WO2012039482A1 - Input device - Google Patents

Abstract

The present invention provides an input device that can be manufactured simply and easily, is equipped with a conductive pattern that is inconspicuous even when a wide insulating section is used, and has stable electrical characteristics. The present invention relates to an input device characterized in comprising: an input member (1) that includes insulating substrates (11, 21) and conductively patterned substrates (10, 20) equipped with transparent conductive layers (12, 22) disposed on at least one surface of the insulating substrates (11, 21), the transparent conductive layers including an inorganic network member having electroconductive properties in a transparent substrate having insulating properties; and detection means for detecting input signals, the detection means being electrically connected to the transparent conductive layers (12, 22); and the transparent conductive layers (12, 22) being provided with an insulated portion in which at least part of the network member is removed by irradiation with a laser beam in the form of ultra-short pulses having a width of less than 1 ps through light condensation means.

Description

Input device

The present invention relates to an input device provided on the front surface of an image display device, such as a touch panel and an electromagnetic wave shield of a plasma display.
This application claims priority on the basis of Japanese Patent Application No. 2010-213852 for which it applied to Japan on September 24, 2010, and uses the content here.

In a touch panel, an input device having a conductive substrate in which a transparent conductive layer (transparent conductive film) is formed on the surface of a transparent insulating substrate is installed as an electrode sheet on the front surface of an image display device such as a liquid crystal display.
Materials constituting the transparent conductive layer of the conductive substrate of the input device include π-conjugated conductive polymers (organic conductors) represented by tin-doped indium oxide (ITO) and polyethylenedioxythiophene-polystyrene sulfonic acid. Widely known.

By the way, in the conductive substrate used for the input device for touch panels, a circuit pattern or an antenna array pattern may be formed.
As a pattern forming method, for example, in Patent Document 1, a transparent conductive layer is formed on the entire surface of a transparent substrate by coating, and then a pulse width of about 100 nsec using a CO ₂ laser or a Q switch is used. A method is disclosed in which a transparent conductive layer to be insulated is irradiated by YAG laser to be removed by ablation.
Patent Documents 2 and 3 disclose a method of forming a conductive portion in a predetermined pattern on the surface of a transparent substrate by printing such as a screen printing method or a gravure printing method.
Patent Document 4 discloses a method of forming a transparent conductive layer on the entire surface of a transparent substrate by coating, and then removing the portion of the transparent conductive layer to be insulated by plasma etching.
Patent Document 5 discloses a technique for forming a conductive pattern by irradiating a transparent conductive film obtained by dispersing and curing metal nanowires (metal ultrafine fibers) in a binder (resin) and curing the transparent conductive film. . Note that the metal nanowires protruding from the transparent conductive film to the outside are removed by a laser.
In Patent Document 6, an ultraviolet laser is used for an ITO vapor deposition substrate for a touch panel, the beam diameter and the focal length of the lens are controlled, and the processing width in the light condensing area is controlled, thereby performing fine ablation of about 10 μm. A technique for forming a fine pattern is disclosed.

JP 2004-118381 A JP 2005-527048 A JP 2008-300063 A JP 2009-26639 A JP 2010-44968 A JP 2008-91116 A

Generally, the organic conductor is colored green to blue and ITO is colored pale yellow. For this reason, when a conductive pattern is formed on an insulating substrate by the methods of Patent Documents 1 to 4, the conductive portions are colored inherent to the conductor forming each conductive film, and the insulating portions only of the insulating substrate are colorless. Therefore, when the obtained conductive substrate is used as an input device and installed on the front surface of the image display device, the conductive portion must be conductive unless the width of the insulating portion (width dimension perpendicular to the extending direction of the insulating portion) is made small. There was a problem that the pattern was visually recognized. On the other hand, when the width of the insulating portion is made very small, the insulation cannot be secured, and the electrical characteristics may be impaired.

Patent Document 5 has an advantage that the conductive pattern of the input device is hardly visible. However, since the metal nanowire remains not only in the conductive part but also in the insulating part inside the transparent conductive film, it has been difficult to reliably perform the insulation. That is, in order to reliably insulate the insulating portion, it is necessary to control the thickness of the transparent conductive film, which is not simple.

In Patent Document 6, it is necessary to use an ultraviolet laser using high-order harmonics for processing, and in order to adjust the width of the ablation region, the laser beam diameter and zoom lens focal length are adjusted. It was not convenient.

The present invention has been made in view of such circumstances, and provides an input device that is easily manufactured, includes a conductive pattern that is difficult to be visually recognized even if the width of an insulating portion is large, and has stable electrical characteristics. For the purpose.

In order to achieve the above object, the present invention proposes the following means.
That is, an input device according to the present invention includes an insulating substrate and a conductive layer provided on at least one surface of the insulating substrate and including a transparent conductive layer including a conductive inorganic network member in an insulating transparent base. An input member including a pattern forming substrate; and a detection unit that is electrically connected to the transparent conductive layer and detects an input signal. The transparent conductive layer has a pulse width of less than 1 psec via a focusing unit. The insulating part formed by removing at least a part of the network member is formed by irradiating the ultrashort pulse laser beam.

Further, in the input device according to the present invention, a focal point of laser light may be formed between the condensing means and the transparent conductive layer.

In the input device according to the present invention, the input member may be provided in a pair so that the conductive pattern forming substrates are stacked in the thickness direction.

Further, in the input device according to the present invention, a pair of the conductive pattern forming substrates provided so as to be laminated in the thickness direction are arranged so that the transparent conductive layers are spaced from each other, and the detection means It may be a capacitance type.

Further, in the input device according to the present invention, the pair of conductive pattern formation substrates provided so as to be laminated in the thickness direction are arranged so that the transparent conductive layers face each other while being spaced from each other. A part of the transparent conductive layer may be electrically contactable.

In the input device according to the present invention, the conductive pattern forming substrate may be transparent.

In the input device according to the present invention, the insulating substrate and the transparent substrate may be made of the same material or the same resin material.

The input device according to the present invention is manufactured easily, has a conductive pattern that is difficult to be seen even if the width of the insulating portion is large, and has stable electrical characteristics.

It is a sectional side view which simplifies and shows the input member of the input device which concerns on 1st Embodiment of this invention. It is an enlarged photograph explaining the net-like member (conductive part) as a network member of the transparent conductive layer of the input member used for the input device concerning a 1st embodiment of the present invention, and a transparent conductive layer before laser processing. It is an enlarged photograph explaining the space | gap (insulating part) formed by removing the net-like member as a network member in the transparent conductive layer of the input member used for the input device which concerns on 1st Embodiment of this invention. It is a side view which simplifies and shows the manufacturing apparatus (laser processing machine) which manufactures the conductive pattern formation board | substrate of the input member of the input device which concerns on 1st Embodiment of this invention. It is a side view which shows the modification of the conductive pattern formation board | substrate of FIG. 4, and a manufacturing apparatus. It is the modification (what formed the network member of the transparent conductive layer by silver vapor deposition) of an electroconductive board | substrate (conductive pattern formation board | substrate), and is an enlarged photograph explaining the transparent conductive layer before laser processing and the conductive part of a transparent conductive layer is there. It is an enlarged photograph explaining the irradiation area | region (insulation part) which irradiated the laser beam to the transparent conductive layer of the conductive substrate of FIG. 6, and the non-irradiation area | region (conductive part) which has not irradiated the laser beam. It is a side view explaining the manufacture example which manufactures the input member (a transparent conductive layer and a conductive pattern formation board | substrate) of the input device which concerns on this invention. It is a side view explaining the manufacture example which manufactures the input member (a transparent conductive layer and a conductive pattern formation board | substrate) of the input device which concerns on this invention. It is a perspective view explaining the manufacture example which manufactures the input member (a transparent conductive layer and a conductive pattern formation board | substrate) of the input device which concerns on this invention. It is a circuit diagram explaining the Example (manufacturing example) which manufactures the input device which concerns on this invention. It is a top view which shows the input member of the input device which concerns on 2nd Embodiment of this invention. It is a top view which shows the X side electrode sheet (conductive pattern formation board | substrate) of the input member of FIG. It is a top view which shows the Y side electrode sheet (conductive pattern formation board | substrate) of the input member of FIG. FIG. 13 is an enlarged side cross-sectional view taken along line AA in FIG. 12. FIG. 13 is an enlarged side cross-sectional view taken along the line BB in FIG. 12.

(First embodiment)
The input device according to the present invention can be applied to a product in which a wiring pattern is formed in a transparent portion, such as a transparent input device such as a transparent antenna, a transparent electromagnetic wave shield, a capacitance type or a membrane type transparent touch panel. it can. Further, the input device of the present invention is an electrode necessary for a capacitance sensor or the like provided on the surface of a three-dimensional molded product or a three-dimensional decorative molded product, such as a capacitive input device attached to a steering wheel of an automobile. Can be used for the purpose of forming.
In the present embodiment, “transparent” refers to a material having a light transmittance of 50% or more.

1 and 10 show an input member 1 for a membrane touch panel (input device) according to a first embodiment of the present invention. 1 to 3, this membrane type touch panel is provided on at least one surface of the insulating substrates 11, 21 and the insulating substrates 11, 21, and is made of an inorganic substance having conductivity within the transparent base 2 having insulation properties. The conductive pattern forming substrates 10 and 20 including the transparent conductive layers 12 and 22 including the network member 3 are electrically connected to the input member 1 and the transparent conductive layers 12 and 22 provided in pairs so as to be laminated in the thickness direction. And a detecting means for detecting an input signal.
The input member 1 is installed on the input side of an image display device (not shown) such as an LCD. In FIG. 10, the input member 1 includes, for example, a conductive pattern forming substrate 10 in which electrodes 100 (corresponding to conductive portions C described later of the transparent conductive layer 12) along the row (X) direction are arranged in parallel, and this conductive pattern formation. Conductive pattern in which electrodes (corresponding to the conductive portion C of the transparent conductive layer 22) are arranged in parallel so as to face the substrate 10 and are arranged on the image display device side and along the column (Y) direction orthogonal to the row (X) direction. A forming substrate 20 and a transparent dot spacer 30 provided therebetween are provided. The input member 1 is configured such that the electrode 100 of the conductive pattern forming substrate 10 and the electrode of the conductive pattern forming substrate 20 are in electrical contact or conduction by an input operation.

The conductive pattern forming substrate 10 includes a transparent insulating substrate 11 and a transparent conductive layer 12 provided on the surface of the insulating substrate 11 facing at least the image display device side.
The conductive pattern forming substrate 20 includes a transparent insulating substrate 21 and a transparent conductive layer 22 provided on a surface of the insulating substrate 21 facing at least the input side.

As the insulating substrates 11 and 21, those having insulating properties and capable of forming the transparent conductive layers 12 and 22 on the surface and being less likely to change in appearance under predetermined irradiation conditions with respect to laser processing described later are used. Is preferred. Specific examples include insulating materials such as glass, polycarbonate, polyester typified by polyethylene terephthalate (PET), and acrylonitrile / butadiene / styrene copolymer resin (ABS resin). As the shape of the insulating substrates 11 and 21, a plate shape, a flexible film shape, a three-dimensional (three-dimensional) molded product, or the like can be used.

When the input member 1 is used for a transparent touch panel, a glass plate, a PET film or the like is used for the insulating substrates 11 and 21. Further, when the input member 1 is used as an electrode necessary for a capacitance sensor or the like such as a capacitance input device attached to a steering wheel of an automobile, the insulating substrates 11 and 21 are molded products made of ABS resin or the like. Alternatively, a decorative molded product provided with a decorative layer by laminating or transferring the film is used.

For example, when the present invention is used as a transparent touch panel such as a membrane type in which the upper and lower electrode films (transparent conductive layers) 12 and 22 are brought into contact with each other by pressing or the like, the input person-side insulating substrate 11 may be an input person. It is preferable to use a material that is flexible with respect to external force from the side (for example, a transparent resin film), and as the insulating substrate 21 on the image display device side, the conductive pattern forming substrate 10 is easily supported via the dot spacer 30. It is preferable to use a material having a predetermined hardness or higher (for example, equal to or higher than that of the insulating substrate 11). For example, the Vickers hardness of the insulating substrate 21 is preferably 1 or more times that of the insulating substrate 11 Vickers, more preferably 1.2 to 5 times, and even more preferably 1.5 to 4 times. Further, in such a touch panel, it is essential to use a certain potential difference between adjacent electrodes 100. In the transparent conductive layers 12 and 22 using a metal such as copper, zinc, tin, and particularly silver, In order to prevent migration, it is required to secure the width of the insulating portion that divides the conductive pattern (width dimension perpendicular to the extending direction of the insulating portion).

In addition, the transparent conductive layers 12 and 22 of the pair of conductive pattern forming substrates 10 and 20 are arranged to face each other with a space therebetween by a dot spacer 30 while being close to each other. When the conductive pattern forming substrate 10 is pressed from the input side toward the image display device side, the insulating substrate 11 and the transparent conductive layer 12 of the conductive pattern forming substrate 10 are bent, and the transparent conductive layer 12 is The transparent conductive layer 22 of the formation substrate 20 can be contacted. An electrical signal is generated by this contact. That is, in the input member 1, a part of the transparent conductive layers 12 and 22 can be electrically contacted by an input operation by an input person.

Further, as shown in FIG. 2, the transparent conductive layers 12 and 22 include an inorganic network member having conductivity in the transparent base 2 having insulation properties. That is, the transparent conductive layers 12 and 22 are formed by holding the network member in the transparent substrate 2. Specifically, the transparent conductive layers 12 and 22 include a net-like member 3 made of a conductive metal as the network member. The transparent substrate 2 can be filled (impregnated) between the strands (fibers) of the mesh member 3 described later in a liquid state, for example, a curable resin having a property of being cured by heat, ultraviolet rays, electron beams, radiation, or the like. Consists of.

The mesh member 3 is composed of two or more metal microfibers 4 dispersed in the transparent substrate 2 and electrically connected to each other. In the net-like member 3, for example, the metal microfibers 4 are dispersedly arranged on the insulating substrate 11 (21) through a process of applying ink (liquid) including the metal microfibers 4 on the insulating substrate 11 (21). Is formed. A transparent substrate 2 is formed by filling a liquid transparent substrate 2 (liquid member) between metal microfibers 4 dispersedly arranged on the insulating substrate 11 (21) and then curing, and a net-like member. 3 is fixedly disposed in the transparent conductive layer 12 (22).

Specifically, the metal microfibers 4 extend irregularly in different directions along the surface direction of the surfaces of the insulating substrates 11 and 21 (surfaces on which the transparent conductive layers 12 and 22 are formed). Further, at least a part of the metal microfibers 4 are arranged so densely that they overlap (contact with each other), that is, any metal microfiber 4 overlaps one or more other metal microfibers 4 ( They are arranged so as to be close to each other) and are electrically connected (connected) to each other by such an arrangement.

Thereby, the mesh member 3 forms a conductive two-dimensional network on the surfaces of the insulating substrates 11 and 21, and the area where the mesh member 3 is disposed in the transparent base 2 of the transparent conductive layers 12 and 22. Is a conductive part C. The metal microfibers 4 of the mesh member 3 are basically disposed under the surfaces of the transparent conductive layers 12 and 22 (surfaces facing away from the insulating substrates 11 and 21). And a portion protruding from the surface of the transparent substrate 2.

Specifically, examples of such metal microfibers 4 include metal nanowires and metal nanotubes made of copper, platinum, gold, silver, nickel, and the like. In the present embodiment, metal nanowires (silver nanowires) mainly composed of silver are used as the metal microfibers 4. The metal ultrafine fibers 4 are formed, for example, with a diameter of 0.3 to 100 nm and a length of 1 μm to 100 μm.

In addition, as the mesh member 3, a fibrous member such as a silicon nanowire, a silicon nanotube, a metal oxide nanotube, a carbon nanotube, a carbon nanofiber, and a graphite fibril other than the metal microfiber 4 described above and a metal-coated member thereof are used. These may be configured to be dispersed or connected.

Further, in the transparent base 2 of the transparent conductive layers 12 and 22, at least a part of the mesh member 3 is removed to form the insulating portion I. That is, as shown in FIG. 3, the transparent base 2 has two or more voids 5 formed by removing the metal microfibers 4 of the mesh member 3, and the voids 5 are arranged so as to be densely packed. The region is an insulating portion I. Specifically, these voids 5 are formed by irradiating a region of the mesh member 3 where the metal ultrafine fibers 4 are disposed with a pulsed laser having an ultrashort pulse as laser light, and evaporating or removing the metal ultrafine fibers 4. Has been. The ultrashort pulse has a pulse width of 1 psec or less. Preferably, the pulse width is 0.01 psec or more. More preferably, the pulse width is 0.02 psec or more and 0.9 psec or less, and further preferably the pulse width is 0.1 psec or more and 0.8 psec or less.
By using a so-called femtosecond laser, which is an ultrashort pulse laser with a pulse width of less than 1 psec, it is possible to obtain the conductive pattern forming substrates 10 and 20 where the conductive pattern is not visually observed.

These voids 5 are elongated holes (oblong holes) or holes (round holes) that irregularly extend or are scattered in different directions along the surface direction of the surface (exposed surface) of the transparent substrate 2. Each of which has a portion opening on the surface. Specifically, the gap 5 is disposed so as to correspond to the position where the evaporated or removed metal fine fiber 4 is disposed, and has a diameter (inner diameter) substantially equal to the diameter of the metal fine fiber 4. In addition, the length of the metal microfiber 4 is not longer than the length.

More specifically, one metal microfiber 4 is completely evaporated or removed, or at least a part thereof is evaporated or removed, so that the metal microfiber 4 is divided in the extending direction, Two or more voids 5 are formed at intervals. That is, two or more voids 5 that are spaced apart from each other are formed so as to extend or be scattered so as to form a linear shape as a whole, corresponding to the corresponding positions of the metal microfibers 4. Incidentally, only one gap 5 may be formed so as to form a linear shape corresponding to the corresponding position of one metal fine fiber 4.

In the insulating part I, by forming these voids 5, the metal microfibers 4 that are conductors are removed, and the conductive two-dimensional network is removed (disappeared).
Thus, in the insulating part I, since the metal microfibers 4 are removed from the transparent base 2, the conductive part C and the insulating part I in the transparent base 2 (transparent conductive layers 12, 22) are mutually connected. The chemical composition is different.

Next, a manufacturing apparatus and a manufacturing method for manufacturing the transparent conductive layer and the conductive pattern forming substrate of the input member 1 of the input device according to this embodiment will be described.
In the manufacturing method of the conductive pattern formation board | substrate demonstrated in this embodiment, in the transparent conductive layer (transparent conductive layer before conductive pattern formation) a containing the said network member formed in one surface of the insulated substrate 11 (21), A method of irradiating a laser beam L, which is an ultrashort pulsed laser, in a predetermined pattern is used.
In the following description, a laminate having an insulating substrate 11 (21) before laser processing and a transparent conductive layer a formed on one surface of the insulating substrate 11 (21) is referred to as a conductive substrate A. That's it.

First, the manufacturing apparatus 40 used with the manufacturing method of the conductive pattern formation board | substrate of this embodiment is demonstrated. As shown in FIG. 4, the manufacturing apparatus 40 includes a laser light generating unit 41 that generates laser light L, a condensing lens 42 such as a convex lens that is a condensing unit that condenses the laser light L, and a conductive substrate. And a stage 43 on which A is placed.
Laser light L is irradiated from the laser light generating means 41 to the transparent conductive layer a through the condenser lens 42 to form an insulating portion I and a conductive pattern on the transparent conductive layer a.

The focal point F of the condenser lens 42 is preferably set at a position away from the transparent conductive layer a. Specifically, the condenser lens 42 is disposed so that the focal point F of the laser light L is located between the transparent conductive layer a and the condenser lens 42. That is, in the manufacturing method of the conductive pattern forming substrate of this embodiment, the focal point F of the condensing lens 42 (laser light L) is formed between the transparent conductive layer a and the condensing lens 42.

As the condenser lens 42, a lens having a low numerical aperture (NA <0.1) is preferable. That is, by setting the numerical aperture of the condensing lens 42 to NA <0.1, it becomes easy to set the irradiation condition of the laser light L. In particular, the focal point F of the laser light L is the transparent conductive layer a and the condensing lens 42. It is possible to prevent energy loss and diffusion of the laser beam L due to the air plasma at the focal point F.

Further, the transparent conductive layer a is formed by filling (impregnating) the transparent base 2 made of resin between the fibers (element wires) of the net-like member 3 made of, for example, the metal ultrafine fibers 4, and made of a transparent resin film. When provided on the insulating substrate 11 (21), the metal microfibers 4 embedded in the transparent substrate 2 of the transparent conductive layer a are reliably removed by being ejected from the surface of the transparent substrate 2 according to the above-described setting. be able to. Accordingly, the gap 5 is surely formed corresponding to the desired shape of the insulating portion I. For example, a pattern that cannot be insulated unless it is set to a large R, such as a corner portion of a linear pattern. However, the insulation process can be reliably and easily realized with a small R setting (or without providing R).

The stage 43 can be moved two-dimensionally in the horizontal direction. The stage 43 is preferably composed of a member having at least a transparent upper surface or a member having light absorption.
When the insulating substrate 11 (21) is transparent and the output of the laser beam L exceeds 1 W, the stage 43 is preferably made of a nylon-based or fluorine-based resin material or a silicone rubber-based polymer material.

Next, the manufacturing method of the conductive pattern formation board | substrate of the input member 1 of the input device using the manufacturing apparatus 40 mentioned above is demonstrated.
First, the conductive substrate A is placed on the upper surface of the stage 43 so that the transparent conductive layer a is disposed above the insulating substrate 11 (21). Here, as the conductive substrate A, it is preferable to use a substrate in which the insulating substrate 11 (21) and the transparent substrate 2 of the transparent conductive layer a are made of the same material or the same resin material. Specifically, for example, when the insulating substrate 11 (21) is a polyethylene terephthalate film, it is preferable to use a polyester-based resin for the transparent substrate 2.
Note that the conductive substrate A (conductive pattern forming substrates 10 and 20) in the present embodiment is transparent.

Next, the laser light L is emitted from the laser light generating means 41, and the laser light L is collected by the condenser lens 42. A portion of the condensed laser light L where the spot diameter has passed past the focal point F is irradiated onto the transparent conductive layer a. At that time, the stage 43 is moved so that the irradiation of the laser beam L has a predetermined pattern.

The energy density of the laser beam L applied to the transparent conductive layer a is preferably 1 × 10 ¹⁶ to 7 × 10 ¹⁷ W / m ² , and the irradiation energy per unit area is preferably 1 × 10 ⁵ to 1 × 10 ⁶ J / m ^2. .
That is, when the energy density or irradiation energy is set to a value smaller than the above numerical range, the insulation of the insulating portion I may be insufficient. Further, when the value is set to be larger than the above numerical range, the processing trace becomes conspicuous, which is inappropriate for applications such as a transparent touch panel and a transparent electromagnetic wave shield.

These values are defined by dividing the output value of the laser beam in the processing area by the condensing spot area of the processing area. For convenience, the output is converted into the output value from the laser oscillator by the optical system. It is obtained by multiplying by the loss factor.
The spot diameter area S is defined by the following formula.
S = S ₀ × D / FL
S ₀ : Laser beam area focused by the lens FL: Lens focal length D: Distance between the surface (upper surface) of the transparent conductive layer a and the focal point

The above-described focal point F has been described by taking as an example a case where the light converging means 42 such as a lens has sufficiently small aberration. However, for example, a spherical lens having a short focal length or an element that increases aberration such as protective glass. When present, the focal point F is defined as the position where the energy density of the focal point is the highest.

Here, the distance D is set within a range of 0.2% to 3% of the focal length FL in a normal laser processing machine. Preferably, the distance D is set within a range of 0.5% to 2% of the focal length FL. More preferably, the distance D is set within a range of 0.7% to 1.5% of the focal length FL. By setting the distance D within the above numerical range, it is possible to reliably remove the metal microfibers 4 (formation of the gap 5) in the insulating portion I and to form an insulating pattern (conductive pattern) having high electrical reliability. In addition, it is possible to reliably prevent processing traces resulting from damage to the insulating substrate 11 (21).

Moreover, in the point which forms a conductive pattern with high precision, by irradiating pulsed laser beam L twice or more intermittently while moving the position of the spot on the transparent conductive layer a, adjacent spot positions are It is preferable to form overlapping portions. Specifically, it is preferable to intermittently irradiate 3 to 500 times, and more preferably 20 to 200 times. If the irradiation is performed three times or more, the insulation can be more reliably performed. If the irradiation is performed 500 times or less, the transparent substrate 2 irradiated with the laser beam L can be prevented from being removed by dissolution or evaporation.

In this way, by irradiating the transparent conductive layer a with the laser light L, the insulating portion I is formed by removing at least a part of the net-like member 3 in the transparent substrate 2, and the insulating portion I and the transparent substrate are formed. And a conductive portion C in which a net-like member 3 is arranged in the conductive pattern C. That is, the transparent conductive layer a is patterned to form a transparent conductive layer 12 (22) having a conductive pattern composed of a conductive portion C and an insulating portion I, and the conductive substrate A is a conductive pattern forming substrate. 10 (20).

In the above description, the conductive substrate A is placed on the movable stage 43 such as an XY stage for patterning. However, the present invention is not limited to this. That is, for example, a method in which the conductive substrate A is fixed and the condensing system member is relatively moved, a method in which the laser light L is scanned and scanned using a galvanometer mirror, or the like is combined. Patterning can be performed.

The electroconductive board | substrate A used for the said manufacturing method is shown below.
In the transparent conductive layer a of the conductive substrate A, examples of the inorganic conductor constituting the mesh member 3 include metal nanowires such as silver, gold, and nickel. Among the transparent conductive layer a, as the insulator constituting the transparent substrate 2, transparent thermoplastic resin (polyvinyl chloride, vinyl chloride-vinyl acetate copolymer, polymethyl methacrylate, nitrocellulose, chlorinated polyethylene, Chlorinated polypropylene, polyvinylidene fluoride), and transparent curable resins (silicone resins such as melamine acrylate, urethane acrylate, epoxy resin, polyimide resin, and acrylic-modified silicate) that are cured by heat, ultraviolet rays, electron beams, or radiation.

FIG. 5 shows a modification of the present embodiment. In the illustrated example, a pair of transparent conductive layers a are provided on the upper and lower surfaces of the insulating substrate 11 (21) in the conductive substrate A. In this case, when the condensing lens 42 having a focal length FL of 50 mm or more and a numerical aperture of less than 0.2 is used, the spread of the laser light L can be reduced. More preferably, the focal length FL is 60 mm or more and 500 mm or less and the numerical aperture is less than 0.19 and 0.001 or more, and further preferably, the focal length FL is 70 mm or more and 400 mm or less and the numerical aperture is less than 0.03. That's it. Therefore, it is easy to adjust the position of the lens, the difference in spot diameter between the both surfaces of the insulating substrate 11 (21) is reduced, and the energy density corresponding to both transparent conductive layers a is substantially equal. It is possible to form the same insulating pattern on a.
Further, when only the transparent conductive layer a on one side of the transparent conductive layer a formed on both surfaces of the insulating substrate 11 (21) is insulated, the numerical aperture of the condenser lens 42 is larger than 0.5. It is good also as using a thing.

As described above, according to the input device according to the present embodiment, an extremely short pulse laser (femtosecond laser) having a pulse width of less than 1 psec is used as the laser processing machine (manufacturing apparatus) 40. The conductive pattern (insulating pattern) in the conductive pattern forming substrate 10 (20) can be reliably made inconspicuous.
Moreover, since it is not necessary to control the thickness of the transparent conductive layer a in order to reliably insulate the insulating portion, it is simple.

Further, when the conductive pattern is formed on the transparent conductive layer a, the focal point F of the condenser lens 42 (laser light L) is provided at a position away from the transparent conductive layer a. Since the conductive substrate A is irradiated with the laser beam L, the spot diameter of the laser beam L hitting the insulating substrate 11 (21) is the spot of the laser beam L hitting the transparent conductive layer a. It becomes larger than the diameter. As a result, the energy density of the laser beam L is ensured in the transparent conductive layer a and the insulating portion I is reliably formed, while the energy density of the laser beam L is reduced in the insulating substrate 11 (21) to thereby achieve the insulation. Damage to the substrate 11 (21) can be prevented.

Further, since the irradiation spot irradiated with the laser beam L on the transparent conductive layer a is formed in a planar shape instead of a spot shape, the insulating substrate 11 (21) is not affected while the transparent conductive layer a is processed. Such control of the irradiation energy density is easier than in the conventional method. Furthermore, it is possible to draw an insulating pattern with a large line width on the transparent conductive layer a at once, so that the so-called painting process is facilitated and the width of the insulating pattern can be increased. The insulation of the part I is improved.

In addition, the conductive pattern forming substrate 10 (20) of this input device has a conductive pattern formed by the conductive portion C formed of the mesh member 3 which is a network member of an inorganic substance (inorganic conductor) having conductivity and the insulating portion I. Therefore, compared with a conductive pattern forming substrate having a conductive portion C (conductive pattern) made of, for example, an organic conductor, it is less likely to be altered by light (ultraviolet rays) and the like, and has stable electrical characteristics over a long period of time. Can be obtained.

More specifically, in the conductive pattern forming substrate 10 (20) of the input device manufactured as described above, in the transparent base 2 of the transparent conductive layer 12 (22), the arrangement region of the conductive mesh member 3 is a conductive portion. A region where the gap 5 is formed by removing the mesh member 3 is defined as an insulating portion I. That is, in the conductive part C, conduction is ensured by the mesh member 3 made of metal, and in the insulating part I, an electrical insulation state is reliably obtained by the gap 5 formed by removing the mesh member 3. It is supposed to be.

In the conventional transparent conductive layer, the mesh member 3 made of metal nanowires dispersed in the transparent substrate 2 and electrically connected to each other remains not only in the conductive part C but also in the insulating part I. It has been difficult to reliably insulate the insulating portion I. On the other hand, according to the configuration of the present embodiment, the mesh member 3 (metal fine fiber 4) of the insulating portion I is removed so as to replace the gap 5, and the insulating portion I is reliably insulated, so that the transparent conductive The electrical characteristics (performance) in the layer 12 (22) are stabilized, and the reliability as a product (input device) is enhanced.

Furthermore, in the insulating portion I, the mesh member 3 is removed, and a void 5 having a shape corresponding to (corresponding to) the mesh member 3 (metal microfiber 4) is formed. That is, since the gap 5 is formed, the conductive portion C and the insulating portion I are similar in color tone and transparency to each other and are not discriminated (viewed) from each other by the naked eye. . Therefore, even if the width of the insulating portion I is increased, the wiring pattern is not visually recognized.

Further, since the mesh member 3 is composed of metal ultrafine fibers 4 dispersed in the transparent substrate 2 and electrically connected to each other, the mesh member 3 is made of metal ultrafine fibers 4 such as commercially available metal nanowires and metal nanotubes. And can be formed relatively easily.

Furthermore, as in the present embodiment, when the metal microfiber 4 having silver as a main component is used, the metal microfiber 4 can be obtained relatively easily and used as the mesh member 3. Moreover, when removing the mesh member 3 (metal fine fiber 4) of the insulating part I by laser processing, a commercially available general laser processing machine can be used. Further, the metal microfiber 4 mainly composed of silver is more preferable because it can form a colorless and transparent conductive pattern having a high light transmittance and a low surface resistivity.

From the above, according to the input device described in the present embodiment, the conductive pattern of the conductive pattern forming substrate 10 (20) is hardly visible, and the conductive portion C in the conductive pattern has a low resistance, but the insulating portion. In I, insulation is ensured and stable electrical performance can be obtained.

In the input device of the present embodiment, when the transparent substrate 2 of the transparent conductive layer a and the insulating substrate 11 (21) of the conductive substrate A are made of the same material or the same resin material, The effect of. That is, since the absorbance of the laser beam L in the transparent substrate 2 of the transparent conductive layer a and the absorbance of the laser beam L in the insulating substrate 11 (21) are substantially the same, the energy of the laser beam L in the transparent conductive layer a. While ensuring a sufficient density, the energy density of the laser light L in the insulating substrate 11 (21) can be reduced, and the above-described effects can be obtained with certainty. In addition, the transparent conductive layer a (transparent conductive layer 12 (22)) is easily firmly bonded onto the insulating substrate 11 (21).

Further, after the mesh member 3 has applied the ink (liquid) containing the metal microfibers 4 on the insulating substrate 11 (21), the metal microfibers 4 are dispersed on the insulating substrate 11 (21). It is formed by. Further, by filling the liquid transparent substrate 2 (liquid member) between the metal ultrafine fibers 4 dispersedly arranged on the insulating substrate 11 (21) in this way and then curing, the mesh member 3 becomes a transparent substrate. 2 holds the following effects. That is, the mesh member 3 can be easily provided in the transparent conductive layer a on the insulating substrate 11 (21), and the metal microfibers 4 constituting the mesh member 3 are electrically and reliably connected to each other. The electrical characteristics of the conductive part C are stabilized. In addition, since the mesh member 3 is stably held by the transparent substrate 2, the above-described electrical characteristics extend the life.

Further, when the insulating portion I is formed by irradiating laser light L intermittently twice or more while moving the position of the spot on the transparent conductive layer a and overlapping the positions of adjacent spots, An input device including a conductive pattern and a conductive pattern forming substrate 10 (20) with high accuracy, excellent electrical characteristics, and good appearance can be obtained.

In addition, this invention is not limited to the above-mentioned embodiment, A various change can be added in the range which does not deviate from the meaning of this invention.
For example, in the above-described embodiment, both the insulating substrates 11 and 21 are transparent, but either or both of these insulating substrates 11 and 21 may be colored with a certain degree of transparency. Absent.

Further, although the net member 3 is made of two or more metal microfibers 4 dispersed in the transparent substrate 2 and electrically connected to each other, it is not limited to this. That is, the net member 3 may be a wire grid formed by forming a conductive metal film in a grid pattern by etching or the like.
Further, as the inorganic network member having conductivity, a network member made of a film member or the like may be used instead of the above-described mesh member 3.

Further, functional layers such as adhesion, antireflection, hard coat, and dot spacer may be optionally added to the conductive pattern forming substrates 10 and 20.

In the above-described embodiment, the input member 1 is provided with a pair of conductive pattern formation substrates 10 and 20 stacked in the thickness direction. However, the conductive pattern formation substrate provided on the input member 1 is not provided. The number and arrangement are not limited to the above-described embodiments. Specifically, one or more conductive pattern forming substrates of the input member 1 may be provided.

(Second Embodiment)
Next, an input device according to a second embodiment of the present invention will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the same member as above-mentioned embodiment, and the description is abbreviate | omitted.

The input device according to the present embodiment is a capacitive touch panel. FIG. 12 shows an input member 200 for a capacitive touch panel (input device). This capacitive touch panel includes upper and lower electrodes (transparent conductive layers 212 and 222) that are capacitively coupled to a human body portion H such as a finger through an insulating layer 240 disposed on a surface facing the input user side. An AC signal is applied to and the other electrode is measured to detect the contact state of the finger.

As shown in FIGS. 15 and 16, the input member 200 of the capacitive touch panel includes a pair of electrode sheets 210 and 220 (conductive pattern forming substrate), transparent conductive layers 212 and 222, one of the insulating substrates 11 and 21. It is arranged on the side (input person side). Thereby, since at least the insulating substrate 11 is disposed between the transparent conductive layers 212 and 222, the transparent conductive layers 212 and 222 are spaced from each other.

As shown in FIGS. 12 to 14, the input member 200 is an X-side electrode sheet on which an electrode 201a having a checkered pattern (a state in which square corners having the same shape are connected to each other, so-called check pattern) is formed. 210 (conductive pattern forming substrate) and a Y side electrode sheet 220 (conductive pattern forming substrate) on which electrodes 201b having a checkered pattern complementary to the X side electrode sheet 210 are formed.

As shown in FIG. 13, the electrode 201a is formed such that corners of two or more squares arranged along the X direction are electrically connected to each other, and the adjacent squares in the Y direction are formed. Are arranged in parallel in the Y direction while being electrically insulated from each other. Further, as shown in FIG. 14, the electrode 201b is formed such that two or more square corners arranged along the Y direction are electrically connected to each other and extend, while adjacent to each other in the X direction. The squares are electrically insulated from each other and arranged in parallel in the X direction.

As shown in FIG. 12, the X-side electrode sheet 210 and the Y-side electrode sheet 220 are combined in a state where the electrodes 201 a and 201 b face each other without facing each other in the thickness direction.
Specifically, as shown in FIGS. 15 and 16, the X-side electrode sheet 210 is fixed to the upper surface (the surface on the input side) of the Y-side electrode sheet 220 so as to be laminated via a transparent adhesive material 250. In this state, both electrodes 201a and 201b are not overlapped in the thickness direction.

13 and 16, in the transparent conductive layer 212 of the X-side electrode sheet 210, a square-shaped isolated electrode 202a is formed in a region facing the square portion of the electrode 201b of the Y-side electrode sheet 220. Each is formed. On the outer periphery of the isolated electrode 202a, the insulating portions I having a square ring shape are formed by irradiating the laser beam L, respectively.
Further, in the transparent conductive layer 212 of the X-side electrode sheet 210, between the opposing corners of the square of the electrode 201a adjacent in the Y direction, a small isolated electrode having a square shape with a smaller outer shape than the isolated electrode 202a. 203a is formed. On the outer periphery of the small isolated electrode 203a, the insulating portions I having a square ring shape are formed by irradiating the laser beam L, respectively. That is, the adjacent isolated electrode 202a and the small isolated electrode 203a share a part of the insulating part I of each other.

As shown in FIGS. 14 and 16, in the transparent conductive layer 222 of the Y-side electrode sheet 220, a square-shaped isolated electrode 202 b is formed in a region facing the square portion of the electrode 201 a of the X-side electrode sheet 210. Each is formed. On the outer periphery of the isolated electrode 202b, insulating portions I having a square ring shape are formed by irradiating the laser beam L, respectively.
Further, in the transparent conductive layer 222 of the Y-side electrode sheet 220, a small isolated electrode having a square shape with a smaller outer shape than the isolated electrode 202b is formed between the opposing corners of the square of the electrode 201b adjacent in the X direction. 203b is formed. On the outer periphery of the small isolated electrode 203b, the insulating portions I having a square ring shape are formed by irradiating the laser beam L, respectively. That is, the adjacent isolated electrode 202b and the small isolated electrode 203b share a part of the insulating portion I of each other.

In the input member 200 configured as described above, the mesh member 3 is disposed on the electrodes 201a and 201b and the isolated electrodes 202a and 202b to form the conductive portion C. In this embodiment, the small isolated electrodes 203a and 203b are also the conductive portion C. However, the small isolated electrodes 203a and 203b are irradiated with the laser beam L so as to be filled in, so that the square insulation is formed. It does not matter as part I.

Next, the operation of the capacitive touch panel using the input member 200 will be described with reference to FIG.
When the human body portion H (contact object) such as a finger comes into contact with the input member 200 via an insulating layer 240 formed on the surface (surface on the input side), capacitive coupling is established between the contact object H and each electrode. Is formed. In this state, a voltage is applied to one of the electrodes 201b of the Y-side electrode sheet 220 by using the signal source 260, and the signal (input signal) of the electrode 201a of the X-side electrode sheet 210 is detected by the detection means 270. Thus, the contact state between the contact object H and the input member 200 can be detected.

According to the input member 200 of the input device according to the present embodiment, since the insulation of the insulating portion I is sufficiently ensured, the above-described special configuration can be adopted and the following excellent operational effects can be achieved. It becomes.
That is, when the contact object H comes into contact as described above, the electrode 201b of the Y-side electrode sheet 220 and the contact object H pass through the isolated electrode 202a of the X-side electrode sheet 210 located on the electrode 201b. Capacitive coupling will be formed. Thereby, the electrode 201a of the X-side electrode sheet 210 and the electrode 201b of the Y-side electrode sheet 220 are in a state of being disposed in substantially the same layer (transparent conductive layer 212). Therefore, the position of the contact object H can be detected with high accuracy.

Specifically, in the input member of the conventional capacitive touch panel, in the transparent conductive layer 212 of the X-side electrode sheet 210, an isolated electrode (conductive portion C) is located in a region facing the electrode 201 b of the Y-side electrode sheet 220. It was not provided. Further, in the transparent conductive layer 222 of the Y-side electrode sheet 220, no isolated electrode (conductive portion C) was provided in the region facing the electrode 201 a of the X-side electrode sheet 210. In the case of such a configuration, the electrodes 201a and 201b are not only maintained in an insulated state but also strictly controlled with a certain width between each other. That is, in the conventional configuration, the accuracy of the distance between the upper and lower electrodes 201a and 201b tends to affect the detection result, and the area for performing the insulation process is relatively large.

On the other hand, according to the present embodiment, since the electrodes 201a and 201b are disposed in substantially the same layer (plane), the conventional distance accuracy between the upper and lower electrodes 201a and 201b is required. The detection accuracy is improved.
In addition, the area of the region (insulating part I) where the insulating process is performed is greatly reduced, and the productivity is improved.
Furthermore, since the chemical compositions of the electrodes 201a and 201b and the isolated electrodes 202a and 202b are the same, the conductive pattern is less likely to be recognized and the appearance is good.
Further, since the small isolated electrodes 203a and 203b are formed, it is possible to further reduce the influence on the detection accuracy due to the contact of the contact object H and the assembly tolerance.

Hereinafter, the present invention will be specifically described with reference to examples. However, the present invention is not limited to this embodiment.

[Production Example 1] Production of silver nanowire conductive film (conductive pattern forming substrate) used as input member of input device On transparent polyester (PET) film (insulating substrates 11 and 21) with a thickness of 100 μm, Ohm from Cambrios Name) After applying and drying ink (mixed liquid containing metal microfibers 4), coating with UV curable polyester resin ink (transparent substrate 2), and drying or UV treatment, the wire diameter on the PET film A friction-resistant transparent conductive layer a having a conductive two-dimensional network (network member 3) made of silver fibers (metal ultrafine fibers 4) having a length of about 50 nm and a length of about 15 μm was formed (FIG. 2).

The surface resistance of the transparent conductive layer a of this silver nanowire conductive film (conductive substrates 10 and 20) was 230Ω / □, and the light transmittance was 95%.
Subsequently, this silver nanowire conductive film was cut into an A4 size rectangle to obtain a silver nanowire conductive film test piece.

[Production Example 2]
Manufacturing example using a condensing lens 42 and a galvano mirror having a focal length FL = 100 mm, using a femtosecond laser (manufacturing apparatus 40) having a wavelength of 750 nm, an output of 10 mW, a pulse width of 130 fs, a repetition frequency of 1 kHz, and a beam diameter of 5 mm. The test piece 1 was placed on a glass plate having a thickness of 5 mm so that the transparent conductive layer faced away from the glass plate. After adjusting the focal point F of the condensing lens 42 (laser light L) to a position 1.5 mm away from the surface of the transparent conductive layer in the test piece toward the condensing lens 42 side, the light is condensed. The point was moved at 1 mm / second so as to cross the width direction of the test piece, and a straight line was drawn (formation of an insulating pattern).

[Production Example 3]
Using a YVO ₄ laser (manufacturing apparatus 40) having a wavelength of 1064 nm, an output of 12 W, a pulse width of 20 ns, a repetition frequency of 100 kHz, and a beam diameter of 6.7 mm, using a condensing lens with a focal length FL = 300 mm and a galvanometer mirror, The test piece of Production Example 1 was placed on a Duracon (Polyplastics Co., Ltd., registered trademark) plate having a thickness of 5 mm so that the transparent conductive layer faces away from the Duracon (registered trademark) plate. After adjusting the focal point F of the condensing lens 42 (laser light L) at a position 3 mm away from the surface of the transparent conductive layer in the test piece toward the condensing lens 42 side, the condensing point is adjusted. A straight line was drawn by moving across the width of the test piece at 100 mm / second.

[Production Example 4] Preparation of a silver vapor-deposited conductive film (conductive pattern forming substrate) used for an input member of an input device. A transparent PET film having a thickness of 100 μm provided with a silicone acrylic hard coat layer on one side was prepared. A zinc oxide film having a thickness of 60 nm was formed on the surface opposite to the hard coat layer by a magnetron sputtering apparatus. Next, a silver film having a thickness of 27 nm was formed on the surface of the zinc oxide film using a magnetron sputtering apparatus. Further, a zinc oxide film having a thickness of 60 nm was formed on the surface of the silver film in the same manner as the zinc oxide film (FIG. 6). Thereby, the transparent conductive layer which has the electroconductive two-dimensional network (network member which consists of a film-like member) which consists of a zinc oxide film | membrane and a silver film was formed on PET film. Specifically, as shown in FIG. 6, the silver vapor deposition layer (silver film) is formed so as to provide a slight gap while two or more granular materials are densely connected.
The surface resistance of the transparent conductive layer of this silver vapor-deposited conductive film was 95Ω / □, and the light transmittance was 85%.
Subsequently, this silver vapor-deposited conductive film was cut into an A4 size large rectangle to obtain a silver vapor-deposited conductive film test piece. A straight line was drawn on this test piece in the same manner as in Production Example 2.

About the conductive pattern formation board | substrate obtained by the said experiment, the electrical resistance value was measured on both sides of the part irradiated with the laser beam L using the tester. Moreover, the visibility (processed trace) of the conductive pattern was evaluated visually. The evaluation results are shown in Table 1.
The evaluation criteria (A, B, C, D) were as follows.
A: Excellent. The electrical resistance value exceeds 10 MΩ and insulation is ensured, and the conductive pattern cannot be seen at all even in the state of the conductive pattern forming substrate before assembly on the touch panel.
B: Good. The electrical resistance exceeds 10 MΩ and insulation is ensured, and the conductive pattern is almost invisible.
C: Yes. The electrical resistance value exceeds 10 MΩ and insulation is ensured, but the conductive pattern is visible (a level that can be used as a product when assembled on a touch panel).
D: Impossible. Those with an electrical resistance of 10 MΩ or less and insufficient insulation, or those with scorch or perforation to the extent that they can be visually confirmed. That is, it cannot be used as a product.

[Manufacturing Example 5] Production of Input Member 1 of Touch Panel (Input Device) Next, a manufacturing example of the input member 1 of the membrane touch panel (wiring board) using the conductive pattern forming substrate 10 (20) described above will be described.

First, on the transparent conductive layer a of the conductive substrate A made of the silver nanowire conductive film of Production Example 1, a commercially available silver paste was printed in a band shape by screen printing to form a connector pattern. As shown in FIG. 8 and FIG. 10, under the conditions of Production Example 3, “+” marks as marks on the transparent conductive layer a are arranged in a line of 5 mm pitch and 1 mm length in a row with a 25 mm interval. Two rows were marked to mark the input area.

Next, as shown in FIGS. 9 and 10, six lines (laser light L) having a length of 35 mm are irradiated with the “+” mark as a base point under the irradiation conditions of Production Example 2, and wiring patterns in the input area did.
Next, with the “+” mark as a base point, an insulating pattern was formed so as to cross the connector pattern under the conditions of Production Example 3 to obtain a wiring board for a touch panel having a 25 mm square input area. A pair of the touch panel wiring boards were prepared and confirmed by a tester. As a result, the wiring patterns for the touch panel were insulative between the wiring patterns at the end of the input area. Moreover, in this wiring board, the wiring pattern was not visually recognized.

Next, as shown in FIG. 10, after forming an Ag paste (Dotite (registered trademark) FA301CA: manufactured by Fujikura Kasei Co., Ltd.) as a drawing pattern 101 by screen printing, the screen printing is used to form these touch panel wiring boards. Two or more dot spacers 30 made of an acrylic resin having a diameter of 30 μm and a height of 8 μm were formed on one sheet with a “+” mark as a mark (see FIG. 1).

Next, the touch panel wiring board on which the dot spacers 30 are formed and the touch panel wiring board on which the dot spacers 30 are not formed are cut into predetermined shapes, and the transparent conductive layers 12 (22) are arranged to face each other. Then, using a commercially available double-sided adhesive tape, the four sides were bonded to form an input member 1 of a transparent membrane-type touch panel (input device) (see FIG. 1).

[Evaluation]
It was confirmed that the input member 1 of the touch panel manufactured in this way is invisible with neither the dot spacers 30 nor the wiring pattern, and functions as a key matrix.

[Production Example 6] Fabrication of membrane type touch panel (input device) (Example of the present invention)
As shown in FIG. 11, the input member 1 for the membrane type touch panel of 5 rows and 5 columns obtained in Manufacturing Example 5 is connected to the port 121 on the row side and the column side using the interface circuit (detection means), It connected to 122 and it confirmed that the output corresponding to a press location was obtained.
At this time, the power supply voltage was 5 V, the current limiting resistor 102 was 3 kΩ, the pull-up and pull-down resistor 103 was 200Ω, and the hfe of the transistors 104a and 104b in the row and column directions was about 200.
In this touch panel, the wiring pattern could not be visually recognized on the matte-processed black plate or on the light emitting liquid crystal display. Moreover, when the input area and outer peripheral part of this touch panel were hold | maintained on the flat board and it pressed with the finger | toe, the row side output and the column side output corresponding to a press location were obtained.

[Production Example 7] Fabrication of capacitive touch panel (input device) (Example of the present invention)
Two silver nanowire conductive films of Production Example 1 were prepared. As shown in FIGS. 13 and 14, a guide pin hole 280 for positioning was provided in each silver nanowire conductive film. In addition, an Ag paste (Dotite (registered trademark) FA301CA: manufactured by Fujikura Kasei Co., Ltd.) is printed on these silver nanowire conductive films by screen printing, and this is dried at 100 ° C. for 15 minutes, thereby forming a drawing pattern 281. did.

Next, the silver nanowire conductive film was fixed to the stage of the irradiator using the guide pin hole 280, and the outer shape mark 282 and the printing positioning mark 283 were marked under the irradiation conditions of Production Example 3.
Furthermore, in the Ag wiring pattern portion 284, the insulation between the lead patterns 281 and the outside in parallel with the pattern extending direction was irradiated under the irradiation conditions of Production Example 3 (0.1 mm interval).

Subsequently, pattern irradiation was performed in the input area under the irradiation conditions of Production Example 2 to form an insulating portion I.
Specifically, by forming the insulating portion I, the silver nanowire conductive film that becomes the X-side electrode sheet 210 in FIG. 13 is surrounded by the electrode 201a extending in the X direction and the electrodes 201a adjacent in the Y direction. An isolated electrode 202a and a small isolated electrode 203a sandwiched between opposing corners of a square of the electrode 201a adjacent in the Y direction were formed.
Further, the silver nanowire conductive film to be the Y-side electrode sheet 220 in FIG. 14 includes an electrode 201b extending along the Y direction, an isolated electrode 202b surrounded by electrodes 201b adjacent in the X direction, and an electrode adjacent in the X direction. A small isolated electrode 203b sandwiched between opposing corners of a square 201b was formed.

Next, in order to provide the insulating layer 240 on the surface of the silver nanowire conductive film to be the X-side electrode sheet 210, an ultraviolet curable polyester resin ink containing pentaerythritol triacrylate as a curing agent is applied to coat the input area and cured. I let you.

Next, these silver nanowire conductive films were cut out to obtain X-side and Y- side electrode sheets 210 and 220.
Next, the X-side electrode sheet 210 and the Y-side electrode sheet 220 are transparently adhered so that the electrodes 201a and 201b are projected onto the surface of the input member 200 in a checkered pattern through the isolated electrodes 202a and 202b. A sheet (adhesive material 250) was attached to obtain an input member 200 of a capacitive touch panel (input device).

The input member 200 thus manufactured could not visually confirm the wiring pattern in the input area, and thus the appearance was excellent.
Next, a capacitive touch panel interface (CY8C24094: manufactured by Cypress) was electrically connected to the input member 200 as the detecting means 270, and it was confirmed that the operation with the finger H could be performed satisfactorily.
In this touch panel, the wiring pattern could not be visually recognized even on a black matte plate or on a light emitting liquid crystal display. Moreover, when the input area and outer peripheral part of this touch panel were hold | maintained on the flat board and it pressed with the finger | toe, the row side output and the column side output corresponding to a press location were obtained.

[Production Example 8] Fabrication of membrane type touch panel (input device) (Comparative example of the present invention)
A touch panel was produced under the same conditions as in Production Example 6 except that the laser light irradiation condition was changed to Production Example 3.
Although this touch panel operated normally and the wiring pattern could not be visually recognized on the liquid crystal display that emits light, the wiring pattern was visually recognized when observed in detail on the sheet of the black textured surface.

[Production Example 9] Fabrication of capacitive touch panel (input device) (comparative example of the present invention)
A capacitive touch panel was produced in the same manner as in Production Example 7 except that the conductive film was changed to the silver deposited film of Production Example 4.
The touch panel operated normally, but the wiring pattern was clearly visible in the input area.

[Production Example 10] Fabrication of membrane-type touch panel (input device) (comparative example of the present invention)
A broken-line substrate of a membrane touch panel was produced in the same manner as in Production Example 5 except that the conductive film was obtained in Production Example 4 and the output of the laser light was half that of Production Example 2 (5 mW).
This wiring board did not operate normally because the wiring pattern was clearly visually recognized and there was a connection failure between the wirings.

The input device according to the present invention is extremely useful industrially because it is easily manufactured, has a conductive pattern that is difficult to be seen even if the width of the insulating portion is large, and has stable electrical characteristics.

DESCRIPTION OF SYMBOLS 1,200 Input member 2 Transparent base | substrate 3 Net-like member (network member of the inorganic substance which has electroconductivity)
10, 20 Conductive pattern forming substrate 11, 21 Insulating substrate 12, 22, 212, 222 Transparent conductive layer 42 Condensing lens (condensing means)
210 X side electrode sheet (conductive pattern forming substrate)
220 Y-side electrode sheet (conductive pattern forming substrate)
270 Detection means a Transparent conductive layer (transparent conductive layer before forming conductive pattern)
F Focus I Insulator L Laser light

Claims (7)

1. An input member including an insulating substrate, and a conductive pattern forming substrate provided on at least one surface of the insulating substrate and including a transparent conductive layer including a conductive inorganic network member in an insulating transparent substrate; ,
   Detecting means that is electrically connected to the transparent conductive layer and detects an input signal;
   The transparent conductive layer is formed with an insulating portion formed by removing at least a part of the network member by irradiating the laser beam with an ultrashort pulse having a pulse width of less than 1 psec through the condensing means. An input device.
2. The input device according to claim 1,
   An input device, wherein a focal point of a laser beam is formed between the condensing means and the transparent conductive layer.
3. The input device according to claim 1 or 2,
   A pair of the input members are provided so that the conductive pattern forming substrates are stacked in the thickness direction.
4. The input device according to claim 3,
   A pair of the conductive pattern forming substrates provided so as to be laminated in the thickness direction are disposed so that the transparent conductive layers are spaced apart from each other,
   The input device is characterized in that the detection means is a capacitance type.
5. The input device according to claim 3,
   A pair of the conductive pattern forming substrates provided so as to be laminated in the thickness direction are arranged so that the transparent conductive layers face each other while being spaced apart from each other,
   An input device characterized in that a part of the transparent conductive layer can be electrically contacted by an input operation.
6. The input device according to any one of claims 1 to 5,
   The input device, wherein the conductive pattern forming substrate is transparent.
7. The input device according to any one of claims 1 to 6,
   The input device, wherein the insulating substrate and the transparent substrate are made of the same material or the same resin material.

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