電子零件測試裝置中 接頭以及具有該配管 Ο 0 201042188 六、發明說明： 【發明所屬之技術領域】 本發明，得、有關於一種用於將在 之冷媒等循環之流路加以彎曲之配管 接頭之測試頭。 【先前技術】 在用於測試半導體積體電路元件等之電子零件之電子 零件測試裝置之測試頭處 上〆 另孢鋼電子卡，前述插銷 電子卡m有多數構成測試用高頻電路或電源回路之 各種測㈣置。在這種測試用裝置t，有些會藉由本身 發熱會產生兩溫。因士卜，益山 藉由使冷媒供給到組裝在插銷電 子卡上之水夾層，將測試用裝置加以冷卻之技術係自先前 以來即眾所周知（例如參照專利文獻1)。 【先行技術文獻】 【專利文獻】 【專利文獻1】日本特開2001_168566號公報 【發明内容】 【發明所欲解決的課題】 一般測試頭内之空間係被限制，所以’有時循環冷媒 之流路必須使用报急峻之角度。但是，在該流路之彎曲部 分’冷媒壓力會損失很大，所以，有無法充分確保冷卻性 月€之問題。 3 201042188 本發明所欲解決之課題’係提供一種能減少流路彎曲 部分中之流體壓力損失之配管接頭以及具有 測試頭。 伐坪< 【用於解決課題的手段】 ⑴當使用本發明時，係提供一種配管接頭， 2曲流路，前述-曲流路，係具有使流體曲： :::曲:：…及第2開，連通，其特= L 邛刀，係具有比前述第1開口之剖面積還要女 :面積，在前述彎曲部分處，設有往前述 \之 突出部（參照申請專利範圍第1項）。 汗口大出之 (2 )在上述發明中’雖然無特別限定” 述弯曲流路，係在前述彎曲部分.彎折⑽声、—疋，最好前 專利範圍第2項）。 J^以上（參照申請 (3)在上述發明中，雖然無特別 述突出部，係朝向前述第i開口具有 ’ ^，最好前 照申請專利範圍第3項）。 次纖細之推鈸面（參 、（4)在上述發明中，雖然無特 〜 述突出部，係具有朝向前述第1開口：： ’但是’最好前 照申請專利範圍第4項）。 次出之錐體形狀（參 、…（5)在上述發明中，雖然無 :了 =路，係具有第1直管部分及二但是，最好前 官部分，係將前述第i開D與4直管部分，前述 :’前述第2直管部分，係將前述第广曲部分加以連 刀加以連通’前述突出 開D與前述彎曲部 係彺與前迷第丨直管部分實質 201042188 上平行之方向突出（參”請專利範圍第5項）。The connector of the electronic component testing device and the piping Ο 0 201042188 VI. Technical Field of the Invention: The present invention relates to a pipe joint for bending a flow path in which a refrigerant or the like is circulated. Test head. [Prior Art] On the test head of an electronic component testing device for testing an electronic component such as a semiconductor integrated circuit component or the like, a sprung steel electronic card is mounted, and the aforementioned plug electronic card m has a plurality of high frequency circuits or power supply circuits for testing. Various measurements (four) set. In this type of test device t, some will generate two temperatures by heating themselves. INSUB, Yoshiyama The technique of cooling the test device by supplying the refrigerant to the water interlayer assembled on the plug-in electronic card has been known since the prior art (for example, refer to Patent Document 1). [Patent Document] [Patent Document 1] JP-A-2001-168566 [Summary of the Invention] [Problems to be Solved by the Invention] The space in the general test head is limited, so that the flow of the refrigerant may be circulated. The road must be used to report the sharp angle. However, the refrigerant pressure in the curved portion of the flow path is greatly lost, so that there is a problem that the cooling performance cannot be sufficiently ensured. 3 201042188 The problem to be solved by the present invention is to provide a pipe joint capable of reducing fluid pressure loss in a curved portion of a flow path and having a test head.伐坪< [Means for Solving the Problem] (1) When the present invention is used, a piping joint is provided, and a curved path is provided, and the above-mentioned meandering path has a fluid trajectory: ::: 曲::... The second opening and the connecting, the special = L boring tool has a female sectional area larger than the sectional area of the first opening, and the protruding portion is provided at the curved portion (refer to the patent application scope 1 item). (2) In the above invention, 'there is no particular limitation.' The curved flow path is in the curved portion. The bending (10) sound, 疋, preferably the second item of the prior patent range). (Reference (3) In the above invention, although the protruding portion is not particularly described, it has a '^ in the ith opening, and it is preferable to apply the third item in the patent application." 4) In the above invention, the protruding portion is not provided, and has a first opening toward the first opening:: 'But' is preferably the fourth item of the patent application scope.) The shape of the secondary cone (see, ... 5) In the above invention, although there is no = road, the first straight pipe portion and the second portion are preferably the front portion, and the first i-open D and the straight pipe portion are the aforementioned: 'the aforementioned second In the straight pipe portion, the above-mentioned wide curved portion is connected with a knife to connect the 'the above-mentioned protruding opening D and the above-mentioned curved portion system and the front part of the first straight portion of the straight pipe portion 201042188 in the direction of parallel (refer to the patent scope 5th) item).
⑷在上述發明中，雖然無特別限 述突出部，係與前述笫彳# $ # Y —疋取好月，J 利範圍第6項）。1直官部分同軸配置（參照申請專 (7)在上述發明中’雖然無特別限 述彎曲部分，係與前述fl直管部分同 ：：:: 專利範圍第7項）。 直〔參照申凊 Ο(4) In the above invention, although the protruding portion is not particularly limited, the above-mentioned 笫彳#$#Y--takes a good month, and the J-profit range is the sixth item). 1 Coaxial configuration of the straight part (refer to the application (7) in the above invention] Although the curved portion is not particularly limited, it is the same as the above-mentioned straight portion of the fl: :::: Patent No. 7). Straight [refer to Shen Hao Ο
(8 )在上述發明中，雖然無特別限定β · 前述彎曲部分内壁面中&一疋，最好在 前述突出部之推鈸面=部相向之部分，係與 項）。 質上千订（參照申請專利範圍第8 (9 )在上述發明中 絲# 知月中雖然無特別限定，但是，最好其 具有調整機構，前述調整機構 、 丹你埘剛述彎曲部分甲之前 述突出部之突出量加以調整（春 宜1翏照申睛專利範圍第9項）。 1 〇)田使用本發明時，係提供一種測試頭，其具有 複數水夹層、分歧管及上述之配管接頭，前述複數水夾層， 係被組裝在插銷雷早士 μ ‘ 于卞上 則述分歧管，係透過支管被連 結在複數之前述水夹層上，前述配管接頭，係透過連結管 被連結在前述分歧管上（參照申請專利範圍第1〇項）。 【發明效果】 在本發明中，使彎曲部分之剖面積比第1開口之剖面 積還要大’同0寺，在該彎曲部分設置往第i開口突出之突 出部，所以，能減少彎曲部分中之流體之壓力損失。 5 201042188 【實施方式】 根據圖面說明本發明之實施形態。 第1圖係表示本發明實施形態之電子零件測試裝置之 剖面示意圖；第2圖係沿著第1圖I I-Ι I線之測試頭剖面 示意圖；第3圖係沿著第2圖mqn線觀看測試頭内部 之俯視圖。 本實施形態中之電子零件測試裝置，如第1圖 係例如由抓取包圍被測試電子零件（DUT : Device under(8) In the above invention, the inner wall surface of the curved portion is not particularly limited, and it is preferable that the pushing portion of the protruding portion is opposite to the portion of the protruding portion. In the above-mentioned invention, the wire # 知月 is not particularly limited, but it is preferable to have an adjustment mechanism, and the above-mentioned adjustment mechanism, Dan Youzhen just described the curved part A The amount of protrusion of the above-mentioned protruding portion is adjusted (Spring 9 1 翏 申 专利 专利 专利 专利 第 第 第 第 。 。 。 。 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用 使用The pipe joint, the plurality of water interlayers are assembled on the plug, Lei Xianshi, and the branch pipe is connected to the plurality of water interlayers through the branch pipe, and the pipe joint is connected through the connecting pipe On the above-mentioned branch pipe (refer to the first paragraph of the patent application scope). [Effect of the Invention] In the present invention, the cross-sectional area of the curved portion is made larger than the sectional area of the first opening, and the protruding portion that protrudes toward the i-th opening is provided in the curved portion, so that the curved portion can be reduced. The pressure loss of the fluid in the medium. 5 201042188 [Embodiment] An embodiment of the present invention will be described based on the drawings. 1 is a schematic cross-sectional view showing an electronic component testing apparatus according to an embodiment of the present invention; FIG. 2 is a cross-sectional view of the test head taken along line I-I of FIG. 1; and FIG. 3 is a line along the mqn of FIG. View the top view of the inside of the test head. In the electronic component testing device of this embodiment, as shown in Fig. 1, for example, the electronic component to be tested is surrounded by the grab (DUT: Device under)
Test)之處理器1、與DUT電性連接之測試頭1 〇、以及透 過測試頭ίο送出測試訊號到DUT ,且執行DUT之測試之測 试本體（主架構）2所構成。前述電子零件測試裝置，係 在施加高溫或低溫之熱應力@ _之狀態下，測試順之 電氣性特性等，對應該測試結果而將DUT加以分類。 如第1圖所示’在測試頭1〇上部處，設有在測試時， ，性連接到耐之插座u。前述插座π，係透過被形成在 处理器1之開口 la’而面臨處理器i内部，在處理器i内 被搬運之DUT係被押抵到前述插座u。而且，處理器丄可 以使用熱板型或腔體型。 係雷“ 1係具有夕數接觸銷（未圖示），前述接觸銷， =&接觸到謂之輸出入端子，如第2圖所示，係1 電性2埠12°而且，前述插座埠&係透過電線13等 軍性連接到表現埠14。 予 如第2圖及第3圖所千， (如圖_ '、在郏試頭10内，收容有複數 丁之例如12塊）之插鎖電子卡.前述表現璋Η， 201042188 係透過連接器15等電性連接到插銷電子卡2〇。又，各才 鎖電子卡20,係透過^圖所示之電線16，被連接到測： 本體2。而且，插鎖電子卡2()之塊數並不偈限於上述數量。 ❹ 插銷電子卡20,係由被使用於雨測試之複數測試用 裝置21、以及兩面組裝有前述測試用裝置21之基板22所 構成。測制裝置21之具體例，可以例示例如為了處理測 =訊號，而被組入LSI等之高頻回路，或者$ 了供給測 試用電力@ DUT，而被組入開關調壓器等之電源回路等。 又基板22之具體例’可以例示玻璃基板或m板等。前 述插銷電子卡2。之兩面處，組裝有水夾| 9〇，前述水失 層90，係以冷媒將測試用裝置21加以冷卻。 第4圖係表示本發明實施形態之裝置冷卻褒置之構成 之方塊圖。 而且，本實施形態之電子零件測試裝置，係具有裝置 冷卻裝置30’前述裝置冷卻裝置3〇,係用於將被組裝：插 〇銷電子卡20上之測試用裝置21加以冷卻。前述裝置冷卻 裝置30,如第4圖所示，係具有水夾層9〇、冷卻器⑼及 配管系統50A，50B (關於第2配管系統5〇β請參照第2圖 及第3圖），前述水夾層9〇係分別被組裝在各插銷電子卡 20上，前述冷卻器40係用於供給冷媒至水夾層9〇，前述 配管系統50Α，_50Β係使冷媒循環在水夾層9〇與冷卻器4〇 之間。而且，冷媒之具體例，可以例式例如敗系情性液體 (例如3Μ公司製Fluor inert (註冊商標））等之電氣絕 緣性很好之液體。 7 201042188 冷卻器40,係具有冷卻冷媒之熱交換器4i、壓送冷媒 之幫浦42、以及限制冷媒壓力上限之塵力開關43。另外， 第1配管系統5°A係由主管61、分歧管單元62、集合管單 兀82及主管81所構成’前述主管61及分歧管單元62係 位於水夾層90之上游側’前述集合管單元82及主管以係 位於水夹層90之下游侧。相對於上述冷卻器4〇係設於測 試本體2,分歧管單元62、集合管單元^及水爽層㈣係 被設於測試頭1〇’測試本體2及測試頭1〇係透過主管 61，81而被連結。 而且，在第4圖中係表示關於第1配管系統50A之方 塊圖’前述第Μ管系統_係將冷媒供給/回收到在第3 圖中位於右側之12塊水夾層90。將冷媒供給/回收到在第 3圖中位於左側之12塊水失層9〇之第2配管系統5〇β(參 照第2圖及第3圖）’係也由主管61，δ1、分歧管單元以 及集合管單元82所構成，雖然無特別圖示，但是，其與第 i配管系、統50Α同樣地被連接到冷卻器4〇。而且，：前述 弟2配管系統5。"’自主管6181至各單元6282之距 離很長，能充分確保為了使流路很緩和之空間，所以， 述配管接頭70未必必須使用在分歧管單 _ 以幫浦42送出之冷媒，係在以熱交換器集4二。 透過主管61送至分歧管單元62 ’在前述分歧管單元62被 分配到各支管66，而被供給到各水夾層9〇(幫浦C今埶六 —主管61 —分歧管單元62姑支管㈣各水^ 201042188 在各水夾層9 0中形成右；s 取有通路’通過前述通路内之冷媒 係直接接觸測試用裝置21，μ 、，t # 、 错此’測試用裝置21被冷卻。 通過各水夾層90内之冷媒，係透過各支管83,在集 合官單元82合流，而且透過下游側之主管81回到冷卻器 4〇(各水夹層㈣各支管83)集合f單元82—主管8 浦 42)。 接著，詳細說明本實施形態中之分歧管單元62之構 Ο Ο 造。 第5圖〜第7圖係表示本實施形態中之分歧管單元之 圖面’第8圖〜第1G圖係表示本實施形態中之配管接頭之 圖面，第11圖及第12圖係* + 士杏能山 、 糸表不本貝施形態中之第2構件 變形例之圖面。 本實施形態中之分歧管單元62,如第5圖〜第7圖所 不’係具有安裝有複數接頭（快速流體接頭）64之分歧管 =連結有主管61之配管接頭7。、以及將分歧管6:及二 二頭70加以連結之連結管65。在分歧管㈡之接頭μ 处，裴卸可能地安裝有支管 、 水夾屏9η & & 66 U支官66係被連結到 斜/ 且’接頭64之數量’係未特別限I可以 對應测試頭内之水夾層數量而適當設定。 -本實施形態中之配管接頭7〇 ’如第8圖〜第i。圖所 不，係具有彎曲流路752且 （略成 “ 方體）狀之第 、八有插入第1構件71之突出部74 73、以及將這些第i構件7 定螺拾76。 肖第2構件73加以固定之固 9 201042188 71产A 8圖及第9圖所示’在第1構件71之第1表面 / i a處，报士丄 认阳 〜成*有連結有主管61之第彳 鄰接於前逃第]“71 在 有連結管仏表面71a之第2表® 72b4，形成有連結 口 72b俜、类之第2開口咖。前述第1開口心與第2開 他係透過彎曲流路72而連通。 係自：二歧管單元62之配管接頭7°中’冷媒 外， 二…冷媒係自第2_72b流出。另 θ 隹集合官早兀82也使用同樣之配管接頭7〇 二此it形下’冷媒係自第2開口 72b流入，冷媒 弟1開口 72a流出。 目 71a 圖及第9圖所示，在第1構件71之第1表面 处糸形成有第1固定孔711 ’前述第i固定孔 :用於以螺“12來固定主管61之法蘭611。又，如第8 71c 所不，在位於第1表面&相反側之第3表面 传用處於’也形成有第2固定孔川，前述第2固定孔712, 所亍二螺栓76來固定第2構件76。而且，如相同圖面 丁 於第2表面爪相反側之第4表面71(1處 Γ成有第：固定孔713,前述第3固定孔713,係用於^ 全來使配官接頭7〇固定在測試頭丨〇上。 、 如第9圖所示，帛"籌件71之彎曲流路”， ^部分-、彎曲部請、及第2直管部請所構成: 部分722處係實質上彎曲90度。而且，配管接頭内 ^流路彎曲角度_係未特別限定，但是，當流路彎曲9〇 X以上時，減少下述壓力損失之效果很顯著。 10 201042188 第1直管部分721，係具有半徑η之圓形形狀剖面之 流路，沿著第1表面71 a之法線方向形成直線狀，將第i 開口 72a與彎曲部分722加以連通。另外，第2直管部分 723，係沿著第2表面71b之法線方向形成直線狀，將第2 開口 72b與彎曲部分722加以連通。 彎曲部分722，係具有比第1直管部分721還要大半 徑η之圓形形狀剖面之流路，與第1直管部分7 21同軸配 置。在第1構件71之第3表面He處’形成有插入孔714, 前述插入孔714，係為了使第2構件73之突出部74插入 彎曲部分722而貫穿彎曲部分722。在本實施形態中，前 述插入孔714，係具有與彎曲部分722實質上相同之半徑 η，與彎曲部分722同軸形成。 又，自前述彎曲部分722中之第1直管部分721開始 之段差面722a，係形成與突出部74之錐面74b實質上平 行之推鈸狀。而且’前述段差面722a之形狀，係只要與突 〇 出部74之錐面74b實質上平行即可，例如也可以具有曲線 狀或不連續之剖面輪廓線（pr〇file)。 第2構件73，係由具有頂點74a與錐面74b之圓錐形 =大出邛74、及被設於前述突出部74之基座部75所構成 出。P 74係可插入第i構件之插入孔ΤΗ。又，在^ 座部75之四個角落處，形成有用於插入固定螺栓76之; 孔 75a。 而且’突出部之形狀， 推鈸面形狀即可，並未特別 只要係具有愈往尖端愈纖細之 限定，例如也可以係具有頂點 201042188 ==有曲線狀剖面輪廓之形狀、具有螺旋狀棱線之 體二或者，在'端有小平坦面之物件。在第"圖中，係 例不在尖端具有小平扭 r ^ —面74d之同時，具有曲線狀剖面輪 廓線74c之突出部74，之1科如 ^ . ，、體例。而且，在本實施形態中 推鈸面處，於連續性 跫化之表面外，也包含不連續變化 之表面。又，突出部之了盲％ 員面，係只要在剖面中為頂點即可， 其係3維性之線狀物件也可以。 又，如第12圖所+ , ’、，也可以藉由使突出部74盘基座 部75為分別獨立之構件， 〃 可以糟由調整螺栓7 7，传突出 部74相對於基座部75 夕斯精此將彎曲部分了4中之突 出部74之突出量加以調整。 i猎由調整大出部74之突出詈， 能使冷媒之流速及流量最佳化。 以上說明過之配管接頭7〇，係 饿組立。亦即，在 於第1構件71與第2構件π之門人& π 〇 之間，丨裝0型環78之狀態下， 使第2構件73之突出部74插入第丄構件 、 丹丨卞（i之插入孔71 4， 以固定螺拴76使第2構件73固定在第丨M生 〜你罘1構件71上。當突 出部7 4被插入插入孔7丄4時，突出邱 -r犬出邛74係突出到彎曲部 /刀722内’前述突出部74係位於與第！直管部分73同軸 之位置，同時，突出部74之錐面74a係與彎曲部分722之 段差面722a相向。 在如上組立之配管接頭7"，彎曲部分？22之剖面積 Κ ΥΓ22)，係比第1直管部分之剖面積心（=冗 η )還要大（s2 > S!)。因此，當冷媒自 、 、 π曰第1直官部分721 進入彎曲部分7 2 2時，冷媒之流速會降彳 Τ *低，所以，能減少 12 201042188 流路之彎曲部分中之冷媒之壓損。相對於此，"曲之流 路之公稱剖面積時，在通過彎曲部分之後會產生满流 或停滯，藉此，有效流路剖面積會減少，所以，流速會增 加而產生較大麗損。而且’彎曲部分722之剖面積&，係 最好為第！直管部分72!剖面積&之4倍以上（s^4xSi)。 又’在本實施形態中’突出部74係突出到在彎曲流路 72中大幅，彎曲之彎曲部分722，所以，能使自第丄直管部 Ο 分721流入之冷媒之流線滑順，能減少能量之損失，同時 能抑制渦流或滯留。 又’使彎曲部分722之段差面722a與突出部74之錐 面7扑實質上平行，藉此，能使段差面722a與錐面了扑之 間確保較大間隔。 而且，以上說明過之實施形態，係為了容易理解本發 明而記載者，並非為了限定本發明而記載者。因此，被開 不：上述實施形態之各要素，係也包含屬於本發明之技術 〇 性範圍之全部設計變更或均等物之旨趣。 例如’也可以將上述配f接頭，適用在使冷媒或溫媒 供給到與DUT相接觸之散熱器，而控制該DUT溫度之溫度 調整裝置之配管系統上。 【圖式簡單說明】 第1圖係表示本發明實施形態之電子零件測試裝置之 剖面示意圖。 第2圖係沿著第i圖J卜n線之測試頭剖面示意圖。 13 201042188 第3圖係沿著第2圖111 _ 111線觀看測試頭内部之俯 視圖。 第4圖係表示本發明實施形態之裝置冷卻裝置之構成 之方塊圖。 第5圖係表示本發明實施形態之分歧管單元之正視 圖。 第6圖係第5圖所示分歧管單元之俯視圖。 第7圖係第5圖所示分歧管單元之側視圖。 第8圖係表示本發明實施形態中之配管接頭之俯視 圖。 第9圖係沿著第8圖Π-1X線之剖面圖。 第1 0圖係第8圖所示配管接頭之後側視圖。 第11圖係表示本發明實施形態中之第2構件第1變形 例之側視圖。 第1 2圖係表示本發明實施形態中之第2構件第2變形 例之剖面圖。 【主要元件符號說明】 10 測試頭 20 插銷電子卡 30 裝置冷卻裝置 40 冷卻器 50A 第1配管系統 50B 第2配管系統 201042188Test processor 1, a test head 1 electrically connected to the DUT, and a test body (main architecture) 2 that sends a test signal to the DUT through the test head ίο and performs a DUT test. The electronic component testing device described above tests the electrical characteristics of the high-temperature or low-temperature thermal stress @ _, and classifies the DUT according to the test result. As shown in Fig. 1, at the upper part of the test head 1 ,, it is provided at the time of testing, and is connected to the resistant socket u. The socket π is placed inside the processor i through the opening la' formed in the processor 1, and the DUT carried in the processor i is pushed to the socket u. Moreover, the processor 丄 can use a hot plate type or a cavity type. The lightning system "1 series has a circumdian contact pin (not shown), and the contact pin, =& contacts the output terminal, as shown in Fig. 2, the electrical connection is 2 埠 12 ° and the socket埠& is connected to the performance 透过14 through the wire 13 and other military. As shown in Fig. 2 and Fig. 3, (as shown in Fig. _ ', in the 郏 test head 10, for example, 12 pieces containing a plurality of Dings) The plug-in electronic card. The above performance 璋Η, 201042188 is electrically connected to the plug electronic card 2 through the connector 15. Further, each of the electronic card 20 is connected to the electric wire 16 shown in the figure. Measurement: Main body 2. Moreover, the number of blocks of the plug-in electronic card 2() is not limited to the above-mentioned number. ❹ The plug-in electronic card 20 is assembled by the plurality of test devices 21 used for the rain test, and the above-mentioned test is assembled on both sides. The substrate 22 of the device 21 is configured. The specific example of the measuring device 21 can be exemplified by being incorporated into a high frequency circuit such as an LSI for processing a measurement signal or a power supply for testing power @ DUT. A power supply circuit such as a switching regulator, etc. Further, a specific example of the substrate 22 can be exemplified as a glass substrate. a m-plate or the like. On both sides of the plug-in electronic card 2, a water clip | 9 is assembled, and the water loss layer 90 cools the test device 21 with a refrigerant. Fig. 4 shows a device according to an embodiment of the present invention. A block diagram of the structure of the cooling device. Further, the electronic component testing device of the present embodiment has the device cooling device 30', and the device cooling device 3 is used for testing the plug-in electronic card 20 to be assembled. Cooled by the device 21. The device cooling device 30 has a water interlayer 9〇, a cooler (9), and piping systems 50A and 50B as shown in Fig. 4 (refer to Fig. 2 for the second piping system 5〇β and Fig. 3), the water interlayer 9 is assembled on each of the plug electronic cards 20, and the cooler 40 is used to supply the refrigerant to the water interlayer 9, and the piping system 50Α, _50 is used to circulate the refrigerant in the water interlayer. In the case of a specific example of the refrigerant, for example, a liquid having a good electrical insulation such as a volatile liquid (for example, Fluor inert (registered trademark) manufactured by San Francisco Co., Ltd.) can be used. Cooler 40, system The heat exchanger 4i for cooling the refrigerant, the pump 42 for pumping the refrigerant, and the dust switch 43 for limiting the upper limit of the refrigerant pressure. The first piping system 5°A is composed of the main pipe 61, the branch pipe unit 62, and the manifold. The damper 82 and the main pipe 81 constitute 'the main pipe 61 and the branch pipe unit 62 are located on the upstream side of the water splicing layer 90'. The concentrating pipe unit 82 and the main pipe are located on the downstream side of the water splicing layer 90. With respect to the above-described cooler 4 The test body 2 is disposed, and the branch pipe unit 62, the manifold unit, and the water layer (4) are disposed on the test head 1', the test body 2 and the test head 1 are connected through the main pipes 61, 81. Further, Fig. 4 shows a block diagram of the first piping system 50A. The first manifold system _ supplies and recovers the refrigerant to the 12 water interlayers 90 located on the right side in Fig. 3 . The second piping system 5〇β (see Fig. 2 and Fig. 3) of the 12 water loss layers 9 located on the left side in Fig. 3 is also supplied/recovered by the main pipe 61, δ1, and the manifold The unit and the collecting pipe unit 82 are configured to be connected to the cooler 4A in the same manner as the i-th piping system and the system 50, unless otherwise specified. Further, the aforementioned second piping system 5 is used. "'The distance from the main pipe 6181 to each unit 6282 is very long, and the space for the flow path is sufficiently ensured, so that the pipe joint 70 does not necessarily have to be used in the manifold pipe _ the refrigerant sent by the pump 42 In the heat exchanger set 4 two. It is sent to the branch pipe unit 62 through the main pipe 61. The branch pipe unit 62 is distributed to each branch pipe 66, and is supplied to each water jacket 9 (the pump C is the sixth pipe - the main pipe 61 - the branch pipe unit 62 is the branch pipe (4) Each water ^ 201042188 forms a right in each water interlayer 90; s takes a passage 'through the refrigerant in the passage directly contacting the test device 21, μ, t#, and the wrong test device 21 is cooled. The refrigerant in each of the water interlayers 90 passes through the branch pipes 83, merges in the collective unit 82, and passes through the main pipe 81 on the downstream side to return to the cooler 4 (each water interlayer (four) each branch 83). 8 Pu 42). Next, the structure of the branch pipe unit 62 in the present embodiment will be described in detail. Fig. 5 to Fig. 7 are views showing the drawing of the manifold unit in the present embodiment. Figs. 8 to 1G are diagrams showing the piping joint in the present embodiment, and Figs. 11 and 12 are * + Shi Xing Neng Shan, 糸 糸 图 图 本 。 。 。 。 。 。 第 第 第 第 第 第 第 第 第 第 第The branch pipe unit 62 in the present embodiment has a branch pipe to which a plurality of joints (rapid fluid joints) 64 are attached, and a pipe joint 7 to which the main pipe 61 is connected, as in Figs. 5 to 7 . And a connecting pipe 65 connecting the branch pipe 6 and the two heads 70. At the joint μ of the branch pipe (2), the branch pipe may be installed, and the water screen 9n && 66 U branch 66 is connected to the slope / and the number of 'joints 64' is not particularly limited to I Set the number of water interlayers in the test head as appropriate. - The pipe joint 7〇' in the present embodiment is as shown in Figs. 8 to ith. In the figure, there is a curved flow path 752 and a (singularly "square"-shaped first, eight protruding portions 74 73 into which the first member 71 is inserted, and the i-th member 7 are screwed 76. The member 73 is fixed to the solid 9 201042188 71 A 8 and 9 are shown at the first surface / ia of the first member 71, and the 丄 丄 〜 成 成 成 有 有 有 有 有 有 有 有 有 彳In the second escape table of the connection pipe surface 71a, the second opening table 72b, the second opening coffee is formed. The first opening and the second opening communicate with each other through the curved flow path 72. From: the piping joint of the two manifold unit 62 is 7° in the 'refrigerant medium, and the second... the refrigerant is flowing out from the second_72b. In addition, the θ 隹 官 官 兀 兀 也 也 也 也 也 也 也 也 ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ ’ In the first surface of the first member 71, a first fixing hole 711' is formed in the first surface of the first member 71, and the ith fixing hole is for fixing the flange 611 of the main pipe 61 with a screw "12". Further, as in the case of No. 8 71c, the second surface of the first surface & the opposite side of the first surface & is also formed with a second fixing hole, the second fixing hole 712, and the second bolt 76 is fixed. 2 member 76. Further, the fourth surface 71 on the opposite side of the second surface claw is formed on the same surface as the same surface (the first fixing hole 713 is formed in the first surface, and the third fixing hole 713 is used for the second surface). The official joint 7〇 is fixed on the test head 。. As shown in Fig. 9, the 弯曲"the curved flow path of the preparation 71, ^ part-, the bending part, and the second straight pipe part are: The portion 722 is substantially bent by 90 degrees. Further, the bending angle of the flow path in the pipe joint is not particularly limited, but when the flow path is bent by 9 〇 or more, the effect of reducing the pressure loss described below is remarkable. 10 201042188 The first straight pipe portion 721 is a flow path having a circular shape cross section having a radius η, and is formed linearly along the normal direction of the first surface 71 a, and the first i The port 72a is in communication with the curved portion 722. The second straight pipe portion 723 is linearly formed along the normal direction of the second surface 71b, and communicates the second opening 72b with the curved portion 722. The curved portion 722 is A flow path having a circular cross section having a larger radius η than the first straight pipe portion 721 is disposed coaxially with the first straight pipe portion 721. An insertion hole 714 is formed in the third surface He of the first member 71. The insertion hole 714 penetrates the curved portion 722 so that the protruding portion 74 of the second member 73 is inserted into the curved portion 722. In the present embodiment, the insertion hole 714 has substantially the same radius η as the curved portion 722. And the curved portion 722 is formed coaxially with the curved portion 722. Further, the step surface 722a from the first straight tube portion 721 of the curved portion 722 is formed in a push shape substantially parallel to the tapered surface 74b of the protruding portion 74. The shape of the step surface 722a may be substantially parallel to the tapered surface 74b of the protruding portion 74, and may have a curved or discontinuous cross-sectional contour, for example, the second member 73. Has a vertex 74a and a tapered surface 74b The conical shape=large exit 74 and the base portion 75 provided on the protruding portion 74. The P 74 can be inserted into the insertion hole of the i-th member. Further, in the four corners of the seat portion 75 Wherein, the hole 75a is formed for inserting the fixing bolt 76. Moreover, the shape of the protruding portion may be a shape of the pushing surface, and it is not particularly limited as long as it has a finer tip toward the tip end, for example, it may have a vertex 201042188 = = The shape of a curved profile, the body with a spiral ridge, or the object with a small flat surface at the end. In the figure, the figure has no protruding portion 74 of the curved profile line 74c at the same time as the tip has a small flattened r ^ - face 74d, such as a ^. Further, in the present embodiment, the surface of the push surface includes a surface which is discontinuously changed outside the surface of the continuous enthalpy. Further, the blind portion of the protruding portion may be a vertex in the cross section, and may be a three-dimensional linear object. Further, as shown in Fig. 12, +, ', by making the protruding portion 74 the disk base portion 75 as separate members, the protruding portion 74 can be transmitted from the base portion 75 by the adjusting bolts 7 7 . In this case, the amount of protrusion of the protruding portion 74 in the curved portion 4 is adjusted. i Hunting optimizes the flow rate and flow rate of the refrigerant by adjusting the protrusions of the large outlet 74. The piping joints described above are 7〇, which are hungry. In other words, in the state in which the first member 71 and the second member π are connected to the π &, the protruding portion 74 of the second member 73 is inserted into the second member and the tannin (in the state in which the 0-ring 78 is attached). The insertion hole 71 4 of i is fixed to the second member 73 by the fixing screw 76. When the protruding portion 7 4 is inserted into the insertion hole 7丄4, the Qiu-r dog is protruded. The exit 74 protrudes into the curved portion/knife 722. The aforementioned protruding portion 74 is located coaxially with the first straight tube portion 73, and the tapered surface 74a of the protruding portion 74 faces the stepped surface 722a of the curved portion 722. In the above-mentioned pipe joint 7", the sectional area Κ 22 of the curved portion 22 is larger than the sectional area of the first straight pipe portion (= redundant η) (s2 > S!). Therefore, when the refrigerant from the π 曰 first straight portion 721 enters the curved portion 7 2 2 , the flow velocity of the refrigerant is lowered 彳Τ * low, so that the pressure loss of the refrigerant in the curved portion of the flow path of 12 201042188 can be reduced. . On the other hand, when the nominal cross-sectional area of the channel is curved, a full flow or stagnation occurs after passing through the curved portion, whereby the effective flow path sectional area is reduced, so that the flow velocity is increased to cause a large loss. . Further, the sectional area & of the curved portion 722 is preferably the first! The straight pipe portion 72! is more than 4 times the sectional area & (s^4xSi). Further, in the present embodiment, the projecting portion 74 protrudes into the curved portion 722 which is large and curved in the curved flow path 72, so that the flow line of the refrigerant flowing from the second straight pipe portion 721 can be smoothly slid. It can reduce the loss of energy while suppressing eddy currents or retention. Further, the step surface 722a of the curved portion 722 is substantially parallel to the tapered surface 7 of the protruding portion 74, whereby a large interval can be ensured between the step surface 722a and the tapered surface. Further, the embodiments described above are described in order to facilitate the understanding of the present invention, and are not intended to limit the present invention. Therefore, the elements of the above-described embodiments are intended to include all design changes or equivalents of the technical scope of the present invention. For example, the above-described f-joint may be applied to a piping system of a temperature adjusting device that controls the temperature of the DUT by supplying a refrigerant or a warm medium to a radiator that is in contact with the DUT. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing an electronic component testing apparatus according to an embodiment of the present invention. Figure 2 is a schematic cross-sectional view of the test head along the line i of Figure i. 13 201042188 Figure 3 shows a view of the inside of the test head along line 111 - 111 of Figure 2. Fig. 4 is a block diagram showing the configuration of a device cooling device according to an embodiment of the present invention. Fig. 5 is a front elevational view showing a branch pipe unit according to an embodiment of the present invention. Fig. 6 is a plan view of the branch pipe unit shown in Fig. 5. Figure 7 is a side view of the manifold unit shown in Figure 5. Fig. 8 is a plan view showing a pipe joint in the embodiment of the present invention. Figure 9 is a cross-sectional view taken along line Π-1X of Figure 8. Figure 10 is a side view of the piping joint shown in Figure 8. Fig. 11 is a side view showing a first modification of the second member in the embodiment of the present invention. Fig. 1 is a cross-sectional view showing a second modification of the second member in the embodiment of the present invention. [Explanation of main component symbols] 10 Test head 20 Pin electronic card 30 Device cooling device 40 Cooler 50A 1st piping system 50B 2nd piping system 201042188
61 主管 62 分歧管單元 63 分歧管 65 連結管 70 配管接頭 71 第1構件 72 流路 72a 第1開口 72b 第2開口 73 第2構件 74 突出部 74b 錐面 90 水夾層 721 第1直管部分 722 彎曲部分 722a 段差面 723 第2直管部分 1561 main pipe 62 branch pipe unit 63 branch pipe 65 connection pipe 70 pipe joint 71 first member 72 flow path 72a first opening 72b second opening 73 second member 74 projecting portion 74b tapered surface 90 water interlayer 721 first straight pipe portion 722 Curved portion 722a stepped surface 723 second straight tube portion 15