WO2012063882A1 - ウェハーレンズの製造方法 - Google Patents
ウェハーレンズの製造方法 Download PDFInfo
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- WO2012063882A1 WO2012063882A1 PCT/JP2011/075869 JP2011075869W WO2012063882A1 WO 2012063882 A1 WO2012063882 A1 WO 2012063882A1 JP 2011075869 W JP2011075869 W JP 2011075869W WO 2012063882 A1 WO2012063882 A1 WO 2012063882A1
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- WIPO (PCT)
- Prior art keywords
- mold
- substrate
- release
- wafer lens
- molds
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0073—Optical laminates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0888—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using transparant moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/02—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C39/10—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. casting around inserts or for coating articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00038—Production of contact lenses
- B29D11/00125—Auxiliary operations, e.g. removing oxygen from the mould, conveying moulds from a storage to the production line in an inert atmosphere
- B29D11/00192—Demoulding, e.g. separating lenses from mould halves
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00009—Production of simple or compound lenses
- B29D11/00278—Lenticular sheets
- B29D11/00307—Producing lens wafers
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0037—Arrays characterized by the distribution or form of lenses
- G02B3/0056—Arrays characterized by the distribution or form of lenses arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C35/00—Heating, cooling or curing, e.g. crosslinking or vulcanising; Apparatus therefor
- B29C35/02—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould
- B29C35/08—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation
- B29C35/0805—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation
- B29C2035/0827—Heating or curing, e.g. crosslinking or vulcanizing during moulding, e.g. in a mould by wave energy or particle radiation using electromagnetic radiation using UV radiation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
- B29L2011/00—Optical elements, e.g. lenses, prisms
Definitions
- the present invention relates to a method for manufacturing a wafer lens, and more particularly to a method for manufacturing a wafer lens for use in an imaging lens or the like.
- a liquid resin is sandwiched between a mold and a wafer, the resin is cured with UV or the like, and then the substrate (wafer) is released from the mold to obtain a large number of two-dimensional arrays.
- Some obtain a wafer lens to which an optical surface is transferred see, for example, Patent Documents 1 and 2).
- Such a wafer lens is usually formed by transferring twice, and a large number of lens surfaces are formed on the upper and lower surfaces of the substrate.
- the present invention provides a wafer lens manufacturing method capable of easily and accurately forming an optical surface while preventing the substrate from being damaged by mold release when forming an optical surface such as a lens surface on both surfaces of the substrate.
- the purpose is to provide.
- a method for manufacturing a wafer lens according to the present invention includes a substrate, a first molding surface formed of resin above the first substrate surface of the substrate and including a plurality of first optical surfaces, A method for manufacturing a wafer lens having a second molding surface formed of a resin above two substrate surfaces and including a plurality of second optical surfaces, wherein the first mold corresponds to the first substrate surface and the first molding surface. A first step of applying a resin to any one of the mold surfaces and molding the first molding surface by the first mold; and a second mold corresponding to the second substrate surface and the second molding surface.
- release of the second molding surface from the second mold is started before the first molding surface is completely released from the first mold.
- the cured resin that forms the optical surface adheres very firmly to the mold surface, so it cannot withstand the mold release force and deforms into a substrate. It will cause damage.
- a release force peeleling force
- a force for releasing each mold from each molding surface can be simultaneously applied to the first and second molding surfaces of the substrate, that is, both surfaces. For this reason, the balance of force is improved, and a biased force is hardly applied to one or the other surface of the substrate.
- the degree of freedom in design can be increased, and the product can be downsized and a wafer lens having a high-performance optical surface can be manufactured.
- the first and second molding surfaces are released in a state where the portions that have not been released remain, the optical surface on the opposite side of the molding surface to be released is maintained with high accuracy.
- a holding member for holding and protecting the optical surface or the like is not necessary. Thereby, it is not necessary to separately provide a process for protecting the optical surface on the opposite side at the time of mold release, and a highly accurate wafer lens can be manufactured easily and efficiently.
- the method for manufacturing a wafer lens in the method for manufacturing a wafer lens, at least a part of the third step and the fourth step are advanced in parallel.
- the distribution of the release force applied to the substrate can be evenly distributed to the first and second molding surfaces, and the force applied to the substrate is reduced and a thin substrate is adopted. It becomes possible to do.
- the completion of mold release of the second mold is after completion of mold release of the first mold.
- the release from the first mold and the release from the second mold are performed at different timings.
- the period from the start to the completion of the third process is substantially equal to the period from the start to the completion of the fourth process.
- the first and second molding surfaces are released at substantially the same timing, and can be efficiently released with less damage that does not affect the product, and a thinner substrate can be used. It becomes possible.
- the first and second molds have mold locking portions at a plurality of locations on the outer periphery on the substrate side, respectively, and in the third and fourth steps, the first and second molds are provided.
- a mold release member provided in association with the mold is brought into contact with at least a part of the mold locking portion, and the mold locking portion is displaced in a direction away from the substrate via the mold release member.
- the first and second molds are released from the first and second molding surfaces, respectively.
- the mold release process can be performed little by little from the periphery of the substrate toward the center, and the mold release can be completed without applying excessive force.
- the mold locking portion of the first mold and the mold locking portion of the second mold are opposed to each other with the substrate (including the extended plane of the substrate) interposed therebetween, and And it inclines so that it may each space apart from a board
- the first and second molds have a chamfered shape on the outer peripheral substrate side, and the structure of the mold can be simplified while securing the mold release workability. .
- the mold release member has a mold release locking portion that is in contact with the mold lock portions of the first and second molds and transmits force.
- the release force is transmitted through the surface, and the release can be performed efficiently.
- the mold locking portion is a mold inclined portion having an inclined contact surface
- the mold locking portion is a mold inclined portion having an inclined contact surface
- the inclined contact surface is The force for mold release is transmitted through.
- At least one of the mold locking part and the mold release locking part is arranged at equal intervals on the outer circumferences of the first and second molds.
- the mold locking portion can be disposed on the entire periphery along the outer periphery of the mold.
- the release member can be easily and precisely controlled by arranging the release member around the periphery in a balanced manner.
- At least one of the mold locking portion and the mold release locking portion is arranged over the entire circumference along the outer circumferences of the first and second molds. In this case, it is possible to perform the mold release without causing damage even if the substrate is thin by performing the mold release in small steps.
- the locations where the opposing mold locking portions of the first and second molds are separated are sequentially moved along the outer peripheries of the first and second molds.
- the mold release can be sequentially advanced along the outer periphery, and the local concentration of the release force applied to the substrate can be reduced.
- the substrate is held by a plurality of substrate holding members provided on the outer periphery of the substrate in the third and fourth steps.
- the substrate is supported from multiple directions, it is possible to prevent the substrate from being greatly displaced by being caught by one of the molds at the time of release, and the substrate is stably supported between both molds after release. can do.
- the substrate holding member is provided corresponding to at least one of the mold locking portion and the mold release locking portion.
- the substrate is made of glass. In this case, the strength of the substrate can be maintained even when the substrate is relatively thin.
- the resin is a photocurable resin
- the first and second molds are made of glass.
- the photocurable resin can be efficiently cured by forming the first and second molds with glass.
- FIG. 1A is a plan view of the wafer lens
- FIG. 1B is a cross-sectional view of the wafer lens shown in FIG. 1A taken along the line AA
- FIG. It is an expanded sectional view of the imaging lens unit cut out from the wafer lens shown to A).
- FIG. 2A is a conceptual diagram of a cross section for explaining a molding apparatus used for manufacturing the wafer lens of the first embodiment
- FIG. 2B is a conceptual diagram of a plane of the first mold or the like.
- FIG. 3A to FIG. 3F are diagrams for explaining the manufacturing process of the wafer lens.
- FIG. 4A is a view for explaining the relationship between the displacement amount of the first and second molds and time in the first embodiment
- FIG. 4B is the first and second mold release.
- FIG. 5A is a diagram for explaining the relationship between the displacement amount of the first and second molds and time in the second embodiment
- FIGS. 5B and 5C are FIGS.
- FIG. 7A is a cross-sectional view illustrating a molding apparatus according to another modification
- FIG. 7B is a cross-sectional view illustrating a molding apparatus according to still another modification.
- the wafer lens 100 has a disc shape and includes a substrate 101, a first lens array layer 102, and a second lens array layer 103.
- the first and second lens array layers 102 and 103 are bonded to the substrate 101 in alignment with each other with respect to translation in the XY plane perpendicular to the axis AX and rotation around the axis AX.
- the substrate 101 of the wafer lens 100 is a circular flat plate extending along the XY plane, and is formed of glass.
- the outer diameter of the substrate 101 is slightly larger than the outer diameters of the first and second lens array layers 102 and 103.
- the outer peripheral portion 101a exposed or protruded from the first and second lens array layers 102 and 103 is a support margin for supporting the substrate 101 during manufacturing of the wafer lens 100 (an extra portion for support). It becomes.
- the thickness of the substrate 101 is basically determined by optical specifications, but is such a thickness that the wafer lens 100 is not damaged when the wafer lens 100 is released. Specifically, the thickness of the substrate 101 is, for example, not less than 0.25 mm and not more than 1 mm.
- the first lens array layer 102 is made of resin and is formed on one surface 101 b of the substrate 101.
- the first lens array layer 102 has a circular outer shape in a plan view, and two-dimensionally includes a number of first lens elements 11 including the first lens body 11a and the first flange portion 11b as a set in the XY plane. Are arranged. These first lens elements 11 are integrally molded through a flat connecting portion 11c.
- the combined surface of each first lens element 11 and the connecting portion 11c is a first molding surface 102a that is collectively molded by transfer.
- the first lens body 11a is, for example, an aspherical lens unit, and has a first optical surface 11d.
- the surrounding first flange portion 11b has an annular flat first flange surface 11g extending around the first optical surface 11d, and the outer periphery of the first flange portion 11b is also a connecting portion 11c.
- the first flange surface 11g is disposed in parallel to the XY plane perpendicular to the optical axis OA.
- the second lens array layer 103 is made of resin and is formed on the other surface 101c of the substrate 101.
- the second lens array layer 103 has a circular outer shape in a plan view, and two-dimensionally includes a plurality of second lens elements 12 each including the second lens body 12a and the second flange portion 12b in the XY plane. Are arranged. These second lens elements 12 are integrally molded via a flat connecting portion 12c.
- the combined surface of each second lens element 12 and the connecting portion 12c is a second molding surface 103a that is collectively molded by transfer.
- the second lens body 12a is, for example, an aspherical lens unit, and has a second optical surface 12d.
- the surrounding second flange portion 12b has an annular flat second flange surface 12g extending around the second optical surface 12d, and the outer periphery of the second flange portion 12b is also a connecting portion 12c.
- the second flange surface 12g is disposed in parallel to the XY plane perpendicular to the optical axis OA.
- the resin material used for forming the first and second lens array layers 102 and 103 is, for example, a photocurable resin or a thermosetting resin.
- the photocurable resin for forming the first and second lens array layers 102 and 103 include acrylic resin, allyl resin, epoxy resin, and fluorine resin, and the first and second lenses.
- the thermosetting resin for forming the array layers 102 and 103 include a fluorine resin and a silicone resin.
- the wafer lens 100 is finally cut out by dicing and becomes a compound lens 10 shown in FIG.
- the dotted line LD in FIG. 1A showing the wafer lens 100 before cutting out indicates the outer edge of a large number of compound lenses 10 arranged at the lattice points, and the boundary line of each compound lens 10 is shown.
- the outside of the sandwiched compound lens 10 becomes the connecting portions 11c and 12c.
- the compound lens 10 is a quadrangular prism-like member, and has a quadrangular outline when viewed from the optical axis OA direction.
- the compound lens 10 includes the first lens element 11, the second lens element 12, and the flat plate portion 13 sandwiched therebetween.
- the flat plate portion 13 is a portion obtained by cutting out the substrate 101.
- the compound lens 10 is housed in a separately prepared holder, for example, alone or in combination with another lens, and is bonded to the imaging circuit board as an imaging lens.
- the first lens body 11 a is provided in the central portion around the optical axis OA of the compound lens 10 and has a circular outline.
- the first flange portion 11b extends around the first lens body 11a and has a rectangular outline.
- the second lens body 12 a is provided in the central portion around the optical axis OA of the compound lens 10 and has a circular outline.
- the second flange portion 12b extends around the second lens body 12a and has a square contour.
- a diaphragm having an appropriate aperture diameter may be provided between the substrate 101 and the first lens array layer 102 or between the substrate 101 and the second lens array layer 103.
- the aperture of the diaphragm is arranged in alignment with each of the first and second lens bodies 11a and 12a.
- the lens manufacturing apparatus includes a molding device 140 (only the molding die 40 is specifically illustrated) and a mold release device 200.
- the lens manufacturing apparatus is an apparatus for cast molding in which a fluid resin is poured into a molding die 40, solidified and molded, and the wafer lens 100 shown in FIG. 1 (A) or the like can be manufactured. .
- molding apparatus 140 is a mold raising / lowering apparatus for making the shaping
- die 40 which is main members among lens manufacturing apparatuses.
- the molding die 40 moves in the lens manufacturing apparatus, and a part thereof also functions as the mold release device 200.
- a mold release apparatus 200 shown in FIGS. 2 (A) and 2 (B) is for taking out the wafer lens 100 from the mold 40, and includes a release apparatus 50 and a support apparatus 60. And a control drive device 90.
- the molding die 40 includes a first die 41 for molding the first molding surface 102a of the wafer lens 100, and a second molding of the wafer lens 100.
- the first lens array layer 102 and the second lens array layer 103 are sequentially formed on both surfaces 101b and 101c of the substrate 101, and when releasing, the first mold 41 is the substrate 101 as shown in FIG.
- the second mold 42 is placed in close contact with the other surface 101c on the lower side of the substrate 101. That is, the first mold and the second mold 42 are released synchronously, and the first mold 41 and the second mold 42 are opposed to each other through the substrate 101 immediately before and after the release. Be placed.
- the plan view of the second mold 42 is the same as the first mold 41 shown in FIG.
- the first mold 41 is made of light-transmitting glass and has a thick disk-shaped outer shape.
- the first mold 41 has a first transfer surface 41 b corresponding to the first molding surface 102 a of the first lens array layer 102 on the end surface 41 a on the substrate 101 side in the direction in which the mold release device 200 releases. That is, a plurality of first transfer surfaces 41b are formed on the end surface 41a.
- the first transfer surface 41b includes a first optical surface transfer surface 41c for forming the first optical surface 11d of the first molding surface 102a and a first flange surface transfer surface 41d for forming the first flange surface 11g. Including.
- the first mold 41 has four mold inclined portions 41f arranged at equal intervals on the outer periphery 41e on the substrate 101 side as mold locking portions. That is, these mold inclined portions (mold locking portions) 41f are arranged at positions divided by 90 ° around the axis CX1 of the first mold 41.
- the mold inclined portion 41f can be brought into contact with and locked with a first release member 51 attached to the first mold 41 side in a release device 50 to be described later.
- the first mold 41 is displaced upward in response to the force.
- the second mold 42 is made of light-transmitting glass and has a thick disk-shaped outer shape.
- the second mold 42 has a second transfer surface 42 b corresponding to the second molding surface 103 a of the second lens array layer 103 on the end surface 42 a on the substrate 101 side.
- the second transfer surface 42b includes a second optical surface transfer surface 42c for forming the second optical surface 12d of the second molding surface 103a and a second flange surface transfer surface 42d for forming the second flange surface 12g. Including.
- the second mold 42 has four mold inclined portions 42f arranged at equal intervals on the outer periphery 42e on the substrate 101 side as mold locking portions. That is, these mold inclined parts (mold locking parts) 42f are arranged at positions divided by 90 ° around the axis CX2 of the second mold 42.
- the mold inclined portion 42f can be brought into contact with and locked with a second release member 52 attached to the second mold 42 side of the release device 50, and the force from the second release member 52 is applied. In response, the second mold 42 is displaced downward.
- the mold inclined portion 41f of the first mold 41 and the mold inclined portion 42f of the second mold 42 are opposed to each other with the substrate 101 interposed therebetween, and on the outside in the diameter direction of the first and second molds 41 and 42. It inclines so that it may each space apart from the board
- a total of four mold release devices 50 are provided, and are arranged at four locations on the outer circumference 41e, 42e side of the first and second molds 41, 42 corresponding to the pair of mold inclined portions 41f, 42f. ing. As a result, the four release devices 50 are arranged at equal intervals with respect to the outer peripheries 41e and 42e of the first and second molds 41 and 42.
- Each release device 50 includes a first release member 51, a second release member 52, a drive guide member 53, and a motor 54.
- the first and second mold release members 51 and 52 are provided in pairs on the first mold 41 side and the second mold 42 side, respectively.
- Each first release member 51 has a release inclined portion 51a that is in contact with the mold inclined portion 41f of the first mold 41 as a release locking portion.
- the inclined surface 41g of the mold inclined portion (die locking portion) 41f that is inclined with respect to the axis AX or the axis CX1 and the release inclined portion (release locking portion) 51a are similarly inclined.
- the smooth abutment surface 51b is slidably abutted.
- Each of the second release members 52 has a release inclined portion 52a that is in contact with the mold inclined portion 42f of the second mold 42 as a release locking portion.
- the smooth contact surface 42g inclined with respect to the axis AX or the axis CX2 of the mold inclined part (mold locking part) 42f and the release inclined part (release locking part) 52a are similarly inclined.
- the smooth abutment surface 52b is slidably abutted.
- Screw holes 51c and 52c for guiding the drive guide member 53 are provided on the outer sides of the release members 51 and 52, respectively. In the screw holes 51c and 52c, screw grooves corresponding to the screw threads of the drive guide member 53 are formed.
- the drive guide member 53 is a rod-shaped member in which two screws in opposite directions are connected in series. On the center side, the drive guide member 53 is inserted through the screw holes 51c and 52c of the pair of first and second release members 51 and 52. The first and second release members 51 and 52 are supported to be displaceable. A rotating shaft of a motor 54 that rotates the driving guide member 53 about its axis is connected to both ends of the driving guide member 53. On the main body 53a of the drive guide member 53, thread threads 53b and 53c are formed at equal pitches on the first mold 41 side and the second mold 42 side, but in opposite directions, with the center of the main body 53a as a boundary. Has been.
- the thread 53b on the first mold 41 side is screwed into the thread groove of the screw hole 51c of the first release member 51, and the first release member 51 is moved upward, that is, in the C direction by clockwise rotation.
- the thread 53c on the second mold 42 side is screwed into the thread groove of the screw hole 52c of the second mold release member 52, and the second mold release member 52 is moved downward, that is, in the D direction by clockwise rotation.
- the motor 54 displaces the first and second release members 51 and 52 through the drive guide member 53 at the same speed and step amount in opposite directions.
- the displacement of the first and second release members 51 and 52 can be adjusted by adjusting the rotation speed and the rotation speed of the motor 54.
- the control drive device 90 shown in FIG. 2B can individually adjust the rotation speed and rotation speed of each motor 54.
- the support device 60 is provided in a total of four, and is arranged at four positions at positions corresponding to the release device 50 on the outer peripheral side of the substrate 101 so as not to interfere with the release device 50.
- the support devices 60 are arranged at equal intervals with respect to the outer periphery of the substrate 101, and support the substrate 101 from the periphery in a balanced manner.
- the support device 60 includes a support member 61 and a chuck member 62.
- the support member 61 is provided with a recess 61 b on a side surface 61 a on the substrate 101 side.
- the support member 61 reliably supports the substrate 101 from the periphery by fitting a part of the outer peripheral portion 101a of the substrate 101 into the recess 61b.
- the chuck member 62 is provided at two locations so as to grip the portions of the support member 61 that are exposed or protruded laterally from the first and second molds 41 and 42 from above and below. It has been.
- the chuck member 62 is supported in a hollow state by a support body (not shown) so as not to interfere with the mold release device 50.
- the chuck member 62 holds the support member 61 in an operating state, and stably fixes the substrate 101 via the support member 61.
- the chuck member 62 cancels the holding of the support member 61 in a non-operating state and moves backward to enable the substrate 101 and the like to be carried in and out.
- the mold release device 50 and the support device 60 are provided on the same line in the diameter direction of the first and second molds 41 and 42, but are provided on different lines. May be.
- the control driving device 90 is used for releasing the first lens 41 and the second die 42 for releasing the wafer lens 100, and for releasing the mold such as the operation of the releasing device 50 and the operation of the supporting device 60.
- the entire mold apparatus 200 is controlled.
- the first and second molds 41 and 42 driven by the control drive device 90 are movable in the vertical CD direction (see FIG. 2A) and are leveled by a transport device (not shown). It can be conveyed in the AB direction and the vertical CD direction.
- the manufacturing process of the wafer lens 100 shown in FIG. 1 (A) and the like will be described with reference to FIGS. 3 (A) to 3 (F).
- the manufacturing process of the wafer lens 100 is roughly performed by applying a resin to the substrate 101 and molding (molding process), and releasing the molded wafer lens 100 from the first and second molds 41 and 42. Process (mold release process).
- the molding process is performed by operating a mold lifting device, a resin coating device, and a UV light generator (not shown) while using the first and second molds 41 and 42.
- the first lens array layer 102 is formed on one surface 101b of the substrate 101.
- the outer peripheral portion 101a of the substrate 101 is fixed in advance by a substrate holder 71 associated with the molding die 40.
- the substrate 101 is placed on the stage SS, and the other surface 101c serving as a lower surface is brought into close contact with the upper surface of the stage SS, so that the warpage of the substrate 101 is prevented.
- the resin coating apparatus is operated to apply the resin onto one surface 101b which is the upper surface of the substrate 101 fixed on the stage SS.
- the mold lifting / lowering device is operated, and the first mold 41 is lowered toward the substrate 101 coated with resin in a state where the first mold 41 is aligned with the stage SS or the like.
- a mold holder 72 protruding downward is attached in advance to the outer periphery 41 e of the first mold 41, and the substrate 101 and the substrate 101 are in contact with the end surface 72 a of the mold holder 72 and the end surface 71 a of the substrate holder 71.
- the thickness of the resin between the first mold 41 that is, the thickness of the connecting portion 11c (first flange portion 11b) of the first lens array layer 102 is defined.
- the UV light generator is operated to irradiate UV light from the upper side of the first mold 41, and the resin sandwiched between the one surface 101b of the substrate 101 and the end surface 41a of the first mold 41 is solidified.
- the second lens array layer 103 is formed on the other surface 101 c of the substrate 101.
- the mold lifting device is operated to invert the substrate 101 and the first mold 41 in an integrated state through the first lens array layer 102, and the other side of the substrate 101. Are fixed so that the surface 101c is on the upper side.
- the outer periphery of the substrate 101 and the first mold 41 is fixed by the substrate holder 71 and the mold holder 72, respectively.
- the resin coating apparatus is operated to apply the resin onto the other surface 101c of the fixed substrate 101.
- the mold lifting device is operated, and the second mold 42 is lowered toward the substrate 101 coated with the resin in a state where the second mold 42 is aligned with the first mold 41 and the like.
- a mold holder 73 protruding downward is attached in advance to the outer periphery 42e of the second mold 42, and the mold holder 73 is in a state where the end surface 73a of the mold holder 73 and the end surface 71b of the substrate holder 71 are in contact with each other.
- 73 or the like defines the resin thickness between the substrate 101 and the second mold 42, that is, the thickness of the connecting portion 12 c (second flange portion 12 b) of the second lens array layer 103.
- the UV light generator is operated to irradiate UV light from the upper side of the second mold 42, and the resin sandwiched between the other surface 101 c of the substrate 101 and the end surface 42 a of the second mold 42 is solidified.
- the substrate holder 71, the gold mold 41 and 42 are transferred from the substrate 101 and the first and second molds 41 and 42.
- the mold holders 72 and 73 are removed.
- the mold release step is performed by operating the mold release device 50 and the support device 60.
- the step of releasing the first lens array layer 102 from the first mold 41 and the step of releasing the second lens array layer 103 from the second mold 42 are performed substantially simultaneously in parallel. .
- the outer peripheral portion 101 a of the substrate 101 after the substrate holder 71 is removed is fitted into the recess 61 b of the support member 61 of the support device 60.
- the substrate 101 is securely fixed to the support device 60 by the support member 61 and the chuck member 62 (see FIG. 2B).
- the mold inclined portions 41f and 42f of the first and second molds 41 and 42 after the mold holders 72 and 73 are removed are a pair of first and second mold release parts of the mold release device 50 sandwiched between them.
- the members 51 and 52 are moved away from each other.
- the end surfaces of the release inclined portions 51 a and 52 a provided on the pair of first and second release members 51 and 52 are formed in advance with the mold inclined portion 41 f of the first mold 41 and the mold of the second mold 42. It arrange
- the contact surfaces 41g and 42g of the mold inclined portions 41f and 42f and the contact surfaces 51b and 52b of the mold release inclined portions 51a and 52a come into contact with each other, and all the mold inclined portions 41f and 42f are separated from each other.
- the mold inclined portions 51a and 52a are locked to each other with a biasing force of a predetermined value or less.
- the control drive device 90 (see FIGS. 2 (A) and 2 (B)) is operated, and the first and second separations are performed via the motor 54 and the drive guide member 53.
- the mold members 51 and 52 are gradually displaced away from each other.
- the motors 54 at four locations T1, T2, T3, and T4 are sequentially rotated one by one, and the pair of first and second release members 51 and 52 at any one location are separated at the same distance by substantially the same distance.
- the distance to be displaced at one time is a release force (peeling force) generated when releasing the substrate 101 from the first and second molds 41 and 42. The distance is such that the influence on the substrate 101 is minimized.
- one displacement at one place is 1 mm.
- the timing for starting the mold release drive in the first mold 41 start point s1 in FIG. 4A
- the mold release in the second mold 42 are performed.
- the timing at which the mold driving is started starts point s2 in FIG. 4A
- FIG. 4 (B) after the pair of release members 51 and 52 provided at the first location T1 are slightly displaced (see the operation in FIG. 4 (B)), the adjacent second members
- the pair of release members 51 and 52 provided at the two locations T2, the third location T3, and the fourth location T4 are sequentially displaced by the same distance (see the operation in FIG. 4B).
- the pair of release members 51, 52 at the first to fourth locations T1, T2, T3, T4 provided along the contours of the first and second molds 41, 42 are set at the start t1, t2. , T3, and t4 start separation to start separation, and sequentially separate along the outer peripheries 41e and 42e of the first and second molds 41 and 42.
- Such a series of operations corresponds to one round of a displacement operation cycle or a separation operation cycle in which the pair of release members 51 and 52 are gradually separated.
- the first and second mold release members 51 and 52 are displaced in the vertical direction along with the mutual separation, and the first and second molds 41 and 42 via the contact surfaces 51b and 52b. The release force is transmitted to.
- the release forces transmitted to the first and second molds 41, 42 become substantially equal, and the first The first and second lens array layers 102 and 103 are stably released from the first and second molds 41 and 42.
- each pair of release members 51, 52 provided along the contours of the first and second molds 41, 42 (first, second, When the third and fourth locations T1, T2, T3, and T4) are sequentially separated in an arrangement along the outer peripheries 41e and 42e of the first and second molds 41 and 42, at the end e1, FIG.
- the wafer lens 100 is finally completely released from the first and second molds 41 and 42.
- the number of times each pair of release members 51 and 52 is displaced is determined by the size, material, and the like of the substrate 101, the first and second lens array layers 102 and 103, and the first and second molds 41 and 42.
- the displacement operation cycle is performed once, and the substrate 101, the first and second molds are performed.
- the displacement operation cycle is performed two to three times.
- the displacement amount of the solid line shown in FIG. 4A is the position where the first or second mold 41, 42 is located from the initial reference point, for example, the first or second separation of the first position T1.
- the relative movement distance in the vertical direction (CD direction) of the outer periphery in the vicinity of the mold members 51 and 52 is shown, and the amount of displacement of the dotted line is the vertical direction (CD in the center of the first or second mold 41 or 42 from the reference point.
- Direction relative movement distance.
- the displacement amount shown in FIG. 4B indicates the relative movement distance of the first and second release members 51 and 52 from the reference point.
- the entire first or second mold 41, 42 moves with a constant displacement amount for each round of the displacement operation cycle in which the four release members 51, 52 are released.
- the wafer lens 100 manufactured by the above method is cut out by dicing into a quadrangular prism with reference to the dotted line shown in FIG. 1 (A), and becomes the compound lens 10 shown in FIG. 1 (C).
- the second molding surface 103a is released from the second mold 42 before the first molding surface 102a is completely released from the first mold 41. Since the mold release force, which is the force for releasing the molds 41 and 42 from the molding surfaces 102a and 103a, is simultaneously applied to the first and second molding surfaces 102a and 103a side of the substrate 101, that is, both surface sides. The balance of force is improved, and a biased force is hardly applied to one surface 101b or the other surface 101c of the substrate 101. Thereby, even if the substrate 101 is relatively thin, the substrate 101 can be prevented from being damaged at the time of release.
- the mold release force which is the force for releasing the molds 41 and 42 from the molding surfaces 102a and 103a
- the degree of freedom in design can be increased, and the product can be downsized and the wafer lens 100 having the first and second optical surfaces 11d and 12d with high performance can be manufactured. can do.
- the molds are released in a state where the portions that have not been released remain, so that the first and second molding surfaces 102a and 103a on the opposite sides of the first and second molding surfaces 102a and 103a are released.
- the second and first optical surfaces 12d and 11d are maintained in a state of being accurately maintained, and a holding member for holding and protecting the first and second optical surfaces 11d and 12d becomes unnecessary. Thereby, there is no need to separately provide a step for protecting the first and second optical surfaces 11d and 12d on the opposite side at the time of mold release, and the accurate wafer lens 100 can be manufactured easily and efficiently.
- the wafer lens manufacturing method according to the second embodiment is a modification of the wafer lens manufacturing method according to the first embodiment, and parts not specifically described are the same as those in the first embodiment.
- the mold release with the second mold 42 is started (FIG. 5).
- start point s2 start point s2).
- the first release member 51 is displaced before the second release member 52.
- die 42 side is delayed and released rather than the 1st metal mold
- the group of release members 51 and 52 sequentially move in the first to fourth locations T1 to T4 on the outer periphery of the first and second molds 41 and 42, and the displacement by the release members 51 and 52 is performed. The operation cycle is repeated.
- the wafer lens manufacturing method according to the present embodiment has been described above, but the wafer lens manufacturing method according to the present invention is not limited to the above.
- the shapes and sizes of the first and second optical surfaces 11d and 12d can be changed as appropriate according to the application and function.
- the wafer lens 100 does not have to be disk-shaped and can have various contours such as an ellipse.
- the dicing process can be simplified by forming the wafer lens 100 into a square plate shape from the beginning.
- the number of the first and second lens elements 11 and 12 formed in the wafer lens 100 is not limited to four as shown in the figure, but two or more (for example, several tens to several thousand or more). There can be multiple.
- the arrangement of the first and second lens elements 11 and 12 is preferably on a lattice point for convenience of dicing.
- the interval between the adjacent first and second lens elements 11 and 12 is not limited to the illustrated one, and can be set as appropriate in consideration of workability and the like.
- the mold release apparatus 200 was set as the structure which the 1st and 2nd metal molds 41 and 42 open in an up-down direction or a perpendicular direction (CD direction)
- the 1st and 2nd metal molds 41, 42 can be horizontally placed with the open / close shaft extending in the left-right direction (AB direction).
- the molds 41, 42, the release members 51, 52, etc. open in the left-right direction or the horizontal direction (AB direction).
- the direction and pitch of the thread of the drive guide member 53 provided in the release device 50 can be appropriately changed according to the situation, and the drive method other than the screw mechanism can be used.
- the region for holding the substrate 101 of the support member 61 of the support device 60 is an example, and the size and the like of the holding region can be appropriately changed according to the size and thickness of the substrate 101.
- the support margin such as the outer peripheral portion 101a where the resin is not applied to the substrate 101 is provided.
- the resin may be applied to the entire surface of the substrate 101 as long as the outer periphery of the wafer lens 100 can be supported. .
- positioning, etc. of the mold release members 51 and 52 are illustrations, and the 1st and 2nd metal mold
- at least one of the mold inclined portions 41f and 42f and the mold release inclined portions 51a and 52a may be disposed along the outer circumferences 41e and 42e of the first and second molds 41 and 42 on the entire circumference.
- multiple sets of release members 51 and 52 can be disposed along the outer circumferences 41 e and 42 e of the first and second molds 41 and 42 on the entire circumference.
- the mold inclined portion is formed, for example, continuously along the outer peripheries 41 e and 42 e of the first and second molds 41 and 42.
- the number and arrangement of the support members 61 are examples, and need not be provided corresponding to the release members 51 and 52.
- the adjacent release members 51 and 52 arranged along the outer edges of the molds 41 and 42, respectively. What is necessary is just to be able to support the board
- the inclination angles of the contact surfaces 51b and 52b provided on the first and second release members 51 and 52 and the inclination angles of the contact surfaces 41g and 42g provided on the mold inclined portions 41f and 42f can also be changed.
- the first and second release members 51 and 52 can be displaced or separated independently, and in this case, a difference can be provided in the release speed between the first and second molds 41 and 42.
- the said embodiment replaces with metal mold
- the first and second molds 41 and 42 may be provided with recesses that allow the first and second release members 51 and 52 to engage with each other.
- mold recesses 141f and 142f are formed at locations corresponding to the mold tilt portions 41f and 42f, and locations corresponding to the mold release tilt portions 51a and 52a.
- the mold convex portions 151a and 152a fitted into the mold concave portions 141f and 142f can be formed.
- the mold step portions 241f and 242f are formed at locations corresponding to the mold inclined portions 41f and 42f, and the molds are positioned at locations corresponding to the mold releasing inclined portions 51a and 52a.
- Mold flat portions 251a and 252a fitted to the step portions 241f and 242f can also be formed.
- the mold step portions 241f and 242f and the mold flat portions 251a and 252a have a flat surface perpendicular to the axis AX, and can be supported relatively stably.
- the resin is applied to the one surface 101b and the other surface 101c of the substrate 101, but the resin is applied to the first and second transfer surfaces 41b and 42b of the first and second molds 41 and 42. It may be applied.
- a coupling agent may be applied in advance to the one surface 101b and the other surface 101c of the substrate 101.
- a release agent may be applied in advance to the first and second transfer surfaces 41 b and 42 b of the first and second molds 41 and 42.
- the first and second lens array layers 102 and 103 extend over the entire wafer lens 100, but the first lens array layer 102 can be separated in units of the lens body 11a and the flange portion 11b.
- the second lens array layer 103 can be separated in units of the lens body 12a and the flange portion 11b.
- the connecting portions 11c and 12c do not exist, but the first mold 41 and the second mold 42 can be released from the wafer lens 100 without difficulty by the release device 50 shown in FIG. it can.
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Abstract
Description
図面を参照して、本発明の第1実施形態に係るウェハーレンズの製造方法について説明する。
成形工程は、第1及び第2金型41,42を用いつつ、不図示の金型昇降装置と、樹脂塗布装置と、UV光発生装置とを動作させることで行われる。
離型工程は、離型装置50と、支持装置60とを動作させて行われる。本実施形態において、第1金型41から第1レンズアレイ層102を離型する工程と、第2金型42から第2レンズアレイ層103を離型する工程とは並行して略同時に行われる。
以下、第2実施形態に係るウェハーレンズの製造方法について説明する。なお、第2実施形態のウェハーレンズの製造方法は第1実施形態のウェハーレンズの製造方法を変形したものであり、特に説明しない部分は第1実施形態と同様であるものとする。
Claims (14)
- 基板と、前記基板の第1基板面上方に樹脂で成形され複数の第1光学面を含む第1成形面と、前記基板の第2基板面上方に樹脂で成形され複数の第2光学面を含む第2成形面とを有するウェハーレンズの製造方法であって、
前記第1基板面上及び前記第1成形面に対応する第1金型の型面上のいずれか一方に樹脂を塗布して、前記第1金型によって前記第1成形面を成形する第1工程と、
前記第2基板面上及び前記第2成形面に対応する第2金型の型面上のいずれか一方に樹脂を塗布して、前記第2金型によって前記第2成形面を成形する第2工程と、
前記第1成形面から前記第1金型を離型する第3工程と、
前記第2成形面から前記第2金型を離型するとともに、前記第2金型の離型の開始を前記第3工程において前記第1金型の離型が開始する時又は開始した後であって前記第1金型の離型が完了する前とする第4工程と、
を備えることを特徴とするウェハーレンズの製造方法。 - 前記第3工程と前記第4工程とを少なくとも一部で並行して進行させることを特徴とする請求項1に記載のウェハーレンズの製造方法。
- 前記第2金型の離型の完了は、前記第1金型の離型の完了後であることを特徴とする請求項2に記載のウェハーレンズの製造方法。
- 前記第3工程の開始から完了までの期間と前記第4工程の開始から完了までの期間とは略等しいことを特徴とする請求項1から3までのいずれか一項に記載のウェハーレンズの製造方法。
- 前記第1及び第2金型は、前記基板側の外周の複数箇所に金型係止部をそれぞれ有し、
前記第3及び第4工程において、前記第1及び第2金型に付随してそれぞれ設けられた離型部材を前記金型係止部の少なくとも一部に当接させ、前記離型部材を介して前記金型係止部を前記基板から離れる方向に変位させることによって、前記第1及び第2成形面から前記第1及び第2金型をそれぞれ離型することを特徴とする請求項1から4までのいずれか一項に記載のウェハーレンズの製造方法。 - 前記第1金型の前記金型係止部と前記第2金型の前記金型係止部とは、前記基板を挟んで対向し、前記第1及び第2金型の直径方向の外側に向けて前記基板からそれぞれ離間するように傾斜する当接面を有することを特徴とする請求項5に記載のウェハーレンズの製造方法。
- 前記離型部材は、前記第1及び第2金型の前記金型係止部に面で接して力を伝達する離型係止部を有することを特徴とする請求項5及び6のいずれか一項に記載のウェハーレンズの製造方法。
- 前記金型係止部と前記離型係止部との少なくとも一方は、前記第1及び第2金型の外周に均等な間隔で配置されることを特徴とする請求項7に記載のウェハーレンズの製造方法。
- 前記金型係止部と前記離型係止部との少なくとも一方は、前記第1及び第2金型の外周に沿って略全周に亘って配置されていることを特徴とする請求項7に記載のウェハーレンズの製造方法。
- 前記第1及び第2金型の対向する前記金型係止部を離間させる箇所を前記第1及び第2金型の外周に沿って順次移動させることを特徴とする請求項4から9までのいずれか一項に記載のウェハーレンズの製造方法。
- 前記基板は、前記第3及び第4工程において、前記基板の外周に設けられた複数の基板保持部材によって保持されることを特徴とする請求項1から10までのいずれか一項に記載のウェハーレンズの製造方法。
- 前記基板保持部材は、前記金型係止部と前記離型係止部との少なくとも一方に対応して設けられていることを特徴とする請求項11に記載のウェハーレンズの製造方法。
- 前記基板は、ガラスで形成されていることを特徴とする請求項1から12までのいずれか一項に記載のウェハーレンズの製造方法。
- 前記樹脂は、光硬化性樹脂であり、
前記第1及び第2金型は、ガラスで形成されていることを特徴とする請求項1から13までのいずれか一項に記載のウェハーレンズの製造方法。
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EP11840602.4A EP2639033A4 (en) | 2010-11-09 | 2011-11-09 | METHOD FOR PRODUCING THIN LENS |
JP2012542968A JPWO2012063882A1 (ja) | 2010-11-09 | 2011-11-09 | ウェハーレンズの製造方法 |
US13/883,707 US20130221549A1 (en) | 2010-11-09 | 2011-11-09 | Wafer lens manufacturing method |
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JP2010250496 | 2010-11-09 |
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JP2017170911A (ja) * | 2017-05-22 | 2017-09-28 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | レンズウェーハを製造する方法および装置 |
JP2018163367A (ja) * | 2012-06-27 | 2018-10-18 | スリーエム イノベイティブ プロパティズ カンパニー | 光学部品アレイ |
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WO2018170269A1 (en) | 2017-03-16 | 2018-09-20 | Molecular Imprints, Inc. | Optical polymer films and methods for casting the same |
US10704762B2 (en) * | 2017-09-13 | 2020-07-07 | CorLed Systems, LLC | Faceted lamp post lens |
KR20230058550A (ko) | 2017-10-17 | 2023-05-03 | 매직 립, 인코포레이티드 | 중합체 생성물들을 주조하기 위한 방법들 및 장치들 |
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WO2014090281A1 (de) * | 2012-12-11 | 2014-06-19 | Ev Group E. Thallner Gmbh | Verfahren und vorrichtung zum herstellen eines linsenwafers |
JP2016506317A (ja) * | 2012-12-11 | 2016-03-03 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | レンズウェーハを製造する方法および装置 |
TWI577538B (zh) * | 2012-12-11 | 2017-04-11 | Ev集團E塔那有限公司 | 用於生產一透鏡晶圓之方法及裝置 |
US9995855B2 (en) | 2012-12-11 | 2018-06-12 | Ev Group E. Thallner Gmbh | Method and device for producing a lens wafer |
JP2017170911A (ja) * | 2017-05-22 | 2017-09-28 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | レンズウェーハを製造する方法および装置 |
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EP2639033A1 (en) | 2013-09-18 |
US20130221549A1 (en) | 2013-08-29 |
JPWO2012063882A1 (ja) | 2014-05-12 |
EP2639033A4 (en) | 2016-12-21 |
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