WO2012062274A3 - Module à semi-conducteurs de puissance et procédé de fabrication d'un module à semi-conducteurs de puissance fritté comportant une sonde de température - Google Patents

Module à semi-conducteurs de puissance et procédé de fabrication d'un module à semi-conducteurs de puissance fritté comportant une sonde de température Download PDF

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Publication number
WO2012062274A3
WO2012062274A3 PCT/DE2011/001905 DE2011001905W WO2012062274A3 WO 2012062274 A3 WO2012062274 A3 WO 2012062274A3 DE 2011001905 W DE2011001905 W DE 2011001905W WO 2012062274 A3 WO2012062274 A3 WO 2012062274A3
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WO
WIPO (PCT)
Prior art keywords
sintered
power semiconductor
semiconductor module
temperature sensor
producing
Prior art date
Application number
PCT/DE2011/001905
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German (de)
English (en)
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WO2012062274A2 (fr
Inventor
Ronald Eisele
Original Assignee
Danfoss Silicon Power Gmbh
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Application filed by Danfoss Silicon Power Gmbh filed Critical Danfoss Silicon Power Gmbh
Priority to CN201180053352.8A priority Critical patent/CN103403862B/zh
Priority to US13/883,348 priority patent/US9040338B2/en
Priority to EP11810558.4A priority patent/EP2636062A2/fr
Publication of WO2012062274A2 publication Critical patent/WO2012062274A2/fr
Publication of WO2012062274A3 publication Critical patent/WO2012062274A3/fr

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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N15/00Thermoelectric devices without a junction of dissimilar materials; Thermomagnetic devices, e.g. using the Nernst-Ettingshausen effect
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01KMEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
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    • H01L23/14Mountings, e.g. non-detachable insulating substrates characterised by the material or its electrical properties
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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
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Abstract

L'invention concerne un procédé de fabrication de composants électriques frittables pour le frittage commun avec des composants actifs. Selon le procédé, les composants sous forme plane sont pourvus d'au moins un côté inférieur plan destiné au frittage, et une zone de contact électrique est présente sous forme de surface de contact métallique sur la surface opposée à la surface de frittage, pouvant être mise en contact sur le côté supérieur par un procédé courant du groupe: connexion des fils, soudage, frittage ou métallisation des trous. Le composant est une sonde de température dont la surface inférieure comporte une métallisation frittable sur un corps céramique, le corps céramique comportant deux surfaces de contact électriques pour la connexion électrique ultérieure.
PCT/DE2011/001905 2010-11-05 2011-10-28 Module à semi-conducteurs de puissance et procédé de fabrication d'un module à semi-conducteurs de puissance fritté comportant une sonde de température WO2012062274A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201180053352.8A CN103403862B (zh) 2010-11-05 2011-10-28 功率半导体模块和用于制造与温度传感器一起烧结的功率半导体模块的方法
US13/883,348 US9040338B2 (en) 2010-11-05 2011-10-28 Power semiconductor module with method for manufacturing a sintered power semiconductor module
EP11810558.4A EP2636062A2 (fr) 2010-11-05 2011-10-28 Module à semi-conducteurs de puissance et procédé de fabrication d'un module à semi-conducteurs de puissance fritté comportant une sonde de température

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010050315.0 2010-11-05
DE102010050315.0A DE102010050315C5 (de) 2010-11-05 2010-11-05 Verfahren zur Herstellung von gesinterten, elektrischen Baugruppen und damit hergestellte Leistungshalbleitermodule

Publications (2)

Publication Number Publication Date
WO2012062274A2 WO2012062274A2 (fr) 2012-05-18
WO2012062274A3 true WO2012062274A3 (fr) 2012-07-26

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PCT/DE2011/001905 WO2012062274A2 (fr) 2010-11-05 2011-10-28 Module à semi-conducteurs de puissance et procédé de fabrication d'un module à semi-conducteurs de puissance fritté comportant une sonde de température

Country Status (5)

Country Link
US (1) US9040338B2 (fr)
EP (1) EP2636062A2 (fr)
CN (1) CN103403862B (fr)
DE (1) DE102010050315C5 (fr)
WO (1) WO2012062274A2 (fr)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10211443B2 (en) 2014-09-10 2019-02-19 Cellink Corporation Battery interconnects
US9147875B1 (en) 2014-09-10 2015-09-29 Cellink Corporation Interconnect for battery packs
WO2016126890A1 (fr) * 2015-02-03 2016-08-11 Cellink Corporation Systèmes et procédés pour transfert combiné d'énergies thermique et électrique
JP6668617B2 (ja) * 2015-06-04 2020-03-18 富士電機株式会社 サーミスタ搭載装置およびサーミスタ部品
DE102015114314A1 (de) 2015-08-28 2017-03-02 Innovative Sensor Technology Ist Ag Verfahren zur Herstellung eines Temperatursensors
DE102015218369A1 (de) 2015-09-24 2017-03-30 Siemens Aktiengesellschaft Verfahren zur Herstellung eines Leiterrahmenmoduls und Leiterrahmenmodul
DE102016101246A1 (de) * 2015-11-02 2017-05-04 Epcos Ag Sensoranordnung und Verfahren zur Herstellung einer Sensoranordnung
US10386218B2 (en) * 2016-11-22 2019-08-20 Rota Yokogawa Gmbh & Co. Kg Temperature measurement system for measuring the temperature of a tube and flowmeter comprising the temperature measurement system
US10749443B2 (en) 2017-01-13 2020-08-18 Cree Fayetteville, Inc. High power multilayer module having low inductance and fast switching for paralleling power devices
US10917992B2 (en) 2017-01-13 2021-02-09 Cree Fayetteville, Inc. High power multilayer module having low inductance and fast switching for paralleling power devices
US11696417B2 (en) 2017-01-13 2023-07-04 Wolfspeed, Inc. High power multilayer module having low inductance and fast switching for paralleling power devices
EP3765827A1 (fr) * 2018-03-15 2021-01-20 Heraeus Nexensos GmbH Élément capteur de température
DE202018001393U1 (de) 2018-03-15 2018-04-26 Heraeus Sensor Technology Gmbh Temperatursensorelement
DE102018203971A1 (de) 2018-03-15 2019-09-19 Heraeus Nexensos Gmbh Temperatursensorelement
DE202018004354U1 (de) 2018-09-19 2018-10-15 Heraeus Sensor Technology Gmbh Widerstandsbauelement zur Oberflächenmontage auf einer Leiterplatte und Leiterplatte mit zumindest einem darauf angeordneten Widerstandsbauelement
DE102018219957A1 (de) * 2018-11-21 2020-05-28 Conti Temic Microelectronic Gmbh Leistungselektronikanordnung mit einem Temperatursensor
JP7153544B2 (ja) * 2018-11-28 2022-10-14 株式会社マキタ 電動作業機
BR112021013650A8 (pt) * 2019-01-10 2021-09-28 Cree Inc Módulo multicamada de alta potência tendo baixa indutância e comutação rápida para paralelizar dispositivos de potência
DE102019108988B3 (de) * 2019-04-05 2020-08-13 Infineon Technologies Ag Leistungshalbleitermodul und verfahren zur herstellung desselben
WO2020244733A1 (fr) * 2019-06-03 2020-12-10 Applied Materials, Inc. Ensemble évaporateur, système de dépôt et procédé d'évaporation
CN110118581B (zh) * 2019-06-05 2024-01-09 上海一旻成锋电子科技有限公司 一种嵌入式复合型传感器
DE202020101197U1 (de) * 2020-03-04 2020-03-12 Heraeus Nexensos Gmbh Temperatursensorverbund
JP2024512188A (ja) 2021-03-24 2024-03-19 セルリンク コーポレーション 多層フレキシブルバッテリー相互接続及びその製造方法
DE102022120673A1 (de) 2022-08-16 2024-02-22 Innovative Sensor Technology Ist Ag Sensorelement zur Erfassung von zumindest einer physikalischen oder chemischen Messgröße und Sensoranordnung
DE102022211818A1 (de) 2022-11-09 2024-05-16 Volkswagen Aktiengesellschaft Elektronikbaugruppe und Verfahren zur Herstellung einer Elektronikbaugruppe

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04102365A (ja) * 1990-08-22 1992-04-03 Nec Corp ダイオード
EP0809094A1 (fr) * 1996-05-24 1997-11-26 Heraeus Sensor-Nite GmbH Méthode de fabrication d'un élément capteur pour la mesure de température
US5896081A (en) * 1997-06-10 1999-04-20 Cyntec Company Resistance temperature detector (RTD) formed with a surface-mount-device (SMD) structure
DE10122363A1 (de) * 2001-05-09 2002-11-28 Infineon Technologies Ag Halbleitermodul
EP1286144A1 (fr) * 1999-08-05 2003-02-26 Georg Bernitz Méthode pour fabriquer un dispositif hybride pour mesurer des températures hautes
EP2042260A2 (fr) * 2007-09-28 2009-04-01 W.C. Heraeus GmbH Procédé et pâte de contact de surfaces métalliques
DE102007046900A1 (de) * 2007-09-28 2009-04-30 Heraeus Sensor Technology Gmbh 1200°C-Schichtwiderstand
US20090140369A1 (en) * 2007-11-30 2009-06-04 Lee Keun-Hyuk Semiconductor power module package without temperature sensor mounted thereon and method of fabricating the same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4315272A1 (de) * 1993-05-07 1994-11-10 Siemens Ag Leistungshalbleiterbauelement mit Pufferschicht
DE19630902B4 (de) * 1996-08-01 2005-07-14 Ixys Semiconductor Gmbh Einrichtung zur Temperaturüberwachung in einer leistungselektronischen Anordnung
DE10024516B4 (de) * 2000-05-18 2006-03-09 eupec Europäische Gesellschaft für Leistungshalbleiter mbH & Co. KG Leistungshalbleitermodul
DE10062108B4 (de) * 2000-12-13 2010-04-15 Infineon Technologies Ag Leistungsmodul mit verbessertem transienten Wärmewiderstand
DE102004057421B4 (de) * 2004-11-27 2009-07-09 Semikron Elektronik Gmbh & Co. Kg Druckkontaktiertes Leistungshalbleitermodul für hohe Umgebungstemperaturen und Verfahren zu seiner Herstellung
DE102007046901A1 (de) * 2007-09-28 2009-04-09 W.C. Heraeus Gmbh Verfahren und Paste zur Kontaktierung von Metallflächen
DE102008018841A1 (de) * 2008-04-15 2009-10-22 Conti Temic Microelectronic Gmbh Verfahren zur Herstellung und Aufbau eines Leistungsmoduls
DE102008023216A1 (de) * 2008-05-19 2009-12-03 Friedrich-Alexander-Universität Erlangen-Nürnberg Verfahren zur Betriebstemperaturmessung eines MOS-gesteuerten Halbleiterleistungsbauelementes und Bauelement zur Ausführung des Verfahrens
US7884444B2 (en) * 2008-07-22 2011-02-08 Infineon Technologies Ag Semiconductor device including a transformer on chip
DE102008035993B4 (de) * 2008-08-01 2018-10-11 Infineon Technologies Ag Leistungshalbleitermodul
DE102009010214A1 (de) * 2009-02-23 2010-09-02 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Diskretes Widerstandsbauelement und Leistungsmodul mit einem diskreten Widerstandsbauelement

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04102365A (ja) * 1990-08-22 1992-04-03 Nec Corp ダイオード
EP0809094A1 (fr) * 1996-05-24 1997-11-26 Heraeus Sensor-Nite GmbH Méthode de fabrication d'un élément capteur pour la mesure de température
US5896081A (en) * 1997-06-10 1999-04-20 Cyntec Company Resistance temperature detector (RTD) formed with a surface-mount-device (SMD) structure
EP1286144A1 (fr) * 1999-08-05 2003-02-26 Georg Bernitz Méthode pour fabriquer un dispositif hybride pour mesurer des températures hautes
DE10122363A1 (de) * 2001-05-09 2002-11-28 Infineon Technologies Ag Halbleitermodul
EP2042260A2 (fr) * 2007-09-28 2009-04-01 W.C. Heraeus GmbH Procédé et pâte de contact de surfaces métalliques
DE102007046900A1 (de) * 2007-09-28 2009-04-30 Heraeus Sensor Technology Gmbh 1200°C-Schichtwiderstand
US20090140369A1 (en) * 2007-11-30 2009-06-04 Lee Keun-Hyuk Semiconductor power module package without temperature sensor mounted thereon and method of fabricating the same

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CN103403862B (zh) 2016-08-10
US9040338B2 (en) 2015-05-26
CN103403862A (zh) 2013-11-20
DE102010050315C5 (de) 2014-12-04
US20130228890A1 (en) 2013-09-05

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