CN115008438A - Parallel output piezoelectric driving micro-gripper and control method thereof - Google Patents

Parallel output piezoelectric driving micro-gripper and control method thereof Download PDF

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Publication number
CN115008438A
CN115008438A CN202210713379.5A CN202210713379A CN115008438A CN 115008438 A CN115008438 A CN 115008438A CN 202210713379 A CN202210713379 A CN 202210713379A CN 115008438 A CN115008438 A CN 115008438A
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China
Prior art keywords
clamping
piezoelectric stack
micro
compliant mechanism
gripper
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CN202210713379.5A
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黄虎
衣春学
徐智
张霖
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Jilin University
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Jilin University
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Priority to CN202210713379.5A priority Critical patent/CN115008438A/en
Publication of CN115008438A publication Critical patent/CN115008438A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B25HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25JMANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00Micromanipulators

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  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

The invention discloses a parallel output piezoelectric driving micro-gripper and a control method thereof, belonging to the field of precision machinery. The micro-gripper comprises a flexible clamping unit, a piezoelectric stack, a pre-tightening wedge block and a base. The flexible clamping unit consists of a clamping knife, a clamping arm, an elastic sheet I, a diamond-shaped compliant mechanism and an elastic sheet II. When the clamping mechanism works, the piezoelectric stack is elongated under the excitation of an electric signal to push the rhombic compliant mechanism in the flexible clamping unit to generate y-direction stretching deformation, and the two clamping knives approach to each other under the action of the clamping arms, so that the clamping action of parallel output is completed. The invention has the advantages that: the parallel output of the clamping arm and the clamping knife is realized, meanwhile, the elastic sheets I and II with consistent rigidity are used for restraining two ends of the diamond compliant mechanism, parasitic displacement of the clamping arm along the y direction when the piezoelectric stack extends is eliminated, the precision of clamping action is improved, and the method can be used in the fields of nano science and technology, micro electro mechanical system assembly, bioengineering and the like.

Description

Parallel output piezoelectric driving micro-gripper and control method thereof
Technical Field
The invention relates to a parallel output piezoelectric driving micro-gripper and a control method thereof, belonging to the field of precision machinery. The invention solves the problem of non-output direction movement error caused by the parasitic displacement of a rotary clamping or flexible mechanism of the traditional micro-gripper. Can be used in the fields of micro-electromechanical systems such as micro-manufacturing, micro-assembly and the like.
Background
With the deep development of advanced manufacturing, bioengineering and medical micro-nano operation technologies, the demand of various fields on miniaturized objects is increasing day by day, and the characteristic size of the object is usually between dozens of micrometers and hundreds of micrometers, so that the important research point is how to accurately clamp and transfer the miniaturized objects and avoid damage to the miniaturized objects. Compared with micro-clampers based on other principles, the piezoelectric driving micro-clamper has attracted attention due to the characteristics of high output precision, large working bandwidth and no electromagnetic interference, so that great development is achieved.
However, the conventional micro-gripper drives the end part to complete the gripping action through the rotation of the gripping arm, and has the disadvantages that when an object is gripped, the gripper cannot vertically grip the object because the gripper forms a certain angle with the surface of the object, the gripper needs to provide a certain friction force to balance the object, and the object is easy to slip; and the parasitic displacement caused by the rotation motion causes the problem of reduced clamping precision in the form of output error. Therefore, the invention designs a novel flexible clamping unit which converts the extension of the piezoelectric stack into the parallel output of the clamping knife. Can combine practical application demand, combine high low level signal, control little holder, not only can realize that the stress distribution of the object of pressing from both sides is even, can also realize the parallel centre gripping of no vertical output error.
Disclosure of Invention
In order to solve the problems, the invention provides a piezoelectric driving micro-gripper with parallel output and a control method thereof.
The technical scheme adopted by the invention for realizing the purpose is as follows:
a piezoelectric driving micro-gripper with parallel output comprises a flexible clamping unit, a piezoelectric stack, a pre-tightening wedge block and a base; the flexible clamping unit consists of a clamping knife, a clamping arm, an elastic sheet I, a rhombic compliant mechanism and an elastic sheet II; the elastic sheet II, the rhombic compliant mechanism and the elastic sheet I are sequentially arranged in series in the y direction, the clamping arms are symmetrically distributed on two sides of the rhombic compliant mechanism, and the clamping knife is arranged at the tail end of each clamping arm to serve as an output mechanism; the piezoelectric stack is embedded in the diamond compliant mechanism of the flexible clamping unit through a pre-tightening wedge block; the flexible clamping unit is fixedly connected to the base through a screw; the elastic piece I and the elastic piece II are subjected to rigidity matching when the structural size is designed, so that the rigidity of the elastic piece I and the rigidity of the elastic piece II in the y direction are completely consistent.
Another object of the present invention is to provide a method for controlling a parallel output piezoelectric driven micro-gripper, comprising the steps of:
embedding a piezoelectric stack and a pre-tightening wedge block into a rhombic compliant mechanism of a flexible clamping unit in an interference fit manner, fixedly connecting the flexible clamping unit to a base through a screw, and enabling a micro-clamp holder to have two signal response states;
low level state: the excitation signal of the piezoelectric stack is at a low level, the piezoelectric stack is in an initial state at the moment, and the micro gripper is kept static;
high level state: when an excitation signal of the piezoelectric stack is at a high level, the piezoelectric stack extends to push the rhombic compliant mechanism to stretch and deform in the y direction, so that contraction movement is generated in the x direction, and the clamping knife and the clamping arm are driven by the rhombic compliant mechanism to complete parallel output clamping action; because the rigidity of the elastic sheet I is the same as that of the elastic sheet II, and the deflection of the midpoint under the action of the piezoelectric stack is the same, the clamping knife and the clamping arm cannot generate translational motion along the y direction, and parasitic displacement of the clamping action relative to the output direction is inhibited.
Fourthly, adjusting the voltage amplitude of the excitation signal to realize the regulation and control of the output stroke of the clamping knife; the duration of the excitation signal is adjusted, so that the regulation and control of the holding time of the clamping action can be realized; in practical application, excitation signals are flexibly combined according to the requirement of clamping action, and reasonable parallel output clamping action is realized.
The invention has the beneficial effects that: the structure is light, the control is simple, the parallel output of the micro-gripper can be realized by matching with simple high-low level control signals, the stress distribution of a clamped object can be improved, and the output error in the y direction can be eliminated.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic diagram of a parallel output piezoelectric driven micro-gripper according to the present invention;
FIG. 2 is a schematic structural view of a flexible clamping unit of the present invention;
FIG. 3 is a schematic diagram of the deformation of the flexible clamping unit of the present invention in two signal response states;
fig. 4 shows the displacement response of five points uniformly distributed on the clamping knife under the driving voltage of 100V.
In the figure: 1. a flexible clamping unit; 1.1, clamping a knife; 1.2, a clamping arm; 1.3, an elastic sheet I; 1.4, a rhombic compliant mechanism; 1.5, an elastic sheet II; 2. a piezoelectric stack; 3. pre-tightening the wedge block; 4. a base.
Detailed Description
The invention will be further explained below with reference to the drawings in the examples.
Referring to fig. 1 and fig. 2, the invention provides a parallel output piezoelectric driving micro gripper, which comprises a flexible gripping unit (1), a piezoelectric stack (2), a pre-tightening wedge (3) and a base (4); the flexible clamping unit (1) consists of a clamping knife (1.1), a clamping arm (1.2), an elastic sheet I (1.3), a diamond-shaped compliant mechanism (1.4) and an elastic sheet II (1.5); the elastic sheet II (1.5), the rhombic compliant mechanism (1.4) and the elastic sheet I (1.3) are sequentially arranged in series in the y direction, the clamping arms (1.2) are symmetrically distributed on two sides of the rhombic compliant mechanism (1.4), and the clamping knife (1.1) is arranged at the tail end of the clamping arm (1.2) and serves as an output mechanism; the piezoelectric stack (2) is embedded in a diamond compliant mechanism (1.4) of the flexible clamping unit (1) through a pre-tightening wedge block (3); the flexible clamping unit (1) is fixedly connected to the base (4) through a screw; the elastic piece I (1.3) and the elastic piece II (1.5) are subjected to rigidity matching when the structural size is designed, so that the rigidity of the elastic pieces I and II in the y direction is completely consistent.
Referring to fig. 3, for the deformation response condition of the flexible clamping unit in the parallel output piezoelectric driving micro-gripper provided by the invention in two signal response states, two electrical signals can be flexibly combined according to the practical application requirements to realize the control of the micro-gripper, which mainly comprises the following steps:
firstly, a piezoelectric stack (2) and a pre-tightening wedge block (3) are embedded in a rhombic compliant mechanism (1.4) of a flexible clamping unit (1) in an interference fit mode, the flexible clamping unit (1) is fixedly connected to a base (4) through a screw, and a micro-clamp has two signal response states;
low level state: the excitation signal of the piezoelectric stack (2) is at a low level, the piezoelectric stack (2) is in an initial state, and the micro gripper is kept static;
high level state: an excitation signal of the piezoelectric stack (2) is at a high level, at the moment, the piezoelectric stack (2) extends to push the rhombic compliant mechanism (1.4) to stretch and deform in the y direction, so that contraction movement is generated in the x direction, and the clamping knife (1.1) and the clamping arm (1.2) are driven by the rhombic compliant mechanism (1.4) to complete parallel output clamping action; because the rigidity of the elastic piece I (1.3) is the same as that of the elastic piece II (1.5) and the deflection of the middle point is the same under the action of the piezoelectric stack (2), the clamping knife (1.1) and the clamping arm (1.2) cannot generate translational motion along the y direction, and the parasitic displacement of the clamping action relative to the output direction is inhibited.
Fourthly, adjusting the voltage amplitude of the excitation signal to realize the regulation and control of the output stroke of the clamping knife (1.1); the duration of the excitation signal is adjusted, so that the regulation and control of the holding time of the clamping action can be realized; in practical application, excitation signals are flexibly combined according to the requirement of clamping action, and reasonable parallel output clamping action is realized.
FIG. 4 shows the displacement response of five points uniformly distributed on the clamping knife under the driving voltage of 100V, and it can be seen that the deviation of the output displacement of each point is very small, the standard deviation sigma is only 0.02305 μm, and the variance S is 2 Is only 0.00053 μm 2 Thus, the parallel output with higher precision is realized.
The above description is not intended to limit the present invention in any way on the structure and shape thereof. Any simple modification, equivalent change and modification made to the above embodiments according to the technical spirit of the present invention still fall within the scope of the technical solution of the present invention.

Claims (2)

1. A piezoelectric driving micro-gripper with parallel output is characterized in that: the micro-gripper comprises a flexible clamping unit (1), a piezoelectric stack (2), a pre-tightening wedge block (3) and a base (4); the flexible clamping unit (1) consists of a clamping knife (1.1), a clamping arm (1.2), an elastic sheet I (1.3), a diamond-shaped compliant mechanism (1.4) and an elastic sheet II (1.5); the elastic sheet II (1.5), the rhombic compliant mechanism (1.4) and the elastic sheet I (1.3) are sequentially arranged in series in the y direction, the clamping arms (1.2) are symmetrically distributed on two sides of the rhombic compliant mechanism (1.4), and the clamping knife (1.1) is arranged at the tail end of the clamping arm (1.2) and serves as an output mechanism; the piezoelectric stack (2) is embedded in a diamond compliant mechanism (1.4) of the flexible clamping unit (1) through a pre-tightening wedge block (3); the flexible clamping unit (1) is fixedly connected to the base (4) through a screw; the elastic piece I (1.3) and the elastic piece II (1.5) are subjected to rigidity matching when the structural size is designed, so that the rigidity of the elastic pieces I and II in the y direction is completely consistent.
2. A control method of a piezoelectric driving micro-gripper with parallel output is characterized in that: the method comprises the following steps:
firstly, a piezoelectric stack (2) and a pre-tightening wedge block (3) are embedded in a rhombic compliant mechanism (1.4) of a flexible clamping unit (1) in an interference fit mode, the flexible clamping unit (1) is fixedly connected to a base (4) through a screw, and a micro-clamp has two signal response states;
low level state: the excitation signal of the piezoelectric stack (2) is at a low level, the piezoelectric stack (2) is in an initial state, and the micro gripper is kept static;
high level state: an excitation signal of the piezoelectric stack (2) is at a high level, at the moment, the piezoelectric stack (2) extends to push the rhombic compliant mechanism (1.4) to stretch and deform in the y direction, so that contraction movement is generated in the x direction, and the clamping knife (1.1) and the clamping arm (1.2) are driven by the rhombic compliant mechanism (1.4) to complete parallel output clamping action; because the rigidity of the elastic piece I (1.3) is the same as that of the elastic piece II (1.5), and the deflection of the middle point is the same under the action of the piezoelectric stack (2), the clamping knife (1.1) and the clamping arm (1.2) cannot generate translational motion along the y direction, and the parasitic displacement of the clamping action relative to the output direction is inhibited;
fourthly, adjusting the voltage amplitude of the excitation signal to realize the regulation and control of the output stroke of the clamping knife (1.1); the duration of the excitation signal is adjusted, so that the regulation and control of the holding time of the clamping action can be realized; in practical application, excitation signals are flexibly combined according to the requirement of clamping action, and reasonable parallel output clamping action is realized.
CN202210713379.5A 2022-06-22 2022-06-22 Parallel output piezoelectric driving micro-gripper and control method thereof Pending CN115008438A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05293778A (en) * 1992-04-17 1993-11-09 Seiko Instr Inc Microgripper
WO2010133347A2 (en) * 2009-05-21 2010-11-25 Universiteit Leiden A nano-scale manipulator
CN108068099A (en) * 2017-12-22 2018-05-25 上海工程技术大学 A kind of micro-clamp with two-stage enlarger
CN108260350A (en) * 2015-07-22 2018-07-06 Cmr外科有限公司 It is encapsulated for the gear of robot arm
CN109412459A (en) * 2018-12-18 2019-03-01 北京无线电测量研究所 A kind of flexible amplification mechanism

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05293778A (en) * 1992-04-17 1993-11-09 Seiko Instr Inc Microgripper
WO2010133347A2 (en) * 2009-05-21 2010-11-25 Universiteit Leiden A nano-scale manipulator
CN108260350A (en) * 2015-07-22 2018-07-06 Cmr外科有限公司 It is encapsulated for the gear of robot arm
CN108068099A (en) * 2017-12-22 2018-05-25 上海工程技术大学 A kind of micro-clamp with two-stage enlarger
CN109412459A (en) * 2018-12-18 2019-03-01 北京无线电测量研究所 A kind of flexible amplification mechanism

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
HU HUANG等: "On the Suppression of the Backward Motion of a Piezo-Driven Precision Positioning Platform Designed by the Parasitic Motion Principle", IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 17 May 2019 (2019-05-17) *
姜文锐;卢泽生;: "一种大行程高精度微执行器的研究", 传感技术学报, no. 05, 30 October 2006 (2006-10-30) *
陈为林: "基于柔顺机构的压电驱动微夹钳研究", 中国博士学位论文全文数据库 (工程科技Ⅱ辑), no. 2018, 15 July 2018 (2018-07-15), pages 9 - 10 *

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