WO2011153562A1 - Soupape à vide - Google Patents

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Publication number
WO2011153562A1
WO2011153562A1 PCT/AT2011/000239 AT2011000239W WO2011153562A1 WO 2011153562 A1 WO2011153562 A1 WO 2011153562A1 AT 2011000239 W AT2011000239 W AT 2011000239W WO 2011153562 A1 WO2011153562 A1 WO 2011153562A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
valve plate
plate
vacuum
seat
Prior art date
Application number
PCT/AT2011/000239
Other languages
German (de)
English (en)
Inventor
Bernhard Duelli
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Publication of WO2011153562A1 publication Critical patent/WO2011153562A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0272—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor permitting easy assembly or disassembly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams

Definitions

  • the invention relates to a vacuum valve comprising a valve body having a valve body having a valve opening and a valve seat surrounding the valve seat, which lies in a seat plane, and a valve plate on which a sealing ring is arranged, which lies in a plane of the plate, and which between an open position in which the valve plate releases the valve opening, and a closed position in which the sealing ring is applied to the valve seat and the valve plate closes the valve opening, is adjustable, wherein the plate plane is parallel to the seat plane in the closed position of the valve plate and in the open position encloses an angle of less than 30 ° with the seat plane.
  • a vacuum valve which can be opened and closed by an axial displacement of the valve rod on which the valve plate is mounted, is evident, for example, from WO 2009/070824 A1.
  • guide elements with oblique surfaces which interact with inclined surfaces of the valve plate, are attached to the valve body. If the valve plate seal is to be replaced with this valve, the connection to the valve stem must be released and the valve plate removed from the vacuum valve.
  • Another vacuum valve which can be opened and closed by an axial displacement of the valve rod can be seen for example from DE 10 2008 027 944 B3.
  • valve plate is connected here via a parallelogram with the valve rod and the valve rod is further connected via a pivot lever with a support unit which cooperates in the last section of the closing of the vacuum valve arranged on the valve body guide elements, whereby the valve plate by the pivoting of the pivot lever and the parallelogram is pressed against the valve seat.
  • valves known from US Pat. Nos. 7.01 1, 294 B1 and US Pat. No. 6,367,770 B1 the valve is also opened and closed by an axial displacement of the valve rod in and against a closing direction.
  • the valve plate is wedge-shaped here and the valve seat encloses an angle with the closing direction. In the latter valve arranged on both sides of the wedge-shaped valve plate seals are applied only slightly to the valve seats. By acting in one direction differential pressure one of the two seals is completely compressed, thereby achieving the complete seal.
  • valve plate is adjustable by an axial displacement of a valve rod between its open position and its closed position.
  • valve plate between its open position and its closed position by one
  • Swiveled pivot axis which lies in the region of one of the side edges of the valve plate.
  • the valve plate is in this case connected to the valve rod via two joints and an intermediate piece.
  • the valve plate is moved in a straight line, wherein the valve plate and the plane of the valve seat are perpendicular to the valve rod.
  • L-valves In so-called L-valves, the valve plate is first moved to close the valve from its open position to an intermediate position in which it covers the valve opening, but is still lifted from the valve seat. As a result, a movement takes place essentially at right angles to the valve seat, through which the valve plate is moved from the intermediate position into the closed position.
  • This second movement can be effected by a parallel displacement of the valve rod, by a second actuator arranged between the valve rod and the valve plate or by a pivoting of the valve rod about a pivot axis perpendicular to the valve rod and to the axis of the valve opening.
  • An L-valve of the latter type is apparent, for example, from US Pat. No. 6,471,181 B2.
  • valve plate is connected here in a small angular range pivotally connected to the valve rod to a more uniform contact pressure of the seal of the valve plate on To achieve valve seat. Further pivotable connections of the valve plate with the valve stem are disclosed in US 2005/0139799 A1 and US Pat. No. 5,667,197 A.
  • US Pat. No. 6,899,316 B2 discloses an L-valve in which the valve plate is connected via a piston rod to a piston displaceable in a cylinder recess of a carrier unit.
  • the support unit is attached to valve rods, which in turn are axially displaceable by means of piston-cylinder units.
  • the support unit is guided by guides relative to the valve body linearly displaceable.
  • the object of the invention is to provide a user-friendly vacuum valve of the type mentioned. According to the invention, this is achieved by a vacuum valve having the features of claim 1.
  • the valve plate When the vacuum valve of the invention, the valve plate can be pivoted about a pivot axis in a service position.
  • the plate plane of the valve plate in which the sealing ring is located and which lies in the closing pitch parallel to the valve seat, encloses an angle of more than 45 °, preferably more than 70 °, with the seat plane.
  • the plate plane of the valve plate includes over its entire displacement between the closed position and the open position with the seat level an angle of less than 30 °, preferably it is over the entire adjustment parallel to the seat plane.
  • the sealing ring having plate level would thus be hardly accessible without the inventive design of the valve and replacement of the sealing ring would be possible only with complete disassembly of the valve plate.
  • a service position is provided in which the sealing ring is accessible and is easily replaceable.
  • the invention makes it possible to provide a low-cost valve which can be easily maintained.
  • the adjustment of the valve plate from the open position to the closed position is advantageously carried out by at least one connected to the valve plate valve rod which is axially displaced in a closing direction from a retracted position to an advanced position, for example by a piston-cylinder unit.
  • the pivot axis about which the valve plate is pivotable into the service position is perpendicular to this closing direction.
  • the valve plate is displaced parallel to the closing direction at least over the majority of its adjustment from the open position to the closed position.
  • the provision of the valve plate from the closed position to the open position is effected by the opposite movement of the valve rod.
  • the valve rod is connected via at least one joint with the valve plate, which has a hinge axis parallel to the pivot axis about which the valve plate is pivotable in the service position.
  • the pivoting of the valve plate in the service position can be done without loosening the connection between the valve plate and the valve stem.
  • the valve rod is attached to the valve rod via a single joint, in particular a hinge joint, which has a joint axis coaxial with the pivot axis about which the valve plate can be pivoted into the service position.
  • supply and discharge lines for supplying and discharging a coolant to and from the valve plate are provided which are connected via at least one rotatable connection (rotary coupling) with the valve plate, wherein the axis of the rotatable connection is parallel to the pivot axis, by which the valve plate is pivotable in the service position.
  • rotatable connection rotary coupling
  • separate rotatable connections can be provided for the supply line and for the discharge line or, particularly preferably, a common rotatable connection can be provided, which allows both the feed line tion as well as the discharge line - via separate channels - connects to the two ends of at least one valve plate passing through the channel.
  • coolant such as cooling water
  • valve plate by each on the valve body or a part connected thereto guideways, which together with each arranged on the valve plate or an associated part guide elements guides at least over a portion of their adjustment between the open position and the closed position, preferably on the entire displacement between the open position of the closed position, guided relative to the valve body displaceable.
  • guide tracks are arranged on the valve plate or a part connected thereto and the guide elements on the valve body or a part connected thereto is conceivable and possible.
  • the guide elements are forcibly guided on both sides in the guideways.
  • the guideways could thus also be referred to as link tracks and the guide elements as link elements (link rollers or sliding blocks).
  • the guides formed by the guideways and guide elements are formed in the area of first and second side edges of the valve plate, which extend longitudinally relative to the movement of the valve plate between the open and closed positions or with respect to the closing direction.
  • first longitudinal side edge of the valve plate in the region of the first longitudinal side edge of the valve plate at least two projecting guide elements, each of which engage in a guideway, and arranged in the region of the second longitudinal side edge at least two projecting guide elements, each engaging in a guideway.
  • Such a design is particularly selected when the guideways have curved portions in the region of the guide elements are when the valve plate assumes its closed position.
  • the angle can be increased, under which the sealing ring approaches the valve seat.
  • the at least two guide elements located in the region of a respective side edge could, in particular in the case of a straight-line design of the guide tracks, also engage in a common guide track in each case.
  • the guideways on the valve body or a part connected thereto and the guide elements on the valve plate or a part connected thereto are arranged.
  • a reverse arrangement is possible, as already mentioned.
  • the guide elements can be designed in the form of rollers mounted on axles. Also displaceable guide elements, in the form of engaging in the guideways pin can be provided.
  • the guideways are preferably formed in the form of grooves. An embodiment in the form of slots in the valve body held strips is conceivable and possible. Furthermore, the guideways could also be designed in the form of webs. The guide elements would then be formed encompassing these webs.
  • the pivot axis about which the valve plate is pivotable into its service position is conveniently parallel to the plate plane of the valve plate, preferably in the range related to the adjustment of the valve plate from its open position to its closed position behind, transverse to the closing direction side edge of the valve plate.
  • the pivot axis about which the valve plate is pivotable into the service position are formed by one of the lying in the region of the first longitudinal side edge of the valve plate guide elements together with one of the lying in the region of the second longitudinal side edge of the valve plate guide elements. The remaining first in the guideway guide elements then move during pivoting of the valve plate in the service position by a respective extension opening from its guideway. This extension opening is located in a respective guideway limiting relative to the extension of the guideway longitudinally extending wall.
  • this wall can be formed hinged.
  • the unfolded section can also serve to support the valve plate, which is pivoted into the service position, in order to hold the valve plate in the service position.
  • the pivot axis is formed by the in the region of the first longitudinal side edge and by the in the region of the second longitudinal side edge in each case based on the direction of movement of the valve plate in its adjustment from the open position to the closed position rear guide element. If the valve rod is pivotally connected to the valve plate, so this can be a disassembly of the valve stem of the valve plate in the
  • guideways are formed on strips which are pivotable for pivoting the valve plate in the service position relative to the valve body. In normal operation, when only the opening and closing of the valve, but no pivoting of the valve plate is carried out in the service position, the pivotability of the guideways having bars can be blocked by locking elements.
  • valve plate is in the closed position, as long as no differential pressure acts on the valve plate, only slightly applied to the valve seat, wherein the deformation of the sealing ring is small.
  • an acting differential pressure then approaches the valve plate to the valve seat on, whereby the sealing ring is compressed more.
  • portions of the walls defining the guideways are resilient, for example in the form of leaf springs.
  • Fig. 1 is a schematic representation of a vacuum system in which a vacuum valve according to the invention can be used;
  • FIG. 2 shows an oblique view of an exemplary embodiment of a vacuum valve according to the invention in the closed state
  • Fig. 3 is an oblique view corresponding to Figure 2 in the open state of the vacuum valve.
  • Fig. 4 is an oblique view corresponding to Figure 2 in the service position of the valve plate.
  • Fig. 5 is an oblique view in the state of Figure 4 from a different angle.
  • Fig. 6 is a view of the vacuum valve in the closed state
  • Fig. 7 is a section along the line AA of Fig. 6;
  • FIG. 8 shows a section corresponding to FIG. 7, but in the opened state of the vacuum valve
  • FIG. 9 shows a section corresponding to FIG. 7, but in the service position of the valve plate
  • Fig. 10 is a section along the line BB of Fig. 6; Fig. 1 1 a Fig. 10 corresponding section, but in the open state of
  • FIG. 12 shows a section corresponding to FIG. 10, but in the service position of the valve plate
  • Fig. 13a is a section along the line CC of Fig. 6;
  • Fig. 13b is a section along the line DD of Fig. 6;
  • FIG. 14 shows a section corresponding to FIG. 13, but in the opened state of the vacuum valve
  • FIG. 15 shows a section corresponding to FIG. 13, but in the service position of the valve plate
  • Fig. 16 is an enlarged oblique view of a portion of one of the guideways
  • Fig. 17 is a side view of the vacuum valve (the valve plate is in the open position);
  • Fig. 18 is a section along the line EE of Fig. 17;
  • Fig. 19 is an oblique view of the vacuum valve shown in Figs. 2 to 18 in the contracted state with another such vacuum valve.
  • FIG. 1 A schematic exemplary representation of a vacuum system in which a vacuum valve according to the invention can be used is shown in FIG.
  • Vacuum system comprises a plurality of vacuum chambers 1, in which a respective substrate is processed in at least one vacuum process, or which are connected to such a process chamber, optionally via at least one further valve.
  • the substrates to be processed are introduced into the infeed chamber 2 and removed from the discharge chamber 3 after processing.
  • a movable vacuum chamber 4 is provided in order to bring a respective substrate from the Einschleushunt 2 in one of the vacuum chambers 1 and to bring from one of the vacuum chambers 1 in the discharge chamber 3.
  • a movable vacuum chamber 4 is provided to move between the individual chambers 1, 2, 3, for example, a carriage 6 which can be moved along guide rails 5 can be provided, on which the chamber 4 is mounted.
  • the movable vacuum chamber 4 can be vacuum-tightly connected to each of the chambers 1, 2, 3.
  • a mounted on the movable vacuum chamber 4 tes vacuum valve 7 with a mounted on the relevant chamber 1, 2, 3 vacuum valve 8 vacuum-tight.
  • the vacuum valve 7 in this case have an elastic sealing ring which is pressed against a sealing surface of the vacuum valve 8.
  • the vacuum chamber can be moved on the carriage 6 via guide rails 9.
  • the vacuum-tight connection between the vacuum valves 7, 8 can be done only by the mutual pressing together of the vacuum valves.
  • open and closable clamping elements can be provided, which clamp the vacuum valves 7, 8 against each other.
  • Such vacuum systems are used, for example, in semiconductor processing, for example when carrying out melting processes or comprising such melting processes.
  • An embodiment of a vacuum valve according to the invention is shown in Figs. 2 to 16.
  • Each of the vacuum valves 7, 8 shown in Fig. 1 may be formed in this manner.
  • the vacuum valve comprises a valve body 10 which has a valve body wall 13 in which a valve opening 11 is formed. This is surrounded by a valve seat 12 which is formed in the form of a sealing surface. Furthermore, the vacuum valve comprises a valve plate 14. In the opened state of the vacuum valve, this assumes an open position, cf. For example, Fig. 3, in which the valve plate 14, the valve opening 1 1 releases, seen in the direction of the axis 15 of the valve opening (which is perpendicular to the closing direction described below) no overlap of the valve plate 14 with the valve opening 1 1 is present. In the closed state of the vacuum valve, the valve plate 14 assumes its closed position, see. For example, Fig. 2. In this it closes the valve opening 1 1.
  • an elastic sealing ring 16 is applied to the valve seat.
  • the elastic sealing ring 16 lies in a plate plane 17. This is formed by the surface 18 of the valve plate 14, on which the elastic sealing ring 16 is arranged. In the closed position of the valve plate 14, the plate plane 17 is thus parallel to a seat plane 19, in which the valve seat 12 is located.
  • the plate plane 17 and the seat plane 19 are preferably also parallel to each other. In modified embodiments, deviations from this parallel position would be conceivable and possible, with such deviations in any case being less than 30 °, preferably less than 15 °.
  • the valve plate In the open position, the valve plate preferably also encloses an angle of less than 30 ° with the valve body wall 13 and lies opposite this (thus in the area adjacent to the valve opening 11).
  • valve rod 20 is pivotally connected.
  • the valve rod 20 In order to displace the valve plate 14 from its open position to its closed position, the valve rod 20 is displaced from a retracted position (see, for example, Fig. 3) to a preselected position (see, for example, Fig. 2). Starting from the retracted position, the displacement takes place here in the direction of the longitudinal axis of the valve rod 20 in the closing direction 21st To open the vacuum valve, the reverse displacement of the valve stem 20 from its advanced to its retracted position.
  • the articulated connection between the valve rod 20 and the valve plate 14 is in the illustrated embodiment by a single formed as a hinge Joint 22 realized, which has a hinge axis 23.
  • the hinge axis 23 is perpendicular to the closing direction 21st
  • a connection via other types of joints with joint axes 23 perpendicular to the closing direction 21 and / or via more than one joint (and at least one intermediate piece lying between two joints) is also conceivable and possible.
  • valve rod which are each connected in the manner described with the valve plate articulated.
  • valve rod 20 The displacement of the valve rod 20 between its retracted position and ⁇ its advanced position takes place in the embodiment via an actuator in the form of a piston-cylinder unit 24.
  • Actuators designed in another way could also be provided.
  • the valve plate 14 is guided over its travel when closing and opening the vacuum valve, ie between its open position and its closed position at its side edges 25, 26 or narrow sides which run longitudinally relative to the closing direction 21.
  • projecting guide elements 27-30 are arranged, which are guided in guide tracks 31-34.
  • the guideways 31-34 are arranged as grooves in side walls of the valve body 10, said side walls projecting from the valve body wall 13 having the valve opening 1 1.
  • the guide elements 27 to 30 are designed as rollers, which move when opening and closing the valve plate 14 along the guideways 31-34. Also sliding in the guideways 31-34 sliding guide elements 27-30 could be provided.
  • Each of the guide elements 27-30 engages in its own guide track 31 -34.
  • the guideways 31-34 extend over a majority of their longitudinal extension in a straight line and parallel to the closing direction 21. Only in end sections, in which the guide elements 27-30 before reaching the closed position of the valve plate 14 are guided, they are bent toward the valve body wall 13.
  • the valve plate 14 is thus initially moved in a straight line in the closing direction 21, starting from its open position. In the last section of its movement before reaching the closed position, this section making up less than one tenth of the total adjustment path, the valve plate 14 additionally receives a component of movement in the direction of the valve body wall 13, wherein the plate plane 17 is preferably displaced in parallel. The angle at which the elastic sealing ring 16 impinges on the valve seat 12 is thereby reduced.
  • the guide elements 27-30 in this case abut against spring elements 35, which are formed by leaf springs and form elastic sections of the walls delimiting the guide tracks.
  • the seat plane 19 is formed inclined with respect to the closing direction 21.
  • this angle of inclination is less than 20 °, more preferably less than 15 °.
  • the inclination angle is in the range of 3 °.
  • valve seat 12 could also be parallel to the closing direction 21.
  • the system of the sealing ring 16 to the valve seat 12 could be done in this case only by the inclined in the end portion relative to the seat plane 19 course of the guideways 31 -34.
  • the guide tracks 31 - 34 could also run parallel to the closing direction 21 over their entire extension.
  • the guide elements 27, 28 arranged in the region of the first side edge 25 and the guide elements 29, 30 arranged in the region of the second edge 26 could each be guided in separate guide tracks or in each case in a common guide track.
  • valve rod 20 in the last portion of its displacement from the retracted to the advanced position something bent. No such flexure would occur, for example, if the connection of the valve stem 20 to the valve plate 14 were via two joints 22 with an intermediate piece therebetween. It is preferable, when closing the vacuum valve, to apply the valve plate 14 only slightly to the valve seat 12, whereby the compression effecting the complete sealing is achieved only by an acting differential pressure between both sides of the valve plate 14.
  • Such a design can be used in particular whenever the differential pressure can act only in one direction, for example, when the vacuum valve is used as a door of a vacuum chamber for sealing an opening of the vacuum chamber to atmosphere.
  • the system of the sealing ring 16 on the valve seat 12 without an acting differential pressure is in this case preferably such that the force acting on the sealing ring pressing force is less than one-tenth of the maximum acting pressing force when the differential pressure is 1 bar.
  • valve rod When approaching the valve plate 14 and the valve seat 12 upon the application of a differential pressure, the valve rod is bent in the embodiment shown.
  • the valve plate 14 can be cooled.
  • a coolant for example, cooling water
  • a supply line 36 and discharged through a discharge line 37 In the valve plate a, for example meandering passageway 38 is formed for the passage of the coolant.
  • the supply and discharge line 36, 37 are sealed by means of sealed sliding bushings through openings through the valve body 10 led out of this.
  • the supply and discharge line 36, 37 are connected about an axis 41 pivotally connected to the valve plate 14.
  • the supply and discharge line 36, 37 connected to a shaft 41 forming and rotatable about this rotary piece 42.
  • the rotary member 42 protrudes with two-sided end portions into holes in connectors 43. The end portions of the rotary member 42 are sealed from the walls of these holes by seals.
  • In the rotating piece 42 are communicating with the supply and discharge line 36, 37 communicating channels 44, 45 which communicate with channels in the connecting piece 43, wherein the supply and discharge of the coolant through these channels.
  • each two guide elements 27, 28; 29, 30 are provided in the region of the first side edge 25 of the valve plate 14 and in the region of the second side edge 26 of the valve plate 14 . Additional guide elements are possible in principle.
  • the valve plate about a pivot axis 46 which is parallel to the plate plane 17, pivotable in a service position in which the plate plane 17 of the valve plate 14 forms an angle in the range of 90 ° with the valve body wall 13.
  • Good accessibility to the sealing ring 16 are also made possible by contrast, smaller angle, wherein the plate plane 17 in the service position with the seat plane 19 forms an angle of at least 45 °, preferably at least 70 °.
  • pivoting of the valve plate 14 relative to the seat level 19 by more than 90 ° are possible.
  • the pivot axis 46 is formed by the in the region of the respective longitudinal side edge 25, 26, with respect to the closing direction 21, in each case behind lying guide elements 27, 29. To these guide elements 27, 29 so the pivoting of the valve plate 14, if it is pivoted, starting from the open position into the service position. In this case, the remaining guide elements 28, 30 extend out of the guideway 32, 34 assigned to them in each case through an extension opening 47, 48.
  • the Ausfahrötechnisch 47, 48 are in this case formed by that bars 49, 50 are pivoted, which limit a portion of the guideways 32, 34 on the side remote from the valve body wall 13 side.
  • the strips 49, 50 are pivotally mounted on the valve body 10 about axes 51, 52 which are parallel to the pivot axis 46 of the valve plate.
  • the hinge axis 23, via which the valve rod 20 is pivotable relative to the valve plate 14 and the axis 41, about which the supply and discharge line 36, 37 against the valve plate 14 are pivotable, are coaxial with the pivot axis 46. In this way, the valve plate 14 to the Swivel axis 46 are pivoted into the service position, without the valve rod 20 and the supply and discharge line 36, 37 must be removed from the valve plate 14.
  • the guide elements 27, 29 are arranged on tabs.
  • the pivot axis 46 is in the range of the rear transverse side edge (behind this) relative to the closing direction 21. Instead or in addition, it could be provided to see the rear side edge of the valve plate 14 with a recess in the region from which the articulated connection with the valve rod 20 takes place. The pivot axis 46 could coincide with or lie in front of the rear transverse side edge of the valve plate 14.
  • the swung-out strips 49, 50 can be used to support the valve plate 14 in the service position, as can be seen in the figures (e.g., Figures 4 and 5).
  • the strips 49, 50 have passage openings 53, 54 through which screws (omitted in the figures) are screwed into screw holes on the narrow sides of the valve plate.
  • closable exit openings 47, 48 could be provided in another way.
  • the Ausfahrö Stammen 47, 48 may be formed in areas of the guideways, which are not reached by the guide elements in normal operation, ie when the valve plate is moved between its open position and its closed position. In order to reach the Ausfahrö réelleen 47, 48, the valve plate could be moved from its open position against the closing direction until the starting position for the pivoting is reached in the service position.
  • circumferentially protruding side walls are arranged on the valve body wall 13 having the valve opening 11, so that the valve body 10 is pot-shaped or trough-shaped.
  • a circumferential, annular flange 55 is arranged at the remote from the valve body wall 13 edges of these side walls.
  • an elastic sealing ring 56 is arranged in the illustrated embodiment. It could also be provided here a sealing surface.
  • two vacuum chambers in which in each case one of these vacuum valves is mounted in a vacuum-tight manner, the valve opening 1 1 and a chamber opening at least partially overlapping, being connected to one another in a vacuum-tight manner.
  • the vacuum valves are moved together with the flanges 55 and pressed against each other, as shown in Fig. 19 (without the vacuum chambers to which the valves are mounted). Additional clip elements that brace the flanges 55 together may optionally be provided.
  • valve openings 1 1 are initially closed by the valve plates 14.
  • the space enclosed by the two valve bodies 10 can first be pumped out.
  • a corresponding Abpumpö réelle be provided, which is not apparent in the figures.
  • the valve plates 14 are moved in their open positions.
  • the cooling could also be omitted, so that no supply and discharge line 36, 37 is present.
  • valve rod 20 is not articulated but rigidly connected to the valve plate 14 and the supply and discharge line 36, 37, if present, not hinged but rigidly connected to the valve plate 14, these compounds would be prior to pivoting the valve plate fourteenth to solve the service. Nevertheless, the sealing ring 16 could be replaced after pivoting the valve plate 14 in the service position without complete disassembly of the valve plate 14 and removal of the valve plate 14 from the vacuum valve.
  • the pivot axis 46 could in this case also be in the region of the front lying transversely extending side edge of the valve plate with respect to the closing direction 21.
  • another actuator for axial displacement of the valve rod 20 could be provided.
  • at least one valve rod 20 instead of at least one valve rod 20 to provide other elements for displacement of the valve plate 14 between its open position and its closed position, for. B. a driven, circulating toothed belt, from which the valve plate 14 is taken.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

L'invention concerne une soupape à vide qui comprend un corps de soupape (10), pourvu d'une paroi (13) présentant une ouverture de soupape (11) et d'un siège de soupape (12) entourant cette dernière et situé dans un plan de siège (19), ainsi qu'une plaque de soupape (14) sur laquelle est disposé un joint d'étanchéité (16), situé dans un plan de plaque (17), et qui peut être déplacée entre une position d'ouverture, dans laquelle la plaque de soupape (14) libère l'ouverture de soupape (11), et une position de fermeture, dans laquelle le joint d'étanchéité (16) est plaqué contre le siège de soupape (12) et la plaque de soupape (14) ferme l'ouverture de soupape (11). Le plan de plaque (17) est parallèle au plan de siège (19) lorsque la plaque de soupape (14) est en position de fermeture et il forme un angle inférieur à 30° avec le plan de siège (19) lorsqu'elle est en position d'ouverture. La plaque de soupape (14) peut pivoter autour d'un axe de pivotement pour passer dans une position d'entretien, dans laquelle le plan de plaque (17) de la plaque de soupape (14) forme un angle supérieur à 45° avec le plan de siège (19) du siège de soupape (12).
PCT/AT2011/000239 2010-06-09 2011-05-24 Soupape à vide WO2011153562A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ATA945/2010 2010-06-09
AT9452010 2010-06-09

Publications (1)

Publication Number Publication Date
WO2011153562A1 true WO2011153562A1 (fr) 2011-12-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AT2011/000239 WO2011153562A1 (fr) 2010-06-09 2011-05-24 Soupape à vide

Country Status (1)

Country Link
WO (1) WO2011153562A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110454582A (zh) * 2019-08-30 2019-11-15 中冶焦耐(大连)工程技术有限公司 一种焦炉荒煤气关闭阀及其安装检修方法

Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5667197A (en) 1996-07-09 1997-09-16 Lam Research Corporation Vacuum chamber gate valve and method for making same
WO2001004522A1 (fr) * 1999-07-09 2001-01-18 Arthur Brenes Clapet obturateur de reglage
US6367770B1 (en) 2000-03-23 2002-04-09 Vat Holding Ag Vacuum valve for separating two vacuum chambers
US6471181B2 (en) 2001-01-11 2002-10-29 Vat Holding Ag Suspension of a valve plate of a vacuum valve
US6899316B2 (en) 2003-04-16 2005-05-31 Vat Holding Ag Closure device for vacuum closure of at least one opening in a wall
US20050139799A1 (en) 2000-03-30 2005-06-30 Lam Research Corporation Unitary slot valve actuator with dual valves
US7011294B1 (en) 2004-09-08 2006-03-14 Vat Holding Ag Vacuum valve
US20060266417A1 (en) 2005-05-24 2006-11-30 Ming-Tien Wu Vacuum valve
WO2009070824A1 (fr) 2007-12-06 2009-06-11 Vat Holding Ag Soupape de dépression
DE102008027944B3 (de) 2008-06-12 2009-07-30 Vat Holding Ag Schieberventil
DE102008051349B3 (de) * 2008-10-15 2009-11-12 Vat Holding Ag Vakuumventil

Patent Citations (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5667197A (en) 1996-07-09 1997-09-16 Lam Research Corporation Vacuum chamber gate valve and method for making same
WO2001004522A1 (fr) * 1999-07-09 2001-01-18 Arthur Brenes Clapet obturateur de reglage
US6367770B1 (en) 2000-03-23 2002-04-09 Vat Holding Ag Vacuum valve for separating two vacuum chambers
US20050139799A1 (en) 2000-03-30 2005-06-30 Lam Research Corporation Unitary slot valve actuator with dual valves
US6471181B2 (en) 2001-01-11 2002-10-29 Vat Holding Ag Suspension of a valve plate of a vacuum valve
US6899316B2 (en) 2003-04-16 2005-05-31 Vat Holding Ag Closure device for vacuum closure of at least one opening in a wall
US7011294B1 (en) 2004-09-08 2006-03-14 Vat Holding Ag Vacuum valve
US20060266417A1 (en) 2005-05-24 2006-11-30 Ming-Tien Wu Vacuum valve
WO2009070824A1 (fr) 2007-12-06 2009-06-11 Vat Holding Ag Soupape de dépression
DE102008027944B3 (de) 2008-06-12 2009-07-30 Vat Holding Ag Schieberventil
DE102008051349B3 (de) * 2008-10-15 2009-11-12 Vat Holding Ag Vakuumventil

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110454582A (zh) * 2019-08-30 2019-11-15 中冶焦耐(大连)工程技术有限公司 一种焦炉荒煤气关闭阀及其安装检修方法
CN110454582B (zh) * 2019-08-30 2023-08-25 中冶焦耐(大连)工程技术有限公司 一种焦炉荒煤气关闭阀及其安装检修方法

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