JP2005222714A - Dielectric barrier discharge lamp and dielectric barrier discharge device - Google Patents

Dielectric barrier discharge lamp and dielectric barrier discharge device Download PDF

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JP2005222714A
JP2005222714A JP2004026513A JP2004026513A JP2005222714A JP 2005222714 A JP2005222714 A JP 2005222714A JP 2004026513 A JP2004026513 A JP 2004026513A JP 2004026513 A JP2004026513 A JP 2004026513A JP 2005222714 A JP2005222714 A JP 2005222714A
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discharge
dielectric barrier
lamp
barrier discharge
partial pressure
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Kazuya Hatase
和也 畑瀬
Shingo Ezaki
江崎　　真伍
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Japan Storage Battery Co Ltd
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Japan Storage Battery Co Ltd
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Priority to JP2004026513A priority Critical patent/JP2005222714A/en
Priority to TW094103185A priority patent/TWI344663B/en
Priority to KR1020057005751A priority patent/KR100717701B1/en
Priority to PCT/JP2005/001878 priority patent/WO2005076315A1/en
Priority to CN2005800001323A priority patent/CN1765002B/en
Publication of JP2005222714A publication Critical patent/JP2005222714A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/12—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J61/16—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principle constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/70—Lamps with low-pressure unconstricted discharge having a cold pressure < 400 Torr
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J7/00—Details not provided for in the preceding groups and common to two or more basic types of discharge tubes or lamps
    • H01J7/02—Selection of substances for gas fillings; Specified operating pressure or temperature
    • H01J7/06—Selection of substances for gas fillings; Specified operating pressure or temperature having helium, argon, neon, krypton, or xenon as the principal constituent

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dielectric barrier discharge lamp with improved radiation intensity without rise of lamp starting peak voltage, as to one using a discharge vessel with Xe sealed in. <P>SOLUTION: The dielectric barrier discharge lamp 10 is provided with a discharge vessel filled with discharge gas equipped with a pair of electrodes 14, 15. The discharge gas contains Xe and Ar, with a ratio of Xe partial pressure P<SB>Xe</SB>/(P<SB>Xe</SB>+P<SB>Ar</SB>) to a total pressure of the Xe and the Ar in the discharge vessel 11 of 0.20 or more and 0.80 or less. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、誘電体バリア放電ランプ及び誘電体バリア放電装置に関する。   The present invention relates to a dielectric barrier discharge lamp and a dielectric barrier discharge device.

誘電体バリア放電ランプとしては、Ｘｅ（キセノン）等を放電容器に充填したものが広く知られている（例えば、特許文献１参照）。
特開平８−８７９８９号公報 As a dielectric barrier discharge lamp, a lamp in which a discharge vessel is filled with Xe (xenon) or the like is widely known (for example, see Patent Document 1).
JP-A-8-87989

ところが、Ｘｅから放射される中心波長１７２ｎｍの真空紫外光を利用するものにおいては、光出力は必ずしも十分でなく、更なる高出力化が望まれていた。
もちろん、放電容器内に充填するＸｅの圧力を増加させれば、三体衝突によるＸｅ２エキシマ分子の生成効率が上昇して光出力は改善されるが、圧力の増加にともない電子エネルギーが低下してＸｅ原子の電離効率が低下するため、放電を開始するための電圧（ランプ始動電圧）を上昇させなければならず、これに伴って、電源装置等の改良が必要となるため、有効な方法ではなかった。 However, in the case of using vacuum ultraviolet light having a central wavelength of 172 nm radiated from Xe, the light output is not always sufficient, and further higher output has been desired.
Of course, increasing the pressure of Xe filled in the discharge vessel increases the generation efficiency of Xe 2 excimer molecules by triple collision and improves the light output, but the electron energy decreases as the pressure increases. Since the ionization efficiency of Xe atoms is reduced, the voltage for starting discharge (lamp starting voltage) must be increased, and in accordance with this, improvement of the power supply device and the like is required. It wasn't.

本発明は上記のような事情に基づいて完成されたものであって、Ｘｅを含むガスを封入した放電容器を用いたものにおいて、ランプ始動電圧の上昇を伴わずに、光出力を増加させた誘電体バリアランプ及び誘電体バリア放電装置を提供することを目的とする。   The present invention has been completed based on the above circumstances, and in the case of using a discharge vessel filled with a gas containing Xe, the light output was increased without increasing the lamp starting voltage. It is an object of the present invention to provide a dielectric barrier lamp and a dielectric barrier discharge device.

本発明者等は、かかる問題点を解決し得る誘電体バリア放電ランプ及び誘電体バリア放電装置を開発すべく鋭意研究を重ねた。その結果、放電容器に充填する放電ガスを、ＸｅとＡｒの混合ガスとし、さらに、放電容器内のＸｅとＡｒの合計圧に対するＸｅ分圧の比ＰＸｅ／（ＰＸｅ＋ＰＡｒ）を０．２０以上０．８０以下とすることにより、ランプ始動電圧の上昇を伴わずに、放射強度を向上させることができることを見出した。 The inventors of the present invention have intensively studied to develop a dielectric barrier discharge lamp and a dielectric barrier discharge device that can solve such problems. As a result, the discharge gas filled in the discharge vessel is a mixed gas of Xe and Ar, and the ratio P Xe / (P Xe + P Ar ) of the Xe partial pressure to the total pressure of Xe and Ar in the discharge vessel is set to 0. It has been found that by setting it to 20 or more and 0.80 or less, the radiation intensity can be improved without increasing the lamp starting voltage.

本発明は、この知見に基づいてなされたものである。すなわち、請求項１の発明は、放電ガスが充填された放電容器に一対の電極が設けられた誘電体バリア放電ランプであって、前記放電ガスは、Ｘｅ及びＡｒを含有するとともに、前記放電容器内のＸｅとＡｒの合計圧に対するＸｅ分圧の比ＰＸｅ／（ＰＸｅ＋ＰＡｒ）が０．２０以上０．８０以下であることを特徴とする誘電体バリア放電ランプである。 The present invention has been made based on this finding. Specifically, the invention of claim 1 is a dielectric barrier discharge lamp in which a discharge vessel filled with a discharge gas is provided with a pair of electrodes, wherein the discharge gas contains Xe and Ar, and the discharge vessel The dielectric barrier discharge lamp is characterized in that the ratio P Xe / (P Xe + P Ar ) of the Xe partial pressure to the total pressure of Xe and Ar is 0.20 or more and 0.80 or less.

請求項２の発明は、放電ガスが充填された放電容器に一対の電極が設けられた誘電体バリア放電ランプと、前記電極間に交流電圧を印加する電源装置とを備えた誘電体バリア放電装置において、前記放電ガスは、Ｘｅ及びＡｒを含有するとともに、前記放電容器内のＸｅとＡｒの合計圧に対するＸｅ分圧の比ＰＸｅ／（ＰＸｅ＋ＰＡｒ）が０．２０以上０．８０以下であることを特徴とする誘電体バリア放電装置である。 According to a second aspect of the present invention, there is provided a dielectric barrier discharge device comprising: a dielectric barrier discharge lamp having a pair of electrodes provided in a discharge vessel filled with a discharge gas; and a power supply device for applying an alternating voltage between the electrodes. The discharge gas contains Xe and Ar, and the ratio P Xe / (P Xe + P Ar ) of the Xe partial pressure to the total pressure of Xe and Ar in the discharge vessel is 0.20 or more and 0.80 or less. This is a dielectric barrier discharge device.

本発明によれば、放電ガスをＸｅとＡｒの混合ガスとするとともに、放電容器内のＸｅとＡｒの合計圧に対するＸｅ分圧の比ＰＸｅ／（ＰＸｅ＋ＰＡｒ）を０．２０以上、かつ０．８０以下とすることにより、ランプ始動電圧の上昇を伴わずに、放射強度を向上させることができる。 According to the present invention, the discharge gas is a mixed gas of Xe and Ar, and the ratio P Xe / (P Xe + P Ar ) of the Xe partial pressure to the total pressure of Xe and Ar in the discharge vessel is 0.20 or more, And by setting it as 0.80 or less, the radiation intensity can be improved without increasing the lamp starting voltage.

以下、実施例を挙げて本発明をさらに詳細に説明する。図１に本実施例に係る誘電体バリア放電ランプ１０（以下、単に「ランプ１０」という）とインバータ装置２０とを備えた誘電体バリア放電装置を示す。ランプ１０は、例えば合成石英製の放電容器１１（例えば、サイズ約３５０ｍｍ×約４０ｍｍ×約１３ｍｍ、肉厚約２ｍｍ）を備え、その内部を放電空間１３にして内部に放電ガスを充填してある。放電容器１１には、一対の電極１４，１５が設けられ（電極１５は、メッシュ状であり、放電により放射される光を透過させることができる）、これらの両電極１４，１５間にはトランス２７を介して、インバータ装置２０が接続されている。なお、インバータ装置２０は、トランス２７の一次巻線２７Ｐに接続され、トランスの二次巻線２７Ｓが前記ランプ１０の両電極１４，１５に接続されている（トランス２７及びインバータ装置２０はエキシマ電源３０とされている）。   Hereinafter, the present invention will be described in more detail with reference to examples. FIG. 1 shows a dielectric barrier discharge device including a dielectric barrier discharge lamp 10 (hereinafter simply referred to as “lamp 10”) and an inverter device 20 according to the present embodiment. The lamp 10 includes a discharge vessel 11 made of, for example, synthetic quartz (for example, a size of about 350 mm × about 40 mm × about 13 mm, a wall thickness of about 2 mm), and the inside thereof is used as a discharge space 13 and filled with a discharge gas. . The discharge vessel 11 is provided with a pair of electrodes 14 and 15 (the electrode 15 has a mesh shape and can transmit light emitted by the discharge), and a transformer is interposed between the electrodes 14 and 15. Inverter device 20 is connected via 27. The inverter device 20 is connected to the primary winding 27P of the transformer 27, and the secondary winding 27S of the transformer is connected to both electrodes 14 and 15 of the lamp 10 (the transformer 27 and the inverter device 20 are excimer power supplies). 30).

さて、上記構成のランプにおいて、放電ギャップ長は約９ｍｍで、ランプ始動時に電極間に印加するピーク電圧（ランプ始動ピーク電圧）Ｖｓｐを１６ｋＶ、始動後（点灯中）に電極間に印加するピーク電圧（ランプピーク電圧）Ｖｐを６ｋＶ、周波数ｆを３０ｋＨｚ一定として、放電容器１１内のＸｅ−Ａｒ混合ガスの全圧（封入圧）を変化させたときに、Ｘｅ２エキシマ分子から放射される中心波長１７２ｎｍのスペクトルの放射強度を図２に示す。
なお、印加電圧波形は立ち上がり立ち下がりともに０．５μｓの矩形波とし、Ｘｅ−Ａｒ混合ガスの分圧比（ＰＸｅ／（ＰＸｅ＋ＰＡｒ））は、０．１０，０．１５，０．２０，０．３５，０．５０，０．７０，０．８０，１．００の８種類とした。また、放射強度は、真空紫外分光器及び光電子増倍管を用いて、Ｎ２雰囲気下で測定した。
この結果から、いずれの分圧比（ＰＸｅ／（ＰＸｅ＋ＰＡｒ）＝０．１０〜１．００）においても混合ガスの全圧（封入圧）を増加させることにより放射強度が増加することが分かった。これは、全圧（封入圧）の増加とともに、Ｘｅ２エキシマ分子の密度が増加するためである。また全圧（封入圧）一定の条件では、分圧比が０．５０〜１．００の範囲でほぼ同じの放射強度が得られることが分かった。 Now, in the lamp having the above structure, the discharge gap length is about 9 mm, applying a peak voltage (lamp start peak voltage) V sp applied between the electrodes during lamp starting 16 kV, between the electrodes after startup (lit) Peak voltage (ramp peak voltage) V p to 6kV, the frequency f as 30kHz constant, the total pressure of Xe-Ar mixture gas within the discharge vessel 11 when changing the (charged pressure), is emitted from the Xe 2 excimer molecules FIG. 2 shows the radiation intensity of the spectrum having the center wavelength of 172 nm.
The applied voltage waveform is a rectangular wave with a rise and fall of 0.5 μs, and the partial pressure ratio (P Xe / (P Xe + P Ar )) of the Xe-Ar mixed gas is 0.10, 0.15, 0.20. , 0.35, 0.50, 0.70, 0.80, and 1.00. The radiation intensity was measured under a N 2 atmosphere using a vacuum ultraviolet spectrometer and a photomultiplier tube.
From this result, it can be seen that the radiation intensity increases by increasing the total pressure (enclosed pressure) of the mixed gas at any partial pressure ratio (P Xe / (P Xe + P Ar ) = 0.10 to 1.00). I understood. This is because the density of Xe 2 excimer molecules increases as the total pressure (encapsulation pressure) increases. It was also found that substantially the same radiation intensity can be obtained when the partial pressure ratio is in the range of 0.50 to 1.00 under the condition that the total pressure (sealing pressure) is constant.

次に各分圧比（ＰＸｅ／（ＰＸｅ＋ＰＡｒ））において、全圧（封入圧）を変化させた場合に、ランプを始動させるために必要な最小のピーク電圧、すなわち、最小ランプ始動ピーク電圧Ｖsp minがどのように変化するのかを検討した。図３に示すように、いずれの分圧比においても全圧（封入圧）を増加させることによりＶsp minが上昇することが分かった。なお、これは、火花放電におけるパシェン法則に類似するものである。また、この図３に示すように、Ａｒの分圧を増加させること、すなわち、分圧比（ＰＸｅ／（ＰＸｅ＋ＰＡｒ））を小さくすることによりＶsp minが低下してゆき、分圧比が０．２０においてＶsp minが最小となり、更に分圧比を小さくすると再び増加することがわかった。 Next, at each partial pressure ratio (P Xe / (P Xe + P Ar )), when the total pressure (enclosed pressure) is changed, the minimum peak voltage required to start the lamp, that is, the minimum lamp start peak It was examined how the voltage V sp min changes. As shown in FIG. 3, it was found that V sp min was increased by increasing the total pressure (enclosed pressure) at any partial pressure ratio. This is similar to Paschen's law in spark discharge. Further, as shown in FIG. 3, V sp min is decreased by increasing the partial pressure of Ar, that is, by reducing the partial pressure ratio (P Xe / (P Xe + P Ar )), and the partial pressure ratio It was found that V sp min became minimum at 0.20 and increased again when the partial pressure ratio was further reduced.

以上の結果をまとめると、放電空間内における混合ガスの全圧（封入圧）を増加させてゆけば放射強度は増加してゆくが（図２参照）、全圧（封入圧）の増加に伴いＶsp minも増加する。また、Ｖsp minは分圧比（ＰＸｅ／（ＰＸｅ＋ＰＡｒ））を小さくすると低下する傾向があり、分圧比が０．２０において極小値をとる。
（図３参照）。 To summarize the above results, if the total pressure (encapsulation pressure) of the mixed gas in the discharge space is increased, the radiation intensity will increase (see Fig. 2), but as the total pressure (encapsulation pressure) increases. V sp min also increases. Further, V sp min tends to decrease when the partial pressure ratio (P Xe / (P Xe + P Ar )) is decreased, and takes a minimum value when the partial pressure ratio is 0.20.
(See FIG. 3).

ところで、ランプの電源装置については、そのコスト、サイズ等の制約から、供給可能な電圧にも制限がある。従って、ランプ始動時において電極間に印加するピーク電圧Ｖspを上昇させることなく、ランプを始動し、かつランプの放射強度を増加させることが望まれている。
そこで、Ｖspを上昇させることなく、放射強度を増加することができるランプを提供するため以下の検討を行った。 By the way, regarding the power supply device of the lamp, there is a limit to the voltage that can be supplied due to restrictions on cost, size, and the like. Therefore, it is desired to start the lamp and increase the radiation intensity of the lamp without increasing the peak voltage Vsp applied between the electrodes at the time of starting the lamp.
Therefore, the following examination was conducted in order to provide a lamp capable of increasing the radiation intensity without increasing V sp .

図４は、図３のグラフから導き出されたものであり、ランプの始動時に電極間に印加するピーク電圧（Ｖsp）を一定にした場合に、放電を開始させることができる最大封入圧を混合ガスの分圧比に対して示したグラフである。
図４のグラフは具体的には図３から次のように導き出すことができる。ここでは、Ｖsp＝８ｋＶの場合を例に説明する。まず、図３に示す破線と、９本のグラフ線（分圧比０．００〜１．００の線）との交点、具体的には分圧比１．００，０．８０，０．７０，０．５０，０．３５，０．２０，０．１５，０．１０，０．００の場合の全圧値を求める（なお、これらの値は、各分圧比においてＶsp＝８ｋＶ時にランプの始動が可能な最大封入圧を示している）。このようにして得られた９つのデータをｘ軸を分圧比、ｙ軸を最大封入圧としてグラフにプロットした。この図４のグラフより、分圧比が０．２付近で最大封入圧が極大値をとることがわかった。 FIG. 4 is derived from the graph of FIG. 3, and the maximum enclosed pressure at which discharge can be started when the peak voltage (V sp ) applied between the electrodes is constant at the start of the lamp is mixed. It is the graph shown with respect to the partial pressure ratio of gas.
Specifically, the graph of FIG. 4 can be derived from FIG. 3 as follows. Here, a case where V sp = 8 kV will be described as an example. First, the intersection of the broken line shown in FIG. 3 and nine graph lines (lines with a voltage division ratio of 0.00 to 1.00), specifically, voltage division ratios of 1.00, 0.80, 0.70, 0. Determine the total pressure values for .50, 0.35, 0.20, 0.15, 0.10, 0.00 (note that these values are for starting the lamp when V sp = 8 kV at each voltage division ratio. Shows the maximum enclosed pressure possible). The nine data thus obtained were plotted on a graph with the x-axis being the partial pressure ratio and the y-axis being the maximum enclosed pressure. From the graph of FIG. 4, it was found that the maximum sealing pressure takes a maximum value when the partial pressure ratio is around 0.2.

次に、このようにして求めた図４のグラフと図２のグラフより、Ｖsp＝８ｋＶ、Ｖｐ＝６ｋＶにおける設計可能な最大放射強度を求めると図５のようになる。 Next, when the maximum radiation intensity that can be designed at V sp = 8 kV and V p = 6 kV is determined from the graph of FIG. 4 and the graph of FIG.

図５によれば、放射強度が、分圧比０．４０付近で極大となることが分かる。また、分圧比を０．２０以上０．８０以下の範囲とすることで、従来のＸｅが１００％封入されたランプに比べて著しく放射強度が増加することが分かる。このように、分圧比を０．２０以上０．８０以下の範囲、好ましくは、０．２７以上０．７以下の範囲とすると、Ｖspの上昇をともなわずに、言い換えればＶspを一定としても、放射強度を向上させることができることが分かった。
従って、放射強度を重視したランプの設計や、電源装置（インバータ、トランス等）の簡略化が可能となる。 According to FIG. 5, it can be seen that the radiation intensity reaches a maximum in the vicinity of the partial pressure ratio of 0.40. It can also be seen that by setting the partial pressure ratio in the range of 0.20 or more and 0.80 or less, the radiation intensity is remarkably increased as compared with the conventional lamp in which 100% of Xe is enclosed. Thus, the scope of 0.20 to 0.80 and a partial pressure ratio, preferably, when the range of 0.27 to 0.7, without the increase of V sp, as constant V sp other words It was also found that the radiation intensity can be improved.
Therefore, it is possible to design a lamp with an emphasis on radiation intensity and simplify a power supply device (inverter, transformer, etc.).

＜他の実施形態＞
本発明は上記記述及び図面によって説明した実施形態に限定されるものではなく、例えば次のような実施形態も本発明の技術的範囲に含まれ、さらに、下記以外にも要旨を逸脱しない範囲内で種々変更して実施することができる。
（１）上記実施形態では、誘電体バリア放電ランプ１０として、特定形状、特定サイズのものを示したが、誘電体バリア放電ランプの形状・サイズ等については特に限定されない。
（２）上記実施形態では、特定の放電ギャップ長ｄ、周波数ｆ、ピーク電圧Ｖｐについて示したが、これらの値は特に限定されるものではない。例えばｄ＝３〜３０ｍｍ、ｆ＝１０〜２４０ｋＨｚ、Ｖｐ＝２〜２４ｋＶの範囲で変化させた場合においても同様の効果が得られることを確認している。
（３）上記実施形態では、特定の電圧波形に関して示したが、電圧波形に関しては特に限定されるものではない。例えば正弦波においてｄ＝３〜３０ｍｍ、ｆ＝１０〜２４０ｋＨｚ、Ｖｐ＝２〜２４ｋＶの範囲で変化させた場合においても矩形波と同じ効果が得られることを確認している。 <Other embodiments>
The present invention is not limited to the embodiments described with reference to the above description and drawings. For example, the following embodiments are also included in the technical scope of the present invention, and further, within the scope not departing from the gist of the invention other than the following. Various modifications can be made.
(1) In the above embodiment, the dielectric barrier discharge lamp 10 has a specific shape and a specific size. However, the shape and size of the dielectric barrier discharge lamp are not particularly limited.
(2) In the above embodiment, the specific discharge gap length d, frequency f, and peak voltage Vp are shown, but these values are not particularly limited. For example, it has been confirmed that the same effect can be obtained even when f = 3 to 30 mm, f = 10 to 240 kHz, and V p = 2 to 24 kV.
(3) Although the specific voltage waveform is shown in the above embodiment, the voltage waveform is not particularly limited. For example, it has been confirmed that the same effect as that of the rectangular wave can be obtained even when the sine wave is changed in the range of d = 3 to 30 mm, f = 10 to 240 kHz, and V p = 2 to 24 kV.

本発明の一実施形態の誘電体バリア放電ランプを備えた誘電体バリア放電装置を示す断面図Sectional drawing which shows the dielectric barrier discharge apparatus provided with the dielectric barrier discharge lamp of one Embodiment of this invention 充填気体の全圧と放射強度（ＵＶ１７２ｎｍ）との関係を示すグラフThe graph which shows the relationship between the total pressure of filling gas, and radiation intensity (UV172nm) 充填気体の全圧と最小ランプ始動ピーク電圧との関係を示すグラフGraph showing the relationship between the total pressure of the filling gas and the minimum lamp starting peak voltage 分圧比と最大封入圧との関係を示すグラフGraph showing the relationship between the partial pressure ratio and the maximum enclosed pressure 分圧比と設計可能な最大放射強度（ＵＶ１７２ｎｍ）との関係を示すグラフGraph showing the relationship between the partial pressure ratio and the maximum radiant intensity (UV 172 nm) that can be designed

符号の説明Explanation of symbols

１０…誘電体バリア放電ランプ
１１…放電容器
１３…放電空間
１４，１５…電極 DESCRIPTION OF SYMBOLS 10 ... Dielectric barrier discharge lamp 11 ... Discharge container 13 ... Discharge space 14, 15 ... Electrode

Claims (2)

放電ガスが充填された放電容器に一対の電極が設けられた誘電体バリア放電ランプであって、
前記放電ガスは、Ｘｅ及びＡｒを含有するとともに、前記放電容器内のＸｅとＡｒの合計圧に対するＸｅ分圧の比ＰＸｅ／（ＰＸｅ＋ＰＡｒ）が０．２０以上０．８０以下であることを特徴とする誘電体バリア放電ランプ。 A dielectric barrier discharge lamp in which a discharge vessel filled with a discharge gas is provided with a pair of electrodes,
The discharge gas contains Xe and Ar, and the ratio P Xe / (P Xe + P Ar ) of the Xe partial pressure to the total pressure of Xe and Ar in the discharge vessel is 0.20 or more and 0.80 or less. A dielectric barrier discharge lamp. 放電ガスが充填された放電容器に一対の電極が設けられた誘電体バリア放電ランプと、前記電極間に交流電圧を印加する電源装置とを備えた誘電体バリア放電装置において、
前記放電ガスは、Ｘｅ及びＡｒを含有するとともに、前記放電容器内のＸｅとＡｒの合計圧に対するＸｅ分圧の比ＰＸｅ／（ＰＸｅ＋ＰＡｒ）が０．２０以上０．８０以下であることを特徴とする誘電体バリア放電装置。 In a dielectric barrier discharge device comprising: a dielectric barrier discharge lamp in which a pair of electrodes is provided in a discharge container filled with a discharge gas; and a power supply device that applies an alternating voltage between the electrodes.
The discharge gas contains Xe and Ar, and the ratio P Xe / (P Xe + P Ar ) of the Xe partial pressure to the total pressure of Xe and Ar in the discharge vessel is 0.20 or more and 0.80 or less. A dielectric barrier discharge device.
JP2004026513A 2004-02-03 2004-02-03 Dielectric barrier discharge lamp and dielectric barrier discharge device Pending JP2005222714A (en)

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TW094103185A TWI344663B (en) 2004-02-03 2005-02-02 Dielectric barrier discharge lamp, dielectric barrier discharge equipment and method of using the same
KR1020057005751A KR100717701B1 (en) 2004-02-03 2005-02-02 Dielectric barrier discharge lamp, dielectric barrier discharge equipment and method of using them
PCT/JP2005/001878 WO2005076315A1 (en) 2004-02-03 2005-02-02 Dielectric barrier discharge lamp, dielectric barrier discharge device, and method for using those
CN2005800001323A CN1765002B (en) 2004-02-03 2005-02-02 Dielectric barrier discharge lamp, dielectric barrier discharge device, and method for using those

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CN1765002A (en) 2006-04-26
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