WO2012086508A1

WO2012086508A1 - Discharge lamp

Info

Publication number: WO2012086508A1
Application number: PCT/JP2011/079020
Authority: WO
Inventors: 清水　保雄; 充関野; 芹澤　和泉; 金井　信夫; 壮則早川
Original assignee: 株式会社オーク製作所; 国立大学法人信州大学
Priority date: 2010-12-21
Filing date: 2011-12-15
Publication date: 2012-06-28
Also published as: TWI509655B; JP5754701B2; TW201227798A; JP2012133994A

Abstract

Disclosed is a discharge lamp which is provided with: a pair of electrodes that are arranged so as to face each other in a discharge tube; and a pair of electrode supporting rods that support the electrodes. The discharge lamp is configured such that at least one electrode or one electrode supporting rod comprises a heat transferring body, which is molded from a material that has a higher thermal conductivity than metals and is composed of particulate or fibrous carbon, and the heat transferring body integrally constitutes at least a part of the electrode or electrode supporting rod.

Description

Discharge lamp

The present invention relates to a discharge lamp that can be used as a light source for photolithography, sterilization treatment, and the like, and more particularly, to an electrode structure of a high-power discharge lamp such as a short arc type discharge lamp.

A short arc type discharge lamp or the like can irradiate light with high luminance, and is used as a light source for an exposure apparatus or the like. In order to increase the size of an object to be exposed such as a liquid crystal substrate and to improve the throughput, it is required to increase the output of the discharge lamp, and accordingly, it is required to increase the rated power consumption to the maximum.

¡When the rated power is increased, the amount of current flowing through the lamp increases and the electrode temperature rises. In particular, the tip of the anode becomes hot, and the tip melts and evaporates over time. As a result, the luminous efficiency is lowered due to unstable arc discharge and metal inner surface adhesion, and the lamp life is reduced due to electrode consumption.

In order to prevent such electrode melting due to overheating, for example, the surface of the electrode is radiated in a fin shape, or the surface of the tungsten electrode is carbonized to form a heat dissipation layer to prevent electrode evaporation (for example, 2003-249191).

On the other hand, the electrode surface treatment is not performed, and heating of the electrode can be prevented by enclosing a metal material having a higher thermal conductivity and a lower melting point than the metal electrode body in the interior space of the body (see Japanese Patent No. 3994880). ). Due to the thermal conductivity of the metal material and heat convection in the electrode internal space caused by melting, the heat at the electrode tip is transported to the electrode support rod side, and the temperature of the entire electrode is made uniform.

In addition, in order to release the heat at the electrode tip from the side surface of the electrode, a hollow ceramic sleeve can be arranged around the electrode body, and the temperature rise of the electrode is suppressed by ceramics having high thermal conductivity (Japanese Patent Laid-Open No. 2008-2008). -Ref. 186790).

Even if the electrode surface is carbonized, the thermal conductivity inside the electrode is not improved, and the electrode tip is overheated. In addition, when the ceramic material is configured as a heat transfer body, an increase in the amount of current flowing between the electrodes is affected due to the insulating properties of the ceramic, and the electrode structure is limited. On the other hand, even if a metal material with a high thermal conductivity and a low melting point is enclosed inside the electrode, the metal thermal conductivity is limited to its intrinsic value, so higher power and higher current will be achieved in the future. Then, overheating and melting of the electrode tip cannot be reliably suppressed.

The present invention is directed to effectively suppressing an increase in electrode temperature in a high output discharge lamp.

The discharge lamp of the present invention includes a pair of electrodes disposed opposite to each other in a discharge tube and a pair of electrode support rods that support the electrodes, and at least one of the electrodes or the electrode support rods has a higher thermal conductivity than the metal. And a heat transfer body formed of a material made of carbon in a particulate or fibrous form. And a heat transfer body comprises at least one part of an electrode or an electrode support bar by the integral structure, It is characterized by the above-mentioned.

Here, the heat transfer body represents a structure in which carbon is entirely contained and an integral structure is formed. A carbon fiber bundle can be used as a heat transfer body made of carbon fiber or a particulate carbon base material. For example, a carbon fiber bundle can be formed by bundling carbon fiber on a cylindrical metal member such as tantalum. It can be configured as a heat transfer body. It is also possible to mold using powdered carbon as a carbon substrate. On the other hand, as the heat transfer body, it is possible to constitute a heat transfer body having only a carbon (graphite) crystal structure, or a metal / carbon composite material added with a metal such as a C / C composite or tungsten is also applicable. Is possible. For example, the heat transfer body may be formed by mixing with a metal such as powdered tungsten. Furthermore, carbon nanofibers such as carbon nanotubes may be included in the heat transfer body.

Since the heat transfer body has a carbon-based structure, the heat conductivity is superior to that of metal, and the melting point is similar to or higher than that of metal. Therefore, during discharge, the heat at the electrode tip is efficiently transported by the heat transfer body, and the temperature of the entire electrode is made uniform. Since heat can diffuse from the electrode body through the support rod, this reduces the temperature of the electrode, suppresses its consumption, and extends the lamp life. In addition, since the heat transfer body is conductive and has a stable strength against heat and external force, it is possible to suppress an increase in temperature even if various electrode structures are employed.

The temperature at the tip of the anode is most likely to rise during discharge due to electron collision. In order to effectively transport the heat at the tip of the electrode to the electrode support rod side, it is desirable to configure the heat transfer body so as to extend in the electrode axial direction at least inside the electrode (as the electrode itself or as the electrode support rod).

The electrode structure provided with the heat transfer body can be configured in various modes, and the heat transfer body may be provided as a part of the electrode, or the entire electrode may be configured as the heat transfer body. In the case where a heat transfer body is provided as a part of the electrode, it can be applied to any electrode structure portion such as an electrode tip portion, an electrode inside, or an electrode side surface portion. Furthermore, instead of the electrode, an electrode support rod may be configured as a heat transfer body.

When carbon is released into the discharge tube, carbon adheres to the inner surface of the discharge tube, and a carbon thin film is formed on the inner surface of the tube, thereby reducing the luminous efficiency. Therefore, it is desirable that the tip portion of the electrode that rises in temperature is made of a metal such as tungsten.

Furthermore, in order to prevent carbon emission from the electrode side surface, as an electrode configuration including a metal electrode tip and a heat transfer body, an electrode body in which an internal space is formed along the electrode axial direction is configured, and the heat transfer body is It is desirable to accommodate in the internal space. For example, when a heat transfer body is constituted by a carbon fiber bundle inserted through a cylindrical member, the heat transfer body is provided in the internal space with the carbon fiber bundle protruding from the cylindrical member along the electrode axis direction. Is good.

In short arc type discharge lamps, etc., the lamp is installed in the vertical direction, and the electrode support rod supports the electrode. In view of securely holding the electrode, it is desirable to provide an electrode lid that is joined to the electrode support rod and the electrode body and seals the internal space. In order to ensure the connection between the electrode lid, the electrode main body, and the electrode support rod, it is preferable to adjust the size of the heat transfer body to the internal space size and pack it in the internal space without a gap.

In order to transport heat by convection, it is preferable to enclose the heat transfer material in the internal space so as to provide a gap, and to enclose a heat conductive material having a melting point lower than that of the electrode body in the internal space. During discharge, heat convection occurs in the internal space due to melting of the heat conductive material, and heat is transported to the electrode support bar side. Further, in order to effectively transport the heat of the thermally conductive material to be melted, it is desirable that the heat transfer body is joined to the electrode lid and extends so as to contact the thermally conductive material during lighting. In particular, the heat transfer body may be configured as a cylindrical portion of an electrode body that forms an internal space in order to release heat carried by thermal convection from the side surface of the electrode.

Since the thermal expansion coefficient of the heat transfer body and the electrode lid are different, cracks are likely to occur from the joints during lighting. In order to ensure the integral connection between the heat transfer body and the electrode lid, it is preferable to provide an inclined structure at the joint between the heat transfer body and the electrode lid. Here, the “gradient structure” refers to a structure in which the composition component and structure of the internal structure change continuously / stepwise at and near the joint, and the material functions such as temperature change are continuously / It changes step by step.

On the other hand, a recess may be formed in the electrode body so that the inner space is opened to the electrode support rod side without providing an electrode lid. In this case, what is necessary is just to comprise so that an electrode support rod may join with a heat exchanger.

Alternatively, in order to securely hold the electrode, it is preferable that the electrode support rod extends to the bottom surface of the internal space to hold the electrode tip. At this time, you may comprise a heat exchanger as a cylindrical part of the electrode main body which forms internal space. In addition, in order to release the heat at the electrode tip to the electrode support rod side, the heat transfer body is formed in a cylindrical shape, and is arranged coaxially with a gap from the electrode support rod so that the bottom surface of the internal space is connected to the outside. It is good.

It is also possible to configure so that no internal space is provided in the electrode, and the electrode body part excluding the electrode tip part may be formed by joining the electrode support bar and the electrode wire tab. In this case, it is preferable to provide an inclined structure at the joint between the heat transfer body and the electrode tip to strengthen the integral structure.

In addition, as a structure in which the internal space is not provided inside the electrode, the electrode is provided with a shaft portion extending from the electrode tip portion along the electrode axial direction and coupled to the electrode support rod, and the cylindrical heat transfer body is arranged around the shaft portion. It is better to arrange them coaxially.

On the other hand, when an electrode support rod is used instead of the electrode as a heat transfer body, the heat at the electrode tip is transferred to the sealed tube side through the electrode support rod. Usually, the temperature of the sealing tube is adjusted by cooling air, water cooling, etc., and the temperature can be effectively adjusted by transporting the heat of the electrode to the sealing tube side. In order to release the heat at the tip of the electrode to the outside, it is desirable to form an internal space opened on the electrode support bar side, and the electrode support bar extends to the bottom surface of the internal space and is joined to the electrode body. For example, it is preferable to provide an electrode lid that is joined to the electrode main body and in which a hole for communicating the internal space and the electrode exterior is formed.

It is a schematic plan view of the short arc type discharge lamp which is 1st Embodiment. It is typical sectional drawing of the anode which is 1st Embodiment. It is anode sectional drawing of the short arc type discharge lamp which is 2nd Embodiment. It is an anode sectional view of the short arc type discharge lamp which is a 3rd embodiment. It is an anode sectional view of the short arc type discharge lamp which is a 4th embodiment. It is anode sectional drawing of the short arc type discharge lamp which is 5th Embodiment. It is an anode sectional view of the short arc type discharge lamp which is a 6th embodiment. It is an anode sectional view of the short arc type discharge lamp which is a 7th embodiment. It is anode sectional drawing of the short arc type discharge lamp which is 8th Embodiment. It is anode sectional drawing of the short arc type discharge lamp which is 9th Embodiment. It is an anode sectional view of the short arc type discharge lamp which is a 10th embodiment. It is an anode sectional view of the short arc type discharge lamp which is an 11th embodiment. It is anode sectional drawing of the short arc type discharge lamp which is 12th Embodiment. It is anode sectional drawing of the short arc type discharge lamp which is 13th Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic plan view of a short arc type discharge lamp according to a first embodiment.

The short arc type discharge lamp 10 includes an arc tube 12 made of transparent quartz glass, and a cathode 20 and an anode 30 are arranged in the arc tube 12 to face each other with a predetermined interval. On both sides of the arc tube 12, quartz glass sealing tubes 13 A and 13 B are connected to the arc tube 12 and are integrally formed. Here, the short arc type discharge lamp 10 is arranged so that the electrode axis is along the vertical direction.

Inside the sealing

tubes

13A and 13B, conductive

electrode support rods

17A and 17B for supporting the cathode 20 and the anode 30 are disposed, and the

conductive lead rods

15A and 15B are interposed through the metal foils 16A and 16B, respectively. Connected with. Both ends of the sealing

tubes

13A and 13B are closed by the

caps

19A and 19B, and the

sealing tubes

13A and 13B are welded to a glass tube and a glass rod (not shown) provided in the discharge tube. Thus, the discharge space in the arc tube 12 is sealed. A discharge gas such as mercury and argon gas is enclosed in the arc tube 12.

The

lead rods

15A and 15B are connected to an external power source (not shown), and power is supplied to the cathode 20 and the anode 30 via the

lead rods

15A and 15B. When a voltage is applied between the cathode 20 and the anode 30, arc discharge occurs between the electrodes, and light is emitted from the arc tube 12.

FIG. 2 is a schematic cross-sectional view of the anode 30.

The anode 30 includes a bottomed cylindrical anode main body (hereinafter referred to as an electrode main body) 42 including an electrode tip portion 43, and the heat transfer body 40 is accommodated in a cylindrical internal space 42 S formed in the electrode main body 42. . The internal space 42S is formed in a cylindrical portion 44 extending from the electrode tip portion 43 to the electrode support rod side, and the heat transfer body 40 is filled in the internal space 42S without a gap. The size of the heat transfer body 40 is determined according to the space of the internal space 42S.

The ring-shaped electrode lid 46 is coupled with the cylindrical portion 44 of the electrode body 42 to seal the heat transfer body 40. The electrode support rod 17 B is connected to the electrode lid 46 and holds the anode 30 through the electrode lid 46.

The electrode body 42, the electrode lid 46, and the electrode support rod 17B are made of tungsten. On the other hand, the heat transfer body 40 extending along the electrode axis E inside the anode 30 has a conductive tungsten / carbon composite material (hereinafter referred to as a W / C composite) having a higher thermal conductivity than the metal constituting the electrode body. Material). The W / C composite material is a material in which a carbon substrate such as a C / C composite is coated with tungsten, or powdered carbon is mixed with powdered tungsten to be integrally formed. The heat transfer body 40 has a higher thermal conductivity than tungsten constituting the electrode body 42 at room temperature or a temperature atmosphere during discharge, and has a higher strength against heat and external impacts. Furthermore, the melting point of the heat transfer body 40 is high, and melting due to heat during discharge does not substantially occur.

As a method for forming the anode 30, a heat transfer body 40 suitable for the size of the internal space 42S is enclosed in an electrode body 42 in which the internal space 42S is formed in advance. Then, a separately prepared electrode lid 46 is joined to and integrated with the cylindrical portion 44 of the electrode body 42. As an integration method, welding such as fusion welding or brazing is possible.

The heat transfer body 40 is in contact with the bottom surface 42T of the internal space 42S, that is, the electrode tip portion 43. Therefore, the heat generated by the electron collision received by the electrode tip surface 43S during the discharge is transported to the electrode support rod side by the heat transfer body 40 having excellent thermal conductivity. Thereby, the temperature of the anode 30 is made uniform as a whole without the electrode tip 43 being locally overheated.

As described above, according to the first embodiment, in the short arc type discharge lamp 10 in which the cathode 20 and the anode 30 are disposed opposite to each other in the arc tube 12, the internal space 42 S is formed in the electrode body including the electrode tip 43. . A heat transfer body 40 made of a W / C (tungsten / carbon) composite material is sealed in the internal space 42S of the anode 30, and is sealed by an electrode support rod 17B and an electrode lid 46 coupled to the electrode body 42. The

By providing the heat transfer body 40 inside the anode 30, the temperature of the entire anode is made uniform, so that it is prevented from devitrifying due to melting and evaporation of the electrode tip portion 43, thereby reducing the light emission efficiency, and suppressing electrode consumption. it can. Further, since the heat transfer body 40 has conductivity, even if the power increases and the amount of current increases, it does not affect the discharge.

Since the electrode lid 46, the electrode body 42, and the electrode support bar 17B having the same thermal conductivity are integrally metal-bonded, the bondability is excellent, and the electrode support bar 17B can reliably hold the anode 30. In addition, since the heat transfer body 40 is not exposed on the electrode surface, carbon is released into the arc tube 12 during discharge, and a carbon thin film is formed in the tube without reducing the luminous efficiency. Further, by forming the internal space 42S in the anode 30, the weight of the electrode can be reduced. The heat transfer body 40 may be coupled to the electrode body 42 by welding or the like. Further, the size of the heat transfer body 40 may be adjusted, and a clearance may be provided to enclose the heat transfer body 40 in the internal space 42S.

Next, a second embodiment will be described with reference to FIG. In the second embodiment, unlike the first embodiment, a gap is provided in the electrode internal space, and a heat conductive material that melts during discharge is enclosed. About another structure, it is substantially the same as 1st Embodiment.

FIG. 3 is an anode cross-sectional view of a short arc type discharge lamp according to the second embodiment.

The anode 130 has an internal space 142S as in the first embodiment, and the electrode body 142 including the electrode tip 143, the electrode lid 146, and the electrode support rod 17B are integrally coupled. The columnar heat transfer body 140 is smaller than the diameter of the internal space 142S and extends along the electrode axis direction. One end 140A of the heat transfer body 140 is coupled to the electrode lid 146, while the other end 140B is not in contact with the bottom surface 142T of the internal space 142S, that is, the electrode tip 143.

For joining the electrode lid 146 and the heat transfer body 140, the electrode lid 146 and the heat transfer body 140, which are separately formed by sintering, are prepared, and conventionally known such as laser welding, brazing, resistance welding, welding such as press fitting, or screwing. It may be combined by the method of.

In the internal space 142S, a heat conduction material 150 is sealed with a gap, and melts and contacts the heat transfer body 140 during discharge. The heat conductive material 150 is made of a metal material having a melting point lower than that of the electrode body 142 (for example, gold, silver, copper, indium, zinc, lead, or an alloy obtained by combining them).

At the time of lamp forming, a hole that fits the rod-shaped heat transfer body 140 into the lump of the heat conductor 150 is formed and sealed in the internal space 142S. When the temperature of the electrode tip 143 is increased by the discharge, the heat conductor 150 is melted and the liquid heat conductor is in contact with the heat transfer body 140.

During the discharge, the heat conductive material 150 is melted to cause convection in the gap portion of the internal space 142S. Thereby, heat generated in the electrode tip portion 143 including the electrode tip surface 143S is transported in the direction of the electrode support rod 17, and the temperature of the anode 130 is made uniform.

Furthermore, since the heat transfer body 140 is in contact with the heat conductive material 150 during discharge, the heat of the molten heat conductive material 150 can be efficiently transported to the electrode support rod side. In addition, in order to strengthen the coupling between the heat transfer body 140 and the electrode lid 146, the electrode lid 146 may be made of molybdenum instead of tungsten. Further, instead of the electrode lid, the inner surface of the cylindrical portion 144 and the heat transfer body 140 may be combined.

Next, a short arc type discharge lamp according to a third embodiment will be described with reference to FIG. In the third embodiment, unlike the first embodiment, no electrode lid is provided. Other configurations are substantially the same as those in the first embodiment.

FIG. 4 is an anode cross-sectional view of a short arc type discharge lamp according to a third embodiment.

The anode 230 includes an electrode main body 242 composed of an electrode front end portion 243 including the electrode front end surface 243S and a cylindrical portion 244, and the heat transfer body 240 has no gap in the internal space 242S formed in the electrode main body 242. Embedded. As shown in FIG. 4, the surface 240S of the heat transfer body 240 is exposed to the outside of the electrode, and the internal space 242S is not sealed. The heat transfer body 240 is coupled to the tip portion 17S of the electrode support rod 17B by press fitting, welding, or the like.

Since the heat transfer body 240 is exposed outside the electrode, the heat transported from the electrode tip 243 can be easily released to the outside, and the temperature rise of the anode 243 can be suppressed. Moreover, since the electrode lid is not provided, the electrode can be reduced in weight.

Next, a short arc type discharge lamp according to a fourth embodiment will be described with reference to FIG. In the fourth embodiment, unlike the first to third embodiments, the entire electrode is constituted by a heat transfer body.

FIG. 5 is an anode sectional view of a short arc type discharge lamp according to the fourth embodiment.

The anode 330 is entirely constituted by the heat conductor 340 and is joined to the electrode support rod 17B. The electrode body 342 is produced by mixing and sintering tungsten and powdered carbon. The electrode body 342 and the electrode support rod 17B are joined by welding, press-fitting, or the like. Since the anode 330 as a whole is composed of a heat conductor, the heat transport effect during discharge is sufficiently exerted, and electrode consumption can be suppressed.

Next, a short arc type discharge lamp according to a fifth embodiment will be described with reference to FIG. In the fifth embodiment, unlike the fourth embodiment, the electrode tip is made of metal. About another structure, it is substantially the same as 4th Embodiment.

FIG. 6 is an anode cross-sectional view of a short arc type discharge lamp according to a fifth embodiment.

The anode 430 is constituted by a heat transfer body 440 and an electrode tip 443 constituting the electrode body, and is integrated. The heat transfer body 440 and the electrode tip 443 are separately sintered and formed in advance, and are integrated by a conventionally known welding method such as brazing, press fitting, beam welding, or screwing. Or after shaping | molding the electrode front-end | tip part 443, you may integrate by the cast hole (it puts in a casting and welds it) etc. which cover the heat-transfer body 440 with the electrode front-end | tip part 443.

Since the tip portion of the electrode where the temperature rises abruptly is made of metal, not a heat transfer body containing carbon, carbon is not released into the discharge space during discharge, and the electrode life can be extended.

Next, a short arc type discharge lamp according to a sixth embodiment will be described with reference to FIG. In the sixth embodiment, unlike the fifth embodiment, there is an inclined structure in the connection portion between the electrode tip and the heat transfer body. About another structure, it is substantially the same as 5th Embodiment.

FIG. 7 is an anode cross-sectional view of a short arc type discharge lamp according to a sixth embodiment.

The anode 530 is a tungsten / carbon composite material, and has a heat transfer body 540 constituting an electrode body and an electrode tip portion 543 made of tungsten, and an inclined tissue portion 545 is formed therebetween. The inclined structure portion 545 is a structure layer in which tungsten / carbon is formed into an inclined structure. The uppermost layer 545S has a tungsten content of almost 100%, and the lowermost layer 545T has a carbon content of almost 100%. To the lowermost layer 545T, the contents of tungsten and carbon are almost inversely proportional to each other. The higher the carbon content, the lower the tungsten content.

Here, the term “gradient” refers to an integrated material that changes continuously or stepwise from one function / characteristic to another function / characteristic (for example, “Technological development of functionally graded materials” (Kamimura). Seiichi et al., Edited by CMC Publishing, published on October 31, 2003)), and the sintered body of the present invention has a continuous or stepwise density gradient, and characteristics (supply characteristics, strength, etc. of electron-emitting materials) ) Changes continuously / stepwise.

The inclined structure portion 545 may be formed by a known heat sintering method, and is stacked and filled while changing the mixing ratio of tungsten and carbon powders, and the tungsten / carbon compact formed by molding is slowly heated. And sinter. And the inclination structure | tissue part 545, the heat exchanger 540, and the electrode front-end | tip part 543 are integrally molded.

In this manner, by forming the inclined structure portion 545 in which the mixed layer of tungsten particles and carbon particles is laminated, even if the material components of the electrode tip portion 543 and the heat transfer body 540 are different, it is surely integrally formed. The strength against heat and external force is further increased.

In the first and second embodiments, an inclined structure may be formed at the joint portion of the heat transfer body with the electrode lid. Furthermore, in the first to sixth embodiments, an inclined structure may be formed at a joint portion with a metal such as an electrode body.

Next, a short arc type discharge lamp according to a seventh embodiment will be described with reference to FIG. In the seventh embodiment, unlike the sixth embodiment, an electrode shaft portion is provided, and the electrode tip portion and the electrode support rod are connected by metal. About another structure, it is substantially the same as 6th Embodiment.

FIG. 8 is a cross-sectional view of the anode of the short arc type discharge lamp according to the seventh embodiment.

The anode 630 includes an electrode main body 642 including a columnar electrode shaft portion 636 extending along the electrode axis direction and an electrode tip portion 643, and a cylindrical heat transfer body 640 is coaxially disposed around the electrode shaft portion 636. And the electrode tip 643. The electrode support rod 17 B is coupled to the end of the electrode shaft portion 636.

Since the same metal electrode body 642 and the electrode support bar 17B are connected, the electrode support bar 17B can reliably hold the anode 630.

Next, a short arc type discharge lamp according to an eighth embodiment will be described with reference to FIG. In the eighth embodiment, unlike the seventh embodiment, the electrode support rod is coupled to the electrode tip. About another structure, it is the same as 7th Embodiment.

FIG. 9 is an anode cross-sectional view of a short arc type discharge lamp according to the eighth embodiment.

The anode 730 includes a cylindrical heat transfer body 740 and an electrode tip 743, and the heat transfer body 740 forms an anode body. The electrode support rod 17 B extends in the electrode axial direction through the hole 740 N of the heat transfer body 740 and is coupled to the electrode tip portion 743. A gap is provided between the electrode support rod 17B and the heat transfer body 740, and the bottom surface 740T of the hole 740N is exposed to the outside.

The hole 740N of the heat transfer body 740 is configured as an internal space of the electrode body, and the heat of the electrode tip 743 is released to the outside through the heat transfer body 740 and the hole 740N. Heat can be effectively transported using both the heat transfer body 740 and the internal space, and electrode consumption can be suppressed. Further, since the electrode support rod 17B is directly joined to the electrode tip 743, the anode 730 is stably held.

Next, a short arc type discharge lamp according to a ninth embodiment will be described with reference to FIG. In the ninth embodiment, unlike the eighth embodiment, the electrode body surrounds the heat transfer body. About another structure, it is substantially the same as 8th Embodiment.

FIG. 10 is an anode cross-sectional view of a short arc type discharge lamp according to the ninth embodiment.

As shown in FIG. 10, the anode 830 includes an electrode main body 842 in which an internal space 842S is formed as in the first embodiment, and a cylindrical heat transfer body 840 is inserted and arranged in the internal space 842S. Yes. The outer diameter size of the heat transfer body 840 is matched to the size of the internal space 842S. The electrode support rod 17 B passes through the inside of the heat transfer body 840, and the tip portion thereof is coupled to the electrode tip portion 843. Since the heat transfer body 840 is not exposed on the side surface of the electrode, it is possible to prevent a decrease in luminous efficiency due to carbon emission.

Next, a short arc type discharge lamp according to a tenth embodiment will be described with reference to FIG. In the tenth embodiment, unlike the first to ninth embodiments, the electrode support rod is constituted by a heat transfer body.

FIG. 11 is an anode cross-sectional view of a short arc type discharge lamp according to the tenth embodiment.

The anode 930 is constituted by a cylindrical electrode body 942 made of metal such as tungsten, and a hole 942N is formed along the central axis. The electrode support rod 170B is configured by a heat transfer body made of a tungsten / carbon composite material. The electrode support rod 170B is inserted and fixed in the hole 942N of the electrode body 942, and extends to the vicinity of the electrode tip of the electrode body 942. The electrode support bar 170B is coupled to the electrode body 942 by sintering or the like.

Thus, since the electrode support rod 170B is composed of a heat transfer material having excellent heat conductivity, the heat of the electrode tip 943 is transferred to the sealed tube side through the electrode support rod 170B. Rather than trying to make the heat uniform inside the electrode, heat is released to the normally cooled sealing tube, so that overheating of the electrode tip and the entire electrode can be suppressed. Moreover, the heat | fever is also effectively released from the electrode support rod, so that the temperature rise of the sealing tube can be suppressed.

Next, a short arc type discharge lamp according to an eleventh embodiment will be described with reference to FIG. In the eleventh embodiment, unlike the tenth embodiment, an internal space is formed in the electrode body and an electrode lid is provided. About another structure, it is substantially the same as 10th Embodiment.

FIG. 12 is an anode cross-sectional view of a short arc type discharge lamp according to the eleventh embodiment.

The anode 1030 has a configuration in which an electrode support rod 170B is coupled to the electrode body 1042 in which the internal space 1042S is formed, and the internal space 1042S is closed by the electrode lid 1046. The electrode lid 1046 is formed with a vent hole 1046N along with a center hole 1046K through which the electrode support rod 170B is inserted. As a result, heat in the internal space 1042S is released to the outside of the electrode.

Next, a short arc type discharge lamp according to a twelfth embodiment will be described with reference to FIG. In the twelfth embodiment, unlike the second embodiment, a part of the electrode body is constituted by a heat transfer body. About another structure, it is substantially the same as 2nd Embodiment.

FIG. 13 is an anode cross-sectional view of a short arc type discharge lamp according to the twelfth embodiment.

The anode 1130 includes an electrode body 1142 including a metal electrode tip 1143 and a bottomed cylindrical heat transfer body 1144, and an internal space 1142 S is formed in the electrode body 1142. The electrode support rod 17B is coupled to an electrode lid 1146 that seals the internal space 1142S.

In the internal space 1142S, a rod-shaped heat transfer body 1140 extends along the electrode axis E and is coupled to the electrode lid 1146. A heat conductive material 1150 having a melting point lower than that of metal is enclosed in the internal space 1142S.

Next, a short arc type discharge lamp according to a thirteenth embodiment will be described with reference to FIG. FIG. 14 is a schematic cross-sectional view of an anode 1230 of a short arc type discharge lamp according to the thirteenth embodiment.

The anode 1230 has a heat transfer body 1240 accommodated in a cylindrical inner space 1242S formed in a bottomed cylindrical electrode body 1242. The internal space 1242S is formed in a cylindrical portion 1244 extending from the electrode tip portion 1243 toward the electrode support rod 17B, and a heat transfer body 1240 surrounded by a cylindrical constricting member 1245 is disposed in the internal space 1242S. The sizes of the heat transfer body 1240 and the constricting member 1245 are determined in accordance with the space of the internal space 1242S.

The ring-shaped electrode lid 1246 is coupled to the cylindrical portion 1244 of the electrode main body 1242 to seal the heat transfer body 1240 and the constricting member 1245. The electrode support rod 17 B is connected to the electrode lid 1246 and holds the electrode 1230 via the electrode lid 1246.

The electrode body 1242, the electrode lid 1246, and the electrode support rod 17B are made of tungsten. On the other hand, the heat transfer body 1240 extending along the electrode axis E inside the anode 1230 is composed of a carbon fiber bundle and is accommodated in a constricting member 1245 made of tantalum.

The heat transfer body 1240 is manufactured as follows. First, the carbon fiber bundle is inserted through the tantalum cylinder along the coaxial direction. At this time, the tantalum cylinder is made shorter than the axial length of the carbon fiber bundle so that the end face of the carbon fiber bundle protrudes beyond the end face of the tantalum cylinder. Further, the end surface of the carbon fiber bundle is a plane perpendicular to the axial direction.

As a method for forming the anode 1230, a heat transfer body 1240 suitable for the size of the internal space 1242S is enclosed in an electrode body 1242 in which the internal space 1242S is formed in advance. Furthermore, the heat transfer body 1240 may be fitted with the internal space being tapered. Alternatively, the outer peripheral surface of the tantalum cylinder may be cut with high accuracy to enhance the adhesion between the outer peripheral surface of the heat transfer body and the inner peripheral surface of the internal space 1242S. Then, a separately prepared electrode lid 1246 is joined to and integrated with the cylindrical portion 44 of the electrode main body 1242. As an integration method, welding such as fusion welding or brazing is possible.

The heat transfer body 1240 is in contact with the bottom surface 1242T of the internal space 1242S, that is, the electrode tip 1243. Therefore, the heat generated by the electron collision received by the electrode tip surface 1243S during discharge is transported to the electrode support rod side by the heat transfer body 1240 having excellent thermal conductivity. Thereby, the temperature of the anode 1230 is made uniform as a whole without locally heating the electrode tip 1243. Preferably, heat transfer body 1240 is pressed against bottom surface 1242T of internal space 1242S. Here, the tantalum cylinder is cut shorter than the axial length of the carbon fiber bundle, so that the carbon fiber is wider than the inner diameter of the tantalum cylinder, so that the adhesion between the carbon fiber and the bottom surface of the internal space (number of contacts) Can be increased. Furthermore, in order to increase the thermal conductivity between the bottom surface 1242T of the internal space and the end surface of the heat transfer body, a carbon nanotube (hereinafter referred to as CNT) is mixed into the bottom surface 1242T of the internal space to provide a bridge effect. You can also

Thus, according to the thirteenth embodiment, in the short arc type discharge lamp 10 in which the cathode and the anode 1230 are disposed to face each other in the arc tube, the internal space 1242S is formed in the electrode body including the electrode tip 1243. A heat transfer body 1240 made of a carbon fiber bundle and a constricting member 1245 are enclosed in the internal space 1242S of the anode 1230, and is sealed by an electrode lid 1246 coupled to the electrode support rod 17B and the electrode body 1242.

By providing the heat transfer body 1240 inside the anode 1230, the temperature of the whole anode is made uniform, so that it is prevented from devitrifying due to melting and evaporation of the electrode tip portion 1243, thereby reducing the light emission efficiency and suppressing electrode consumption. it can. Further, since the heat transfer body 1240 has suitable conductivity, even if the input power increases and the amount of current increases, it does not affect the discharge.

Since the electrode lid 1246, the electrode main body 1242, and the electrode support bar 17B having the same thermal conductivity are integrally metal-bonded, the bondability is excellent, and the electrode support bar 17B can reliably hold the anode 1230. In addition, since the heat transfer body 1240 is not exposed on the electrode surface, carbon is discharged into the arc tube during discharge, and a carbon thin film is formed in the tube without reducing the luminous efficiency. Further, by forming the internal space 1242S in the anode 1230, the weight of the electrode can be reduced. Further, the outer diameter of the constricting member 1245 may be adjusted, and a gap may be provided to enclose the heat transfer body 1240 in the internal space 1242S. Furthermore, it is more preferable to increase the thermal conductivity by mixing CNTs into the gap. Tantalum is used as the constriction member, but in addition, a member of a refractory metal having high ductility (for example, Nb) can be used.

The method for bonding the metal and the heat transfer body may be performed by a method other than the above-described method. A heat transfer body may be provided on both the electrode support rod and the electrode, and the internal structure similar to that of the anode may be employed for the cathode. Furthermore, the present invention may be applied to other types of discharge lamps than the short arc type.

The W / C composite material constituting the heat transfer body may be produced by adding tungsten to a carbon base material other than carbon fiber. Further, the components constituting the heat transfer body are not limited to the W / C composite material, and are a metal / carbon (graphite) composite material added with a metal other than tungsten, or a metal / carbon nanotube (CNT) composite material. Also good. Furthermore, you may shape | mold a heat exchanger by using carbon fiber or particulate carbon as a raw material, without adding a metal.

In addition, Japanese Patent Application No. The disclosure, including the specification, drawings and claims of 2010-284877 (filed Dec. 21, 2010) is hereby incorporated by reference.

-Various changes, substitutions, and alternatives are possible with respect to the present invention without departing from the spirit and scope of the present invention as defined by the appended claims. Furthermore, the present invention is not intended to be limited to the specific embodiments of the processes, apparatus, manufacture, components, means, methods, and steps described in the specification. Those skilled in the art will appreciate from the disclosure of the present invention devices, means, and methods that perform substantially the same functions as those provided by the embodiments described herein, or that provide substantially the same operations and effects. You will recognize it. Accordingly, the appended claims are intended to be included within the scope of such devices, means, or methods.

DESCRIPTION OF SYMBOLS 10 Short arc type discharge lamp 12 Arc tube 17B Electrode support rod 20 Cathode 30 Anode 40 Heat transfer body 42 Electrode main body 42S Internal space 43 Electrode tip part 44 Cylindrical part 46 Electrode cover

Claims

A pair of electrodes arranged oppositely in the discharge tube;
A pair of electrode support rods for supporting the electrodes;
At least one of the electrodes or the electrode support rod has a heat transfer body that has a higher thermal conductivity than the metal and is formed of a material made of particulate or fibrous carbon,
The discharge lamp according to claim 1, wherein the heat transfer body forms at least a part of the electrode or the electrode support rod in an integral structure.
The discharge lamp according to claim 1, wherein the heat transfer body extends in the electrode axial direction at least inside the electrode.
The electrode has a metal electrode tip;
The discharge lamp according to claim 2, wherein the heat transfer body constitutes a part of the electrode.
The electrode has an electrode body in which an internal space is formed along the electrode axis direction,
The discharge lamp according to claim 3, wherein the heat transfer body is accommodated in the internal space.
The discharge lamp according to claim 4, wherein the electrode has an electrode lid that joins the electrode support rod and the electrode main body and seals the internal space.
The discharge lamp according to claim 5, wherein the heat transfer body is packed in the internal space without a gap.
The heat transfer body is accommodated in the internal space with a gap;
The discharge lamp according to claim 5, wherein a heat conductive material having a melting point lower than that of the electrode body is enclosed in the internal space.
The discharge lamp according to claim 7, wherein the heat transfer body is bonded to the electrode lid and extends so as to contact the heat conductive material during lighting.
The discharge lamp according to claim 8, wherein the heat transfer body further constitutes a cylindrical portion of the electrode body forming the internal space.
The discharge lamp according to any one of claims 8 to 9, wherein the heat transfer body has an inclined structure at a joint portion with the electrode lid.
The discharge lamp according to claim 4, wherein the electrode support rod is joined to the heat transfer body.
The discharge lamp according to claim 4, wherein the electrode support rod extends to a bottom surface of the internal space to hold the tip of the electrode.
The discharge lamp according to claim 12, wherein the heat transfer body further constitutes a cylindrical portion of the electrode body forming the internal space.
The discharge lamp according to claim 12, wherein the heat transfer body has a cylindrical shape and is arranged coaxially with a space from the electrode support rod.
The discharge lamp according to claim 3, wherein the heat transfer member is joined to the electrode tip portion and the electrode support rod to constitute a body portion of the electrode.
The electrode has a shaft portion extending from the electrode tip portion along the electrode axial direction and joined to the electrode support rod;
The discharge lamp according to claim 3, wherein the heat transfer body has a cylindrical shape and is arranged coaxially around the shaft portion.
The discharge lamp according to claim 1, wherein the entire electrode including the electrode tip is configured as the heat transfer body.
The discharge lamp according to claim 1, wherein the electrode support rod is configured as the heat transfer body.
The discharge lamp according to claim 1, wherein the heat transfer body is formed by using carbon fiber as a carbon base material.
The discharge lamp according to claim 19, wherein the heat transfer body is constituted by a carbon fiber bundle in which the carbon fibers are bundled in a cylindrical member.
The electrode has an electrode body in which an internal space is formed along the electrode axis direction,
The discharge lamp according to claim 20, wherein the heat transfer body is provided in the internal space in a state in which the carbon fiber bundle protrudes from the cylindrical member along the electrode axis direction.
The discharge lamp according to claim 1, wherein the heat transfer body is formed using powdered carbon as a base material.
The discharge lamp according to claim 1, wherein the heat transfer body is made of a metal / carbon composite material.
The discharge lamp according to claim 23, wherein the heat transfer body is made of a tungsten / carbon composite material.
The discharge lamp according to claim 1, wherein the heat transfer body includes carbon nanofibers.