JP5302637B2 - Discharge lamp - Google Patents
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- JP5302637B2 JP5302637B2 JP2008293252A JP2008293252A JP5302637B2 JP 5302637 B2 JP5302637 B2 JP 5302637B2 JP 2008293252 A JP2008293252 A JP 2008293252A JP 2008293252 A JP2008293252 A JP 2008293252A JP 5302637 B2 JP5302637 B2 JP 5302637B2
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- 238000007789 sealing Methods 0.000 claims description 20
- 229910052743 krypton Inorganic materials 0.000 claims description 12
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims description 12
- 230000002093 peripheral effect Effects 0.000 claims description 8
- 238000003466 welding Methods 0.000 claims description 3
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 claims 8
- 238000010586 diagram Methods 0.000 claims 1
- 239000000460 chlorine Substances 0.000 description 61
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 59
- 229910052801 chlorine Inorganic materials 0.000 description 59
- 238000011156 evaluation Methods 0.000 description 7
- 238000005286 illumination Methods 0.000 description 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N Magnesium oxide Chemical compound [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- JWNBYUSSORDWOT-UHFFFAOYSA-N [Kr]Cl Chemical compound [Kr]Cl JWNBYUSSORDWOT-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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Description
本発明は、エキシマ光を放射する放電ランプに関し、特に、放電容器内に塩素、クリプトンの放電ガスを封入する放電ランプに関する。 The present invention relates to a discharge lamp that emits excimer light, and more particularly to a discharge lamp in which a discharge gas such as chlorine or krypton is sealed in a discharge vessel.
エキシマランプでは、一対の電極が発光管の軸方向に沿って対向配置され、キセノンなどの希ガスとハロゲンガスを混合させた高圧ガスが発光管内に封入される。放電空間外部に設けられた電極間に数ｋＷの高電圧を印加すると、放電容器を介在させた電極間で誘電体バリア放電が生じ、エキシマ光（紫外光）が発光管外部に放射される。 In an excimer lamp, a pair of electrodes are arranged to face each other along the axial direction of the arc tube, and a high-pressure gas in which a rare gas such as xenon and a halogen gas are mixed is sealed in the arc tube. When a high voltage of several kW is applied between the electrodes provided outside the discharge space, dielectric barrier discharge occurs between the electrodes with the discharge vessel interposed therebetween, and excimer light (ultraviolet light) is emitted outside the arc tube.
放電用ガスとして塩素（Ｃｌ）とクリプトン（Ｋｒ）の混合ガスを放電容器内に封入し、クリプトンクロライドエキシマ分子によって波長２２２ｎｍの紫外光を放射するエキシマランプも知られている（特許文献１参照）。そこでは、塩素濃度とガス封入圧力を調整することによって、発光効率の改善が図られている。
塩素とクリプトンの混合ガスを封入する場合、塩素濃度、ガス封入圧力のわずかな違いによって光照度が大きく変化し、最も発光効率の高い塩素濃度、ガス封入圧力に設定する必要がある。しかしながら、塩素濃度、ガス封入圧力の違いによって放電状態も変化し、照度を上げる条件とは必ずしも一致しない。したがって、照度を上げることだけを目的に塩素濃度、ガス圧力を設定しても、今度は放電状態が安定せず、照度一定を維持することが難しい。 When a mixed gas of chlorine and krypton is sealed, the illuminance changes greatly due to a slight difference in chlorine concentration and gas charging pressure, and it is necessary to set the chlorine concentration and gas charging pressure with the highest luminous efficiency. However, the discharge state also changes depending on the difference in chlorine concentration and gas filling pressure, which does not necessarily match the conditions for increasing the illuminance. Therefore, even if the chlorine concentration and the gas pressure are set only for the purpose of increasing the illuminance, the discharge state is not stabilized this time and it is difficult to maintain a constant illuminance.
本発明は、塩素とクリプトンの混合ガスを使用するとき、照度が高く、かつ安定した放電によって照度一定を維持可能な放電ランプであり、少なくとも塩素とクリプトンを含むガスが封入される放電容器と、前記放電容器の表面に軸方向に沿って配置される電極とを備える。 The present invention is a discharge lamp having a high illuminance and capable of maintaining a constant illuminance by stable discharge when using a mixed gas of chlorine and krypton, and a discharge vessel in which a gas containing at least chlorine and krypton is enclosed; An electrode disposed along the axial direction on the surface of the discharge vessel.
例えば、電極の配置される内管の外周面に外管を溶着させるよって一体化させた単管状放電容器であり、少なくとも一方の電極が前記放電容器の管壁内に埋め込まれている。 For example, it is a single tubular discharge vessel integrated by welding an outer tube to the outer peripheral surface of the inner tube in which the electrode is disposed, and at least one electrode is embedded in the tube wall of the discharge vessel.
本発明では、塩素の濃度をＭ（％）、前記ガスの封入圧力をＰ（ｋＰａ）とするとき、Ｍ−Ｐ座標系において、塩素濃度、ガスの封入圧力（Ｍ、Ｐ）は、（０．５，７）、（０．５，１３）、（１，２０）、（２，３３）、（２，７）を頂点とする領域内の値に定められることを特徴とする。ただし、ここでの「領域内」には、これら頂点および頂点を結ぶ線上も含まれるものとする。 In the present invention, when the chlorine concentration is M (%) and the gas filling pressure is P (kPa), the chlorine concentration and the gas filling pressure (M, P) are (0) in the MP coordinate system. .5,7), (0.5,13), (1,20), (2,33), and (2,7) are defined as values in the region. However, it is assumed that “in the region” here includes the vertices and the line connecting the vertices.
あるいは、別の表現をすれば、塩素濃度Ｍ、ガス圧力Ｐは、以下の式をみたすことを特徴とする。
７≦Ｐ≦１３Ｍ＋７ （１．０≦Ｍ≦２．０）
７≦Ｐ≦１４Ｍ＋６ （０．５≦Ｍ≦１．０） ・・・・（１）
Alternatively, in other words, the chlorine concentration M and the gas pressure P satisfy the following equations.
7 ≦ P ≦ 13M + 7 (1.0 ≦ M ≦ 2.0)
7 ≦ P ≦ 14M + 6 (0.5 ≦ M ≦ 1.0) (1)
本発明では、塩素、クリプトンのガス封入時に得られる波長２２２ｎｍのエキシマ光の照度が高く、かつ照度一定が維持される塩素濃度と封入圧力の範囲を見出した。すなわち、従来のように発光効率を向上させた塩素濃度、封入圧力ではなく、照度および放電状態の両方が優れた塩素濃度、ガス封入圧力の範囲を見出している。 In the present invention, the inventors have found a range of chlorine concentration and sealing pressure at which the illuminance of excimer light having a wavelength of 222 nm obtained at the time of gas sealing of chlorine and krypton is high and the illuminance is kept constant. That is, the present inventors have found a range of chlorine concentration and gas filling pressure that are excellent in both illuminance and discharge state, instead of chlorine concentration and filling pressure with improved luminous efficiency as in the prior art.
エキシマ光を放射するランプでは、グロー放電が軸方向に沿って電極全体に渡って生じ、安定した放電状態が維持されることによって、照度一定が保たれる。このような安定した放電状態を実現するための塩素濃度、ガス封入圧力を一概に定めることはできず、塩素濃度、あるいはガス封入圧力を単に増加、減少することでは明らかにできず、その塩素濃度、ガス封入圧力の適切な値は考慮されたことがなかった。 In a lamp that emits excimer light, glow discharge is generated over the entire electrode along the axial direction, and a stable discharge state is maintained, so that the illuminance is kept constant. The chlorine concentration and gas filling pressure for realizing such a stable discharge state cannot be determined in general, and it cannot be clarified by simply increasing or decreasing the chlorine concentration or gas filling pressure. Appropriate values for gas charging pressure have never been considered.
一方、波長２２２ｎｍのエキシマ光の照度は、塩素濃度、封入圧力によって変化し、塩素濃度を所定の範囲で照度が高くなり、一方でガス封入圧力を上げると照度が高くなる傾向も見られる。しかしながら、照度の高い塩素濃度、ガス封入圧力に近づけば放電状態が安定するわけではなく、放電安定もしくは照度アップの一方を達成できるように塩素濃度、封入圧力を探っても、その両方を獲得することはできない。 On the other hand, the illuminance of excimer light having a wavelength of 222 nm varies depending on the chlorine concentration and the filling pressure, and the illuminance increases when the chlorine concentration is within a predetermined range, while the illuminance tends to increase when the gas filling pressure is increased. However, the discharge state does not become stable if the illuminance is high and the gas charging pressure is approached, and even if the chlorine concentration and the charging pressure are searched so that either stable discharge or high illuminance can be achieved, both are obtained. It is not possible.
本発明では、放電状態、照度の組み合わせと塩素濃度、封入圧力の組み合わせの関係性を初めて導き出し、両者を満たす塩素濃度と封入圧力の範囲を明らかにした。これにより、従来にはない高出力、かつ照度一定の放電ランプを実現することができる。 In the present invention, the relationship between the discharge state, the combination of illuminance and the combination of the chlorine concentration and the filling pressure was first derived, and the range of the chlorine concentration and the filling pressure satisfying both was clarified. Thereby, it is possible to realize a discharge lamp having a high output and a constant illuminance which is not present.
特に、塩素濃度Ｍ（％）が０．５〜１．０の範囲にあり、ガスの封入圧力Ｐ（ｋＰａ）が１３〜２０の範囲にある場合、照度が高く、放電状態が安定したランプを実現することができる。例えば、塩素濃度０．５％、封入圧力１３ｋＰａに設定するのがよい。 In particular, when the chlorine concentration M (%) is in the range of 0.5 to 1.0 and the gas sealing pressure P (kPa) is in the range of 13 to 20, a lamp with high illuminance and stable discharge state is used. Can be realized. For example, it is preferable to set the chlorine concentration to 0.5% and the sealing pressure to 13 kPa.
本発明によれば、クリプトンと塩素を含む放電用ガスを封入する放電ランプにおいて、照度が高く、かつ照度の安定した放電ランプを実現することができる。 ADVANTAGE OF THE INVENTION According to this invention, in the discharge lamp which encloses the discharge gas containing krypton and chlorine, it is possible to realize a discharge lamp having high illuminance and stable illuminance.
以下では、図面を参照して本発明の実施形態について説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
図１は、本実施形態である放電ランプの径方向の概略的断面図である。図２は、放電ランプの軸方向の概略的断面図である。 FIG. 1 is a schematic sectional view in the radial direction of a discharge lamp according to the present embodiment. FIG. 2 is a schematic sectional view in the axial direction of the discharge lamp.
放電ランプ１０は、石英製の単管状放電容器１２を備え、放電容器１２は内管１４と内管１４を覆う外管１６によって構成されている（図２参照）。内管１４の外周面１４Ｓには、電極１８Ａ、１８Ｂがランプ軸方向に沿って対向配置されている。
The
電極１８Ａ、１８Ｂはモリブデンなどによる帯状金属箔であり、封止工程によって弧状になっている。外管１６は内管１４に溶着しており、外管１４と内管１６が一体となって放電容器１２として構成されている。これにより、電極１８Ａ、１８Ｂは放電容器１２の管壁内に埋設され、放電空間１５内部に電極１８Ａ、１８Ｂが配置されない。
The
電極１８Ａ、１８Ｂの端部には、外部に延びる給電線１９Ａ、１９Ｂが、互いに軸方向反対側に接続されている。給電線１９Ａ、１９Ｂは、エキシマランプ１０の外部に設置された交流高電圧電源（図示せず）に接続されており、給電線１９Ａ、１９Ｂを介してエキシマランプ１０に電力が供給される。
内管１４内部に形成される放電空間１５には、放電ガスが封入されている。放電ガスは、クリプトン（Ｋｒ）、塩素（Ｃｌ）を含む高圧ガスであり、放電中にエキシマ分子を生じさせ、波長２２２ｎｍのエキシマ光を放射させる。後述するように、塩素の濃度（％）、ガス圧力（ｋＰａ）は所定の範囲内に定められている。電極１８Ａ、１８Ｂに電圧を印加すると、放電空間１５内ではグロー状放電が電極１８、１８Ｂ間全体に渡って発生する。放電によって生じた光は放電容器１２を透過し、外部に放射される。
A discharge gas is sealed in the
次に、図３〜図６を用いて、塩素濃度、放電ガスの封入圧力の範囲について説明する。ここでは、塩素濃度、封入圧力の組み合わせがそれぞれ異なる上記単管状放電ランプを複数個制作し、各放電ランプについて波長２２２ｎｍの光の照度、および放電状態を測定している。 Next, the range of the chlorine concentration and the discharge pressure of the discharge gas will be described with reference to FIGS. Here, a plurality of the single tubular discharge lamps having different combinations of chlorine concentration and sealing pressure are produced, and the illuminance of light having a wavelength of 222 nm and the discharge state are measured for each discharge lamp.
電源に関しては、交流２００Ｖを整流し、スイッチングによって矩形波形に変換し、１：１８のトランスで昇圧した電圧をランプに印加している。また、点灯周波数（ｋＨｚ）は１００以下に設定されている。 As for the power source, AC 200V is rectified, converted into a rectangular waveform by switching, and a voltage boosted by a 1:18 transformer is applied to the lamp. The lighting frequency (kHz) is set to 100 or less.
図３は、塩素濃度と封入圧力の組み合わせをプロットした図である。図４は、照度および放電状態の評価を表で示した図である。図５は、ガス封入圧力と波長２２２ｎｍの光の照度（ｍＷ／ｃｍ２）との関係を示したグラフである。そして、図６は、塩素濃度と波長２２２ｎｍの光の照度との関係を示したグラフである。 FIG. 3 is a plot of combinations of chlorine concentration and sealing pressure. FIG. 4 is a table showing the evaluation of illuminance and discharge state. FIG. 5 is a graph showing the relationship between the gas filling pressure and the illuminance (mW / cm 2 ) of light having a wavelength of 222 nm. FIG. 6 is a graph showing the relationship between the chlorine concentration and the illuminance of light having a wavelength of 222 nm.
図５では、塩素濃度（％）を所定濃度にしたとき、封入圧力の違いによる照度（ｍＷ／ｃｍ２）の変化を表している。図５における「＊印」は塩素濃度５．０％、「菱形印」は塩素濃度２．０％、「四角印」は塩素濃度１．０％、「三角印」は塩素濃度０．５％、そして「丸印」は塩素濃度０．２％を示す。 FIG. 5 shows a change in illuminance (mW / cm 2 ) due to a difference in sealing pressure when the chlorine concentration (%) is set to a predetermined concentration. In FIG. 5, “*” indicates a chlorine concentration of 5.0%, “rhombus” indicates a chlorine concentration of 2.0%, “square” indicates a chlorine concentration of 1.0%, and “triangle” indicates a chlorine concentration of 0.5%. "Circle" indicates a chlorine concentration of 0.2%.
一方、図６では、封入圧力（ｋＰａ）を所定値に定めたとき、塩素濃度の違いによる照度（ｍＷ／ｃｍ２）の変化を表している。図６における「＊印」は封入圧力３３ｋＰａ、「菱形印」は封入圧力２７ｋＰａ、「四角印」は封入圧力２０ｋＰａ、「三角印」は封入圧力１３ｋＰａ、そして「丸印」は封入圧力７ｋＰａを示す。 On the other hand, FIG. 6 shows a change in illuminance (mW / cm 2 ) due to a difference in chlorine concentration when the sealing pressure (kPa) is set to a predetermined value. In FIG. 6, “*” indicates an enclosure pressure of 33 kPa, “diamond” indicates an enclosure pressure of 27 kPa, “square” indicates an enclosure pressure of 20 kPa, “triangle” indicates an enclosure pressure of 13 kPa, and “circle” indicates an enclosure pressure of 7 kPa. .
図５に示すように、塩素濃度が１．０％以内の場合、封入圧力（ｋＰａ）が高くなるほど概して照度は増加する。一方、塩素濃度が１．０％以内では比較的照度が大きいことが明らかである。したがって、塩素濃度１．０％以内で封入圧力を高めることによって波長２２２ｎｍの光の照度をできるだけ大きくすることが可能である。 As shown in FIG. 5, when the chlorine concentration is within 1.0%, the illuminance generally increases as the enclosed pressure (kPa) increases. On the other hand, it is clear that the illuminance is relatively large when the chlorine concentration is within 1.0%. Therefore, it is possible to increase the illuminance of light having a wavelength of 222 nm as much as possible by increasing the sealing pressure within a chlorine concentration of 1.0%.
しかしながら、封入圧力を高めるほど放電状態が安定せず、特に塩素濃度が小さいとそのことが顕著になることが図４に示されている。図４では、「塩素濃度、封入圧力」の組み合わせに対する「照度、放電状態」の性能を段階的に評価している。 However, it is shown in FIG. 4 that the discharge state is not stabilized as the sealing pressure is increased, and that this becomes remarkable particularly when the chlorine concentration is small. In FIG. 4, the performance of “illuminance, discharge state” with respect to the combination of “chlorine concentration, sealing pressure” is evaluated step by step.
ここでは、照度の評価を左側、放電状態の評価を右側に示している。照度の評価については、５ｍＷ／ｃｍ２未満を「×印」、５ｍＷ／ｃｍ２以上〜１０ｍＷ／ｃｍ２未満を「三角印」、１０ｍＷ／ｃｍ２以上〜１５ｍＷ／ｃｍ２未満を「○印」、１５ｍＷ／ｃｍ２以上を「二重丸印」で表す。 Here, the evaluation of illuminance is shown on the left side, and the evaluation of the discharge state is shown on the right side. For evaluation of illuminance, 5mW / cm 2 less than the "×" mark, less than 5mW / cm 2 or more ~10mW / cm 2 "triangle", 10mW / cm 2 or more ~15mW / cm 2 less than the "○ mark" 15 mW / cm 2 or more is represented by “double circle”.
一方、放電状態の評価は、フィラメント状放電を「×印」、弱い筋状放電を「三角印」、グロー状の放電を「丸印」で表す。雷のように強い筋が生じるフィラメント状放電の場合、電極の一部でしか放電が発生しておらず、電極全体に渡って均一な放電が生じていない。すなわち、放電が安定しない。一方、グロー放電状態の場合、電極全体で放電が生じている。弱い筋状放電はその中間状態であり、照度一定の条件として最低限満足される放電状態とみなせる。 On the other hand, the evaluation of the discharge state is represented by “×” for filamentous discharge, “triangle” for weak streak discharge, and “round” for glow discharge. In the case of filamentary discharge in which strong streaks such as thunder are generated, discharge is generated only in a part of the electrode, and uniform discharge is not generated over the entire electrode. That is, the discharge is not stable. On the other hand, in the glow discharge state, discharge occurs in the entire electrode. The weak streak discharge is an intermediate state, and can be regarded as a discharge state that is at least satisfied as a condition of constant illuminance.
図４に示すように、照度、放電状態がある程度良好な塩素濃度、封入圧力の組み合わせが存在する一方で、照度が高くて放電状態が悪く、あるいは放電状態が良好で照度が低い塩素濃度、封入圧力の組み合わせ、さらには照度、放電状態ともに悪い組み合わせが存在する。 As shown in FIG. 4, while there is a combination of illuminance and discharge state with a certain level of good chlorine concentration and sealing pressure, the illuminance is high and the discharge state is poor, or the discharge state is good and the illuminance is low and the irradiance is low. There is a combination of pressures, and also a combination of bad illuminance and discharge state.
そこで、実験した濃度、封入圧力をプロットした図３と、図４の照度、放電状態の評価を見比べてみると、照度、放電状態の両方がある程度良好な範囲が見出される。ここでは、照度が「三角印」、「丸印」、もしくは「二重丸印」（すなわち５ｍＷ／ｃｍ２以上）であり、かつ放電状態が「三角印」もしくは「丸字」（すなわち弱い筋状放電かグロー放電状態）である塩素濃度、封入圧力の組み合わせを、照度、放電状態両方の条件を満たすものと判断している。 Therefore, comparing FIG. 3 plotting the experimental concentration and sealing pressure with the evaluation of the illuminance and the discharge state in FIG. 4, a range in which both the illuminance and the discharge state are good to some extent is found. Here, the illuminance is “triangle mark”, “circle mark”, or “double circle mark” (that is, 5 mW / cm 2 or more), and the discharge state is “triangle mark” or “round character” (that is, weak stripes). It is determined that the combination of the chlorine concentration and the enclosed pressure, which is a state discharge or a glow discharge state, satisfies the conditions of both the illuminance and the discharge state.
図４に示すように、塩素濃度が２．０％を超えると照度、放電状態の両方を満たすことができず、一方、図３に示す直線Ｌ１、Ｌ３を超える塩素濃度、封入圧力でも照度、放電状態の両方を満足することができない。したがって、塩素濃度をＭ（％）、封入圧力をＰ（ｋＰａ）としたとき、（Ｍ、Ｐ）＝（０．５，７）、（０．５，１３）、（１，２０）、（２，３３）、（２，７）を頂点する領域ＡＲ内に定められた塩素濃度Ｍ、封入圧力Ｐであれは、照度、放電状態の両方を満足することができる。 As shown in FIG. 4, when the chlorine concentration exceeds 2.0%, it is impossible to satisfy both the illuminance and the discharge state. On the other hand, the chlorine concentration exceeding the straight lines L1 and L3 shown in FIG. Both discharge states cannot be satisfied. Therefore, when the chlorine concentration is M (%) and the sealing pressure is P (kPa), (M, P) = (0.5,7), (0.5,13), (1,20), ( 2, 33), the chlorine concentration M and the sealing pressure P determined in the area AR that apex (2, 7) can satisfy both the illuminance and the discharge state.
あるいは塩素濃度Ｍと封入圧力Ｐの条件を別の形で規定すると、封入圧力Ｐは以下の式を満たせばよい。
７≦Ｐ≦１３Ｍ＋７ （１．０≦Ｍ≦２．０）
７≦Ｐ≦１４Ｍ＋６ （０．５≦Ｍ≦１．０） ・・・・（２）
ただし、（２）式の右辺は直線Ｌ１、Ｌ３を表す。塩素濃度０．５〜２．０％の範囲において、図３に示す直線Ｌ１、Ｌ３以下、Ｌ２以上の範囲であればよい。
Alternatively, if the conditions of the chlorine concentration M and the sealing pressure P are defined in different forms, the sealing pressure P may satisfy the following expression.
7 ≦ P ≦ 13M + 7 (1.0 ≦ M ≦ 2.0)
7 ≦ P ≦ 14M + 6 (0.5 ≦ M ≦ 1.0) (2)
However, the right side of equation (2) represents straight lines L1 and L3. In the range of the chlorine concentration of 0.5 to 2.0%, it may be in the range of the straight lines L1, L3 or less and L2 or more shown in FIG.
特に、領域ＡＲ内でも塩素濃度Ｍが０．５〜１．０の範囲にあり圧力が１３〜２０ｋＰａのとき、照度が大きく、かつ放電状態も安定している。 Particularly in the area AR, when the chlorine concentration M is in the range of 0.5 to 1.0 and the pressure is 13 to 20 kPa, the illuminance is large and the discharge state is stable.
このように、塩素とクリプトンを放電ガスとして封入し、エキシマ光を放射する放電ランプにおいて、塩素濃度と放電ガスの封入圧力を（０．５，７）、（０．５，１３）、（１，２０）、（２，３３）、（２，７）を頂点とする領域ＡＲ内の範囲で設定することにより、波長２２２ｎｍの光の照度が高く、かつ照度一定となる。 Thus, in a discharge lamp in which chlorine and krypton are sealed as a discharge gas and excimer light is emitted, the chlorine concentration and the pressure of the discharge gas are set to (0.5, 7), (0.5, 13), (1 , 20), (2, 33), and (2, 7) are set in a range within the area AR having the vertex, the illuminance of light having a wavelength of 222 nm is high and the illuminance is constant.
電極の配置に関しては、軸に対して対称的に対向配置させるだけでなく、中心線に対して線対称になるように配置してもよい（例えば断面ハの字形状）。また、内管の両側面をあらかじめ平らに削り、平板状の電極を配置するようにしてもよい。あるいは、一方の電極を放電容器の管壁内に埋設する一方、他方の帯状電極（あるいは網状電極）を外管の外周面に設けるように構成してもよい。 Regarding the arrangement of the electrodes, the electrodes may be arranged so as to be symmetrical with respect to the center line as well as symmetrically opposed to the axis (for example, a cross-sectional shape of a letter C). Further, both side surfaces of the inner tube may be cut in advance and flat electrodes may be disposed. Alternatively, one electrode may be embedded in the tube wall of the discharge vessel, while the other strip electrode (or mesh electrode) may be provided on the outer peripheral surface of the outer tube.
また、放電容器１２の両端部分に、外管で内管を覆う真空状態の内部空間を形成し、絶縁破壊をより確実に抑えるように構成してもよい。さらに、軸方向に光を放出するように、放電容器１２の端部に射出窓を設けてもよい。放電容器の構造としては、二重管式のエキシマランプを適用し、また、高電圧を印加させるようにしてもよい。
Further, a vacuum internal space that covers the inner tube with the outer tube may be formed at both end portions of the
放電容器のガラスの脆化保護、ガラスと封入ガスの反応を防止するため、放電容器の内面にアルミナ膜、チタニア膜、マグネシア膜などの保護膜を形成してもよい。封入ガスにハロゲンを含める場合、フッ化マグネシウム膜を形成するのがよい。また、塩素とクリプトン以外のガスを封入してもよい。 A protective film such as an alumina film, a titania film, or a magnesia film may be formed on the inner surface of the discharge vessel in order to protect the glass of the discharge vessel from embrittlement and to prevent reaction between the glass and the enclosed gas. When halogen is included in the sealing gas, a magnesium fluoride film is preferably formed. Further, a gas other than chlorine and krypton may be enclosed.
放電容器、外管の材質、形状は任意に構成することができ、楕円形状、四角形状など円筒形状以外の形状に構成してもよく、また、所定のエキシマ光を外部へ透過させるような材質で構成すればよい。また、複数のランプを用いて広範囲に照射するように構成してもよい。 The material and shape of the discharge vessel and the outer tube can be arbitrarily configured, and may be configured in a shape other than a cylindrical shape such as an elliptical shape or a quadrangular shape, or a material that transmits predetermined excimer light to the outside. What is necessary is just to comprise. Moreover, you may comprise so that it may irradiate in a wide range using a some lamp | ramp.
１０ エキシマランプ
１２ 放電容器
１４ 内管
１４Ｓ 内管の外周面
１５ 放電空間
１６ 外管
１８Ａ、１８Ｂ 電極
DESCRIPTION OF
Claims (5)
前記放電容器の軸方向に沿って配置される電極とを備え、
前記放電容器が、筒状内管の外周面に筒状外管を溶着させることによって一体化させた単管状放電容器であり、
少なくとも一方の電極が、前記内管の外周面に配置されて前記放電容器の管壁内に埋め込まれていて、
前記混合ガスにおける前記塩素ガスの容量濃度をＭ（％）、前記混合ガスの封入圧力をＰ（ｋＰａ）とするとき、
前記塩素ガスの容量濃度、前記混合ガスの封入圧力（Ｍ、Ｐ）は、（０．５，７）、（０．５，１３）、（１，２０）、（２，３３）、（２，７）を頂点とする領域内の値に定められることを特徴とする放電ランプ。 A discharge vessel in which a mixed gas containing at least chlorine gas and krypton gas is enclosed;
An electrode disposed along the axial direction of the discharge vessel,
The discharge vessel is a single tubular discharge vessel integrated by welding a cylindrical outer tube to the outer peripheral surface of the cylindrical inner tube;
At least one electrode is disposed on the outer peripheral surface of the inner tube and embedded in the tube wall of the discharge vessel;
When the volume concentration of the chlorine gas in the mixed gas is M (%) and the sealed pressure of the mixed gas is P (kPa),
The volume concentration of the chlorine gas and the sealed pressure (M, P) of the mixed gas are (0.5, 7), (0.5, 13), (1, 20), (2, 33), (2 , 7) is determined to be a value in a region having a vertex.
前記放電容器の軸方向に沿って配置される電極対を備え、
前記放電容器が、筒状内管の外周面に筒状外管を溶着させることによって一体化させた単管状放電容器であり、
少なくとも一方の電極が、前記内管の外周面に配置されて前記放電容器の管壁内に埋め込まれていて、
前記混合ガスにおける前記塩素ガスの容量濃度をＭ（％）、前記混合ガスの封入圧力をＰ（ｋＰａ）とするとき、
前記塩素ガスの容量濃度Ｍ、前記混合ガスの封入圧力Ｐは、以下の式をみたすことを特徴とする放電ランプ。
７≦Ｐ≦１３Ｍ＋７ （１．０≦Ｍ≦２．０）
７≦Ｐ≦１４Ｍ＋６ （０．５≦Ｍ≦１．０） A discharge vessel in which a mixed gas containing at least chlorine gas and krypton gas is enclosed;
An electrode pair disposed along the axial direction of the discharge vessel;
The discharge vessel is a single tubular discharge vessel integrated by welding a cylindrical outer tube to the outer peripheral surface of the cylindrical inner tube;
At least one electrode is disposed on the outer peripheral surface of the inner tube and embedded in the tube wall of the discharge vessel;
When the volume concentration of the chlorine gas in the mixed gas is M (%) and the sealed pressure of the mixed gas is P (kPa),
A discharge lamp characterized in that the chlorine gas volume concentration M and the mixed gas sealing pressure P satisfy the following equations.
7 ≦ P ≦ 13M + 7 (1.0 ≦ M ≦ 2.0)
7 ≦ P ≦ 14M + 6 (0.5 ≦ M ≦ 1.0)
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