GB0908780D0 - A nano-scale manipulator - Google Patents

A nano-scale manipulator

Info

Publication number
GB0908780D0
GB0908780D0 GBGB0908780.0A GB0908780A GB0908780D0 GB 0908780 D0 GB0908780 D0 GB 0908780D0 GB 0908780 A GB0908780 A GB 0908780A GB 0908780 D0 GB0908780 D0 GB 0908780D0
Authority
GB
United Kingdom
Prior art keywords
nano
scale manipulator
manipulator
scale
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0908780.0A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universiteit Leiden
TECHNOLOGIESTICHTING STW
Original Assignee
Universiteit Leiden
TECHNOLOGIESTICHTING STW
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universiteit Leiden, TECHNOLOGIESTICHTING STW filed Critical Universiteit Leiden
Priority to GBGB0908780.0A priority Critical patent/GB0908780D0/en
Publication of GB0908780D0 publication Critical patent/GB0908780D0/en
Priority to PCT/EP2010/003049 priority patent/WO2010133347A2/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J7/00—Micromanipulators
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20221—Translation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20264—Piezoelectric devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/208—Elements or methods for movement independent of sample stage for influencing or moving or contacting or transferring the sample or parts thereof, e.g. prober needles or transfer needles in FIB/SEM systems

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
GBGB0908780.0A 2009-05-21 2009-05-21 A nano-scale manipulator Ceased GB0908780D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB0908780.0A GB0908780D0 (en) 2009-05-21 2009-05-21 A nano-scale manipulator
PCT/EP2010/003049 WO2010133347A2 (en) 2009-05-21 2010-05-19 A nano-scale manipulator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0908780.0A GB0908780D0 (en) 2009-05-21 2009-05-21 A nano-scale manipulator

Publications (1)

Publication Number Publication Date
GB0908780D0 true GB0908780D0 (en) 2009-07-01

Family

ID=40862779

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0908780.0A Ceased GB0908780D0 (en) 2009-05-21 2009-05-21 A nano-scale manipulator

Country Status (2)

Country Link
GB (1) GB0908780D0 (en)
WO (1) WO2010133347A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102581837B (en) * 2012-03-28 2014-11-26 中国科学院自动化研究所 Vacuum clamping device for micro parts
CN103903942B (en) * 2014-03-27 2015-12-02 华中科技大学 A kind of multi-degree-of-freedom nanometer operating desk being applicable to nano material manipulation
CN107055467B (en) * 2017-05-08 2019-06-04 中国科学院物理研究所 Vacuum transfer equipment for the fabrication of two-dimensional van der Waals heterojunctions
CN107547004B (en) * 2017-09-15 2018-12-28 山东大学 A kind of two degrees of freedom micro-nano locating platform and application
CN114571458B (en) * 2022-03-21 2022-11-15 苏州大学 Micro-nano robot assembly track learning method based on dynamic motion elements
CN115008438B (en) * 2022-06-22 2024-09-06 吉林大学 Piezoelectric driving micro-gripper with parallel output and control method thereof

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5903085A (en) * 1997-06-18 1999-05-11 Phase Metrics, Inc. Piezoelectric nanopositioner
US6346710B1 (en) * 1998-08-31 2002-02-12 Olympus Optical Co., Ltd. Stage apparatus including displacement amplifying mechanism
US6848328B2 (en) * 2001-03-09 2005-02-01 Klocke Nanotechnik Positioning unit and positioning apparatus with at least two positioning units
ATE405953T1 (en) * 2005-05-12 2008-09-15 Physik Instr Pi Gmbh & Co Kg MINIATURIZED TWO-AXIS PIEZO ACTUATOR
US7239107B1 (en) * 2006-02-24 2007-07-03 The Board Of Trustees Of The University Of Illinois Flexure stage
DE102007005293A1 (en) * 2007-01-29 2008-08-07 Technische Universität Ilmenau Device and method for micromechanical positioning and manipulation of an object

Also Published As

Publication number Publication date
WO2010133347A3 (en) 2011-01-13
WO2010133347A2 (en) 2010-11-25
WO2010133347A4 (en) 2011-03-10

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)