CN217875193U - Multi-axis bending positioner - Google Patents

Multi-axis bending positioner Download PDF

Info

Publication number
CN217875193U
CN217875193U CN202221721354.1U CN202221721354U CN217875193U CN 217875193 U CN217875193 U CN 217875193U CN 202221721354 U CN202221721354 U CN 202221721354U CN 217875193 U CN217875193 U CN 217875193U
Authority
CN
China
Prior art keywords
rigid
flexure
section
rigid connecting
mounting hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202221721354.1U
Other languages
Chinese (zh)
Inventor
许坚林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Guangzhou Mto Photoelectric Technology Co ltd
Original Assignee
Guangzhou Mto Photoelectric Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Guangzhou Mto Photoelectric Technology Co ltd filed Critical Guangzhou Mto Photoelectric Technology Co ltd
Priority to CN202221721354.1U priority Critical patent/CN217875193U/en
Application granted granted Critical
Publication of CN217875193U publication Critical patent/CN217875193U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Mutual Connection Of Rods And Tubes (AREA)

Abstract

The utility model discloses a multiaxis flexion locator, including fixed part, movable part and three flexion members, each flexion member extends to the movable part from fixed part, the movable part hangs in the space, and is realized relevant linear movement by the transmission motion of flexion member; each flexure member includes a respective pair of flexure links, with each pair of flexure links being arranged in parallel; each pair of the flexible connecting rods is positioned in one plane, and the three planes are vertical to each other; the flexible connecting rod comprises a rigid middle section and rigid connecting sections located at two ends of the rigid middle section, the rigid middle section is connected with the rigid connecting sections through the flexible connecting sections, the rigid middle section is connected with the flexible connecting sections in a welding mode, and the rigid connecting sections are connected with the flexible connecting sections in a welding mode. All parts in the flexible connecting rod are connected in a welding mode, and the problems of colloid aging, unstable connection and the like in the process of adopting an adhesive for bonding connection are avoided.

Description

Multi-axis bending positioner
Technical Field
The utility model relates to a precision positioning instrument technical field especially relates to a multiaxis flexion locator.
Background
In some processing scenes or experimental scenes requiring high precision, a precise positioning instrument is required for positioning and installation, such as U.S. patent publication No. US06467762B1, which refers to fig. 1, a multi-axis flexural positioner is disclosed, which includes a fixed component; a movable part (10); and three flexure members (20), each flexure member (20) extending from the fixed portion to the movable component (10) so as to suspend the movable component (10) in space, such that actuation of any one flexure member (20) causes the movable component to move along its associated linear positioning axis, but not along any of the other two linear positioning axes.
Wherein the flexure member (20) is formed of flexure links (21) which are stiff in the axial direction to a high degree to transmit axially borne forces to the movable part, but have a low shear stiffness and a low torsional stiffness so that forces applied axially to one end of the flexure link are transmitted to the other end of the flexure link, while forces applied radially to one end of the flexure link are not transmitted to the other end of the flexure link but are accommodated by lateral deformation of the links. The structure of the flexible connecting rod (21) is shown in fig. 2, and comprises a rigid middle section (201) and rigid connecting sections (202) at two ends, wherein the rigid middle section (201) and the rigid connecting sections (202) are connected by adopting a flexible metal strip (203) with a smaller diameter, the flexible metal strip (203) and the rigid middle section (201) or the rigid connecting sections (202) are bonded and fixed by adopting an adhesive, and glue is required to be injected into a gap between holes in the flexible metal strip (203) and the rigid middle section (201) or the rigid connecting sections (202) during processing. However, this connection has some disadvantages, such as the risk of the glue coming off; for another example, the air in the pipeline during glue injection cannot be completely evacuated (or the evacuation consistency is poor), so that the mass difference of each bending connecting rod is large, and the precise movement of the movable component is influenced; for another example, after the glue is prepared, the viscosity change in the construction process is large, the glue injection density and the drying time are different, so that the stress distribution is not uniform, and the problems of short service life, low processing efficiency, easy damage and the like of the flexible connecting rod are caused.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model provides a multiaxis flexion locator can solve the problem that the flexible connecting rod is not convenient for produce and easy damage.
The technical scheme of the utility model is realized like this:
a multi-axis flexure positioner comprising a fixed component, a movable component and three flexure members, each flexure member extending from the fixed component to the movable component, the movable component being suspended in space and motion transferred by the flexure members to effect relative linear movement; each flexure member includes a pair of flexure links, respectively, with each pair of flexure links being arranged in parallel; each pair of the deflection connecting rods is positioned in one plane, and the three planes are mutually vertical; the flexible connecting rod comprises a rigid middle section and rigid connecting sections located at two ends of the rigid middle section, the rigid middle section is connected with the rigid connecting sections through the flexible connecting sections, the rigid middle section is connected with the flexible connecting sections in a welding mode, and the rigid connecting sections are connected with the flexible connecting sections in a welding mode.
As a further alternative of the multi-axis flexure positioner, each of the rigid intermediate section and the rigid connecting section is provided therein with an axial hole arranged along an axial direction thereof, and both ends of the flexure connecting section are respectively placed in the axial hole of the rigid intermediate section and the axial hole of the rigid connecting section.
As a further alternative of the multi-axis flexure positioner, the rigid middle section is provided with welding holes arranged in a radial direction thereof, and the welding holes communicate with the shaft hole.
As a further alternative of the multi-axis bending positioner, the two bending connection sections are two metal sectional materials respectively, two ends of the rigid middle section are respectively provided with the shaft hole in a concave manner, the two shaft holes in the rigid middle section are not communicated with each other, and two ends of the two metal sectional materials are respectively inserted into the shaft hole in the rigid middle section and the shaft hole in the rigid connection section.
As a further alternative of the multi-axis bending positioner, the two bending connection sections are two parts on the same metal section respectively, an axle hole in the rigid middle section is arranged in a penetrating manner, the metal section is arranged in the axle hole of the rigid middle section in a penetrating manner, and two ends of the metal section are arranged in the axle holes of the two rigid connection sections respectively.
As a further alternative of the multi-axis flexure positioner, the rigid connecting segments at both ends of the flexure link are connected to the fixed/movable components by first mounting mechanisms, respectively; the first mounting mechanism comprises an annular clamping groove concavely arranged on the rigid connecting section and a clamping block movably arranged on the fixed component/the movable component; the annular clamping groove is arranged along the circumferential direction of the rigid connecting section, and the clamping block is clamped in the annular clamping groove, so that the rigid connecting section is fixed in the axial direction.
As a further alternative of the multi-axis flexure positioner, a first mounting hole and a second mounting hole vertically communicating with the first mounting hole are provided on the fixed/movable member; the rigid connecting section is inserted into the first mounting hole, and the clamping block is in threaded connection with the second mounting hole.
As a further alternative to the multi-axis flexure positioner, the rigid connecting section at one end of the flexure link is connected to the fixed/movable component by a first mounting mechanism, and the rigid connecting section at the other end is connected to the movable/fixed component by a second mounting mechanism; the first mounting mechanism comprises an annular clamping groove concavely arranged on the rigid connecting section and a clamping block movably arranged on the fixed component/the movable component; the annular clamping groove is arranged along the circumferential direction of the rigid connecting section, and the rigid connecting section is fixed in the axial direction by clamping the clamping block into the annular clamping groove; the second mounting mechanism comprises an external thread arranged on the rigid connecting section and a third mounting hole arranged on the movable component/fixed component, and the rigid connecting section is in threaded connection with the third mounting hole.
As a further alternative to the multi-axis flexure positioner, the ends of the rigid connector segments are formed with screw portions.
The beneficial effects of the utility model are that: all parts in the flexible connecting rod are connected in a welding mode, so that the problems of colloid aging, unstable connection and the like in the process of adopting an adhesive for bonding connection are avoided, the production difficulty is reduced, and the production efficiency is improved; thereby improving the instrument quality of the multi-axis flexure positioner.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic diagram of a prior art multi-axis flexure positioner;
FIG. 2 is a schematic diagram of a flexure link used in a prior art multi-axis flexure positioner;
FIG. 3 is a schematic view of the movable member and flexure member of the present invention;
fig. 4 is a schematic structural view of a flexure link according to the present invention;
fig. 5 is a schematic view of the flexure link of the present invention connected to the movable/stationary component by a first mounting mechanism;
fig. 6 is a schematic view of a distribution of a plurality of flexure links in accordance with the present invention;
fig. 7 is a schematic view of a multi-axis flexure positioner according to the present invention;
fig. 8 is an exploded view of a multi-axis flexure positioner according to the present invention.
In FIGS. 3-8: 1. a movable member; 11. a moving block; 12. mounting a disc; 2. a fixing member; 21. a base; 3. a flexing member; 31. a flexure link; 311. a rigid middle section; 312. a rigid connection section; 313. a flex link section; 314. welding the hole; 4. a first mounting mechanism; 41. an annular clamp groove; 42. a first mounting hole; 43. a second mounting hole; 44. a clamping block; 5. a second mounting mechanism; 51. a screwing part; 6. an actuator.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely below, and it should be apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
In the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrated; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
Referring to figures 2-7 there is shown a multi-axis flexure positioner comprising a fixed part 2, a movable part 1 and three flexure members 3, each flexure member 3 extending from the fixed part 2 to the movable part 1, the movable part 1 being suspended in space and motion being transmitted by the flexure members 3 to effect relative linear movement; each flexure member 3 includes a pair of flexure links 31, respectively, with each pair of flexure links 31 being arranged in parallel; each pair of flexure links 31 lies in a plane, the three planes being perpendicular to each other; the flexure connecting rod 31 comprises a rigid middle section 311 and rigid connecting sections 312 positioned at two ends of the rigid middle section 311, the rigid middle section 311 is connected with the rigid connecting sections 312 through a flexure connecting section 313, the rigid middle section 311 is connected with the flexure connecting section 313 in a welding manner, and the rigid connecting sections 312 are connected with the flexure connecting section 313 in a welding manner.
Wherein it is known from the multiaxial flexure positioner as shown in US patent publication No. US06467762B1 that the flexure joint section 313 may be a metal profile of Music wire (Music wire) as it allows a large degree of elastic bending and twisting without reaching the plastic limit. Other spring steel elements, or other suitable elements having similar properties, may also be used. In the present embodiment, referring to fig. 4 and 5, each of the rigid intermediate section 311 and the rigid connecting section 312 has a shaft hole (not labeled) disposed therein along the axial direction thereof, and both ends of the flexible connecting section 313 are respectively disposed in the shaft hole of the rigid intermediate section 311 and the shaft hole of the rigid connecting section 312. Preferably, the rigid middle section 311 is provided with welding holes 314 arranged along the radial direction thereof, and the welding holes 314 are communicated with the shaft holes, so that a welding head can conveniently extend into the rigid middle section 311 through the welding holes 314, and the flexible connecting section 313 and the interior of the rigid middle section 311 are welded and fixed, thereby improving the stability of welding connection.
In an optional specific manner, referring to fig. 5, the two bending connection sections 313 are two metal profiles, two ends of the rigid middle section 311 are recessed into the shaft holes, two shaft holes on the rigid middle section 311 are not communicated with each other, and two ends of the two metal profiles are inserted into the shaft hole of the rigid middle section 311 and the shaft hole of the rigid connection section 312. So that the two sections 313 do not interfere with each other.
In another alternative embodiment (not shown), the two flexible connecting sections 313 are two parts of the same metal profile, an axial hole in the rigid middle section 311 is disposed through, the metal profile is disposed through the axial hole in the rigid middle section 311, and two ends of the metal profile are disposed in the axial holes of the two rigid connecting sections 312 respectively. This simplifies the structure of the rigid intermediate section 311, and improves the productivity.
In some specific embodiments, to facilitate the installation of the flexure link 31, referring to fig. 5, the rigid connection sections 312 at both ends of the flexure link 31 are respectively connected to the fixed component 2/the movable component 1 through the first installation mechanism 4; the first mounting mechanism 4 comprises an annular clamping groove 41 concavely arranged on the rigid connecting section 312, and a clamping block 44 movably arranged on the fixed component 2/the movable component 1; the ring-shaped clamping grooves 41 are arranged along the circumferential direction of the rigid connection section 312, and the rigid connection section 312 is fixed in the axial direction by clamping the clamping blocks 44 into the ring-shaped clamping grooves 41. Wherein, a first mounting hole 42 and a second mounting hole 43 vertically communicated with the first mounting hole 42 are arranged on the fixed component 2/the movable component 1; the rigid connecting section 312 is inserted into the first mounting hole 42, and the latch 44 is screwed into the second mounting hole 43. In this manner, quick installation of the flexure link 31 can be facilitated, and connection stability can be ensured.
The working principle of a multi-axis flexure positioner is clearly described in US patent publication No. US06467762B1, where simply when two flexure links 31 in one flexure member 3 are displaced together equidistantly, the movable part 1 is moved in translation; when there is a difference in the moving distance between the two flexure links 31 in one flexure member 3, then the movable part 1 can be caused to perform rotational movement; based on these two main principles, a three-axis flexural positioner (the movable member 1 is movable along three X, Y, Z axes) and a six-axis flexural positioner (the movable member 1 is movable along three X, Y, Z axes and rotatable about three X, Y, Z axes) are shown in U.S. patent publication No. US06467762B 1.
In the case of the three-axis flexure positioner, due to machining errors and the like, the levelness of the movable component 1 is not required during assembly, and in order to level the movable component 1, referring to fig. 3 and 6, the rigid connecting section 312 at one end of the flexure link 31 is connected to the fixed component 2/movable component 1 by the first mounting mechanism 4, and the rigid connecting section 312 at the other end is connected to the movable component 1/fixed component 2 by the second mounting mechanism 5; the first mounting mechanism 4 comprises an annular clamping groove 41 concavely arranged on the rigid connecting section 312, and a clamping block 44 movably arranged on the fixed component 2/the movable component 1; the ring-shaped clamping grooves 41 are arranged along the circumferential direction of the rigid connecting section 312, and the rigid connecting section 312 is fixed in the axial direction by clamping the clamping blocks 44 into the ring-shaped clamping grooves 41; a first mounting hole 42 and a second mounting hole 43 vertically communicated with the first mounting hole 42 are formed in the fixed component 2/the movable component 1; the rigid connecting section 312 is inserted into the first mounting hole 42, and the latch 44 is screwed into the second mounting hole 43. The second mounting mechanism 5 comprises an external thread provided on the rigid connection section 312, a third mounting hole (not marked) provided on the movable part 1/the fixed part 2, and the rigid connection section 312 is screwed with the third mounting hole.
Specifically, due to the presence of machining errors, the two flexure links 31 in one flexure member 3 are misaligned resulting in insufficient levelness of the movable part 1; referring to fig. 6, one end of one of the flexure links 31 in one flexure member 3 can be connected to the fixed component 2/movable component 1 using the first mounting mechanism 4, and the other end is connected to the movable component 1/fixed component 2 using the second mounting mechanism 5, and the movable component 1 can be made to perform a rotational motion by adjusting the position of the rigid connecting section 312 in the third mounting hole, thereby pulling or pushing the movable component 1 using the flexure link 31; further, the leveling of the movable member 1 is accomplished by subjecting the movable member 1 to rotational movements about the X-axis and about the Y-axis. In the above process, the rigid connecting section 312 needs to be rotated so that the rigid connecting section 312 moves in the third mounting hole, and in order to rotate the rigid connecting section 312, a screw part 51 is formed at an end of the rigid connecting section 312.
It should be noted that, referring to fig. 7 and 8, the movable component 1 includes a moving block 11 and a mounting plate 12 disposed on the moving block 11, and an object to be positioned is fixed on the mounting plate 12; the fixed part 2 can be a base 21, an actuator 6 arranged on the base 21 and the like, and the actuator 6 can be a micrometer; for the specific working principle and connection structure, reference may be made to the multi-axis flexural positioner disclosed in publication No. US06467762B1, which is not described herein again.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (10)

1. A multi-axis flexure positioner including a fixed part, a movable part and three flexure members, each flexure member extending from the fixed part to the movable part, the movable part being suspended in space and motion transferred by the flexure members to effect relative linear movement; each flexure member includes a pair of flexure links, respectively, with each pair of flexure links being arranged in parallel; each pair of the flexible connecting rods is positioned in one plane, and the three planes are vertical to each other; the flexible connecting rod is characterized by comprising a rigid middle section and rigid connecting sections located at two ends of the rigid middle section, the rigid middle section is connected with the rigid connecting sections through the flexible connecting sections, the rigid middle section is connected with the flexible connecting sections in a welding mode, and the rigid connecting sections are connected with the flexible connecting sections in a welding mode.
2. The multi-axis flexure positioner of claim 1, wherein the rigid intermediate section and the rigid connecting section each have an axial hole disposed therein along the axial direction thereof, and wherein the flexure connecting section has both ends disposed within the axial holes of the rigid intermediate section and the rigid connecting section, respectively.
3. The multi-axis flexure positioner of claim 2, wherein the rigid middle section has welding holes disposed radially therealong, the welding holes communicating with the shaft hole.
4. The multi-axis flexure positioner of claim 3, wherein the two flexure connecting sections are two metal sections, the two ends of the rigid middle section are respectively recessed with the shaft holes, the two shaft holes on the rigid middle section are not communicated with each other, and the two ends of the two metal sections are respectively inserted into the shaft holes of the rigid middle section and the shaft holes of the rigid connecting section.
5. The multi-axis flexure positioner of claim 3, wherein the two flexure connecting sections are two parts of the same metal section respectively, the shaft hole of the rigid middle section is arranged to pass through, the metal section is arranged in the shaft hole of the rigid middle section in a penetrating way, and two ends of the metal section are arranged in the shaft holes of the two rigid connecting sections respectively.
6. The multi-axis flexure positioner of any one of claims 1-5, wherein the rigid connecting segments at both ends of the flexure link are connected to the fixed/movable components by first mounting mechanisms, respectively;
the first mounting mechanism comprises an annular clamping groove concavely arranged on the rigid connecting section and a clamping block movably arranged on the fixed component/the movable component; the annular clamping groove is arranged along the circumferential direction of the rigid connecting section, and the clamping block is clamped in the annular clamping groove, so that the rigid connecting section is fixed in the axial direction.
7. The multi-axis flexure positioner of claim 6, wherein the fixed/movable member is provided with a first mounting hole and a second mounting hole in vertical communication with the first mounting hole; the rigid connecting section is inserted in the first mounting hole, and the clamping block is in threaded connection in the second mounting hole.
8. A multi-axis flexure positioner according to any one of claims 1 to 5, wherein the rigid connecting section at one end of the flexure link is connected to the fixed/movable part by a first mounting mechanism and the rigid connecting section at the other end is connected to the movable/fixed part by a second mounting mechanism;
the first mounting mechanism comprises an annular clamping groove concavely arranged on the rigid connecting section and a clamping block movably arranged on the fixed component/the movable component; the annular clamping groove is arranged along the circumferential direction of the rigid connecting section, and the rigid connecting section is fixed in the axial direction by clamping the clamping block into the annular clamping groove;
the second mounting mechanism comprises an external thread arranged on the rigid connecting section and a third mounting hole arranged on the movable component/fixed component, and the rigid connecting section is in threaded connection with the third mounting hole.
9. The multi-axis flexure positioner of claim 8, wherein the fixed/movable member is provided with a first mounting hole and a second mounting hole in vertical communication with the first mounting hole; the rigid connecting section is inserted in the first mounting hole, and the clamping block is in threaded connection in the second mounting hole.
10. The multi-axis flexure positioner of claim 8, wherein the ends of the rigid connecting segments are formed with screws.
CN202221721354.1U 2022-07-04 2022-07-04 Multi-axis bending positioner Active CN217875193U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202221721354.1U CN217875193U (en) 2022-07-04 2022-07-04 Multi-axis bending positioner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202221721354.1U CN217875193U (en) 2022-07-04 2022-07-04 Multi-axis bending positioner

Publications (1)

Publication Number Publication Date
CN217875193U true CN217875193U (en) 2022-11-22

Family

ID=84098795

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202221721354.1U Active CN217875193U (en) 2022-07-04 2022-07-04 Multi-axis bending positioner

Country Status (1)

Country Link
CN (1) CN217875193U (en)

Similar Documents

Publication Publication Date Title
CN107464586B (en) Three-degree-of-freedom large-stroke micro-positioning platform with decoupled driving force
US6467761B1 (en) Positioning stage
US4627169A (en) Remote center compliance device
KR20160065861A (en) Precision force applicator for force transducer calibration
CN108481306B (en) Large-load six-degree-of-freedom compliant parallel robot system
US6484602B1 (en) Six-degree of freedom micro-positioner
JPH09287603A (en) Moving coupling device with flexible fitting means and method thereof
US20100133924A1 (en) Compact linear actuator and method of making same
CN102446563A (en) Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location
CN102947061A (en) A parallel-kinematical machine with gimbal holders
CN109794764B (en) Coaxial adjusting device
CN110095860B (en) Two-stage composite large-stroke high-precision quick reflector
CN109951100B (en) Large-stroke displacement driving device and control method thereof
CN106799728B (en) Passive compliant device
US9289900B2 (en) Calibration tool for a delta robot
CN217875193U (en) Multi-axis bending positioner
KR100246077B1 (en) Apparatus making wire connection part in a semiconductor
US20030051331A1 (en) Positioning stage actuation
US20030033703A1 (en) Positioning stage
EP3726075A1 (en) Mounting device and method for mounting components
CN109650329B (en) Two-rotation one-translation large-stroke coupling-free parallel piezoelectric micromotion platform
CN113580191A (en) Joint structure and robot with same
JPH0386434A (en) Precision stage device
US20170038536A1 (en) Optical fiber positioner and method for manufacturing same
CN112284602A (en) High-precision clamping force measuring device

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant