JP2012169503A - Imprint device - Google Patents

Imprint device Download PDF

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Publication number
JP2012169503A
JP2012169503A JP2011030246A JP2011030246A JP2012169503A JP 2012169503 A JP2012169503 A JP 2012169503A JP 2011030246 A JP2011030246 A JP 2011030246A JP 2011030246 A JP2011030246 A JP 2011030246A JP 2012169503 A JP2012169503 A JP 2012169503A
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JP
Japan
Prior art keywords
stamper
pressure
holding
imprint
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2011030246A
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Japanese (ja)
Inventor
Takahiro Suzuki
Hidehiro Akama
秀洋 赤間
隆弘 鈴木
Original Assignee
Bridgestone Corp
株式会社ブリヂストン
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Publication date
Application filed by Bridgestone Corp, 株式会社ブリヂストン filed Critical Bridgestone Corp
Priority to JP2011030246A priority Critical patent/JP2012169503A/en
Publication of JP2012169503A publication Critical patent/JP2012169503A/en
Withdrawn legal-status Critical Current

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    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855Coating only part of a support with a magnetic layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0805Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
    • B29C2035/0827Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023Microembossing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B29WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29CSHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C35/00Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
    • B29C35/02Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
    • B29C35/08Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
    • B29C35/0888Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds

Abstract

PROBLEM TO BE SOLVED: To provide an imprint device in which the thermal change in dimension of a stamper is prevented and the manufacturing cost is reduced.SOLUTION: In an imprint device 10, a stamper 56 having an uneven pattern on a surface is disposed on an UV ray curable resin material 54 supplied onto a substrate 52, the stamper 56 is pressed by applying pressure to a rear surface of the stamper 56 using a fluid, and the UV ray curable resin material 54 is cured by irradiation with UV rays. Thus, an uneven pattern is formed on a surface of the substrate 52. The imprint device 10 includes a holding member 14 for holding the substrate 52 and a pressure-resistance body 12 that faces the holding member 14. The pressure-resistance body 12 includes at a bottom thereof, an LED 16 for irradiating the UV ray curable resin material 54 with UV rays. The bottom of the pressure-resistance body 12 and the holding member 14 are disposed to face each other.

Description

  The present invention relates to an imprint apparatus, and more particularly, to an imprint apparatus in which a dimensional change of a stamper due to heat is prevented and manufacturing cost is reduced.

  In recent years, a nanoimprint technique is known as a technique for forming a fine pattern in a manufacturing process of a semiconductor device, a display, electronic paper, a recording medium, a biochip, an optical device, and the like. The nanoimprint technology is a microfabrication technology for realizing a finer structure as compared with the conventional press technology. This technique itself has no limit on the resolution, and the resolution is determined by the precision of the stamper (ie, mold). Therefore, as long as a high-precision stamper can be manufactured, it is possible to form an ultrafine structure using an apparatus that is easier and much cheaper than conventional photolithography.

  Imprint technology is roughly divided into two types depending on the material to be transferred. One is a thermal imprint technique in which a material to be transferred is heated, plastically deformed by a stamper (mold), and then cooled to form a pattern. The other is UV in which a liquid photocurable resin is applied onto a substrate at room temperature, and then a light transmissive stamper is pressed against the resin and irradiated with light to cure the resin on the substrate and form a pattern. Printing technology. In particular, UV imprint technology enables pattern formation at room temperature, so that distortion due to differences in the linear expansion coefficient between the substrate and stamper due to heat is unlikely to occur, and high-precision pattern formation is possible. It attracts attention.

  As an apparatus for performing UV imprinting, for example, an imprinting apparatus illustrated in FIG. 2 is known. The imprint apparatus 100 mainly includes a holding member 114 that holds a substrate 152 supplied with an ultraviolet curable resin material 154, a quartz glass 118 supported by a support 116, and a UV lamp 120. A stamper (mold) 156 is placed on the cured resin material 154, and the quartz glass 118, the support body 116, the sealing material 122 provided under the support body 116, and the flexible film 124 attached to the sealing material 122. The upper surface of the stamper 156 is pressed by supplying fluid such as air from the fluid supply / discharge pipe 128 to the cavity 126, and the ultraviolet curable resin material 154 is cured by irradiating ultraviolet rays from a UV lamp 120 such as a mercury lamp. By doing so, a fine uneven pattern is formed on the substrate 152. Since the fluid is pressed, the stamper 156 can be pressed against the ultraviolet curable resin material 154 with uniform pressure. For this reason, it is mainly used for large-area imprints that are difficult to press with uniform pressure.

  The means for uniformly pressing the stamper is an apparatus used for thermal imprinting, but an imprinting apparatus that directly presses the stamper with gas without using a flexible film is also known (Patent Document 1).

JP 2009-154393 A

  However, in the apparatus shown in FIG. 2, due to the influence of the UV lamp (light source) 120, the temperature of the stamper 156 increases during UV imprinting to change its dimensions, and an accurate uneven pattern is formed on the substrate 152. There was a case that could not be. This is a particular problem when a long distance pitch is used or when a resin stamper that is susceptible to heat is used. In addition, it is necessary to use quartz glass having a thickness that can withstand pressurization by a fluid (usually 5 cm or more), and there is a problem that the manufacturing cost is high.

  The present invention has been made in view of the above circumstances, and an object of the present invention is to provide an imprint apparatus in which a dimensional change of a stamper is prevented at the time of imprinting and manufacturing cost is reduced.

  The purpose is to place a stamper having a concavo-convex pattern on the surface of the ultraviolet curable resin material supplied on the substrate so that the concavo-convex pattern surface is in close contact, and pressurize the back surface of the stamper with a fluid. By pressing the stamper and irradiating the ultraviolet curable resin material with ultraviolet rays in the pressed state, the ultraviolet curable resin material is cured, and an inverted concavo-convex pattern of the concavo-convex pattern is formed on the surface of the substrate. The printing apparatus includes a holding member that holds the substrate and a pressure body that faces the holding member, and the pressure body includes an LED that irradiates the ultraviolet curable resin material with ultraviolet light at a bottom thereof, and This is achieved by an imprint apparatus in which the bottom of the pressure-resistant body and the holding member are arranged to face each other.

  Conventionally used UV lamps, such as mercury lamps, generate a large amount of heat from the lamp itself and also generate infrared rays as a secondary factor, causing a rise in the temperature of the stamper. Since LEDs generate less heat from themselves than other ultraviolet light sources and do not generate infrared rays as a secondary light source, the use of LEDs as light sources can prevent the temperature of the stamper from rising. it can. Further, the LED is superior in pressure resistance to a UV lamp such as a mercury lamp, and the pressure resistant body does not need to be provided with a transparent plate such as quartz glass when the LED is accommodated at the bottom thereof. Manufacturing costs can be reduced.

  Although a transparent plate may be provided, in this case, since the pressure applied to the transparent plate can be received by the pressure body together with the LED, the transparent plate need only be thin and reduce the manufacturing cost of the device. In addition, the flow of fluid in the space formed by the holding member and the pressure body becomes more stable, and the stamper can be pressurized at a more constant pressure.

  Preferred embodiments of the present invention are as follows.

(1) A cooling means is provided on at least one of the pressure-resistant body and the holding member.
Even if the temperature rises, the temperature rise of the stamper can be prevented by the cooling means.
(2) At least one of the pressure body and the holding member is provided with a thermometer, and a control unit that performs temperature control with the thermometer and the cooling means is provided.
The temperature change of the imprint apparatus can be constantly monitored to maintain a constant temperature.
(3) A heat insulating means is provided in the pressure body.
It is possible to prevent heat from diffusing throughout the apparatus.
(4) The stamper is a resin stamper.

  The present invention is particularly suitable for imprinting using a resin stamper that is considered to have a relatively large dimensional change due to heat.

  According to the imprint apparatus according to the present invention, it is possible to prevent a temperature rise of the stamper due to heat and suppress a dimensional change, so that a fine uneven pattern can be precisely formed at a predetermined position on the substrate, Moreover, the manufacturing cost can be reduced by eliminating the need to install a transparent plate. Accordingly, it is possible to provide an imprint apparatus that can be suitably used for applications that require high dimensional accuracy and that has improved productivity.

It is a schematic sectional drawing which shows an example of embodiment of the imprint apparatus which concerns on this invention. It is a schematic sectional drawing of the conventional imprint apparatus.

  Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a schematic sectional view showing an example of an embodiment of an imprint apparatus according to the present invention. The imprint apparatus 10 according to the present invention is mainly composed of a pressure-resistant body 12 in which the LED 16 is accommodated in the bottom and a holding member 14 capable of holding the substrate 52, and is an ultraviolet curable resin supplied in a sheet form on the substrate 52. After the stamper 56 is disposed on the material 54, the back surface (upper surface) of the stamper 56 is pressed by the fluid supplied from the fluid supply pipe 30, and cured by irradiating ultraviolet rays from the LED 16 as it is, thereby forming an uneven pattern on the substrate 52. To do. Hereinafter, each configuration will be described in detail.

  The pressure body 12 is made of a rigid member such as SUS so as to be able to withstand pressurization by a fluid, which will be described later, and has a substantially rectangular parallelepiped shape. A recess 12c is formed in the bottom 12a of the pressure-resistant body 12, and the bottom 12a is set to a height that does not contact the membrane 34 when pressurized. A transparent plate 20 that transmits ultraviolet rays may be provided in the recess 12c. The transparent plate 20 is provided such that the lower surface 20a faces the upper surface (substrate holding surface) 14a of the holding member 14 via a film 34 described later, and the transparent plate 20 has a height that does not contact the film 34 when pressed. Is set to be

  In the recess 12c formed in the bottom 12a of the pressure-resistant body 12, an LED substrate 18 provided with LEDs (light emitting diodes) 16 for ultraviolet irradiation is provided, and the LEDs 16 are arranged to face downward. On the lower surface 18 a of the LED substrate 18, recesses 19 are formed at regular intervals, and the LEDs 16 are provided in the recesses 19. Thus, the LED 16 is configured not to protrude from the LED substrate 18 in cross-sectional view. When the transparent plate 20 is provided as shown in the figure, the region other than the concave portion 19 of the surface 18a is in contact with the upper surface of the transparent plate 20, and thereby receives the pressure applied to the transparent plate 20 together with the pressure body 12. be able to. Therefore, the thickness of the transparent plate 20 to be used may be as thin as 3 to 5 mm, for example, and there is no need to provide a thick transparent plate (quartz glass) as in the prior art. The transparent plate 20 only needs to transmit ultraviolet rays and have a certain degree of rigidity. For example, quartz glass is used. When ultraviolet rays are emitted from the LED 16, the ultraviolet curable resin material 54 is irradiated through the transparent plate 20.

The number of LEDs 16 may be any number as long as the ultraviolet curable resin material 54 can be cured by irradiating ultraviolet rays. For example, at least 9 to 81 LEDs are provided per 10 cm 2 , and the ultraviolet irradiation amount is, for example, 300 mJ / cm 2. That's all you need. The LEDs 16 are arranged at regular intervals so that the ultraviolet curable resin material 54 can be uniformly irradiated with ultraviolet rays. LED16 is LED which can irradiate an ultraviolet-ray, for example, 200-400 nm, Preferably LED which can irradiate a wavelength of 300-400 nm is used.

  The holding member 14 is made of a material having rigidity, such as SUS, and has a substantially rectangular parallelepiped shape. The substrate 52 is held horizontally by the upper surface 14a.

  Inside the pressure body 12 and the holding member 14, a cooling medium pipe 24 is provided as a cooling means through which the cooling medium flows. The cooling medium pipe 24 is provided in the pressure-resistant body 12 in the vicinity of the LED substrate 18 and in the holding member 14 in the vicinity of the substrate holding surface 14a. As the cooling medium, a liquid such as water or oil, or a gas such as air or an inert gas can be used. As a result, even if heat is generated from the LED substrate 18, the dimensional change of the stamper 56 can be reliably prevented.

  The pressure-resistant body 12 and the holding member 14 are provided with thermometers 28 for measuring the internal temperatures thereof. The thermometer 28 is preferably installed on the pressure body 12 so as to measure the temperature in the vicinity of the LED substrate 18, and the holding member 14 measures the temperature in the vicinity of the surface 14 a holding the substrate 52. It is preferable to install. The imprint apparatus 10 according to the present invention is provided with a control unit (not shown) that controls the temperature of the pressure body 12 and the holding member 14 by the cooling unit 24 and the thermometer 28. Accordingly, it is possible to always maintain a constant temperature during operation of the imprint apparatus 10.

  Further, a heat insulating material 26 as a heat insulating means is provided inside the pressure body 12 at a position outside the LED substrate 18. By providing the heat insulating material 26, it is possible to prevent heat from diffusing throughout the apparatus 10. As the heat insulating material 26, for example, a foamed material such as polyurethane or phenol resin, or a fiber-based heat insulating material such as glass wool or rock wool can be used. The heat insulating material may also be provided inside the holding member 14.

  A sealing material 22 such as an O-ring sealing material is provided on the outer periphery of the lower surface 12 a of the pressure body 12. A film 34 having flexibility is attached to the sealing material 22, thereby forming a cavity 36 for supplying a fluid.

  The film 34 needs to be made of a material that transmits ultraviolet rays. For example, the film 34 is made of a film such as polyethylene, polypropylene, polyethylene terephthalate, polycarbonate, PMMA, polycycloolefin, and fluorine resin, and has a thickness of For example, the thickness is set to 50 μm to 5 mm, preferably 100 μm to 3 mm.

  A fluid is supplied to the cavity 36 from a fluid supply / discharge pipe 30 provided in the pressure-resistant body 12, and the inside of the cavity 36 is pressurized. As this fluid, for example, air, nitrogen, carbon dioxide, argon or the like can be used. By pressurizing the inside of the cavity 36 by the fluid, the back surface of the stamper 56 can be pressed with a uniform pressure, and the ultraviolet curable resin material 54 is irradiated with ultraviolet rays in the pressed state.

  Although not shown, vertical movement means for moving up and down at least one of the pressure body 12 and the holding member 14 is provided, and the distance between the pressure body 12 and the holding member 14 is adjusted during pressing.

  In the present embodiment, an example in which the means for applying a pressing force to the stamper 56 is indirectly pressed by a fluid through the film 34 is not limited to this, but is described in Patent Document 1. Further, it may be configured to press directly with a fluid without using a membrane. In this case, a gas such as air or an inert gas is used as the fluid.

  In the present invention, as the stamper 56 for forming a desired pattern on the substrate 52, a conventionally known stamper having ultraviolet transparency can be used. Specifically, for example, quartz glass, resin, or the like can be used. As the resin stamper, a stamper made of a resin having good releasability such as polyethylene, polypropylene, polycycloolefin, fluorine-based resin, and polyvinyl chloride is used. As described above, since the present invention can keep the temperature of the entire imprint apparatus constant, the imprint apparatus according to the present invention is suitable for imprinting using a resin stamper that has a relatively large dimensional change due to heat. Is preferred.

  In the present invention, the ultraviolet curable resin material 54 includes an ultraviolet curable resin and a photopolymerization initiator. Examples of the ultraviolet curable resin include urethane acrylate, polyester acrylate, epoxy acrylate, epoxy resin, imide oligomer, and polyene / thiol oligomer.

  Urethane acrylates include, for example, diisocyanates such as hexamethylene diisocyanate, isophorone diisocyanate, methylene bis (4-cyclohexyl isocyanate), trimethylhexamethylene diisocyanate, tolylene diisocyanate, 4,4-diphenylmethane diisocyanate, xylylene diisocyanate and poly (propylene oxide). Polyols such as diol, poly (propylene oxide) triol, poly (tetramethylene oxide) diol, ethoxylated bisphenol A and 2-hydroxyethyl acrylate 2-hydroxyethyl methacrylate, 2-hydroxypropyl acrylate, glycidol dimethacrylate, pentaerythritol tri Hydroxy acrylates such as acrylates and Obtained by reacting, those having an acryloyl group and a urethane bond as a functional group in the molecule.

  Examples of the polyester acrylate include polyester acrylate composed of phthalic anhydride, propylene oxide and acrylic acid, polyester acrylate composed of adipic acid, 1,6-hexanediol and acrylic acid, trimellitic acid, diethylene glycol and acrylic acid. And polyester acrylate.

  The epoxy acrylate is synthesized by reaction of an epoxy compound such as epichlorohydrin and acrylic acid or methacrylic acid. For example, bisphenol A type epoxy acrylate and bisphenol S synthesized by reaction of bisphenol A, epichlorohydrin and acrylic acid. Bisphenol S-type epoxy acrylate synthesized by reaction of chlorophenol, epichlorohydrin and acrylic acid, bisphenol F-type epoxy acrylate synthesized by reaction of bisphenol F, epichlorohydrin and acrylic acid, synthesis by reaction of phenol novolac, epichlorohydrin and acrylic acid And phenol novolac type epoxy acrylate.

  Examples of the epoxy resin include bisphenol type epoxy resins such as bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol AD type epoxy resin, and bisphenol S type epoxy resin; phenol novolac type epoxy resin, cresol novolak type epoxy resin Examples include novolak-type epoxy resins; aromatic epoxy resins such as trisphenolmethane triglycidyl ether, and hydrogenated products and brominated products thereof.

As the photopolymerization initiator, a radical photopolymerization initiator and a cationic photopolymerization initiator are preferable. As the radical photopolymerization initiator, for example, 4- (2-hydroxyethoxy) phenyl (2-hydroxy-2-propyl) ketone , Α-hydroxy-α-α'-dimethylacetophenone, methoxyacetophenone, acetophenone derivatives such as 2,2-dimethoxy-2-phenylacetophenone; benzoin ether compounds such as benzoin ethyl ether and benzoin propyl ether; benzyldimethyl ketal and the like Ketal derivatives; halogenated ketones, acyl phosphine oxides, acyl phosphonates, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholinopropan-1-one and the like. Examples of the photocationic polymerization initiator include iron-allene complex compounds, aromatic diazonium salts, aromatic iodonium salts, aromatic sulfonium salts, onium salts, pyridinium salts, aluminum complexes / silanol salts, trichloromethyltriazine derivatives, and the like. It is done. Examples of the counter anion of the onium salt or pyridinium salt include SbF 6− , PF 6− , AsF 6− , BF 4− , tetrakis (pentafluoro) borate, trifluoromethane sulfonate, methane sulfonate, trifluoro Examples include acetate, acetate, sulfonate, tosylate, and nitrate.

  The addition amount of the photopolymerization initiator is generally 0.1 to 15 parts by weight, preferably 0.5 to 10 parts by weight with respect to 100 parts by weight of the ultraviolet curable resin.

  Hereinafter, the process of imprinting by the imprint apparatus 10 of the present invention will be described.

  First, the ultraviolet curable resin 54 is applied to the substrate 52 in a sheet form, and then a stamper (template) 56 is disposed on the ultraviolet curable resin 54. At this time, if precise alignment is required, alignment is performed as appropriate.

  Next, after this laminated body is disposed at a predetermined position of the holding member 14, the interval between the pressure-resistant body 12 and the holding member 14 is adjusted by the vertical movement means, and the sealing material 22 is held via the flexible film 22. The member 14 is in close contact with the upper surface (substrate holding surface) 14a. Thereafter, the stamper 56 is pressed against the ultraviolet curable resin material 54 by supplying a fluid from the fluid supply / discharge pipe 30 and pressurizing the inside of the cavity 36 (for example, 1 to 50 bar). In this pressed state, ultraviolet rays are irradiated from the LED 16 to cure the ultraviolet curable resin material 54, and then the pressure body 12 and the holding member 14 are pulled apart. As a result, a fine concavo-convex pattern can be formed on the substrate 52. During this operation, the pressure body 12 and the holding member are provided by the thermometer 28, the cooling medium pipe 24 and the control unit (not shown) described above. It is preferable to perform 14 temperature control. The temperature set by the temperature control is preferably set at a temperature at which the dimensions of the stamper 56 do not change, particularly within the range of ± 5 ° C., preferably ± 1 ° C., particularly preferably ± 0.5 ° C. . Thereby, a dimensional change can be prevented reliably, and a desired concavo-convex pattern can be formed with high accuracy. Here, the set temperature of the stamper refers to a temperature that is set in the production of the stamper and exhibits a desired dimension. For example, when a stamper having a set temperature of 23 ° C. is used, it is preferably 22 to 24 ° C. Performs temperature control so that the temperature becomes 22.5 to 23.5 ° C. The set temperature of the stamper is usually set to a temperature in the range of 1 to 30 ° C., particularly 20 to 25 ° C.

  The present invention is not limited to the configuration of each of the above embodiments, and various modifications are possible within the scope of the gist of the invention.

  By using the imprint apparatus of the present invention, high-quality electronic displays, partitions for information display panels such as electronic paper, electronic devices (lithography, transistors), optical components (microlens arrays, waveguides, optical filters, photonics) Crystals), bio-related materials (DNA chips, microreactors), recording media (patterned media, DVD) and the like can be advantageously obtained.

DESCRIPTION OF SYMBOLS 10 Imprint apparatus 12 Pressure-resistant body 14 Holding member 16 LED
18 LED substrate 20 Transparent plate 22 Sealing material 24 Cooling medium tube 26 Heat insulating material 28 Thermometer 30 Fluid supply / drain tube 34 Film 36 Cavity 52 Substrate 54 UV curable resin material 56 Stamper

Claims (5)

  1. A stamper having a concavo-convex pattern on the surface is disposed on the ultraviolet curable resin material supplied on the substrate so that the surface of the concavo-convex pattern is in close contact, and the back surface of the stamper is pressurized with a fluid to thereby form the stamper. In the imprint apparatus that cures the ultraviolet curable resin material by irradiating the ultraviolet curable resin material with ultraviolet rays in the pressed state, and forms an inverted concavo-convex pattern of the concavo-convex pattern on the surface of the substrate,
    A holding member that holds the substrate, and a pressure body that faces the holding member,
    The pressure-resistant body is provided with an LED for irradiating the ultraviolet curable resin material with ultraviolet light at the bottom thereof, and is arranged so that the bottom of the pressure-resistant body and the holding member are opposed to each other. .
  2.   The imprint apparatus according to claim 1, wherein a cooling unit is provided on at least one of the pressure body and the holding member.
  3. A thermometer is provided on at least one of the pressure body and the holding member,
    The imprint apparatus according to claim 2, further comprising a controller that performs temperature control using the thermometer and the cooling unit.
  4.   The imprint apparatus according to any one of claims 1 to 3, wherein the pressure body is provided with a heat insulating means.
  5.   The imprint apparatus according to claim 1, wherein the stamper is a resin stamper.
JP2011030246A 2011-02-15 2011-02-15 Imprint device Withdrawn JP2012169503A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011030246A JP2012169503A (en) 2011-02-15 2011-02-15 Imprint device

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Application Number Priority Date Filing Date Title
JP2011030246A JP2012169503A (en) 2011-02-15 2011-02-15 Imprint device
PCT/JP2012/053230 WO2012111590A1 (en) 2011-02-15 2012-02-13 Imprinting apparatus
TW101104616A TW201249657A (en) 2011-02-15 2012-02-14 Imprinting apparatus

Publications (1)

Publication Number Publication Date
JP2012169503A true JP2012169503A (en) 2012-09-06

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WO (1) WO2012111590A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018049280A (en) * 2013-12-26 2018-03-29 株式会社ダイセル Method for producing lens

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1594001B1 (en) * 2004-05-07 2015-12-30 Obducat AB Device and method for imprint lithography
JP4418476B2 (en) * 2007-03-20 2010-02-17 株式会社日立ハイテクノロジーズ MICROSTRUCTURE TRANSFER APPARATUS AND MICROSTRUCTURE MANUFACTURING METHOD
US20110014499A1 (en) * 2008-03-07 2011-01-20 Showa Denko K.K. Uv nanoimprint method, resin replica mold and method for producing the same, magnetic recording medium and method for producing the same, and magnetic recording/reproducing apparatus
JP5518538B2 (en) * 2009-03-26 2014-06-11 富士フイルム株式会社 RESIST COMPOSITION, RESIST LAYER, IMPRINT METHOD, PATTERN FORMED BODY, MAGNETIC RECORDING MEDIUM MANUFACTURING METHOD, AND MAGNETIC RECORDING MEDIUM

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018049280A (en) * 2013-12-26 2018-03-29 株式会社ダイセル Method for producing lens

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WO2012111590A1 (en) 2012-08-23
TW201249657A (en) 2012-12-16

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