WO2012111590A1 - Imprinting apparatus - Google Patents

Imprinting apparatus Download PDF

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Publication number
WO2012111590A1
WO2012111590A1 PCT/JP2012/053230 JP2012053230W WO2012111590A1 WO 2012111590 A1 WO2012111590 A1 WO 2012111590A1 JP 2012053230 W JP2012053230 W JP 2012053230W WO 2012111590 A1 WO2012111590 A1 WO 2012111590A1
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WO
WIPO (PCT)
Prior art keywords
stamper
holding member
pressure
substrate
curable resin
Prior art date
Application number
PCT/JP2012/053230
Other languages
French (fr)
Japanese (ja)
Inventor
鈴木　隆弘
秀洋 赤間
Original Assignee
株式会社ブリヂストン
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Filing date
Publication date
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Publication of WO2012111590A1 publication Critical patent/WO2012111590A1/en

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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0888—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds

Definitions

  • the present invention relates to an imprint apparatus, and more particularly to an imprint apparatus in which a dimensional change of a stamper due to heat is prevented and a manufacturing cost is reduced.
  • nanoimprint technology has been known as a technology for forming fine patterns in the manufacturing process of semiconductor devices, displays, electronic paper, recording media, biochips, optical devices and the like.
  • the nanoimprint technology is a microfabrication technology for realizing a finer structure as compared with the conventional press technology.
  • This technique itself has no limit on the resolution, and the resolution is determined by the precision of the stamper (ie, mold). Therefore, as long as a high-precision stamper can be manufactured, it is possible to form an ultrafine structure using an apparatus that is easier and much cheaper than conventional photolithography.
  • the imprint technology is roughly divided into two types depending on the material to be transferred.
  • One is a thermal imprint technique in which a material to be transferred is heated, plastically deformed by a stamper (mold), and then cooled to form a pattern.
  • the other is UV in which a liquid photocurable resin is applied onto a substrate at room temperature, and then a light transmissive stamper is pressed against the resin and irradiated with light to cure the resin on the substrate and form a pattern.
  • Printing technology In particular, UV imprint technology enables pattern formation at room temperature, so that distortion due to differences in the linear expansion coefficient between the substrate and stamper due to heat is unlikely to occur, and high-precision pattern formation is possible. It attracts attention.
  • an imprint apparatus shown in FIG. 2 is known as an apparatus for performing UV imprint.
  • the imprint apparatus 100 mainly includes a holding member 114 that holds a substrate 152 supplied with an ultraviolet curable resin material 154, a quartz glass 118 supported by a support 116, and a UV lamp 120.
  • a stamper (mold) 156 is placed on the cured resin material 154, and the quartz glass 118, the support body 116, the sealing material 122 provided under the support body 116, and the flexible film 124 attached to the sealing material 122.
  • the upper surface of the stamper 156 is pressed by supplying fluid such as air from the fluid supply / discharge pipe 128 to the cavity 126, and the ultraviolet curable resin material 154 is cured by irradiating ultraviolet rays from a UV lamp 120 such as a mercury lamp. By doing so, a fine uneven pattern is formed on the substrate 152. Since the fluid is pressed, the stamper 156 can be pressed against the ultraviolet curable resin material 154 with uniform pressure. For this reason, it is mainly used for large-area imprints that are difficult to press with uniform pressure.
  • the means for uniformly pressing the stamper is an apparatus used for thermal imprinting, but an imprinting apparatus that directly presses the stamper with gas without using a flexible film is also known (Patent Document 1).
  • the present invention has been made in view of the above circumstances, and an object of the present invention is to provide an imprint apparatus in which dimensional change of a stamper is prevented during imprinting and manufacturing cost is reduced.
  • the purpose is to place a stamper having a concavo-convex pattern on the surface of the ultraviolet curable resin material supplied on the substrate so that the concavo-convex pattern surface is in close contact, and pressurize the back surface of the stamper with a fluid.
  • the stamper and irradiating the ultraviolet curable resin material with ultraviolet rays in the pressed state the ultraviolet curable resin material is cured, and an inverted concavo-convex pattern of the concavo-convex pattern is formed on the surface of the substrate.
  • the printing apparatus includes a holding member that holds the substrate and a pressure body that faces the holding member, and the pressure body includes an LED that irradiates the ultraviolet curable resin material with ultraviolet light at a bottom thereof, and This is achieved by an imprint apparatus in which the bottom of the pressure-resistant body and the holding member are arranged to face each other.
  • UV lamps such as mercury lamps that have been generally used have a large heat generation from the lamp itself, and secondary infrared rays are generated, which causes a rise in the temperature of the stamper.
  • LEDs generate less heat from themselves than other ultraviolet light sources and do not generate infrared rays as a secondary light source, the use of LEDs as light sources can prevent the temperature of the stamper from rising. it can.
  • the LED is superior in pressure resistance to a UV lamp such as a mercury lamp, and the pressure resistant body does not need to be provided with a transparent plate such as quartz glass when the LED is accommodated at the bottom thereof. Manufacturing costs can be reduced.
  • a transparent plate may be provided, in this case, since the pressure applied to the transparent plate can be received by the pressure body together with the LED, the transparent plate need only be thin and reduce the manufacturing cost of the device. In addition, the flow of fluid in the space formed by the holding member and the pressure body becomes more stable, and the stamper can be pressurized at a more constant pressure.
  • Preferred embodiments of the present invention are as follows.
  • a cooling means is provided on at least one of the pressure-resistant body and the holding member. Even if the temperature rises, the temperature rise of the stamper can be prevented by the cooling means.
  • At least one of the pressure body and the holding member is provided with a thermometer, and a control unit that performs temperature control with the thermometer and the cooling means is provided. The temperature change of the imprint apparatus can be constantly monitored to maintain a constant temperature.
  • a heat insulating means is provided in the pressure body. It is possible to prevent heat from diffusing throughout the apparatus.
  • the stamper is a resin stamper. The present invention is particularly suitable for imprinting using a resin stamper that is considered to have a relatively large dimensional change due to heat.
  • the imprint apparatus it is possible to prevent a temperature rise of the stamper due to heat and suppress a dimensional change, so that a fine uneven pattern can be precisely formed at a predetermined position on the substrate, Moreover, the manufacturing cost can be reduced by eliminating the need to install a transparent plate. Accordingly, it is possible to provide an imprint apparatus that can be suitably used for applications that require high dimensional accuracy and that has improved productivity.
  • FIG. 1 is a schematic sectional view showing an example of an embodiment of an imprint apparatus according to the present invention.
  • the imprint apparatus 10 according to the present invention is mainly composed of a pressure-resistant body 12 in which the LED 16 is accommodated in the bottom and a holding member 14 capable of holding the substrate 52, and is an ultraviolet curable resin supplied in a sheet form on the substrate 52.
  • the stamper 56 is disposed on the material 54, the back surface (upper surface) of the stamper 56 is pressed by the fluid supplied from the fluid supply pipe 30, and cured by irradiating ultraviolet rays from the LED 16 as it is to form an uneven pattern on the substrate 52. To form.
  • each configuration will be described in detail.
  • the pressure-resistant body 12 is composed of a rigid member such as SUS so that it can withstand pressurization by a fluid, which will be described later, and has a substantially rectangular parallelepiped shape.
  • a recess 12c is formed in the bottom 12a of the pressure-resistant body 12, and the bottom 12a is set to a height that does not contact the membrane 34 when pressurized.
  • a transparent plate 20 that transmits ultraviolet rays may be provided in the recess 12c.
  • the transparent plate 20 is provided such that the lower surface 20a faces the upper surface (substrate holding surface) 14a of the holding member 14 via a film 34 described later, and the transparent plate 20 has a height that does not contact the film 34 when pressed. Is set to be
  • the recess 12c formed in the bottom 12a of the pressure-resistant body 12 is provided with an LED substrate 18 provided with an LED (light emitting diode) 16 for ultraviolet irradiation, and the LED 16 is arranged to face downward.
  • LED light emitting diode
  • recesses 19 are formed at regular intervals, and the LEDs 16 are provided in the recesses 19.
  • the LED 16 is configured not to protrude from the LED substrate 18 in cross-sectional view.
  • the transparent plate 20 is provided as shown in the figure, the region other than the concave portion 19 of the surface 18a is in contact with the upper surface of the transparent plate 20, and thereby receives the pressure applied to the transparent plate 20 together with the pressure body 12. be able to.
  • the thickness of the transparent plate 20 to be used is only required to be as thin as 3 to 5 mm, for example, and it is not necessary to provide a thick transparent plate (quartz glass) as in the prior art.
  • the transparent plate 20 only needs to transmit ultraviolet rays and have a certain degree of rigidity. For example, quartz glass is used. When ultraviolet rays are emitted from the LED 16, the ultraviolet curable resin material 54 is irradiated through the transparent plate 20.
  • the number of LED16 may be any number that can be irradiated with ultraviolet rays to cure the ultraviolet curing resin material 54, for example, provided at least 9-81 per 10 cm 2, the amount of ultraviolet irradiation, for example, 300 mJ / cm 2 That's all you need.
  • the LEDs 16 are arranged at regular intervals so that the ultraviolet curable resin material 54 can be uniformly irradiated with ultraviolet rays.
  • the LED 16 is an LED that can irradiate ultraviolet rays. For example, an LED that can irradiate a wavelength of 200 to 400 nm, preferably 300 to 400 nm is used.
  • the holding member 14 is made of a rigid material, such as SUS, and has a substantially rectangular parallelepiped shape.
  • the substrate 52 is held horizontally by the upper surface 14a.
  • a cooling medium pipe 24 is provided as a cooling means through which the cooling medium flows.
  • the cooling medium pipe 24 is provided in the pressure-resistant body 12 in the vicinity of the LED substrate 18 and in the holding member 14 in the vicinity of the substrate holding surface 14a.
  • a liquid such as water or oil, or a gas such as air or an inert gas can be used. As a result, even if heat is generated from the LED substrate 18, the dimensional change of the stamper 56 can be reliably prevented.
  • the pressure body 12 and the holding member 14 are provided with thermometers 28 for measuring the internal temperatures thereof.
  • the thermometer 28 is preferably installed on the pressure body 12 so as to measure the temperature in the vicinity of the LED substrate 18, and the holding member 14 measures the temperature in the vicinity of the surface 14 a holding the substrate 52. It is preferable to install.
  • the imprint apparatus 10 according to the present invention is provided with a control unit (not shown) that controls the temperature of the pressure body 12 and the holding member 14 by the cooling unit 24 and the thermometer 28. Accordingly, it is possible to always maintain a constant temperature during operation of the imprint apparatus 10.
  • a heat insulating material 26 as a heat insulating means is provided inside the pressure body 12 at a position outside the LED substrate 18.
  • the heat insulating material 26 it is possible to prevent heat from diffusing throughout the apparatus 10.
  • a foamed material such as polyurethane or phenol resin, or a fiber-based heat insulating material such as glass wool or rock wool can be used.
  • the heat insulating material may also be provided inside the holding member 14.
  • a sealing material 22 such as an O-ring sealing material is provided on the outer periphery of the lower surface 12 a of the pressure body 12.
  • a film 34 having flexibility is attached to the sealing material 22, thereby forming a cavity 36 for supplying a fluid.
  • the film 34 needs to be made of a material that transmits ultraviolet rays.
  • the film 34 is made of a film such as polyethylene, polypropylene, polyethylene terephthalate, polycarbonate, PMMA, polycycloolefin, and fluorine resin, and has a thickness of
  • the thickness is set to 50 ⁇ m to 5 mm, preferably 100 ⁇ m to 3 mm.
  • the cavity 36 is configured such that a fluid is supplied from a fluid supply / discharge pipe 30 provided in the pressure-resistant body 12 and the inside of the cavity 36 is pressurized.
  • a fluid for example, air, nitrogen, carbon dioxide, argon or the like can be used.
  • the back surface of the stamper 56 can be pressed with a uniform pressure, and the ultraviolet curable resin material 54 is irradiated with ultraviolet rays in the pressed state.
  • vertical movement means for moving up and down at least one of the pressure body 12 and the holding member 14 is provided, and the distance between the pressure body 12 and the holding member 14 is adjusted when pressed.
  • an example in which the means for applying a pressing force to the stamper 56 is indirectly pressed by a fluid through the film 34 is not limited to this, but is described in Patent Document 1. Further, it may be configured to press directly with a fluid without using a membrane. In this case, a gas such as air or an inert gas is used as the fluid.
  • the stamper 56 for forming a desired pattern on the substrate 52 a conventionally known stamper having ultraviolet transparency can be used. Specifically, for example, quartz glass, resin, or the like can be used.
  • the resin stamper a stamper made of a resin having good releasability such as polyethylene, polypropylene, polycycloolefin, fluorine-based resin, and polyvinyl chloride is used.
  • the imprint apparatus according to the present invention is suitable for imprinting using a resin stamper that has a relatively large dimensional change due to heat. Is preferred.
  • the ultraviolet curable resin material 54 includes an ultraviolet curable resin and a photopolymerization initiator.
  • the ultraviolet curable resin include urethane acrylate, polyester acrylate, epoxy acrylate, epoxy resin, imide oligomer, and polyene / thiol oligomer.
  • Urethane acrylates include, for example, diisocyanates such as hexamethylene diisocyanate, isophorone diisocyanate, methylene bis (4-cyclohexyl isocyanate), trimethylhexamethylene diisocyanate, tolylene diisocyanate, 4,4-diphenylmethane diisocyanate, xylylene diisocyanate, and poly (propylene oxide).
  • diisocyanates such as hexamethylene diisocyanate, isophorone diisocyanate, methylene bis (4-cyclohexyl isocyanate), trimethylhexamethylene diisocyanate, tolylene diisocyanate, 4,4-diphenylmethane diisocyanate, xylylene diisocyanate, and poly (propylene oxide).
  • Polyols such as diol, poly (propylene oxide) triol, poly (tetramethylene oxide) diol, ethoxylated bisphenol A and 2-hydroxyethyl acrylate 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, glycidol dimethacrylate, pentaerythritol tri Hydroxy acrylates such as acrylate Obtained by reacting, those having an acryloyl group and a urethane bond as a functional group in the molecule.
  • polyester acrylate examples include polyester acrylate composed of phthalic anhydride, propylene oxide and acrylic acid, polyester acrylate composed of adipic acid, 1,6-hexanediol and acrylic acid, trimellitic acid, diethylene glycol and acrylic acid. And polyester acrylate.
  • the epoxy acrylate is synthesized by reaction of an epoxy compound such as epichlorohydrin with acrylic acid or methacrylic acid.
  • an epoxy compound such as epichlorohydrin with acrylic acid or methacrylic acid.
  • bisphenol A type epoxy acrylate and bisphenol S synthesized by reaction of bisphenol A, epichlorohydrin and acrylic acid.
  • Bisphenol S-type epoxy acrylate synthesized by reaction of chlorophenol, epichlorohydrin and acrylic acid bisphenol F-type epoxy acrylate synthesized by reaction of bisphenol F, epichlorohydrin and acrylic acid, synthesis by reaction of phenol novolac, epichlorohydrin and acrylic acid And phenol novolac type epoxy acrylate.
  • epoxy resin examples include bisphenol type epoxy resins such as bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol AD type epoxy resin, and bisphenol S type epoxy resin; phenol novolac type epoxy resin, cresol novolak type epoxy resin and the like.
  • examples include novolak-type epoxy resins; aromatic epoxy resins such as trisphenolmethane triglycidyl ether, and hydrogenated products and brominated products thereof.
  • photopolymerization initiator a photoradical polymerization initiator and a photocationic polymerization initiator are preferable.
  • the photoradical polymerization initiator include 4- (2-hydroxyethoxy) phenyl (2-hydroxy-2-propyl) ketone.
  • Acetophenone derivatives such as ⁇ -hydroxy- ⁇ - ⁇ '-dimethylacetophenone, methoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone; benzoin ether compounds such as benzoin ethyl ether and benzoin propyl ether; Ketal derivatives; halogenated ketones, acyl phosphine oxides, acyl phosphonates, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one, and the like.
  • photocationic polymerization initiator examples include iron-allene complex compounds, aromatic diazonium salts, aromatic iodonium salts, aromatic sulfonium salts, onium salts, pyridinium salts, aluminum complexes / silanol salts, trichloromethyltriazine derivatives, and the like. It is done.
  • Examples of the counter anion of the onium salt or pyridinium salt include SbF 6 ⁇ , PF 6 ⁇ , AsF 6 ⁇ , BF 4 ⁇ , tetrakis (pentafluoro) borate, trifluoromethane sulfonate, methane sulfonate, trifluoro Examples include acetate, acetate, sulfonate, tosylate, and nitrate.
  • the addition amount of the photopolymerization initiator is generally 0.1 to 15 parts by weight, preferably 0.5 to 10 parts by weight with respect to 100 parts by weight of the ultraviolet curable resin.
  • an ultraviolet curable resin 54 is applied to the substrate 52 in a sheet form, and then a stamper (template) 56 is disposed on the ultraviolet curable resin 54. At this time, if precise alignment is required, alignment is performed as appropriate.
  • the distance between the pressure body 12 and the holding member 14 is adjusted by the vertical movement means, and the sealing material 22 is held via the flexible film 34.
  • the member 14 is in close contact with the upper surface (substrate holding surface) 14a.
  • the stamper 56 is pressed against the ultraviolet curable resin material 54 by supplying fluid from the fluid supply / discharge pipe 30 and pressurizing the inside of the cavity 36 (for example, 1 to 50 bar). In this pressed state, ultraviolet rays are irradiated from the LED 16 to cure the ultraviolet curable resin material 54, and then the pressure body 12 and the holding member 14 are pulled apart.
  • a fine concavo-convex pattern can be formed on the substrate 52.
  • the pressure body 12 and the holding member are provided by the thermometer 28, the cooling medium pipe 24 and the control unit (not shown) described above. It is preferable to perform 14 temperature control.
  • the temperature set by the temperature control is preferably set at a temperature at which the dimensions of the stamper 56 do not change, particularly within the range of ⁇ 5 ° C., preferably ⁇ 1 ° C., particularly preferably ⁇ 0.5 ° C. of the set temperature of the stamper. . Thereby, a dimensional change can be prevented reliably, and a desired concavo-convex pattern can be formed with high accuracy.
  • the preset temperature of the stamper refers to a temperature that is set in the production of the stamper and exhibits a desired dimension.
  • a stamper having a preset temperature of 23 ° C. it is preferably 22 to 24 ° C.
  • the temperature is controlled so that the temperature becomes 22.5 to 23.5 ° C.
  • the set temperature of the stamper is usually set to a temperature in the range of 1 to 30 ° C., particularly 20 to 25 ° C.
  • the present invention is not limited to the configuration of each of the above embodiments, and various modifications are possible within the scope of the gist of the invention.

Abstract

Provided is an imprinting apparatus such that fluctuation in the dimensions of a stamper due to heat is prevented, and manufacturing cost is reduced. The imprinting apparatus (10) positions a stamper (56) having a recess/protrusion pattern at the surface thereof over an ultraviolet-curable resin material (54) supplied on a substrate (52), presses the stamper (56) by using fluid to apply pressure to the back face of the stamper (56), cures the ultraviolet-curable resin material (54) by irradiating ultraviolet rays thereupon, and forms a recess/protrusion pattern on the surface of the substrate (52). The imprinting apparatus is characterized by comprising a holding member (14) that holds the substrate (52), and a pressure- resistant body (12) facing the holding member (14), said pressure-resistant body (12) being provided with, on the bottom section thereof, LEDs (16) for irradiating ultraviolet rays upon the ultraviolet-curable resin material (54), and the bottom section of the pressure-resistant body (12) and the holding member (14) being arranged in opposition to each other.

Description

インプリント装置Imprint device
　本発明はインプリント装置に関し、特に、熱によるスタンパの寸法変化が防止され、製造コストが削減されたインプリント装置に関する。 The present invention relates to an imprint apparatus, and more particularly to an imprint apparatus in which a dimensional change of a stamper due to heat is prevented and a manufacturing cost is reduced.
　近年、半導体デバイス、ディスプレイ、電子ペーパー、記録メディア、バイオチップ、光デバイスなどの製造工程における微細パターンの形成するための技術として、ナノインプリント技術が知られている。ナノインプリント技術は、従来のプレス技術と比較して、より微小な構造を実現するための微細加工の技術である。この技術自体には解像度に限界がなく、解像度はスタンパ（即ち金型）の作製精度によって決定される。したがって、高い精度のスタンパさえ作製できれば、従来のフォトリソグラフィーより容易に且つはるかに安価な装置を用いて、極微細構造を形成することが可能である。 In recent years, nanoimprint technology has been known as a technology for forming fine patterns in the manufacturing process of semiconductor devices, displays, electronic paper, recording media, biochips, optical devices and the like. The nanoimprint technology is a microfabrication technology for realizing a finer structure as compared with the conventional press technology. This technique itself has no limit on the resolution, and the resolution is determined by the precision of the stamper (ie, mold). Therefore, as long as a high-precision stamper can be manufactured, it is possible to form an ultrafine structure using an apparatus that is easier and much cheaper than conventional photolithography.
　インプリント技術には転写される材料により２種類に大別される。一方は、転写される材料を加熱し、スタンパ（金型）により塑性変形させた後、冷却してパターンを形成する熱インプリント技術である。もう一方は、基板上に室温で液状の光硬化性樹脂を塗布した後、光透過性のスタンパを樹脂に押し当て、光を照射させることで基板上の樹脂を硬化させパターンを形成するＵＶインプリント技術である。特にＵＶインプリント技術は室温にてパターン形成できるため熱による基板、スタンパ間の線膨張係数差による歪が発生しにくく、高精度のパターン形成が可能であり、半導体等のリソグラフィ技術の代替技術として注目を集めている。 The imprint technology is roughly divided into two types depending on the material to be transferred. One is a thermal imprint technique in which a material to be transferred is heated, plastically deformed by a stamper (mold), and then cooled to form a pattern. The other is UV in which a liquid photocurable resin is applied onto a substrate at room temperature, and then a light transmissive stamper is pressed against the resin and irradiated with light to cure the resin on the substrate and form a pattern. Printing technology. In particular, UV imprint technology enables pattern formation at room temperature, so that distortion due to differences in the linear expansion coefficient between the substrate and stamper due to heat is unlikely to occur, and high-precision pattern formation is possible. It attracts attention.
　ＵＶインプリントを行うための装置として、例えば図２に記載のインプリント装置が知られている。このインプリント装置１００は、紫外線硬化樹脂材料１５４が供給された基板１５２を保持する保持部材１１４と、支持体１１６に支持された石英ガラス１１８と、ＵＶランプ１２０とを主として有するものであり、紫外線硬化樹脂材料１５４上にスタンパ（金型）１５６を載置し、石英ガラス１１８、支持体１１６、支持体１１６の下部に設けられたシール材１２２及びシール材１２２に取り付けられた可撓性膜１２４からなるキャビティ１２６に、流体給排管１２８から空気等の流体を供給することによりスタンパ１５６の上面を押圧し、水銀ランプ等のＵＶランプ１２０から紫外線を照射して、紫外線硬化樹脂材料１５４を硬化させることにより、基板１５２上に微細な凹凸パターンを形成するものである。流体を用いて押圧しているので、均一圧でスタンパ１５６を紫外線硬化樹脂材料１５４に押圧することができる。そのため、均一圧で押圧することが難しい大面積のインプリントに主に用いられている。 For example, an imprint apparatus shown in FIG. 2 is known as an apparatus for performing UV imprint. The imprint apparatus 100 mainly includes a holding member 114 that holds a substrate 152 supplied with an ultraviolet curable resin material 154, a quartz glass 118 supported by a support 116, and a UV lamp 120. A stamper (mold) 156 is placed on the cured resin material 154, and the quartz glass 118, the support body 116, the sealing material 122 provided under the support body 116, and the flexible film 124 attached to the sealing material 122. The upper surface of the stamper 156 is pressed by supplying fluid such as air from the fluid supply / discharge pipe 128 to the cavity 126, and the ultraviolet curable resin material 154 is cured by irradiating ultraviolet rays from a UV lamp 120 such as a mercury lamp. By doing so, a fine uneven pattern is formed on the substrate 152. Since the fluid is pressed, the stamper 156 can be pressed against the ultraviolet curable resin material 154 with uniform pressure. For this reason, it is mainly used for large-area imprints that are difficult to press with uniform pressure.
　スタンパを均一に押圧する手段としては、熱インプリントに用いる装置であるが、可撓性膜を用いずに気体で直接スタンパを押圧するインプリント装置も知られている（特許文献１）。 The means for uniformly pressing the stamper is an apparatus used for thermal imprinting, but an imprinting apparatus that directly presses the stamper with gas without using a flexible film is also known (Patent Document 1).
特開２００９－１５４３９３号公報JP 2009-154393 A
　しかしながら、図２に記載の装置は、ＵＶランプ（光源）１２０の影響により、ＵＶインプリント時にスタンパ１５６の温度が上昇してその寸法が変化し、精確な凹凸パターンを基板１５２上に形成することができない場合があった。これは長距離ピッチの場合や、熱の影響を受けやすい樹脂製のスタンパを使用した場合に特に問題となる。また、流体による加圧に耐え得る厚さの石英ガラス（通常、５ｃｍ以上）を用いることが必要であり、製造コストが高いという問題があった。 However, in the apparatus shown in FIG. 2, due to the influence of the UV lamp (light source) 120, the temperature of the stamper 156 increases during UV imprinting to change its dimensions, and an accurate uneven pattern is formed on the substrate 152. There was a case that could not be. This is a particular problem when a long distance pitch is used or when a resin stamper that is susceptible to heat is used. In addition, it is necessary to use quartz glass having a thickness that can withstand pressurization by a fluid (usually 5 cm or more), and there is a problem that the manufacturing cost is high.
　本発明は上記事情に鑑みてなされたものであり、その目的は、インプリント時においてスタンパの寸法変化が防止され、製造コストが削減されたインプリント装置を提供することにある。 The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an imprint apparatus in which dimensional change of a stamper is prevented during imprinting and manufacturing cost is reduced.
　上記目的は、表面に凹凸パターンを有するスタンパを、基板上に供給された紫外線硬化樹脂材料の上に、当該凹凸パターン表面が密着するように配置し、該スタンパの背面を流体を用いて加圧することにより該スタンパを押圧し、該押圧状態で前記紫外線硬化樹脂材料に紫外線を照射することにより、前記紫外線硬化樹脂材料を硬化させ、前記基板の表面に前記凹凸パターンの反転凹凸パターンを形成するインプリント装置において、前記基板を保持する保持部材と、前記保持部材と対向する耐圧体と、を有し、前記耐圧体は、その底部に前記紫外線硬化樹脂材料に紫外線を照射するＬＥＤを備え、且つ前記耐圧体の底部と前記保持部材とが対向するように配置されていることを特徴とするインプリント装置により達成される。 The purpose is to place a stamper having a concavo-convex pattern on the surface of the ultraviolet curable resin material supplied on the substrate so that the concavo-convex pattern surface is in close contact, and pressurize the back surface of the stamper with a fluid. By pressing the stamper and irradiating the ultraviolet curable resin material with ultraviolet rays in the pressed state, the ultraviolet curable resin material is cured, and an inverted concavo-convex pattern of the concavo-convex pattern is formed on the surface of the substrate. The printing apparatus includes a holding member that holds the substrate and a pressure body that faces the holding member, and the pressure body includes an LED that irradiates the ultraviolet curable resin material with ultraviolet light at a bottom thereof, and This is achieved by an imprint apparatus in which the bottom of the pressure-resistant body and the holding member are arranged to face each other.
　従来から一般的に使用されていた水銀ランプ等のＵＶランプは、ランプ自体からの発熱が大きく、また、副次的に赤外線が発生するため、スタンパの温度上昇の原因となっていた。ＬＥＤは他の紫外線光源と比較して、それ自体からの発熱が小さく、また副次的に赤外線が発生することがないため、光源としてＬＥＤを用いることにより、スタンパの温度上昇を防止することができる。また、ＬＥＤは水銀ランプ等のＵＶランプよりも耐圧面で優れており、耐圧体は、その底部にＬＥＤを収納する際には、石英ガラス等の透明板を設ける必要がなく、インプリント装置の製造コストを削減することが可能になる。 Conventionally, UV lamps such as mercury lamps that have been generally used have a large heat generation from the lamp itself, and secondary infrared rays are generated, which causes a rise in the temperature of the stamper. Since LEDs generate less heat from themselves than other ultraviolet light sources and do not generate infrared rays as a secondary light source, the use of LEDs as light sources can prevent the temperature of the stamper from rising. it can. Further, the LED is superior in pressure resistance to a UV lamp such as a mercury lamp, and the pressure resistant body does not need to be provided with a transparent plate such as quartz glass when the LED is accommodated at the bottom thereof. Manufacturing costs can be reduced.
　なお、透明板を設けてもよいが、この場合には、透明板に掛かる圧力をＬＥＤと共に耐圧体で受けることができるので、透明板は薄い厚さのもので足り、装置の製造コストを削減できるだけでなく、保持部材と耐圧体によって形成される空間内の流体の流れがより安定的になり、スタンパをより一定圧力で加圧可能となる。 Although a transparent plate may be provided, in this case, since the pressure applied to the transparent plate can be received by the pressure body together with the LED, the transparent plate need only be thin and reduce the manufacturing cost of the device. In addition, the flow of fluid in the space formed by the holding member and the pressure body becomes more stable, and the stamper can be pressurized at a more constant pressure.
　本発明の好ましい態様は以下のとおりである。
（１）前記耐圧体と前記保持部材の少なくとも一方に冷却手段が設けられている。
　温度が上昇したとしても、冷却手段によりスタンパの温度上昇を防止することができる。
（２）前記耐圧体と前記保持部材の少なくとも一方に温度計が設けられ、該温度計と前記冷却手段により温度制御を行う制御部が設けられている。
　インプリント装置の温度変化を常時監視して一定温度を維持することができる。
（３）前記耐圧体に断熱手段が設けられている。
　装置全体に熱が拡散することを防止することができる。
（４）前記スタンパが樹脂製のスタンパである。
　本発明は、特に熱による寸法変化が比較的大きいとされている樹脂製のスタンパを使用するインプリントに好適である。 Preferred embodiments of the present invention are as follows.
(1) A cooling means is provided on at least one of the pressure-resistant body and the holding member.
Even if the temperature rises, the temperature rise of the stamper can be prevented by the cooling means.
(2) At least one of the pressure body and the holding member is provided with a thermometer, and a control unit that performs temperature control with the thermometer and the cooling means is provided.
The temperature change of the imprint apparatus can be constantly monitored to maintain a constant temperature.
(3) A heat insulating means is provided in the pressure body.
It is possible to prevent heat from diffusing throughout the apparatus.
(4) The stamper is a resin stamper.
The present invention is particularly suitable for imprinting using a resin stamper that is considered to have a relatively large dimensional change due to heat.
　本発明に係るインプリント装置によれば、熱によるスタンパの温度上昇を防止し、寸法変化を抑制することができるので、基板の所定の位置に精密に微細な凹凸パターンを形成することができ、また、透明板の設置が不要となることにより製造コストを削減することができる。したがって、高度な寸法精度が要求される用途に好適に使用することができ、生産性の向上したインプリント装置を提供することができる。 According to the imprint apparatus according to the present invention, it is possible to prevent a temperature rise of the stamper due to heat and suppress a dimensional change, so that a fine uneven pattern can be precisely formed at a predetermined position on the substrate, Moreover, the manufacturing cost can be reduced by eliminating the need to install a transparent plate. Accordingly, it is possible to provide an imprint apparatus that can be suitably used for applications that require high dimensional accuracy and that has improved productivity.
本発明に係るインプリント装置の実施の形態の一例を示す概略断面図である。It is a schematic sectional drawing which shows an example of embodiment of the imprint apparatus which concerns on this invention. 従来のインプリント装置の概略断面図である。It is a schematic sectional drawing of the conventional imprint apparatus.
　以下、本発明について図を参照して詳細に説明する。図１は、本発明に係るインプリント装置の実施の形態の一例を示す概略断面図である。本発明に係るインプリント装置１０は、主として、ＬＥＤ１６を底部に収容した耐圧体１２と、基板５２を保持可能な保持部材１４とから構成され、基板５２上にシート状に供給された紫外線硬化樹脂材料５４にスタンパ５６を配置した後、スタンパ５６の背面（上面）を流体供給管３０から供給される流体により押圧し、そのままＬＥＤ１６から紫外線を照射することにより硬化させて基板５２上に凹凸パターンを形成するものである。以下、各構成についてそれぞれ詳細に説明する。 Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic sectional view showing an example of an embodiment of an imprint apparatus according to the present invention. The imprint apparatus 10 according to the present invention is mainly composed of a pressure-resistant body 12 in which the LED 16 is accommodated in the bottom and a holding member 14 capable of holding the substrate 52, and is an ultraviolet curable resin supplied in a sheet form on the substrate 52. After the stamper 56 is disposed on the material 54, the back surface (upper surface) of the stamper 56 is pressed by the fluid supplied from the fluid supply pipe 30, and cured by irradiating ultraviolet rays from the LED 16 as it is to form an uneven pattern on the substrate 52. To form. Hereinafter, each configuration will be described in detail.
　耐圧体１２は、後述する流体による加圧に耐え得るように剛性を有する部材、例えばＳＵＳ等から構成され、その形状は略直方体状に形成されている。耐圧体１２の底部１２ａには凹部１２ｃが形成されており、底部１２ａは加圧時に膜３４に接触しない高さになるように設定される。なお、その凹部１２ｃには紫外線を透過する透明板２０が設けられていてもよい。この透明板２０は、その下面２０ａが後述する膜３４を介して保持部材１４の上面（基板保持面）１４ａと対向するように設けられ、透明版２０は加圧時に膜３４に接触しない高さになるように設定される。 The pressure-resistant body 12 is composed of a rigid member such as SUS so that it can withstand pressurization by a fluid, which will be described later, and has a substantially rectangular parallelepiped shape. A recess 12c is formed in the bottom 12a of the pressure-resistant body 12, and the bottom 12a is set to a height that does not contact the membrane 34 when pressurized. A transparent plate 20 that transmits ultraviolet rays may be provided in the recess 12c. The transparent plate 20 is provided such that the lower surface 20a faces the upper surface (substrate holding surface) 14a of the holding member 14 via a film 34 described later, and the transparent plate 20 has a height that does not contact the film 34 when pressed. Is set to be
　耐圧体１２の底部１２ａに形成された凹部１２ｃには、紫外線照射用のＬＥＤ（発光ダイオード）１６が備えられたＬＥＤ基板１８が設けられ、ＬＥＤ１６は下方を向くように配置されている。ＬＥＤ基板１８の下側の面１８ａは、凹部１９が一定間隔で形成されており、この凹部１９にＬＥＤ１６が備え付けられている。これにより、ＬＥＤ１６がＬＥＤ基板１８から断面視で突出しない構成とされている。なお、図示のように透明板２０を設ける場合、面１８ａの凹部１９以外の領域は、透明板２０の上面と接触対向しており、これにより、透明板２０にかかる圧力を耐圧体１２と共に受けることができる。そのため、用いる透明板２０の厚さは、例えば３～５ｍｍと薄いものであればよく、従来のように分厚い透明板（石英ガラス）を設ける必要はない。透明板２０としては、紫外線を透過し、且つある程度の剛性を有するものであればよく、例えば石英ガラスが用いられる。ＬＥＤ１６から紫外線が出射すると、透明板２０を透過して紫外線硬化樹脂材料５４に照射される。 The recess 12c formed in the bottom 12a of the pressure-resistant body 12 is provided with an LED substrate 18 provided with an LED (light emitting diode) 16 for ultraviolet irradiation, and the LED 16 is arranged to face downward. On the lower surface 18 a of the LED substrate 18, recesses 19 are formed at regular intervals, and the LEDs 16 are provided in the recesses 19. Thus, the LED 16 is configured not to protrude from the LED substrate 18 in cross-sectional view. When the transparent plate 20 is provided as shown in the figure, the region other than the concave portion 19 of the surface 18a is in contact with the upper surface of the transparent plate 20, and thereby receives the pressure applied to the transparent plate 20 together with the pressure body 12. be able to. Therefore, the thickness of the transparent plate 20 to be used is only required to be as thin as 3 to 5 mm, for example, and it is not necessary to provide a thick transparent plate (quartz glass) as in the prior art. The transparent plate 20 only needs to transmit ultraviolet rays and have a certain degree of rigidity. For example, quartz glass is used. When ultraviolet rays are emitted from the LED 16, the ultraviolet curable resin material 54 is irradiated through the transparent plate 20.
　ＬＥＤ１６の数は、紫外線を照射して紫外線硬化樹脂材料５４を硬化させることができる数があればよく、例えば、１０ｃｍ２当たり少なくとも９～８１個備えられ、紫外線照射量は例えば、３００ｍＪ／ｃｍ２以上あればよい。また、ＬＥＤ１６は、紫外線硬化樹脂材料５４に均一に紫外線が照射できるように、一定間隔で配列されている。ＬＥＤ１６は、紫外線を照射可能なＬＥＤであり、例えば、２００～４００ｎｍ、好ましくは３００～４００ｎｍの波長を照射可能なＬＥＤを用いる。 The number of LED16 may be any number that can be irradiated with ultraviolet rays to cure the ultraviolet curing resin material 54, for example, provided at least 9-81 per 10 cm 2, the amount of ultraviolet irradiation, for example, 300 mJ / cm 2 That's all you need. The LEDs 16 are arranged at regular intervals so that the ultraviolet curable resin material 54 can be uniformly irradiated with ultraviolet rays. The LED 16 is an LED that can irradiate ultraviolet rays. For example, an LED that can irradiate a wavelength of 200 to 400 nm, preferably 300 to 400 nm is used.
　保持部材１４は、剛性を有する材質、例えばＳＵＳ等から構成され、その形状は略直方体状に形成されている。そして、その上面１４ａで基板５２を水平に保持している。 The holding member 14 is made of a rigid material, such as SUS, and has a substantially rectangular parallelepiped shape. The substrate 52 is held horizontally by the upper surface 14a.
　耐圧体１２及び保持部材１４の内部には、冷却媒体が流動する冷却手段としての冷却媒体管２４が設けられている。冷却媒体管２４は、耐圧体１２にはＬＥＤ基板１８の近傍に、保持部材１４には基板保持面１４ａの近傍にそれぞれ設けられている。冷却媒体としては、水や油等の液体や空気や不活性ガス等の気体を用いることができる。これにより、ＬＥＤ基板１８から発熱が生じたとしても、スタンパ５６の寸法変化を確実に防止することが可能となる。 Inside the pressure-resistant body 12 and the holding member 14, a cooling medium pipe 24 is provided as a cooling means through which the cooling medium flows. The cooling medium pipe 24 is provided in the pressure-resistant body 12 in the vicinity of the LED substrate 18 and in the holding member 14 in the vicinity of the substrate holding surface 14a. As the cooling medium, a liquid such as water or oil, or a gas such as air or an inert gas can be used. As a result, even if heat is generated from the LED substrate 18, the dimensional change of the stamper 56 can be reliably prevented.
　耐圧体１２及び保持部材１４には、それぞれの内部の温度を測定する温度計２８が設けられている。温度計２８は、耐圧体１２には、ＬＥＤ基板１８近傍の温度を測定するように設置することが好ましく、保持部材１４には、基板５２を保持する面１４ａの近傍の温度を測定するように設置することが好ましい。また、本発明に係るインプリント装置１０には、冷却手段２４及び温度計２８により耐圧体１２及び保持部材１４の温度制御を行う制御部（図示せず）が設けられている。これにより、インプリント装置１０の稼働時において、常時一定温度に維持することが可能となる。 The pressure body 12 and the holding member 14 are provided with thermometers 28 for measuring the internal temperatures thereof. The thermometer 28 is preferably installed on the pressure body 12 so as to measure the temperature in the vicinity of the LED substrate 18, and the holding member 14 measures the temperature in the vicinity of the surface 14 a holding the substrate 52. It is preferable to install. The imprint apparatus 10 according to the present invention is provided with a control unit (not shown) that controls the temperature of the pressure body 12 and the holding member 14 by the cooling unit 24 and the thermometer 28. Accordingly, it is possible to always maintain a constant temperature during operation of the imprint apparatus 10.
　また、耐圧体１２の内部には、ＬＥＤ基板１８の外側の位置に断熱手段としての断熱材２６が設けられている。断熱材２６を設けることにより、装置１０全体に熱が拡散することを防止することができる。断熱材２６としては、例えば、ポリウレタン、フェノール樹脂等の発泡体やグラスウール、ロックウール等の繊維系断熱材を使用することができる。断熱材は保持部材１４の内部にも設けてもよい。 Further, a heat insulating material 26 as a heat insulating means is provided inside the pressure body 12 at a position outside the LED substrate 18. By providing the heat insulating material 26, it is possible to prevent heat from diffusing throughout the apparatus 10. As the heat insulating material 26, for example, a foamed material such as polyurethane or phenol resin, or a fiber-based heat insulating material such as glass wool or rock wool can be used. The heat insulating material may also be provided inside the holding member 14.
　耐圧体１２の下面１２ａの外周上にはＯリングシール材等のシール材２２が設けられている。シール材２２には、可撓性を有する膜３４が取り付けられており、これにより流体を供給するキャビティ３６が形成されている。 A sealing material 22 such as an O-ring sealing material is provided on the outer periphery of the lower surface 12 a of the pressure body 12. A film 34 having flexibility is attached to the sealing material 22, thereby forming a cavity 36 for supplying a fluid.
　膜３４は、紫外線を透過する材料から構成されていることが必要であり、例えば、ポリエチレン、ポリプロピレン、ポリエチレンテレフタレート、ポリカーボネート、ＰＭＭＡ、ポリシクロオレフィン、フッ素系樹脂等のフィルムから構成され、厚さは例えば、５０μｍ～５ｍｍ、好ましくは１００μｍ～３ｍｍの厚さに設定される。 The film 34 needs to be made of a material that transmits ultraviolet rays. For example, the film 34 is made of a film such as polyethylene, polypropylene, polyethylene terephthalate, polycarbonate, PMMA, polycycloolefin, and fluorine resin, and has a thickness of For example, the thickness is set to 50 μm to 5 mm, preferably 100 μm to 3 mm.
　キャビティ３６には、耐圧体１２に設けられた流体給排管３０から流体が供給され、キャビティ３６内が加圧される構成とされている。この流体としては、例えば、空気、窒素、二酸化炭素、アルゴン等を用いることができる。流体によりキャビティ３６内が加圧されることにより、スタンパ５６の背面を均一圧で押圧することができ、押圧状態で紫外線が紫外線硬化樹脂材料５４に照射される。 The cavity 36 is configured such that a fluid is supplied from a fluid supply / discharge pipe 30 provided in the pressure-resistant body 12 and the inside of the cavity 36 is pressurized. As this fluid, for example, air, nitrogen, carbon dioxide, argon or the like can be used. By pressurizing the inside of the cavity 36 by the fluid, the back surface of the stamper 56 can be pressed with a uniform pressure, and the ultraviolet curable resin material 54 is irradiated with ultraviolet rays in the pressed state.
　図示していないが、耐圧体１２と保持部材１４のうち少なくとも一方を上下移動させる上下移動手段が設けられており、押圧時において、耐圧体１２と保持部材１４との間隔が調整される。 Although not shown, vertical movement means for moving up and down at least one of the pressure body 12 and the holding member 14 is provided, and the distance between the pressure body 12 and the holding member 14 is adjusted when pressed.
　本実施の形態では、スタンパ５６に押圧力を付与する手段は膜３４を介して流体により間接的に押圧する例を示しているが、これに限られるものではなく、特許文献１に記載のように膜を介さずに流体で直接押圧する構成としてもよい。この場合、流体には、空気や不活性ガス等の気体が用いられる。 In the present embodiment, an example in which the means for applying a pressing force to the stamper 56 is indirectly pressed by a fluid through the film 34 is not limited to this, but is described in Patent Document 1. Further, it may be configured to press directly with a fluid without using a membrane. In this case, a gas such as air or an inert gas is used as the fluid.
　本発明において、基板５２に所望のパターンを形成するためのスタンパ５６は、紫外線透過性を有する従来から公知のスタンパを使用することができる。具体的には、例えば、石英ガラス、樹脂等を使用することができる。樹脂製のスタンパとしては、ポリエチレン、ポリプロピレン、ポリシクロオレフィン、フッ素系樹脂、ポリ塩化ビニル等の離型性の良い樹脂で作製されたスタンパが用いられる。上述したように、本発明はインプリント装置全体の温度を一定に維持することができるので、本発明に係るインプリント装置は、熱による寸法変化が比較的大きい樹脂製のスタンパを用いるインプリントに好適である。 In the present invention, as the stamper 56 for forming a desired pattern on the substrate 52, a conventionally known stamper having ultraviolet transparency can be used. Specifically, for example, quartz glass, resin, or the like can be used. As the resin stamper, a stamper made of a resin having good releasability such as polyethylene, polypropylene, polycycloolefin, fluorine-based resin, and polyvinyl chloride is used. As described above, since the present invention can keep the temperature of the entire imprint apparatus constant, the imprint apparatus according to the present invention is suitable for imprinting using a resin stamper that has a relatively large dimensional change due to heat. Is preferred.
　本発明において、紫外線硬化樹脂材料５４は、紫外線硬化性樹脂と光重合開始剤を含む。紫外線硬化性樹脂としては、例えば、ウレタンアクリレート、ポリエステルアクリレート、エポキシアクリレート、エポキシ樹脂、イミド系オリゴマー、ポリエン・チオール系オリゴマー等が挙げられる。 In the present invention, the ultraviolet curable resin material 54 includes an ultraviolet curable resin and a photopolymerization initiator. Examples of the ultraviolet curable resin include urethane acrylate, polyester acrylate, epoxy acrylate, epoxy resin, imide oligomer, and polyene / thiol oligomer.
　ウレタンアクリレートは、例えば、ヘキサメチレンジイソシアネート、イソホロンジイソシアネート、メチレンビス（４－シクロヘキシルイソシアネート）、トリメチルヘキサメチレンジイソシアネート、トリレンジイソシアネート、４，４－ジフェニルメタンジイソシアネート、キシリレンジイソシアネート等のジイソシアネート類とポリ（プロピレンオキサイド）ジオール、ポリ（プロピレンオキサイド）トリオール、ポリ（テトラメチレンオキサイド）ジオール、エトキシ化ビスフェノールＡ等のポリオール類と２－ヒドロキシエチルアクリレート２－ヒドロキシエチルメタクリレート、２－ヒドロキシプロピルアクリレート、グリシドールジメタクリレート、ペンタエリスリトールトリアクリレート等のヒドロキシアクリレート類とを反応させることによって得られ、分子中に官能基としてアクリロイル基とウレタン結合を有するものである。 Urethane acrylates include, for example, diisocyanates such as hexamethylene diisocyanate, isophorone diisocyanate, methylene bis (4-cyclohexyl isocyanate), trimethylhexamethylene diisocyanate, tolylene diisocyanate, 4,4-diphenylmethane diisocyanate, xylylene diisocyanate, and poly (propylene oxide). Polyols such as diol, poly (propylene oxide) triol, poly (tetramethylene oxide) diol, ethoxylated bisphenol A and 2-hydroxyethyl acrylate 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, glycidol dimethacrylate, pentaerythritol tri Hydroxy acrylates such as acrylate Obtained by reacting, those having an acryloyl group and a urethane bond as a functional group in the molecule.
　ポリエステルアクリレートとしては、例えば、無水フタル酸とプロピレンオキサイドとアクリル酸とからなるポリエステルアクリレート、アジピン酸と１，６－ヘキサンジオールとアクリル酸とからなるポリエステルアクリレート、トリメリット酸とジエチレングリコールとアクリル酸とからなるポリエステルアクリレート等が挙げられる。 Examples of the polyester acrylate include polyester acrylate composed of phthalic anhydride, propylene oxide and acrylic acid, polyester acrylate composed of adipic acid, 1,6-hexanediol and acrylic acid, trimellitic acid, diethylene glycol and acrylic acid. And polyester acrylate.
　エポキシアクリレートは、エピクロルヒドリン等のエポキシ化合物とアクリル酸又はメタクリル酸との反応により合成されたものであり、例えば、ビスフェノールＡとエピクロルヒドリンとアクリル酸との反応により合成されるビスフェノールＡ型エポキシアクリレート、ビスフェノールＳとエピクロルヒドリンとアクリル酸との反応により合成されるビスフェノールＳ型エポキシアクリレート、ビスフェノールＦとエピクロルヒドリンとアクリル酸との反応により合成されるビスフェノールＦ型エポキシアクリレート、フェノールノボラックとエピクロルヒドリンとアクリル酸との反応により合成されるフェノールノボラック型エポキシアクリレート等が挙げられる。 The epoxy acrylate is synthesized by reaction of an epoxy compound such as epichlorohydrin with acrylic acid or methacrylic acid. For example, bisphenol A type epoxy acrylate and bisphenol S synthesized by reaction of bisphenol A, epichlorohydrin and acrylic acid. Bisphenol S-type epoxy acrylate synthesized by reaction of chlorophenol, epichlorohydrin and acrylic acid, bisphenol F-type epoxy acrylate synthesized by reaction of bisphenol F, epichlorohydrin and acrylic acid, synthesis by reaction of phenol novolac, epichlorohydrin and acrylic acid And phenol novolac type epoxy acrylate.
　エポキシ樹脂としては、例えば、ビスフェノールＡ型エポキシ樹脂、ビスフェノールＦ型エポキシ樹脂、ビスフェノールＡＤ型エポキシ樹脂、ビスフェノールＳ型エポキシ樹脂等のビスフェノール型エポキシ樹脂；フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂等のノボラック型エポキシ樹脂；トリスフェノールメタントリグリシジルエーテル等の芳香族エポキシ樹脂、及び、これらの水添化物や臭素化物等が挙げられる。 Examples of the epoxy resin include bisphenol type epoxy resins such as bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol AD type epoxy resin, and bisphenol S type epoxy resin; phenol novolac type epoxy resin, cresol novolak type epoxy resin and the like. Examples include novolak-type epoxy resins; aromatic epoxy resins such as trisphenolmethane triglycidyl ether, and hydrogenated products and brominated products thereof.
　光重合開始剤としては、光ラジカル重合開始剤及び光カチオン重合開始剤が好ましく、光ラジカル重合開始剤としては、例えば、４－（２－ヒドロキシエトキシ）フェニル（２－ヒドロキシ－２－プロピル）ケトン、α－ヒドロキシ－α－α’－ジメチルアセトフェノン、メトキシアセトフェノン、２，２－ジメトキシ－２－フェニルアセトフェノン等のアセトフェノン誘導体；ベンゾインエチルエーテル、ベンゾインプロピルエーテル等のベンゾインエーテル系化合物；ベンジルジメチルケタール等のケタール誘導体；ハロゲン化ケトン、アシルフォスフィンオキシド、アシルフォスフォナート、２－メチル－１－［４－（メチルチオ）フェニル］－２－モルフォリノプロパン－１－オン等が挙げられる。光カチオン重合開始剤としては、例えば、鉄－アレン錯体化合物、芳香族ジアゾニウム塩、芳香族ヨードニウム塩、芳香族スルホニウム塩、オニウム塩、ピリジニウム塩、アルミニウム錯体／シラノール塩、トリクロロメチルトリアジン誘導体等が挙げられる。上記オニウム塩やピリジニウム塩の対アニオンとしては、例えば、ＳｂＦ６－、ＰＦ６－、ＡｓＦ６－、ＢＦ４－、テトラキス（ペンタフルオロ）ボレート、トリフルオロメタンスルフォネート、メタンスルフォネート、トリフルオロアセテート、アセテート、スルフォネート、トシレート、ナイトレート等が挙げられる。 As the photopolymerization initiator, a photoradical polymerization initiator and a photocationic polymerization initiator are preferable. Examples of the photoradical polymerization initiator include 4- (2-hydroxyethoxy) phenyl (2-hydroxy-2-propyl) ketone. Acetophenone derivatives such as α-hydroxy-α-α'-dimethylacetophenone, methoxyacetophenone, 2,2-dimethoxy-2-phenylacetophenone; benzoin ether compounds such as benzoin ethyl ether and benzoin propyl ether; Ketal derivatives; halogenated ketones, acyl phosphine oxides, acyl phosphonates, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one, and the like. Examples of the photocationic polymerization initiator include iron-allene complex compounds, aromatic diazonium salts, aromatic iodonium salts, aromatic sulfonium salts, onium salts, pyridinium salts, aluminum complexes / silanol salts, trichloromethyltriazine derivatives, and the like. It is done. Examples of the counter anion of the onium salt or pyridinium salt include SbF 6− , PF 6− , AsF 6− , BF 4− , tetrakis (pentafluoro) borate, trifluoromethane sulfonate, methane sulfonate, trifluoro Examples include acetate, acetate, sulfonate, tosylate, and nitrate.
　光重合開始剤の添加量は、一般に紫外線硬化性樹脂１００重量部に対して、０．１～１５重量部であり、好ましくは、０．５～１０重量部である。 The addition amount of the photopolymerization initiator is generally 0.1 to 15 parts by weight, preferably 0.5 to 10 parts by weight with respect to 100 parts by weight of the ultraviolet curable resin.
　以下、本発明のインプリント装置１０によりインプリントを行う過程について説明する。 Hereinafter, the process of imprinting by the imprint apparatus 10 of the present invention will be described.
　まず、基板５２に紫外線硬化樹脂５４をシート状に塗布し、次いで紫外線硬化樹脂５４上にスタンパ（テンプレート）５６を配置する。この際、精確な位置合わせが必要な場合には、適宜アライメントを行う。 First, an ultraviolet curable resin 54 is applied to the substrate 52 in a sheet form, and then a stamper (template) 56 is disposed on the ultraviolet curable resin 54. At this time, if precise alignment is required, alignment is performed as appropriate.
　次に、この積層体を保持部材１４の所定の位置に配置した後、耐圧体１２と保持部材１４との間隔を上下移動手段で調節し、シール材２２が可撓性膜３４を介して保持部材１４の上面（基板保持面）１４ａと密着した状態とする。その後、流体給排管３０から流体を供給し、キャビティ３６内を加圧（例えば、１～５０ｂａｒ）することにより、スタンパ５６を紫外線硬化樹脂材料５４に押圧する。この押圧状態で、紫外線をＬＥＤ１６から照射して紫外線硬化樹脂材料５４を硬化させた後、耐圧体１２と保持部材１４を引き離す。　 Next, after this laminated body is arranged at a predetermined position of the holding member 14, the distance between the pressure body 12 and the holding member 14 is adjusted by the vertical movement means, and the sealing material 22 is held via the flexible film 34. The member 14 is in close contact with the upper surface (substrate holding surface) 14a. Thereafter, the stamper 56 is pressed against the ultraviolet curable resin material 54 by supplying fluid from the fluid supply / discharge pipe 30 and pressurizing the inside of the cavity 36 (for example, 1 to 50 bar). In this pressed state, ultraviolet rays are irradiated from the LED 16 to cure the ultraviolet curable resin material 54, and then the pressure body 12 and the holding member 14 are pulled apart. *
　これにより、基板５２上に微細な凹凸パターンを形成することができるが、この動作中に、上述した温度計２８、冷却媒体管２４及び制御部（図示せず）により、耐圧体１２及び保持部材１４の温度制御を行うことが好ましい。温度制御により設定する温度は、スタンパ５６の寸法が変化しない温度、特に、スタンパの設定温度の±５℃、好ましくは±１℃、特に好ましくは±０．５℃の範囲で設定することが好ましい。これにより、寸法変化を確実に防止することができ、所望とする凹凸パターンを高精度で形成することが可能となる。ここで、スタンパの設定温度とは、スタンパの作製において設定される、所望の寸法を示す温度のことをいい、例えば、設定温度が２３℃のスタンパを使用する場合は、２２～２４℃、好ましくは２２．５～２３．５℃の温度となるように温度制御を行う。スタンパの設定温度は、通常１～３０℃、特に２０～２５℃の範囲内の温度に設定される。 As a result, a fine concavo-convex pattern can be formed on the substrate 52. During this operation, the pressure body 12 and the holding member are provided by the thermometer 28, the cooling medium pipe 24 and the control unit (not shown) described above. It is preferable to perform 14 temperature control. The temperature set by the temperature control is preferably set at a temperature at which the dimensions of the stamper 56 do not change, particularly within the range of ± 5 ° C., preferably ± 1 ° C., particularly preferably ± 0.5 ° C. of the set temperature of the stamper. . Thereby, a dimensional change can be prevented reliably, and a desired concavo-convex pattern can be formed with high accuracy. Here, the preset temperature of the stamper refers to a temperature that is set in the production of the stamper and exhibits a desired dimension. For example, when a stamper having a preset temperature of 23 ° C. is used, it is preferably 22 to 24 ° C. The temperature is controlled so that the temperature becomes 22.5 to 23.5 ° C. The set temperature of the stamper is usually set to a temperature in the range of 1 to 30 ° C., particularly 20 to 25 ° C.
　本発明は上記各実施の形態の構成に限定されるものではなく、発明の要旨の範囲内で種々の変形が可能である。 The present invention is not limited to the configuration of each of the above embodiments, and various modifications are possible within the scope of the gist of the invention.
　本発明のインプリント装置を用いれば、高品質な電子ディスプレイ、電子ペーパー等の情報表示用パネルの隔壁や電子デバイス（リソグラフィ、トランジスタ）、光学部品（マイクロレンズアレイ、導波路、光学フィルタ、フォトニックス結晶）、バイオ関連材料（ＤＮＡチップ、マイクロリアクタ）、記録媒体（パターンドメディア、ＤＶＤ）等を有利に得ることができる。 By using the imprint apparatus of the present invention, high-quality electronic displays, partitions for information display panels such as electronic paper, electronic devices (lithography, transistors), optical components (microlens arrays, waveguides, optical filters, photonics) Crystals), bio-related materials (DNA chips, microreactors), recording media (patterned media, DVD) and the like can be advantageously obtained.
１０　インプリント装置
１２　耐圧体
１４　保持部材
１６　ＬＥＤ
１８　ＬＥＤ基板
２０　透明板
２２　シール材
２４　冷却媒体管
２６　断熱材
２８　温度計
３０　流体給排管
３４　膜
３６　キャビティ
５２　基板
５４　紫外線硬化樹脂材料
５６　スタンパ DESCRIPTION OF SYMBOLS 10 Imprint apparatus 12 Pressure-resistant body 14 Holding member 16 LED
18 LED substrate 20 Transparent plate 22 Sealing material 24 Cooling medium tube 26 Heat insulating material 28 Thermometer 30 Fluid supply / drain tube 34 Film 36 Cavity 52 Substrate 54 UV curable resin material 56 Stamper

Claims (5)

  1. 　表面に凹凸パターンを有するスタンパを、基板上に供給された紫外線硬化樹脂材料の上に、当該凹凸パターン表面が密着するように配置し、該スタンパの背面を流体を用いて加圧することにより該スタンパを押圧し、該押圧状態で前記紫外線硬化樹脂材料に紫外線を照射することにより、前記紫外線硬化樹脂材料を硬化させ、前記基板の表面に前記凹凸パターンの反転凹凸パターンを形成するインプリント装置において、
    　前記基板を保持する保持部材と、前記保持部材と対向する耐圧体と、を有し、
    　前記耐圧体は、その底部に前記紫外線硬化樹脂材料に紫外線を照射するＬＥＤを備え、且つ前記耐圧体の底部と前記保持部材とが対向するように配置されていることを特徴とするインプリント装置。     A stamper having a concavo-convex pattern on the surface is disposed on the ultraviolet curable resin material supplied on the substrate so that the surface of the concavo-convex pattern is in close contact, and the back surface of the stamper is pressurized using a fluid to thereby form the stamper. In the imprint apparatus that cures the ultraviolet curable resin material by irradiating the ultraviolet curable resin material with ultraviolet rays in the pressed state, and forms an inverted concavo-convex pattern of the concavo-convex pattern on the surface of the substrate,
    A holding member that holds the substrate, and a pressure body that faces the holding member,
    The pressure-resistant body is provided with an LED for irradiating the ultraviolet curable resin material with ultraviolet light at the bottom thereof, and is arranged so that the bottom of the pressure-resistant body and the holding member are opposed to each other. .
  2. 　前記耐圧体と前記保持部材の少なくとも一方に冷却手段が設けられたことを特徴とする請求項１に記載のインプリント装置。 The imprint apparatus according to claim 1, wherein a cooling means is provided on at least one of the pressure body and the holding member.
  3. 　前記耐圧体と前記保持部材の少なくとも一方に温度計が設けられ、
    　該温度計と前記冷却手段により温度制御を行う制御部が設けられたことを特徴とする請求項２に記載のインプリント装置。     A thermometer is provided on at least one of the pressure body and the holding member,
    The imprint apparatus according to claim 2, further comprising a controller that performs temperature control using the thermometer and the cooling unit.
  4. 　前記耐圧体に断熱手段が設けられたことを特徴とする請求項１～３の何れか１項に記載のインプリント装置。 The imprint apparatus according to any one of claims 1 to 3, wherein the pressure body is provided with a heat insulating means.
  5. 　前記スタンパが樹脂製のスタンパであることを特徴とする請求項１～４の何れか１項に記載のインプリント装置。 The imprint apparatus according to any one of claims 1 to 4, wherein the stamper is a resin stamper.
PCT/JP2012/053230 2011-02-15 2012-02-13 Imprinting apparatus WO2012111590A1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112917789A (en) * 2021-01-27 2021-06-08 业成科技（成都）有限公司 Hot press molding process and hot press device thereof

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101869178B1 (en) * 2013-12-26 2018-06-19 주식회사 다이셀 Curable composition for lens, and lens and optical device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007536750A (en) * 2004-05-07 2007-12-13 オブデュキャット、アクチボラグ Constant temperature imprint lithography method
JP2008230027A (en) * 2007-03-20 2008-10-02 Hitachi High-Technologies Corp Fine structure transfer device and manufacturing method of fine structure
WO2009110596A1 (en) * 2008-03-07 2009-09-11 昭和電工株式会社 Uv nanoimprint method, resin replica mold and method for producing the same, magnetic recording medium and method for producing the same, and magnetic recording/reproducing apparatus
JP2010258421A (en) * 2009-03-26 2010-11-11 Fujifilm Corp Resist composition, resist layer, imprint method, pattern forming body, method for manufacturing magnetic recording medium, and magnetic recording medium

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007536750A (en) * 2004-05-07 2007-12-13 オブデュキャット、アクチボラグ Constant temperature imprint lithography method
JP2008230027A (en) * 2007-03-20 2008-10-02 Hitachi High-Technologies Corp Fine structure transfer device and manufacturing method of fine structure
WO2009110596A1 (en) * 2008-03-07 2009-09-11 昭和電工株式会社 Uv nanoimprint method, resin replica mold and method for producing the same, magnetic recording medium and method for producing the same, and magnetic recording/reproducing apparatus
JP2010258421A (en) * 2009-03-26 2010-11-11 Fujifilm Corp Resist composition, resist layer, imprint method, pattern forming body, method for manufacturing magnetic recording medium, and magnetic recording medium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112917789A (en) * 2021-01-27 2021-06-08 业成科技（成都）有限公司 Hot press molding process and hot press device thereof

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