WO2011077891A1

WO2011077891A1 - Process for producing hollow package

Info

Publication number: WO2011077891A1
Application number: PCT/JP2010/070967
Authority: WO
Inventors: 和則井上; 剛横山; 一宏松本
Original assignee: 太陽誘電株式会社
Priority date: 2009-12-21
Filing date: 2010-11-25
Publication date: 2011-06-30
Also published as: JP5339625B2; JP2011130356A

Abstract

Provided is a hollow package production process with which it is possible to prevent deterioration of device properties due to residual substances adhering to the vibrator during production of the hollow package, the production process involving: a step of preparing a retaining component through which light for curing a photocurable resin can pass and which has projections formed at positions corresponding to the terminals of the device and a recess formed in a position corresponding to the vibrator (4); a step of coating the retaining component with the photocurable resin; a step of joining the retaining component to the device in such an orientation that the vibrator (4) is located inside the recess; a step of curing the photocurable resin by irradiating the same with light; a step of peeling the retaining component from the photocurable resin; and a step of exposing the terminals. In the aforementioned process, the device is covered with a cover (2) (the photocurable resin) having a recess, and therefore, substances are less likely to adhere to the vibrator (4) in the course of production. Thus, a hollow package can be produced without deteriorating the properties of the vibrator (4).

Description

Manufacturing method of hollow package

The present disclosure relates to a method for manufacturing a hollow package.

The acoustic wave element is used for a filter element or an oscillator of a television receiver (hereinafter abbreviated as TV), a video tape recorder (hereinafter abbreviated as VTR), a DVD (Digital Versatile Disc) recorder, a cellular phone, or the like. Yes.

Currently, surface acoustic wave devices (hereinafter referred to as SAW devices. SAW: Surface Acoustic Wave)
Device) is widely used in various circuits for processing radio signals in a frequency band of 45 MHz to 2 GHz, for example. Examples of the circuit provided with the SAW device include a transmission bandpass filter circuit, a reception bandpass filter circuit, a local transmission filter circuit, an antenna duplexer, an intermediate frequency filter circuit, and an FM modulator.

In recent years, these circuits have been reduced in size, and electronic parts such as SAW devices used have been increasingly required to be downsized. In particular, in portable electronic devices such as mobile phones, circuits including SAW devices are often modularized together with other circuits, and surface-mountable and low-profile SAW devices are required. I came. At the same time, it is required to ensure sufficient airtight reliability of the SAW device.

Various methods have been proposed to satisfy these requirements. In particular, for SAW devices, a method has been proposed in which a hollow structure on a vibrating portion, which is the most important in terms of characteristics, is formed on a wafer as it is (for example, disclosed in Patent Documents 1 to 4). Patent Document 1 discloses a manufacturing method in which a melting resin is placed on a piezoelectric substrate, a spacer and an upper plate are placed thereon, and the melting resin is dissolved and removed to form a hollow structure. Yes. Patent Document 2 discloses a manufacturing method in which a structural element structure disposed on a substrate is surrounded by a frame, covered with an auxiliary film, and covered with a reactive resin layer. Patent Document 3 discloses a method of manufacturing a surface acoustic wave device which is formed by forming a frame with a resin film on the circuit or surface acoustic wave element side and bonding them together. Patent Document 4 discloses a method of manufacturing a surface acoustic wave device which is formed by forming a frame with a photosensitive resin on the circuit or surface acoustic wave device side and bonding them together.

Japanese Patent No. 3291466 Special table 2003-523082 gazette Japanese Patent No. 3196693 Japanese Patent No. 3225906

In the method of making a frame in the vicinity of the vibration part of the device disclosed in Patent Documents 1 to 4, there is a problem that the residue of the substance may deteriorate the characteristics of the vibration part because the substance once adheres to the vibration part. there were.

The method for manufacturing a hollow package disclosed in the present application is a method for manufacturing a hollow package in which a device including a vibration element and a terminal electrically connected to the vibration element is packaged to have a hollow structure. Preparing a holding member that is capable of transmitting light that cures the photocurable resin, has a convex portion formed at a position corresponding to the terminal in the device, and has a concave portion formed at a position corresponding to the vibration element. Applying the photocurable resin to the holding member, bonding the holding member and the device in a posture in which the vibration element is positioned in the recess, and applying light to the photocurable resin. And curing the photo-curable resin, peeling the holding member from the photo-curable resin, and exposing the terminal.

The method for manufacturing a hollow package disclosed in the present application is a method for manufacturing a hollow package in which a device including a vibration element and a terminal electrically connected to the vibration element is packaged to have a hollow structure. The first concave portion is formed at a position corresponding to the vibration element, and the second concave portion is formed at a position corresponding to the terminal in the device. A step of preparing a member, a step of applying the photocurable resin to the holding member, and a posture in which the vibration element is located in the first recess and the terminal and the second recess are in contact with each other, A step of bonding the holding member and the device, a step of irradiating the photocurable resin with light to cure the photocurable resin, and a step of peeling the holding member from the photocurable resin. Including the door.

According to the disclosure of the present application, it is possible to form a hollow package for sealing a device without deteriorating the characteristics of the device.

Perspective view of acoustic wave element Sectional view of ZZ part in FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 1. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the hollow package concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 2. FIG. Sectional drawing which shows the manufacturing process of the cover concerning Example 2. FIG.

A method for manufacturing a hollow package is a method for manufacturing a hollow package in which a device including a vibration element and a terminal electrically connected to the vibration element is packaged so as to have a hollow structure. Preparing a holding member capable of transmitting light that cures the functional resin, forming a convex portion at a position corresponding to the terminal in the device, and forming a concave portion at a position corresponding to the vibration element; and the holding A step of applying the photocurable resin to a member; a step of bonding the holding member and the device in a posture in which the vibration element is positioned in the recess; and irradiating the photocurable resin with light. The method includes a step of curing the photocurable resin, a step of peeling the holding member from the photocurable resin, and a step of exposing the terminal.

In the manufacturing method of the hollow package, the thickness of the photocurable resin applied in the applying step is larger than the thickness of the photocurable resin of the terminal portion bonded in the bonding step, and the step of exposing the terminal includes The method can include a process of etching the photo-curing resin to a thickness greater than that of the photo-curing resin of the terminal portion to expose the terminal portion.

In the method for manufacturing a hollow package, the holding member includes a step of applying a first mask material to a position overlapping the terminal portion on a substrate member that transmits at least ultraviolet rays, etching the substrate member, and forming the convex portion. A step of forming, a step of removing the first mask material, a step of applying a second mask material at a position overlapping the vibration element, a step of etching the substrate member to form the recess, And a step of removing the second mask material.

In the method for manufacturing a hollow package, the holding member is a substrate member that transmits at least ultraviolet rays, a step of applying a mask material to a position overlapping the terminal portion, etching the substrate member, and forming the concave portion and the convex portion. It can be set as the method prepared including the process of forming, the process of removing the said mask material, and the process of apply | coating the light-shielding material to the said convex part.

A method for manufacturing a hollow package is a method for manufacturing a hollow package in which a device including a vibration element and a terminal electrically connected to the vibration element is packaged so as to have a hollow structure. A holding member is prepared which is capable of transmitting light for curing the functional resin, has a first recess formed at a position corresponding to the vibration element, and has a second recess formed at a position corresponding to the terminal in the device. A step of applying the photocurable resin to the holding member; and the holding element in a posture in which the vibration element is located in the first recess and the terminal and the second recess are in contact with each other. A step of bonding the device, a step of irradiating the photocurable resin with light to cure the photocurable resin, and a step of peeling the holding member from the photocurable resin.

In the method for manufacturing a hollow package, the depth of the second recess may be deeper than the depth of the first recess.

In the method for manufacturing a hollow package, the roughness of the inner surface of the second recess is higher than the roughness of a portion of the holding member that is in contact with the ultraviolet curable resin, excluding the second recess. be able to.

In the method for manufacturing a hollow package, the photo-curable resin may be an ultraviolet curable resin.

(Embodiment)
[1. Configuration of hollow package)
FIG. 1 is a perspective view of a hollow package. FIG. 2 is a cross-sectional view taken along the line ZZ in FIG. The hollow package shown in FIGS. 1 and 2 is an example of a hollow package that can be manufactured by the manufacturing method according to the present embodiment. The hollow package according to the present embodiment has a configuration in which the acoustic wave element is covered with a cover having a hollow structure, but the drawing of the cover is omitted in FIG. 1 in order to clearly illustrate the structure of the acoustic wave element. is doing.

The surface acoustic wave device is taken as an example of the surface acoustic wave device of the present embodiment. The acoustic wave element shown in FIGS. 1 and 2 includes a cover 2, a substrate 3, a vibration element 4,

terminal parts

5 and 6, and a wiring part 7. The vibration element 4 is, for example, a comb-shaped electrode. The

terminal portions

5 and 6 are at least partially exposed from the cover 2 and can receive or output electrical signals. The wiring part 7 electrically connects the vibration element 4 and the

terminal parts

5 and 6. The cover 2 has a substantially dome-shaped bulge in which at least the vibration element 4 can be contained. The cover 2 can be formed of resin. The cover 2 is fixed in close contact with the substrate 3 and the like, and a space 8 is formed between the cover 2 and the substrate 3 by a substantially dome-shaped bulge. The cover 2 hermetically seals at least the vibration element 4.

[2. Hollow package manufacturing method)
[2-1. Example 1 of Manufacturing Method]
3A to 3G are cross-sectional views illustrating the manufacturing process of the hollow package according to the first embodiment.

FIG. 3A is a cross-sectional view of the cover holding member 1. In the method for manufacturing an acoustic wave device according to Example 1, first, a cover holding member 1 shown in FIG. 3A is prepared. The cover holding member 1 should just be formed with the material which can permeate | transmit an ultraviolet-ray at least, and can be formed with transparent glass, transparent resin, etc. In the cover holding member 1, a recess 1 a is formed at a location corresponding to the vibration element 4 formed on the surface of the substrate 3 to be joined in a later step. The cover holding member 1 has

convex portions

1 b and 1 c formed at locations corresponding to the

terminal portions

5 and 6 formed on the surface of the substrate 3. The cover holding member 1 is preferably subjected to a mold release treatment on the surface including the concave portion 1a, the

convex portions

1b and 1c. The mold release process is a process for facilitating peeling of the ultraviolet curable resin applied in a later step. The mold release process is preferably a process of coating the surface of the cover holding member 1 with, for example, a fluororesin.

Next, as shown in FIG. 3B, an ultraviolet curable resin 2a before being cured is applied to the surface side including the concave portions 1a, the

convex portions

1b and 1c of the cover holding member 1. The ultraviolet curable resin 2a may be at least a material that can be used for packaging.

Next, as shown in FIG. 3C, the cover holding member 1 coated with the ultraviolet curable resin 2a and the wafer 10 are joined (see arrow A). Wafer 10 has vibration element 4, wiring portion 7, and

terminal portions

5 and 6 on the surface of substrate 3. When the cover holding member 1 and the wafer 10 are joined, the concave portion 1a of the cover holding member 1 covers the vibration element 4, the position of the convex portion 1b matches the position of the terminal portion 5, and the position of the convex portion 1c and the terminal portion. Alignment is performed so that the position 6 matches. When the cover holding member 1 and the wafer 10 are joined, by applying a pressing force in the direction indicated by the arrow A, the ultraviolet curable resin 2a (before curing) sandwiched between the convex portion 1b and the terminal portion 5 is convex. The ultraviolet curable resin 2 a (before curing) sandwiched between the convex portion 1 c and the terminal portion 6 bulges between the convex portion 1 c and the terminal portion 6. Therefore, the thickness of the ultraviolet curable resin 2a on the

terminal portions

5 and 6 is reduced. FIG. 3D shows a state where the cover holding member 1 and the wafer 10 are joined. At this time, if the cover holding member 1 and the wafer 10 are joined in a nitrogen atmosphere, it is desirable that the ultraviolet curable resin is easily cured.

Next, as shown in FIG. 3E, ultraviolet light (see arrow B) is irradiated from the cover holding member 1 side to cure the ultraviolet curable resin 2a. The cured ultraviolet curable resin 2a is referred to as a cover 2. At this time, as an ultraviolet light source, an LED light source (Light-Emitting-Diode) is used, so that it can be cured without transferring heat to the workpiece side, and there is no problem such as warpage of the wafer 10.

Next, as shown in FIG. 3F, the cover holding member 1 is peeled from the cover 2.

Finally, as shown to FIG. 3G, the part which overlaps with the

terminal parts

5 and 6 in the cover 2 is opened, and the

terminal parts

5 and 6 are exposed. At this time, since the cover 2 (ultraviolet curable resin 2a) located above the

terminal portions

5 and 6 is thinned by the

convex portions

1b and 1c of the cover holding member 1, the cover 2 (ultraviolet curable resin 2a) is attached. The

terminal portions

5 and 6 can be easily exposed from the cover 2 simply by etching uniformly by a method such as O ₂ ashing.

As described above, a hollow package having the space 8 between the wafer 10 and the cover 2 can be produced.

4A to 4G are cross-sectional views showing the manufacturing process of the cover holding member 1 described above.

First, as shown in FIG. 4B, photosensitive resist 12 is applied to the surface of the plate-shaped (unprocessed) cover holding member 11 shown in FIG. 4A. Next, as shown in FIG. 4C, the resist 12 is subjected to exposure processing, development processing, and post-baking processing to correspond to the terminal portions 5 and 6 (see FIG. 1 and the like) in the cover holding member 1. Mask only.

Next, as shown in FIG. 4D, the cover holding member 11 is wet-etched with hydrofluoric acid to form

convex portions

11b and 11c. That is, the portion not masked by the resist 12 is etched, and the portion masked by the resist 12 remains in a convex shape.

Next, as shown in FIG. 4E, the resist 12 is removed, and the resist 13 is applied and patterned again. At this time, the patterning shape of the resist 13 is a shape in which a portion corresponding to the vibration element 4 (see FIG. 1 and the like) is opened (see the opening 11d). In this embodiment, the resist 12 applied in the step shown in FIG. 4B is temporarily removed and then the resist 13 is applied again in the step shown in FIG. 4E. However, the resist 13 is removed without removing the resist 12. It may be applied.

Next, as shown in FIG. 4F, the cover holding member 11 is wet etched using hydrofluoric acid. Thereby, the recessed part 11a can be formed. The depth D1 of the concave portion 11a (in this embodiment, the depth from the top surface of the convex portion 11b to the bottom surface of the concave portion 11a) is a depth necessary to secure the vibration space of the vibration element 4 of the acoustic wave device. That's fine. The depth D1 is preferably about 20 to 30 μm, for example. The recess 11a having such a depth D1 can be formed by general wet etching.

Finally, as shown in FIG. 4G, the resist 13 is removed. Thereby, the cover holding member 11 which has the recessed part 11a and the

convex parts

11b and 11c is producible.

FIGS. 5A to 5E are cross-sectional views showing another method for producing the cover holding member.

First, as shown in FIG. 5B, a resist 22 is applied to the surface of the plate-like (unprocessed) cover holding member 21 shown in FIG. 5A. Next, as shown in FIG. 5C, the resist 22 is patterned so as to form an opening 22a at a location corresponding to the vibration element 4 (see FIG. 1 and the like).

Next, as shown in FIG. 5D, the cover holding member 21 is etched. As an example, the etching was wet etching using hydrofluoric acid. Thereby, the recess 21 a can be formed in the cover holding member 21.

Finally, as shown in FIG. 5E, the resist 22 is removed, and a resist 23 having a light shielding component is applied and patterned on the convex portions 21b and 21c adjacent to the concave portion 21a. Thereby, the convex parts 21b and 21c which have light-shielding property can be formed.

Since the cover holding member 21 shown in FIG. 5E is coated with the resist 23 having a light shielding component on the convex portions 21b and 21c, the terminal portion 5 and the terminal portion 5 and even if the ultraviolet ray is irradiated in the ultraviolet curing step at the time of manufacturing the hollow package. The ultraviolet curable resin 2a on 6 (see FIG. 1 etc.) is not cured. Therefore, the uncured resin on the

terminal portions

5 and 6 can be easily removed with a solvent or the like.

[2-2. Example 2 of Manufacturing Method]
6A to 6F are cross-sectional views illustrating the method for manufacturing the hollow package according to the second embodiment.

FIG. 6A is a cross-sectional view of the cover holding member 31. The cover holding member 31 only needs to be formed of a material that can transmit at least ultraviolet rays, and can be formed of transparent glass, transparent resin, or the like. The cover holding member 31 has a recess 31a formed at a location corresponding to the vibration element 4 (see FIG. 1 and the like) formed on the surface of the substrate 3 to be joined in a later step. The cover holding member 31 has

recesses

31b and 31c formed at locations corresponding to the terminal portions 5 and 6 (see FIG. 1 and the like). The depth D12 of the

recesses

31b and 31c is preferably deeper than the depth D11 of the recess 31a. This makes it difficult for the ultraviolet curable resin 32a to reach the bottoms of the

recesses

31b and 31c. Further, the

recesses

31b and 31c are processed so that the roughness of the surface (inner surface) is higher than the roughness of the portion of the cover holding member 31 that is in contact with the ultraviolet curable resin 32 except for the

recesses

31b and 31c. It is preferable to do. As a result, the ultraviolet curable resin 32a adhering to the surfaces of the

recesses

31b and 31c adheres to the surfaces of the

recesses

31b and 31c. Therefore, when removing the cover holding member 31, the UV curable resin 32a in the

recesses

31b and 31c is removed. can do.

Next, as shown in FIG. 6B, an ultraviolet curable resin 32a before being cured is applied to the surface side including the

recesses

31a, 31b and 31c of the cover holding member 31. The ultraviolet curable resin 32a may be at least a material that can be used for packaging.

Next, as shown in FIG. 6C, the cover holding member 31 coated with the ultraviolet curable resin 32a and the wafer 10 are joined (see arrow A). Wafer 10 has vibration element 4, wiring portion 7, and

terminal portions

5 and 6 on the surface of substrate 3. When bonding the cover holding member 31 and the wafer 10, the concave portion 31 a of the cover holding member 31 covers the vibration element 4, the position of the concave portion 31 b matches the position of the terminal portion 5, and the position of the concave portion 31 c matches the position of the terminal portion 6. Align so that the position matches. When the cover holding member 31 and the wafer 10 are joined, the UV curable resin 32a sandwiched between the cover holding member 31 and the terminal portion 5 is applied to the cover holding member 31 by applying a pressing force in the direction indicated by the arrow A. The ultraviolet curable resin 32 a sandwiched between the cover holding member 31 and the terminal portion 6 swells from between the cover holding member 31 and the terminal portion 6. Therefore, the thickness of the ultraviolet curable resin 32a on the

terminal portions

5 and 6 is reduced. FIG. 6D shows a state where the cover holding member 31 and the wafer 10 are joined. At this time, if the cover holding member 31 and the wafer 10 are bonded in a nitrogen atmosphere, it is desirable that the ultraviolet curable resin is easily cured.

Next, as shown in FIG. 6E, ultraviolet light (see arrow B) is irradiated from the cover holding member 31 side to cure the ultraviolet curable resin 32a. The cured ultraviolet curable resin 32 a is used as the cover 32. At this time, as an ultraviolet light source, an LED light source (Light-Emitting-Diode) is used, so that it can be cured without transferring heat to the workpiece side, and there is no problem such as warpage of the wafer 10.

Next, as shown in FIG. 6F, the cover holding member 31 is peeled from the cover 32. In this embodiment, the depth D12 of the

recesses

31b and 31c is made deeper than the depth D11 of the recess 31a, and the roughness of the surface (inner surface) of the

recesses

31b and 31c is greater than the roughness of the portions other than the

recesses

31b and 31c. Therefore, the ultraviolet curable resin 32 a (part of the cover 32) applied in the

recesses

31 b and 31 c of the cover holding member 31 is removed together with the cover holding member 31. Therefore, when the cover holding member 31 is peeled off, the

openings

32b and 32c are formed in the cover 32, and the

terminal portions

5 and 6 can be exposed.

Thus, a hollow package having a space 38 between the wafer 10 and the cover 32 can be produced.

According to the manufacturing method according to the second embodiment, since the

concave portions

31b and 31c are formed in the cover holding member 31 at locations corresponding to the

terminal portions

5 and 6 of the acoustic wave device, the

terminal portions

5 and 6 are preliminarily made of gold. (Au) or solder bumps may be formed.

7A to 7H are cross-sectional views illustrating a method for manufacturing the cover holding member 31 according to the second embodiment.

When the cover holding member 31 is manufactured, first, a resist 41 having photosensitivity is applied to the surface of the plate-shaped (unprocessed) cover holding member 31 shown in FIG. 7A as shown in FIG. 7B. Next, as shown in FIG. 7C, the resist 41 is subjected to an exposure process, a development process, and a post-bake process to mask only portions corresponding to the terminal portions 5 and 6 (see FIG. 1 and the like). .

Next, as shown in FIG. 7D, the cover holding member 31 is wet etched with hydrofluoric acid to form a recess 31a. That is, when the etching process is performed on the cover holding member 31, a portion not masked by the resist 41 is removed, and a portion masked by the resist 41 remains in a convex shape.

Next, as shown in FIG. 7E, the resist 41 is removed.

Next, as shown in FIG. 7F, the surface of the cover holding member 31 is laminated with a sandblast photosensitive dry film 42, and openings corresponding to the

terminal portions

5 and 6 of the acoustic wave device are opened using an exposure development process. (

Openings

42a and 42b are formed).

Next, as shown in FIG. 7G, sand blasting is performed to form

recesses

31b and 31c in the cover holding member 31. The sandblasting process is preferable because the removal amount of the cover holding member 31 can be increased (that is, deeply removed) compared to the wet etching process. The sandblast treatment is preferable because the roughness of the surface subjected to the treatment can be made higher than the roughness of the surface not subjected to the treatment.

Next, as shown in FIG. 7H, the dry film 42 is removed.

As described above, the cover holding member 31 having the

recesses

31a, 31b, and 31c can be manufactured.

[3. Effects of the embodiment, etc.]
According to the method for manufacturing a hollow package according to the present embodiment, since the vibration element 4 is covered with the cover 2 having the recesses, no substance adheres to the vibration element 4 during the manufacturing process. A hollow package can be manufactured without deteriorating the characteristics of the vibration element 4.

In addition, according to the present embodiment, a frame as disclosed in Japanese Patent Publication No. 2003-523082, Japanese Patent No. 3196893, or Japanese Patent No. 3225906 is not required, so that the manufacturing cost can be reduced. Can do.

In the manufacturing method according to the second embodiment, a light shielding layer may be printed on the inner surfaces of the

recesses

31b and 31c in the cover holding member 31. In this case, when the ultraviolet curable resin 32a is irradiated with ultraviolet rays and cured, the ultraviolet curable resin 32a applied in the

recesses

31b and 31c is hard to be cured. Therefore, when the cover holding member 31 is peeled from the wafer 10, the ultraviolet curable resin 32a (uncured resin) in the

recesses

31b and 31c is replaced with the ultraviolet curable resin 32a (cured resin) outside the

recesses

31b and 31c. Therefore, the probability that the ultraviolet curable resin 32a remains on the

terminal portions

5 and 6 after the cover holding member 31 is peeled can be reduced.

Further, although the

cover holding members

1 and 31 are formed of glass in the present embodiment, they can be formed of resin as well as glass. In this case, as a method of forming a recess that covers the vibration element 4 in the

covers

2 and 32, a mold having a protrusion corresponding to the recess is formed in the mold and pressed against the resin cover holding member while being heated and pressurized. A recess can be formed. Further, when the

cover holding members

1 and 31 are formed of a resin, if the polyethylene terephthalate (hereinafter referred to as PET) is used, the

cover holding members

1 and 31 can be covered with the covers 2 and 32 (ultraviolet curing) without performing mold release treatment. The

resin

2a, 32a) can be easily peeled off.

In this embodiment, the hollow package of the acoustic wave element has been described, but the parts to be packaged are not limited to the acoustic wave element.

Further, the first embodiment includes the step of removing the ultraviolet curable resin 2 a covering the

terminal portions

5 and 6, but the ultraviolet rays on the

terminal portions

5 and 6 when the cover holding member 1 is peeled from the wafer 10. If the cured resin 2a can be peeled off at the same time, this step is unnecessary.

In the first embodiment, the step of removing the ultraviolet curable resin 2a covering the

terminal portions

5 and 6 is included. When the cover holding member 1 is bonded to the wafer 10, the

convex portions

1b and 1c and the terminal are connected. The cover holding member 1 is pressed in the direction indicated by the arrow A until the

portions

5 and 6 are in contact with each other to bulge out the ultraviolet curable resin 2a. After the cover holding member 1 is peeled off, the ultraviolet curable resin 2a is placed on the

terminal portions

5 and 6 If is not left, this step is unnecessary.

Further, in the present embodiment, the cover holding member 1 is employed to mold the cover 2, but it is only necessary that the cover holding member 1 is formed of a material that transmits at least ultraviolet rays, and it is not essential to be transparent.

In the present embodiment, the

covers

2 and 32 are made of an ultraviolet curable resin. However, the cover is not limited to a resin that is cured by irradiating ultraviolet rays, but at least a resin that is cured by irradiating light (photocurable resin). I just need it.

Further, the

cover holding members

1 and 31 in the present embodiment are examples of the holding member of the present invention. The

covers

2 and 32 and the ultraviolet

curable resins

2a and 32a in the present embodiment are examples of the photocurable resin of the present invention. The vibration element 4 in the present embodiment is an example of the vibration element of the present invention.

Terminals

5 and 6 in this embodiment are examples of the terminal of the present invention. The acoustic wave element and wafer 10 in the present embodiment are an example of the device of the present invention.

The present invention is useful for a method for manufacturing a hollow package.

DESCRIPTION OF

SYMBOLS

1, 31

Cover holding member

2, 32

Cover

2a, 32a Ultraviolet curable resin 3 Substrate 4

Vibration element

5, 6

Terminal

8, 38 Space

Claims

A method of manufacturing a hollow package for packaging a device having a vibration element and a terminal electrically connected to the vibration element so as to have a hollow structure,
Preparing a holding member that is capable of transmitting light that cures the photocurable resin, forms a convex portion at a position corresponding to the terminal in the device, and forms a concave portion at a position corresponding to the vibration element;
Applying the photocurable resin to the holding member;
Bonding the holding member and the device in a posture in which the vibration element is positioned in the recess;
Irradiating the photocurable resin with light to cure the photocurable resin;
Peeling the holding member from the photocurable resin;
And a step of exposing the terminal.
The thickness of the photocurable resin applied in the applying step is thicker than the thickness of the photocurable resin of the terminal portion bonded in the bonding step,
The step of exposing the terminal includes
The manufacturing method of the hollow package of Claim 1 including the process which etches the said photocurable resin more than the thickness of the photocurable resin of the said terminal part, and exposes the said terminal part.
The holding member is
Applying a first mask material to a position overlapping the terminal portion on a substrate member that transmits at least ultraviolet rays;
Etching the substrate member to form the protrusions;
Removing the first mask material;
Applying a second mask material to a position overlapping the vibration element;
Etching the substrate member to form the recess;
The method for manufacturing a hollow package according to claim 1, further comprising a step of removing the second mask material.
The holding member is
At least a substrate member that transmits ultraviolet rays, a step of applying a mask material to a position overlapping the terminal portion;
Etching the substrate member to form the recesses and the protrusions;
Removing the mask material;
The manufacturing method of the hollow package of Claim 1 prepared including the process of apply | coating the light-shielding material to the said convex part.
A method of manufacturing a hollow package for packaging a device having a vibration element and a terminal electrically connected to the vibration element so as to have a hollow structure,
A holding member that is capable of transmitting light for curing the photocurable resin, has a first recess formed at a position corresponding to the vibration element, and has a second recess formed at a position corresponding to the terminal of the device. A process to prepare;
Applying the photocurable resin to the holding member;
Bonding the holding member and the device in a posture in which the vibration element is positioned in the first recess and the terminal and the second recess are in contact with each other;
Irradiating the photocurable resin with light to cure the photocurable resin;
And a step of peeling the holding member from the photocurable resin.
The method for manufacturing a hollow package according to claim 5, wherein a depth of the second recess is deeper than a depth of the first recess.
The hollow package according to claim 5 or 6, wherein a roughness of an inner surface of the second recess is higher than a roughness of a portion of the holding member excluding the second recess in a portion in contact with the ultraviolet curable resin. Manufacturing method.
The method for producing a hollow package according to claim 1 or 5, wherein the photocurable resin is an ultraviolet curable resin.