WO2011105737A3 - 게이트 밸브 - Google Patents

게이트 밸브 Download PDF

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Publication number
WO2011105737A3
WO2011105737A3 PCT/KR2011/001167 KR2011001167W WO2011105737A3 WO 2011105737 A3 WO2011105737 A3 WO 2011105737A3 KR 2011001167 W KR2011001167 W KR 2011001167W WO 2011105737 A3 WO2011105737 A3 WO 2011105737A3
Authority
WO
WIPO (PCT)
Prior art keywords
gate valve
exhaust line
valve
exhaust
products
Prior art date
Application number
PCT/KR2011/001167
Other languages
English (en)
French (fr)
Other versions
WO2011105737A2 (ko
Inventor
조길영
최한기
Original Assignee
주식회사 라온테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 라온테크 filed Critical 주식회사 라온테크
Publication of WO2011105737A2 publication Critical patent/WO2011105737A2/ko
Publication of WO2011105737A3 publication Critical patent/WO2011105737A3/ko

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/182—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of toggle links
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)

Abstract

본 발명은진공 장비의 배기 라인에 설치되는 게이트 밸브(gate valve)로, 밸브가 배기 라인의 일부를 이루고 이 밸브를 수평 이동시킴으로써 게이트 밸브 내부로 유입되는 공정 오염 물질 및 부산물을 완전히 차단할 수 있으며 배기 효과가 탁월한 게이트 밸브에 관한 것이다.
PCT/KR2011/001167 2010-02-25 2011-02-23 게이트 밸브 WO2011105737A2 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2010-0017218 2010-02-25
KR1020100017218A KR101229324B1 (ko) 2010-02-25 2010-02-25 게이트 밸브

Publications (2)

Publication Number Publication Date
WO2011105737A2 WO2011105737A2 (ko) 2011-09-01
WO2011105737A3 true WO2011105737A3 (ko) 2012-01-05

Family

ID=44507361

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/001167 WO2011105737A2 (ko) 2010-02-25 2011-02-23 게이트 밸브

Country Status (2)

Country Link
KR (1) KR101229324B1 (ko)
WO (1) WO2011105737A2 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101356579B1 (ko) * 2013-02-04 2014-02-03 주식회사 비에스에이 컴팩트형 감압장치
US10100936B2 (en) 2015-04-24 2018-10-16 Flowserve Management Company Parallel slide gate valves and related methods
CN107575641B (zh) * 2017-10-10 2023-12-29 深圳市大成精密设备股份有限公司 一种先导式真空阀门
KR102145830B1 (ko) * 2017-10-13 2020-08-19 주식회사 라온티엠디 밸브 조립체
DE102018129551A1 (de) * 2018-11-23 2020-05-28 Vat Holding Ag Ventil
KR102206550B1 (ko) * 2019-03-25 2021-01-25 주식회사 에이씨엔 게이트 밸브, 이를 포함하는 기판 처리 장치
DE102019128228A1 (de) 2019-10-18 2021-04-22 Vat Holding Ag Anordnung mit einem Ventil
KR102490651B1 (ko) * 2022-08-18 2023-01-20 주식회사 미래보 반도체 공정 시 발생하는 반응부산물 포집 장치의 신속 교체를 통한 공정 정지 로스 감축 시스템
KR102498115B1 (ko) * 2022-12-06 2023-02-09 주식회사 미래보 반도체 공정 시 발생하는 반응부산물 포집 장치의 신속 교체를 통한 공정 정지 로스 감축 시스템

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0320188A (ja) * 1989-06-16 1991-01-29 Hitachi Ltd ゲートバルブ
KR200292558Y1 (ko) * 2002-07-22 2002-10-25 정인열 슬라이딩식 개폐판을 갖는 개폐기구
KR100779241B1 (ko) * 2006-11-02 2007-11-23 주식회사 비츠로테크 양면 진공 게이트 밸브

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0320188A (ja) * 1989-06-16 1991-01-29 Hitachi Ltd ゲートバルブ
KR200292558Y1 (ko) * 2002-07-22 2002-10-25 정인열 슬라이딩식 개폐판을 갖는 개폐기구
KR100779241B1 (ko) * 2006-11-02 2007-11-23 주식회사 비츠로테크 양면 진공 게이트 밸브

Also Published As

Publication number Publication date
KR20110097395A (ko) 2011-08-31
WO2011105737A2 (ko) 2011-09-01
KR101229324B1 (ko) 2013-02-05

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