WO2012081375A1 - Procédé de fabrication de guide d'ondes optique - Google Patents

Procédé de fabrication de guide d'ondes optique Download PDF

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Publication number
WO2012081375A1
WO2012081375A1 PCT/JP2011/077159 JP2011077159W WO2012081375A1 WO 2012081375 A1 WO2012081375 A1 WO 2012081375A1 JP 2011077159 W JP2011077159 W JP 2011077159W WO 2012081375 A1 WO2012081375 A1 WO 2012081375A1
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Prior art keywords
film
core
clad
optical waveguide
layer
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PCT/JP2011/077159
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English (en)
Japanese (ja)
Inventor
啓 渡辺
公雄 守谷
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住友ベークライト株式会社
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Priority to JP2012548711A priority Critical patent/JP5321756B2/ja
Publication of WO2012081375A1 publication Critical patent/WO2012081375A1/fr

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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation

Definitions

  • the present invention relates to an optical waveguide manufacturing method.
  • This application claims priority based on Japanese Patent Application No. 2010-278178 for which it applied to Japan on December 14, 2010, and uses the content here.
  • a method for connecting a film-shaped optical waveguide and an optical device for example, there is a method in which the optical waveguide is incorporated in a PMT connector and connected to the optical device by fitting the connector. At this time, it is necessary not only to perform external processing so as to conform to the connector standard, but also to adapt the core pitch to the connector standard so that there is no optical axis misalignment with the connector at the connection destination.
  • the core pitch can be controlled by mask design and drawing accuracy, but if it is a film that shrinks by thermosetting, a design based on the dimensional change rate is required. Also, if there are structures having different thermal shrinkage rates in the optical waveguide, the layers that are in close contact with each other will expand and contract, making it extremely difficult to control. Therefore, instead of accumulating the thermal stress inside the structure, for example, a spacer having a sufficiently small thermal expansion coefficient is engaged between structures having different thermal expansion coefficients without sticking them, and the thermal stress is slid between the structure and the spacer. If the configuration is changed to, the dimensional change may be suppressed. (See Patent Document 1).
  • An object of the present invention is to provide a method of manufacturing an optical waveguide that suppresses a dimensional change that occurs during manufacturing.
  • a method of manufacturing an optical waveguide comprising: a core layer including a core portion and a cladding portion having a refractive index lower than that of the core portion; and a first cladding layer and a second cladding layer disposed with the core layer interposed therebetween.
  • the light according to (1) further including a step of cooling the first cladding layer, the core layer, and the substrate to near room temperature between the first cladding layer stacking step and the substrate removing step.
  • a method for manufacturing a waveguide (3) The method for producing an optical waveguide according to any one of (1) and (2), wherein a release treatment is performed on a surface of the base material on the side on which the core layer is formed.
  • the layers of the optical waveguide when the layers of the optical waveguide are laminated, the layers are laminated in a state of being fixed on the support base material. For this reason, the free expansion and contraction of each layer is restricted, and the dimensional change that occurs in the manufacturing process of the optical waveguide can be suppressed.
  • FIG. 1 is a cross-sectional view of an optical waveguide according to the present invention.
  • the optical waveguide 1 sandwiches the core layer 12 having a core layer 121 (hereinafter also referred to as a core film) 12 having a core portion 121 and a cladding portion 122 having a refractive index lower than that of the core portion 121.
  • a second cladding layer hereinafter also referred to as a second cladding film 13 (hereinafter referred to as a first cladding layer and a first cladding layer).
  • the two cladding layers may be collectively referred to as a cladding layer or a cladding film).
  • the core part 121 is a part that forms the optical path of the transmission light, and the cladding part 122 does not form an optical path of the transmission light although it is formed in the core layer 12 and performs the same function as the cladding layers 11 and 13. Part.
  • the thickness of the core layer 12 is appropriately set according to the thickness of the optical waveguide 1 to be formed, and is not particularly limited, but is preferably 1 ⁇ m or more and 200 ⁇ m or less, more preferably 5 ⁇ m or more and 100 ⁇ m or less, More preferably, it is 10 ⁇ m or more and 60 ⁇ m or less.
  • a material whose refractive index changes by irradiation with light (for example, ultraviolet rays) or further heating is used.
  • a resin composition containing a cyclic olefin resin such as a benzocyclobutene polymer or a norbornene polymer as a main material, and including a norbornene polymer (as a main material).
  • a resin composition containing a cyclic olefin resin such as a benzocyclobutene polymer or a norbornene polymer as a main material, and including a norbornene polymer (as a main material).
  • the core layer 12 made of such a material is excellent in resistance to deformation such as bending, and even when it is repeatedly curved and deformed, the core layer 121 and the clad portion 122 are separated from each other, or the clad layer adjacent to the core layer 12 is used. 11 and 13 hardly occur, and microcracks are prevented from occurring in the core part 121 and the clad part 122. As a result, the optical transmission performance of the optical waveguide 1 is maintained, and the optical waveguide 1 having excellent durability can be obtained.
  • Examples of the constituent material of the core layer 12 include an antioxidant, a refractive index adjuster, a plasticizer, a thickener, a reinforcing agent, a sensitizer, a leveling agent, an antifoaming agent, an adhesion aid, and a flame retardant.
  • the additive may be contained.
  • Addition of an antioxidant has the effect of improving high temperature stability, improving weather resistance, and suppressing light deterioration. Examples of such an antioxidant include phenols such as monophenols, bisphenols, and triphenols, and aromatic amines. Further, the resistance to bending can be further increased by adding a plasticizer, a thickener, and a reinforcing agent.
  • the content of additives typified by the antioxidant is preferably about 0.5 to 40% by weight, preferably 3 to 30% by weight, with respect to the entire constituent material of the core layer 12. The degree is more preferable. If this amount is too small, the function of the additive cannot be sufficiently exhibited. If the amount is too large, the transmittance of light (transmitted light) transmitted through the core portion 121 depends on the type and characteristics of the additive. Decrease, patterning failure, refractive index instability and the like.
  • the pattern shape of the core portion 121 to be formed is not particularly limited, and is linear, a shape having a curved portion, an irregular shape, a shape having a branching portion of a light path, a merging portion or a crossing portion, a condensing portion (a width or the like is reduced) Or a light diffusing part (a part where the width or the like is increased), or a combination of two or more of these.
  • the core portion 121 having any shape can be easily formed by setting the light irradiation pattern.
  • the thicknesses of the clad layers 11 and 13 are appropriately set according to the thickness of the optical waveguide 1 to be formed, and are not particularly limited, but are preferably 0.1 ⁇ m or more and 100 ⁇ m or less, and preferably 1 ⁇ m or more and 50 ⁇ m or less. Is more preferably 5 ⁇ m or more and 30 ⁇ m or less.
  • a material having a lower refractive index than the core portion 121 of the core layer 12 is used.
  • examples include acrylic resins, methacrylic resins, polycarbonates, polystyrenes, epoxy resins, polyamides, polyimides, polybenzoxazoles, cyclic olefin resins such as benzocyclobutene resins and norbornene resins, and one of these.
  • Species or a combination of two or more can be used.
  • epoxy resins polyimides, polybenzoxazoles, cyclic olefin resins such as benzocyclobutene resins and norbornene resins, and those containing them (mainly) in terms of particularly excellent heat resistance It is preferable to use, and particularly, those mainly composed of norbornene-based resins (norbornene-based polymers) are preferable.
  • the norbornene-based polymer is excellent in heat resistance, in an optical waveguide using this as a constituent material of the cladding layers 11 and 13, when the conductor layer is formed in the optical waveguide, the conductor layer is processed to form a wiring. At this time, even when the optical element is mounted, the clad layers 11 and 13 can be prevented from being softened and deformed even if they are heated. Moreover, since it has high hydrophobicity, it is possible to obtain the clad layers 11 and 13 that are less likely to undergo dimensional changes due to water absorption. Norbornene-based polymers or norbornene-based monomers that are raw materials thereof are also preferable because they are relatively inexpensive and easily available.
  • the cladding layers 11 and 13 are excellent in resistance to deformation such as bending (bending resistance), even when repeatedly bent and deformed. 13 and the core layer 12 are hardly delaminated, and the occurrence of microcracks in the cladding 122 is also prevented. For this reason, the optical transmission performance of the optical waveguide 1 is maintained, and the optical waveguide 1 having excellent durability is finally obtained.
  • each clad layer 11 and 13 are arranged with the core layer 12 interposed therebetween, but each clad layer may be made of the same kind of constituent material or different constituent materials.
  • the optical waveguide 1 shown in FIG. 1 has two core parts 121, but the number of core parts 121 formed in one optical waveguide 1 is not particularly limited. Further, in FIG. 1, the core layer 12 is only one layer, but the number of the core layers 12 is not particularly limited, and a plurality of core layers 12 may be laminated.
  • optical waveguide manufacturing method (First embodiment) Next, a first embodiment of the optical waveguide manufacturing method of the present invention will be described.
  • 2 to 8 are views showing each step of the method of manufacturing an optical waveguide according to the present invention.
  • the optical waveguide manufacturing method is as follows: [1] core film preparation step, [2] clad film preparation step, [3] first clad layer lamination step, [4] substrate removal step, [5] second clad layer The description will be divided into lamination steps.
  • the core film 12 having the core part 121 having a high refractive index is produced.
  • the core film 12 is produced by irradiating light with respect to the film 2 for core formation formed on the core film support base material 41.
  • any material can be used as the constituent material of the core-forming film 2 as long as it is a material that is substantially transparent to the propagating light.
  • the core forming film 2 is suitably used in data communication using light in a wavelength region of about 600 to 1550 nm, for example. Accordingly, those having sufficient transparency in this wavelength region are preferably used.
  • having transparency in the wavelength region of about 600 to 1550 nm is preferably, for example, that the light transmittance in the wavelength region is 90% or more, particularly 99% or more.
  • the light transmittance is measured according to JIS K7105. Specifically, a film is formed and cut to a size according to JIS K7105. After setting in a spectrometer and transmitting a white light source through the film, the amount of transmitted light is measured.
  • a core film forming material (hereinafter also referred to as a core varnish) 21 is supported by a core film. After being applied to the base material 41, it is formed by a method of curing (solidifying).
  • the core film forming material 21 is applied onto the core film supporting substrate 41 by the nozzle 5 capable of controlling discharge, and a liquid film is formed on the core film supporting substrate 41.
  • the core film support base 41 rotates in the direction A in FIG. 2, and the nozzle 5 moves in the B direction from the center of the core film support base 41.
  • the discharge amount of the core film forming material 21 from the nozzle 5 can be controlled, and is normally set so that the discharge amount increases from the center portion to the end portion of the core film support base 41. ing. Thereby, it becomes possible to apply the core film forming material 21 on the core film support base 41 with a uniform thickness.
  • the number of rotations of the core film support base 41 is one of the factors that control the thickness of the core forming film 2 and may be any number of rotations at which the core film forming material 21 applied by centrifugal force is not scattered. Specifically, 60 to 100 rpm is preferable. Further, the discharge amount of the core film-forming material 21 from the nozzle 5 is also one of the factors that control the thickness of the core-forming film 2, and the extent to which the gap between the nozzle 5 and the core film support base material 41 is filled. Although not particularly limited, it is preferably 3 to 7 cc / min.
  • the core film support base 41 coated with the core film forming material 21 is placed on a ventilated level table to level the uneven portion of the liquid coating surface and evaporate the solvent (desolvent). ) Thereby, the film 2 for core formation can be obtained.
  • the drying conditions are not particularly limited, but the drying is preferably performed at 40 to 50 ° C. for 10 to 30 minutes.
  • the core forming film 2 is formed by a coating method, in addition to the methods described above, for example, a doctor blade method, a spin coating method, a dipping method, a table coating method, a spray method, an applicator method, a curtain coating method, a die coating method, etc. Include, but are not limited to, methods.
  • the core film support base 41 for example, a silicon substrate, a silicon dioxide substrate, a glass substrate, a quartz substrate, a polyethylene terephthalate (PET) film, or the like is used.
  • a silicon substrate for example, a silicon substrate, a silicon dioxide substrate, a glass substrate, a quartz substrate, a polyethylene terephthalate (PET) film, or the like is used.
  • PET polyethylene terephthalate
  • the average thickness of the core forming film 2 is appropriately set according to the thickness of the core film 12 to be formed, and is not particularly limited, but is preferably about 1 to 200 ⁇ m, and about 5 to 100 ⁇ m. More preferably, it is about 10 to 60 ⁇ m.
  • the refractive index of the core forming film 2 is not particularly limited as long as it is higher than the refractive index of the clad films 11 and 13, but is preferably about 1.5 to 1.8 of the refractive index of the clad films 11 and 13. It is said.
  • a mask 6 formed of chrome 61 is disposed above the core forming film 2.
  • the core forming film 2 is irradiated with light through the opening of the mask 6.
  • the irradiated light examples include active energy rays such as visible light, ultraviolet light, infrared light, and laser. Besides light, electromagnetic waves such as X-rays and particle beams such as electron beams may be irradiated.
  • the photoacid generator can be activated relatively easily depending on the composition of the photoacid generator.
  • the amount of light irradiation is not particularly limited, but is preferably about 0.1 to 9 J / cm 2 , more preferably about 0.2 to 6 J / cm 2 , and 0.2 to 3 J / cm 2. More preferably, it is about cm 2 .
  • the core-forming film 2 irradiated with light is cured in an oven (preferably 120 to 160 ° C. for 10 to 30 minutes).
  • the part irradiated with light has a lower refractive index due to the polymerization of the low refractive index component by the acid and the detachment action of the high refractive index component, and there is a difference in refractive index from the part not irradiated with light. Arise.
  • the difference in refractive index can be further expressed by applying heat.
  • the portion of the core forming film 2 that has been irradiated with light becomes the cladding portion 122, and the portion that has not been irradiated becomes the core portion 121.
  • the core film 12 is formed (FIG.3 (b)).
  • any material can be used as long as it is a material that is substantially transparent to propagating light.
  • the materials described above can be used as the material.
  • the clad films 11 and 13 are suitably used in data communication using light in the wavelength region of about 600 to 1550 nm, for example, the clad film 11 and 13 having sufficient transparency in this wavelength region are used. 13 is preferably used as a forming material.
  • having transparency in the wavelength region of about 600 to 1550 nm is preferably, for example, that the light transmittance in the wavelength region is 90% or more, particularly 99% or more.
  • the clad films 11 and 13 can be produced by the same method as the core forming film 2. That is, as shown in FIG. 4, a clad film forming material (hereinafter also referred to as a clad varnish) 31 is applied onto a clad film support base 42 by a nozzle 5 capable of controlling discharge, and the clad film support base is applied. A liquid film is formed on the material 42.
  • a clad film forming material hereinafter also referred to as a clad varnish
  • the same material as the core film support base material 41 can be used.
  • a silicon substrate, a silicon dioxide substrate, a glass substrate, a quartz substrate, a polyethylene terephthalate (PET) film, or the like is used. .
  • the clad film support base material 42 rotates in the A direction in FIG. 4, and the nozzle 5 moves in the B direction from the center of the clad film support base material 42.
  • the discharge amount of the clad film-forming material 31 from the nozzle 5 can be controlled, and is usually set so that the discharge amount increases from the center to the end of the clad film support base 42.
  • the clad film forming material 31 can be applied to the clad film support base 42 with a uniform thickness.
  • the number of rotations of the clad film support base 42 is one of the factors that control the thickness of the clad films 11 and 13, as long as the number of rotations does not scatter the clad film forming material 31 applied by centrifugal force. Specifically, 60 to 100 rpm is preferable. Further, the discharge amount of the clad film forming material 31 from the nozzle 5 is one of the factors that control the thickness of the clad films 11 and 13, and the extent to which the gap between the nozzle 5 and the clad film support base 42 is filled. Although not particularly limited, it is preferably 3 to 7 cc / min.
  • the clad film support base material 42 coated with the clad film forming material 31 is placed on a ventilated level table to level the non-uniform portion of the liquid coating surface and evaporate the solvent (desolvent). ) Thereby, the clad films 11 and 13 can be obtained.
  • the drying conditions are not particularly limited, but the drying is preferably performed at 40 to 50 ° C. for 10 to 30 minutes.
  • a coating method in addition to the methods described above, for example, a doctor blade method, a spin coating method, a dipping method, a table coating method, a spray method, an applicator method, a curtain coating method, a die coating method, etc. Include, but are not limited to, methods.
  • the average thickness of the clad films 11 and 13 is appropriately set according to the thickness of the clad films 11 and 13 to be formed, and is not particularly limited, but is preferably about 0.1 to 100 ⁇ m. More preferably, it is about ⁇ 50 ⁇ m, more preferably about 5 to 30 ⁇ m.
  • a method of bonding the first clad film 11 to the core film 12 will be specifically described with reference to FIGS.
  • the first clad film 11 obtained in the clad film preparation step is bonded onto the laminated substrate 71 via the protective sheet 72 and the clad film support base material 42.
  • the surface of the laminated substrate 71 on which the first clad film 11 is not laminated is adsorbed and fixed to the adsorbing plate 73 of the bonding apparatus.
  • the core film 12 whose surface wettability has been improved by corona treatment is also adsorbed and fixed to the adsorbing plate 73 of the laminating apparatus via the core film support base 41.
  • thermocompression treatment for example, the core film 12 and the first clad film 11 are thermocompression bonded using a laminator made of silicon rubber 8.
  • the temperature for thermocompression bonding is generally set in the range of 80 to 140 ° C., preferably 100 to 120 ° C.
  • the pressure for thermocompression bonding is generally set in the range of 0.1 to 10 MPa, preferably 0.1 to 4 MPa.
  • the laminated substrate 71 For example, a base material with high in-plane smoothness, such as a stainless plate, glass, Si wafer, a bake board, is used.
  • the protective sheet 72 is not particularly limited, and for example, a sheet-like polymer film such as PET, PI, Teflon (registered trademark) is used.
  • thermocompression bonding by applying a reduced pressure atmosphere or a vacuum as necessary, gas components such as air that can be entrained and remain between the first clad film 11 and the core film 12 at the time of lamination are minimized.
  • the first clad film laminate 9 having excellent flatness can be obtained by suppressing the generation of voids at the contact portion.
  • the reduced-pressure atmosphere or vacuum can be applied when the first clad film 11 and the core film 12 are in contact, when the first clad film 11 and the core film 12 are thermocompression bonded, or both.
  • a reduced-pressure atmosphere or a vacuum can be applied by employing a vacuum lamination, a vacuum press, or the like.
  • the adhesion force between the core film 12 and the first clad film 11 becomes the adhesion force between the core film 12 and the core film support substrate 41. Become stronger. As a result, peeling of the core film support base 41 from the core film 12 becomes easy. That is, if the adhesion between the core film 12 and the first clad film 11 is stronger than the adhesion between the core film 12 and the core film support base 41, the core film 12 is peeled off from the core film support base 41 when the core film 12 is peeled off. The film 12 does not peel from the first clad film 11.
  • Adhesion of the core film 12 and the first cladding film 11 is more preferably preferably 100 ⁇ 1000gf / cm 2, a 200 ⁇ 800gf / cm 2.
  • the adhesion strength of the core film 12 and the core film support substrate 41 is preferably 10 ⁇ 200gf / cm 2, more preferably 50 ⁇ 100gf / cm 2.
  • the adhesion is measured according to JIS K7127.
  • the obtained three-layer optical waveguide was cut into the shape of a test piece specified by JIS K7127, and both ends of this test piece were taken from a tensile tester (tensile tester Tensilon STM-T-50 manufactured by A & D Corporation). The test machine was operated while being held between the chuck portions and the crosshead speed was maintained at 5 cm / min, and the strength at which the test piece broke was measured.
  • the adhesive force between the core film 12 and the first clad film 11 is equal to or greater than the above lower limit, an optical waveguide having high light propagation performance can be obtained. Moreover, if the adhesive force of the core film 12 and the 1st clad film 11 is below the said upper limit, the external formability of an optical waveguide structure will not be impaired. Furthermore, if the adhesive force between the core film 12 and the core film support base material 41 is within the above range, they are not naturally peeled during handling, and the core film support base material 41 is easily peeled off during the base material removal step. can do.
  • Substrate removing step the core film supporting substrate 41 is removed from the core film 12.
  • the method of removing the core film support base 41 from the core film 12 is, for example, by putting peeling flakes into the core film support base 41 with something like tweezers with a thin tip, and the core film support base 41 from the core film 12.
  • a tape having a high adhesive force may be applied to the core film support base 41 and the tape may be peeled off together with the core film support base 41.
  • the core film 12 is peeled off from the core film support base material 41, it is hardly laminated on the clad film 11, and therefore hardly receives the shrinkage stress of the core film support base material 41. For this reason, the dimensional change of the core film 12 produced at the time of lamination
  • the surface of the core film 12 from which the core film supporting base material 41 is peeled from the first clad film laminated body 9 has a refractive index lower than that of the core portion 121.
  • the second cladding film 13 is laminated.
  • stacked is demonstrated.
  • a method of bonding the second clad film 13 to the core film 12 will be specifically described with reference to FIGS.
  • the second clad film 13 obtained in the clad film production step is adsorbed and fixed to the adsorbing plate 73 of the laminating apparatus via the clad film support base material 42.
  • the surface of the core film 12 exposed by peeling the core film support substrate 41 from the first clad film laminate 9 was subjected to corona treatment to improve the surface wettability.
  • the surface of the laminated substrate 71 on which the first clad film laminate 9 is laminated via the protective sheet 72 and not laminated with the first clad film laminate 9 is adsorbed and fixed to the adsorption plate 73 of the bonding apparatus. .
  • thermocompression treatment the core film 12 and the second clad film 13 are thermocompression bonded using, for example, a laminator made of silicon rubber 8.
  • the temperature for thermocompression bonding is generally set in the range of 80 to 140 ° C., preferably 100 to 120 ° C.
  • the pressure for thermocompression bonding is generally set in the range of 0.1 to 10 MPa, preferably 0.1 to 4 MPa.
  • thermocompression bonding by applying a reduced pressure atmosphere or a vacuum as necessary, gas components such as air that can be entrained and remain between the second clad film 13 and the core film 12 at the time of lamination are minimized. It is preferable that the optical waveguide structure 1 with good flatness can be obtained by suppressing the generation of voids at the contact portion.
  • the reduced-pressure atmosphere or vacuum can be applied at the time of contact between the second clad film 13 and the core film 12, or at the time of thermocompression bonding of the second clad film 13 and the core film 12, or both.
  • a reduced-pressure atmosphere or a vacuum can be applied by employing a vacuum lamination, a vacuum press, or the like.
  • an optical waveguide can be obtained through the above-described steps, but further, treatment that improves environmental resistance such as heat resistance, moisture resistance, reflow resistance, flame resistance, and chemical resistance. It is preferable to carry out. It is also preferable to perform a treatment that improves mechanical resistance such as bending resistance, bending resistance, and tensile resistance. Examples of these treatments include a method of attaching a polyimide tape or a polyurethane tape to at least one side of the obtained optical waveguide.
  • the process (aging process) of cooling the core film support base material 41 is performed between the first clad layer laminating step and the base material removing step. Cooling may be performed until the film surface temperature is lowered to around room temperature, preferably 15 to 25 ° C., more preferably 18 to 22 ° C.
  • the cooling method used in the aging step is not particularly limited, and natural cooling may be used, and in the case of using equipment or the like, cooling may be performed using a sample cooling fan of a laminator, for example.
  • the core film 12 and the first clad film 11 are sufficiently thermocompression bonded, and when the core film support base 41 is peeled from the core film 12, the core film 12 and the clad film 11 are separated. Generation of microvoids can be suppressed.
  • the film surface temperature as much as possible, the structural change at the time of peeling is reduced as much as possible, and by suppressing the change in the dimensional and refractive index distribution, the optical waveguide structure having small dimensional change and in-plane variation in optical characteristics. Is obtained.
  • a mold release process is performed on the surface of the core film support base 41 on the side on which the core film 12 is formed.
  • the surface of the core film support base 41 on the side on which the core film 12 is formed is coated or ashed with a material having a low surface tension, specifically, Teflon (registered trademark) to improve the surface releasability.
  • the core film supporting substrate 41 can be easily peeled from the core film 12 after the first clad film 11 is laminated by performing a mold release treatment on the core film supporting substrate 41.
  • the surface smoothness of the core film support base material 41 can be improved by performing a mold release process on the core film support base material 41. That is, if the core film supporting substrate 41 has irregularities, the irregularities may be transferred to the core film 12 and light scattering may occur.
  • the surface smoothness of the core film supporting substrate 41 can be improved by the release treatment. By improving, such light scattering can be suppressed.
  • the surface smoothness of the core film support substrate 41 after the release treatment is reduced to 1/10 of the transmission wavelength with an arithmetic average roughness Ra, approximately 60 nm or less, the unevenness of the core film 12 Can suppress light scattering.
  • the arithmetic average roughness Ra is measured according to JIS B0601. Specifically, the surface is scanned with a LASER microscope and the scattered light from the surface is measured. The arithmetic average roughness Ra is calculated by analyzing the measured light quantity.
  • the optical waveguide obtained by the above-described method can be used for an optical wiring for optical communication, for example.
  • this optical wiring can be combined with the existing electrical wiring on the substrate to constitute a so-called “photoelectric mixed substrate”.
  • an optical signal transmitted through an optical wiring core portion of an optical waveguide
  • an electric signal in an optical device is converted into an electric signal in an optical device and transmitted to the electric wiring.
  • high-speed and large-capacity information transmission can be achieved in the optical wiring portion as compared with the conventional electric wiring.
  • this opto-electric hybrid board may be mounted on an electronic device that transmits a large amount of data at high speed, such as a mobile phone, a game machine, a personal computer, a television, and a home server.
  • Example 1 Preparation of core film ⁇ Synthesis of hexyl norbornene (HxNB) / diphenylmethylnorbornene methoxysilane (diPhNB) copolymer> HxNB (CAS number 22094-83-3) (9.63 g, 0.054 mol), diPhNB (CAS number 376634-34-3) (40.37 g, 0.126 mol), 1-hexene ( 4.54 g, 0.054 mol) and toluene (150 g) were mixed in a 500 mL sealam bottle in a dry box, and further stirred while heating to 80 ° C. in an oil bath to obtain a solution.
  • HxNB hexyl norbornene
  • diPhNB diphenylmethylnorbornene methoxysilane
  • 1-hexene 4.54 g, 0.054 mol
  • toluene 150 g
  • the solid content was collected by filtration and vacuum dried in an oven at 60 ° C. to obtain a product having a dry mass of 19.0 g (yield 38%).
  • Mw mass average molecular weight
  • Mn number average molecular weight
  • the product was measured by 1 H-NMR and identified as a HxNB / diPhNB-based copolymer.
  • the refractive index of this copolymer was measured by the prism coupling method, the TE mode was 1.5695 and the TM mode was 1.5681 at a wavelength of 633 nm.
  • the core film was irradiated with ultraviolet light through a mask having an opening to form a desired pattern, thereby obtaining a core film.
  • thermocompression bonding conditions were 140 ° C., 0.3 MPa, and 210 s under vacuum conditions.
  • ⁇ Substrate removal step> After the cooling step, a highly adhesive tape was applied to the PET film supporting the core film, and the PET film was peeled off from the core film together while peeling the tape.
  • ⁇ Second cladding layer lamination step> The second clad film was adsorbed and fixed to the laminating apparatus via the PI film.
  • the core film from which the PET film was peeled was subjected to corona treatment, and then adsorbed and fixed to the laminating apparatus via the first clad film, PI film, protective film, and laminated substrate in this order.
  • the 2nd clad film and the core film were temporarily pasted over the automatic roller.
  • a protective sheet was placed on the second clad film via the PI film, and the second clad film and the core film were thermocompression bonded by a laminator.
  • the thermocompression bonding conditions were 140 ° C., 0.3 MPa, and 210 s under vacuum conditions.
  • the prepared three-layer optical waveguide was fixed on a support base (stainless steel plate) with a magnet, placed in an oven, and cured at 160 ° C. for 2 hours.
  • the regression line of the total light propagation loss data is expressed by the following equation.
  • y mx + b
  • m represents the light propagation loss
  • b represents the coupling loss
  • x represents the length of the optical waveguide
  • y represents the total propagation light loss.
  • the light propagation loss of the optical waveguide of Example 1 was 0.06 dB / cm.
  • the surface arithmetic mean roughness was 50 nm.
  • the arithmetic average roughness of the surface of the PET film coated with Teflon (registered trademark) was 30 nm.
  • the obtained three-layer optical waveguide was cut into the shape of a test piece specified by JIS K7127.
  • the both ends of the test piece are sandwiched between chuck portions of a tensile tester (tensile tester Tensilon STM-T-50 manufactured by A & D Co., Ltd.), and the crosshead speed is maintained at 5 cm / min. It was actuated and the strength at which the test piece broke was measured.
  • the adhesion between the core film and the clad film of the optical waveguide of Example 1 was 500 gf / cm 2 or more.
  • the adhesive force between the core film of the core forming film produced in Example 1 and the PET film was 50 gf / cm 2 .
  • Example 2 The first cladding layer stacking step was the same as in Example 1 except that the following was performed.
  • First cladding layer lamination step> The first clad film was adsorbed and fixed to the laminating apparatus through the PI film, the protective sheet, and the laminated substrate in this order.
  • the core film was subjected to corona treatment and then adsorbed and fixed to a laminating apparatus via a PET film. Then, the 1st clad film and the core film were temporarily pasted over the automatic roller.
  • thermocompression bonding conditions were 140 ° C., 0.3 MPa, and 210 s under vacuum conditions.
  • the laminator air cooling device was not used, and it was immediately removed. Thereafter, a tape having high adhesive strength was applied to the support substrate (PET film) of the core film, and the support substrate was peeled off while peeling the tape.
  • the optical propagation loss of the optical waveguide of Example 2 implemented in the same manner as described above was 0.10 dB / cm. Moreover, as a result of measuring the surface roughness of the core film, the surface arithmetic average roughness was 50 nm.
  • Example 3 The core-forming film was produced in the same manner as in Example 1 except for the following. ⁇ Preparation of film for core formation> After 200 g of the core varnish is filled in the syringe of the coating machine, the core varnish is applied to the support substrate of the PET film (thickness 100 ⁇ m) with a nozzle capable of controlling discharge, and a uniform liquid with a thickness of 150 ⁇ m is applied to the support substrate. A core coating was formed. Then, this coating film was put into a dryer together with a PET film and heated at 45 ° C. for 20 minutes to evaporate mesitylene to obtain a dried coating film having a thickness of 40 ⁇ m.
  • the optical propagation loss of the optical waveguide of Example 3 carried out in the same manner as described above was 0.20 dB / cm. Moreover, as a result of measuring the surface roughness of the core film, the surface arithmetic average roughness was 200 nm.
  • Example 2 The production of the three-layer optical waveguide was performed in the same manner as in Example 1 except for the following. ⁇ Lamination of first clad film> The first clad film was adsorbed and fixed to the laminating apparatus. On the other hand, the core film was peeled off from the core support substrate, and then subjected to corona treatment, and was adsorbed and fixed to the laminating apparatus. Finally, the first clad film and the core film were temporarily attached by applying an automatic roller.
  • the second clad film was adsorbed and fixed to the laminating apparatus.
  • the core film on which the first clad film was laminated was subjected to corona treatment on the core film and fixed to the bonding apparatus by suction.
  • the second clad film and the core film were temporarily attached by applying an automatic roller. Thereafter, protective sheets were placed on both sides, and thermocompression bonded with a laminator.
  • the thermocompression bonding conditions were 140 ° C., 0.3 MPa, and 210 s under vacuum conditions.
  • the optical propagation loss of the optical waveguide of the comparative example implemented in the same manner as described above was 0.06 dB / cm. Moreover, as a result of measuring the surface roughness of the core film, the surface arithmetic average roughness was 50 nm.
  • the layers of the optical waveguide when the layers of the optical waveguide are laminated, the layers are laminated in a state of being fixed on the support base material. For this reason, the free expansion and contraction of each layer is restricted, and the dimensional change that occurs in the manufacturing process of the optical waveguide can be suppressed.
  • Optical waveguide (optical waveguide structure) 11 First cladding layer (first cladding film) 12 Core layer (core film) 121 Core part 122 Clad part 13 Second clad layer (second clad film) 2 Core forming film 21 Core film forming material (core varnish) 31 Clad film forming material (clad varnish) 41 Core film support base 42 Cladding film support base 5 Nozzle 6 Mask 61 Chrome 71 Laminated substrate 72 Protective sheet 73 Suction plate 74 Automatic roller 8 Silicon rubber 9 First clad film laminated body

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

L'invention porte sur un procédé de fabrication d'un guide d'ondes optique qui comporte une couche de cœur, comportant de plus des parties de cœur et des parties de gaine ayant une réfraction inférieure à celle des parties de cœur, et une première couche de gaine et une seconde couche de gaine positionnées de façon à prendre en sandwich la couche de cœur. Ledit procédé comporte les étapes suivantes, dans l'ordre suivant : la superposition en couches de la première couche de gaine sur la couche de cœur qui est formée en couches sur un matériau de base ; l'élimination du matériau de base de la couche de cœur ; la superposition en couches de la seconde couche de gaine sur la face de la couche de cœur sur le côté où le matériau de base a été éliminé.
PCT/JP2011/077159 2010-12-14 2011-11-25 Procédé de fabrication de guide d'ondes optique WO2012081375A1 (fr)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015087657A (ja) * 2013-10-31 2015-05-07 住友ベークライト株式会社 光導波路、光電気混載基板および電子機器
JP2015155951A (ja) * 2014-02-20 2015-08-27 日東電工株式会社 光導波路コア形成用液状感光性樹脂組成物およびそれを用いた光導波路、ならびにフレキシブルプリント配線板
CN114779392A (zh) * 2022-06-23 2022-07-22 江苏欧辉照明灯具有限公司 一种可调式灯具导光板加工装置
WO2023074516A1 (fr) * 2021-10-28 2023-05-04 住友ベークライト株式会社 Procédé de fabrication de guide d'ondes optique
JP7511395B2 (ja) 2020-06-23 2024-07-05 Ｎｉｓｓｈａ株式会社 光電変換素子とその製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006330118A (ja) * 2005-05-23 2006-12-07 Sumitomo Bakelite Co Ltd 光導波路構造体
JP2010224246A (ja) * 2009-03-24 2010-10-07 Toppan Printing Co Ltd 光基板の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006330118A (ja) * 2005-05-23 2006-12-07 Sumitomo Bakelite Co Ltd 光導波路構造体
JP2010224246A (ja) * 2009-03-24 2010-10-07 Toppan Printing Co Ltd 光基板の製造方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015087657A (ja) * 2013-10-31 2015-05-07 住友ベークライト株式会社 光導波路、光電気混載基板および電子機器
JP2015155951A (ja) * 2014-02-20 2015-08-27 日東電工株式会社 光導波路コア形成用液状感光性樹脂組成物およびそれを用いた光導波路、ならびにフレキシブルプリント配線板
JP7511395B2 (ja) 2020-06-23 2024-07-05 Ｎｉｓｓｈａ株式会社 光電変換素子とその製造方法
WO2023074516A1 (fr) * 2021-10-28 2023-05-04 住友ベークライト株式会社 Procédé de fabrication de guide d'ondes optique
JPWO2023074516A1 (fr) * 2021-10-28 2023-05-04
JP7414185B2 (ja) 2021-10-28 2024-01-16 住友ベークライト株式会社 光導波路の製造方法
CN114779392A (zh) * 2022-06-23 2022-07-22 江苏欧辉照明灯具有限公司 一种可调式灯具导光板加工装置
CN114779392B (zh) * 2022-06-23 2022-09-06 江苏欧辉照明灯具有限公司 一种可调式灯具导光板加工装置

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JPWO2012081375A1 (ja) 2014-05-22
TW201237480A (en) 2012-09-16

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