WO2011102337A1

WO2011102337A1 - Heat insulator and process for producing heat insulator

Info

Publication number: WO2011102337A1
Application number: PCT/JP2011/053127
Authority: WO
Inventors: 徳彦辻; 宏憲八木
Original assignee: 東京エレクトロン株式会社
Priority date: 2010-02-16
Filing date: 2011-02-15
Publication date: 2011-08-25
Also published as: TW201202589A; JP2011190925A

Abstract

A metal foil (13) constituted of, for example, aluminum and configured so that a vacuum atmosphere is formed inside is disposed, and a resin sheet (16), e.g., a polyimide sheet, is disposed so as to surround the metal foil (13). Thus, vacuum insulation is conducted, and the metal foil (13) is inhibited from radiating heat. Meanwhile, an aluminum layer (33) and a resin layer (34) are superposed in a heat insulation block (30) in this order from the side facing a processing vessel (1). Thus, heat conducted from the processing vessel (1) is reflected toward the processing vessel (1) by the aluminum layer (33). When the temperature of the aluminum layer (33) has risen because the heat from the processing vessel (1) surpasses the reflection, outward heat radiation can be inhibited by the resin layer (34).

Description

Insulator and method of manufacturing insulator

The present invention relates to a heat insulator for suppressing heat dissipation and a method for manufacturing the heat insulator.

In a manufacturing apparatus for manufacturing a semiconductor device, the inside of the manufacturing apparatus may be heated by, for example, a heater. In such a manufacturing apparatus, in order to increase the heating efficiency of the heater and to ensure safety for the operator, for example, a heat insulator is disposed along the outer wall surface of the apparatus. Specifically, the temperature of the heat insulator is increased to, for example, about 180 ° C. to 200 ° C. such as the outer surface of a process chamber (processing vessel), the surroundings of a gas pipe and an exhaust pipe heated by a heater, and the like. A site.

As an example of such a heat insulator, a fiber glass wool or powdery filler made of a material having as low a thermal conductivity as possible, for example, silica (silicon dioxide) glass, and the silica glass are provided. For example, the mantle heat insulator provided with the outer skin layer which makes packing materials, such as cloth, is mentioned. However, in this mantle insulator, since the heat reflectivity is small compared to, for example, metal, for example, when heat is dissipated from the processing vessel toward the mantle insulator, the mantle insulator absorbs heat and rises in temperature. The heat of the processing vessel is radiated to the outside through the mantle insulator.

On the other hand, for example, a metal film such as aluminum (Al) is known as a member that reflects heat. For example, by providing such a metal film in the mantle insulation body along the outer wall surface of the processing container, for example, processing is performed. It is considered that the radiant heat radiated from the container can be reflected to the processing container side. However, since the thermal conductivity of the metal film is higher than that of, for example, silica glass, the metal film gradually increases in temperature due to the radiant heat that could not be reflected to the processing container side, and the heat of the processing container is transferred to the outside through the metal film. There is a risk of dissipating heat.

Further, a vacuum insulator using a vacuum region as a heat insulator is known as a heat insulator having higher heat insulation than the mantle heat insulator described above. Specifically, this vacuum insulator is composed of two films made of a resin, such as polyethylene, and a fiber or powder made of silica glass is stored between the polyethylene films, and the storage area of the silica glass is evacuated. While maintaining, the end faces of the polyethylene film are heated to, for example, about several tens of degrees Celsius over the circumferential direction, and are heat-sealed (heat sealed). Further, in order to compensate for the gas barrier property of the polyethylene film, a metal film such as aluminum is formed so as to cover the polyethylene film, thereby suppressing air permeation (leakage) to the vacuum region. This vacuum heat insulator is used for household appliances, for example.

However, since the heat-resistant temperature of the polyethylene film is, for example, about 100 ° C., if this vacuum insulator is provided in the processing container described above, for example, the polyethylene film melts due to the heat of the processing container and the vacuum region cannot be maintained As a result, the heat insulation properties deteriorate. In addition, when a metal film is provided on the outer surface of the vacuum heat insulator, the heat conductivity of the metal film is high as described above, so the heat of the processing vessel wraps around the vacuum heat insulator through the metal film to the outside. Heat is dissipated. In particular, when the temperature of the processing container is as high as 200 ° C. as described above, such heat wrap-around becomes large.

Patent Documents

1 and 2 and Non-Patent Document 1 describe vacuum insulators and the like, but the above-described problems are not studied.

JP2008-240924 JP2001-231681

The present invention has been made in view of such circumstances, and an object thereof is to provide a heat insulator excellent in heat insulation and a method for manufacturing the heat insulator.

The insulator of the present invention is
A first envelope made of a metal foil in which the peripheral metal surfaces are bonded and sealed, and the inside is in a vacuum atmosphere;
A heat insulating material enclosed in the first envelope;
And a resin sheet provided so as to cover the first sealing body.

The resin sheet forms a second sealed body by sealing the resin sheets with each other at the peripheral part or by joining the peripheral part to the peripheral part of the sealed body,
It is preferable that a heat insulating material is filled between the second envelope and the first envelope. The first sealing body is partitioned into a plurality of regions that are airtight to each other by joining a part of metal foils facing each other.
Each of the plurality of regions may be sealed with a heat insulating material.

Moreover, the heat insulator of the present invention is
A heat-insulating block, and a heat-reflective sheet provided so as to face the heat-insulated region inside the heat-insulating block,
The heat reflecting sheet includes a resin sheet and a metal layer laminated on the heat insulating region side of the resin sheet.
The heat insulating block is preferably configured by covering a ceramic material with an outer skin layer.
The resin sheet is preferably made of polyimide.

The method for producing the heat insulator of the present invention is as follows.
Arranging the metal foil so as to wrap the heat insulating material, and pressing the metal surfaces of the metal foil around the heat insulating material with each other;
While maintaining the atmosphere in which the heat insulating material and the metal foil are placed in a vacuum atmosphere, by heating the contact portion between the metal surfaces so that atoms diffuse between the metal surfaces, the metal surfaces are mutually bonded. Bonding and forming a first envelope;
And a step of covering the first sealing body with a resin sheet.

Between the step of forming the first envelope and the step of covering the first envelope with the resin sheet, performing a step of disposing a heat insulating material on the outside of the first envelope,
The step of covering the first envelope with the resin sheet includes the step of sealing the peripheral portions of the resin sheet on the outside of the first envelope or the peripheral portion of the resin sheet with the first envelope. In this step, the heat insulating material outside the first sealing body is filled between the second sealing body made of the resin sheet and the first sealing body. Also good.

The step of pressing the metal surfaces of the metal foil together includes the step of attaching one metal foil to one mold in which a plurality of recesses are formed, and heat insulation through the one metal foil in each of the recesses. A step of positioning the material, and then pressing the other mold to the one mold through the other metal foil laminated on the one metal foil,
The step of forming the first sealing body may be a step of heating a contact portion between metal surfaces in each peripheral portion of the concave portion.

It is a perspective view which shows an example of the heating apparatus provided with the heat insulating body of this invention. It is sectional drawing which shows an example of 1st Embodiment of a heat insulating body. It is an expanded sectional view showing a heat insulator. It is sectional drawing which shows an example of the effect | action in a heating apparatus. It is sectional drawing which shows the other example of a heat insulating body. It is sectional drawing which shows the other example of a heat insulating body. It is sectional drawing which shows the other example of a heat insulating body. It is a cross section which shows an example of 2nd Embodiment of a heat insulating body. It is sectional drawing which shows an example of the effect | action in a heat insulating body. It is sectional drawing which shows an example of the effect | action in a heat insulating body. It is sectional drawing which shows the other example in 2nd Embodiment. It is sectional drawing which shows the other example in 2nd Embodiment. It is sectional drawing which shows the other example of a heating apparatus. It is a schematic diagram showing an example of piping to which a heat insulator is applied. It is a perspective view which shows the heat insulator of other embodiment of this invention. It is a top view which shows the heat insulating body of other embodiment. It is a side view which shows the heat insulating body of other embodiment. It is sectional drawing which shows the heat insulating body of other embodiment. It is sectional drawing which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is a perspective view which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is sectional drawing which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is a cross-sectional enlarged view which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is sectional drawing which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is sectional drawing which shows an example of the exhaust pipe provided with the heat insulating body of this invention. It is a cross-sectional enlarged view which shows a part of heating apparatus provided with the heat insulating body of this invention. It is a perspective view which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is a cross-sectional enlarged view which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is an enlarged plan view which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is sectional drawing which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is sectional drawing which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is a top view which shows the heat insulator of other embodiment of this invention. It is a perspective view which shows the heat insulator of other embodiment of this invention. It is a perspective view which shows the heat insulator of other embodiment of this invention. It is sectional drawing which shows an example of the manufacturing method of the heat insulating body of 1st Embodiment. It is a schematic diagram which shows the metal mold | die used when manufacturing the heat insulating body of other embodiment of this invention. It is a schematic diagram which shows the metal mold | die used when manufacturing the heat insulating body of other embodiment of this invention. It is a cross-sectional enlarged view which shows an example of the manufacturing method of the heat insulating body of other embodiment. It is a side view which shows an example of the manufacturing method of the heat insulating body of other embodiment of this invention. It is sectional drawing which shows an example of the manufacturing method of the heat insulating body of 2nd Embodiment. It is sectional drawing which shows an example of the manufacturing method of the heat insulating body of 2nd Embodiment.

According to the embodiment of the present invention, since the resin sheet is provided so as to cover the first sealing body made of the metal foil configured to be in a vacuum atmosphere, the first insulation is performed while performing vacuum heat insulation. Heat dissipation from the sealed body can be suppressed, and therefore a heat insulator excellent in heat insulation can be obtained. According to another embodiment of the present invention, a heat reflecting sheet comprising a resin sheet and a metal layer laminated on the heat-insulating region side of the resin sheet is opposed to the heat-insulating region inside the heat-insulating block. Therefore, the heat radiation from the heat-insulated region can be reflected by the metal layer toward the heat-insulated region and the heat radiation from the metal layer to the outside can be suppressed, so that a heat insulator excellent in heat insulation can be obtained. it can.

[First Embodiment]
An example of an embodiment of a heat insulator according to the present invention will be described with reference to FIGS. First, the whole structure of the heating apparatus provided with this heat insulating body is demonstrated easily. As shown in FIG. 1, this apparatus accommodates a substrate (not shown) such as a semiconductor wafer (hereinafter referred to as “wafer”) inside, and is formed by, for example, a CVD (Chemical Vapor Deposition) method or an ALD (Atomic Layer Deposition) method. In order to perform the film processing, a processing container 1 which is a heat-insulated region for heating the wafer to about 700 ° C. using a heater (not shown) or the like is provided. On the outer wall surface made of a metal such as aluminum (Al), for example, in the processing container 1, as shown in FIG. Are disposed so as to cover the processing container 1. Further, an exhaust pipe 1a for evacuating the atmosphere inside the processing container 1 is connected to the processing container 1, and the other end of the exhaust pipe 1a is connected to a vacuum pump (via a pressure adjusting unit such as a butterfly valve). Neither is shown). The processing container 1 is connected to a processing gas supply path (not shown) for supplying a processing gas, for example, a film forming gas, into the processing container 1. In FIG. 1, the heat insulator 2 on the right side of the processing container 1 is omitted.

The heat insulator 2 is formed in a substantially plate shape so that the surface facing the outer wall surface of the processing container 1 is wide. In addition, as shown in FIG. 2, the heat insulator 2 is made of glass wool (fiber) such as silica (silicon dioxide) or powder in a substantially box shape arranged along the wall surface of the processing container 1. A filler (heat insulating material) 11 is provided. Around the filler 11, a metal foil 13 made of, for example, aluminum having a thickness of 0.05 mm covers the filler 11 as a first sealing body. It is provided as follows. A storage region 14 for the filler 11 that is an internal region of the metal foil 13 is maintained in a vacuum atmosphere. That is, the storage area 14 is formed by stacking two metal foils 13 and 13 so as to overlap each other, storing the filler 11 between the metal foils 13 and 13, and in the vacuum container (not shown) It is formed airtight by an atomic diffusion bonding method in which the metal foils 13 and 13 are bonded to each other by heating while applying pressure to the peripheral portion of the 13 in the circumferential direction. Therefore, since the metal foils 13 and 13 around the storage region 14 are joined so that the interface and the boundary between the metal foils 13 and 13 are hardly discernable at the joint 15 as schematically shown in FIG. The storage area 14 is hermetically sealed. The metal foils 13 and 13 are pressed against the filler 11 so as to follow the outer surface shape of the filler 11 because the storage region 14 is in a vacuum atmosphere.

In order to prevent heat from the processing container 1 from being transferred through the metal foil 13 and being radiated to the outside from the processing container 1 on the outside of the metal foils 13 and 13, for example, a polyimide having a thickness of 0.05

mm Resin sheets

16 and 16 made of a resin material such as these are laminated so as to sandwich the metal foils 13 and 13 from above and below, for example. The resin sheet 16 has a thermal conductivity of, for example, 0.28 W / mK and a heat resistant temperature of 300 ° C. These

resin sheets

16 and 16 are, for example, welded or bonded in a hermetic manner in the circumferential direction at a portion close to the joint 15 of the metal foils 13 and 13 to form a second sealing body. In the airtight region 17 formed hermetically between the metal foil 13 and the resin sheet 16, a heat insulating material 18, for example, a fiber or powder made of silica is stored in a storage member such as a cloth (not shown) or a storage member. Arranged without. The airtight region 17 is, for example, an air atmosphere. In FIG. 3, drawing of the heat insulating material 18 and the resin sheet 16 outside the metal foil 13 is omitted.

Subsequently, the operation of the heating device provided with the heat insulator 2 will be described with reference to FIG. As shown in FIG. 1 described above, the wafer is stored in the processing container 1 whose outer wall surface is covered with a plurality of heat insulators 2, and the processing container 1 is evacuated through the exhaust pipe 1a. For example, the opening degree of a butterfly valve (not shown) provided in the exhaust pipe 1a is adjusted so as to have a processing pressure when performing the film forming process. Then, for example, when the wafer is heated to, for example, about 700 ° C. by the heater in the processing container 1 and a processing gas for film formation is supplied to the wafer, for example, the processing gas is decomposed on the wafer surface by the heat of the heater. A thin film is formed.

Here, the outer wall surface of the processing container 1 can be heated to, for example, about 200 ° C. by heat transfer from the inside of the processing container 1. And this heat is going to be radiated outside through the heat insulator 2 provided along the outer wall surface of the processing container 1, but the resin sheet 16 having a low thermal conductivity is applied to the outer wall surface as described above. Since it arrange | positions along, the heat transfer into the heat insulating body 2 is suppressed. Similarly, heat transfer from the processing container 1 to the inside of the heat insulator 2 is prevented by the heat insulating material 18 provided inside the resin sheet 16. Therefore, a part of the heat of the processing container 1 is transferred to the metal foil 13 through the resin sheet 16 and the heat insulating material 18 inside the heat insulating body 2.

And as shown in FIG. 4, when the heat | fever of the processing container 1 reaches | attains the metal foil 13, it will try to transfer heat through the storage area | region 14 inside the metal foils 13 and 13, but the storage area | region 14 is thermal conductivity. Therefore, almost no heat is transferred to the storage area 14. On the other hand, since the metal foil 13 is made of aluminum having a higher thermal conductivity than the heat insulating material 18 or the like, the heat transferred from the inside of the processing container 1 wraps around the storage region 14 via the metal foil 13. Go on. When the heat in the processing container 1 wraps around the metal foil 13 to, for example, the opposite surface of the processing container 1, this heat tends to transfer from the metal foil 13 toward the outside where the temperature is low. However, since the heat insulating material 18 and the resin sheet 16 are arranged outside the metal foil 13, heat transfer from the resin sheet 16 to the outside is suppressed. At this time, the joint between the

resin sheets

16 and 16 and the joint 15 between the metal foils 13 and 13 are heated to temperatures close to 200 ° C., respectively, but the heat resistance of the resin sheet 16 and the metal foil 13. Is high (resin sheet 16: 300 ° C., metal foil 13: 660 ° C.), no melting or alteration occurs. Accordingly, a vacuum atmosphere is maintained for the storage area 14 and an air atmosphere is maintained for the airtight area 17. In addition, although the heat insulating body 2 is arrange | positioned on the outer wall surface of the processing container 1 without gap as shown in FIG. 1 mentioned above, in FIG. 4, one heat insulating body 2 is drawn typically.

According to the above-described embodiment, in order to suppress heat radiation from the processing container 1 which is a heat-insulated region to the outside, the metal foil 13 configured to have a vacuum atmosphere is provided and the metal foil 13 is covered. Since the resin sheet 16 is provided as described above, it is possible to perform the heat insulation from the vacuum and to suppress the heat radiation from the metal foil 13, and thus it is possible to obtain the heat insulating body 2 having excellent heat insulating properties.

In addition, since the resin sheet 16 having a heat resistant temperature of 300 ° C. is provided so as to cover the periphery of the metal foil 13, as described above, the heat insulator is formed on the outer wall surface of the processing container 1 that is heated to about 180 ° C. to 200 ° C. Even when 2 is disposed, deterioration of the resin sheet 16 such as melting and alteration can be suppressed, and heat of the processing container 1 can be prevented from flowing outside through the metal foil 13. Furthermore, since the storage region 14 is formed of aluminum that does not cause gas permeation or melting at the temperature of the processing container 1, it is possible to suppress a decrease in the degree of vacuum in the storage region 14, and thus heat insulation can be maintained over a long period of time. Can be maintained. Furthermore, since the heat insulating material 18 is provided in the airtight region 17 between the metal foil 13 and the resin sheet 16, the atmosphere inside the airtight region 17 and the heat insulating material 18 can be used between the metal foil 13 and the resin sheet 16. Therefore, heat transfer from the processing container 1 can be suppressed. In addition, since the metal foil 13 is made of aluminum having high flexibility, the inside of the storage area 14 can be evacuated without breaking the metal foil 13, and the heat insulator 2 is disposed along the processing container 1. Can be arranged.

In the above-described example, the airtight region 17 is an air atmosphere. By welding (heat sealing) the joint portion, the airtight region 17 may be made into a vacuum atmosphere to further improve the heat insulation. In this case, the gas barrier property of the resin sheet 16 is compensated on the outside of the resin sheet 16 as shown in FIG. 5 in order to prevent external gas from entering the airtight region 17 through the resin sheet 16. For this purpose, an auxiliary metal foil 21 made of aluminum, for example, may be provided in an airtight manner. As in the case of the metal foil 13 described above, the auxiliary metal foil 21 is formed by laminating two auxiliary metal foils 21 and 21 so as to sandwich the heat insulator 2 from above and below, and surrounding the peripheral portions of these auxiliary metal foils 21 and 21. It is formed by joining over the direction. In addition, an auxiliary resin sheet 22 made of polyimide may be provided outside the auxiliary metal foil 21 in order to prevent the heat in the processing container 1 from flowing outside through the auxiliary metal foils 21 and 21. A heat insulating material made of, for example, silica glass may be accommodated between the auxiliary metal foil 21 and the auxiliary resin sheet 22.

Further, the metal foils 13 and 13 are bonded to each other at the bonding portion 15 by the atomic diffusion bonding method, but may be bonded by a bonding method in which gas from the outside does not enter, for example, a welding method using an electron beam. . Furthermore, although the heat insulating material 18 is provided between the metal foil 13 and the resin sheet 16, the resin sheet 16 may be configured by coating polyimide, for example, on the outside of the metal foil 13 without providing the heat insulating material 18. In this case, for example, after the metal foils 13 and 13 are joined airtightly, the resin sheet 16 is laminated on the outside of the metal foils 13 and 13. Further, the resin sheet 16 is disposed so as to cover the metal foil 13, but as shown in FIG. 6, the resin sheet 16 and the peripheral portions of the metal foil 13 may be joined together while separating the resin sheets 16. . As a method of separating the

resin sheets

16 and 16 in this way, specifically, for example, after the metal foils 13 and 13 are bonded together, a masking material is applied so as to cover the vicinity of the bonding portion 15 in the circumferential direction. . Next, the resin sheet 16 is coated on the surface of the metal foil 13, and then the masking material is peeled off. Thus, since the heat transfer between these

resin sheets

16 and 16 is suppressed by separating the

resin sheets

16 and 16, heat insulation can be improved further.

In addition, the storage region 14 is hermetically held by the metal foil 13 for the heat insulator 2, but as shown in FIG. 7, a vacuum atmosphere may be held by the resin sheet 16 instead of the metal foil 13. good. In this case,

resin sheets

16 and 16 are provided on the outer side of the filler 11, and the above-described joint portion 15 is formed on these

resin sheets

16 and 16 by heat fusion (heat sealing). Further, a metal foil 13 for compensating the gas barrier property of the resin sheet 16 and an auxiliary resin sheet 22 for suppressing heat radiation from the metal foil 13 are arranged in this order from the inside so as to cover the resin sheet 16. Will be formed.

[Second Embodiment]
Next, an example of the second embodiment of the heat insulator of the present invention will be described with reference to FIG. In this heat insulator, a block main body 31 made of, for example, fiber or powder, such as silica glass, is covered with an outer skin layer (packing material) 32 made of, for example, silica fiber to constitute a mantle heat insulator. . The block main body 31 and the outer skin layer 32 constitute a heat insulating block 30 (heat insulating body 2), and the heat insulating block 30 is configured to have, for example, a substantially box shape. Inside the heat insulating block 30, a heat reflecting sheet 35 made of, for example, a resin layer 34 made of a polyimide sheet and an aluminum layer 33 which is a metal layer formed on the resin layer 34 by vapor deposition, for example, is housed. . The aluminum layer 33 is for reflecting the heat in the processing container 1 toward the processing container 1, and the resin layer 34 is heated when the aluminum layer 33 cannot reflect the heat of the processing container 1. This is to prevent heat from being radiated to the outside. The heat reflecting sheet 35 is disposed in the heat insulating block 30 so as to be approximately at the center position in the thickness direction of the heat insulating block 30, that is, to be sandwiched between the block main bodies 31 having substantially the same thickness from both sides in the thickness direction. ing. And the heat insulation block 30 is arrange | positioned so that this heat | fever reflection sheet 35 may oppose the processing container 1. FIG. The aluminum layer 33 and the resin layer 34 have a thickness of, for example, 0.05 mm and 0.05 mm, respectively. As a method of laminating the heat reflecting sheet 35, the surface of the aluminum layer 33 may be coated with a resin layer 34, or the aluminum layer 33 and the resin layer 34 are individually formed into a sheet shape and bonded to each other. You may do it.

In the second embodiment, when the outer wall surface of the processing container 1 is heated to, for example, about 200 ° C. by performing the heat treatment on the wafer as described above, the processing container 1 is placed in the heat insulating block 30. Although heat is about to be transferred, heat transfer into the heat insulating block 30 is suppressed by the outer skin layer 32 and the block body 31 adjacent to the outer wall surface. And when a part of heat of the processing container 1 reaches | attains the heat | fever reflection sheet 35, as shown in FIG. 9, most heat of this is reflected toward the processing container 1 side by the aluminum layer 33. As shown in FIG. When the temperature of the aluminum layer 33 gradually increases due to heat that could not be reflected to the processing container 1 side, the heat conductivity of the aluminum layer 33 is high, and thus this heat is transmitted toward the block body 31 outside the processing container 1. Try to heat up. However, since a resin layer 34 having a lower thermal conductivity than that of the aluminum layer 33 is provided between the aluminum layer 33 and the block main body 31, the resin layer 34 provides the block main body 31 with a resin layer 34 as shown in FIG. Heat dissipation is suppressed. Even if the block main body 31 is slightly transferred from the processing container 1 through the resin layer 34, the heat dissipation to the outside can be suppressed because the block main body 31 is made of silica glass as described above. become.

In the second embodiment, since the aluminum layer 33 and the resin layer 34 are laminated in this order from the processing container 1 side inside the heat insulating block 30, the heat transferred from the processing container 1 by the aluminum layer 33. Can be reflected toward the processing container 1, and even when the aluminum layer 33 is heated without reflecting the heat of the processing container 1, heat radiation to the outside can be suppressed by the resin layer 34. . Therefore, a heat insulator excellent in heat insulation can be obtained. Therefore, for example, the heat insulation block 30 (block main body 31) can be made thinner compared to a mantle heat insulator made of only conventional silica wool or the like.

11 and 12 show a modification of the second embodiment. FIG. 11 shows an example in which a heat reflecting sheet 35 is provided in a region close to the outer skin layer 32 on the processing container 1 side in the heat insulating block 30. In the heat reflection sheet 35, an aluminum layer 33 is disposed on the processing container 1 side, and a resin layer 34 is provided on the outside. As described above, by providing the heat reflecting sheet 35 at a position close to the heat generation source (processing container 1), heat radiation to the outside can be further suppressed. FIG. 12 shows an example in which the heat reflecting sheet 35 is disposed in the heat insulating block 30 at a position close to the outer skin layer 32 on the side away from the processing container 1. Also in this example, the aluminum layer 33 and the resin layer 34 are disposed on the processing container 1 side and the outside, respectively.

In the first and second embodiments described above, a plurality of heat insulators are arranged on the outer wall surface of the processing container 1, but as shown in FIG. 13, a schematic box whose lower surface opens so as to cover the processing container 1 from above. A type of insulation may be used. Specifically, for example, for each of the heat insulators arranged along each of the five surfaces (upper surface and side surface) of the outer wall surface of the processing container 1, one (one) heat insulator (heat insulator 2 or Each surface is constituted by the heat insulation block 30), and the peripheral portions of the heat insulators are bonded to each other so as to form a box shape whose lower surface is opened by these five heat insulators. Even if it is such a heat insulating material, the effect | action and effect of each embodiment mentioned above are acquired.

Further, with respect to the exhaust pipe 1a described above, the exhaust pipe 1a is heated using a heater (not shown) in order to suppress the product generated by cooling the gas exhausted from the processing container 1 from adhering to the inner wall of the exhaust pipe 1a. In that case, a heat insulator may be provided so as to cover the exhaust pipe 1a which is a heat-insulated region. In this case, as shown in FIG. 14, for example, a ring-shaped heat insulator disposed along the exhaust pipe 1a is divided into a plurality of, for example, two in the circumferential direction, and each heat insulator is subjected to each of the above-described implementations. You may comprise with the heat insulating body 2 or the heat insulation block 30 of the form. In this case, the number of divisions of the heat insulating material may be three or more, or for example, the heat insulating body is formed in a substantially strip shape, and one surface side of the heat insulating body is an outer peripheral surface along the length direction of the exhaust pipe 1a. A plurality of heat insulators 2 may be arranged along the circumferential direction of the exhaust pipe 1a so as to follow the above. Reference numeral 1b in FIG. 14 is a block made of, for example, aluminum provided between the exhaust pipe 1a and the heat insulating material, and reference numeral 1c is, for example, an adhesive tape for connecting the heat insulators. Further, even when a processing gas supply pipe for supplying a processing gas into the processing container 1 is heated, for example, the heat insulator of the present invention may be provided around the processing gas supply pipe.

As the filler 11 and the block body 31 described above, silica glass has been described as an example, but glass wool, urethane foam, or the like may be used, for example. Further, the metal foil 13 and the aluminum layer 33 may be stainless steel or nickel other than aluminum. Further, as the resin sheet 16 and the resin layer 34, any resin having high heat resistance other than polyimide may be used. For example, polybenzimidazole (PBI) having a heat resistant temperature (melting temperature) of 200 ° C. or higher, polyether ether, and the like. -Ketone (PEEK), PAI polyamide imide, polyphenylene sulfide (PPS), etc. may be sufficient.

As already described in detail, the heat insulator (vacuum heat insulator) 2 according to the first embodiment described above has a substantially plate shape, so that the heat generating portion (heat-insulated region) whose outer surface is flat is used. Suitable for construction (pasting). On the other hand, the shape of the outer surface of the heat generating part varies depending on the installation part of the apparatus and the heat insulator 2. For example, the outer surface of the exhaust pipe 1 a described above has a curved shape, and Corners (ridge lines) are formed on the four sides. Further, when a protrusion such as a flange (exhaust port) for the exhaust pipe 1a is provided on the processing container 1, it is necessary to arrange the heat insulator 2 so as to avoid the protrusion. In these cases, as described above, the size, shape, or arrangement method of the heat insulating body 2 may be variously adjusted according to the shape of the outer surface of the heat generating portion. It is advantageous in terms of cost if the versatility is increased so that the outer surface of various shapes can be accommodated by the heat insulator 2 having a size). Therefore, it is preferable that the plate-like heat insulating body 2 described above is configured so that a notch or an opening can be formed so as to be bent or curved, and to avoid protrusions.

However, since the insulating material 2 is filled with the filling material 11 in the storage area 14 which is a vacuum atmosphere, the heat insulating material 2 is not tightly curved because the filling material 11 is tightly and tightly tightened. Moreover, since the heat insulation performance of the heat insulation body 2 will fall if the storage area 14 is made into air atmosphere, a notch | incision and an opening part cannot be formed with respect to the storage area 14. FIG. Therefore, the heat insulator 2 that can be easily bent or bent and that can form a notch or an opening in the heat insulator 2 while keeping the storage region 14 in a vacuum atmosphere will be described below.

First, an overview of the heat insulator 2 will be described. As shown in FIGS. 15 to 18, the heat insulating body 2 is airtightly partitioned into a plurality of cylindrical regions in a plane (XY direction in FIG. 15). That is, partition regions (divided regions) 50 protruding in a columnar shape are arranged in a matrix in the vertical and horizontal directions on a substantially rectangular laminated sheet 51, and each partition region 50 includes a storage region 14 (see FIG. 18). Is formed. As shown in FIG. 2, in the heat insulator 2 of the first embodiment described above, the heat insulating material 18 is provided between the metal foil 13 and the resin sheet 16. In this example, the metal foil 13 and the resin are provided. A case where the sheet 16 is laminated will be described as an example. Accordingly, as schematically shown in FIG. 18, the laminated sheet 51 is in a state in which the resin sheet 16, the metal foils 13 and 13, and the resin sheet 16 are laminated from the upper side (or from the lower side). In addition, as shown in FIG. 17, each partition region 50 is formed such that a corner portion on the front end side extending upward from the laminated sheet 51 is gradually tapered (R-shaped) in the circumferential direction. Has been. In this example, as shown in FIG. 17, each partition region 50 has a height dimension h from the laminated sheet 51 of 5 mm and a diameter dimension R of 20 mm. Further, the separation dimension D between the

partition regions

50 and 50 is, for example, 5 mm. In addition, the dimension of the metal foil 13 and the resin sheet 16 is exaggerated and drawn thickly.

Since the laminated sheet 51 has a film thickness of, for example, about 0.2 mm and is flexible, the adjacent partitioned areas 50 can be moved vertically and horizontally. And the heat insulating body 2 in this embodiment is a time when each partition area 50 is moved independently of each other, or when one or more of these partition areas 50 are separated from the laminated sheet 51. However, the vacuum atmosphere in each storage area 14 is maintained.

Subsequently, a method for manufacturing the heat insulator 2 will be described with reference to FIGS. First, as shown in FIGS. 19A to 19C, a metal plate 41 below a metal plate 41 with respect to a metal plate 41 made of aluminum (thin plate) or thin film having a thickness of about 0.5 mm, for example. The metal foil 13 is formed by rolling the metal plate 41 using the first mold 61 and the second mold 62 disposed on the side and the upper side, respectively.

When the metal foil 13 is removed from the

molds

61 and 62, the metal foil 13 has a concave surface of the concave portion 55 in the first mold 61 and a convex portion 56 in the second mold 62, as shown in FIG. 20. Projecting portions 57 projecting downward from the metal foil 13 are molded at a plurality of locations so that the shape of the outer surface and the shape of the inner surface respectively follow the shape of the convex surface. Each projecting portion 57 has the inner peripheral surface at the lower end surface and the bent portion of the outer peripheral surface gently (R-shaped) in the circumferential direction, and has a thickness dimension of, for example, about 0.05 mm. Moreover, by this shaping | molding, the area | region between the

protrusion parts

57 and 57 becomes flat over a horizontal direction, and is thinly extended by the metal mold | dies 61 and 62, and a thickness dimension is set to about 0.05 mm. In FIG. 20, the metal plate 41 is shown partially enlarged and cut away.

Next, as shown in FIGS. 19D and 20, a third mold 63 made of, for example, stainless steel, in which a plurality of openings 63 a are formed in a lattice shape so as to correspond to the arrangement pattern of the protrusions 57. On top, the metal foil 13 is placed (attached) so that the protrusions 57 are accommodated in the openings 63a. Subsequently, as shown in FIG. 19 (d), glass wool or powder made of silica or the like is filled as a filler 11 in each protruding portion 57. Then, a flat metal foil 42 made of, for example, aluminum having a thickness dimension of, for example, about 0.05 mm is placed so as to block the opening regions (storage regions for the filler 11) on the upper surface of the protruding portion 57. Each of the fillers 11 is wrapped by the metal foil 13 and the metal foil 42. Next, as shown in FIG. 21, the third mold 63, the metal foil 13, the filler 11, and the metal foil 42 are carried into a vacuum chamber 71 for performing a heat treatment in a vacuum atmosphere, and a heating table 72. Placed on. In FIG. 21, 73 is a heater, and 74 is a vacuum exhaust path.

And while setting the inside of the vacuum chamber 71 to a vacuum atmosphere, the 4th metal mold | die 64 which consists of stainless steel etc. with a flat lower surface is pressurized toward the metal foil 42 from the upper side of the metal foil 42, and

metal foil

13 and 42 are brought into pressure contact with each other. In addition, the heating table 72 heats the contact portion (the region between the protruding portions 57 and 57) of the metal foil 13 and the metal foil 42 to, for example, about 600 to 700 ° C. When this heat treatment and pressure treatment are performed for about 12 hours, for example, diffusion of atoms occurs between the contact portions of the metal foil 41 (13) and the metal foil 42 as shown in FIG. The metal foil 13 and the metal foil 42 are diffusion-bonded to such an extent that the boundary is hardly discernable. Therefore, as shown in FIG. 23, each protrusion 57 is hermetically sealed in the circumferential direction in a state where the inner region (housing region 14) filled with the filler 11 is in a vacuum atmosphere. Is done. In FIG. 21, the illustration of the pressurizing mechanism for pressurizing the fourth mold 64 downward is omitted.

Then, these integrated metal foil 41 (13) and metal foil 42 are immersed in a liquid made of resin, for example, and taken out from the liquid, followed by drying and heat treatment. By this treatment, as shown in FIG. 18,

resin sheets

16 and 16 are formed on the surfaces of the metal foil 13 and the metal foil 42 so that the film thicknesses are about 0.05 mm, for example. As shown, the heat insulating body 2 in which a plurality of partition regions 50 are formed is obtained. Therefore, in each partition region 50, the storage region 14 hermetically sealed with the metal foil 13 (metal foils 13 and 42) is provided in the same manner as the heat insulator 2 described in the first embodiment. It is formed. As this resin sheet 16, for example, a film-like resin sheet 16 may be attached instead of performing immersion and heat treatment in a resin liquid.

In FIG. 18, the above-described laminated sheet 51, which is a part (metal foil 13, metal foil 42, and resin sheets 16, 16) that connects one end side (upper side) of each partition region 50, has a film thickness of, for example, 0. For example, each side is formed into a square having a dimension of 20 mm, for example, when viewed in a plane (XY plane). Thus, since the lamination sheet 51 is thin-film-like, each division area | region 50 can each move independently, maintaining the vacuum atmosphere of each storage area | region 14, so that each lamination area | region 51 can move independently. Is supported by

Then, the case where this heat insulating body 2 is arrange | positioned along the outer surface of the exhaust pipe 1a mentioned above is demonstrated. Here, when the surface facing the front end side of the partition region 50 when the heat insulating body 2 is viewed in a plane is the front surface, and the surface facing the laminated sheet 51 side is the back surface, the surface side of the heat insulating body 2 is the exhaust pipe as shown in FIG. The heat insulator 2 is disposed along the curved surface (outer peripheral surface) of the exhaust pipe 1a and the length direction of the exhaust pipe 1a so as to face the 1a side, that is, so that the tip of each partition region 50 contacts the exhaust pipe 1a. It is wound around the exhaust pipe 1a. Then, the end portions of the heat insulator 2 are bonded to each other using, for example, a heat-resistant tape 65 or the like.

At this time, as described above, the partition regions 50 are flexible and supported by the laminated sheet 51, so that the metal foils 13 and 13 in the partition regions 50 are placed on the outer peripheral surface of the exhaust pipe 1a. When the heat insulator 2 is arranged so as to follow, generation of stress that is stretched or compressed, for example, is suppressed. Therefore, for example, the occurrence of pinholes and cracks in the metal foil 13 is suppressed, and the vacuum atmosphere (heat insulation performance) of the storage region 14 is maintained. Further, since the storage areas 14 are individually formed in each of the partition areas 50, even if, for example, a pinhole is formed in one metal foil 13 of these storage areas 14 and the atmosphere is returned to the atmosphere, Since the storage region 14 is hardly affected, the heat insulation performance of the heat insulator 2 as a whole can be substantially maintained. Furthermore, since each partition region 50 has a substantially cylindrical shape, and the corner of the tip of the partition region 50 is smoothed, a sharp (sharp) surface is formed on the metal foil 13. Since it is suppressed, the concentration of stress on a part of the metal foil 13 is suppressed, and the occurrence of pinholes and cracks is further suppressed. Furthermore, since the laminated sheet 51 is positioned outside the partition region 50 when viewed from the exhaust pipe 1a, heat radiation from the exhaust pipe 1a to the outside through the laminated sheet 51 is suppressed. Even if a pinhole or the like is formed in the metal foil 13, the resin sheet 16 is formed so as to cover the metal foil 13, so that the vacuum atmosphere in the storage region 14 may be maintained by the resin sheet 16. .

At this time, in the heat insulator 2 of the first embodiment described above (in the case where the plurality of partition regions 50 are not provided), the metal foil 13 is not formed with pinholes or the like even if bent or curved. When the thickness of the foil 13 is increased to, for example, about 15 mm, the metal foil 13 may have a high rigidity (high strength) and may be difficult to bend. Therefore, by partitioning the heat insulator 2 into the plurality of partition regions 50 in an airtight manner, pinholes can be suppressed while the film thickness of the metal foil 13 is kept thin, so that the heat insulation performance of the heat insulator 2 is maintained. The heat insulator 2 can be easily bent or bent.

Here, when the heat insulator 2 is wound around the outer periphery of the exhaust pipe 1a, when the length dimension of the heat insulator 2 is shorter than the circumferential dimension or length dimension of the exhaust pipe 1a (dimension in the direction in which the exhaust pipe 1a extends). Attaches a plurality of heat insulators 2 to the outer surface of the exhaust pipe 1a, and adheres the heat insulators 2 to each other using the heat-resistant tape 65 as described above. On the other hand, when the length of the heat insulator 2 is longer than each dimension of the exhaust pipe 1a, the laminated sheet 51 in the region between the

partition regions

50 and 50 in the heat insulator 2, for example, the AA line shown in FIG. Disconnect. In this way, even when the heat insulating body 2 is cut at an intermediate position, by cutting the heat insulating body 2 while avoiding the respective storage areas 14, the vacuum atmosphere of each partition area 50 is maintained, and the heat insulating property is maintained. The At this time, as shown in FIG. 14, a block 1 b may be disposed between the exhaust pipe 1 a and the heat insulator 2. In FIG. 24, the arrangement interval between the

partition regions

50 and 50 and the laminated sheet 51 are schematically shown.

The separation dimension D between the

partition areas

50 and 50 described above is 10 mm or less because the

storage areas

14 and 14 that are in a vacuum atmosphere are separated too much from each other and the heat insulation performance is deteriorated. Is preferred. In addition, if the separation dimension D is too small (too close), it is difficult to correspond to a curved surface having a large curvature, that is, it is difficult to bend the heat insulating body 2, and thus, for example, 5 mm or more is preferable. The separation dimension D varies depending on the heat generation part. For example, the exhaust pipe 1a described above will be described as an example. When the outer diameter dimension of the exhaust pipe 1a is Φ50 mm, it is 5 to 10 mm, and Φ100 mm. Is preferably about 10 mm to 15 mm. Further, with respect to the height dimension h of the partition area 50 and the diameter dimension R of the partition area 50 from the laminated sheet 51, for example, h is preferably about 5 mm to 10 mm, and R is about 20 mm to 40 mm (see FIG. 17). .

Further, as shown in FIG. 25, the heat insulator 2 may be arranged so as to cover the corners on the upper and lower four sides of the processing container 1. Even in this case, the vacuum atmosphere of the storage region 14 in each partition region 50 is maintained, that is, in a state in which the occurrence of pinholes or the like in the metal foil 13 is suppressed, along the outer surface of the processing container 1. The heat insulating body 2 is affixed.

Further, when a flange (exhaust port) 75 for connecting the projection, for example, the above-described exhaust pipe 1a is formed on the outer surface of the processing container 1, it corresponds to the size and shape of the flange 75. A part of the heat insulator 2 may be cut off. Even in this case, for example, as shown in FIG. 26, the vacuum in the storage region 14 around the opening 66 is formed by separating the one or a plurality of partition regions 50 in the heat insulator 2 to form the opening 66. The atmosphere can be maintained. Therefore, as shown in FIGS. 27 and 28, the heat insulator 2 can be arranged avoiding the flange 75. In FIG. 27, the heat insulator 2 in the Y direction is omitted, and the laminated sheet 51 is omitted in FIG.

In this way, one type (size and shape) of the heat insulator 2 can be applied to heat generating portions of various shapes, specifically curved surfaces, bent portions, and surfaces on which protrusions are formed. Since it is not necessary to manufacture the heat insulating body 2 according to the kind of heat generating part, high versatility is obtained for the heat insulating body 2, which is advantageous in terms of cost. In addition, although the opening part 66 was demonstrated in this example, it may replace with the opening part 66 and may make a notch so that one or several division area | region 50 may be removed from the side of the heat insulating body 2, for example.

Further, as described in the above example, a heat insulating material 18 may be provided between the metal foil 13 and the resin sheet 16. In this case, as shown in FIG. 29, the heat insulating material 18 is arranged around the metal plate 41 and the metal foil 42, and the metal plate 41, the metal foil 42 and the heat insulating material 18 are covered with, for example, a thin film. The

resin sheets

16 and 16 are arranged, and the peripheral portions of the

resin sheets

16 and 16 are bonded to each other. In this case, the heat insulating material 18 is arrange | positioned so that each division area | region 50 may be straddled.

Further, as shown in FIG. 30, the heat insulating material 18 may be partitioned by the resin sheet 16 between the

partition regions

50, 50. When partitioning the heat insulating material 18 in this way, after diffusion bonding the metal foils 13, 13, for example, a resin liquid is applied to the surface of the third mold 63 (FIG. 21) described above. The heat insulating materials 18 are accommodated in the openings 63a (regions in which the protrusions 57 are accommodated) of the third mold 63 so as to be, for example, about half the depth of the openings 63a. And the protrusion part 57 is each accommodated in each opening part 63a of the 3rd metal mold | die 63 so that the area | region between the

protrusion parts

57 and 57 may be supported from the downward side by the horizontal surface between opening

part

63a, 63a. Then, by heating the heat insulator 2 and the third mold 63, the resin liquid on the surface of the third mold 63 is cured, and the metal foil 13 (metal foil 42) around each protrusion 57. ) And the resin film (resin sheet 16) are connected, and a heat insulating material 18 is accommodated between each protrusion 57 and the resin sheet 16. Therefore, the heat insulating material 18 is partitioned for each partition region 50. Then, also about the upper side of the heat insulating body 2, the heat insulating body 2 of FIG. 30 is obtained by performing the application | coating process of a resin liquid, accommodation of the heat insulating material 18, and heat processing similarly using the metal mold | die which is not illustrated. In the heat insulator 2 in FIG. 30, when one or a plurality of partition regions 50 are separated as described above, the vacuum atmosphere in each storage region 14 is maintained by cutting along the line BB in FIG. However, leakage and scattering of the heat insulating material 18 can also be suppressed.

In the above-described example, the partition regions 50 are arranged in a grid pattern, but may be arranged in a staggered pattern (alternately) as shown in FIG. 31, for example. In addition to the substantially cylindrical shape, the partition region 50 may be a substantially box shape as shown in FIG. 32, for example. Further, as shown in FIG. 33, a triangular prism-shaped partition region 50 having a triangular bottom surface and top surface is provided, and the two

partition regions

50 and 50 are disposed so that the side surfaces of the

partition regions

50 and 50 are close to each other and face each other. These two

partition regions

50 and 50 may be provided as a set at a plurality of locations. Then, by arranging a plurality of partition regions 50 on the laminated sheet 51 such that the surfaces facing each other in the set of

partition regions

50 and 50 adjacent to each other are aligned in a row, a direction orthogonal to the row (see FIG. The direction of the heat insulator 2 is easily bent with respect to the direction indicated by the arrow in FIG. 32 and 33, the heat insulator 2 is partially cut away.
Further, when the heat insulating body 2 is constituted by the plurality of partition regions 50, the protruding portion 57 is formed using the first mold 61 and the second mold 62, but

such molds

61 and 62 are used. Instead, the filler 11 may be scattered in a plurality of regions on the substantially flat metal plate 41. In this case, the metal plate 41 around the dotted region is supported from below by the upper surface of the third mold 63 so that the dotted region of these fillers 11 is airtightly partitioned, and the metal plate A metal foil 42 is laminated above 41. Then, in a vacuum atmosphere, the metal foil 42 around the dotted region is moved downward from the upper side of the metal plate 41 and the metal foil 42 by another mold in a state where the upper and lower sides of the third mold 63 are switched. Pressurize. And like the above-mentioned example, the contact surface of these metal plates 41 and the metal foil 42 is joined by performing a pressurizing process and a heat processing.

Here, the manufacturing method of the heat insulator 2 in the first embodiment described above will be briefly described with reference to FIG. As in the case where the

molds

61 and 62 described above are not used, the filler 11 is placed on the metal plate 41 (metal foil 13) on a substantially flat plate, and the metal foil 42 ( A metal foil 13) is laminated. Then, the metal surfaces of the metal plate 41 and the metal foil 42 around the filler material 11 are brought into contact with each other so that the filler material 11 is wrapped by the metal plate 41 and the metal foil 42, and the contact surface is in a vacuum atmosphere. The pressure is applied and the contact surface is heated. In this way, by performing the pressure treatment and the heat treatment in the same manner as in the above-described example, diffusion of atoms occurs on the contact surface, and the heat insulator 2 of the first embodiment is obtained. In FIG. 34,

reference numerals

81 and 82 denote a mold for supporting the contact surface from the lower side over the circumferential direction of the heat insulator 2 and a mold for pressing the support surface by the mold 81 downward from the upper side. Reference numeral 83 is a heating unit for heating a region sandwiched between the

molds

81 and 82.

Further, in connecting the plurality of partition regions 50, the laminated sheet 51 made of the metal foil 13 and the resin sheet 16 (specifically, the metal plate 41, the metal foil 42, and the resin sheets 16 and 16) is used. A plurality of partition regions 50 may be connected. Specifically, as described with reference to FIG. 34, a plurality of heat insulators 2 in which the partition regions 50 are not provided are produced. Then, as will be described below, a plurality of these heat insulators 2 are connected in a plane using two connection molds 90 shown in FIGS. 35 and 36. In this connection mold 90, concave portions 91 for accommodating the heat insulating body 2 are arranged in a plurality of places, for example, in a lattice shape, and the concave portion 91 has an end portion of the heat insulating body 2 accommodated in the concave portion 91. The width dimension is set so that it extends slightly outward from the outer edge of the recess 91, for example, about 2 mm, that is, the heat insulator 2 is supported from the side in the region between the

recesses

91, 91. Further, a line-shaped groove 93 is formed in the horizontal portion 92 which is a portion formed horizontally between the

concave portions

91 and 91 so as to divide the upper surface of the connection mold 90 vertically and horizontally. The grooves 93 communicate with each other and open toward the outside of the connection mold 90 on the side surface of the connection mold 90.

Then, a plurality of heat insulators 2 are arranged on the connection mold 90 so that the heat insulators 2 are accommodated in the recesses 91, and the end portions of these heat insulators 2 are placed above the grooves 93 as shown in FIG. 37. To position. Next, another connection mold 90 is lowered from above the heat insulator 2 placed on the connection mold 90 in a state where the upper and lower sides of the connection mold 90 are switched. Then, the

connection molds

90 and 90 are fixed by a fixing tool (not shown) so that the heat insulator 2 is accommodated in the

recesses

91 and 91 in the

connection molds

90 and 90 from above and below. Subsequently, when the

connection molds

90 and 90 are immersed in the resin liquid, the resin liquid is grooved from the side surface of the connection mold 90 so as to connect the ends of the

heat insulators

2 and 2 adjacent to each other. 93 flows through. Thus, the

connection molds

90 and 90 are taken out from the resin liquid, and drying and heat treatment are performed while preventing the resin liquid from being discharged from the groove 93 (while closing the opening of the groove 93 on the side surface of the connection mold 90). When the

connection molds

90 and 90 are removed, the plurality of heat insulators 2 in which the end portions are planarly connected by the resin material 95 are obtained.
At this time, the heat insulator 2 connected in a plane using the resin material 95 may have a shape similar to that of the partition region 50 described above, as shown in FIG. In addition, as a method for joining the metal foils 13 and 13 described above, a method of applying pressure while heating the contact portions of the metal foils 13 and 13 has been described as an example. However, an electron beam or the like is used as a contact portion in a vacuum atmosphere. A welding method of irradiating and joining may be used.

Here, the storage region 14 is partitioned into a plurality of partition regions 50 for the heat insulator 2 of the first embodiment in which the vacuum atmosphere is used, but the mantle heat insulator of the second embodiment described above is also a plurality of the same. You may make it divide into the division area 50 of this. Below, an example of the manufacturing method of such a mantle heat insulator is demonstrated. First, as shown in FIG. 39 (a), for example, the outer skin layer 32 described above is arranged so as to follow the surface (a plurality of recesses 55) of the first mold 61, and for example, a fiber-like or powder-like one. For example, the block main body 31 made of silica glass or the like is accommodated in each recess 55 through the outer skin layer 32. Next, as shown in FIG. 2B, for example, a thin film aluminum layer 33 is disposed so as to close each recess 55, and the lower surface of the aluminum layer 33 and the upper surface of the outer skin layer 32 (between the recesses 55, 55). The area).

Further, as shown in FIG. 39C, in the same manner as in FIG. 39A, the mold 70 having the same configuration as the first mold 61 is used so as to be along the recess 55 of the mold 70. The block body 31 is accommodated in each recess 55 via the outer skin layer 32 disposed in the above, and the above-described aluminum layer 33 is disposed so as to cover each recess 55. Similarly, the lower surface of the aluminum layer 33 and the upper surface of the outer skin layer 32 are bonded.

Subsequently, as shown in FIG. 40, for example, the first mold 61 is turned upside down so that the aluminum layers 33 and 33 face each other, and the resin layer 34 is placed between the aluminum layers 33 and 33. Deploy. Then, the aluminum layer 33, the resin layer 34, and the aluminum layer 33 are bonded to each other to form the heat reflecting sheet 35. Next, the

outer layers

32 and 32 around the mantle insulator are bonded together, and the first mold 61 and the mold 70 are removed to obtain a mantle insulator partitioned into a plurality of partition regions 50. The mantle heat insulator is also configured to be bendable and separable between the

partition regions

50 and 50 in the same manner as the vacuum heat insulator (heat insulator 2) described above. 39 and 40, the thickness dimension of the heat reflecting sheet 35 is exaggerated.

This international application claims priority based on Japanese Patent Applications 2010-031665 and 2010-173861 filed on February 16, 2010 and August 2, 2010, respectively. This is incorporated here.

Claims

A first envelope made of a metal foil in which the peripheral metal surfaces are bonded and sealed, and the inside is in a vacuum atmosphere;
A heat insulating material enclosed in the first envelope;
And a resin sheet provided so as to cover the first sealing body.
The resin sheet forms a second envelope by sealing the resin sheets to each other at the peripheral edge or by joining the peripheral edge to the peripheral edge of the first envelope.
The heat insulator according to claim 1, wherein a heat insulating material is filled between the second seal and the first seal.
The first sealing body is partitioned into a plurality of regions that are airtight to each other by joining a part of metal foils facing each other.
The heat insulator according to claim 1 or 2, wherein a heat insulating material is sealed in each of the plurality of regions.
A heat-insulating block, and a heat-reflective sheet provided so as to face the heat-insulated region inside the heat-insulating block,
The heat-reflecting sheet comprises a resin sheet and a metal layer laminated on the heat-insulated region side of the resin sheet.
The heat insulating body according to claim 4, wherein the heat insulating block is configured by covering a ceramic material with an outer skin layer.
The heat insulating body according to any one of claims 1, 2, 4, and 5, wherein the resin sheet is made of polyimide.
Arranging the metal foil so as to wrap the heat insulating material, and pressing the metal surfaces of the metal foil around the heat insulating material with each other;
While maintaining the atmosphere in which the heat insulating material and the metal foil are placed in a vacuum atmosphere, by heating the contact portion between the metal surfaces so that atoms diffuse between the metal surfaces, the metal surfaces are mutually bonded. Bonding and forming a first envelope;
Then, the process of covering a said 1st sealing body with a resin sheet, The manufacturing method of the heat insulating body characterized by the above-mentioned.
Between the step of forming the first envelope and the step of covering the first envelope with the resin sheet, performing a step of disposing a heat insulating material on the outside of the first envelope,
The step of covering the first envelope with the resin sheet includes the step of sealing the peripheral portions of the resin sheet on the outside of the first envelope or the peripheral portion of the resin sheet with the first envelope. The heat insulating material outside the first envelope is filled between the second envelope made of the resin sheet and the first envelope. The manufacturing method of the heat insulating body of Claim 7 characterized by these.
The step of pressing the metal surfaces of the metal foil together includes the step of attaching one metal foil to one mold in which a plurality of recesses are formed, and heat insulation through the one metal foil in each of the recesses. A step of positioning the material, and then pressing the other mold to the one mold through the other metal foil laminated on the one metal foil,
The process of forming a said 1st sealing body is a process of heating the contact part of the metal surfaces in each peripheral part of the said recessed part, The manufacture of the heat insulating body of Claim 7 or 8 characterized by the above-mentioned. Method.