WO2005076315A1

WO2005076315A1 - Dielectric barrier discharge lamp, dielectric barrier discharge device, and method for using those

Info

Publication number: WO2005076315A1
Application number: PCT/JP2005/001878
Authority: WO
Inventors: Kazuya Hatase; Shingo Ezaki
Original assignee: Gs Yuasa Corporation
Priority date: 2004-02-03
Filing date: 2005-02-02
Publication date: 2005-08-18
Also published as: KR20060034618A; TW200527475A; JP2005222714A; TWI344663B; CN1765002B; KR100717701B1; CN1765002A

Abstract

Disclosed is a dielectric barrier discharge lamp wherein a pair of electrodes are arranged in a discharge vessel which is filled with a discharge gas. The discharge gas contains Xe and Ar, and the partial pressure of Xe relative to the total pressure of Xe and Ar in the discharge vessel is not less than 0.20 and not more than 0.80.

Description

Dielectric barrier lamp, dielectric barrier device and their use

The present invention relates to a dielectric barrier thigh lamp, a dielectric barrier thigh device, and their so-called methods. Background art

As a dielectric barrier lamp, a material in which Xe (xenon) or the like is filled in a fiber is widely known (for example, see Japanese Patent Application Laid-Open No. 8-87989).

See). Disclosure of the invention

Lamps that use 172 nm center wavelength vacuum ultraviolet radiation emitted from the Xe ₂ excimer do not always have sufficient light output, so higher output power was desired.

Of course, if the pressure of Xe charged in the vessel is increased, three Xe atoms in the excited state (* means the electronically excited state) and two Xe atoms in the ground state occur. The light output at 172 nm increases because the density of the Xe ₂ excimer generated by the body collision reaction (Xe * + Xe + Xe → Xe ₂ + Xe) increases. However, on the other hand, as the pressure increases, the probability of electrons colliding with Xe atoms and Xe + ions increases. As a result, even if the electrons gain energy from the electric field, energy loss due to collision is observed. Therefore, since the average energy of electrons decreases, the ionization efficiency (the number of times that electrons travel one or more times through the Xe atom during the unit length) decreases. This means that the required mff (ramp starting mro) required to start the ¾® increases, and accordingly, it is necessary to improve the m position, etc. Therefore, it is sealed in pure Xe gas. Increasing the pressure was not a viable method: in these circumstances, the product of ^ 1ϊ in the irm container and the icm gap length has traditionally been less than 225 OTorr · mm Since barrier lamps have been used exclusively, there has been a problem that sufficient light output cannot be obtained.

The present invention has been made based on the above circumstances. In other words, in a lamp using a gas filled with a gas containing Xe, a dielectric barrier and a dielectric barrier having an increased light output without increasing the lamp starting ff are used. It is an object of the present invention. The present inventors have intensively studied to develop a dielectric barrier cm lamp and a dielectric barrier discharge device capable of solving this problem. As a result, the ガス m gas filling the ¾m container is

A mixed gas of Xe and Ar, and the ratio of the partial pressure of Xe to the total pressure of Xe and Ar in the vessel P _Xe / (P _Xe + P _{A r} ) is 0.20 or more By setting it to 0.8 or less, it was found that the ¾tt strength can be improved without increasing the lamp starting. The present invention has been made based on this finding. That is, a first invention according to the present invention is a dielectric barrier discharge lamp in which a pair of 設け is provided in a container filled with ¾m gas, wherein the thigh gas contains xe and Ar,

A special feature is that the ratio of the partial pressure of Xe to the total pressure of Xe and Ar in the vessel is 0.20 or more and 0.80 or less.

According to a second aspect of the present invention, an alternating current is applied between a dielectric barrier lamp provided with a pair of m-forces in a m container filled with a m gas and a Fujimi electrode! A gas containing Xe and Ar, and a Xe component that is the total pressure of Xe and Ar in the knitted container. The pressure ratio is not less than 0.20 and not more than 0.80.

According to the present invention, the gas jtm is a mixed gas of Xe and Ar, and the ratio P _Xe Z (P _{X e} + By setting P _{A r} ) to be 0.20 or more and 0.80 or less, the strength can be improved without increasing the lamp starting. Brief Description of Drawings

FIG. 1 is an embodiment of the present invention and is a cross-sectional view showing a dielectric barrier device provided with a dielectric barrier discharge lamp.

FIG. 2 is a graph showing the relationship between ^! ^ Of the filling gas and thigh strength (UV172 nm).

FIG. 3 is a graph showing the relationship between the amount of charged gas 银 and the minimum lamp start peak ¾Ε.

FIG. 4 is a graph showing the relationship between the partial pressure ratio and the maximum filling pressure.

Figure 5 is a graph showing the relationship between the partial pressure ratio and the maximum irradiance that can be designed (UV172 nm). BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in more detail by way of examples. FIG. 1 shows a dielectric barrier device according to an embodiment of the present invention. The dielectric barrier device includes a dielectric barrier lamp 10 (hereinafter, simply referred to as “lamp 10”) and an inverter device 20. The lamp 10 has a discharge vessel 11 of, for example, a synthetic stone (for example, a size of about 35 0111111 about 401 ₁ 1111 about 1 3111111, a wall thickness of about 2 mm), and a discharge space 13 therein is filled with furnace gas. ing. The device W is provided with a pair of mHl 4, 15 force S. Since the electrode 15 is in a mesh shape, light emitted by the electrode 15 can be emitted. An inverter device 20 is connected between these two electrodes 14 and 15 via a transformer 27. The inverter device 20 is connected to one winding 27 P of a transformer 27, and the electrodes 14 and 15 of the Sift self-lamp 10 are connected to a secondary winding 273 of the transformer. The transformer 27 and the inverter device 20 constitute an excimer medical device 30.

The lamp of the above謹成shows thigh bow嫉of scan Bae spectrum having a central wavelength 172Ita m is ¾lt from X e ₂ excimer molecules in Figure 2. For ultraviolet radiation, the gap length was about 9 mm. The value of this ¾m gap length is the same as the thickness of the container, £ 瞧). It can be obtained by subtracting about 4 mm, which is twice the thickness of the vessel, from about 13 mm. Peak applied between electrodes at lamp start (lamp start peak mro V

_{3 £)} and 1611 ¥, peak applied between the electrodes after startup (lit) ®Kushi (lamp peak voltage) V _p of 6 k V, the frequency f 30 k H _Z - was constant. The applied ff waveform was a square wave of 0.5 s at both rise and fall. Further, the total pressure (filling pressure) of the Xe—Ar mixed gas in the ¾m container 11 is changed, and the partial pressure ratio of the Xe—Ar mixed gas (P _x P _Xe + P _Ar )) were taken as the eight views of 0.10, 0.15, 0.20, 0.35, 0.50, 0.70, 0.70, 1.00. The thigh was measured under a N ₂ atmosphere using a vacuum ultraviolet spectrometer and a photomultiplier tube. From these results, it can be seen that the thigh strength can be increased by increasing ^ 1Ϊ (filling pressure) of the mixed gas even at the partial pressure ratio of レ and deviation (P _Xe Z (P _Xe + P _Ar ) = 0.10 to 1.00). It was found to increase. This is because the density of the Xe ₂ excimer molecule increases with the increase in the (filling pressure). It was also found that under the constant condition of ^ J3E (filling pressure), almost the same 同じ tt bow jewel was obtained when the partial pressure ratio was in the range of 0.50 to 1.00.

Next, at each partial pressure ratio (P _x (P _Xe + P _Ar )), when 银 (filling pressure) is changed, the minimum peak necessary to start the lamp ®ϊ, that is, the minimum lamp starting We examined how the peak mm ν _{φ min} changes force. As shown in FIG. 3, it was found that increasing the 银 (sealing) also increased the v _sp in the partial pressure ratios of (d) and (d). Note that this is similar to Paschen's law in the spark method ^ m. Paschen's law is a theory that is expressed as a function of a product pd of a d mm force sealing pressure p and a ¾m gap length d for starting self-m. Spark®Ξ is minimal at some pd value. In general, in a region where the pd value is larger than the point where the sparkle is minimal (Paschen minimum), the spark® 増加 increases as the pd value increases. The range of Ε shown in FIG. 3 corresponds to this region. As shown in FIG. 3, as the partial pressure of Ar is increased from 0 to 0.80, the partial pressure ratio (P _Xe Z (P _Xe + P _Ar )) is increased from 1.00 to 0. It was found that v _spmin decreased as the _value was reduced to 20. And v _spmin is the partial pressure ratio

(Pxe / (P _Xe + P _Ar )) force It became clear that it became the minimum at SO.20 and increased when the partial pressure ratio was further reduced.

The above results are summarized as follows. As the total pressure (filled pressure) of the gas mixture in the space increases, the leg ¾! Increases (see Fig. 2), and _Vspmin also increases. V _{spmin decreases} when the partial pressure ratio (P _Xe / (P _Xe + P _Ar )) is reduced from 1.00 to 0.20, and reaches a minimum value when the partial pressure ratio is 0.20. (See Figure 3).

By the way, as for the power supply of the lamp, there is a limit to the ff that can be supplied due to restrictions on its cost and size. Thus, merely rather only to increase the thigh intensity of the lamp, it is desired force to be able to Godo the lamp without increasing the peak ¾EV _SP applied between the electrodes during lamp starting.

Therefore, without increasing the v _sp, KoTsuta the following discussion order to provide a lamp capable of increasing the rectangular intensity.

Fig. 4 is a graph showing the maximum filling pressure that can start ¾m with respect to the partial pressure ratio of the mixed gas when the peak voltage (ν _φ ) applied between the electrodes at the start of the lamp is fixed. It is. Figure 4 is derived from the graph in Figure 3.

The graph in Fig. 4 can be specifically derived from Fig. 3 as follows. Here, an example of = 8 kV will be described. First, the intersection of the orchid shown in Fig. 3 and the nine graph lines (lines with a partial pressure ratio of 0.001 to 1.00), specifically, the partial pressure ratios of 1.00, 0.80, 0.70 , 0.50, 0.35, 0.20, 0.15, 0.10, obtaining the value of the old 0.00 (Note that these values, V _sp = 8 kV Tokinira amplifier in each division ratio It shows the maximum filling pressure that can be used for starting). 9 data obtained in this way The data were plotted on a graph with the x-axis as the partial pressure ratio and the y-axis as the maximum sealing pressure. From the graph in Fig. 4, it was found that the maximum sealing pressure S maximum value was obtained when the partial pressure ratio was around 0.2.

Then, the graph of the thus Figure 4 graphs and Figure 2 obtained, V ^ SkV. V _p = the determined maximum ¾Ιί intensity designable in 6k V is as Figure 5.

According to FIG. 5, it can be seen that the intensity reaches a maximum near the partial pressure ratio of 0.40. Also, when the partial pressure ratio is in the range of 0.20 or more and 0.80 or less, it can be seen that the strength force S is significantly increased as compared with the conventional lamp in which 100% of Xe is sealed. Thus, the voltage dividing ratio 0.20 or 0.80 or less, preferably in the range, if the 0.27 or 0.7 following range, without the rise and V, as constant V _sp other words It was also found that the thigh strength could be improved.

In the case where ギヤ m gap length S is about 9 mm, in the case where only Xe was used as the gas, a dielectric barrier の lamp with ¾® gas having a ^ EE of 250 T rr or less was exclusively used. This is well evident from the result of the partial pressure ratio of Xe in Fig. 3 of 1.00: ^. In other words, in the conventional dielectric barrier lamp, the product of the thigh gas fiber and the discharge gap length is −, and 25 OTorr X 9 mm = 225 OTorr ■ mm or less has been exclusively used. On the other hand, in the case of mixing Ar with Xe as in the present invention, the region force S can be used where the gas ^ is 350 T rr or more (see FIGS. 2 and 3). That is, it is possible to obtain a product in which the product of the gas IE and the discharge gap length is 350 Torr x 9 mm = 3150 Torr · mm or more. In the present invention, the ratio of the partial pressure of Xe to the total pressure of Xe and Ar in the device is set to 0.20 or more and 0.80 or less, and the product of ^ E of the discharge gas and the thigh gap length is 315. By combining OTorrrrmm or more, the strength can be particularly remarkably improved without increasing the lamp start ¾EE. Further, in the present invention, when the ¾m gap length is about 9 mm, it is preferable that the discharge gas has a ^ E of at least 400 T rr (see FIG. 3). In other words, it is preferable that the product of the 方 m gas and the jim gap length be equal to or greater than 400 Torr X9 mm = 360 OTrr-mm.

According to the present invention,

mm (impeller, transformer, etc.) is possible.

The present invention is not limited to the embodiment described above with reference to the drawings. For example, the following embodiments are also included in the technical scope of the present invention. Various changes can be made within the scope. (1) In the above embodiment, the dielectric # ^ rear discharge lamp 10 has a specific shape and a specific size, but the shape and size of the dielectric barrier discharge lamp are particularly limited. Not determined.

(2) In the above embodiment, the specific Δm gap length d and the frequency peak ffv _p are shown, but these values are not particularly limited. For example d = 3~30m m, it was confirmed that f = 10 kHz ~ 240 kHz, the same effect also in the case of changing the range of V _p = 2kV~24k V is obtained.

(3) In the above embodiment, a specific 账 waveform was shown, but the ¾Ξ waveform is not particularly limited. For example, a sine wave Te per cent Rere d = 3~ 30 mm, f = 10 k Hz~ 240kHz, that the same effect as the rectangular square wave obtained even ^^ was varied in the range of V _p = 2kV~24k V Cormorant.

When Hg is converted into a mixed gas of Xe-Ar as a gaseous substance other than the rare gas, when the partial pressure of Hg when the lamp is turned on is P _Hg , and when the pressure of the ¾m gas is P, P _Hg ZP By setting the ratio to less than 0.001%, the effect of the present invention is greatly improved. This is for the following reasons. The excitation energy of Hg is smaller than the excitation energy of Xe. Therefore, the number of excited Xe is significantly reduced because the electron energy is preferentially spent on Hg excitation. As a result, the density of the Xe ₂ excimer is greatly reduced, and the light output at 172 nm is greatly reduced. On the other hand, there is almost no decrease in the ultraviolet fineness of 172 nm, which is the ^^ of i-mouth mixture of rare gases other than Xe and Ar. Therefore, it is preferable that the ratio of P _Hg ZP is less than 0.001%, especially for increasing _Hg . The expression “the ratio of the partial pressure of 7j silver is less than 0.001%” described in the claims of the present application includes an age that does not contain 7 silver at all.

This application is based on a Japanese patent application filed on Feb. 3, 2004 (Japanese Patent Application No. 2004-026513), the contents of which are incorporated herein by reference.

Claims

The scope of the claims

1. A dielectric barrier lamp in which a pair of ¾ is provided in a space filled with ¾m gas,

The source gas contains Xe and Ar, and the ratio of the partial pressure of Xe to the total pressure of Xe and Ar in the ή! Ή container is 0.20 or more and 0.80 or less. A certain thing is made a tree.

2. The dielectric parliamentary discharge lamp according to claim 1,

It is characterized in that ultraviolet light having a center wavelength of 17 2 nm is used.

3. The dielectric barrier lamp according to claim 1,

The product that the product of B¾® gas and the ギヤ ® gap length of ΙίίΙ ^^ is greater than or equal to 315 mm or less is defined as a tree.

4. The dielectric barrier discharge lamp according to claim 1, wherein

The above: The product of the ^! Gas and the disgusting ¾¾ icm gap length is 3 δ Ο Ο ο r r r 'mm or more.

5. The dielectric barrier lamp according to claim 1, 2, 3, or 4, wherein at the time of lighting of the dielectric barrier discharge lamp, 银 of the cm gas in the tin container is determined.

It is characterized by being less than 0.01%.

6. ¾S gas-filled jC® ^ container with a pair of dielectric dielectric lamps and a disgusting! A dielectric barrier device having a device for applying alternating current to the space,

tilfB ^ II gas contains Xe and Ar, and ¾ίίΙΒ¾¾the ratio of the partial pressure of Xe to the total pressure of Xe and Ar in the container is 0.20 or more and 0.80 or less Is the 'tree'.

7 · The dielectric barrier device according to claim 6, wherein

It is characterized by the use of ultraviolet light with a central wavelength of 1 72 nm

8. The dielectric barrier ¾m device according to claim 6, wherein

The product of the tirtB ^ I gas and the ¾¾ gap length of the tiifB method is not less than 315 mm.

9 · The dielectric barrier device according to claim 6, wherein

^ ^^ of gas,

It should be over 360 mm Torr · mm. 10. The dielectric barrier according to claim 6, 7, 8, or 9, wherein at the time of lighting of the self-dielectric barrier lamp, tinm of the tin self-discharge gas in the self-discharge gas barrier. The ratio of the partial pressure of mercury in the key a¾m gas to the key pressure is less than 0. oc%. 11.1 A method of using a dielectric barrier discharge lamp in which a pair of electrode forces s is provided on a side ^ m filled with jcm gas,

The gas contains Xe and Ar, and the ratio of the partial pressure of Xe to the total pressure of Xe and Ar in the SiitB¾m container is 0.20 or more and 0.80 or less.

The shelves are used to store ultraviolet light with a center wavelength of 172 nm emitted from a terrible dielectric barrier lamp.

1 2. A method of using a dielectric barrier, comprising: a dielectric barrier lamp provided with a pair of electrodes s provided with a gas filled with a gas; and a device for applying an alternating current between the electrodes. ,

The negatively charged gas contains Xe and Ar, and the ratio of the partial pressure of Xe to the total pressure of Xe and Ar in the preceding statement is 0.20 or more and 0.80 or less. One

It is assumed that an IB dielectric barrier lamp emits ultraviolet light having a center wavelength of 172 nm emitted from a lamp.