WO2012086942A3 - 온도분포 측정장치 - Google Patents

온도분포 측정장치 Download PDF

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Publication number
WO2012086942A3
WO2012086942A3 PCT/KR2011/009268 KR2011009268W WO2012086942A3 WO 2012086942 A3 WO2012086942 A3 WO 2012086942A3 KR 2011009268 W KR2011009268 W KR 2011009268W WO 2012086942 A3 WO2012086942 A3 WO 2012086942A3
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WO
WIPO (PCT)
Prior art keywords
temperature distribution
sample
measuring
measuring temperature
measure
Prior art date
Application number
PCT/KR2011/009268
Other languages
English (en)
French (fr)
Other versions
WO2012086942A2 (ko
Inventor
유선영
최해룡
장기수
김건희
양순철
Original Assignee
한국기초과학지원연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 한국기초과학지원연구원 filed Critical 한국기초과학지원연구원
Priority to US13/997,547 priority Critical patent/US9816868B2/en
Publication of WO2012086942A2 publication Critical patent/WO2012086942A2/ko
Publication of WO2012086942A3 publication Critical patent/WO2012086942A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K3/00—Thermometers giving results other than momentary value of temperature
    • G01K3/02—Thermometers giving results other than momentary value of temperature giving means values; giving integrated values
    • G01K3/06—Thermometers giving results other than momentary value of temperature giving means values; giving integrated values in respect of space
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/047—Mobile mounting; Scanning arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0803—Arrangements for time-dependent attenuation of radiation signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0808—Convex mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/12—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance
    • G01K11/125—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using changes in colour, translucency or reflectance using changes in reflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J2005/0077—Imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/48—Thermography; Techniques using wholly visual means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)

Abstract

본 발명은 3차원 구조를 가지는 시료에 대한 온도분포를 비접촉식으로 측정할 수 있는 온도분포 측정장치에 관한 것으로, 보다 상세하게는 색분산 렌즈, 회절분광기, 광검출 어레이를 이용하여 시료의 깊이 방향(Z방향)의 온도분포를 열반사법으로 측정하고, 2축 주사 거울을 이용하여 시료의 평행방향(x-y 축 방향)의 온도분포를 열반사법으로 측정함으로써 시료의 3차원 온도분포를 측정할 수 있도록 한 온도분포 측정장치를 제공한다.
PCT/KR2011/009268 2010-12-22 2011-12-01 온도분포 측정장치 WO2012086942A2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US13/997,547 US9816868B2 (en) 2010-12-22 2011-12-01 Device for measuring temperature distribution

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0132630 2010-12-22
KR1020100132630A KR101350976B1 (ko) 2010-12-22 2010-12-22 온도분포 측정장치

Publications (2)

Publication Number Publication Date
WO2012086942A2 WO2012086942A2 (ko) 2012-06-28
WO2012086942A3 true WO2012086942A3 (ko) 2012-09-07

Family

ID=46314571

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/009268 WO2012086942A2 (ko) 2010-12-22 2011-12-01 온도분포 측정장치

Country Status (3)

Country Link
US (1) US9816868B2 (ko)
KR (1) KR101350976B1 (ko)
WO (1) WO2012086942A2 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101632672B1 (ko) * 2014-06-20 2016-06-23 한국과학기술원 공초점 분광 현미경
KR101555153B1 (ko) * 2014-09-03 2015-10-06 한국기초과학지원연구원 온도 분포 측정 장치 및 방법
US10718670B2 (en) 2015-03-23 2020-07-21 The Trustees Of Princeton University Spherical-motion average radiant temperature sensor
WO2016159683A1 (ko) * 2015-03-31 2016-10-06 (주)아모레퍼시픽 열 차단 효능 평가 방법 및 이를 위한 적외선 조사 장치
CN106092331A (zh) * 2016-06-27 2016-11-09 湖北久之洋红外系统股份有限公司 一种双波段双视场红外光学系统及其成像方法
US10180359B2 (en) * 2017-01-29 2019-01-15 Microsanj, LLC Method and system for calibrating thermal imaging systems
KR101938110B1 (ko) * 2018-06-05 2019-04-11 한국기초과학지원연구원 다중 모드 열영상 측정 장치 및 이의 동작 방법
TWI789666B (zh) * 2020-12-28 2023-01-11 國家中山科學研究院 溫度監控裝置
KR102648173B1 (ko) * 2023-01-20 2024-03-18 신희원 분광 분석 장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06147999A (ja) * 1992-09-21 1994-05-27 Matsushita Electric Ind Co Ltd 温度分布測定装置および測定方法
JP2000171728A (ja) * 1998-12-09 2000-06-23 Olympus Optical Co Ltd 赤外観察用プローブ
JP2006300748A (ja) * 2005-04-21 2006-11-02 Calsonic Kansei Corp 温度分布測定装置
JP2007010424A (ja) * 2005-06-29 2007-01-18 Calsonic Kansei Corp 温度分布測定装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63152535A (ja) * 1986-12-09 1988-06-25 日成通商株式会社 液体容器とその製造方法
US5785651A (en) * 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
KR100388829B1 (ko) * 1996-10-31 2003-08-19 삼성전자주식회사 온도 측정장치
JP4576664B2 (ja) * 2000-03-08 2010-11-10 株式会社ニコン 光路ズレ検知装置、および共焦点顕微鏡
JP2002122480A (ja) 2000-10-12 2002-04-26 Toshiba Corp 温度測定方法および装置、並びにプラズマ処理装置
US8303514B2 (en) 2002-01-25 2012-11-06 Vital Accuracy Partners Means and apparatus for rapid, accurate, non-contacting measurement of the core temperature of animals and humans
GB2409033C (en) * 2003-12-12 2006-05-24 Lein Applied Diagnostics Ltd Extended focal region measuring apparatus and method
US8362431B2 (en) 2005-03-15 2013-01-29 Mount Holyoke College Methods of thermoreflectance thermography
JP4311382B2 (ja) * 2005-07-20 2009-08-12 セイコーエプソン株式会社 プロジェクタ
US7444260B2 (en) * 2006-09-25 2008-10-28 Raad Peter E Thermography measurement system for conducting thermal characterization of integrated circuits
JP5396975B2 (ja) * 2009-04-01 2014-01-22 船井電機株式会社 画像表示装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06147999A (ja) * 1992-09-21 1994-05-27 Matsushita Electric Ind Co Ltd 温度分布測定装置および測定方法
JP2000171728A (ja) * 1998-12-09 2000-06-23 Olympus Optical Co Ltd 赤外観察用プローブ
JP2006300748A (ja) * 2005-04-21 2006-11-02 Calsonic Kansei Corp 温度分布測定装置
JP2007010424A (ja) * 2005-06-29 2007-01-18 Calsonic Kansei Corp 温度分布測定装置

Also Published As

Publication number Publication date
US20130301676A1 (en) 2013-11-14
US9816868B2 (en) 2017-11-14
KR20120071048A (ko) 2012-07-02
KR101350976B1 (ko) 2014-01-14
WO2012086942A2 (ko) 2012-06-28

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