WO2012020932A3 - 결함 검사장치 및 이를 이용한 결함 검사방법 - Google Patents
결함 검사장치 및 이를 이용한 결함 검사방법 Download PDFInfo
- Publication number
- WO2012020932A3 WO2012020932A3 PCT/KR2011/005427 KR2011005427W WO2012020932A3 WO 2012020932 A3 WO2012020932 A3 WO 2012020932A3 KR 2011005427 W KR2011005427 W KR 2011005427W WO 2012020932 A3 WO2012020932 A3 WO 2012020932A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- optical unit
- inspection position
- defect inspecting
- same
- pair
- Prior art date
Links
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/18—Arrangements with more than one light path, e.g. for comparing two specimens
- G02B21/20—Binocular arrangements
- G02B21/22—Stereoscopic arrangements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
본 발명은 결함 검사장치에 관한 것으로서, 한 쌍의 광을 각각 콜리메이팅하여 검사대상물의 검사위치로 조사하고, 상기 한 쌍의 광의 가장자리부가 서로 겹쳐져 형성된 중첩영역이 상기 검사위치에 조사되도록 하는 제1광유닛; 한 쌍의 광을 각각 콜리메이팅하여 상기 검사위치로 조사하고, 상기 한 쌍의 광의 가장자리부가 서로 겹쳐져 형성된 중첩영역이 상기 검사위치에 조사되도록 하는 제2광유닛; 상기 제1광유닛과 상기 제2광유닛이 교대로 점등되도록 제어하는 제어부; 및 상기 제1광유닛 또는 상기 제2광유닛으로부터 조사되어 상기 검사위치에서 반사되어 입사되는 광을 이용하여 상기 검사위치의 영상을 촬상하는 카메라;를 포함하는 것을 특징으로 한다.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2010-0076935 | 2010-08-10 | ||
KR1020100076935A KR101211438B1 (ko) | 2010-08-10 | 2010-08-10 | 결함 검사장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2012020932A2 WO2012020932A2 (ko) | 2012-02-16 |
WO2012020932A3 true WO2012020932A3 (ko) | 2012-05-31 |
Family
ID=45568006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2011/005427 WO2012020932A2 (ko) | 2010-08-10 | 2011-07-22 | 결함 검사장치 및 이를 이용한 결함 검사방법 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR101211438B1 (ko) |
WO (1) | WO2012020932A2 (ko) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101446984B1 (ko) * | 2013-08-08 | 2014-10-07 | 이영우 | 결함 검사장치 |
KR101657745B1 (ko) | 2013-12-11 | 2016-09-19 | 주식회사 포스코 | 강판의 결함 탐상 장치 및 방법 |
KR101584305B1 (ko) * | 2014-05-30 | 2016-01-11 | 이영우 | 오목 반사체를 이용한 기판 검사장치 |
KR101714625B1 (ko) * | 2015-09-21 | 2017-03-09 | 주식회사 온비젼 | 슬릿조명을 구비한 비젼검사시스템 및 비젼검사방법 |
KR102082204B1 (ko) * | 2018-10-30 | 2020-02-27 | 이영우 | 커버 글라스의 곡면부 검사장치 |
KR102244724B1 (ko) * | 2019-12-17 | 2021-05-06 | 주식회사 휴비츠 | 대형 샘플 검사용 단층촬영 장치 |
KR102694091B1 (ko) | 2021-08-04 | 2024-08-12 | 주식회사 온옵틱스 | 봉체의 표면크랙 검사장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020061476A (ko) * | 2001-01-15 | 2002-07-24 | 주식회사 브이텍 | 패널 검사장치 및 패널 검사방법 |
JP2008216059A (ja) * | 2007-03-05 | 2008-09-18 | Kurabo Ind Ltd | プリント配線板の検査装置 |
JP2009097977A (ja) * | 2007-10-17 | 2009-05-07 | Hitachi Computer Peripherals Co Ltd | 外観検査装置 |
JP2010139249A (ja) * | 2008-12-09 | 2010-06-24 | Futec Inc | 長寿命光源を有する検査装置およびその制御方法 |
-
2010
- 2010-08-10 KR KR1020100076935A patent/KR101211438B1/ko active IP Right Grant
-
2011
- 2011-07-22 WO PCT/KR2011/005427 patent/WO2012020932A2/ko active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20020061476A (ko) * | 2001-01-15 | 2002-07-24 | 주식회사 브이텍 | 패널 검사장치 및 패널 검사방법 |
JP2008216059A (ja) * | 2007-03-05 | 2008-09-18 | Kurabo Ind Ltd | プリント配線板の検査装置 |
JP2009097977A (ja) * | 2007-10-17 | 2009-05-07 | Hitachi Computer Peripherals Co Ltd | 外観検査装置 |
JP2010139249A (ja) * | 2008-12-09 | 2010-06-24 | Futec Inc | 長寿命光源を有する検査装置およびその制御方法 |
Also Published As
Publication number | Publication date |
---|---|
WO2012020932A2 (ko) | 2012-02-16 |
KR20120014765A (ko) | 2012-02-20 |
KR101211438B1 (ko) | 2012-12-12 |
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