WO2011102337A1 - Isolant thermique et procédé pour produire un isolant thermique - Google Patents

Isolant thermique et procédé pour produire un isolant thermique Download PDF

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Publication number
WO2011102337A1
WO2011102337A1 PCT/JP2011/053127 JP2011053127W WO2011102337A1 WO 2011102337 A1 WO2011102337 A1 WO 2011102337A1 JP 2011053127 W JP2011053127 W JP 2011053127W WO 2011102337 A1 WO2011102337 A1 WO 2011102337A1
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WO
WIPO (PCT)
Prior art keywords
heat
heat insulating
metal foil
resin sheet
envelope
Prior art date
Application number
PCT/JP2011/053127
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English (en)
Japanese (ja)
Inventor
徳彦 辻
宏憲 八木
Original Assignee
東京エレクトロン株式会社
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Publication of WO2011102337A1 publication Critical patent/WO2011102337A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00—Thermal insulation in general
    • F16L59/06—Arrangements using an air layer or vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/20—Layered products comprising a layer of metal comprising aluminium or copper
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B27/00—Layered products comprising a layer of synthetic resin
    • B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
    • B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00—Thermal insulation in general
    • F16L59/02—Shape or form of insulating materials, with or without coverings integral with the insulating materials
    • F16L59/026—Mattresses, mats, blankets or the like
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L59/00—Thermal insulation in general
    • F16L59/08—Means for preventing radiation, e.g. with metal foil
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2250/00—Layers arrangement
    • B32B2250/44—Number of layers variable across the laminate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/30—Properties of the layers or laminate having particular thermal properties
    • B32B2307/304—Insulating

Definitions

  • the present invention relates to a heat insulator for suppressing heat dissipation and a method for manufacturing the heat insulator.
  • the inside of the manufacturing apparatus may be heated by, for example, a heater.
  • a heat insulator is disposed along the outer wall surface of the apparatus. Specifically, the temperature of the heat insulator is increased to, for example, about 180 ° C. to 200 ° C. such as the outer surface of a process chamber (processing vessel), the surroundings of a gas pipe and an exhaust pipe heated by a heater, and the like. A site.
  • a fiber glass wool or powdery filler made of a material having as low a thermal conductivity as possible, for example, silica (silicon dioxide) glass, and the silica glass are provided.
  • the mantle heat insulator provided with the outer skin layer which makes packing materials, such as cloth is mentioned.
  • the heat reflectivity is small compared to, for example, metal, for example, when heat is dissipated from the processing vessel toward the mantle insulator, the mantle insulator absorbs heat and rises in temperature. The heat of the processing vessel is radiated to the outside through the mantle insulator.
  • a metal film such as aluminum (Al) is known as a member that reflects heat.
  • Al aluminum
  • a metal film such as aluminum (Al) is known as a member that reflects heat.
  • a metal film such as aluminum (Al) is known as a member that reflects heat.
  • Al aluminum
  • the thermal conductivity of the metal film is higher than that of, for example, silica glass, the metal film gradually increases in temperature due to the radiant heat that could not be reflected to the processing container side, and the heat of the processing container is transferred to the outside through the metal film. There is a risk of dissipating heat.
  • a vacuum insulator using a vacuum region as a heat insulator is known as a heat insulator having higher heat insulation than the mantle heat insulator described above.
  • this vacuum insulator is composed of two films made of a resin, such as polyethylene, and a fiber or powder made of silica glass is stored between the polyethylene films, and the storage area of the silica glass is evacuated. While maintaining, the end faces of the polyethylene film are heated to, for example, about several tens of degrees Celsius over the circumferential direction, and are heat-sealed (heat sealed).
  • a metal film such as aluminum is formed so as to cover the polyethylene film, thereby suppressing air permeation (leakage) to the vacuum region.
  • This vacuum heat insulator is used for household appliances, for example.
  • the insulator of the present invention is A first envelope made of a metal foil in which the peripheral metal surfaces are bonded and sealed, and the inside is in a vacuum atmosphere; A heat insulating material enclosed in the first envelope; And a resin sheet provided so as to cover the first sealing body.
  • the resin sheet forms a second sealed body by sealing the resin sheets with each other at the peripheral part or by joining the peripheral part to the peripheral part of the sealed body, It is preferable that a heat insulating material is filled between the second envelope and the first envelope.
  • the first sealing body is partitioned into a plurality of regions that are airtight to each other by joining a part of metal foils facing each other. Each of the plurality of regions may be sealed with a heat insulating material.
  • the method for producing the heat insulator of the present invention is as follows. Arranging the metal foil so as to wrap the heat insulating material, and pressing the metal surfaces of the metal foil around the heat insulating material with each other; While maintaining the atmosphere in which the heat insulating material and the metal foil are placed in a vacuum atmosphere, by heating the contact portion between the metal surfaces so that atoms diffuse between the metal surfaces, the metal surfaces are mutually bonded. Bonding and forming a first envelope; And a step of covering the first sealing body with a resin sheet.
  • the step of covering the first envelope with the resin sheet includes the step of sealing the peripheral portions of the resin sheet on the outside of the first envelope or the peripheral portion of the resin sheet with the first envelope.
  • the heat insulating material outside the first sealing body is filled between the second sealing body made of the resin sheet and the first sealing body. Also good.
  • the step of pressing the metal surfaces of the metal foil together includes the step of attaching one metal foil to one mold in which a plurality of recesses are formed, and heat insulation through the one metal foil in each of the recesses.
  • the step of forming the first sealing body may be a step of heating a contact portion between metal surfaces in each peripheral portion of the concave portion.
  • FIG. 1 It is a perspective view which shows an example of the heating apparatus provided with the heat insulating body of this invention.
  • the resin sheet is provided so as to cover the first sealing body made of the metal foil configured to be in a vacuum atmosphere, the first insulation is performed while performing vacuum heat insulation. Heat dissipation from the sealed body can be suppressed, and therefore a heat insulator excellent in heat insulation can be obtained.
  • a heat reflecting sheet comprising a resin sheet and a metal layer laminated on the heat-insulating region side of the resin sheet is opposed to the heat-insulating region inside the heat-insulating block. Therefore, the heat radiation from the heat-insulated region can be reflected by the metal layer toward the heat-insulated region and the heat radiation from the metal layer to the outside can be suppressed, so that a heat insulator excellent in heat insulation can be obtained. it can.
  • FIG. 1 An example of an embodiment of a heat insulator according to the present invention will be described with reference to FIGS. First, the whole structure of the heating apparatus provided with this heat insulating body is demonstrated easily.
  • this apparatus accommodates a substrate (not shown) such as a semiconductor wafer (hereinafter referred to as “wafer”) inside, and is formed by, for example, a CVD (Chemical Vapor Deposition) method or an ALD (Atomic Layer Deposition) method.
  • a processing container 1 which is a heat-insulated region for heating the wafer to about 700 ° C. using a heater (not shown) or the like is provided.
  • the processing container 1 On the outer wall surface made of a metal such as aluminum (Al), for example, in the processing container 1, as shown in FIG. are disposed so as to cover the processing container 1. Further, an exhaust pipe 1a for evacuating the atmosphere inside the processing container 1 is connected to the processing container 1, and the other end of the exhaust pipe 1a is connected to a vacuum pump (via a pressure adjusting unit such as a butterfly valve). Neither is shown).
  • the processing container 1 is connected to a processing gas supply path (not shown) for supplying a processing gas, for example, a film forming gas, into the processing container 1.
  • a processing gas supply path not shown
  • the heat insulator 2 on the right side of the processing container 1 is omitted.
  • the heat insulator 2 is formed in a substantially plate shape so that the surface facing the outer wall surface of the processing container 1 is wide.
  • the heat insulator 2 is made of glass wool (fiber) such as silica (silicon dioxide) or powder in a substantially box shape arranged along the wall surface of the processing container 1.
  • a filler (heat insulating material) 11 is provided.
  • a metal foil 13 made of, for example, aluminum having a thickness of 0.05 mm covers the filler 11 as a first sealing body. It is provided as follows.
  • a storage region 14 for the filler 11 that is an internal region of the metal foil 13 is maintained in a vacuum atmosphere.
  • the storage area 14 is formed by stacking two metal foils 13 and 13 so as to overlap each other, storing the filler 11 between the metal foils 13 and 13, and in the vacuum container (not shown) It is formed airtight by an atomic diffusion bonding method in which the metal foils 13 and 13 are bonded to each other by heating while applying pressure to the peripheral portion of the 13 in the circumferential direction. Therefore, since the metal foils 13 and 13 around the storage region 14 are joined so that the interface and the boundary between the metal foils 13 and 13 are hardly discernable at the joint 15 as schematically shown in FIG.
  • the storage area 14 is hermetically sealed. The metal foils 13 and 13 are pressed against the filler 11 so as to follow the outer surface shape of the filler 11 because the storage region 14 is in a vacuum atmosphere.
  • Resin sheets 16 and 16 made of a resin material such as these are laminated so as to sandwich the metal foils 13 and 13 from above and below, for example.
  • the resin sheet 16 has a thermal conductivity of, for example, 0.28 W / mK and a heat resistant temperature of 300 ° C.
  • These resin sheets 16 and 16 are, for example, welded or bonded in a hermetic manner in the circumferential direction at a portion close to the joint 15 of the metal foils 13 and 13 to form a second sealing body.
  • a heat insulating material 18, for example, a fiber or powder made of silica is stored in a storage member such as a cloth (not shown) or a storage member. Arranged without.
  • the airtight region 17 is, for example, an air atmosphere. In FIG. 3, drawing of the heat insulating material 18 and the resin sheet 16 outside the metal foil 13 is omitted.
  • the wafer is stored in the processing container 1 whose outer wall surface is covered with a plurality of heat insulators 2, and the processing container 1 is evacuated through the exhaust pipe 1a.
  • the opening degree of a butterfly valve (not shown) provided in the exhaust pipe 1a is adjusted so as to have a processing pressure when performing the film forming process.
  • the processing gas is decomposed on the wafer surface by the heat of the heater. A thin film is formed.
  • the outer wall surface of the processing container 1 can be heated to, for example, about 200 ° C. by heat transfer from the inside of the processing container 1. And this heat is going to be radiated outside through the heat insulator 2 provided along the outer wall surface of the processing container 1, but the resin sheet 16 having a low thermal conductivity is applied to the outer wall surface as described above. Since it arrange
  • the heat insulating material 18 and the resin sheet 16 are arranged outside the metal foil 13, heat transfer from the resin sheet 16 to the outside is suppressed.
  • the joint between the resin sheets 16 and 16 and the joint 15 between the metal foils 13 and 13 are heated to temperatures close to 200 ° C., respectively, but the heat resistance of the resin sheet 16 and the metal foil 13. Is high (resin sheet 16: 300 ° C., metal foil 13: 660 ° C.), no melting or alteration occurs. Accordingly, a vacuum atmosphere is maintained for the storage area 14 and an air atmosphere is maintained for the airtight area 17.
  • the heat insulating body 2 is arrange
  • the metal foil 13 configured to have a vacuum atmosphere is provided and the metal foil 13 is covered. Since the resin sheet 16 is provided as described above, it is possible to perform the heat insulation from the vacuum and to suppress the heat radiation from the metal foil 13, and thus it is possible to obtain the heat insulating body 2 having excellent heat insulating properties.
  • the resin sheet 16 having a heat resistant temperature of 300 ° C. is provided so as to cover the periphery of the metal foil 13, as described above, the heat insulator is formed on the outer wall surface of the processing container 1 that is heated to about 180 ° C. to 200 ° C. Even when 2 is disposed, deterioration of the resin sheet 16 such as melting and alteration can be suppressed, and heat of the processing container 1 can be prevented from flowing outside through the metal foil 13.
  • the storage region 14 is formed of aluminum that does not cause gas permeation or melting at the temperature of the processing container 1, it is possible to suppress a decrease in the degree of vacuum in the storage region 14, and thus heat insulation can be maintained over a long period of time. Can be maintained.
  • the heat insulating material 18 is provided in the airtight region 17 between the metal foil 13 and the resin sheet 16, the atmosphere inside the airtight region 17 and the heat insulating material 18 can be used between the metal foil 13 and the resin sheet 16. Therefore, heat transfer from the processing container 1 can be suppressed.
  • the metal foil 13 is made of aluminum having high flexibility, the inside of the storage area 14 can be evacuated without breaking the metal foil 13, and the heat insulator 2 is disposed along the processing container 1. Can be arranged.
  • the airtight region 17 is an air atmosphere.
  • the airtight region 17 may be made into a vacuum atmosphere to further improve the heat insulation.
  • the gas barrier property of the resin sheet 16 is compensated on the outside of the resin sheet 16 as shown in FIG. 5 in order to prevent external gas from entering the airtight region 17 through the resin sheet 16.
  • an auxiliary metal foil 21 made of aluminum for example, may be provided in an airtight manner.
  • the auxiliary metal foil 21 is formed by laminating two auxiliary metal foils 21 and 21 so as to sandwich the heat insulator 2 from above and below, and surrounding the peripheral portions of these auxiliary metal foils 21 and 21.
  • an auxiliary resin sheet 22 made of polyimide may be provided outside the auxiliary metal foil 21 in order to prevent the heat in the processing container 1 from flowing outside through the auxiliary metal foils 21 and 21.
  • a heat insulating material made of, for example, silica glass may be accommodated between the auxiliary metal foil 21 and the auxiliary resin sheet 22.
  • the metal foils 13 and 13 are bonded to each other at the bonding portion 15 by the atomic diffusion bonding method, but may be bonded by a bonding method in which gas from the outside does not enter, for example, a welding method using an electron beam. .
  • the heat insulating material 18 is provided between the metal foil 13 and the resin sheet 16
  • the resin sheet 16 may be configured by coating polyimide, for example, on the outside of the metal foil 13 without providing the heat insulating material 18. In this case, for example, after the metal foils 13 and 13 are joined airtightly, the resin sheet 16 is laminated on the outside of the metal foils 13 and 13. Further, the resin sheet 16 is disposed so as to cover the metal foil 13, but as shown in FIG.
  • the resin sheet 16 and the peripheral portions of the metal foil 13 may be joined together while separating the resin sheets 16. .
  • a masking material is applied so as to cover the vicinity of the bonding portion 15 in the circumferential direction. .
  • the resin sheet 16 is coated on the surface of the metal foil 13, and then the masking material is peeled off.
  • the storage region 14 is hermetically held by the metal foil 13 for the heat insulator 2, but as shown in FIG. 7, a vacuum atmosphere may be held by the resin sheet 16 instead of the metal foil 13. good.
  • resin sheets 16 and 16 are provided on the outer side of the filler 11, and the above-described joint portion 15 is formed on these resin sheets 16 and 16 by heat fusion (heat sealing).
  • a metal foil 13 for compensating the gas barrier property of the resin sheet 16 and an auxiliary resin sheet 22 for suppressing heat radiation from the metal foil 13 are arranged in this order from the inside so as to cover the resin sheet 16. Will be formed.
  • the block main body 31 and the outer skin layer 32 constitute a heat insulating block 30 (heat insulating body 2), and the heat insulating block 30 is configured to have, for example, a substantially box shape.
  • a heat reflecting sheet 35 made of, for example, a resin layer 34 made of a polyimide sheet and an aluminum layer 33 which is a metal layer formed on the resin layer 34 by vapor deposition, for example, is housed.
  • the aluminum layer 33 is for reflecting the heat in the processing container 1 toward the processing container 1, and the resin layer 34 is heated when the aluminum layer 33 cannot reflect the heat of the processing container 1. This is to prevent heat from being radiated to the outside.
  • the heat reflecting sheet 35 is disposed in the heat insulating block 30 so as to be approximately at the center position in the thickness direction of the heat insulating block 30, that is, to be sandwiched between the block main bodies 31 having substantially the same thickness from both sides in the thickness direction. ing.
  • the heat insulation block 30 is arrange
  • the aluminum layer 33 and the resin layer 34 have a thickness of, for example, 0.05 mm and 0.05 mm, respectively.
  • the surface of the aluminum layer 33 may be coated with a resin layer 34, or the aluminum layer 33 and the resin layer 34 are individually formed into a sheet shape and bonded to each other. You may do it.
  • the processing container 1 when the outer wall surface of the processing container 1 is heated to, for example, about 200 ° C. by performing the heat treatment on the wafer as described above, the processing container 1 is placed in the heat insulating block 30. Although heat is about to be transferred, heat transfer into the heat insulating block 30 is suppressed by the outer skin layer 32 and the block body 31 adjacent to the outer wall surface. And when a part of heat of the processing container 1 reaches
  • the heat conductivity of the aluminum layer 33 is high, and thus this heat is transmitted toward the block body 31 outside the processing container 1. Try to heat up.
  • a resin layer 34 having a lower thermal conductivity than that of the aluminum layer 33 is provided between the aluminum layer 33 and the block main body 31, the resin layer 34 provides the block main body 31 with a resin layer 34 as shown in FIG. Heat dissipation is suppressed. Even if the block main body 31 is slightly transferred from the processing container 1 through the resin layer 34, the heat dissipation to the outside can be suppressed because the block main body 31 is made of silica glass as described above. become.
  • the heat insulation block 30 (block main body 31) can be made thinner compared to a mantle heat insulator made of only conventional silica wool or the like.
  • FIG. 11 and 12 show a modification of the second embodiment.
  • FIG. 11 shows an example in which a heat reflecting sheet 35 is provided in a region close to the outer skin layer 32 on the processing container 1 side in the heat insulating block 30.
  • an aluminum layer 33 is disposed on the processing container 1 side, and a resin layer 34 is provided on the outside.
  • FIG. 12 shows an example in which the heat reflecting sheet 35 is disposed in the heat insulating block 30 at a position close to the outer skin layer 32 on the side away from the processing container 1.
  • the aluminum layer 33 and the resin layer 34 are disposed on the processing container 1 side and the outside, respectively.
  • a plurality of heat insulators are arranged on the outer wall surface of the processing container 1, but as shown in FIG. 13, a schematic box whose lower surface opens so as to cover the processing container 1 from above.
  • a type of insulation may be used.
  • heat insulator 2 or Each surface is constituted by the heat insulation block 30)
  • peripheral portions of the heat insulators are bonded to each other so as to form a box shape whose lower surface is opened by these five heat insulators. Even if it is such a heat insulating material, the effect
  • the exhaust pipe 1a is heated using a heater (not shown) in order to suppress the product generated by cooling the gas exhausted from the processing container 1 from adhering to the inner wall of the exhaust pipe 1a.
  • a heat insulator may be provided so as to cover the exhaust pipe 1a which is a heat-insulated region.
  • a ring-shaped heat insulator disposed along the exhaust pipe 1a is divided into a plurality of, for example, two in the circumferential direction, and each heat insulator is subjected to each of the above-described implementations. You may comprise with the heat insulating body 2 or the heat insulation block 30 of the form.
  • the number of divisions of the heat insulating material may be three or more, or for example, the heat insulating body is formed in a substantially strip shape, and one surface side of the heat insulating body is an outer peripheral surface along the length direction of the exhaust pipe 1a.
  • a plurality of heat insulators 2 may be arranged along the circumferential direction of the exhaust pipe 1a so as to follow the above.
  • Reference numeral 1b in FIG. 14 is a block made of, for example, aluminum provided between the exhaust pipe 1a and the heat insulating material, and reference numeral 1c is, for example, an adhesive tape for connecting the heat insulators.
  • the heat insulator of the present invention may be provided around the processing gas supply pipe.
  • silica glass has been described as an example, but glass wool, urethane foam, or the like may be used, for example.
  • the metal foil 13 and the aluminum layer 33 may be stainless steel or nickel other than aluminum.
  • any resin having high heat resistance other than polyimide may be used.
  • polybenzimidazole (PBI) having a heat resistant temperature (melting temperature) of 200 ° C. or higher, polyether ether, and the like.
  • the heat insulator (vacuum heat insulator) 2 has a substantially plate shape, so that the heat generating portion (heat-insulated region) whose outer surface is flat is used. Suitable for construction (pasting).
  • the shape of the outer surface of the heat generating part varies depending on the installation part of the apparatus and the heat insulator 2.
  • the outer surface of the exhaust pipe 1 a described above has a curved shape, and Corners (ridge lines) are formed on the four sides.
  • a protrusion such as a flange (exhaust port) for the exhaust pipe 1a is provided on the processing container 1, it is necessary to arrange the heat insulator 2 so as to avoid the protrusion.
  • the size, shape, or arrangement method of the heat insulating body 2 may be variously adjusted according to the shape of the outer surface of the heat generating portion. It is advantageous in terms of cost if the versatility is increased so that the outer surface of various shapes can be accommodated by the heat insulator 2 having a size). Therefore, it is preferable that the plate-like heat insulating body 2 described above is configured so that a notch or an opening can be formed so as to be bent or curved, and to avoid protrusions.
  • the heat insulating material 2 is filled with the filling material 11 in the storage area 14 which is a vacuum atmosphere, the heat insulating material 2 is not tightly curved because the filling material 11 is tightly and tightly tightened. Moreover, since the heat insulation performance of the heat insulation body 2 will fall if the storage area 14 is made into air atmosphere, a notch
  • the heat insulating body 2 is airtightly partitioned into a plurality of cylindrical regions in a plane (XY direction in FIG. 15). That is, partition regions (divided regions) 50 protruding in a columnar shape are arranged in a matrix in the vertical and horizontal directions on a substantially rectangular laminated sheet 51, and each partition region 50 includes a storage region 14 (see FIG. 18). Is formed.
  • the heat insulating material 18 is provided between the metal foil 13 and the resin sheet 16. In this example, the metal foil 13 and the resin are provided.
  • each partition region 50 is formed such that a corner portion on the front end side extending upward from the laminated sheet 51 is gradually tapered (R-shaped) in the circumferential direction.
  • R-shaped the degree of tapered
  • each partition region 50 has a height dimension h from the laminated sheet 51 of 5 mm and a diameter dimension R of 20 mm.
  • the separation dimension D between the partition regions 50 and 50 is, for example, 5 mm.
  • the dimension of the metal foil 13 and the resin sheet 16 is exaggerated and drawn thickly.
  • the adjacent partitioned areas 50 can be moved vertically and horizontally.
  • the heat insulating body 2 in this embodiment is a time when each partition area 50 is moved independently of each other, or when one or more of these partition areas 50 are separated from the laminated sheet 51. However, the vacuum atmosphere in each storage area 14 is maintained.
  • a method for manufacturing the heat insulator 2 will be described with reference to FIGS.
  • the metal foil 13 is formed by rolling the metal plate 41 using the first mold 61 and the second mold 62 disposed on the side and the upper side, respectively.
  • the metal foil 13 When the metal foil 13 is removed from the molds 61 and 62, the metal foil 13 has a concave surface of the concave portion 55 in the first mold 61 and a convex portion 56 in the second mold 62, as shown in FIG. 20.
  • Projecting portions 57 projecting downward from the metal foil 13 are molded at a plurality of locations so that the shape of the outer surface and the shape of the inner surface respectively follow the shape of the convex surface.
  • Each projecting portion 57 has the inner peripheral surface at the lower end surface and the bent portion of the outer peripheral surface gently (R-shaped) in the circumferential direction, and has a thickness dimension of, for example, about 0.05 mm.
  • region between the protrusion parts 57 and 57 becomes flat over a horizontal direction, and is thinly extended by the metal mold
  • the metal plate 41 is shown partially enlarged and cut away.
  • a third mold 63 made of, for example, stainless steel, in which a plurality of openings 63 a are formed in a lattice shape so as to correspond to the arrangement pattern of the protrusions 57.
  • the metal foil 13 is placed (attached) so that the protrusions 57 are accommodated in the openings 63a.
  • glass wool or powder made of silica or the like is filled as a filler 11 in each protruding portion 57.
  • a flat metal foil 42 made of, for example, aluminum having a thickness dimension of, for example, about 0.05 mm is placed so as to block the opening regions (storage regions for the filler 11) on the upper surface of the protruding portion 57.
  • Each of the fillers 11 is wrapped by the metal foil 13 and the metal foil 42.
  • the third mold 63, the metal foil 13, the filler 11, and the metal foil 42 are carried into a vacuum chamber 71 for performing a heat treatment in a vacuum atmosphere, and a heating table 72. Placed on.
  • 73 is a heater
  • 74 is a vacuum exhaust path.
  • die 64 which consists of stainless steel etc. with a flat lower surface is pressurized toward the metal foil 42 from the upper side of the metal foil 42, and metal foil 13 and 42 are brought into pressure contact with each other.
  • the heating table 72 heats the contact portion (the region between the protruding portions 57 and 57) of the metal foil 13 and the metal foil 42 to, for example, about 600 to 700 ° C.
  • this heat treatment and pressure treatment are performed for about 12 hours, for example, diffusion of atoms occurs between the contact portions of the metal foil 41 (13) and the metal foil 42 as shown in FIG.
  • each protrusion 57 is hermetically sealed in the circumferential direction in a state where the inner region (housing region 14) filled with the filler 11 is in a vacuum atmosphere. Is done.
  • FIG. 21 the illustration of the pressurizing mechanism for pressurizing the fourth mold 64 downward is omitted.
  • these integrated metal foil 41 (13) and metal foil 42 are immersed in a liquid made of resin, for example, and taken out from the liquid, followed by drying and heat treatment.
  • resin sheets 16 and 16 are formed on the surfaces of the metal foil 13 and the metal foil 42 so that the film thicknesses are about 0.05 mm, for example.
  • the heat insulating body 2 in which a plurality of partition regions 50 are formed is obtained. Therefore, in each partition region 50, the storage region 14 hermetically sealed with the metal foil 13 (metal foils 13 and 42) is provided in the same manner as the heat insulator 2 described in the first embodiment. It is formed.
  • a film-like resin sheet 16 may be attached instead of performing immersion and heat treatment in a resin liquid.
  • the above-described laminated sheet 51 which is a part (metal foil 13, metal foil 42, and resin sheets 16, 16) that connects one end side (upper side) of each partition region 50, has a film thickness of, for example, 0.
  • each side is formed into a square having a dimension of 20 mm, for example, when viewed in a plane (XY plane).
  • this heat insulating body 2 is arrange
  • the surface side of the heat insulating body 2 is the exhaust pipe as shown in FIG.
  • the heat insulator 2 is disposed along the curved surface (outer peripheral surface) of the exhaust pipe 1a and the length direction of the exhaust pipe 1a so as to face the 1a side, that is, so that the tip of each partition region 50 contacts the exhaust pipe 1a. It is wound around the exhaust pipe 1a. Then, the end portions of the heat insulator 2 are bonded to each other using, for example, a heat-resistant tape 65 or the like.
  • the partition regions 50 are flexible and supported by the laminated sheet 51, so that the metal foils 13 and 13 in the partition regions 50 are placed on the outer peripheral surface of the exhaust pipe 1a.
  • the heat insulator 2 is arranged so as to follow, generation of stress that is stretched or compressed, for example, is suppressed. Therefore, for example, the occurrence of pinholes and cracks in the metal foil 13 is suppressed, and the vacuum atmosphere (heat insulation performance) of the storage region 14 is maintained.
  • each partition region 50 has a substantially cylindrical shape, and the corner of the tip of the partition region 50 is smoothed, a sharp (sharp) surface is formed on the metal foil 13. Since it is suppressed, the concentration of stress on a part of the metal foil 13 is suppressed, and the occurrence of pinholes and cracks is further suppressed.
  • the laminated sheet 51 is positioned outside the partition region 50 when viewed from the exhaust pipe 1a, heat radiation from the exhaust pipe 1a to the outside through the laminated sheet 51 is suppressed. Even if a pinhole or the like is formed in the metal foil 13, the resin sheet 16 is formed so as to cover the metal foil 13, so that the vacuum atmosphere in the storage region 14 may be maintained by the resin sheet 16. .
  • the metal foil 13 is not formed with pinholes or the like even if bent or curved.
  • the thickness of the foil 13 is increased to, for example, about 15 mm, the metal foil 13 may have a high rigidity (high strength) and may be difficult to bend. Therefore, by partitioning the heat insulator 2 into the plurality of partition regions 50 in an airtight manner, pinholes can be suppressed while the film thickness of the metal foil 13 is kept thin, so that the heat insulation performance of the heat insulator 2 is maintained.
  • the heat insulator 2 can be easily bent or bent.
  • the heat insulator 2 when the heat insulator 2 is wound around the outer periphery of the exhaust pipe 1a, when the length dimension of the heat insulator 2 is shorter than the circumferential dimension or length dimension of the exhaust pipe 1a (dimension in the direction in which the exhaust pipe 1a extends). Attaches a plurality of heat insulators 2 to the outer surface of the exhaust pipe 1a, and adheres the heat insulators 2 to each other using the heat-resistant tape 65 as described above. On the other hand, when the length of the heat insulator 2 is longer than each dimension of the exhaust pipe 1a, the laminated sheet 51 in the region between the partition regions 50 and 50 in the heat insulator 2, for example, the AA line shown in FIG. Disconnect.
  • a block 1 b may be disposed between the exhaust pipe 1 a and the heat insulator 2.
  • FIG. 24 the arrangement interval between the partition regions 50 and 50 and the laminated sheet 51 are schematically shown.
  • the separation dimension D between the partition areas 50 and 50 described above is 10 mm or less because the storage areas 14 and 14 that are in a vacuum atmosphere are separated too much from each other and the heat insulation performance is deteriorated. Is preferred. In addition, if the separation dimension D is too small (too close), it is difficult to correspond to a curved surface having a large curvature, that is, it is difficult to bend the heat insulating body 2, and thus, for example, 5 mm or more is preferable.
  • the separation dimension D varies depending on the heat generation part.
  • the exhaust pipe 1a described above will be described as an example. When the outer diameter dimension of the exhaust pipe 1a is ⁇ 50 mm, it is 5 to 10 mm, and ⁇ 100 mm.
  • the heat insulator 2 may be arranged so as to cover the corners on the upper and lower four sides of the processing container 1. Even in this case, the vacuum atmosphere of the storage region 14 in each partition region 50 is maintained, that is, in a state in which the occurrence of pinholes or the like in the metal foil 13 is suppressed, along the outer surface of the processing container 1.
  • the heat insulating body 2 is affixed.
  • a flange (exhaust port) 75 for connecting the projection for example, the above-described exhaust pipe 1a is formed on the outer surface of the processing container 1, it corresponds to the size and shape of the flange 75.
  • a part of the heat insulator 2 may be cut off. Even in this case, for example, as shown in FIG. 26, the vacuum in the storage region 14 around the opening 66 is formed by separating the one or a plurality of partition regions 50 in the heat insulator 2 to form the opening 66. The atmosphere can be maintained. Therefore, as shown in FIGS. 27 and 28, the heat insulator 2 can be arranged avoiding the flange 75. In FIG. 27, the heat insulator 2 in the Y direction is omitted, and the laminated sheet 51 is omitted in FIG.
  • the heat insulator 2 can be applied to heat generating portions of various shapes, specifically curved surfaces, bent portions, and surfaces on which protrusions are formed. Since it is not necessary to manufacture the heat insulating body 2 according to the kind of heat generating part, high versatility is obtained for the heat insulating body 2, which is advantageous in terms of cost.
  • the opening part 66 was demonstrated in this example, it may replace with the opening part 66 and may make a notch so that one or several division area
  • a heat insulating material 18 may be provided between the metal foil 13 and the resin sheet 16.
  • the heat insulating material 18 is arranged around the metal plate 41 and the metal foil 42, and the metal plate 41, the metal foil 42 and the heat insulating material 18 are covered with, for example, a thin film.
  • the resin sheets 16 and 16 are arranged, and the peripheral portions of the resin sheets 16 and 16 are bonded to each other.
  • the heat insulating material 18 is arrange
  • the heat insulating material 18 may be partitioned by the resin sheet 16 between the partition regions 50, 50.
  • a resin liquid is applied to the surface of the third mold 63 (FIG. 21) described above.
  • the heat insulating materials 18 are accommodated in the openings 63a (regions in which the protrusions 57 are accommodated) of the third mold 63 so as to be, for example, about half the depth of the openings 63a.
  • the protrusion part 57 is each accommodated in each opening part 63a of the 3rd metal mold
  • the heat insulating body 2 of FIG. 30 is obtained by performing the application
  • the vacuum atmosphere in each storage region 14 is maintained by cutting along the line BB in FIG.
  • leakage and scattering of the heat insulating material 18 can also be suppressed.
  • the partition regions 50 are arranged in a grid pattern, but may be arranged in a staggered pattern (alternately) as shown in FIG. 31, for example.
  • the partition region 50 may be a substantially box shape as shown in FIG. 32, for example.
  • a triangular prism-shaped partition region 50 having a triangular bottom surface and top surface is provided, and the two partition regions 50 and 50 are disposed so that the side surfaces of the partition regions 50 and 50 are close to each other and face each other.
  • These two partition regions 50 and 50 may be provided as a set at a plurality of locations.
  • the heat insulator 2 is partially cut away.
  • the heat insulating body 2 is constituted by the plurality of partition regions 50, the protruding portion 57 is formed using the first mold 61 and the second mold 62, but such molds 61 and 62 are used. Instead, the filler 11 may be scattered in a plurality of regions on the substantially flat metal plate 41.
  • the metal plate 41 around the dotted region is supported from below by the upper surface of the third mold 63 so that the dotted region of these fillers 11 is airtightly partitioned, and the metal plate A metal foil 42 is laminated above 41. Then, in a vacuum atmosphere, the metal foil 42 around the dotted region is moved downward from the upper side of the metal plate 41 and the metal foil 42 by another mold in a state where the upper and lower sides of the third mold 63 are switched. Pressurize. And like the above-mentioned example, the contact surface of these metal plates 41 and the metal foil 42 is joined by performing a pressurizing process and a heat processing.
  • the manufacturing method of the heat insulator 2 in the first embodiment described above will be briefly described with reference to FIG.
  • the filler 11 is placed on the metal plate 41 (metal foil 13) on a substantially flat plate, and the metal foil 42 ( A metal foil 13) is laminated.
  • the metal surfaces of the metal plate 41 and the metal foil 42 around the filler material 11 are brought into contact with each other so that the filler material 11 is wrapped by the metal plate 41 and the metal foil 42, and the contact surface is in a vacuum atmosphere.
  • the pressure is applied and the contact surface is heated.
  • reference numerals 81 and 82 denote a mold for supporting the contact surface from the lower side over the circumferential direction of the heat insulator 2 and a mold for pressing the support surface by the mold 81 downward from the upper side.
  • Reference numeral 83 is a heating unit for heating a region sandwiched between the molds 81 and 82.
  • the laminated sheet 51 made of the metal foil 13 and the resin sheet 16 (specifically, the metal plate 41, the metal foil 42, and the resin sheets 16 and 16) is used.
  • a plurality of partition regions 50 may be connected. Specifically, as described with reference to FIG. 34, a plurality of heat insulators 2 in which the partition regions 50 are not provided are produced. Then, as will be described below, a plurality of these heat insulators 2 are connected in a plane using two connection molds 90 shown in FIGS. 35 and 36.
  • connection mold 90 concave portions 91 for accommodating the heat insulating body 2 are arranged in a plurality of places, for example, in a lattice shape, and the concave portion 91 has an end portion of the heat insulating body 2 accommodated in the concave portion 91.
  • the width dimension is set so that it extends slightly outward from the outer edge of the recess 91, for example, about 2 mm, that is, the heat insulator 2 is supported from the side in the region between the recesses 91, 91.
  • a line-shaped groove 93 is formed in the horizontal portion 92 which is a portion formed horizontally between the concave portions 91 and 91 so as to divide the upper surface of the connection mold 90 vertically and horizontally.
  • the grooves 93 communicate with each other and open toward the outside of the connection mold 90 on the side surface of the connection mold 90.
  • connection mold 90 a plurality of heat insulators 2 are arranged on the connection mold 90 so that the heat insulators 2 are accommodated in the recesses 91, and the end portions of these heat insulators 2 are placed above the grooves 93 as shown in FIG. 37.
  • another connection mold 90 is lowered from above the heat insulator 2 placed on the connection mold 90 in a state where the upper and lower sides of the connection mold 90 are switched.
  • the connection molds 90 and 90 are fixed by a fixing tool (not shown) so that the heat insulator 2 is accommodated in the recesses 91 and 91 in the connection molds 90 and 90 from above and below.
  • connection molds 90 and 90 are immersed in the resin liquid, the resin liquid is grooved from the side surface of the connection mold 90 so as to connect the ends of the heat insulators 2 and 2 adjacent to each other. 93 flows through.
  • the connection molds 90 and 90 are taken out from the resin liquid, and drying and heat treatment are performed while preventing the resin liquid from being discharged from the groove 93 (while closing the opening of the groove 93 on the side surface of the connection mold 90).
  • the connection molds 90 and 90 are removed, the plurality of heat insulators 2 in which the end portions are planarly connected by the resin material 95 are obtained.
  • the heat insulator 2 connected in a plane using the resin material 95 may have a shape similar to that of the partition region 50 described above, as shown in FIG.
  • a method for joining the metal foils 13 and 13 described above a method of applying pressure while heating the contact portions of the metal foils 13 and 13 has been described as an example.
  • an electron beam or the like is used as a contact portion in a vacuum atmosphere.
  • a welding method of irradiating and joining may be used.
  • the storage region 14 is partitioned into a plurality of partition regions 50 for the heat insulator 2 of the first embodiment in which the vacuum atmosphere is used, but the mantle heat insulator of the second embodiment described above is also a plurality of the same. You may make it divide into the division area 50 of this. Below, an example of the manufacturing method of such a mantle heat insulator is demonstrated.
  • the outer skin layer 32 described above is arranged so as to follow the surface (a plurality of recesses 55) of the first mold 61, and for example, a fiber-like or powder-like one.
  • the block main body 31 made of silica glass or the like is accommodated in each recess 55 through the outer skin layer 32.
  • a thin film aluminum layer 33 is disposed so as to close each recess 55, and the lower surface of the aluminum layer 33 and the upper surface of the outer skin layer 32 (between the recesses 55, 55). The area).
  • the mold 70 having the same configuration as the first mold 61 is used so as to be along the recess 55 of the mold 70.
  • the block body 31 is accommodated in each recess 55 via the outer skin layer 32 disposed in the above, and the above-described aluminum layer 33 is disposed so as to cover each recess 55.
  • the lower surface of the aluminum layer 33 and the upper surface of the outer skin layer 32 are bonded.
  • the first mold 61 is turned upside down so that the aluminum layers 33 and 33 face each other, and the resin layer 34 is placed between the aluminum layers 33 and 33. Deploy. Then, the aluminum layer 33, the resin layer 34, and the aluminum layer 33 are bonded to each other to form the heat reflecting sheet 35. Next, the outer layers 32 and 32 around the mantle insulator are bonded together, and the first mold 61 and the mold 70 are removed to obtain a mantle insulator partitioned into a plurality of partition regions 50.
  • the mantle heat insulator is also configured to be bendable and separable between the partition regions 50 and 50 in the same manner as the vacuum heat insulator (heat insulator 2) described above. 39 and 40, the thickness dimension of the heat reflecting sheet 35 is exaggerated.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Insulation (AREA)

Abstract

Selon l'invention, une feuille métallique (13), composée, par exemple, d'aluminium et configurée de telle sorte qu'une atmosphère de vide est formée à l'intérieur, est utilisée, et une feuille de résine (16), par exemple une feuille de polyimide, est disposée de manière à entourer la feuille métallique (13). De cette façon, on obtient une isolation par le vide et la feuille métallique (13) est empêchée de rayonner de la chaleur. En même temps, une couche d'aluminium (33) et une couche de résine (34) sont superposées dans un bloc isolant thermique (30), dans cet ordre, en partant du côté qui fait face à un récipient de traitement (1). De cette façon, la chaleur conduite à partir du récipient de traitement (1) est réfléchie vers le récipient de traitement (1) par la couche d'aluminium (33). Lorsque la température de la couche d'aluminium (33) s'est élevée parce que la chaleur issue du récipient de traitement (1) devient supérieure à la réflexion, le rayonnement thermique vers l'extérieur peut être inhibé par la couche de résine (34).
PCT/JP2011/053127 2010-02-16 2011-02-15 Isolant thermique et procédé pour produire un isolant thermique WO2011102337A1 (fr)

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JP2010-173861 2010-08-02
JP2010173861A JP2011190925A (ja) 2010-02-16 2010-08-02 断熱体及び断熱体の製造方法

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104595634A (zh) * 2015-01-26 2015-05-06 黄国平 一种真空绝热板
EP2980467A4 (fr) * 2013-03-29 2016-11-23 Mitsubishi Electric Corp Matériau d'isolation thermique sous vide
WO2017029460A1 (fr) * 2015-08-20 2017-02-23 Hutchinson Ensemble et panneau articule, a portions intermediaires de positionnement, pour une isolation thermique
FR3070471A1 (fr) * 2017-08-22 2019-03-01 Hutchinson Assemblage a isolation renforcee
US10493725B2 (en) 2016-02-04 2019-12-03 Mitsubishi Electric Corporation Thermal insulator, vacuum insulation member, and method of manufacturing vacuum insulation member
CN113943910A (zh) * 2021-08-26 2022-01-18 张小静 一种钼板拉伸热处理退火处理模具

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Publication number Priority date Publication date Assignee Title
JP2013228016A (ja) * 2012-04-25 2013-11-07 Mitsubishi Electric Corp 真空断熱材および真空断熱材の製造方法および被断熱装置
JP5496264B2 (ja) * 2012-06-19 2014-05-21 マグ・イゾベール株式会社 真空断熱パネル
JP7122511B2 (ja) * 2018-07-12 2022-08-22 パナソニックＩｐマネジメント株式会社 便座装置
WO2020115808A1 (fr) * 2018-12-04 2020-06-11 日新ネオ株式会社 Matériau d'isolation thermique, son procédé de fabrication, et récipient isolant utilisant un matériau d'isolation thermique

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07139690A (ja) * 1993-11-22 1995-05-30 Asahi Chem Ind Co Ltd 真空断熱材
JP2008223958A (ja) * 2007-03-15 2008-09-25 Matsushita Electric Ind Co Ltd 袋体および真空断熱材
JP2009079650A (ja) * 2007-09-26 2009-04-16 Panasonic Corp 真空断熱材
JP2009287586A (ja) * 2008-05-27 2009-12-10 Panasonic Corp 真空断熱材

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07139690A (ja) * 1993-11-22 1995-05-30 Asahi Chem Ind Co Ltd 真空断熱材
JP2008223958A (ja) * 2007-03-15 2008-09-25 Matsushita Electric Ind Co Ltd 袋体および真空断熱材
JP2009079650A (ja) * 2007-09-26 2009-04-16 Panasonic Corp 真空断熱材
JP2009287586A (ja) * 2008-05-27 2009-12-10 Panasonic Corp 真空断熱材

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2980467A4 (fr) * 2013-03-29 2016-11-23 Mitsubishi Electric Corp Matériau d'isolation thermique sous vide
CN104595634A (zh) * 2015-01-26 2015-05-06 黄国平 一种真空绝热板
WO2017029460A1 (fr) * 2015-08-20 2017-02-23 Hutchinson Ensemble et panneau articule, a portions intermediaires de positionnement, pour une isolation thermique
US11174978B2 (en) 2015-08-20 2021-11-16 Hutchinson Assembly and articulated panel with intermediate positioning portions, for thermal insulation
US10493725B2 (en) 2016-02-04 2019-12-03 Mitsubishi Electric Corporation Thermal insulator, vacuum insulation member, and method of manufacturing vacuum insulation member
FR3070471A1 (fr) * 2017-08-22 2019-03-01 Hutchinson Assemblage a isolation renforcee
CN113943910A (zh) * 2021-08-26 2022-01-18 张小静 一种钼板拉伸热处理退火处理模具

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