WO2011065762A3 - 큐엠에스를 이용한 가스 성분별 절대량 측정시스템 - Google Patents

큐엠에스를 이용한 가스 성분별 절대량 측정시스템 Download PDF

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Publication number
WO2011065762A3
WO2011065762A3 PCT/KR2010/008388 KR2010008388W WO2011065762A3 WO 2011065762 A3 WO2011065762 A3 WO 2011065762A3 KR 2010008388 W KR2010008388 W KR 2010008388W WO 2011065762 A3 WO2011065762 A3 WO 2011065762A3
Authority
WO
WIPO (PCT)
Prior art keywords
gas
qms
measuring
component
absolute quantity
Prior art date
Application number
PCT/KR2010/008388
Other languages
English (en)
French (fr)
Other versions
WO2011065762A2 (ko
Inventor
윤석래
조성권
박원영
이규찬
김진석
이진복
문동민
김광섭
Original Assignee
주식회사 이엘
한국표준과학연구원
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 이엘, 한국표준과학연구원 filed Critical 주식회사 이엘
Priority to US13/510,547 priority Critical patent/US20120216598A1/en
Priority to CN2010800525103A priority patent/CN102648410A/zh
Priority to EP10833574.6A priority patent/EP2506007A4/en
Publication of WO2011065762A2 publication Critical patent/WO2011065762A2/ko
Publication of WO2011065762A3 publication Critical patent/WO2011065762A3/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Immunology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

본 발명은 큐엠에스를 이용한 가스 성분별 절대량 측정시스템에 관한 것으로서, 더욱 상세하게는 핀홀을 통해 유입되는 미량 가스만으로도 정확한 정성 분석 뿐만 아니라, 정량 분석까지 가능한 큐엠에스를 이용한 가스 성분별 절대량 측정시스템에 관한 것이다. 본 발명에 의하면 제품의 생산성을 향상시키고 생산관리를 효율적으로 할 수 있도록 하여 산업경쟁력을 높이는 효과를 제공하게 된다.
PCT/KR2010/008388 2009-11-26 2010-11-25 큐엠에스를 이용한 가스 성분별 절대량 측정시스템 WO2011065762A2 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US13/510,547 US20120216598A1 (en) 2009-11-26 2010-11-25 System for measuring absolute quantity of each component of gas using qms
CN2010800525103A CN102648410A (zh) 2009-11-26 2010-11-25 利用定量质量系统的不同成分气体绝对量测定系统
EP10833574.6A EP2506007A4 (en) 2009-11-26 2010-11-25 SYSTEM FOR MEASURING THE ABSOLUTE QUANTITY OF EACH COMPONENT OF A GAS BY MEANS OF A QMS

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020090115440A KR100985923B1 (ko) 2009-11-26 2009-11-26 큐엠에스를 이용한 가스 성분별 절대량 측정시스템
KR10-2009-0115440 2009-11-26

Publications (2)

Publication Number Publication Date
WO2011065762A2 WO2011065762A2 (ko) 2011-06-03
WO2011065762A3 true WO2011065762A3 (ko) 2011-11-03

Family

ID=43135095

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/008388 WO2011065762A2 (ko) 2009-11-26 2010-11-25 큐엠에스를 이용한 가스 성분별 절대량 측정시스템

Country Status (5)

Country Link
US (1) US20120216598A1 (ko)
EP (1) EP2506007A4 (ko)
KR (1) KR100985923B1 (ko)
CN (1) CN102648410A (ko)
WO (1) WO2011065762A2 (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102937559B (zh) * 2012-11-12 2014-06-25 中国航天科技集团公司第五研究院第五一〇研究所 用双真空规气路转换测量材料放气率的方法
CN106289639B (zh) * 2016-08-31 2019-04-05 兰州空间技术物理研究所 一种基于电离真空计的真空分压力的测量方法
KR102444774B1 (ko) * 2017-12-27 2022-09-19 오씨아이 주식회사 카본 블랙의 표면 관능기의 정량 및 정성 분석 시스템 및 방법
CN111665102A (zh) * 2020-05-13 2020-09-15 中国科学院微电子研究所 低真空气体的快速无损采样装置及采样方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04160357A (ja) * 1990-10-24 1992-06-03 Hitachi Ltd ガス分圧の定量測定装置
JP2000048766A (ja) * 1998-07-31 2000-02-18 Shimadzu Corp 四重極質量分析装置
JP2006266774A (ja) * 2005-03-23 2006-10-05 Taiyo Nippon Sanso Corp 混合ガスの分析方法及び装置
JP2006266854A (ja) * 2005-03-23 2006-10-05 Shinku Jikkenshitsu:Kk 全圧測定電極付き四重極質量分析計及びこれを用いる真空装置
JP2008209181A (ja) * 2007-02-26 2008-09-11 Ulvac Japan Ltd 特定ガスの分圧の検出方法、及び四重極型質量分析計

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6067844A (en) * 1997-08-15 2000-05-30 Shell Oil Company Nondestructive method for detection of defects and the condition of liners in polymer-lined pipes and equipment
CN2757130Y (zh) * 2004-12-08 2006-02-08 上海永新彩色显像管股份有限公司 彩色显像管残余气体分析设备

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04160357A (ja) * 1990-10-24 1992-06-03 Hitachi Ltd ガス分圧の定量測定装置
JP2000048766A (ja) * 1998-07-31 2000-02-18 Shimadzu Corp 四重極質量分析装置
JP2006266774A (ja) * 2005-03-23 2006-10-05 Taiyo Nippon Sanso Corp 混合ガスの分析方法及び装置
JP2006266854A (ja) * 2005-03-23 2006-10-05 Shinku Jikkenshitsu:Kk 全圧測定電極付き四重極質量分析計及びこれを用いる真空装置
JP2008209181A (ja) * 2007-02-26 2008-09-11 Ulvac Japan Ltd 特定ガスの分圧の検出方法、及び四重極型質量分析計

Also Published As

Publication number Publication date
KR100985923B1 (ko) 2010-10-06
US20120216598A1 (en) 2012-08-30
CN102648410A (zh) 2012-08-22
EP2506007A2 (en) 2012-10-03
EP2506007A4 (en) 2013-06-12
WO2011065762A2 (ko) 2011-06-03

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