WO2010133347A4 - A nano-scale manipulator - Google Patents
A nano-scale manipulator Download PDFInfo
- Publication number
- WO2010133347A4 WO2010133347A4 PCT/EP2010/003049 EP2010003049W WO2010133347A4 WO 2010133347 A4 WO2010133347 A4 WO 2010133347A4 EP 2010003049 W EP2010003049 W EP 2010003049W WO 2010133347 A4 WO2010133347 A4 WO 2010133347A4
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- nano
- deck
- piezoelectric actuator
- manipulator according
- secured
- Prior art date
Links
- 230000008602 contraction Effects 0.000 claims abstract 4
- 239000000463 material Substances 0.000 claims 10
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 4
- 229910045601 alloy Inorganic materials 0.000 claims 4
- 239000000956 alloy Substances 0.000 claims 4
- 239000004411 aluminium Substances 0.000 claims 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 4
- 229910052782 aluminium Inorganic materials 0.000 claims 4
- 239000010936 titanium Substances 0.000 claims 4
- 229910052719 titanium Inorganic materials 0.000 claims 4
- 239000000853 adhesive Substances 0.000 claims 2
- 230000001070 adhesive effect Effects 0.000 claims 2
- 239000000696 magnetic material Substances 0.000 claims 2
- 238000004630 atomic force microscopy Methods 0.000 claims 1
- 230000001419 dependent effect Effects 0.000 claims 1
- 239000002071 nanotube Substances 0.000 claims 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20221—Translation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20264—Piezoelectric devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Manipulator (AREA)
Abstract
A nano-scale manipulator (10) comprises a mounting deck (11) and a frame (12), the deck (11) being moveably secured to the frame (12) by two flexural joints permitting movement of the deck relative to the frame in first and second respective, mutually orthogonal directions of movement. Manipulator (10) also includes at least one respective, elongate piezoelectric actuator (21, 22) for each of the flexural joints, each respective piezoelectric actuator (21, 22) being secured so as to interconnect the deck (11) and the frame (12) and being extensible and contractible in a direction that is parallel to one of the said directions of movement; and a source (23) of electrical power for causing operation of each piezoelectric actuator (21, 22). Each of the piezoelectric actuators (21, 22) also is free to flex in directions other than its direction of extension and contraction.
Claims
1. A nano-scale manipulator comprising a mounting deck and a frame, the deck being moveably secured to the frame by two flexural joints permitting movement of the deck relative to the frame in first and second respective, mutually orthogonal directions of movement; at least one respective, piezoelectric actuator for each of the flexural joints, each respective piezoelectric actuator being secured between the deck and the frame and being extensible and contractible so as to cause movement of the deck in one of the said directions; and a source of electrical power for causing operation of each respective piezoelectric actuator, each of the piezoelectric actuators also being free to flex in directions other than its direction of extension and contraction, wherein each said piezoelectric actuator is elongate and includes secured at each end thereof a respective releasable connector assembly that is relatively stiff in the direction of extension of the piezoelectric actuator and relatively flexible in directions that are perpendicular to the said direction of extension, characterised in that the manipulator includes extending from the frame in a direction parallel to a said direction of movement one or more mounting legs.
2. A nano-scale manipulator according to Claim 1 wherein the or each said mounting leg includes formed therein a further flexural joint permitting movement of the deck and frame in a third direction of movement that is mutually perpendicular to the first and second said directions; and the manipulator including one or more further piezoelectric actuators that are connectable between the frame and a further object to which the or each mounting leg is also connectable, the or each further piezoelectric actuator being extensible and contractible so as to cause movement of the deck in a direction parallel to the said third direction of movement and being free to flex in directions other than its direction of extension and contraction.
3. A nano-scale manipulator according to any preceding claim wherein the connector assembly includes an elongate connector element that is secured at one end to the piezoelectric actuator, and at the other end to an adapter member.
4. A nano-scale manipulator according to Claim 3 wherein the adapter member includes a hollow, inner portion having fixedly received therein an end of a said connector element; and a flat, exterior portion that is engageable by a clamping member so as to fix the position of the adapter and hence an end of the connector element.
l
5. A nano-scale manipulator comprising a mounting deck and a frame, the deck being moveably secured to the frame by two flexural joints permitting movement of the deck relative to the frame in first and second respective, mutually orthogonal directions of movement; at least one respective, piezoelectric actuator for each of the flexural joints, each respective piezoelectric actuator being secured between the deck and the frame and being extensible and contractible so as to cause movement of the deck in one of the said directions; and a source of electrical power for causing operation of each respective piezoelectric actuator, each of the piezoelectric actuators also being free to flex in directions other than its direction of extension and contraction, wherein each said piezoelectric actuator is elongate and includes secured at one end thereof a releasable connector assembly that is relatively stiff in the direction of extension of the piezoelectric actuator and relatively flexible in directions that are perpendicular to the said direction of extension; and a modified connector assembly secured at the other end thereof, the modified connector assembly including an elongate connector element that is secured at one end to the piezoelectric actuator and at the other end to an adapter member having a hollow, inner portion having fixedly received therein an end of a said connector element; and a cylindrical, threaded, exterior portion that is threadedly receivable in a threaded bore so as to fix the position of the adapter member and an end of the connector element.
6. A nano-scale manipulator according to any preceding claim wherein the or each said connector element is or includes a filament made from a material selected from:
• Aluminium;
• alloys including Aluminium;
· Titanium;
• Alloys including Titanium;
• Polymeric materials.
7. A nano-scale manipulator according to Claim 3 or Claim 5 or any preceding claim depending from Claim 3 or Claim 5 wherein the or each connector element is at one end secured to a said piezoelectric actuator using an adhesive material.
8. A nano-scale manipulator according to any preceding claim including one or more bores formed in the deck and/or the frame, at least one said piezoelectric actuator extending along a said bore.
2
9. A nano-scale manipulator according to any preceding claim wherein the deck and the frame are formed from a common block of material; and each flexural joint includes at least one channel formed in the material of the block so as to define one or more flexible connection leaves interconnecting the deck and the frame.
10. A nano-scale manipulator according to Claim 9 wherein at least one said leaf extends, when in the un-flexed condition, perpendicular to the direction of movement of the deck that it permits.
11. A nano-scale manipulator according to Claim 9 wherein at least one said leaf extends, when in the un-flexed condition, at a non-perpendicular angle relative to the direction of movement, of the deck, that it permits.
12. A nano-scale manipulator according to any of Claims 9 to 11 wherein one or more said flexural joint includes at least a pair of channels formed in the block of material so as to define one or more flexible connection leaves interconnecting the deck and the frame.
13. A nano-scale manipulator according to any of Claims 9 to 12 wherein each flexural joint includes three said channels that between them define two said flexible connection leaves.
14. A nano-scale manipulator according to any of Claims 9 to 13 wherein one or more said flexural joint includes five channels that between them define four said flexible connection leaves, one said channel of each such flexural joint partly defining two of the leaves.
15. A nano-scale manipulator according to any preceding claim wherein one or more of the said piezoelectric actuators is connected so as to extend and contract in a direction parallel to one of the first and second, mutually orthogonal directions.
16. A nano-scale manipulator according to any preceding claim including a kinematic path interconnecting the deck and the frame, the kinematic path including a said piezoelectric actuator and a linkage on which the said piezoelectric actuator acts when extending and/or contracting, the linkage transferring force generated in the piezoelectric actuator to cause movement of the deck in a said direction.
3
17. A nano-scale manipulator according to any preceding claim including a plurality of the mounting legs extending parallel to one another.
18. A nano-scale manipulator according to Claim 2 or any preceding claim depending from Claim 2 including respective pairs of the mounting legs having extending therebetween a respective further piezoelectric actuator.
19. A nano-scale manipulator according to Claim 2, Claim 17 or Claim 18 wherein each further flexural joint includes at least one channel formed in the material of a said mounting leg so as to define two mounting leg portions that are mutually interconnected by one or more further flexible connection leaves.
20. A nano-scale manipulator according to Claim 19 wherein the or each further leaf extends, when in the un-flexed condition, perpendicular to the said third direction of movement.
21. A nano-scale manipulator according to Claim 19 wherein each further leaf extends, when in the un-flexed condition, at a non-perpendicular angle relative to the said third direction of movement.
22. A nano-scale manipulator according to any of Claims 19 to 21 wherein each said flexural joint includes at least a pair of channels formed in the leg so as to define one or more flexible connection leaves interconnecting parts of the said leg.
23. A nano-scale manipulator according to Claim 2 or any of Claims 17 to 22 when depending from Claim 2 wherein each flexural joint includes three said channels that between them define two said flexible connection leaves.
24. A nano-scale manipulator according to any preceding claim having kinematically connected in series therewith a further manipulator permitting controlled movement in at least two mutually skewed directions.
25. A nano-scale manipulator according to Claim 24 wherein the further manipulator is secured on the deck.
26. A nano-scale manipulator according to Claim 24 or Claim 25 wherein the further manipulator is of the "stick-slip" type.
4
27. A nano-scale manipulator according to any preceding claim including secured relative to the deck a tip selected from the list including:
• an atomic force microscopy tip;
· a probing wire;
• an electron source base and tip.
28. A nano-scale manipulator according to Claim 27 when dependent from any of Claims 24 to 26 including secured to the manipulator or to the further manipulator one or more nanotubes.
29. A nano-scale manipulator according to any preceding claim, the deck and frame of which are manufactured from non-magnetic materials.
30. A nano-scale manipulator according to Claim 2 or any preceding claim, wherein the or each mounting leg is manufactured from one or more non-magnetic materials.
31. A scanning electron microscope (SEM) including secured within its vacuum chamber and operatively connected to one or more controllers via a vacuum interlock a nano-scale manipulator according to any preceding claim.
32. An SEM according to Claim 33 including a vacuum interlock via which the nano- scale manipulator is controllable.
33. An elongate, piezoelectric actuator for use in a nano-scale manipulator and including at at least one end a connector assembly that is relatively stiff in the direction of extension of the piezoelectric actuator and relatively flexible in directions that are perpendicular to the said direction of extension.
34. An actuator according to Claim 33 wherein the connector assembly includes an elongate connector element that is secured at one end to the piezoelectric actuator, and at the other end to an adapter member.
35. An actuator according to Claim 34 wherein the adapter member includes a portion having fixedly received thereat an end of a said connector element; and a flat, exterior portion that is engageable by a clamping member so as to fix the position of the adapter and hence an end of the connector element.
5
36. An actuator according to any of Claims 33 to 35 including at least one piezoelectric actuator having a said connector assembly secured at each end thereof.
37. An actuator according to any of Claims 33 to 36 including a said connector assembly secured at one end thereof; and a connector assembly secured at the other end thereof, the modified connector assembly including an elongate connector element that is secured at one end to the piezoelectric actuator and at the other end to an member, having a portion having fixedly received thereat an end of a said connector element; and a cylindrical, threaded, exterior portion that is threadedly receivable in a threaded bore so as to fix the position of the modified adapter and an end of the connector element.
38. An actuator according to any of Claims 33 to 37 wherein the or each said connector element is or includes a filament made from a material selected from:
• Aluminium;
• alloys including Aluminium;
• Titanium;
• Alloys including Titanium;
· Polymeric materials.
39. An actuator according to any of Claims 33 to 38 wherein the or each connector element is at one end secured to a said piezoelectric actuator using an adhesive material.
6
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB0908780A GB0908780D0 (en) | 2009-05-21 | 2009-05-21 | A nano-scale manipulator |
| GB0908780.0 | 2009-05-21 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| WO2010133347A2 WO2010133347A2 (en) | 2010-11-25 |
| WO2010133347A3 WO2010133347A3 (en) | 2011-01-13 |
| WO2010133347A4 true WO2010133347A4 (en) | 2011-03-10 |
Family
ID=40862779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/EP2010/003049 WO2010133347A2 (en) | 2009-05-21 | 2010-05-19 | A nano-scale manipulator |
Country Status (2)
| Country | Link |
|---|---|
| GB (1) | GB0908780D0 (en) |
| WO (1) | WO2010133347A2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102581837B (en) * | 2012-03-28 | 2014-11-26 | 中国科学院自动化研究所 | Vacuum clamping device for micro parts |
| CN103903942B (en) * | 2014-03-27 | 2015-12-02 | 华中科技大学 | A kind of multi-degree-of-freedom nanometer operating desk being applicable to nano material manipulation |
| CN107055467B (en) * | 2017-05-08 | 2019-06-04 | 中国科学院物理研究所 | It is used to prepare the vacuum transfer equipment of two-dimensional material Van der Waals hetero-junctions |
| CN107547004B (en) * | 2017-09-15 | 2018-12-28 | 山东大学 | A kind of two degrees of freedom micro-nano locating platform and application |
| CN114571458B (en) * | 2022-03-21 | 2022-11-15 | 苏州大学 | Micro-nano robot assembly track learning method based on dynamic motion elements |
| CN115008438A (en) * | 2022-06-22 | 2022-09-06 | 吉林大学 | Parallel output piezoelectric driving micro-gripper and control method thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5903085A (en) * | 1997-06-18 | 1999-05-11 | Phase Metrics, Inc. | Piezoelectric nanopositioner |
| US6346710B1 (en) * | 1998-08-31 | 2002-02-12 | Olympus Optical Co., Ltd. | Stage apparatus including displacement amplifying mechanism |
| US6848328B2 (en) * | 2001-03-09 | 2005-02-01 | Klocke Nanotechnik | Positioning unit and positioning apparatus with at least two positioning units |
| EP1880427B1 (en) * | 2005-05-12 | 2008-08-20 | Physik Instrumente (PI) GmbH & Co. KG | Miniaturized biaxial piezo actuating device |
| US7239107B1 (en) * | 2006-02-24 | 2007-07-03 | The Board Of Trustees Of The University Of Illinois | Flexure stage |
| DE102007005293A1 (en) * | 2007-01-29 | 2008-08-07 | Technische Universität Ilmenau | Device and method for micromechanical positioning and manipulation of an object |
-
2009
- 2009-05-21 GB GB0908780A patent/GB0908780D0/en not_active Ceased
-
2010
- 2010-05-19 WO PCT/EP2010/003049 patent/WO2010133347A2/en active Application Filing
Also Published As
| Publication number | Publication date |
|---|---|
| WO2010133347A2 (en) | 2010-11-25 |
| WO2010133347A3 (en) | 2011-01-13 |
| GB0908780D0 (en) | 2009-07-01 |
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