WO2010139300A1 - Vorrichtung und verfahren zum bestimmen von gaseigenschaften in einem geschlossenen gefäss - Google Patents
Vorrichtung und verfahren zum bestimmen von gaseigenschaften in einem geschlossenen gefäss Download PDFInfo
- Publication number
- WO2010139300A1 WO2010139300A1 PCT/DE2010/000600 DE2010000600W WO2010139300A1 WO 2010139300 A1 WO2010139300 A1 WO 2010139300A1 DE 2010000600 W DE2010000600 W DE 2010000600W WO 2010139300 A1 WO2010139300 A1 WO 2010139300A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- plasma
- controller
- plasma generator
- closed vessel
- vessel
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
Definitions
- the invention relates to a device for non-destructive 5 determining gas properties in a closed vessel, an associated method and a vessel, 'which -was treated with the method
- the invention relates to a device for non-destructive determination of gas properties in a closed drum, the device comprising a plasma generator and plasma analyzing detection means, wherein the plasma generator is adapted to receive the plasma within the closed vessel generated and the detection device is designed so that the plasma generated by the plasma generator is detectable.
- the object of the invention is to improve the state of the art.
- the object is achieved by a device for the nondestructive determination of gas properties in a closed vessel, wherein the device comprises a plasma generator and a plasma analyzing detection device, wherein the plasma generator is designed such that the plasma inside the closed vessel. It is generated, and the detection device is designed so that the plasma generated by the plasma generator is detectable, wherein the device comprises a controller which controls the plasma generator based on a measured by the detection means such that an energy input for generating the plasma can be influenced, in particular minimizable, is.
- the "closed vessel” is characterized by the fact that it has a cavity in which a gas is introduced with a certain pressure, furthermore, certain products can be introduced into the vessel is transparent to the signal which is picked up by the detection device.
- the "plasma generator” may be controlled by a microcontroller, which is able to control the energy input for generating the plasma and thus can change this energy input in terms of height and sequence defined.
- the plasma generator can be designed as a high-frequency generator, Tesla transformer, microwave generator and / or laser. As a result, alternatives to plasma generation can be provided.
- the high-frequency generator and the Tesla transformer generate a high voltage
- the laser light can be focused in such a way that a plasma forms in the vessel. This may advantageously result in avoiding damage to the product which is in the closed vessel.
- the detection device can have optics, by means of which the plasma can be visually analyzed.
- the detection device may comprise an intensity sensor and / or a photodiode and / or a location sensor and / or a spectrometer, in particular with spatially resolving properties, whereby a plasma signal captured by the optics can be transformed into an electrical variable.
- both the intensity of the signal, the (plasma) signal to be analyzed and the place of formation of the plasma can be determined.
- the energy input can be influenced.
- the controller can be used as P controller, I controller, D controller, 2-point controller, fuzzy controller or PID controller be designed.
- a controller is advantageously deposited as an electronic component, in particular as FPGA (Field Programmable Gate Array), or implemented on a suitable microprocessor by means of a digital signal processing algorithm.
- the device may comprise the closed vessel, wherein the closed vessel is designed in particular transparent.
- optically detectable signals can be received and / or diverted outside within the closed vessel by the detection device.
- the transparent region described here encompasses both the visible region and the ultraviolet and near infrared regions.
- the vessel may have a gas pressure of from about 0.1 mbar to about 1000 mbar, in particular between 1 mbar and 100 mbar. Depending on the selection, the plasma can thus be generated with a lower or higher energy input.
- the electrical quantity can be transformed into a dispensable value, the dispensable value in particular representing a quality measure.
- the object can be achieved by a method for nondestructive determination of gas properties in a closed vessel, wherein a device is used, as previously described, wherein an energy input, which is used in particular for generating the plasma, is optimized by one or more regulations.
- the device can also provide a method for nondestructive determination of gas properties in a closed vessel.
- the regulation of the energy input by means of the plasma generator can be carried out as an actuator.
- the control can intervene on the level of the high voltage or the intensity of the laser beam or the repetition rate of a pulsed laser.
- the regulation of the plasma generator can be carried out on the basis of a manipulated variable, in particular on the basis of an amount and / or on the basis of a pulse frequency and / or on the basis of a time duration.
- control can use one or more parameters to determine a manipulated variable. For example, different frequency ranges can be used for regulation in a determined spectrum.
- an additional regulation for a place of energy input in a closed vessel can take place.
- the regulation can intervene in such a way that the place of formation of the plasma is changed and thus, for example, material damage to the vessel or to the product is avoided or reduced.
- one or more parameters can be permanently stored by a user in a memory of the control.
- a quality measure can be determined. This quality measure is determined in particular when a plasma is formed in the vessel to be examined. Thus, a quality control can be carried out, in which the quality of the internal pressure can be determined on the basis of the quality measure.
- the quality metric can be determined at the point where the energy input is minimal. This point is given in particular when the existence of the plasma is just definable.
- the object is achieved by a vessel which has a closed vessel area, wherein the gas pressure has been optimized by means of the previously presented method.
- a closed vessel area is, in particular, a vascular area in which a gas is introduced, which essentially can not escape from this area.
- FIG. 1 shows a schematic representation of the inventive device.
- FIG. 1 In a closed region 102 of a transparent vessel 101, a product 103 to be transported and a gas are introduced.
- a plasma generator 105 is designed as a Tesla transformer. Alternatively, this may also be a pulsed laser.
- Via a conductive connection 106 a transparent vessel 101 is subjected to a high voltage, so that a plasma 107 is formed.
- the optical signal of the plasma is directed via a lens 109 onto a photodiode 110.
- the signal of the photodiode 1 10 is forwarded via a line 1 11 to a controller 113.
- the controller 1 13 is a signal conditioning and the determination of a control signal, which is forwarded by means of a line 1 15 to the plasma generator 105.
- the plasma generator 105 reduces or increases the energy input, which is necessary for the generation of the plasma 107, on the basis of the actuating signal.
- the product 103 to be transported is stored together with an inert gas.
- the gas pressure of the inert gas is about 10 mbar, with pressures between lmbar and 300mbar are possible.
- the plasma generator 105 generates a high voltage during operation. This high voltage is applied to the transparent vessel 101. If the high voltage is not yet sufficient for the generation of the plasma, then the high voltage which the plasma generator is produced via the controller 113 testifies, as long as increased, until the plasma forms. The detection of the plasma takes place in each case via the photodiode 110, since the plasma generates a characteristic glow.
- the determined value of the high voltage represents the internal pressure for a given gas mixture in a given vessel, so that it can be used both for a good-bad decision and for a quantitative determination of the internal pressure.
- This internal pressure can be a measure of the quality of the object to be examined.
- the product can be removed from the batch.
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- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Life Sciences & Earth Sciences (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
Claims
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE112010002259T DE112010002259A5 (de) | 2009-06-03 | 2010-05-31 | Vorrichtung und Verfahren zum Bestimmen von Gaseigenschaften in einem geschlossenen Gefäß |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009023685 | 2009-06-03 | ||
DE102009023685.6 | 2009-06-03 | ||
DE102010004083.5 | 2010-01-06 | ||
DE102010004083A DE102010004083A1 (de) | 2009-06-03 | 2010-01-06 | Vorrichtung zum zerstörungsfreien Bestimmen von Gaseigenschaften in einem geschlossenen Gefäß, zugehöriges Verfahren und Gefäß, welches mit dem Verfahren bearbeitet wurde |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010139300A1 true WO2010139300A1 (de) | 2010-12-09 |
Family
ID=43049431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2010/000600 WO2010139300A1 (de) | 2009-06-03 | 2010-05-31 | Vorrichtung und verfahren zum bestimmen von gaseigenschaften in einem geschlossenen gefäss |
Country Status (2)
Country | Link |
---|---|
DE (2) | DE102010004083A1 (de) |
WO (1) | WO2010139300A1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107843387A (zh) * | 2017-10-30 | 2018-03-27 | 佛山市蓝瑞欧特信息服务有限公司 | 密闭容器的真空识别系统 |
CN108663162A (zh) * | 2018-06-27 | 2018-10-16 | 佛山市金净创环保技术有限公司 | 平移式密闭容器真空度检测系统 |
CN112082691A (zh) * | 2020-08-24 | 2020-12-15 | 西安交通大学 | 基于激光等离子体成像的低气压测量方法及装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996002835A1 (en) * | 1994-07-15 | 1996-02-01 | Eli Lilly And Company | Method and apparatus for non-destructive elemental analysis of the headspace of a sealed container |
WO2002059013A1 (en) * | 2001-01-24 | 2002-08-01 | Casect Limited | An analysable pacage, an analysis system and a method for analysing a packed product |
DE102006027968A1 (de) | 2005-11-01 | 2007-09-06 | ITZ Innovative Technologien Zülpich GbR (vertretungsberechtigte Gesellschafter: Herr Wilfried Wilhelm Brings | Vorrichtung zum Prüfen eines Gases, Verwendung einer solchen Vorrichtung und Verfahren zum Umrüsten einer Produktionsanlage |
JP2008133518A (ja) * | 2006-11-29 | 2008-06-12 | Nissan Motor Co Ltd | プラズマ窒化制御方法及びプラズマ窒化システム |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19505104A1 (de) * | 1995-02-15 | 1996-08-22 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Verfahren und Anordnung zur Bestimmung der Reinheit und/oder des Drucks von Gasen für elektrische Lampen |
EP1018088A4 (de) * | 1997-09-17 | 2006-08-16 | Tokyo Electron Ltd | Vorrichtung und verfahren zur überwachung und regelung von gas plasma prozessen |
DE102005015587B4 (de) * | 2005-04-05 | 2009-12-24 | Von Ardenne Anlagentechnik Gmbh | Verfahren und Anordnung zur Stabilisierung eines Arbeitspunktes von reaktiven, plasmagestützten Vakuumbeschichtungsprozessen |
-
2010
- 2010-01-06 DE DE102010004083A patent/DE102010004083A1/de not_active Withdrawn
- 2010-05-31 DE DE112010002259T patent/DE112010002259A5/de not_active Withdrawn
- 2010-05-31 WO PCT/DE2010/000600 patent/WO2010139300A1/de active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996002835A1 (en) * | 1994-07-15 | 1996-02-01 | Eli Lilly And Company | Method and apparatus for non-destructive elemental analysis of the headspace of a sealed container |
WO2002059013A1 (en) * | 2001-01-24 | 2002-08-01 | Casect Limited | An analysable pacage, an analysis system and a method for analysing a packed product |
DE102006027968A1 (de) | 2005-11-01 | 2007-09-06 | ITZ Innovative Technologien Zülpich GbR (vertretungsberechtigte Gesellschafter: Herr Wilfried Wilhelm Brings | Vorrichtung zum Prüfen eines Gases, Verwendung einer solchen Vorrichtung und Verfahren zum Umrüsten einer Produktionsanlage |
JP2008133518A (ja) * | 2006-11-29 | 2008-06-12 | Nissan Motor Co Ltd | プラズマ窒化制御方法及びプラズマ窒化システム |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107843387A (zh) * | 2017-10-30 | 2018-03-27 | 佛山市蓝瑞欧特信息服务有限公司 | 密闭容器的真空识别系统 |
CN108663162A (zh) * | 2018-06-27 | 2018-10-16 | 佛山市金净创环保技术有限公司 | 平移式密闭容器真空度检测系统 |
CN112082691A (zh) * | 2020-08-24 | 2020-12-15 | 西安交通大学 | 基于激光等离子体成像的低气压测量方法及装置 |
Also Published As
Publication number | Publication date |
---|---|
DE112010002259A5 (de) | 2013-01-03 |
DE102010004083A1 (de) | 2010-12-09 |
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