WO2010137138A1

WO2010137138A1 - Piping joint and test head with the same

Info

Publication number: WO2010137138A1
Application number: PCT/JP2009/059705
Authority: WO
Inventors: 孝英西浦
Original assignee: 株式会社アドバンテスト
Priority date: 2009-05-27
Filing date: 2009-05-27
Publication date: 2010-12-02
Also published as: TW201042188A

Abstract

A bent flow path (72) of a piping joint (70) is provided with a bent portion (722) having a cross-sectional area S2 (= pr2 2) greater than the cross-sectional area S1 (= pr1 2) of a first opening (72a). The bent portion (722) is provided with a projection (74) projecting toward the first opening (72a).

Description

Piping joint and test head equipped with the same

The present invention relates to a pipe joint for bending a flow path for circulating a refrigerant or the like in an electronic component test apparatus, and a test head equipped with the same.

A test head of an electronic component test apparatus for testing electronic components such as semiconductor integrated circuit elements accommodates a pin electronics card on which a number of various test devices constituting a high-frequency circuit for testing and a power supply circuit are mounted. ing. Some of these test devices become hot due to self-heating. Therefore, a technique for cooling a test device by supplying a coolant to a water jacket mounted on a pin electronics card is conventionally known (see, for example, Patent Document 1).

JP 2001-168666 A

Generally, since the space in the test head is limited, it may be necessary to start up the flow path for circulating the refrigerant at a steep angle. However, since the pressure of the refrigerant is greatly lost at the bent portion of the flow path, there is a problem that sufficient cooling performance may not be ensured.

The problem to be solved by the present invention is to provide a pipe joint capable of reducing the pressure loss of the fluid at the bent portion of the flow path, and a test head including the same.

(1) According to the present invention, there is provided a pipe joint having a bent flow path that bends the flow of fluid, and includes a bent flow path that communicates the first opening and the second opening. A pipe joint having a cross-sectional area larger than a cross-sectional area of the first opening and having a protruding portion protruding toward the first opening is provided at the bent portion. (See claim 1).

Although not particularly limited in the above invention, the bent flow path is preferably bent at 90 ° or more at the bent portion (see claim 2).

Although not particularly limited in the above invention, it is preferable that the protrusion has a tapered surface that tapers toward the first opening (see claim 3).

Although not particularly limited in the above invention, it is preferable that the projecting portion has a cone shape projecting toward the first opening (see claim 4).

Although not particularly limited in the above invention, the bent flow path includes a first straight pipe portion that communicates the first opening and the bent portion, and a second straight passage that communicates the second opening and the bent portion. It is preferable that the protruding portion protrudes in a direction substantially parallel to the first straight tube portion (see claim 5).

Although not particularly limited in the above invention, it is preferable that the protruding portion is disposed coaxially with the first straight pipe portion (see claim 6).

Although not particularly limited in the above invention, it is preferable that the bent portion is arranged coaxially with the first straight pipe portion (see claim 7).

Although not particularly limited in the above invention, it is preferable that a portion of the inner wall surface of the bent portion that faces the protruding portion is substantially parallel to the tapered surface of the protruding portion (see claim 8).

Although not particularly limited in the above invention, it is preferable that an adjustment mechanism for adjusting the protruding amount of the protruding portion at the bent portion is provided (see claim 9).

According to the present invention, a plurality of water jackets mounted on a pin electronics card, a branch pipe connected to the plurality of water jackets via a branch pipe, and the above-described pipe connected to the branch pipe via a connection pipe A test head is provided (refer to claim 10).

In the present invention, the cross-sectional area of the bent portion is made larger than the cross-sectional area of the first opening, and the protruding portion that protrudes toward the first opening is provided in the bent portion. Loss can be reduced.

FIG. 1 is a schematic cross-sectional view showing an electronic component testing apparatus according to an embodiment of the present invention. FIG. 2 is a schematic sectional view of the test head taken along line II-II in FIG. FIG. 3 is a plan view of the inside of the test head as viewed along the line III-III in FIG. FIG. 4 is a block diagram showing the configuration of the device cooling apparatus in the embodiment of the present invention. FIG. 5 is a front view showing the branch pipe unit in the embodiment of the present invention. FIG. 6 is a plan view of the branch pipe unit shown in FIG. FIG. 7 is a side view of the branch pipe unit shown in FIG. FIG. 8 is a plan view showing a pipe joint in the embodiment of the present invention. 9 is a cross-sectional view taken along line IX-IX in FIG. 10 is a rear view of the pipe joint shown in FIG. FIG. 11 is a side view showing a first modification of the second member in the embodiment of the present invention. FIG. 12 is a cross-sectional view showing a second modification of the second member in the embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

1 is a schematic cross-sectional view showing an electronic component testing apparatus according to the present embodiment, FIG. 2 is a schematic cross-sectional view of a test head taken along line II-II in FIG. 1, and FIG. 3 is taken along line III-III in FIG. It is the top view which looked at the inside of a test head.

As shown in FIG. 1, the electronic component test apparatus in the present embodiment includes, for example, a handler 1 for handling an electronic device under test (DUT: DeviceＵUnder Test), and a test head 10 electrically connected to the DUT. And a tester body (main frame) 2 for sending a test signal to the DUT via the test head 10 and executing the DUT test. This electronic component testing apparatus tests the electrical characteristics and the like of a DUT in a state where a high-temperature or low-temperature thermal stress is applied to the DUT, and classifies the DUT according to the test result.

As shown in FIG. 1, a socket 11 that is electrically connected to the DUT during a test is provided on the top of the test head 10. The socket 11 faces the inside of the handler 1 through an opening 1 a formed in the handler 1, and the DUT conveyed in the handler 1 is pressed against the socket 11. As the handler 1, a heat plate type or a chamber type can be used.

The socket 11 has a large number of contact pins (not shown) that come into electrical contact with the input / output terminals of the DUT, and is mounted on the socket board 12 as shown in FIG. The socket board 12 is electrically connected to the performance board 14 via a cable 13 or the like.

As shown in FIGS. 2 and 3, a plurality of (12 in the example shown in the figure) pin electronics cards 20 are accommodated in the test head 10, and the performance board 14 described above includes the connector 15 and the like. Via the pin electronics card 20. Each pin electronics card 20 is connected to the tester body 2 via the cable 16 shown in FIG. The number of pin electronics cards 20 is not particularly limited to the above number.

The pin electronics card 20 includes a plurality of test devices 21 used for the DUT test and a substrate 22 on which the test devices 21 are mounted on both sides. Specific examples of the test device 21 include, for example, a high-frequency circuit incorporating an LSI or the like for handling a test signal, a power supply circuit incorporating a switching regulator or the like for supplying test power to the DUT, or the like. It can be illustrated. Moreover, as a specific example of the board | substrate 22, a printed circuit board comprised from a glass epoxy resin etc., a glass substrate, a ceramic substrate etc. can be illustrated, for example. A water jacket 90 for cooling the test device 21 with a refrigerant is mounted on both sides of the pin electronics card 20.

FIG. 4 is a block diagram showing the configuration of the device cooling apparatus in the present embodiment.

Furthermore, the electronic component test apparatus according to the present embodiment includes a device cooling apparatus 30 for cooling the test device 21 mounted on the pin electronics card 20. As shown in FIG. 4, the device cooling apparatus 30 includes a water jacket 90 mounted on each pin electronics card 20, a chiller 40 for supplying a coolant to the water jacket 90, a water jacket 90 and a chiller 40.

Piping systems

50A and 50B (see FIGS. 2 and 3 for the second piping system 50B). In addition, as a specific example of a refrigerant | coolant, the liquid excellent in electrical insulation, such as a fluorine-type inactive liquid (For example, Fluorinert (trademark) by 3M Corporation) etc., can be illustrated, for example.

The chiller 40 includes a heat exchanger 41 that cools the refrigerant, a pump 42 that pumps the refrigerant, and a pressure switch 43 that defines an upper limit of the pressure of the refrigerant. On the other hand, the first piping system 50A includes a main pipe 61 and a branch pipe unit 62 located on the upstream side of the water jacket 90, and a collecting pipe unit 82 and a main pipe 81 located on the downstream side of the water jacket 90. Yes. The chiller 40 described above is provided in the tester body 2, whereas the branch pipe unit 62, the collecting pipe unit 82, and the water jacket 90 are provided in the test head 10, and the tester body 2 and the test head 10 are connected to the main pipe 61. , 81 are connected.

FIG. 4 shows only a block diagram relating to the first piping system 50A for supplying / recovering the refrigerant to the 12 water jackets 90 located on the right side in FIG. The second piping system 50B (see FIGS. 2 and 3) for supplying / recovering refrigerant to the 12 water jackets located on the left side in FIG. 3 is also connected to the

main pipes

61 and 81, the branch pipe unit 62, and the collecting pipe unit 82. Although not shown, it is connected to the chiller 40 in the same manner as the first piping system 50A. In the second piping system 50B, the distance from the

main pipes

61 and 81 to the

units

62 and 82 is long, and a sufficient space for gently starting up the flow path can be secured. The joint 70 is not necessarily used for the branch pipe unit or the collecting pipe unit.

The refrigerant sent out by the pump 42 is cooled by the heat exchanger 41, reaches the branch unit 62 via the main pipe 61, is distributed to each branch pipe 66 by this branch unit 62, and is supplied to each water jacket 90. (Pump 42 → heat exchanger 41 → main pipe 61 → branch unit 62 → each branch 66 → each water jacket 90).

A passage is formed in each water jacket 90, and the test device 21 is cooled by the refrigerant passing through the passage directly contacting the test device 21.

The refrigerant that has passed through each water jacket 90 joins in the collecting pipe unit 82 via each branch pipe 83 and returns to the pump 42 of the chiller 40 via the main pipe 81 on the downstream side (each water jacket 90 → each branch pipe). 83 → collection pipe unit 82 → main pipe 81 → pump 42).

Next, the structure of the branch pipe unit 62 in this embodiment will be described in detail.

5 to 7 are views showing the branch pipe unit in the present embodiment, FIGS. 8 to 10 are views showing the pipe joint in the present embodiment, and FIGS. 11 and 12 are modified examples of the second member in the present embodiment. FIG.

As shown in FIGS. 5 to 7, the branch pipe unit 62 in the present embodiment includes a branch pipe 63 to which a plurality of couplers (quick fluid joints) 64 are attached, a pipe joint 70 to which the main pipe 61 is connected, and a branch. And a connecting pipe 65 that connects the pipe 63 and the pipe joint 70. A branch pipe 66 connected to the water jacket 90 is detachably attached to the coupler 64 of the branch pipe 63. The number of couplers 64 is not particularly limited, and is appropriately set according to the number of water jackets in the test head.

As shown in FIGS. 8 to 10, the pipe joint 70 in the present embodiment includes a block (substantially rectangular parallelepiped) -shaped first member 71 having a bent flow path 72, and a protruding portion inserted into the first member 71. A second member 73 having 74 and a fixing bolt 76 for fixing these

members

71 and 73 are provided.

As shown in FIGS. 8 and 9, the first surface 71a of the first member 71 is formed with a first opening 72a to which the main pipe 61 is connected. On the other hand, on the second surface 71b adjacent to the first surface 71a, a second opening 72b to which the connecting pipe 65 is connected is formed. The first opening 72 a and the second opening 72 b communicate with each other through the bent flow path 72.

Therefore, in the pipe joint 70 of the branch pipe unit 62, the refrigerant flows in from the first opening 72a, and the refrigerant flows out from the second opening 72b. On the other hand, the same pipe joint 70 is used for the collecting pipe unit 82. In this case, the refrigerant flows in from the second opening 72b and flows out from the first opening 72a.

8 and 9, a first fixing hole 711 for fixing the flange 611 of the main pipe 61 with a bolt 612 is formed in the first surface 71 a of the first member 71. Further, as shown in FIGS. 8 to 10, a second fixing hole 712 for fixing the second member 76 with a bolt 76 also on the third surface 71c located on the opposite side of the first surface 71a. Is formed. Further, as shown in the figure, a third fixing hole 713 for fixing the pipe joint 70 to the test head 10 with a bolt is formed in the fourth surface 71d located on the opposite side of the second surface 71b. Has been.

As shown in FIG. 9, the bent flow path 72 of the first member 71 includes a first straight pipe portion 721, a bent portion 722, and a second straight pipe portion 723, and the bent portion At 722, it is bent substantially 90 degrees. In addition, although the bending angle of the flow path in the pipe joint is not particularly limited, the effect of reducing the pressure loss described later is more remarkable when the flow path is bent by 90 degrees or more.

The first straight pipe portion 721 is a flow path having a circular cross section with a radius r ₁ , is formed in a straight line along the normal direction of the first surface 71 a, and has a first opening 72 a and a bent portion. 722. On the other hand, the second straight pipe portion 723 is formed in a straight line along the normal direction of the second surface 71b, and communicates the second opening 72b and the bent portion 722.

The bent portion 722 is a flow path having a circular cross section having a radius r ₂ larger than that of the first straight pipe portion 721, and is disposed coaxially with the first straight pipe portion 721. An insertion hole 714 that penetrates the bent portion 722 is formed in the third surface 71 c of the first member 71 in order to insert the protruding portion 74 of the second member 73 into the bent portion 722. In the present embodiment, the insertion hole 714 has substantially the same radius r ₂ as the bent portion 722 and is formed coaxially with the bent portion 722.

Further, the stepped surface 722a from the first straight pipe portion 721 in the bent portion 722 is formed in a tapered shape so as to be substantially parallel to the conical surface 74b of the protruding portion 74. In addition, the shape of this level | step difference surface 722a should just be substantially parallel to the conical surface 74b of the protrusion part 74, for example, may have a curvilinear shape or a discontinuous cross-sectional outline (profile).

The second member 73 includes a conical protrusion 74 having a vertex 74a and a conical surface 74b, and a base 75 provided with the protrusion 74. The protrusion 74 can be inserted into the insertion hole 714 of the first member 71. In addition, through holes 75 a for inserting fixing bolts 76 are formed at the four corners of the base portion 75.

The shape of the protrusion is not particularly limited as long as it has a tapered surface that tapers toward the tip. For example, a pyramid having a vertex, a shape having a curved cross-sectional outline, a spiral shape It may be a cone with a ridgeline or a small flat surface at the tip. FIG. 11 shows a specific example of a protrusion 74 ′ having a small flat surface 74 d at the tip and a curved cross-sectional outline 74 c. The tapered surface in the present embodiment includes a surface that changes discontinuously in addition to a surface that changes continuously. Moreover, the vertex of a protrusion part should just be a vertex in a cross section, and may be a linear thing in three dimensions.

In addition, as shown in FIG. 12, the projecting portion 74 and the base portion 75 are configured by independent members, and the projecting portion 74 can be moved relative to the base portion 75 by the adjusting bolt 77, so that a bent portion is obtained. The protrusion amount of the protrusion 74 at 722 may be adjusted. By adjusting the amount of protrusion of the protrusion 74, the flow rate and flow rate of the refrigerant can be optimized.

The pipe joint 70 described above is assembled as follows. That is, with the O-ring 78 interposed between the first member 71 and the second member 73, the protruding portion 74 of the second member 73 is inserted into the insertion hole 714 of the first member 71, The second member 73 is fixed to the first member 71 with a fixing bolt 76. When the protruding portion 74 is inserted into the insertion hole 714, the protruding portion 74 protrudes into the bent portion 722. The protruding portion 74 is located coaxially with the first straight pipe portion 73, and the conical surface of the protruding portion 74. 74 a faces the step surface 722 a of the bent portion 722.

In the pipe joint 70 assembled as described above, the cross-sectional area S ₂ (= πr ₂ ² ) of the bent portion 722 is larger than the cross-sectional area S ₁ (= πr ₁ ² ) of the first straight pipe portion 721. (S ₂ > S ₁ ). For this reason, when the refrigerant enters the bent portion 722 from the first straight pipe portion 721, the flow rate of the refrigerant decreases, so that the pressure loss of the refrigerant in the bent portion of the flow path can be reduced. On the other hand, if the nominal cross-sectional area of the bent channel is constant, the effective channel cross-sectional area decreases due to the vortex or stagnation that occurs after passing through the bent part, so the flow velocity increases and a large pressure loss occurs. . Incidentally, the sectional area _{S 2} of the bent portion 722 is preferably more than four times the cross-sectional area _{S 1} of the first straight pipe portion _{_{721 (S 2 ≧ 4 × S}} 1).

Further, in the present embodiment, since the protruding portion 74 protrudes from the bent portion 722 that is largely bent in the bent flow path 72, the streamline of the refrigerant flowing from the first straight pipe portion 721 can be smoothed, The loss of energy can be reduced and the generation of vortex and stagnation can be suppressed.

Further, by making the step surface 722a of the bent portion 722 substantially parallel to the conical surface 74b of the projecting portion 74, it is possible to secure as large a gap as possible between the step surface 722a and the conical surface 74b.

The embodiment described above is described for easy understanding of the present invention, and is not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

For example, the above-described piping joint may be applied to a piping system of a temperature adjusting device that supplies a refrigerant or a heating medium to a heat sink that contacts the DUT and controls the temperature of the DUT.

DESCRIPTION OF SYMBOLS 10 ... Test head 20 ... Pin electronics card 30 ... Device cooling device 40 ...

Chiller

50A, 50B ... 1st, 2nd piping system 61 ... Main pipe 62 ... Branch pipe unit 63 ... Branch pipe 65 ... Connecting pipe 70 ... Pipe joint 71 ... 1st member 72 ... Flow path 72a ... 1st opening 72b ... 2nd opening 721 ... 1st straight pipe part 722 ... Bending part 722a ... Step surface 723 ... 2nd straight pipe part 73 ... 2nd Member 74 ... Projection 74b ... Conical surface 90 ... Water jacket

Claims

A pipe joint having a bent flow path that bends the flow of fluid and having a bent flow path that communicates the first opening and the second opening;
The bent portion has a cross-sectional area larger than a cross-sectional area of the first opening;
A pipe joint, wherein the bent portion is provided with a protruding portion that protrudes toward the first opening.
The pipe joint according to claim 1,
The pipe joint, wherein the bent flow path is bent at 90 degrees or more at the bent portion.
A pipe joint according to claim 1 or 2,
The projecting portion has a tapered surface that tapers toward the first opening.
A pipe joint according to any one of claims 1 to 3,
The said joint part has a cone shape which protrudes toward the said 1st opening, The piping coupling characterized by the above-mentioned.
A pipe joint according to any one of claims 1 to 4,
The bent channel is
A first straight pipe portion communicating the first opening and the bent portion;
A second straight pipe portion that communicates the second opening and the bent portion;
The pipe joint according to claim 1, wherein the protrusion protrudes in a direction substantially parallel to the first straight pipe portion.
The pipe joint according to claim 5 or 6,
The projecting portion is disposed on the same axis as the first straight pipe portion.
A pipe joint according to claim 6,
The pipe joint according to claim 1, wherein the bent portion is arranged coaxially with the first straight pipe portion.
A pipe joint according to any one of claims 1 to 7,
A pipe joint, wherein a portion of the inner wall surface of the bent portion that faces the protruding portion is substantially parallel to a tapered surface of the protruding portion.
A pipe joint according to any one of claims 1 to 8,
A piping joint comprising an adjusting mechanism for adjusting a protruding amount of the protruding portion at the bent portion.
Multiple water jackets attached to the pin electronics card,
A branch pipe connected to the plurality of water jackets via a branch pipe;
10. A test head comprising: the pipe joint according to claim 1 connected to the branch pipe via a connection pipe.