WO2012074176A1

WO2012074176A1 - Solar cell and a production method therefor

Info

Publication number: WO2012074176A1
Application number: PCT/KR2011/004399
Authority: WO
Inventors: 한석빈; 최용규
Original assignee: 주식회사 선반도체
Priority date: 2010-11-30
Filing date: 2011-06-16
Publication date: 2012-06-07
Also published as: KR101028706B1

Abstract

The object of the present invention is to provide a solar cell which can maximize light efficiency and can economize on process implementation and cost, and also to provide a production method for the solar cell. The solar cell of the present invention includes articles comprising: a surface-textured first electrically conductive semiconductor layer; a first electrically conductive high-density semiconductor layer which is formed within the surface of the first electrically conductive semiconductor layer; a first and a second oxide film respectively formed on the textured upper surface and back surface of the first electrically conductive semiconductor layer; a plurality of first trenches which are formed at intervals on the back surface of the first electrically conductive semiconductor layer; a third oxide film which is formed on the top-side surfaces of the first trenches; first and second electrically conductive impurity regions which are formed so as to have mutually different forms of electrical conductivity in the first electrically conductive semiconductor layer underneath neighbouring first trenches; and first and second metal electrodes which are formed within each of the first trenches, corresponding to the first and second electrically conductive impurity regions. The present invention is advantageous in that it can maximize the light efficiency of solar cells and can exploit inkjet technology to economize on process implementation and cost.

Description

Solar cell and manufacturing method thereof

The present invention relates to a solar cell, and more particularly, to a solar cell and a method for manufacturing the same, which can maximize the light efficiency, and can reduce the implementation and cost of the process.

In general, solar cell technology has recently been proposed as a solution to energy and environmental problems such as depletion of fossil fuels, global warming, and the like. Thus, the development of technology using natural energy such as solar energy is rapidly progressing.

Such solar energy is a renewable energy source that can be converted into other forms of energy such as heat and electricity. In using solar energy as a reliable source of such renewable energy, the major drawback is the low efficiency in converting light energy into heat or electricity, and the solar energy at different times of the day and month of the year. Deviation.

Photovoltaic (PV) cells based on the principle of converting optical energy into electrical energy are used to convert solar energy into electrical energy. Systems using such PV cells can have a conversion efficiency between 10 and 20%.

Such solar cells are devices that utilize the photoelectric effect of converting light into electrical energy, and the PV cells provide power to satellite and space shuttles, provide electricity to residential and commercial properties, and provide automotive batteries and other navigational devices. It can be used for a wide range of applications such as filling.

However, in spite of this wide range of applications, theoretically, photovoltaic efficiency of silicon solar cells is the highest at 28%, and is currently limited at 22%.

Hereinafter, a brief description of a conventional solar cell with reference to the accompanying drawings.

In the conventional solar cell, as illustrated in FIG. 1, the second conductive semiconductor layer 12 serving as an emitter is stacked on the first conductive semiconductor layer 11 serving as a base, and the second conductive semiconductor layer 12 is stacked. A protective film 13, which is an antireflection film, is formed on the conductive semiconductor layer 12, and the first contact layer 14 is formed on both sides of the first conductive semiconductor layer 11, and the first conductive type is formed. The second contact layer 15 is formed on the bottom surface of the semiconductor layer 11. In addition, there is a driving battery 16 having both ends connected to the first and

second contact layers

14 and 15.

At this time, the first conductivity type is a P type impurity, and the second conductivity type is an N type impurity.

In the conventional solar cell as shown in FIG. 2, when sunlight is incident, electrons (−) and holes (+) activated in the first conductive semiconductor layer 11 and the second conductive semiconductor layer 12 are positive. ), Electrons (-) move to the second conductive semiconductor layer 12, holes (+) move to the first conductive semiconductor layer 11, and the first and second contact layers 14, respectively. 15, and enters the driving battery 16 through each contact layer. As such, electrons (−) and holes (+) enter the first and

second contact layers

14 and 15 so that electricity flows.

In the case of the conventional solar cell as described above, after texturing is formed on the first conductive semiconductor layer 11 composed of P-type impurities, the surface is doped with N-type impurities, and then the anode contact layer, that is, the first First and

second contact layers

14 and 15 are formed, and the driving battery 16 is mounted. A protective film and a reflective protective film are mounted on the second conductive semiconductor layer 11 to be used.

The conventional solar cell uses a method of maximizing the amount of incident light even if the electrode area is reduced by forming an electrode by digging a contact hole deeply in order to prevent the incident amount of sunlight from decreasing.

However, the conventional solar cell has a problem in that the incident light enters the reaction region in the PN junction region when the reaction distance is far and the recombination is large, the electrical extraction efficiency is reduced.

The present invention has been proposed to solve the problems according to the prior art, a solar cell and a method for manufacturing the same, which can increase the light utilization efficiency of the solar cell, and reduce the implementation and cost of the process by using the inkjet method. The purpose is to provide.

The solar cell of the present invention for achieving the above object is a first conductive semiconductor layer surface-treated; A first conductive high concentration semiconductor layer formed in a surface of the first conductive semiconductor layer; First and second oxide films formed on textured top and bottom surfaces of the first conductive semiconductor layer, respectively; A plurality of first trenches spaced apart from a rear surface of the first conductive semiconductor layer; A third oxide film formed on the upper side of the first trench; First and second conductive impurity regions formed in the first conductive semiconductor layer under the adjacent first trenches with different conductivity types; And first and second metal electrodes formed in the first trenches corresponding to the first and second conductive impurity regions, respectively.

In addition, the manufacturing method of the solar cell of the present invention having the above configuration comprises the steps of texturing the surface of the first conductive semiconductor layer; Forming a first conductive high concentration semiconductor layer on a surface of the first conductive semiconductor layer; Forming first and second oxide films on the top and bottom surfaces of the first conductive semiconductor layer, respectively; Forming a plurality of first trenches spaced apart from a rear surface of the first conductive semiconductor layer; Forming a third oxide film on a surface of the first trench; Removing the third oxide layer so that the bottom and bottom sides of the first trench are exposed; Forming first and second conductive impurity regions having different conductivity types in the first conductive semiconductor layer under the adjacent first trenches; The first and second metal electrodes may be formed in the first trenches corresponding to the first and second conductive impurity regions, respectively.

The solar cell and a method of manufacturing the same according to the present invention described above have the following effects.

First, a plurality of spaced trenches are formed on a substrate, that is, a back surface of the first conductive semiconductor layer to have a depth capable of forming a PN junction, and P-type and N-type junctions are formed below the spaced trenches to form PN. By reducing the area distance between the gaps and protecting the sidewalls of the trenches with an oxide film, it is possible to prevent the light efficiency from decreasing due to recombination, thereby maximizing the light efficiency of the solar cell.

Second, by texturing the substrate, that is, the surface of the first conductive semiconductor layer, it is possible to increase the light efficiency by replacing the anti-reflection film without conventional EVA.

Third, since the trench may be formed in a dot shape, the light efficiency may be increased, and the trench may be formed deeper by using dry etch. If the trench is formed deeper as described above, the pattern may be densely formed because the probability of forming the side doping material and the PN junction may be increased and the side diffusion may be reduced. In addition, by reducing the distance that the light is transmitted to reach the back surface junction, it is possible to increase the light efficiency without recombination (recombination).

Fourth, since the formation of the first and second conductive impurity regions and the first and second metal electrodes can be formed by an inkjet method, the implementation and the cost of the process can be reduced.

1 is a structural cross-sectional view of a solar cell according to the prior art.

2 is a view for explaining the flow of electricity of a conventional solar cell.

3 is a structural cross-sectional view of a solar cell according to an embodiment of the present invention.

4 is a view for explaining the flow of electricity of the solar cell according to an embodiment of the present invention.

5A through 5I are cross-sectional views illustrating a method of manufacturing a solar cell according to an exemplary embodiment of the present invention.

Hereinafter, the preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art may easily implement the technical idea of the present invention. .

Prior to describing an embodiment according to the present invention, the first conductivity type will be described as defined as P type, and the second conductivity type will be described as defined as N type.

First, as shown in FIG. 2, the solar cell according to the embodiment of the present invention includes a first conductive semiconductor layer 51 having a textured surface, and a surface of the first conductive semiconductor layer 51. The first conductive high concentration semiconductor layer 52 is formed therein, and the first and

second oxide films

53 and 54 are formed on the textured upper and rear surfaces of the first conductive semiconductor layer 51, respectively. A plurality of first trenches 55 spaced apart from each other may be formed on the rear surface of the first conductive semiconductor layer 51.

In this case, the first trenches 55 may be formed in the form of a plurality of dots spaced apart from each other at predetermined intervals, or may be formed in a line shape.

The third oxide layer is formed only on the upper side of the first trench 55 so that the lower and lower side surfaces of the first trench 55 are exposed.

The first conductive semiconductor layer 51 exposed to the lower portions of the adjacent first trenches 55 may have a first conductivity type impurity region 57a and a second conductivity type impurity region 58a having different conductivity types. This is formed adjacent to.

In this case, the first conductive impurity region 57a and the second conductive impurity region 58a are heavily doped, and the first conductive impurity region 57a is doped with boric acid (B 2 O 3) -based impurities. The second conductive impurity region 58a is doped with an impurity of the phosphoric acid (P 2 O 5) series.

The first and second

conductive droplets

57 and 58 having first and second

conductive droplets

57 and 58 formed thereon to prevent cross diffusion of the first and second

conductive impurity regions

57a and 58a into the adjacent first trench 55. In the trench 55, a capping material such as SOG may be further applied. In this way, if a capping material such as SOG is further applied, it is possible to prevent the doping of the side doping portion.

The first and second metals may be filled in the first trenches 55 corresponding to the first conductive impurity region 57a and the second conductive impurity region 58a, respectively.

Electrodes

59 and 60 are formed. The first and

second metal electrodes

59 and 60 serve as a plurality of contact layers for contact with the driving battery.

In the solar cell having the above-described configuration, when sunlight is incident, as shown in FIG. 4, electrons and holes are generated by photons, and holes (+) are formed in the first conductive impurity region 57a. ) Moves and electrons (-) move to the second conductive impurity region 58a. The moved holes (+) and electrons (-) are transferred to the driving battery 61 through the first and

second metal electrodes

59 and 60. By this flow, electricity flows to the solar cell.

Next, a method of manufacturing a solar cell according to an embodiment of the present invention having the above structure will be described.

In the method of manufacturing a solar cell according to an embodiment of the present invention, as illustrated in FIG. 5A, the surface of the first conductive semiconductor layer 51 serving as a substrate is textured to improve the efficiency of the solar cell. Process.

Texturing is to prevent the phenomenon of deterioration due to the optical loss caused by the reflection of light incident on the substrate surface of the solar cell, and to roughen the surface of the substrate used in the solar cell, that is, the uneven surface of the substrate To form a pattern of shapes. If the surface of the substrate is roughened by texturing, the light reflected once is reflected back to decrease the reflectance of the incident light, thereby increasing the amount of light trapped, thereby reducing the optical loss.

Next, as shown in FIG. 5B, the first conductive high concentration semiconductor layer 52 is formed by injecting a high concentration of the first conductive type impurity into the surface of the textured first conductive semiconductor layer 51.

In order to form a P-type solar cell, a high concentration of P + impurity, which is a first conductivity type impurity, is implanted. If an N-type solar cell is to be formed, it may be formed by implanting an N-type high concentration impurity.

Subsequently, as shown in FIG. 5C, a first oxide film 53 is formed on the textured upper surface by performing a double-sided thermal oxidation process, and a second oxide film 54 is formed on the rear surface of the first conductive semiconductor layer 51. To form.

Next, as shown in FIG. 5D, the second oxide film 54 and the first conductive semiconductor layer 51 on the back surface of the first conductive semiconductor layer 51 are sequentially formed using a photomask (not shown). Etching is performed to form a plurality of first trenches 55 spaced apart from each other.

In this case, the first trenches 55 may be formed in the form of a plurality of spaced apart dots, or may be formed in the form of a plurality of spaced apart lines.

Thereafter, as illustrated in FIG. 5E, a thermal oxidation process is performed on the structure to form a third oxide film 56 on the surface of the first trench 55.

Next, as shown in FIG. 5F, the structure is turned upside down so that the first trench 55 is brought up.

Subsequently, an oxide film removing solution is dropped into the first trench 55 by using an inkjet device to remove a portion of the third oxide film 56 formed on the surface of the first trench 55. Drops in the form of water droplets). In this process, the third oxide film 56 on the lower surface and the lower side of the first trench 55 is removed, and the first conductive semiconductor layer 51 on the lower surface and the lower side of the first trench 55 is exposed. do.

At this time, a hydrofluoric acid (HF) -containing solution may be used as the oxide film removal solution.

Next, as shown in FIG. 5G, the first conductive droplet 57 and the second conductive droplet 57 may be disposed on the exposed first conductive semiconductor layer 51 of the first trench 55 spaced apart from each other. 58) drop.

At this time, when the first trench 55 is formed in a dot shape, droplets of different conductivity types are dropped between the first trenches 55 that are adjacent in all directions. Also, even when the first trench 55 is formed in a line shape, droplets of different conductivity types are dropped in the adjacent first trenches 55.

In this case, the first conductive droplet 57 mainly uses boric acid (B 2 O 3) series as a P-type droplet, and the second conductive droplet 58 mainly uses phosphoric acid (P 2 O 5) series as an N-type droplet.

Subsequently, as illustrated in FIG. 5H, a diffusion process is performed on the first conductive droplets 57 and the second conductive droplets 58 dropped on the spaced apart first trenches 55. Thus, the first conductive impurity region 57a and the second conductive impurity region 58a spaced apart from the first conductive semiconductor layer 51 in contact with the first trenches 55 are formed. At this time, the first conductive impurity region 57a and the second conductive impurity region 58a are heavily doped.

In this case, a capping material such as SOG is further applied to the first trench 55 in which the first and second

conductive droplets

57 and 58 are formed to prevent cross diffusion into the adjacent first trench 55. You can also

Next, as illustrated in FIG. 5I, a liquefied metal material, that is, a metal liquid, is formed in the first trench 55 corresponding to a region where the first conductive impurity region 57a and the second conductive impurity region 58a are formed. Drop the enemy. In this process, first and

second metal electrodes

59 and 60 are formed to fill the spaced inside of the first trench 55, respectively.

In the solar cell of the present invention having the above-described configuration and manufacturing method, a plurality of first trenches 55 spaced apart from each other are formed on the rear surface of the first conductive semiconductor layer 51 to have a depth capable of forming a PN junction. P-type and N-type junctions are formed below the first trench 55 spaced apart to reduce the area distance between the PNs, and the sidewalls of the first trench 55 are protected by the third oxide layer 56 to be recombined. Therefore, the light efficiency can be prevented from being reduced, thereby maximizing the light efficiency.

In addition, by texturing the surface of the first conductive semiconductor layer 51, it is possible to increase the light efficiency of the solar cell by replacing the anti-reflection film without conventional EVA.

In addition, since the first trench 55 may be formed in a dot shape, light efficiency may be increased, and the first trench 55 may be formed deeper by using a dry etch. If the first trench is formed deeper as described above, the pattern may be densely formed because the probability of forming the side doping material and the PN junction may be increased and the side diffusion may be reduced. In addition, by reducing the distance that the light is transmitted to reach the back surface junction, it is possible to increase the light efficiency without recombination (recombination). Then, the position of the pattern and the depth of the trench are determined so that each metal contact is within the average charge movement distance in the wafer (carrier life time), so that the metal contact can be etched to 1/2 of the wafer thickness.

Although the technical idea of the present invention has been described in detail according to the above-described preferred embodiment, the above-described embodiment is for the purpose of description and not of limitation. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical idea of the present invention. Accordingly, the scope of the invention should be defined by the claims rather than by the examples described.

* Explanation of symbols for the main parts of the drawings

51: first conductive semiconductor layer 52: first conductive semiconductor layer

53: first oxide film 54: second oxide film

55: first trench 56: third oxide film

57: first conductive droplet 58: second conductive droplet

57a: first conductive impurity region 58a: second conductive impurity region

59: first metal electrode 60: second metal electrode

Claims

A first conductive semiconductor layer whose surface is textured;

A first conductive high concentration semiconductor layer formed in a surface of the first conductive semiconductor layer;

First and second oxide films formed on textured top and bottom surfaces of the first conductive semiconductor layer, respectively;

A plurality of first trenches spaced apart from a rear surface of the first conductive semiconductor layer;

A third oxide film formed on the upper side of the first trench;

First and second conductive impurity regions formed in the first conductive semiconductor layer under the adjacent first trenches with different conductivity types;

And a first and a second metal electrode formed in each of the first trenches corresponding to the first and second conductive impurity regions.
The method of claim 1,

The first trench is a solar cell, characterized in that formed in a plurality of dots (dot) shape or a line shape spaced apart at a predetermined interval.
Texturing the surface of the first conductive semiconductor layer;

Forming a first conductive high concentration semiconductor layer on a surface of the first conductive semiconductor layer;

Forming first and second oxide films on the top and bottom surfaces of the first conductive semiconductor layer, respectively;

Forming a plurality of first trenches spaced apart from a rear surface of the first conductive semiconductor layer;

Forming a third oxide film on a surface of the first trench;

Removing the third oxide layer so that the bottom and bottom sides of the first trench are exposed;

Forming first and second conductive impurity regions having different conductivity types in the first conductive semiconductor layer under the adjacent first trenches;

And forming first and second metal electrodes in the first trenches corresponding to the first and second conductive impurity regions, respectively.
The method of claim 3,

The first trenches are formed in a plurality of dot (dot) shape or a plurality of line (line) shape manufacturing method of a solar cell, characterized in that.
The method of claim 3,

Removing the third oxide film on the lower surface and the lower side of the first trench,

The method of manufacturing a solar cell, characterized in that to proceed by dropping the oxide film removal solution in the form of droplets using an inkjet device in the first trench.
The method of claim 5,

A method of manufacturing a solar cell, wherein a solution containing hydrofluoric acid (HF) is used as the oxide film removal solution.
The method of claim 3,

Formation of the first and second conductive impurity regions is

And dropping first and second conductive droplets on the exposed first conductive semiconductor layer, respectively, of the first trenches spaced apart from each other, followed by a diffusion process.
The method of claim 7, wherein

The first conductive droplet uses a high concentration of boric acid (B2O3) based impurities, and the second conductive droplet uses a high concentration of phosphoric acid (P2O5) based impurities.
The method of claim 3,

The first and second metal electrodes are formed by dropping metal droplets in the first trenches corresponding to the first and second conductive impurity regions.