WO2011160794A1 - Capteur de force piézo-résistif - Google Patents

Capteur de force piézo-résistif Download PDF

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Publication number
WO2011160794A1
WO2011160794A1 PCT/EP2011/003003 EP2011003003W WO2011160794A1 WO 2011160794 A1 WO2011160794 A1 WO 2011160794A1 EP 2011003003 W EP2011003003 W EP 2011003003W WO 2011160794 A1 WO2011160794 A1 WO 2011160794A1
Authority
WO
WIPO (PCT)
Prior art keywords
force sensor
electrode
sensor
piezoresistive
substrate
Prior art date
Application number
PCT/EP2011/003003
Other languages
German (de)
English (en)
Inventor
Hannes Wagner
Original Assignee
Deutsches Zentrum für Luft- und Raumfahrt e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Deutsches Zentrum für Luft- und Raumfahrt e.V. filed Critical Deutsches Zentrum für Luft- und Raumfahrt e.V.
Priority to EP11733995.2A priority Critical patent/EP2585802A1/fr
Publication of WO2011160794A1 publication Critical patent/WO2011160794A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0009—Force sensors associated with a bearing

Definitions

  • the invention also relates to advantageous use fertilize the force sensor according to claims 8 and 9 and a method for providing a force sensor according to the claim 10.
  • Piezoresistive force sensors can be used to measure mechanical forces, pressures or moments.
  • DE 102 43 095 B4 it is proposed to provide a rolling bearing with such force sensors in order to realize an integrated state measurement of the rolling bearing.
  • the force sensors are integrated by direct coating of a part of the rolling bearing in the rolling bearing.
  • Such a direct coating of complex components requires a special manufacturing and process technology in component manufacturing, which is more expensive than the current, existing manufacturing and processing technology for the complex component without force sensors.
  • a practical realization of the proposed force sensors is made more difficult.
  • the invention is therefore based on the object of specifying ways in which the practical use of piezoresistive force sensors in bearings and other components is facilitated.
  • a force sensor is proposed, which is produced as a separate component, which can be used after its production in another component or connectable thereto.
  • a substrate is used for the application of the piezoresistive sensor layer, which is not, as in the prior art, part of another, to be measured by the force sensor component, but an additional element, such as a sensor plate.
  • the force sensor indicated in the preamble of claim 1 three-layer system is used.
  • the force sensor can be realized as an extremely flat and compact, compact component which can be easily installed, for example, in ball bearings or other devices.
  • the force sensor can be realized, for example, with a thickness of only 1 mm.
  • the invention allows the force sensor to be usable and traded as a separate electrical component after its manufacture. This makes it possible, for example, to buy a rolling element bearing manufacturer separately from force sensor components manufactured by a company specializing in sensor manufacturing, to integrate it into rolling bearings and to offer suitable rolling bearings provided with integrated force sensors. As a result, the manufacturer of rolling bearings does not have to specifically adapt his own manufacturing steps to the production of piezoresistive force sensors.
  • a further reduction in the cost and development time of new components is made possible by the invention in that the force sensors must be integrated as finished components only in a desired device. Previously, it was necessary to adapt the piezoresistive sensor layer to the respective bearing size and to optimize accordingly. This effort can be eliminated with the invention.
  • the force sensor according to the invention can be used independently of the size of the bearing.
  • the reliability and maintainability of equipped with one or more force sensors components can be improved.
  • a direct coating of a part of the component with the piezoresistive sensor layer a fully functional coating with a number of sensor pairs necessary for bearing monitoring is required.
  • the failure of a single sensor would result in the entire coated part having to be replaced.
  • the invention makes it possible to replace it separately by the possible interchangeability of a single force sensor as a single component. This also makes a cost reduction possible.
  • the force sensor has a first externally contactable electrical connection element which is directly or indirectly connected to the substrate, and at least one second externally contactable electrical connection element which is directly or indirectly connected to the at least one electrode electrical contact tion of the force sensor.
  • the force sensor can be arranged, for example, in a form-fitting manner in a correspondingly shaped depression of the component into which it is to be inserted.
  • the force sensor has at least fastening element by means of which the force sensor can be mounted on another component.
  • the fastening element can also be designed as a fastening flange.
  • the fastening elements can also be designed in the form of bores which are provided for the purpose of receiving locating pins for positioning.
  • the force sensor has at least one housing. At least a portion of the housing forms the substrate or the substrate is secured to the housing.
  • the housing has at least one fastening element, by means of which the force sensor can be mounted on another component.
  • the force sensor has an evaluation circuit integrated in the force sensor.
  • the evaluation circuit may in particular have a measuring bridge and / or a signal amplifier.
  • the evaluation circuit can be implemented in integrated or discrete circuit technology.
  • the integrated in the force sensor evaluation has the advantage that a defined external interface with easy evaluable signals of the force sensor is created.
  • a signal and level adjustment of the output signals to common signal and interface standards can be realized hereby, such as a 5V analog interface or a serial data interface.
  • this allows a trouble-free remote signal transmission.
  • the force sensors according to the invention are particularly suitable for use in environments with high electromagnetic radiation, ie for a harsh EMC environment.
  • the evaluation circuit is connected on the one hand to the substrate and the first electrode and on the other hand to the first and the second contactable from the outside electrical connection element. According to an advantageous development of the invention, the evaluation circuit is arranged in the housing of the force sensor.
  • the force sensor has at least one second electrode on the piezoresistive sensor layer or another, applied to the surface of the substrate, formed with hydrocarbon piezoresistive sensor layer.
  • the second electrode is covered with the insulation and wear protection layer or another insulation and wear protection layer.
  • the second electrode forms a temperature sensor with the substrate.
  • the force sensor is extended by a temperature sensor and can be used as a combined force / temperature sensor.
  • the second electrode is arranged next to the first electrode.
  • the second electrode is arranged in such a way that the area of the piezoresistive sensor layer coated with the second electrode is outside the force flux of the force to be measured when the force sensor is mounted on another component for force measurement. It is assumed that the first electrode coated region of the piezoresistive sensor layer is within the force flow of the force to be measured.
  • the second electrode is connected as a temperature compensation element with the first electrode.
  • the force sensor can be supplemented by an integrated temperature compensation.
  • the regions coated with the first and the second electrode are arranged relatively close to one another, so that it can be assumed that substantially identical temperature conditions exist in both regions.
  • connection of the force sensor with the temperature sensor can be done depending on the application. If a force measurement is carried out at essentially constant temperatures or if the influence of temperature on the measurement accuracy is insignificant, the signal of the force sensor can be used directly. Likewise, the temperature sensor can be used separately for lowering the temperature. For a high-precision force measurement can advantageously be connected to the force sensor with the force sensor to a bridge. The arrangement of the sensors in a Wheatstone bridge circuit is advantageous.
  • the force sensor is provided with a third contactable electrical connection element which is directly or indirectly connected to the second electrode for electrical contacting. This makes it possible to provide a temperature signal at the externally accessible third connection element. As a result, the force sensor according to the invention can be used at the same time for temperature detection.
  • the force sensor has an evaluation circuit integrated in the force sensor, in particular one Measuring bridge and / or a signal amplifier.
  • the evaluation circuit is advantageously connected on the one hand to the substrate, the first and the second electrode and on the other hand to the first and the second contactable from the outside electrical connection element.
  • a third electrode which forms a force sensor with the substrate
  • a fourth electrode with which the substrate forms a temperature sensor
  • the first, the second, the third and the fourth electrode are connected to each other to a full bridge circuit.
  • a sensor interconnection is proposed in which two force sensors are available by means of the first and the third electrode and two temperature sensors by means of the second and the fourth electrode and are connected to one another to form a full bridge circuit.
  • the force sensors and the temperature sensors are arranged directly next to each other. This doubles the sensitivity of the circuit.
  • the force sensor according to the invention can in principle be used for a wide variety of applications.
  • use in or on rotating components such as bearings where one or more force sensors for torque measurement, speed measurement and / or detection of rotational irregularities of the rotating component can be used.
  • rotating components even with good balancing, certain minimum imbalances always occur, which can be evaluated with the appropriate arrangement of a force sensor and can be used to determine the speed.
  • rotational irregularities such as bearing damage or severe imbalance, can be detected hereby.
  • Another advantageous application of the force sensor is a load measurement and / or a load limitation in a load-transmitting Component.
  • a load measurement can advantageously be connected to an electronically controlled load limitation by detecting and evaluating the measured load via a control device and, when a limit value is reached or exceeded, the transmitted load is downshifted by the control device.
  • the piezoresistive sensor layer has a doped or undoped hydrocarbon layer.
  • doping materials metals such as tungsten, chromium or silver can be used. It is also possible to use pure carbon layers.
  • the first, the second, the third and / or the fourth electrode is formed with a thin metal layer, for example of chromium.
  • the insulation and wear protection layer is formed from a silicon-doped hydrocarbon layer.
  • Figures 1 and 2 - a force sensor in two views
  • FIG. 1 shows a force sensor 1 designed as a separate component from the rear side of a housing 2 of the force sensor 1.
  • An elongate housing 2 with a housing chamber 3 in which electronic components of an evaluation circuit 19 are arranged can be seen.
  • the evaluation circuit 19 serves as an evaluation circuit for the signals of the force sensor 1.
  • the in the figure 1 open chamber 3 is closed as part of the production of the force sensor 1 as protection against environmental influences, eg by placing a lid or by casting the cavity 3 with a potting compound.
  • the housing 2 is advantageously made of a corrosion-resistant and high-strength material, for example steel.
  • the housing 2 From a front side opposite the rear of the housing 2 is a multi-wire electrical line 4, which serves to electrically contact the force sensor 1 with other components.
  • the housing 2 further has two through holes 5, 6 as fastening elements, via which the force sensor 1 can be mounted, for example, via dowel pins or screws with a defined adjustment.
  • FIG. 2 shows the force sensor 1 from the front side.
  • the front side has, on the surface of the housing 2, a region forming the substrate 7 made of an electrically conductive material, e.g. made of metal.
  • the entire housing may consist of the electrically conductive material.
  • a thin coating in the form of a hydrocarbon-formed piezoresistive sensor layer is applied.
  • a first electrode 12 is substantially oval in shape and connected to an electrical contact 13 via an electrical connection 9.
  • Another electrode 17 has, for example, a substantially rectangular shape.
  • the further electrode 17 is connected via an electrical connection 18 to a contact 10.
  • the contacts 10, 13 are electrically connected to the evaluation circuit 19 in the housing 2.
  • FIGS. 3a and 3b show a sketch with a circuit diagram for temperature-compensated force measurement with a circuit diagram of a quarter bridge for temperature compensation.
  • the force-applied surface is represented by the region 8.
  • the force-sensing electrode 12 is disposed within the region 8.
  • the electrode 17 provided for the temperature sensing is arranged outside the region 8.
  • the contacts 10, 13 and the substrate 7 are connected via electrical connecting lines 40, 41, 42 with the evaluation circuit 19.
  • the connecting lines 40, 41, 42 can be designed as individual wires of the electrical line 4.
  • a constant voltage source U is connected to a constant voltage.
  • the piezoresistive sensor layer can be homogeneously applied to a base body, here z. B. the substrate 7, are applied.
  • a base body here z. B. the substrate 7, are applied.
  • To form individual piezoresistive sensors it is necessary to define areas in which the actual measurement of the contact forces should take place.
  • each sensor region consists of two electrodes F, T
  • the electrode F designed for the force measurement is designed as a combination between a rectangular region 13, an elongated connection region 9 and a rounded region 12, wherein the rounded region can advantageously be in the form of an elongated oval.
  • the temperature measurement electrode T is a combination of a rectangular region 10, an oblong bonding area 18 and a rectangular area 17 configured. As can be seen in FIG. 3a, only the oval region 12 of the electrode is located within the force-loaded surface 8. The regions 9, 10, 13, 17, 18 of the electrodes are in the non-force-applied region. Thus, of the entire sensor arrangement, only the oval region 12 is located in the force flow of the mechanical construction.
  • the additionally arranged next to the electrode F rectangular electrode T is advantageously located in close proximity to the electrode F, but is not connected to conductive.
  • the rectangular regions 10, 13 of the electrodes serve at the same time for contacting the connecting wires for connection to a measuring circuit. In this case, it is advantageous that the regions 10 + 17 + 18 of the electrode T occupy the same surface area as the regions 9 + 12 + 13 of the electrode F. In this way, optimum temperature compensation is possible by means of the electrode T.
  • the substrate 7 as the metallic base body is an electrical reference for the detection of the sensor signals.
  • the substrate 7 is for example at ground potential.
  • the electrodes F, T are connected via a measuring circuit to a voltage source whose potential is higher than the ground potential. This forms a current flow, in which the charge carriers initially flow via a connection point into the electrodes T, F and from there through the sensor layer to the electrical ground, ie via the metallic base body of the substrate 7 to the ground of the power supply.
  • the piezoresistive sensor layer is inherently very high impedance.
  • each electrode can be considered as a separate, variable resistive resistor.
  • the sensors F, T are connected to the constant voltage source U via electrical resistors R trim and R e .
  • a constant current source can also be used.
  • a constant current source offers various advantages in the transmission of the measurement signals in the measuring circuit, such. B. the possibility of detecting line breaks or failed sensors. If there is a change in the electrical resistance of the sensor layer due to the influence of pressure or force or temperature, it can be detected locally in the area of the electrodes, since it directly influences the current flow there. For various applications, there is a need for the measurement not to become inaccurate due to temperature effects. It is therefore desirable to have a temperature-stabilized measurement.
  • a measuring circuit according to FIG. 3a or FIG. 3b is used. In this measurement circuit, an external resistor is connected in series with each electrode. Supplemented with a voltage source, a bridge circuit can then be set up.
  • the transverse voltage U b of the bridge circuit stands in the following context with the remaining variables of the measuring circuit:
  • a change in the sheet resistances in the sensor layer therefore manifests itself in a change in the transverse voltage. It can be seen that by adjusting the external resistance Rtnmm, the proportions can be adjusted so that the cross voltage between the bridge branches becomes zero. Such an adjustment can be done once, for. B. in the unloaded state of the force sensor. If there is now a force acting on the electrode F, the electrical resistance of the sensor layer is reduced at this point. This can not be done at the electrode T since it is not within the force-loaded area 8. The electrode T therefore does not change its resistance due to the force. However, both electrodes F, T are additionally subject to a temperature-induced change in resistance. By approximately equal in area formation of the areas 12, 17 and arrangement of the areas 12, 17 close to each other, an efficient temperature compensation can take place.
  • the resistance of the underlying sensor layer changes.
  • the resistance ratios of the bridge circuit are no longer adjusted so that the transverse voltage Ub has the value zero. This results in a non-zero transverse stress.
  • This voltage value is then a measure of the acting force on the electrode F, which can be detected and processed by a connected measuring unit 11.
  • the measuring unit 1 1 may, for example, have an operational amplifier for signal amplification. If there is a temperature change in the area of the sensors, this temperature change affects the entire sensor layer in this area. Accordingly, the resistance of the sensor layer changes in this area.
  • FIG. 3b shows with the circuit diagram that the electrodes T, F formed by the piezoresistive structures are connected to the resistors R trim and R e in a bridge circuit (Wheatstone bridge).
  • the illustrated resistance R F corresponds to the resistance of the electrode F
  • the resistance R T corresponds to the resistance of the electrode T.
  • the temperature compensation of the measurement is realized by the application of a quarter-bridge circuit.
  • the electrical resistances R T and RF of the respective sensor point are complemented by two external resistors R trim and R E , which are housed in a separate module together with the necessary for signal detection and evaluation electronics and allow inter alia, the vote of the bridge voltage.
  • both the external resistors R trim and R e as well as the structures of the sensor point each show a largely identical temperature behavior and are also exposed to the same temperatures. In this way, the bridge voltage remains constant even when changing the temperature either in the electronic module or the rolling bearing.
  • the noise sensitivity of this circuit is a further advantage.
  • the substrate 7 serves as a carrier for a piezoresistive sensor layer 14 applied in a planar manner, consisting of a doped or undoped hydrocarbon layer.
  • suitable doping materials are metals such as tungsten, chromium, silver, titanium, gold, platinum, etc. Pure or amorphous carbon layers are also possible as material for the sensor layer 14.
  • structured electrodes 15 are applied for force measurement and temperature compensation.
  • These structured electrodes 15 are made of a thin metal layer, such as. Chromium, titanium, chromium-nickel compounds, etc.
  • the patterned electrodes have the shape shown and discussed in Figure 3 and form the regions 10, 12, 13, 17, 18.
  • the piezoresistive sensor layer 14 and the structured electrodes 15 are covered with an insulation and wear protection layer 16, the z. B. is formed from a silicon-doped hydrocarbon layer. Also conceivable is the use of silicon-oxygen, aluminum oxide or aluminum nitride-doped hydrocarbon layers. In the illustrated layer system, all the sensor structures of the piezoelectric sensors have the same electrical mass, for which the metallic substrate 7 is used.
  • a piezoresistive thin-film sensor comprising a hydrocarbon layer with piezoresistive properties and electrode structures on the piezoresistive sensor layer arranged on a carrier is also known from DE 10 2006 019 942 A1. In the figure 5 an advantageous use of the force sensor 1 is shown.
  • FIG. 5 shows a dog clutch 50 having a first coupling part 51 and a second coupling part 52 assigned to the first coupling part 51.
  • the second coupling part 52 has protruding claws 53, 54.
  • the first coupling part 51 has claw receptacles 55, 56 which are provided for receiving the claws 53, 54.
  • In the claws 53, 54 each have a force sensor 1 is integrated.
  • the force sensors 1 are arranged in the claws 53, 54 such that the forces transmitted by the claw receptacles 55, 56 to the claws 53, 54 act on the respective sensor regions 12 of the force sensors 1.
  • a momentary measuring shaft or a torque calibration shaft can be created.
  • the force sensors 1 are arranged in the dog clutch 50 such that forces in both directions of rotation can be measured.
  • measuring shafts or measuring flanges are used to measure torques, which are equipped with strain gauges.
  • the deformation of the carrier material ie the measuring shaft or the measuring flange
  • the strain gauges leads to an expansion of the strain gauges, which in turn leads to a change in resistance of the measuring strip, which is used as a measure for the determination of the applied torque.
  • Strain gauge designs have the disadvantage of requiring accurate knowledge of the strain characteristics of the substrate for accurate torque measurement. The properties of the carrier material must therefore be checked regularly, since they are subject to aging, ie regular calibration of such measuring shafts or measuring flanges is required.
  • the proposed integration of force sensors in the dog clutch the disadvantages mentioned can be overcome.
  • the use of the force sensor according to the invention enables the production of high-precision measuring shafts or measuring flanges without the need to know the material properties of the substrate accurately and to check regularly.
  • the force measured by the force sensors is proportional to the torque that is transmitted via the jaws of the dog clutch. If only a torque transmission to be measured in one direction of rotation, only one force sensor 1 is required.
  • FIG. 6 shows a bearing 60 with a ball bearing 61, 62, 63 and eight force sensors 1.
  • the bearing 60 is shown partially cut to better recognizability of the arrangement of the force sensors 1, so that two force sensors 1 can be seen.
  • the remaining six force sensors are distributed uniformly over the circumference of the bearing 60. Visible are the electrical connection cables 4 of the force sensors 1, which are led out of respective passage openings 66 of an outer housing part 65 of the bearing.
  • the bearing 60 has an outer housing part 65 and an inner housing part 64. Between the outer housing part 65 and the inner housing part 64, a ball bearing is arranged.
  • the ball bearing has an inner bearing ring 61, an outer bearing ring 63 and a plurality of balls 62 which, together with a ball-holding element between the inner bearing ring 61 and the outer bearing ring 63 are arranged.
  • On a lower housing wall of the outer housing part 65 force sensors 1 are arranged in a star shape around the center of the bearing 60 around.
  • the force sensors 1 are arranged with their sensor region 12 below the outer ring 63 of the ball bearing between the outer ring 63 and the lower wall of the outer housing part 65.
  • Accelerometers are characterized by a high sensitivity, which makes it possible to mount them on the bearing block or machine housing and draw conclusions about the condition of the considered by means of suitable signal processing methods in the field of bearing monitoring To pull rolling bearing.
  • a kind of bearing control also has disadvantages. Due to the high sensitivity of the sensors, the measuring signal is composed both of the vibrations of the bearing to be monitored and of the vibrations of other oscillating components of the overall system, whose vibrations are transmitted via the structure to the accelerometer. As a result, no precise differentiation between the causes of the detected vibrations is possible. Therefore, the fact of a bearing damage can be recognized, but the source of the damage can not be clearly assigned.
  • the force sensors can thus be arranged as a bearing monitoring sensor directly a gap between a bearing and a bearing seat, which allows a more direct sensing. This allows fault detection in warehouses as well as accurate localization of the fault to be performed faster and more reliably. Corresponding defects in the bearing have an effect on different pressure distributions on the bearing face and thus different detected forces of the force sensors.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

L'invention concerne un capteur de force piézo-résistif comportant un substrat, au moins une couche de détection piézo-résistive formée sur la surface du substrat à partir d'hydrocarbures, au moins une première électrode appliquée sur la couche de détection piézo-résistive et au moins une couche d'isolation et de protection contre l'usure recouvrant la couche de détection piézo-résistive et la première électrode. Ce capteur de force est produit en tant qu'élément séparé pouvant être, une fois produit, inséré dans un autre élément et raccordé à ce dernier. L'invention concerne en outre des utilisations avantageuses de ce capteur de force ainsi qu'un procédé pour produire un capteur de force.
PCT/EP2011/003003 2010-06-23 2011-06-17 Capteur de force piézo-résistif WO2011160794A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP11733995.2A EP2585802A1 (fr) 2010-06-23 2011-06-17 Capteur de force piézo-résistif

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102010024808.8 2010-06-23
DE102010024808A DE102010024808A1 (de) 2010-06-23 2010-06-23 Piezoresistiver Kraftsensor

Publications (1)

Publication Number Publication Date
WO2011160794A1 true WO2011160794A1 (fr) 2011-12-29

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PCT/EP2011/003003 WO2011160794A1 (fr) 2010-06-23 2011-06-17 Capteur de force piézo-résistif

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EP (1) EP2585802A1 (fr)
DE (1) DE102010024808A1 (fr)
WO (1) WO2011160794A1 (fr)

Cited By (2)

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Publication number Priority date Publication date Assignee Title
KR20180030032A (ko) * 2014-07-18 2018-03-21 잔 클렘 힘을 전기적으로 측정하는 장치
WO2020244525A1 (fr) * 2019-06-06 2020-12-10 芯海科技（深圳）股份有限公司 Boîtier de dispositif électronique et dispositif électronique

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DE102013222150B4 (de) 2013-10-31 2018-03-01 Schaeffler Technologies AG & Co. KG Anbaugerät oder Landwirtschaftsfahrzeug mit einem Überwachungsmodul
EA039446B1 (ru) * 2015-07-14 2022-01-27 Йан Клемм Устройство для электрического измерения действующей на него силы (f)

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DE19954164A1 (de) * 1999-11-10 2001-06-13 Fraunhofer Ges Forschung Sensor zur Zustandsbestimmung von Kenngrößen an mechanischen Komponenten unter Verwendung von amorphen Kohlenstoffschichten mit piezoresistiven Eigenschaften
WO2004048912A1 (fr) * 2002-11-25 2004-06-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dispositif et procede de controle et de commande d'un vehicule
DE10243095B4 (de) 2002-09-16 2004-07-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Wälzlager mit intergrierter Zustandsmessung
DE102006019942A1 (de) 2006-04-28 2007-10-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kraftmessvorrichtung zur Messung der Kraft bei Festkörperaktoren, Verfahren zur Messung einer Kraft sowie Verwendung der Kraftmessvorrichtung

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FR2869981B1 (fr) * 2004-05-04 2006-07-21 Snr Roulements Sa Roulement capteur de deformations comprenant quatre jauges de contraintes

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Publication number Priority date Publication date Assignee Title
DE19954164A1 (de) * 1999-11-10 2001-06-13 Fraunhofer Ges Forschung Sensor zur Zustandsbestimmung von Kenngrößen an mechanischen Komponenten unter Verwendung von amorphen Kohlenstoffschichten mit piezoresistiven Eigenschaften
DE10243095B4 (de) 2002-09-16 2004-07-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Wälzlager mit intergrierter Zustandsmessung
WO2004048912A1 (fr) * 2002-11-25 2004-06-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dispositif et procede de controle et de commande d'un vehicule
DE102006019942A1 (de) 2006-04-28 2007-10-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Kraftmessvorrichtung zur Messung der Kraft bei Festkörperaktoren, Verfahren zur Messung einer Kraft sowie Verwendung der Kraftmessvorrichtung

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180030032A (ko) * 2014-07-18 2018-03-21 잔 클렘 힘을 전기적으로 측정하는 장치
CN107873081A (zh) * 2014-07-18 2018-04-03 简·克莱姆 用于借助绝缘薄层以电方式进行力测量的方法和装置
CN107873081B (zh) * 2014-07-18 2020-03-27 简·克莱姆 用于以电方式测量力的装置
KR102491230B1 (ko) 2014-07-18 2023-01-20 잔 클렘 힘을 전기적으로 측정하는 장치
WO2020244525A1 (fr) * 2019-06-06 2020-12-10 芯海科技（深圳）股份有限公司 Boîtier de dispositif électronique et dispositif électronique

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DE102010024808A1 (de) 2011-12-29

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