten keramischen Materialien | |
WO2012136690A1 (de) | Verfahren zur herstellung eines widerstandsheizelements sowie widerstandsheizelement | |
EP1657227B1 (de) | Verfahren zur Herstellung eines Karbidkeramikmaterials mit definiertem gradierten Phasenverteilungsprofil, Karbidkeramikmaterial und Bauteil | |
EP1331211A2 (de) | Verfahren zur Herstellung keramischer Lagerbauteile | |
EP2694451B1 (de) | Verfahren zur herstellung eines widerstandsheizelements sowie widerstandsheizelement | |
EP2053029B1 (de) | Verfahren zur Herstellung eines carbidkeramischen Bauteils | |
DE19809657B4 (de) | Verfahren zur Herstellung eines Keramikbauteils | |
DE102007010675B4 (de) | Verfahren zur Herstellung eines Bauteils aus einer faserverstärkten Keramik, danach hergestelltes Bauteil und dessen Verwendung als Triebwerkskomponente | |
DE2938966C2 (de) | Ungebranntes feuerfestes Gemisch und seine Verwendung | |
DE102009023797B4 (de) | Gleitlager und Verfahren zu seiner Herstellung | |
DE102018116642A1 (de) | Offenzelliges Keramiknetzwerk und Verfahren zu seiner Herstellung | |
DE4331305C2 (de) | Verfahren zur Herstellung eines porösen Formkörpers aus Siliciumcarbid | |
EP3620693A1 (de) | Tribologischer körper und verfahren zum herstellen eines solchen | |
EP1310469A2 (de) | Verfahren zur Herstellung keramischer Lagerbauteile | |
DE10348123C5 (de) | Verfahren zur Herstellung eines Bauteils aus Siliziumcarbid-Keramik | |
EP1592284A1 (de) | Werkstückträger für die induktive Erwärmung von Werkstücken | |
EP1089039A1 (de) | Elektrodeneinrichtung mit Elektrodenstab | |
DE10209223A1 (de) | Verfahren zum Herstellen von Hohlkörpern | |
DE4131336A1 (de) | Waermetauscher | |
DE19634794A1 (de) | Endkonturnahe Fertigung hochdichter SiC-Bauteile |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 12713138 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2014503124 Country of ref document: JP Kind code of ref document: A |
|
REEP | Request for entry into the european phase |
Ref document number: 2012713138 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2012713138 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 14009499 Country of ref document: US |