WO2011078181A1 - Dielectric barrier discharge lamp and ultraviolet irradiation device using the same - Google Patents
Dielectric barrier discharge lamp and ultraviolet irradiation device using the same Download PDFInfo
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- WO2011078181A1 WO2011078181A1 PCT/JP2010/073028 JP2010073028W WO2011078181A1 WO 2011078181 A1 WO2011078181 A1 WO 2011078181A1 JP 2010073028 W JP2010073028 W JP 2010073028W WO 2011078181 A1 WO2011078181 A1 WO 2011078181A1
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- discharge tube
- dielectric barrier
- light shielding
- barrier discharge
- wall plate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/12—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electromagnetic waves
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/35—Vessels; Containers provided with coatings on the walls thereof; Selection of materials for the coatings
Definitions
- the present invention relates to a dielectric barrier discharge lamp for irradiating vacuum ultraviolet rays, and more particularly to a dielectric barrier discharge lamp having a flat discharge tube shape on the irradiation side and a semi-open type ultraviolet irradiation apparatus using the same.
- Patent Documents 1, 2, 3, etc. dielectric barrier discharge lamps having a discharge tube with a flat surface on the irradiation side are known (Patent Documents 1, 2, 3, etc.).
- the feature is that the in-plane uniformity of the irradiation light is good, and it is not necessary to provide an expensive front glass (corresponding to the window portion 102 in Patent Document 2 and FIG. 8) between the discharge tube and the irradiation object. Therefore, an ultraviolet irradiation device can be manufactured at low cost by connecting to a predetermined power supply device, and there is an advantage that vacuum ultraviolet rays can be directly irradiated to an irradiation object (Patent Document 3).
- Such a type that does not have a front glass and can directly irradiate an irradiation object with vacuum ultraviolet rays is called a semi-open type ultraviolet irradiation device. Since this type of dielectric barrier discharge lamp does not have a front glass, various scattered matters are likely to adhere to the discharge tube due to the airflow in the lamp house that houses the discharge tube, and crystallization (solidification) that adheres to the tube wall There is a problem that the discharge tube is damaged by the deposited matter (hereinafter referred to as “solidified deposit” or “white powder”). Deposits adhered to the outer wall of the discharge tube can be periodically wiped away, but cannot be removed after solidifying to some extent after being exposed to ultraviolet rays for a long time.
- the adhering of the flying material flying to the discharge tube is an “organosilicon compound” such as organic HMDS (hexamethylene disilazane).
- organic HMDS hexamethylene disilazane
- the white powder adhering to the discharge tube is generated because the organosilicon compound is decomposed into a siloxane precursor by ultraviolet light from the discharge tube and deposited on the outer peripheral surface of the discharge tube, and the white powder is oxidized and dehydrated by light and heat. It is inferred that the polymerization reaction proceeds and a strong glassy adhesion film is formed. The adhesion of white powder causes the performance of the discharge tube to deteriorate significantly.
- the discharge tube can also be a source of contamination of the workpiece (object to be irradiated).
- Patent Document 1 discloses that a “vacuum ultraviolet protection layer” is formed on the inner surfaces of front and rear end wall plates and left and right side wall plates in a discharge vessel of a dielectric barrier discharge lamp formed in a very long shape on the front and rear sides. It discloses that deterioration of the wallboard can be suppressed (paragraphs 10 to 11).
- This vacuum ultraviolet protective layer is composed of at least absorbing or reflecting vacuum ultraviolet (the 20th paragraph, etc.).
- FIG. 11 is a schematic diagram of a measuring apparatus.
- the measuring device 60 includes a surface plate 62, a discharge tube fixing base 63, a micrometer fixing base 64, and a micrometer 65.
- the measuring device 60 fixes the discharge tube fixing base 63 and the micrometer fixing base 64 to the surface plate 62, the micrometer 65 to the micrometer fixing base 64, and the discharge tube 61 to the discharge tube fixing base 63, respectively.
- the measurement position is not misaligned.
- a micrometer 65 manufactured by MITUTOYO (model name: M810-50) was used.
- the film thickness of the solidified deposit is measured by using the measuring device 60, first measuring the width of the discharge tube 61 before lighting without deposits, and then lighting the discharge tube 61 with an average illuminance of 100 mW / cm 2.
- the width of the discharge tube 61 was measured after a predetermined time (10 hours, 100 hours, 1000 hours), and finally, the difference between the width before lighting of the discharge tube 61 and the width after lighting was obtained.
- FIG. 6 is a graph showing the relationship of the film thickness of the solidified deposit with respect to the ultraviolet light shielding rate.
- the horizontal axis represents the ultraviolet light shielding rate
- the vertical axis represents the film thickness [ ⁇ m] of the solidified deposit when solidified (vitrified) when the light shielding rate is changed from 0 to 100%.
- the irradiation time of 1000 hours is a sufficient time that solidification is considered to be saturated. Comparing the three graphs of irradiation time of 10 hours, 100 hours, and 1000 hours, it can be seen that the film thickness of the solidified deposit is drastically reduced when the ultraviolet light shielding rate is increased to some extent.
- the most effective method for reducing the adhesion and solidification of flying objects flying on the discharge tube is to shield the discharge tube from solidification as much as possible even if it adheres to the discharge tube.
- alumina fine particles or silica / alumina mixed fine particles are known as materials that diffusely reflect ultraviolet light, and examples of use as a reflective film of a dielectric barrier discharge lamp are known. It cannot be shielded enough. Therefore, the light shielding is incomplete, the adhering scattered matter is solidified, and the discharge tube is damaged. In particular, distortion tends to concentrate on the wall surface located on the long side surface in the longitudinal direction (front-rear direction).
- the present invention has been made in view of the above, and in a dielectric barrier discharge lamp for irradiating vacuum ultraviolet light, suppression of adhering to the wall surface located on the long side surface of the flying scattered matter to the discharge tube and solidification Reducing the amount of deposits is a technical issue.
- a dielectric barrier discharge lamp includes a discharge tube that encloses a discharge gas for excimer light emission and irradiates ultraviolet rays downward through a lower wall plate having a flat surface, and an external portion of the discharge tube.
- a dielectric barrier discharge lamp having an electrode on at least one side The wall surface located on the long side surface around the lower wall plate in the discharge tube is constituted by a light shielding member that shields at least 50% of ultraviolet rays. From the result of FIG. 6, it can be seen that the solidified deposit starts to decrease when the ultraviolet light shielding rate exceeds about 50%.
- the dielectric barrier discharge lamp according to the present invention it is possible to suppress the adhering of scattered matter flying on the wall surface of the discharge tube constituted by the light shielding member and to prevent the solidification.
- the wall surface located on the long side surface (or the four side surfaces including the short side surface) around the lower wall plate with a light shielding member adhesion of scattered matter flying on the side surface or the upper surface with respect to the irradiation surface of the discharge tube or its Solidification is suppressed and the life of the discharge tube can be improved.
- the upper wall plate may be made of the same light shielding member. Since a discharge tube that irradiates vacuum ultraviolet rays attaches a lot of scattered matter to the wall surface, a great effect can be expected.
- the “discharge tube that irradiates ultraviolet rays downward through the lower wall plate” defines the shape of the discharge tube, which is a prerequisite for carrying out the present invention.
- This is the shortest and almost flat top and bottom wall plates facing each other up and down, which are almost in the shape of a rectangular box having a shape substantially parallel to each other, or “in an elongated cylinder, a part of the arc of the outer peripheral wall is crushed and flattened.
- Such as an arch-shaped curved surface portion and a flat plate-shaped flat portion that connects both end edges of the arc in the curved surface portion, etc. all have a lower wall plate having a flat portion instead of the front glass. And what is irradiated with ultraviolet rays through the lower wall board corresponds.
- the light blocking ratio of the light blocking member constituting the wall of the discharge tube is preferably as high as possible. If the light blocking ratio is 70% or more, for example, 90% or more, the solidified deposits have a relative film thickness to reduce the solidification of the scattered matter. In some cases, it can be suppressed to 5% or less of 1000 hours of irradiation.
- the output intensity I of the light transmitted through the film having the film thickness t is obtained by using the input intensity I 0 , the absorption coefficient ⁇ , and the film thickness t.
- I I 0 ⁇ e ⁇ t (Formula 1) (However, e is the base of natural logarithm) It is expressed. Since the transmittance is expressed as I / I 0 , the light shielding rate is calculated as (1 ⁇ I / I 0 ).
- shielding means to block light, so it can occur when “shielding” is realized by “reflection”, “absorption”, or “refraction”.
- the vacuum ultraviolet ray can not be blocked by 50% or more (more preferably 70% or more, more preferably 90% or more), the adhesion of scattered matter and its solidification can be prevented. It should be noted that no effect can be obtained.
- the “light shielding member” is a member that blocks light, and may be composed of one kind of material or may be composed of two or more kinds of materials.
- a dielectric barrier discharge lamp includes a discharge tube that encloses a discharge gas for excimer light emission, and irradiates ultraviolet rays downward through a lower wall plate having a flat surface.
- a dielectric barrier discharge lamp having an electrode on at least one of the outside The wall surface located on the long side surface around the lower wall plate in the discharge tube is shielded so that the average illuminance of ultraviolet rays radiated from the wall surface to the outside of the discharge tube is 50 mW / cm 2 or less when the lamp is turned on. It is characterized by comprising a light shielding member. From the results shown in FIG.
- the solidified deposits decreased after the ultraviolet light shielding rate exceeded about 50%, that is, when the average illuminance of ultraviolet rays radiated to the outside of the discharge tube became 50 mW / cm 2 or less. You can see that it is starting. In other words, it can be seen that the decrease starts when the average illuminance of ultraviolet rays radiated to the outside of the discharge tube becomes 50 mW / cm 2 or less. More preferably, it is desirable to turn on the light so that the average illuminance of ultraviolet rays radiated to the outside of the discharge tube is 30 mW / cm 2 or less, and more preferably, the light shielding member shields light so that it becomes 10 mW / cm 2 or less. It is good to be composed of.
- the average illuminance is an average value when the surface illuminance of the discharge tube is measured at five locations.
- the average illuminance of the side wall surface can be calculated based on the average illuminance of the lower wall plate and the light shielding rate of the side wall surface.
- a dielectric barrier discharge lamp lighting method includes a discharge tube in which discharge gas for excimer light emission is enclosed and irradiated with ultraviolet rays downward through a lower wall plate having a flat surface, and the discharge tube
- the solidified deposits decreased after the ultraviolet light shielding rate exceeded about 50%, that is, when the average illuminance of ultraviolet rays radiated to the outside of the discharge tube became 50 mW / cm 2 or less. You can see that it is starting. More preferably, lighting is performed so that the average illuminance of ultraviolet rays radiated to the outside of the discharge tube is 30 mW / cm 2 or less, and more preferably, lighting is performed so as to be 10 mW / cm 2 or less. desirable.
- the illuminance of light irradiating the object to be irradiated may be small, or when irradiating the object to be irradiated after collecting the light irradiated from the lower wall plate, the illuminance of the entire discharge lamp is lowered.
- the average illuminance of ultraviolet rays emitted from the wall surface located on the long side surface around the lower wall plate to the outside of the discharge tube can be set to 50 mW / cm 2 or less.
- the wall surface located on the long side surface around the lower wall plate is made of a light shielding member, so that the discharge from the wall surface located on the long side surface around the lower wall plate can be achieved. You may light so that the average illumination intensity of the ultraviolet-ray radiated
- a member including a transparent member and a light shielding film can be used as the light shielding member.
- the light shielding film only needs to be disposed at a position where the ultraviolet rays irradiated to the outside through the transparent member can be shielded.
- the light shielding film may be formed on the surface of the transparent member.
- a synthetic quartz plate or a fused quartz plate can be used as the transparent member.
- a light shielding film is preferably formed on the wall surface of the discharge tube located on the long side surface around the lower wall plate.
- the plate and the transparent member are not necessarily the same member.
- the physical properties such as the strength of the discharge tube can be easily adjusted on the transparent member side, and the light shielding property against ultraviolet rays can be easily adjusted on the light shielding film side. it can.
- a fired product of slurry (turbid liquid) in which fine particles of oxide having ultraviolet light shielding properties are turbid in a solvent can be used.
- This light shielding film may be formed inside the discharge tube or outside.
- the primary particle diameter of the fine particles is preferably 3 ⁇ m or less.
- alcohols ethanol, isopropyl alcohol, n-butanol, etc.
- xylene toluene and the like
- a surfactant such as a polycarboxylic acid partial alkyl ester, a polyether, or a polyhydric alcohol ester may be added.
- the primary particle diameter of the oxide fine particles is 10 to 100 nm. If the particle diameter of the fine particles is larger than 100 nm, the dispersibility in the slurry is deteriorated, which may result in a non-uniform light shielding film. Furthermore, since the space between the particles is widened, the ultraviolet light shielding rate is lowered. Further, if the particle diameter of the fine particles is smaller than 10 nm, the surface energy of the particles is high, and the particles aggregate and precipitate in the slurry.
- the oxide fine particles are mainly composed of yttrium oxide (Y 2 O 3 ).
- Yttrium oxide has ultraviolet absorptivity and is an insulator. Therefore, when providing a light shielding film inside the discharge tube, it is possible to form a light shielding film that has ultraviolet light shielding properties and does not cause abnormal discharge in the discharge tube during discharge, and provides a light shielding film outside the discharge tube. In this case, it is not necessary to worry about the electrical contact with the electrode provided outside the discharge tube.
- ultrafine particles mainly composed of zinc oxide (ZnO) or titanium oxide (TiO 2 ) coated with silica (SiO 2 ) may be used. These materials are useful for vacuum ultraviolet light having a center wavelength of 172 nm when xenon gas is used as the discharge gas.
- the light shielding film used in the dielectric barrier discharge lamp according to the present invention shields light mainly by ultraviolet absorption. This is because the light shielding film can be made thin.
- the ultraviolet reflectivity is more dependent on the film thickness than the ultraviolet absorptivity. For this reason, in order to increase the light shielding rate to 50% or more with a light-shielding film having ultraviolet reflectivity, it is necessary to make the film thicker than when a light-shielding film having ultraviolet absorptivity is used. In particular, when the light shielding rate is 70% or more and 90% or more, the difference is remarkable.
- the thickness of the light shielding film is preferably 10 ⁇ m or less.
- “mainly shielding light by ultraviolet absorption” means that the light shielding rate by “absorption” is larger than the light shielding rate by “reflection” or “refraction”.
- Examples of the material that shields light mainly by ultraviolet absorptivity include yttrium oxide (Y 2 O 3 ), zinc oxide (ZnO), zirconium oxide (ZrO 2 ), and the like. Also good.
- the lower wall plate may be formed of a synthetic quartz plate, while the four side surfaces (both side walls in the front-rear direction and the left-right direction) around the lower wall plate or the upper wall plate may be formed of a fused quartz plate. Since a fused quartz plate contains more impurities than synthetic quartz, the shielding rate against vacuum ultraviolet rays is usually 70% or more, and since it can be easily welded to synthetic quartz by heating, Suitable as a member.
- the arc tube itself is composed entirely of a synthetic quartz plate, but the four side surfaces around the lower wall plate (both side walls in the front-rear direction and the left-right direction) or the surface of the upper wall plate until the light shielding rate becomes 70% or more, for example.
- the dielectric barrier discharge lamp according to the present invention is an ultraviolet irradiation device by using a power supply device that outputs electric power for generating excimer light emission and a lead wire for supplying electric power from the power supply device. be able to.
- a power supply device that outputs electric power for generating excimer light emission
- a lead wire for supplying electric power from the power supply device.
- the organosilicon compound may be used as an intermediate layer for improving the adhesion between the irradiated object and the resist when the resist is applied to the irradiated object.
- the wall surface located on the long side surface or the four side surfaces around the lower wall plate in the discharge tube is composed of a light shielding member that shields at least 50% of ultraviolet rays. It is possible to suppress the adhering of scattered matter flying on the wall surface of the discharge tube constituted by the members and prevent solidification.
- FIG. 1A is a cross-sectional view of a discharge tube 1a of FIG. 1 cut along a long central axis and viewed from the side
- FIG. 1B is a dielectric barrier discharge.
- Sectional view of the lamp in the longitudinal direction, (c) is a sectional view taken along line BB of (a) (A) and (b) both form an ultraviolet light shielding film on the inner wall surface located on the four side surfaces around the lower wall plate in the discharge tube 1 of the dielectric barrier discharge lamp shown in FIGS.
- FIG. 1 Figure showing (A) And (b) shows the 2nd Embodiment of this invention and its modification, Comprising: Sectional drawing of the elongate direction of a dielectric barrier discharge lamp
- Side sectional view of the ultraviolet irradiation device of the fourth embodiment A barrier discharge lamp according to a fourth embodiment, which is a cross-sectional view in a plane perpendicular to the length direction of the discharge tube of the ultraviolet irradiation device of FIG. 7 (b) of the fourth embodiment shown in (a).
- First modification of barrier discharge lamp Second modification of the barrier discharge lamp of the fourth embodiment shown in FIG.
- FIG. 1 and 2 show a first embodiment of the present invention and are perspective views in which a long central portion of a dielectric barrier discharge lamp is omitted.
- FIG. 2A is a cross-sectional view of the discharge tube 1a of FIG. 1 taken along the long central axis and viewed from the side.
- 2B is a cross-sectional view in the longitudinal direction of the dielectric barrier discharge lamp, that is, a cross-sectional view taken along line AA in FIG. 2A
- FIG. 2C is a cross-sectional view taken along line BB in FIG. It is line sectional drawing.
- a discharge tube 1 of this dielectric barrier discharge lamp is made of a synthetic quartz glass having a substantially square box shape and a synthetic quartz glass having substantially the same shape as the cross section of the square tube 1a.
- the front and rear end wall plates 1b and 1b are respectively welded and closed. Xenon gas is sealed inside.
- the square tube 1a is a rectangular tube having a vertical cross-sectional height of several tens of mm and a horizontal width of several tens of mm.
- the length in the front-rear direction is, for example, 1 m or more. Accordingly, the square tube 1a is composed of flat upper and lower wall plates facing each other vertically and flat left and right side wall plates facing each other in the left and right direction.
- Tip tubes 1c and 1c project in advance from front and rear end wall plates 1b and 1b, respectively, which are welded to the opening portions at both ends of the square tube 1a.
- Each tip tube 1c is a fused silica glass tube member welded so as to protrude further outward from the outer surface of the front and rear end wall plate 1b, and the inside of the tube is formed in advance in the approximate center of the front and rear end wall plate 1b. It is provided so as to communicate with the opening hole.
- metal thin films of electrodes 2 and 3 are formed on the outer surfaces of the upper and lower wall plates of the square tube 1a.
- the electrode 2 is formed so as to cover almost the entire upper surface of the upper wall plate of the square tube 1a except for an uncoated portion for a sensor for inspecting the intensity of vacuum ultraviolet rays emitted from the dielectric barrier discharge lamp. Is done.
- the electrode 3 is formed in a mesh pattern on almost the entire lower surface of the lower wall plate of the square tube 1a.
- Ultraviolet light shielding films 4 a obtained by firing a slurry containing yttrium oxide (Y 2 O 3 ) are provided on four inner wall surfaces located on the four side surfaces around the lower wall plate in the discharge tube 1.
- This film can block 172 nm vacuum ultraviolet light, and the light blocking rate can be adjusted by the film thickness.
- an ultraviolet irradiation device is configured by connecting to a power supply device, and a dielectric barrier discharge lamp is turned on by applying a predetermined power to the electrode via a lead wire, and through this flat lower wall plate, FIG. In the direction of the arrows a) and (b), 172 nm vacuum ultraviolet rays are irradiated vertically downward in FIG. 2C.
- an ultraviolet light shielding film is formed on the inner wall surface located on the four side surfaces around the lower wall plate in the discharge tube 1 of the dielectric barrier discharge lamp shown in FIGS. It shows how to do.
- the square tube 1a is tilted so that the side faces downward as shown in the figure, and a slurry containing yttrium oxide (Y 2 O 3 ) is injected from the tip tube 1c and dried.
- a slurry containing yttrium oxide Y 2 O 3
- firing is performed at 500 ° C. for 30 minutes.
- the gas is discharged from the tip tube 1c, a discharge gas (for example, xenon gas) is injected, and the inside is filled with the discharge gas.
- a discharge gas for example, xenon gas
- Test lamp A Prototype lamp 1 ... Side ultraviolet light shielding film (yttrium oxide) formation
- Light shielding rate 99% (no dilution) Average illuminance from the lower wall plate of 101 mW / cm 2 Average illuminance from side wall surface 1 mW / cm 2
- Prototype lamp 2 ...
- FIG. 10 shows a schematic diagram of the experimental apparatus.
- the arrows indicate the direction of fluid flow.
- the irradiation tool 50 includes one of the above-mentioned six kinds of test lamps 54 disposed in a container 56 between a dummy substrate 53 and a punching metal plate 55.
- Nitrogen gas containing HMDS is configured to flow in air A1 and A2 from the side of the container 56 and exhaust the exhaust gas E after irradiation.
- the bubbling container 51 stores the HMDS 52 therein.
- Nitrogen gas containing HMDS is obtained by flowing nitrogen gas N (N 2 ) into the HMDS 52 with a nozzle, and flows into the irradiation tool 50 through a pipe.
- the content of the HMDS is such that the bubble size of the nitrogen gas passing through the HMDS 52 and the rising distance of the bubble, that is, the nitrogen gas is HMDS 52 while the temperature of the bubbling container 51 is kept constant at 20 ° C. It is adjusted by the distance from the tip of the nozzle flowing into the liquid to the liquid level. Since the HMDS 52 decreases with the inflow of nitrogen gas N, it is appropriately replenished until the experiment is completed. (4) HMDS: Always supply (5) Total nitrogen amount: 50 L / min (6) Lighting time: 1000 hours
- Illuminance measurement The surface illuminance of the lower wall plate of the discharge tube is measured at five locations with an ultraviolet illuminance meter (UIT150 / VUV-S172, manufactured by USHIO), and the average value is defined as the average illuminance.
- the measurement location is a region in which the pair of electrodes face each other (a region corresponding to the discharge space) is equally divided into five in the longitudinal direction, and is near the center. Accordingly, the measurement points are set at approximately equal intervals.
- the average illuminance of the side wall surface is calculated using the average illuminance of the lower wall plate and the light shielding rate (1-I / I 0 ) of the side wall surface.
- the transmittance of the side wall surface is I / I 0 , so the average illuminance E of the lower wall plate and the transmittance I / I of the side wall surface By multiplying by 0 , the average illuminance of the side wall surface is obtained.
- the prototype lamp 2 which shielded 90% of UV rays on the side face had a small amount of white powder adhering, the vitrification film thickness at that time was 15 ⁇ m, and vitrification (solidification) was slightly observed.
- Prototype lamp 3 that shielded 71% of ultraviolet rays on the side also had a small amount of white powder, but the vitrification film thickness at that time was 69 ⁇ m, and a little vitrification was observed.
- the prototype lamp 4 which shielded the ultraviolet rays on the side by 56% had a larger white powder adhesion amount than the prototype lamp 3, and the vitrified film thickness at that time was 159 ⁇ m.
- the prototype lamp 5 which shielded 30% of ultraviolet rays on the side surface had a larger white powder adhesion amount than the prototype lamp 4, and the vitrified film thickness at that time was 306 ⁇ m.
- the conventional lamp which did not shield the ultraviolet rays on the side face had a very large amount of white powder adhered, and the vitrified film thickness at that time was 300 ⁇ m. From these facts, the following became clear. 1.
- the side shading has the effect of reducing the amount of white powder attached. 2.
- Shading of 56% or more of the side surface has an effect of preventing vitrification (solidification). In view of the tendency, it is recognized that the effect is effective at 50% or more. It is remarkable at 71% or more, and more remarkable at 90% or more. This result is in good agreement with the graph of FIG.
- FIGS. 4A and 4B show a second embodiment of the present invention and its modification, and are sectional views in the longitudinal direction of a dielectric barrier discharge lamp.
- the mode in which the light shielding film is provided on the inner wall surface located on the four side surfaces around the lower wall plate has been described.
- the ultraviolet light shielding film 4b is provided on the outer periphery of the discharge tube. Also good.
- light shielding films are also provided on the front and rear end faces.
- a metal oxide sintered body is used as the light shielding film, it is preferable to perform a coating, drying and firing process of the light shielding film before the electrode forming process.
- a heat treatment step is unnecessary, a light shielding film may be formed on the side surface of the discharge tube after the electrodes are formed. It is considered that the degree of freedom in the manufacturing process is increased as compared with the case where a light shielding film is formed inside the discharge tube, and the material selection range of the light shielding film is widened.
- the inner wall surface itself located on the four side surfaces around the lower wall plate may be formed of a light shielding member and bonded to the upper and lower wall plates by welding or glass frit.
- the lower wall plate may be composed of a synthetic quartz plate
- the four side surfaces (both wall surfaces in the front-rear direction and the left-right direction) around the lower wall plate or the upper wall plate may be composed of a fused quartz plate 4c.
- Fused quartz is a natural quartz (natural silica) melted and solidified into a plate shape. Since it contains a large amount of impurities, it has a high light shielding ratio of 70% or more for vacuum ultraviolet rays and is heated. This is because welding with synthetic quartz is easy. The same effect can be obtained by using a ceramic plate instead of natural quartz as the light shielding member. In this case, glass frit can be used as a bonding agent because it cannot be welded to synthetic quartz.
- FIG. 5 shows a third embodiment of the present invention, and is a perspective view in which a long central portion of a dielectric barrier discharge lamp is omitted.
- FIG. 5A is a cross-sectional view of the discharge tube 1a of FIG. 1 taken along the long central axis and viewed from the side.
- 5B is a cross-sectional view of the dielectric barrier discharge lamp in the longitudinal direction, that is, a cross-sectional view taken along line AA in FIG. 5A
- FIG. 5C is a cross-sectional view taken along line BB in FIG. It is line sectional drawing.
- the arc tube itself is composed entirely of a synthetic quartz plate.
- the four side surfaces (both side walls in the front-rear direction and the left-right direction) around the flat lower wall plate or the surface of the upper wall plate are shielded, for example.
- the surface is roughened until the rate reaches 70% or more.
- Roughening is to increase the surface roughness of the mirror-like wall surface.
- a roughening method for example, a method of roughening the surface by chemically eroding by contact with hydrofluoric acid. And a method of roughening the surface by physically losing the specular state by spraying fine particles such as sandblast.
- rough surfaces 4d having an ultraviolet shielding effect are formed on the four side surfaces (both side walls in the front-rear direction and the left-right direction) around the lower wall plate.
- hydrofluoric acid is injected from the tip tube 1c into the discharge tube, and the four side surfaces around the lower wall plate (front-rear direction and left-right direction).
- the two side walls in the direction) or the upper wall plate may be dissolved with hydrofluoric acid to roughen the surface.
- the dielectric barrier discharge lamp having the rectangular tube shape and the long rectangular tube and the ultraviolet irradiation apparatus using the dielectric tube discharge lamp have been described.
- the present invention is not limited to such a shape, and may be a semi-open type ultraviolet irradiation device that irradiates vacuum ultraviolet rays downward through a lower wall plate having no flat glass and having a flat surface. All are applicable.
- another embodiment of the present invention will be described.
- FIG. 7 and 8 are side sectional views of the ultraviolet irradiation device, and FIG. 8 is a sectional view in a plane perpendicular to the length direction of the discharge tube of the ultraviolet irradiation device of FIG.
- the ultraviolet irradiation device 10 shown in FIG. 7 includes a barrier discharge lamp 11 and an AC power supply device 22 connected via lead wires 20 and 21.
- the discharge tube 12 of the barrier discharge lamp 11 has a double tube structure composed of an outer tube portion 13 and an inner tube portion 14, and an outer tube portion 13 and an inner tube portion 14 inserted into the outer tube portion 13. It has.
- the outer tube portion 13 includes an arch-shaped curved surface portion 15 that is flattened by crushing a part of the arc of the outer peripheral wall in an elongated cylinder, and both end edges of the arc in the curved surface portion 15.
- a flat plate-like flat portion 16 (lower wall plate) is provided. Vacuum ultraviolet rays are irradiated through the flat portion 16.
- the corner portion 15A where the curved surface portion 15 and the flat portion 16 are joined is rounded.
- the inner tube portion 14 has a cylindrical shape smaller in diameter than the outer tube portion 13, and the outer tube portion 13 and the inner tube portion 14 that are arranged at the center position in the lateral direction on the inner wall surface of the flat portion 16. Are joined to each other at both ends, and a discharge gas such as xenon gas is enclosed in a discharge space 17 surrounded by both.
- Electrodes 18 and 19 are provided outside the discharge tube 12.
- the upper electrode 18 is made of a metal film fixed to the outer wall surface of the curved surface portion in the outer tube portion 13.
- a material of the upper electrode 18 it is preferable to use a material that reflects ultraviolet rays.
- aluminum can be used as a material of the upper electrode 18.
- the film thickness of the upper electrode 18 is preferably higher in reflectance, and is preferably at least 70% or more, more preferably 90% or more so as not to transmit ultraviolet rays to the outside.
- the lower electrode 19 is made of a nickel wire and is inserted into the inner tube portion 14 over almost the entire length. The lower electrode 19 is provided at a position equidistant from each point on the upper electrode 18.
- One end portions of the lead wires 20 and 21 are connected to the electrodes 18 and 19, and the other end portions of the lead wires 20 and 21 are connected to an AC power supply apparatus.
- slurry containing yttrium oxide (Y 2 O 3 ) is fired on the four inner wall surfaces located on the four side surfaces around the flat portion 16 in the outer tube portion 13.
- An ultraviolet light shielding film 4e is provided. This film can block 172 nm vacuum ultraviolet light, and the light blocking rate can be adjusted by the film thickness.
- the ultraviolet light shielding film 4e is preferably composed of a light shielding member that shields light at least 50% or more, more preferably 70% or more, and still more preferably 90% or more. Further, as illustrated in FIG. 8, it is preferable to provide an ultraviolet light shielding film so as to partially overlap the end portion 18 ⁇ / b> A of the upper electrode 18 that also functions as an ultraviolet reflection film. In this way, ultraviolet rays leaking outside the outer tube portion 13 can be reliably shielded by the ultraviolet reflecting film 4e, and even if scattered matter adheres to the surface of the outer tube portion 13, it is solidified as much as possible. You can prevent it from progressing. This also applies to the following modifications 1 and 2.
- FIG. 8B shows a first modification of the barrier discharge lamp of the fourth embodiment shown in FIG.
- the barrier discharge lamp 30 has a discharge tube 31 having a single tube structure without an inner tube portion, and the upper electrode 34 is formed on an arch-shaped curved portion 32 of the discharge tube 31.
- the lower electrode 35 is provided on the flat portion 33 (lower wall plate).
- Ultraviolet light shielding films 4f obtained by firing a slurry containing yttrium oxide (Y 2 O 3 ) are provided on four inner wall surfaces located on the four side surfaces around the flat portion 33. This film can block 172 nm vacuum ultraviolet light, and the light blocking rate can be adjusted by the film thickness.
- FIG. 9 shows a second modification of the barrier discharge lamp of the fourth embodiment shown in FIG.
- the structure of the discharge tube 41 is a double tube structure comprising an outer tube portion 42 and an inner tube portion 43, and the upper electrode 47 is formed of the discharge tube 41.
- the lower electrode 48 is inserted into the inner tube portion 14 over almost the entire length.
- the lower electrode 48 is provided at a position equidistant from each point on the upper electrode 47.
- One end portions of the lead wires 20 and 21 are connected to the electrodes 47 and 48, and the other end portions of the lead wires 20 and 21 are connected to an AC power supply apparatus.
- an auxiliary electrode 49 is provided over the entire outer surface of the outer tube portion of the flat portion 45 (lower wall plate) of the discharge tube 41.
- the auxiliary electrode 49 assists the main discharge between the pair of electrodes 47 and 48.
- the auxiliary electrode 49 is formed in a mesh shape so as not to block light emitted from the inside of the discharge tube 41 as much as possible, and is provided over the entire length of the discharge tube 41 in the length direction.
- the four inner wall surfaces positioned on the four side surfaces around the flat portion 45 are provided with an ultraviolet light shielding film 4g obtained by firing a slurry containing yttrium oxide (Y 2 O 3 ).
- This film can block 172 nm vacuum ultraviolet light, and the light blocking rate can be adjusted by the film thickness.
- the dielectric barrier discharge lamp according to the present invention is not limited to a strictly rectangular box-shaped discharge tube in a strict sense, as long as it is a semi-open type ultraviolet irradiation device that does not require a front glass. It can also be applied to arcuate discharge tubes. Furthermore, in this case, an auxiliary electrode may be provided in the case of a double tube structure regardless of whether the structure of the discharge tube is a double tube structure or a single tube structure.
- the dielectric barrier discharge lamp according to the present invention is a substantially rectangular box-shaped dielectric barrier discharge lamp that does not require a front glass, not only can the manufacturing cost be reduced, but also on both side walls in the longitudinal direction (front-rear direction). Industrial applicability is great in that the strain can be prevented from being concentrated and the life of the discharge tube can be extended.
Abstract
Description
この放電管における下壁板の周囲の長側面に位置する壁面が、紫外線を少なくとも50%以上遮光する遮光部材で構成されたことを特徴とする。図6の結果より、固化付着物は紫外線遮光率が約50%を超えたあたりから減少を始めていることが分かる。 A dielectric barrier discharge lamp according to the present invention includes a discharge tube that encloses a discharge gas for excimer light emission and irradiates ultraviolet rays downward through a lower wall plate having a flat surface, and an external portion of the discharge tube. In a dielectric barrier discharge lamp having an electrode on at least one side,
The wall surface located on the long side surface around the lower wall plate in the discharge tube is constituted by a light shielding member that shields at least 50% of ultraviolet rays. From the result of FIG. 6, it can be seen that the solidified deposit starts to decrease when the ultraviolet light shielding rate exceeds about 50%.
I=I0・e-αt ・・・・・(式1)
(但し、eは自然対数の底)
と表される。透過率はI/I0と表されるので、遮光率は(1-I/I0)と求められる。 Here, the output intensity I of the light transmitted through the film having the film thickness t is obtained by using the input intensity I 0 , the absorption coefficient α, and the film thickness t.
I = I 0 · e −αt (Formula 1)
(However, e is the base of natural logarithm)
It is expressed. Since the transmittance is expressed as I / I 0 , the light shielding rate is calculated as (1−I / I 0 ).
この放電管における下壁板の周囲の長側面に位置する壁面が、当該ランプの点灯時に、前記壁面から放電管の外部に放射される紫外線の平均照度が50mW/cm2以下となるように遮光する遮光部材で構成されていることを特徴とする。図6の結果より、固化付着物は紫外線遮光率が約50%を超えたあたり、つまり、放電管の外部へと放射される紫外線の平均照度が50mW/cm2以下となったあたりから減少を始めていることが分かる。つまり、放電管の外部へと放射される紫外線の平均照度が50mW/cm2以下となったあたりから減少を始めていることが分かる。より好ましくは、放電管の外部へと放射される紫外線の平均照度が30mW/cm2以下となるように点灯することが望ましく、さらに好ましくは、10mW/cm2以下となるように遮光する遮光部材で構成されているとよい。なお、平均照度とは、放電管の表面照度を5箇所測定した際の平均値である。後述するように、側壁面の平均照度は、下壁板の平均照度と側壁面の遮光率に基づいて算出することができる。 In addition, a dielectric barrier discharge lamp according to the present invention includes a discharge tube that encloses a discharge gas for excimer light emission, and irradiates ultraviolet rays downward through a lower wall plate having a flat surface. In a dielectric barrier discharge lamp having an electrode on at least one of the outside,
The wall surface located on the long side surface around the lower wall plate in the discharge tube is shielded so that the average illuminance of ultraviolet rays radiated from the wall surface to the outside of the discharge tube is 50 mW / cm 2 or less when the lamp is turned on. It is characterized by comprising a light shielding member. From the results shown in FIG. 6, the solidified deposits decreased after the ultraviolet light shielding rate exceeded about 50%, that is, when the average illuminance of ultraviolet rays radiated to the outside of the discharge tube became 50 mW / cm 2 or less. You can see that it is starting. In other words, it can be seen that the decrease starts when the average illuminance of ultraviolet rays radiated to the outside of the discharge tube becomes 50 mW / cm 2 or less. More preferably, it is desirable to turn on the light so that the average illuminance of ultraviolet rays radiated to the outside of the discharge tube is 30 mW / cm 2 or less, and more preferably, the light shielding member shields light so that it becomes 10 mW / cm 2 or less. It is good to be composed of. The average illuminance is an average value when the surface illuminance of the discharge tube is measured at five locations. As will be described later, the average illuminance of the side wall surface can be calculated based on the average illuminance of the lower wall plate and the light shielding rate of the side wall surface.
この放電管における下壁板の周囲の長側面に位置する壁面から放電管の外部へと放射される紫外線の平均照度が50mW/cm2以下であることを特徴とする。図6の結果より、固化付着物は紫外線遮光率が約50%を超えたあたり、つまり、放電管の外部へと放射される紫外線の平均照度が50mW/cm2以下となったあたりから減少を始めていることが分かる。より好ましくは、放電管の外部へと放射される紫外線の平均照度が30mW/cm2以下となるように点灯することが望ましく、さらに好ましくは、10mW/cm2以下となるように点灯することが望ましい。 A dielectric barrier discharge lamp lighting method according to the present invention includes a discharge tube in which discharge gas for excimer light emission is enclosed and irradiated with ultraviolet rays downward through a lower wall plate having a flat surface, and the discharge tube A method of lighting a dielectric barrier discharge lamp comprising an electrode on at least one of the outside of
The average illuminance of ultraviolet rays radiated from the wall surface located on the long side surface around the lower wall plate in the discharge tube to the outside of the discharge tube is 50 mW / cm 2 or less. From the results shown in FIG. 6, the solidified deposits decreased after the ultraviolet light shielding rate exceeded about 50%, that is, when the average illuminance of ultraviolet rays radiated to the outside of the discharge tube became 50 mW / cm 2 or less. You can see that it is starting. More preferably, lighting is performed so that the average illuminance of ultraviolet rays radiated to the outside of the discharge tube is 30 mW / cm 2 or less, and more preferably, lighting is performed so as to be 10 mW / cm 2 or less. desirable.
図1及び図2は、本発明の第1の実施形態を示すものであって、誘電体バリア放電ランプの長尺な中央部を省略した斜視図である。図2(a)は、図1の放電管1aを長尺の中心軸で切断して側面方向から見た断面図である。図2(b)は、誘電体バリア放電ランプの長尺方向の断面図、すなわち図2(a)のA-A線断面図、図2(c)は、図2(a)のB-B線断面図である。 (First embodiment)
1 and 2 show a first embodiment of the present invention and are perspective views in which a long central portion of a dielectric barrier discharge lamp is omitted. FIG. 2A is a cross-sectional view of the
ここで、上述した製造方法に従って酸化イットリウムの膜厚のみが異なる6種類の放電管を試作して、その管壁に付着する固化した固化付着物(白粉)の付着量と固化の程度を調べた。実験条件は以下の通りである。
(1)供試ランプ
A.試作ランプ1・・・側面紫外線遮光膜(酸化イットリウム)形成
遮光率99%(希釈なし)
下壁板からの平均照度101mW/cm2
側壁面からの平均照度1mW/cm2
B.試作ランプ2・・・側面紫外線遮光膜(酸化イットリウム)形成
遮光率90%(4倍希釈)
下壁板からの平均照度98mW/cm2
側壁面からの平均照度10mW/cm2
C.試作ランプ3・・・側面紫外線遮光膜(酸化イットリウム)形成
遮光率71%(6倍希釈)
下壁板からの平均照度101mW/cm2
側壁面からの平均照度29mW/cm2
D.試作ランプ4・・・側面紫外線遮光膜(酸化イットリウム)形成
遮光率56%(10倍希釈)
下壁板からの平均照度107mW/cm2
側壁面からの平均照度47mW/cm2
E.試作ランプ5・・・側面紫外線遮光膜(酸化イットリウム)形成
遮光率30%(20倍希釈)
下壁板からの平均照度104mW/cm2
側壁面からの平均照度73mW/cm2
F.従来品 ・・・遮光率0%
下壁板からの平均照度109mW/cm2
側壁面からの平均照度109mW/cm2
(2)電源:ランプ印加ピーク電圧3.8kV,駆動周波数70kHz(概略矩形波) -Experiment-
Here, six types of discharge tubes differing only in the film thickness of yttrium oxide according to the manufacturing method described above were prototyped, and the amount of solidified deposit (white powder) adhering to the tube wall and the degree of solidification were examined. . The experimental conditions are as follows.
(1) Test lamp
Average illuminance from the lower wall plate of 101 mW / cm 2
Average illuminance from side wall surface 1 mW / cm 2
Average illuminance from the lower wall plate of 98 mW / cm 2
Average illuminance from the side wall surface 10 mW / cm 2
Average illuminance from the lower wall plate of 101 mW / cm 2
Average illuminance from the side wall of 29 mW / cm 2
D. Prototype lamp 4 ... Side ultraviolet light shielding film (yttrium oxide) formation
Average illuminance from lower wall plate 107mW / cm 2
Average illumination from the side wall surface 47 mW / cm 2
E. Prototype lamp 5 ... Side ultraviolet light shielding film (yttrium oxide) formation
Average illuminance from the lower wall plate of 104 mW / cm 2
Average illuminance from the side wall surface 73 mW / cm 2
F. Conventional product ・ ・ ・
Average illuminance from lower wall plate 109mW / cm 2
Average illuminance from the side wall surface of 109 mW / cm 2
(2) Power source: lamp applied peak voltage 3.8 kV, driving frequency 70 kHz (generally rectangular wave)
図10は、実験装置の概略図を示す。なお、矢印は、流体の流れ方向を示す。図10に示すように、照射器具50は、容器56内に、上記6種類のいずれか1つの供試ランプ54を、ダミー基板53とパンチングメタル板55との間に配置し、バブリング容器51からHMDSを含有する窒素ガスを、容器56の横側から空気A1、A2をそれぞれ流入し、照射後の排気ガスEを排出するように構成している。バブリング容器51は、HMDS52を内部に貯留している。HMDSを含有する窒素ガスは、そのHMDS52の内部にノズルで窒素ガスN(N2)を流入させて得、配管を介して照射器具50に流入させる。
このとき、HMDSの含有量は、バブリング容器51の温度を20℃の一定に保った状態で、HMDS52内を通過させる窒素ガスの気泡の大きさと、その気泡の上昇距離、つまり、窒素ガスがHMDS52に流入するノズルの先端から液面までの距離とにより調整する。HMDS52は、窒素ガスNの流入量に伴って減少するため、実験が終了するまで適宜補給する。
(4)HMDS:常時供給
(5)Total窒素量:50L/min
(6)点灯時間:1000時間 (3) Irradiation equipment:
FIG. 10 shows a schematic diagram of the experimental apparatus. The arrows indicate the direction of fluid flow. As shown in FIG. 10, the
At this time, the content of the HMDS is such that the bubble size of the nitrogen gas passing through the
(4) HMDS: Always supply (5) Total nitrogen amount: 50 L / min
(6) Lighting time: 1000 hours
紫外線照度計(UIT150/VUV-S172、ウシオ電機製)にて、放電管の下壁板の表面照度を5箇所測定し、その平均値を平均照度とする。その際、測定箇所は、一対の電極が対向する領域(放電空間に相当する領域)を長尺方向に5等分し、その中央付近とする。従って、測定箇所はおおむね等間隔に設定されている。
また、ここでは、側壁面の平均照度は、下壁板の平均照度と側壁面の遮光率(1-I/I0)とを用いて算出する。側壁面の遮光率が(1-I/I0)で表されるとき、側壁面の透過率がI/I0であるため、下壁板の平均照度Eと側壁面の透過率I/I0とを乗ずることによって、側壁面の平均照度が求まる。 (7) Illuminance measurement:
The surface illuminance of the lower wall plate of the discharge tube is measured at five locations with an ultraviolet illuminance meter (UIT150 / VUV-S172, manufactured by USHIO), and the average value is defined as the average illuminance. At that time, the measurement location is a region in which the pair of electrodes face each other (a region corresponding to the discharge space) is equally divided into five in the longitudinal direction, and is near the center. Accordingly, the measurement points are set at approximately equal intervals.
Here, the average illuminance of the side wall surface is calculated using the average illuminance of the lower wall plate and the light shielding rate (1-I / I 0 ) of the side wall surface. When the light shielding rate of the side wall surface is represented by (1−I / I 0 ), the transmittance of the side wall surface is I / I 0 , so the average illuminance E of the lower wall plate and the transmittance I / I of the side wall surface By multiplying by 0 , the average illuminance of the side wall surface is obtained.
表1は、1000時間後の実験結果を示している。側面の紫外線を90%遮光した試作ランプ2は白粉付着量が少なく、そのときのガラス化膜厚が15μmであり、ガラス化(固化)がわずかに見られた。側面の紫外線を71%遮光した試作ランプ3も白粉付着量が少なかったが、そのときのガラス化膜厚が69μmであり、ガラス化が少し見られた。側面の紫外線を56%遮光した試作ランプ4は白粉付着量が試作ランプ3よりも多めであり、そのときのガラス化膜厚が159μmであった。これらに対し、側面の紫外線を30%遮光した試作ランプ5は、白粉付着量が試作ランプ4よりも多く、そのときのガラス化膜厚が306μmであった。また、側面の紫外線を遮光しなかった従来のランプは、白粉付着量が非常に多く、そのときのガラス化膜厚が300μmであった。これらの事実から、以下のことが明らかとなった。
1.側面の遮光は白粉付着量を低下する効果がある。
2.側面の56%以上の遮光は、ガラス化(固化)防止効果がある。傾向からみて、50%以上で効果があると認められる。71%以上で顕著であり、90%以上でさらに顕著である。この結果は図6のグラフともよく一致するものである。 -result-
Table 1 shows the experimental results after 1000 hours. The
1. The side shading has the effect of reducing the amount of white powder attached.
2. Shading of 56% or more of the side surface has an effect of preventing vitrification (solidification). In view of the tendency, it is recognized that the effect is effective at 50% or more. It is remarkable at 71% or more, and more remarkable at 90% or more. This result is in good agreement with the graph of FIG.
図4(a)及び(b)は、本発明の第2の実施形態及びその変形例を示すものであって、誘電体バリア放電ランプの長尺方向の断面図である。第1の実施形態では下壁板の周囲の四側面に位置する内壁面に遮光膜を設けた態様を説明したが、この図に示すように、放電管の外周に紫外線遮光膜4bを設けてもよい。なお、図示は省略するが前後端面にも遮光膜が設けられている。遮光膜として、金属酸化物の焼結体を用いる場合は、電極形成工程の前に遮光膜の塗布・乾燥・焼成工程を実施することが好ましい。電極パターン形成後に焼成工程を行うと電極を劣化させるなどの不都合が生じるおそれがあるためである。但し、熱処理工程が不要であれば、電極形成後に放電管の側面部に遮光膜を形成してもよい。放電管の内部に遮光膜を形成する場合よりも製造工程の自由度が増し、遮光膜の材料選択の幅も広がると考えられる。 (Second Embodiment)
FIGS. 4A and 4B show a second embodiment of the present invention and its modification, and are sectional views in the longitudinal direction of a dielectric barrier discharge lamp. In the first embodiment, the mode in which the light shielding film is provided on the inner wall surface located on the four side surfaces around the lower wall plate has been described. However, as shown in this figure, the ultraviolet
或いは、図4(b)に示すように、下壁板の周囲の四側面に位置する内壁面自体を遮光部材で構成し、上下壁板と溶着或いはガラスフリットなどにより、接着してもよい。この場合、下壁板を合成石英板で構成する一方、下壁板の周囲の四側面(前後方向及び左右方向の両側壁面)或いは上壁板を溶融石英板4cで構成してもよい。溶融石英は天然石英(天然シリカ)を溶融して板状に固化したものであり、不純物を多く含むため真空紫外線に対して通常遮光率70%以上の高い遮光率を有し、かつ加熱することで合成石英との溶着も容易であるからである。遮光部材として、天然石英に変えて、セラミック板を用いても同等の効果が得られる。この場合、合成石英と溶着することはできないため、接合剤としてガラスフリットを用いることができる。 -Modification-
Alternatively, as shown in FIG. 4 (b), the inner wall surface itself located on the four side surfaces around the lower wall plate may be formed of a light shielding member and bonded to the upper and lower wall plates by welding or glass frit. In this case, the lower wall plate may be composed of a synthetic quartz plate, while the four side surfaces (both wall surfaces in the front-rear direction and the left-right direction) around the lower wall plate or the upper wall plate may be composed of a fused
図5は、本発明の第3の実施形態を示すものであって、誘電体バリア放電ランプの長尺な中央部を省略した斜視図である。図5(a)は、図1の放電管1aを長尺の中心軸で切断して側面方向から見た断面図である。図5(b)は、誘電体バリア放電ランプの長尺方向の断面図、すなわち図5(a)のA-A線断面図、図5(c)は、図2(a)のB-B線断面図である。 (Third embodiment)
FIG. 5 shows a third embodiment of the present invention, and is a perspective view in which a long central portion of a dielectric barrier discharge lamp is omitted. FIG. 5A is a cross-sectional view of the
以上の第1~第3の実施形態では、いずれも放電管の形状がいずれも略方形箱形で長尺な角管を持つ誘電体バリア放電ランプとこれを用いた紫外線照射装置について説明してきたが、本発明は、このような形状に限らず、前面ガラスを備えずかつ平坦な面を有する下壁板を通して真空紫外線を下方に照射することを特徴とする半開放型の紫外線照射装置であれば全て適用可能である。第4の実施形態では本発明の他の実施形態について説明する。 (Fourth embodiment)
In the first to third embodiments described above, the dielectric barrier discharge lamp having the rectangular tube shape and the long rectangular tube and the ultraviolet irradiation apparatus using the dielectric tube discharge lamp have been described. However, the present invention is not limited to such a shape, and may be a semi-open type ultraviolet irradiation device that irradiates vacuum ultraviolet rays downward through a lower wall plate having no flat glass and having a flat surface. All are applicable. In the fourth embodiment, another embodiment of the present invention will be described.
図8(b)は、図8(a)に示す第4の実施形態のバリア放電ランプの第1の変形例を示している。この図に示すように、このバリア放電ランプ30は、放電管31の構造が、内管部の無い単管構造となっており、上部電極34は放電管31のアーチ状の曲面部32上に設けられ、下部電極35が平坦部33(下壁板)に設けられている。この平坦部33の周囲の四側面に位置する四方の内壁面には、酸化イットリウム(Y2O3)を含むスラリーを焼成して得られる紫外線遮光膜4fが設けられている。この膜は、172nmの真空紫外線を遮光することができるものであり、遮光率は膜厚によって調整することができる。 -Modification 1-
FIG. 8B shows a first modification of the barrier discharge lamp of the fourth embodiment shown in FIG. As shown in this figure, the
図9は、図8(a)に示す第4の実施形態のバリア放電ランプの第2の変形例を示している。この図に示すように、このバリア放電ランプ40は、放電管41の構造が、外管部42と内管部43とからなる二重管構造となっており、上部電極47は放電管41のアーチ状の曲面部44上に設けられ、下部電極48は内管部14の内部にほぼ全長にわたって差し込まれている。下部電極48は、上部電極47上の各点から等距離の位置に設けられている。これらの電極47、48にリード線20、21の一端部が接続され、これらのリード線20、21の他端部は交流電源装置に接続されている。また、放電管41の平坦部45(下壁板)における、外管部の外側表面には、ほぼ全面にわたって、補助電極49が設けられている。この補助電極49が、一対の電極47、48間での主放電を補助する。補助電極49は放電管41の内側から放射される光をできるだけ遮らないようにメッシュ状に形成され、放電管41の長さ方向の全長にわたって設けられる。 -Modification 2-
FIG. 9 shows a second modification of the barrier discharge lamp of the fourth embodiment shown in FIG. As shown in this figure, in this
2 上部電極
3 下部電極
4 遮光部材
4a 紫外線遮光膜
4b 紫外線遮光膜
4c 溶融石英板
4d 紫外線遮光作用を有する粗面
4e~4g 紫外線遮光膜
10 紫外線照射装置
11、30、40 バリア放電ランプ
12、31、41 放電管
13、42 外管部
14、43 内管部
15、32 アーチ状の曲面部
16、33、45 平坦部
17 放電空間
18、34、47 上部電極
19、35、48 下部電極
20、21 リード線
22 交流電源装置
49 補助電極
50 照射器具
51 バブリング容器
52 HMDS(ヘキサメチレンジシラザン)
53 ダミー基板(SUS)
54 供試ランプ
55 パンチングメタル板
60 測定装置
61 放電管
62 定盤
63 放電管固定台
64 マイクロメーター固定台
65 マイクロメーター
A1、A2 空気
N 窒素ガス
E 排気ガス DESCRIPTION OF
53 Dummy substrate (SUS)
54
Claims (20)
- 内部にエキシマ発光のための放電用ガスを封入し、平坦な面を有する下壁板を通して紫外線を下方に照射する放電管と、この放電管の外部の少なくとも一方に電極を備えた誘電体バリア放電ランプにおいて、
この放電管における下壁板の周囲の長側面に位置する壁面が、紫外線を少なくとも50%以上遮光する遮光部材で構成されたことを特徴とする誘電体バリア放電ランプ。 Dielectric barrier discharge with discharge gas for excimer light emission inside, a discharge tube that irradiates ultraviolet rays downward through a lower wall plate having a flat surface, and an electrode on at least one outside of the discharge tube In the ramp,
A dielectric barrier discharge lamp characterized in that a wall surface located on a long side surface around a lower wall plate in the discharge tube is composed of a light shielding member that shields at least 50% of ultraviolet rays. - 前記遮光部材は遮光率が70%以上であることを特徴とする請求項1記載の誘電体バリア放電ランプ。 2. The dielectric barrier discharge lamp according to claim 1, wherein the light shielding member has a light shielding ratio of 70% or more.
- 前記遮光部材は遮光率が90%以上であることを特徴とする請求項1記載の誘電体バリア放電ランプ。 2. The dielectric barrier discharge lamp according to claim 1, wherein the light shielding member has a light shielding ratio of 90% or more.
- 内部にエキシマ発光のための放電用ガスを封入し、平坦な面を有する下壁板を通して紫外線を下方に照射する放電管と、この放電管の外部の少なくとも一方に電極を備えた誘電体バリア放電ランプにおいて、
この放電管における下壁板の周囲の長側面に位置する壁面が、当該ランプの点灯時に、前記壁面から放電管の外部に放射される紫外線の平均照度が50mW/cm2以下となるように遮光する遮光部材で構成されたことを特徴とする誘電体バリア放電ランプ。 Dielectric barrier discharge with discharge gas for excimer light emission inside, a discharge tube that irradiates ultraviolet rays downward through a lower wall plate having a flat surface, and an electrode on at least one outside of the discharge tube In the ramp,
The wall surface located on the long side surface around the lower wall plate in the discharge tube is shielded so that the average illuminance of ultraviolet rays radiated from the wall surface to the outside of the discharge tube is 50 mW / cm 2 or less when the lamp is turned on. A dielectric barrier discharge lamp comprising a light shielding member. - この放電管における下壁板の周囲の長側面に位置する壁面が、当該ランプの点灯時に、前記壁面から放電管の外部に放射される紫外線の平均照度が30mW/cm2以下となるように遮光する遮光部材で構成されたことを特徴とする請求項4記載の誘電体バリア放電ランプ。 The wall surface located on the long side surface around the lower wall plate in the discharge tube is shielded so that the average illuminance of ultraviolet rays radiated from the wall surface to the outside of the discharge tube is 30 mW / cm 2 or less when the lamp is turned on. 5. The dielectric barrier discharge lamp according to claim 4, wherein the dielectric barrier discharge lamp comprises a light shielding member.
- この放電管における下壁板の周囲の長側面に位置する壁面が、当該ランプの点灯時に、前記壁面から放電管の外部に放射される紫外線の平均照度が30mW/cm2以下となるように遮光する遮光部材で構成されたことを特徴とする請求項4記載の誘電体バリア放電ランプ。 The wall surface located on the long side surface around the lower wall plate in the discharge tube is shielded so that the average illuminance of ultraviolet rays radiated from the wall surface to the outside of the discharge tube is 30 mW / cm 2 or less when the lamp is turned on. 5. The dielectric barrier discharge lamp according to claim 4, wherein the dielectric barrier discharge lamp comprises a light shielding member.
- 内部にエキシマ発光のための放電用ガスを封入し、平坦な面を有する下壁板を通して紫外線を下方に照射する放電管と、この放電管の外部の少なくとも一方に電極を備えた誘電体バリア放電ランプの点灯方法において、
この放電管における下壁板の周囲の長側面に位置する側面から放電管の外部に放射される紫外線の平均照度が、50mW/cm2以下であることを特徴とする誘電体バリア放電ランプの点灯方法。 Dielectric barrier discharge with discharge gas for excimer light emission inside, a discharge tube that irradiates ultraviolet rays downward through a lower wall plate having a flat surface, and an electrode on at least one outside of the discharge tube In the lighting method of the lamp,
Lighting of a dielectric barrier discharge lamp characterized in that the average illuminance of ultraviolet rays radiated to the outside of the discharge tube from the side surface located on the long side surface around the lower wall plate of the discharge tube is 50 mW / cm 2 or less Method. - 前記放電管における下壁板の周囲の長側面に位置する側面から放電管の外部に放射される紫外線の平均照度が、30mW/cm2以下であることを特徴とする請求項7に記載の誘電体バリア放電ランプの点灯方法。 8. The dielectric according to claim 7, wherein an average illuminance of ultraviolet rays radiated to the outside of the discharge tube from a side surface located on a long side surface around the lower wall plate in the discharge tube is 30 mW / cm 2 or less. How to turn on the body barrier discharge lamp.
- 前記放電管における下壁板の周囲の長側面に位置する側面から放電管の外部に放射される紫外線の平均照度が、10mW/cm2以下であることを特徴とする請求項7に記載の誘電体バリア放電ランプの点灯方法。 8. The dielectric according to claim 7, wherein an average illuminance of ultraviolet rays radiated to the outside of the discharge tube from a side surface located on a long side surface around the lower wall plate in the discharge tube is 10 mW / cm 2 or less. How to turn on the body barrier discharge lamp.
- 前記遮光部材は透明部材と遮光膜とを含む構成であることを特徴とする請求項1又は4に記載の誘電体バリア放電ランプ。 The dielectric barrier discharge lamp according to claim 1 or 4, wherein the light shielding member includes a transparent member and a light shielding film.
- 前記遮光膜は、紫外線遮蔽製を有する酸化物の微粒子を溶剤に混濁させたスラリー(混濁液)の焼成物で構成されることを特徴とする請求項10に記載の誘電体バリア放電ランプ。 11. The dielectric barrier discharge lamp according to claim 10, wherein the light shielding film is composed of a fired product of slurry (turbid liquid) in which fine particles of oxide having ultraviolet shielding properties are made turbid in a solvent.
- 前記酸化物の微粒子の一次粒子径が10~100nmであることを特徴とする請求項11に記載の誘電体バリア放電ランプ。 12. The dielectric barrier discharge lamp according to claim 11, wherein a primary particle diameter of the oxide fine particles is 10 to 100 nm.
- 前記酸化物の微粒子は、酸化イットリウムを主成分とすることを特徴とする請求項11に記載の誘電体バリア放電ランプ。 12. The dielectric barrier discharge lamp according to claim 11, wherein the oxide fine particles are mainly composed of yttrium oxide.
- 前記遮光膜は、主として紫外線吸収性による遮光をすることを特徴とする請求項10に記載の誘電体バリア放電ランプ。 11. The dielectric barrier discharge lamp according to claim 10, wherein the light shielding film shields light mainly by ultraviolet absorption.
- 前記遮光膜は、膜厚が10μm以下であることを特徴とする請求項10に記載の誘電体バリア放電ランプ。 The dielectric barrier discharge lamp according to claim 10, wherein the light-shielding film has a thickness of 10 µm or less.
- 前記下壁板を合成石英板で構成する一方、前記下壁板の周囲の四側面の前後方向及び左右方向の両側壁面或いは上壁板を溶融石英板で構成したことを特徴とする請求項1又は4に記載の誘電体バリア放電ランプ 2. The lower wall plate is composed of a synthetic quartz plate, and both side wall surfaces or upper wall plates in the front-rear direction and the left-right direction of the four side surfaces around the lower wall plate are composed of a fused quartz plate. Or dielectric barrier discharge lamp according to 4
- 前記下壁板の周囲の四側面の前後方向及び左右方向の両側壁面が粗面化された粗面化膜であって、前記粗面化膜は、前記下壁板の周囲の四側面の前後方向及び左右方向の両側壁面が合成石英で構成されると共に、
前記下壁板の周囲の四側面の前後方向及び左右方向の両側壁面がフッ酸により粗面化された粗面化膜であることを特徴とする請求項1又は4に記載の誘電体バリア放電ランプ。 A roughening film having roughened front and rear side walls on the four side surfaces around the lower wall plate, the roughening film being front and rear on the four side surfaces around the lower wall plate. Both side walls in the direction and left and right direction are made of synthetic quartz,
5. The dielectric barrier discharge according to claim 1, wherein the front and rear side surfaces and the left and right side wall surfaces of the four side surfaces around the lower wall plate are roughened films roughened with hydrofluoric acid. lamp. - 前記下壁板の周囲の四側面の前後方向及び左右方向の両側壁面が粗面化された粗面化膜であって、前記粗面化膜は、前記下壁板の周囲の四側面の前後方向及び左右方向の両側壁面にサンドブラストが吹き付けられてなることを特徴とする請求項1又は4に記載の誘電体バリア放電ランプ。 A roughening film having roughened front and rear side walls on the four side surfaces around the lower wall plate, the roughening film being front and rear on the four side surfaces around the lower wall plate. 5. The dielectric barrier discharge lamp according to claim 1, wherein sandblast is sprayed on both side walls in the horizontal direction.
- 請求項1又は4に記載の誘電体バリア放電ランプと、
前記ランプ内でエキシマ発光を生じさせるための電力を出力する電源装置と、前記電源装置からの電力を供給するためのリード線とを備えた紫外線照射装置。 The dielectric barrier discharge lamp according to claim 1 or 4,
An ultraviolet irradiation device comprising: a power supply device that outputs electric power for generating excimer light emission in the lamp; and a lead wire for supplying electric power from the power supply device. - 前記照射装置の被照射対象物の被照射面の一部には、有機ケイ素化合物を含んだ層が形成されていることを特徴とする請求項19に記載の紫外線照射装置。 21. The ultraviolet irradiation apparatus according to claim 19, wherein a layer containing an organosilicon compound is formed on a part of the irradiated surface of the irradiated object of the irradiation apparatus.
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