WO2012016954A1 - Schneidwerkzeug mit mehrlagiger beschichtung - Google Patents

Schneidwerkzeug mit mehrlagiger beschichtung Download PDF

Info

Publication number
WO2012016954A1
WO2012016954A1 PCT/EP2011/063234 EP2011063234W WO2012016954A1 WO 2012016954 A1 WO2012016954 A1 WO 2012016954A1 EP 2011063234 W EP2011063234 W EP 2011063234W WO 2012016954 A1 WO2012016954 A1 WO 2012016954A1
Authority
WO
WIPO (PCT)
Prior art keywords
nitride
layer
aluminum
layers
cutting tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2011/063234
Other languages
German (de)
English (en)
French (fr)
Inventor
Veit Schier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Walter AG
Original Assignee
Walter AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Walter AG filed Critical Walter AG
Priority to CN201180038990.2A priority Critical patent/CN103201410B/zh
Priority to US13/813,569 priority patent/US9028954B2/en
Priority to EP11746208.5A priority patent/EP2601330B1/de
Priority to ES11746208.5T priority patent/ES2647579T3/es
Priority to JP2013522222A priority patent/JP5969473B2/ja
Priority to KR1020137005688A priority patent/KR101818280B1/ko
Publication of WO2012016954A1 publication Critical patent/WO2012016954A1/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B27/00—Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14—Cutting tools of which the bits or tips or cutting inserts are of special material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y10T428/24967—Absolute thicknesses specified
    • Y10T428/24975—No layer or component greater than 5 mils thick
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y10T428/265—1 mil or less

Definitions

  • the invention relates to a cutting tool having a base body and a multi-layer coating applied thereto.
  • Cutting tools comprise a base body, which is made for example of hard metal, cermet, steel or Schnellarbeitsstahi, and to increase the service life or to improve the cutting properties applied to the body single-layer or multi-layer hard coating.
  • CVD chemical vapor deposition
  • PVD physical vapor deposition
  • WO 96/23911 describes a cutting tool with a multilayer wear protection coating of a plurality of individual layers, wherein a single layer of metallic hard material is applied directly on the base body and further individual layers are arranged above it, so that the individual layers form a periodically repeating composite each form three different individual layers, each comprising two different metallic hard material layers and a covalent hard material layer.
  • the three-layer composite consists of two individual layers of titanium nitride and titanium carbide and a single layer of the covalent hard material boron carbide. It is described that the wear protection coating should comprise at least 3 covalent layers of hard material and thus consists of at least 9 individual layers.
  • the resting on the body first single layer is a layer of titanium nitride or titanium carbide, as they are to adhere well to the body made of steel or carbide.
  • silicon carbide, silicon nitride, boron nitride, silicon (mixed crystal of silicon and aluminum oxynitride), carbon and others are indicated in addition to the particularly preferred boron carbide.
  • titanium nitride and titanium carbide described do not meet today's requirements for wear protection. Titanium carbide is tough, but too brittle for a wear-resistant coating. Titanium nitride is softer and less brittle than titanium carbide. Both titanium carbide and titanium nitride possess for Applications with high temperature loads insufficient temperature resistance. Also, the heat dissipation into the chips in metalworking is insufficient.
  • the object of the present invention was to provide cutting tools with a base body and a multilayer coating with improved adhesion to the base body compared to the prior art and better high-temperature properties with comparable or better hardness values and improved wear resistance.
  • a cutting tool with a base body and a multi-layer coating applied thereto, wherein a first layer A made of a hard material is applied to the base body, which is made of titanium-aluminum nitride (TiAIN), titanium-aluminum-silicon nitride (US Pat. TiAISiN), chromium nitride (CrN), aluminum-chromium-nitride (AICrN), aluminum-chromium-silicon-nitride (AICrSiN) and zirconium-nitride (ZrN), and immediately above the first layer A a second layer B made of silicon nitride (Si 3 N 4 ) is applied.
  • TiAIN titanium-aluminum nitride
  • TiAIN titanium-aluminum-silicon nitride
  • CrN chromium nitride
  • AICrN aluminum-chromium-nitride
  • AICrSiN aluminum-chrom
  • the first nitride layer A has over the known from the prior art metallic hard material layers such. As TiC or TiN, a significantly improved temperature resistance and at the same time a high hardness, which is comparable to the hardness of TiC, but not as brittle as this.
  • the second layer B of silicon nitride (Si 3 N) is hard and resistant to wear and prevents in combination with the first nitride layer A very good heat transfer through the wear protection coating in the body and thus promotes improved heat dissipation into the chips in metalworking with the cutting tool. The prevention of heat transfer is similarly effectively effected by the silicon nitride as by alumina, which is very often used as a hard wear protection layer.
  • the second layer B of silicon nitride (Si 3 N 4 ) has a very high oxidation resistance even at high temperatures.
  • the first layer A of hard material is applied directly to the base body. It gives a particularly good adhesion between the silicon nitride and the base body, in particular if the first layer A consists of TiAIN.
  • at least one further periodically repeated sequence of layers A and B is applied over the second layer B, wherein the layers A are likewise covered by titanium aluminum nitride (II) in the periodically repeated sequence of layers A and B.
  • Titanium-aluminum-silicon-nitride TiAISiN
  • CrN chromium-nitride
  • AICrN aluminum-aluminum-chromium-nitride
  • AICrSiN aluminum-chromium-silicon-nitride
  • ZrN zirconium-nitride
  • the layers A are preferably titanium-aluminum nitride ( ⁇ ) and the layers B are each silicon nitride (Si 3 N 4 ).
  • the silicon nitride (Si 3 N 4 ) of the hard material layer B is amorphous.
  • Amorphous silicon nitride has surprisingly good anti-wear properties and good temperature resistance combined with high hardness.
  • the silicon nitride (Si 3 N 4 ) of the hard material layer B may each contain up to 20 atom%, preferably up to 5 atom%, of conventional or unusual impurities or doping elements. These usual or unusual impurities or dopants are preferably selected from oxygen, carbon, boron, gallium and arsenic.
  • the hard material of the first layer A is titanium aluminum nitride (TiAIN).
  • TiAIN has proven to be particularly advantageous in combination with the second layer B of silicon nitride (Si 3 N 4 ).
  • TiAIN has a cubic face-centered crystal lattice, as well as TiAISiN, which may be present in the TiAIN layer in an amount of up to 5% by weight.
  • At least one further layer of hard material or metallic layer is applied, which comprises aluminum oxide, aluminum-chromium oxide, chromium oxide, zirconium nitride, titanium nitride and aluminum metal is selected, wherein all the aforementioned hard materials may optionally be doped with one or more further elements.
  • At least one further hard material layer made of aluminum oxide and above this a further layer of zirconium nitride, titanium nitride or aluminum metal is applied over the layers A and B.
  • the over the layers A and B can be applied further layers are known in principle.
  • Aluminum oxide for example, is a very hard and durable wear protection layer, similar also aluminum-chromium oxide and chromium oxide.
  • zirconium nitride, titanium nitride and aluminum metal are usually applied to the coloring of the cutting tool and as indicator layers for use of the cutting tool as outermost layers.
  • the multilayer coating according to the invention expediently has a total layer thickness in the range from 2 to 10 ⁇ m, preferably from 3 to 6 ⁇ m.
  • the first layer A which is preferably applied directly to the base body, expediently has a layer thickness in the range from 0.5 to 4 ⁇ m, preferably from 1 to 3 ⁇ m.
  • the layer thicknesses of optionally present further layers A are expediently in the range from 0.2 to 2 ⁇ m, preferably from 0.3 to 1 ⁇ m.
  • the layers B have expediently layer thicknesses in the range of 0.2 to 5 ⁇ , preferably from 0.3 to 3 ⁇ , more preferably in the range of 0.5 to 1 ⁇ . If the layer thicknesses are too high, there is generally the risk of spalling due to excessive mechanical stresses in the layer. If the layer thicknesses are too small, there is a risk that the individual layer will not or not sufficiently fulfill the desired function.
  • the layers A and B in the coating according to the invention by means of PVD method applied to the body layers, the layers A particularly preferably by arc evaporation (Arc-PVD) and the layers B particularly preferably by magnetron sputtering, especially dual magnetron sputtering or HIPIMS (High Power Impulse Magnetron Sputtering) are applied.
  • PVD arc evaporation
  • HIPIMS High Power Impulse Magnetron Sputtering
  • the main body of the cutting tool according to the invention is preferably made of hard metal, cerium, steel or high speed steel (HSS).
  • the novel coating of the present invention opens up a wide range of possibilities for improving and / or adapting the wear resistance, service life and cutting properties of cutting tools.
  • the wear resistance, stability and cutting properties of a coating on a cutting tool depend on various factors, such as the material of the main body of the cutting tool, the sequence, nature and composition of the layers present in the coating, the thickness of the various layers and last but not least Type of cutting operation performed with the cutting tool.
  • different wear resistance depending on the type of workpiece to be machined, the respective processing method and the other conditions during processing, such as development of high temperatures or use more corrosive Coolants arise.
  • Substantial improvements of the cutting tools according to the invention with a base body and a multilayer coating according to the invention are improved adhesion of the coating to the base body, better high-temperature properties, better hardness values and improved wear resistance compared with the prior art.
  • Another surprising effect observed in the coatings of the invention is a reduction in the thermal conductivity of the overall coating.
  • This outstanding reduction in the thermal conductivity of the coating has a very positive effect on the use of such cutting tools in the machining of metals and composite materials.
  • the reduced thermal conductivity leads to improved thermal shock resistance and thus to increased crack resistance of the material of the base body, in particular hard metal.
  • Target Ti / Al (33/67 at.%) Round source (63 mm diameter)
  • PVD method dual magnetron sputtering
  • Target Si square source (80 cm x 20 cm)
  • Binding character covalent according to XPS
  • the layer A of TiAIN and the layer B of Si 3 N 4 were deposited by the same PVD method and parameters as in Example 1.
  • Comparative Example 2 As Comparative Example 1, but depositing a 4.0 pm thick TiAIN layer.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
PCT/EP2011/063234 2010-08-06 2011-08-01 Schneidwerkzeug mit mehrlagiger beschichtung Ceased WO2012016954A1 (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN201180038990.2A CN103201410B (zh) 2010-08-06 2011-08-01 包括多层涂层的切削刀具
US13/813,569 US9028954B2 (en) 2010-08-06 2011-08-01 Cutting tool with multi-layer coating
EP11746208.5A EP2601330B1 (de) 2010-08-06 2011-08-01 Schneidwerkzeug mit mehrlagiger beschichtung
ES11746208.5T ES2647579T3 (es) 2010-08-06 2011-08-01 Herramienta de corte con revestimiento multicapa
JP2013522222A JP5969473B2 (ja) 2010-08-06 2011-08-01 多層被膜を有する切削工具
KR1020137005688A KR101818280B1 (ko) 2010-08-06 2011-08-01 다층 코팅을 포함하는 절삭 공구

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010039035.6 2010-08-06
DE201010039035 DE102010039035A1 (de) 2010-08-06 2010-08-06 Schneidwerkzeug mit mehrlagiger Beschichtung

Publications (1)

Publication Number Publication Date
WO2012016954A1 true WO2012016954A1 (de) 2012-02-09

Family

ID=44509297

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2011/063234 Ceased WO2012016954A1 (de) 2010-08-06 2011-08-01 Schneidwerkzeug mit mehrlagiger beschichtung

Country Status (8)

Country Link
US (1) US9028954B2 (enExample)
EP (1) EP2601330B1 (enExample)
JP (1) JP5969473B2 (enExample)
KR (1) KR101818280B1 (enExample)
CN (1) CN103201410B (enExample)
DE (1) DE102010039035A1 (enExample)
ES (1) ES2647579T3 (enExample)
WO (1) WO2012016954A1 (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2490361C1 (ru) * 2012-06-26 2013-08-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
JP2015529571A (ja) * 2012-08-03 2015-10-08 バルター アクチェンゲゼルシャフト ＴｉＡｌＮ被覆工具
CN107740053A (zh) * 2017-10-30 2018-02-27 广东工业大学 一种AlCrSiN/VSiN纳米多层涂层及其制备方法
CN115595532A (zh) * 2022-10-12 2023-01-13 株洲华锐精密工具股份有限公司（Cn） 一种多层结构硬质涂层及其制备方法与应用

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2636764B1 (en) 2012-03-07 2014-07-09 Seco Tools Ab Nanolaminated coated cutting tool
JP6385237B2 (ja) * 2013-10-22 2018-09-05 日立金属株式会社 被覆切削工具
CN103952660B (zh) * 2014-05-16 2017-04-12 中国科学院宁波材料技术与工程研究所 具有氮化物膜的复合材料及其制法和应用
CN104370555B (zh) * 2014-10-27 2016-03-23 合肥市东庐机械制造有限公司 一种氮化硅基陶瓷刀具材料及其制备方法
EP3056587B1 (de) 2015-02-13 2020-11-18 Walter AG VHM-Schaftfräser mit TiAlN-ZrN-Beschichtung
WO2016145533A1 (en) * 2015-03-17 2016-09-22 Magna International Inc. Non-metallic coating for steel substrates and method for forming the same
WO2016184954A1 (en) * 2015-05-21 2016-11-24 Walter Ag Tool with multi-layer arc pvd coating
DE102016108734B4 (de) 2016-05-11 2023-09-07 Kennametal Inc. Beschichteter Körper und Verfahren zur Herstellung des Körpers
CN106086802B (zh) * 2016-06-23 2018-08-28 瑞宏精密电子（太仓）有限公司 一种高结合力多级硬质涂层的制备方法
CN106191791A (zh) * 2016-07-06 2016-12-07 广东工业大学 一种高温低摩擦CrAlSiON纳米复合涂层及其制备方法
CN106702331B (zh) * 2016-12-07 2018-03-02 广东工业大学 一种高温耐磨CrAlSiON基纳米复合涂层及其制备方法和应用
CN106917066B (zh) * 2017-03-17 2019-03-05 大连理工大学 一种四元单层超硬薄膜材料及其制备方法
CN107190229B (zh) * 2017-05-15 2019-03-05 广东工业大学 一种自组装纳米氧氮化物耐高温涂层及其制备方法
CN108165937B (zh) * 2018-01-16 2020-12-01 浙江神钢赛欧科技有限公司 一种纳米复合交替涂层刀具及其制备方法
CN108866491A (zh) * 2018-07-24 2018-11-23 山东大学 TiAlN/CrAlSiN纳米复合多层涂层及其制备方法
KR102200647B1 (ko) 2018-12-26 2021-01-11 한국야금 주식회사 절삭공구용 경질피막 및 이의 제조방법
JP7181827B2 (ja) * 2019-03-28 2022-12-01 三菱マテリアル電子化成株式会社 アルミナにより被覆された窒化ジルコニウム粉末及びその製造方法
EP3736358A1 (en) * 2019-05-08 2020-11-11 Walter Ag A coated cutting tool
CN110578123A (zh) * 2019-10-18 2019-12-17 天津职业技术师范大学(中国职业培训指导教师进修中心) 高硬度AlTiN/AlTiSiN多层纳米复合涂层及其制备工艺
CN112575291A (zh) * 2020-11-26 2021-03-30 苏州德耐纳米科技有限公司 一种氮化铬、氮化钛铝硬质多层纳米膜涂层
US11731202B2 (en) 2021-04-19 2023-08-22 Kennametal Inc. Coating, method for coating, and coated cutting tool
CN113564526B (zh) * 2021-07-27 2023-05-26 上海工具厂有限公司 一种复合涂层薄膜及其制备方法和应用
CN114293147B (zh) * 2021-11-16 2022-10-11 南京航空航天大学 一种镍基高温合金材料及其制备方法
KR102747688B1 (ko) * 2021-12-30 2024-12-27 한국야금 주식회사 절삭공구용 경질피막
CN114807850A (zh) * 2022-04-30 2022-07-29 西安交通大学 一种应用于热锻模具表面的氮化物硬质薄膜及其制备方法
CN115418607B (zh) * 2022-08-25 2024-02-23 株洲钻石切削刀具股份有限公司 含三氧化二铬氧化物层的复合涂层切削刀具
CN115505882B (zh) * 2022-09-14 2024-06-11 广东工业大学 氮化物结合氧化物双涂层的制备方法及涂层刀具
CN115522169B (zh) * 2022-09-30 2024-10-29 广东工业大学 氧化物硬质涂层的复合沉积方法及涂层刀具

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0653499A1 (en) * 1993-05-31 1995-05-17 Sumitomo Electric Industries, Ltd. Coated cutting tool and method for producing the same
WO1996023911A1 (de) 1995-02-01 1996-08-08 Forschungszentrum Karlsruhe Gmbh Verschleissschutzschicht
US20040072038A1 (en) * 2002-10-09 2004-04-15 Henderer Willard E. Tool with wear resistant low friction coating and method of making the same
WO2005120786A2 (en) * 2004-06-07 2005-12-22 Kennametal Inc. Low torque tap

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5925968A (ja) 1982-08-04 1984-02-10 Hitachi Metals Ltd 多重被覆材料およびその製造法
AT385947B (de) * 1983-12-22 1988-06-10 Ver Edelstahlwerke Ag Hartmetallkoerper, insbesondere hartmetall-schneidwerkzeug
AT387186B (de) * 1987-05-04 1988-12-12 Ver Edelstahlwerke Ag Beschichteter hartmetallkoerper
DE69527236T2 (de) 1994-09-16 2003-03-20 Sumitomo Electric Industries, Ltd. Mehrschichtfilm aus ultrafeinen Partikeln und harter Verbundwerkstoff für Werkzeuge, die diesen Film enthalten
JPH08134629A (ja) * 1994-09-16 1996-05-28 Sumitomo Electric Ind Ltd 超微粒積層膜と、それを有する工具用複合高硬度材料
JP3347687B2 (ja) * 1999-05-19 2002-11-20 日立ツール株式会社 硬質皮膜被覆工具
JP3417907B2 (ja) * 2000-07-13 2003-06-16 日立ツール株式会社 多層皮膜被覆工具
JP2007319964A (ja) 2006-05-31 2007-12-13 Sumitomo Electric Hardmetal Corp 刃先交換型切削チップ
EP2098611B1 (en) * 2008-03-07 2013-02-13 Seco Tools AB Layered coated cutting tool
JP5321360B2 (ja) 2009-08-31 2013-10-23 三菱マテリアル株式会社 表面被覆切削工具
JP5043908B2 (ja) 2009-09-04 2012-10-10 株式会社神戸製鋼所 微細結晶硬質皮膜の形成方法
RU2542185C2 (ru) * 2010-01-11 2015-02-20 Искар Лтд. Режущий инструмент с покрытием
US8409695B2 (en) * 2010-05-28 2013-04-02 Kennametal Inc. Multilayer nitride hard coatings

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0653499A1 (en) * 1993-05-31 1995-05-17 Sumitomo Electric Industries, Ltd. Coated cutting tool and method for producing the same
WO1996023911A1 (de) 1995-02-01 1996-08-08 Forschungszentrum Karlsruhe Gmbh Verschleissschutzschicht
US20040072038A1 (en) * 2002-10-09 2004-04-15 Henderer Willard E. Tool with wear resistant low friction coating and method of making the same
WO2005120786A2 (en) * 2004-06-07 2005-12-22 Kennametal Inc. Low torque tap

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
AGUZZOLI C ET AL: "Physicochemical, structural, and mechanical properties of Si3 N4 films annealed in O2", JOURNAL OF APPLIED PHYSICS, vol. 107, no. 7, 1 April 2010 (2010-04-01), AMERICAN INSTITUTE OF PHYSICS, USA, XP002660443, DOI: 10.1063/1.3359655 *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2490361C1 (ru) * 2012-06-26 2013-08-20 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Ульяновский государственный технический университет" Способ получения многослойного покрытия для режущего инструмента
JP2015529571A (ja) * 2012-08-03 2015-10-08 バルター アクチェンゲゼルシャフト ＴｉＡｌＮ被覆工具
CN107740053A (zh) * 2017-10-30 2018-02-27 广东工业大学 一种AlCrSiN/VSiN纳米多层涂层及其制备方法
CN115595532A (zh) * 2022-10-12 2023-01-13 株洲华锐精密工具股份有限公司（Cn） 一种多层结构硬质涂层及其制备方法与应用

Also Published As

Publication number Publication date
ES2647579T3 (es) 2017-12-22
US20130216804A1 (en) 2013-08-22
DE102010039035A1 (de) 2012-02-09
KR101818280B1 (ko) 2018-01-12
JP2013534186A (ja) 2013-09-02
JP5969473B2 (ja) 2016-08-17
CN103201410A (zh) 2013-07-10
EP2601330B1 (de) 2017-10-04
KR20130137604A (ko) 2013-12-17
US9028954B2 (en) 2015-05-12
EP2601330A1 (de) 2013-06-12
CN103201410B (zh) 2015-12-16

Similar Documents

Publication Publication Date Title
EP2601330B1 (de) Schneidwerkzeug mit mehrlagiger beschichtung
EP2252721B1 (de) Hartstoffbeschichteter körper
EP1726687B1 (de) Beschichtes Werkzeug
EP0306077B1 (de) Verfahren zur Herstellung mehrlagig beschichteter Hartmetallteile
EP2132358B1 (de) Mehrlagige cvd-schicht
EP3380645B1 (de) Beschichtung eines körpers mit diamantschicht und hartstoffschicht
WO2011149580A1 (en) Multilayer nitride hard coatings
US8389115B2 (en) Thermally stabilized (Ti,Si)N layer for cutting tool insert
EP0925386A1 (de) Verschleissschutz-beschichtetes werkstück
DE102008013966A1 (de) Hartstoffbeschichteter Körper
EP2576854B1 (en) Coated cutting tool
KR20090122401A (ko) 작업편용 내마모성 하드코팅 및 이의 제조방법
CZ2003819A3 (cs) Řezcací nástrojová vložka, způsob její výroby a její použití
EP2281072B1 (de) Werkzeug mit metalloxidbeschichtung
DE112013002302B4 (de) Hartbeschichtung für ein Schneidwerkzeug
EP2714964A1 (de) Beschichtetes holzbearbeitungswerkzeug
KR20080106099A (ko) 분단가공, 홈가공 및 나사가공용 초경합금 인서트
EP2171121B1 (de) Werzeug mit mehrlagiger metalloxidbeschichtung und verfahren zum herstellen des beschichteten werkzeugs
EP2480701A1 (de) Werkzeugbeschichtung
KR20090028444A (ko) 밀링용 피복 절삭 인서트
EP2179073A2 (de) Al-Ti-Ru-N-C HARTSTOFFSCHICHT
EP2686463A1 (de) Beschichteter körper, verwendung desselben und verfahren zu dessen herstellung
WO2013037967A1 (de) Schneidwerkzeug mit verschleisserkennungsschicht
DE102012017033A1 (de) PVD Lichtbogenbeschichtung mit verbesserten reibungsmindernden und verschleissreduzierenden Eigenschaften
DE10251404A1 (de) Verbundwerkstoff

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11746208

Country of ref document: EP

Kind code of ref document: A1

REEP Request for entry into the european phase

Ref document number: 2011746208

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2011746208

Country of ref document: EP

ENP Entry into the national phase

Ref document number: 2013522222

Country of ref document: JP

Kind code of ref document: A

ENP Entry into the national phase

Ref document number: 20137005688

Country of ref document: KR

Kind code of ref document: A

WWE Wipo information: entry into national phase

Ref document number: 13813569

Country of ref document: US