WO2012020932A3 - 결함 검사장치 및 이를 이용한 결함 검사방법 - Google Patents

결함 검사장치 및 이를 이용한 결함 검사방법 Download PDF

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Publication number
WO2012020932A3
WO2012020932A3 PCT/KR2011/005427 KR2011005427W WO2012020932A3 WO 2012020932 A3 WO2012020932 A3 WO 2012020932A3 KR 2011005427 W KR2011005427 W KR 2011005427W WO 2012020932 A3 WO2012020932 A3 WO 2012020932A3
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WO
WIPO (PCT)
Prior art keywords
optical unit
inspection position
defect inspecting
same
pair
Prior art date
Application number
PCT/KR2011/005427
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English (en)
French (fr)
Other versions
WO2012020932A2 (ko
Inventor
이제선
김경덕
김종우
장기수
이종식
Original Assignee
주식회사 쓰리비 시스템
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 쓰리비 시스템 filed Critical 주식회사 쓰리비 시스템
Publication of WO2012020932A2 publication Critical patent/WO2012020932A2/ko
Publication of WO2012020932A3 publication Critical patent/WO2012020932A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9501—Semiconductor wafers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
    • G02B21/20—Binocular arrangements
    • G02B21/22—Stereoscopic arrangements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

본 발명은 결함 검사장치에 관한 것으로서, 한 쌍의 광을 각각 콜리메이팅하여 검사대상물의 검사위치로 조사하고, 상기 한 쌍의 광의 가장자리부가 서로 겹쳐져 형성된 중첩영역이 상기 검사위치에 조사되도록 하는 제1광유닛; 한 쌍의 광을 각각 콜리메이팅하여 상기 검사위치로 조사하고, 상기 한 쌍의 광의 가장자리부가 서로 겹쳐져 형성된 중첩영역이 상기 검사위치에 조사되도록 하는 제2광유닛; 상기 제1광유닛과 상기 제2광유닛이 교대로 점등되도록 제어하는 제어부; 및 상기 제1광유닛 또는 상기 제2광유닛으로부터 조사되어 상기 검사위치에서 반사되어 입사되는 광을 이용하여 상기 검사위치의 영상을 촬상하는 카메라;를 포함하는 것을 특징으로 한다.
PCT/KR2011/005427 2010-08-10 2011-07-22 결함 검사장치 및 이를 이용한 결함 검사방법 WO2012020932A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0076935 2010-08-10
KR1020100076935A KR101211438B1 (ko) 2010-08-10 2010-08-10 결함 검사장치

Publications (2)

Publication Number Publication Date
WO2012020932A2 WO2012020932A2 (ko) 2012-02-16
WO2012020932A3 true WO2012020932A3 (ko) 2012-05-31

Family

ID=45568006

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/005427 WO2012020932A2 (ko) 2010-08-10 2011-07-22 결함 검사장치 및 이를 이용한 결함 검사방법

Country Status (2)

Country Link
KR (1) KR101211438B1 (ko)
WO (1) WO2012020932A2 (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101446984B1 (ko) * 2013-08-08 2014-10-07 이영우 결함 검사장치
KR101657745B1 (ko) * 2013-12-11 2016-09-19 주식회사 포스코 강판의 결함 탐상 장치 및 방법
KR101584305B1 (ko) * 2014-05-30 2016-01-11 이영우 오목 반사체를 이용한 기판 검사장치
KR101714625B1 (ko) * 2015-09-21 2017-03-09 주식회사 온비젼 슬릿조명을 구비한 비젼검사시스템 및 비젼검사방법
KR102082204B1 (ko) * 2018-10-30 2020-02-27 이영우 커버 글라스의 곡면부 검사장치
KR102244724B1 (ko) * 2019-12-17 2021-05-06 주식회사 휴비츠 대형 샘플 검사용 단층촬영 장치
KR20230020728A (ko) 2021-08-04 2023-02-13 주식회사 온옵틱스 봉체의 표면크랙 검사장치

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020061476A (ko) * 2001-01-15 2002-07-24 주식회사 브이텍 패널 검사장치 및 패널 검사방법
JP2008216059A (ja) * 2007-03-05 2008-09-18 Kurabo Ind Ltd プリント配線板の検査装置
JP2009097977A (ja) * 2007-10-17 2009-05-07 Hitachi Computer Peripherals Co Ltd 外観検査装置
JP2010139249A (ja) * 2008-12-09 2010-06-24 Futec Inc 長寿命光源を有する検査装置およびその制御方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020061476A (ko) * 2001-01-15 2002-07-24 주식회사 브이텍 패널 검사장치 및 패널 검사방법
JP2008216059A (ja) * 2007-03-05 2008-09-18 Kurabo Ind Ltd プリント配線板の検査装置
JP2009097977A (ja) * 2007-10-17 2009-05-07 Hitachi Computer Peripherals Co Ltd 外観検査装置
JP2010139249A (ja) * 2008-12-09 2010-06-24 Futec Inc 長寿命光源を有する検査装置およびその制御方法

Also Published As

Publication number Publication date
KR101211438B1 (ko) 2012-12-12
KR20120014765A (ko) 2012-02-20
WO2012020932A2 (ko) 2012-02-16

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