WO2010132584A3 - Vessel holder - Google Patents
Vessel holder Download PDFInfo
- Publication number
- WO2010132584A3 WO2010132584A3 PCT/US2010/034576 US2010034576W WO2010132584A3 WO 2010132584 A3 WO2010132584 A3 WO 2010132584A3 US 2010034576 W US2010034576 W US 2010034576W WO 2010132584 A3 WO2010132584 A3 WO 2010132584A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vessel
- processing
- processing station
- vessel holder
- holder
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/178—Syringes
- A61M5/31—Details
- A61M5/3129—Syringe barrels
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
- A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
- A61M5/178—Syringes
- A61M5/31—Details
- A61M5/3129—Syringe barrels
- A61M2005/3131—Syringe barrels specially adapted for improving sealing or sliding
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
- G01N21/9072—Investigating the presence of flaws or contamination in a container or its contents with illumination or detection from inside the container
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
- G01N21/9081—Inspection especially designed for plastic containers, e.g. preforms
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Anesthesiology (AREA)
- General Health & Medical Sciences (AREA)
- Vascular Medicine (AREA)
- General Physics & Mathematics (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Hematology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Animal Behavior & Ethology (AREA)
- Veterinary Medicine (AREA)
- Public Health (AREA)
- Inorganic Chemistry (AREA)
- Medical Preparation Storing Or Oral Administration Devices (AREA)
- Chemical Vapour Deposition (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Spray Control Apparatus (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
A portable vessel holder for a vessel processing system and adapted for holding a vessel while an interior surface of the vessel is coated and inspected for defects and while the vessel is transported from a first processing station to a second processing station of the vessel processing system is provided, the vessel holder comprising a vessel port configured to seat an opening of the vessel and for processing the interior surface of the seated vessel via the vessel port at the first processing station and at the second processing station.
Applications Claiming Priority (34)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17798409P | 2009-05-13 | 2009-05-13 | |
US61/177,984 | 2009-05-13 | ||
US22272709P | 2009-07-02 | 2009-07-02 | |
US61/222,727 | 2009-07-02 | ||
US21390409P | 2009-07-24 | 2009-07-24 | |
US61/213,904 | 2009-07-24 | ||
US23450509P | 2009-08-17 | 2009-08-17 | |
US61/234,505 | 2009-08-17 | ||
US26132109P | 2009-11-14 | 2009-11-14 | |
US61/261,321 | 2009-11-14 | ||
US26328909P | 2009-11-20 | 2009-11-20 | |
US61/263,289 | 2009-11-20 | ||
US28581309P | 2009-12-11 | 2009-12-11 | |
US61/285,813 | 2009-12-11 | ||
US29815910P | 2010-01-25 | 2010-01-25 | |
US61/298,159 | 2010-01-25 | ||
US29988810P | 2010-01-29 | 2010-01-29 | |
US61/299,888 | 2010-01-29 | ||
US31819710P | 2010-03-26 | 2010-03-26 | |
US61/318,197 | 2010-03-26 | ||
US33362510P | 2010-05-11 | 2010-05-11 | |
US61/333,625 | 2010-05-11 | ||
EP10162756.0 | 2010-05-12 | ||
EP10162757.8A EP2251453B1 (en) | 2009-05-13 | 2010-05-12 | Vessel holder |
EP10162756.0A EP2251452B1 (en) | 2009-05-13 | 2010-05-12 | Pecvd apparatus for vessel coating |
EP10162761.0A EP2251455B1 (en) | 2009-05-13 | 2010-05-12 | PECVD coating using an organosilicon precursor |
EP10162755.2A EP2253735B1 (en) | 2009-05-13 | 2010-05-12 | Vessel processing |
EP10162761.0 | 2010-05-12 | ||
EP10162760.2A EP2251454B1 (en) | 2009-05-13 | 2010-05-12 | Vessel coating and inspection |
EP10162760.2 | 2010-05-12 | ||
EP10162758.6A EP2251671B1 (en) | 2009-05-13 | 2010-05-12 | Outgassing method for inspecting a coated surface |
EP10162758.6 | 2010-05-12 | ||
EP10162757.8 | 2010-05-12 | ||
EP10162755.2 | 2010-05-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2010132584A2 WO2010132584A2 (en) | 2010-11-18 |
WO2010132584A3 true WO2010132584A3 (en) | 2011-03-31 |
Family
ID=43085958
Family Applications (6)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2010/034577 WO2010132585A2 (en) | 2009-05-13 | 2010-05-12 | Vessel processing |
PCT/US2010/034568 WO2010132579A2 (en) | 2009-05-13 | 2010-05-12 | Vessel processing |
PCT/US2010/034582 WO2010132589A2 (en) | 2009-01-25 | 2010-05-12 | Outgassing method for inspecting a coated surface |
PCT/US2010/034586 WO2010132591A2 (en) | 2009-05-13 | 2010-05-12 | Pecvd coating using an organosilicon precursor |
PCT/US2010/034571 WO2010132581A2 (en) | 2009-05-13 | 2010-05-12 | Vessel coating and inspection |
PCT/US2010/034576 WO2010132584A2 (en) | 2009-05-13 | 2010-05-12 | Vessel holder |
Family Applications Before (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2010/034577 WO2010132585A2 (en) | 2009-05-13 | 2010-05-12 | Vessel processing |
PCT/US2010/034568 WO2010132579A2 (en) | 2009-05-13 | 2010-05-12 | Vessel processing |
PCT/US2010/034582 WO2010132589A2 (en) | 2009-01-25 | 2010-05-12 | Outgassing method for inspecting a coated surface |
PCT/US2010/034586 WO2010132591A2 (en) | 2009-05-13 | 2010-05-12 | Pecvd coating using an organosilicon precursor |
PCT/US2010/034571 WO2010132581A2 (en) | 2009-05-13 | 2010-05-12 | Vessel coating and inspection |
Country Status (3)
Country | Link |
---|---|
KR (2) | KR102003651B1 (en) |
SG (2) | SG176008A1 (en) |
WO (6) | WO2010132585A2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
US9545360B2 (en) | 2009-05-13 | 2017-01-17 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
US9554968B2 (en) | 2013-03-11 | 2017-01-31 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging |
US9572526B2 (en) | 2009-05-13 | 2017-02-21 | Sio2 Medical Products, Inc. | Apparatus and method for transporting a vessel to and from a PECVD processing station |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9458536B2 (en) | 2009-07-02 | 2016-10-04 | Sio2 Medical Products, Inc. | PECVD coating methods for capped syringes, cartridges and other articles |
US11624115B2 (en) | 2010-05-12 | 2023-04-11 | Sio2 Medical Products, Inc. | Syringe with PECVD lubrication |
US9475225B2 (en) | 2010-07-16 | 2016-10-25 | SiO2 Medical Produts, Inc. | Injection molding process and product produced using the same |
US9878101B2 (en) | 2010-11-12 | 2018-01-30 | Sio2 Medical Products, Inc. | Cyclic olefin polymer vessels and vessel coating methods |
CN103889705A (en) * | 2011-03-14 | 2014-06-25 | Sio2医药产品公司 | Detection of mechanical stress on coated articles |
EP2776603B1 (en) | 2011-11-11 | 2019-03-06 | SiO2 Medical Products, Inc. | PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL PACKAGE, COATING PROCESS AND APPARATUS |
US11116695B2 (en) | 2011-11-11 | 2021-09-14 | Sio2 Medical Products, Inc. | Blood sample collection tube |
US9234276B2 (en) | 2013-05-31 | 2016-01-12 | Novellus Systems, Inc. | Method to obtain SiC class of films of desired composition and film properties |
US10325773B2 (en) | 2012-06-12 | 2019-06-18 | Novellus Systems, Inc. | Conformal deposition of silicon carbide films |
EP2914762B1 (en) | 2012-11-01 | 2020-05-13 | SiO2 Medical Products, Inc. | Coating inspection method |
US9903782B2 (en) | 2012-11-16 | 2018-02-27 | Sio2 Medical Products, Inc. | Method and apparatus for detecting rapid barrier coating integrity characteristics |
WO2014085348A2 (en) | 2012-11-30 | 2014-06-05 | Sio2 Medical Products, Inc. | Controlling the uniformity of pecvd deposition on medical syringes, cartridges, and the like |
US9764093B2 (en) | 2012-11-30 | 2017-09-19 | Sio2 Medical Products, Inc. | Controlling the uniformity of PECVD deposition |
TWI470098B (en) * | 2013-02-01 | 2015-01-21 | Adpv Technology Ltd | Gas release device for coating process |
US9662450B2 (en) | 2013-03-01 | 2017-05-30 | Sio2 Medical Products, Inc. | Plasma or CVD pre-treatment for lubricated pharmaceutical package, coating process and apparatus |
US9937099B2 (en) | 2013-03-11 | 2018-04-10 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging with low oxygen transmission rate |
WO2014144926A1 (en) | 2013-03-15 | 2014-09-18 | Sio2 Medical Products, Inc. | Coating method |
US11326254B2 (en) | 2014-03-03 | 2022-05-10 | Picosun Oy | Protecting an interior of a gas container with an ALD coating |
US10329662B2 (en) | 2014-03-03 | 2019-06-25 | Picosun Oy | Protecting an interior of a hollow body with an ALD coating |
US11066745B2 (en) | 2014-03-28 | 2021-07-20 | Sio2 Medical Products, Inc. | Antistatic coatings for plastic vessels |
JP2017531812A (en) * | 2014-10-06 | 2017-10-26 | ゼブラシー インコーポレイテッド | Quality control of syringe barrel lubrication coating |
EP3215200A4 (en) * | 2014-11-05 | 2018-12-05 | Insuline Medical Ltd. | Drug tracking device |
KR101639378B1 (en) * | 2015-06-19 | 2016-07-13 | 성균관대학교산학협력단 | Hydrophobic thin film for bacteria-repelling, and preparing method of the same |
US11077233B2 (en) | 2015-08-18 | 2021-08-03 | Sio2 Medical Products, Inc. | Pharmaceutical and other packaging with low oxygen transmission rate |
CN108463493B (en) * | 2015-11-16 | 2021-10-15 | Sio2医药产品公司 | Polymeric substrate having a surface with reduced biomolecule adhesion and thermoplastic articles of such substrate |
US11833333B2 (en) | 2017-07-12 | 2023-12-05 | Insuline Medical Ltd | Drug tracking device |
CN108645598B (en) * | 2018-06-11 | 2020-05-05 | 江苏理工学院 | Device for researching flow resistance reduction law of super-hydrophobic surface under different flow states |
US11848199B2 (en) | 2018-10-19 | 2023-12-19 | Lam Research Corporation | Doped or undoped silicon carbide deposition and remote hydrogen plasma exposure for gapfill |
KR102581806B1 (en) * | 2020-12-30 | 2023-09-25 | 세메스 주식회사 | Apparatus for treating substrate and method for treating substrate |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5833752A (en) * | 1996-01-30 | 1998-11-10 | Becton, Dickinson & Company | Manifold system |
US6180191B1 (en) * | 1996-10-08 | 2001-01-30 | Nano Scale Surface Systems, Inc. | Method for plasma deposition of a thin film onto a surface of a container |
US6565791B1 (en) * | 1997-09-30 | 2003-05-20 | Tetra Laval Holdings & Finance S.A. | Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process |
US20030232150A1 (en) * | 2002-05-24 | 2003-12-18 | Gregor Arnold | CVD coating device |
US20060051520A1 (en) * | 2004-08-31 | 2006-03-09 | Schott Ag | Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE179914T1 (en) * | 1994-02-16 | 1999-05-15 | Coca Cola Co | HOLLOW CONTAINER HAVING INERT OR IMPERMEABLE INNER SURFACE BY PLASMA ASSISTED SURFACE REACTION OR IN SITU POLYMERIZATION |
WO1997040207A1 (en) | 1996-04-22 | 1997-10-30 | N.V. Bekaert S.A. | Diamond-like nanocomposite compositions |
JPH11108833A (en) * | 1997-10-06 | 1999-04-23 | Mitsubishi Chemical Corp | Method for spectroscopic analysis of substance |
US6125687A (en) * | 1998-08-20 | 2000-10-03 | International Business Machines Corporation | Apparatus for measuring outgassing of volatile materials from an object |
US6185992B1 (en) * | 1999-07-15 | 2001-02-13 | Veeco Instruments Inc. | Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
US6083313A (en) * | 1999-07-27 | 2000-07-04 | Advanced Refractory Technologies, Inc. | Hardcoats for flat panel display substrates |
EP1299461A2 (en) * | 2000-06-06 | 2003-04-09 | The Dow Chemical Company | Barrier layer for polymers and containers |
KR100782651B1 (en) * | 2001-12-13 | 2007-12-07 | 미츠비시 쥬고교 가부시키가이샤 | Apparatus for forming carbon film on inner surface of plastic container and method of manufacturing plastic container having inner surface coated with carbon film |
JP4031654B2 (en) * | 2002-03-12 | 2008-01-09 | 三菱商事プラスチック株式会社 | CVD film forming apparatus and method for cleaning internal electrode for CVD film forming apparatus |
US20050223988A1 (en) * | 2002-05-24 | 2005-10-13 | Stephen Behle | Coating device comprising a conveying device |
JP2004253683A (en) * | 2003-02-21 | 2004-09-09 | Komatsu Ltd | Resist outgas measuring instrument |
KR100509298B1 (en) * | 2003-05-31 | 2005-08-22 | 한국과학기술연구원 | Method to manufacture composite polymer electrolyte membranes coated with inorganic thin films for direct methanol fuel cells |
JP4437647B2 (en) * | 2003-07-17 | 2010-03-24 | 三菱商事プラスチック株式会社 | Method for producing gas container coated plastic container |
JP2005241524A (en) * | 2004-02-27 | 2005-09-08 | Sii Nanotechnology Inc | Scanning probe microscope and measuring method using it |
DE102004028369B4 (en) * | 2004-06-11 | 2007-05-31 | Schott Ag | Method and device for treating substrates in a rotary machine |
EA010367B1 (en) * | 2004-11-05 | 2008-08-29 | Дау Корнинг Айэлэнд Лимитед | Plasma system |
JP4515280B2 (en) * | 2005-02-17 | 2010-07-28 | 麒麟麦酒株式会社 | Apparatus and method for manufacturing a plastic container having a gas barrier thin film formed thereon |
DE102006058771B4 (en) * | 2006-12-12 | 2018-03-01 | Schott Ag | Container with improved emptiness and method for its production |
US20090061237A1 (en) * | 2007-08-28 | 2009-03-05 | International Business Machines Corporation | LOW k POROUS SiCOH DIELECTRIC AND INTEGRATION WITH POST FILM FORMATION TREATMENT |
JP5012762B2 (en) * | 2008-10-30 | 2012-08-29 | 大日本印刷株式会社 | Manufacturing method for plastic containers |
-
2010
- 2010-05-12 SG SG2011083086A patent/SG176008A1/en unknown
- 2010-05-12 KR KR1020187001918A patent/KR102003651B1/en active IP Right Grant
- 2010-05-12 KR KR1020117028718A patent/KR101823159B1/en active IP Right Grant
- 2010-05-12 WO PCT/US2010/034577 patent/WO2010132585A2/en active Application Filing
- 2010-05-12 WO PCT/US2010/034568 patent/WO2010132579A2/en active Application Filing
- 2010-05-12 WO PCT/US2010/034582 patent/WO2010132589A2/en active Application Filing
- 2010-05-12 WO PCT/US2010/034586 patent/WO2010132591A2/en active Application Filing
- 2010-05-12 WO PCT/US2010/034571 patent/WO2010132581A2/en active Application Filing
- 2010-05-12 WO PCT/US2010/034576 patent/WO2010132584A2/en active Application Filing
- 2010-05-12 SG SG2011083110A patent/SG176011A1/en unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5833752A (en) * | 1996-01-30 | 1998-11-10 | Becton, Dickinson & Company | Manifold system |
US6180191B1 (en) * | 1996-10-08 | 2001-01-30 | Nano Scale Surface Systems, Inc. | Method for plasma deposition of a thin film onto a surface of a container |
US6565791B1 (en) * | 1997-09-30 | 2003-05-20 | Tetra Laval Holdings & Finance S.A. | Method and apparatus for treating the inside surface of plastic bottles in a plasma enhanced process |
US20030232150A1 (en) * | 2002-05-24 | 2003-12-18 | Gregor Arnold | CVD coating device |
US20060051520A1 (en) * | 2004-08-31 | 2006-03-09 | Schott Ag | Process and apparatus for the plasma coating of workpieces with spectral evaluation of the process parameters |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9545360B2 (en) | 2009-05-13 | 2017-01-17 | Sio2 Medical Products, Inc. | Saccharide protective coating for pharmaceutical package |
US9572526B2 (en) | 2009-05-13 | 2017-02-21 | Sio2 Medical Products, Inc. | Apparatus and method for transporting a vessel to and from a PECVD processing station |
US9272095B2 (en) | 2011-04-01 | 2016-03-01 | Sio2 Medical Products, Inc. | Vessels, contact surfaces, and coating and inspection apparatus and methods |
US9554968B2 (en) | 2013-03-11 | 2017-01-31 | Sio2 Medical Products, Inc. | Trilayer coated pharmaceutical packaging |
Also Published As
Publication number | Publication date |
---|---|
WO2010132591A3 (en) | 2011-05-05 |
WO2010132585A2 (en) | 2010-11-18 |
WO2010132589A3 (en) | 2011-03-31 |
KR20180011350A (en) | 2018-01-31 |
SG176011A1 (en) | 2011-12-29 |
WO2010132579A3 (en) | 2011-03-31 |
WO2010132589A2 (en) | 2010-11-18 |
WO2010132591A2 (en) | 2010-11-18 |
WO2010132581A2 (en) | 2010-11-18 |
KR20120060781A (en) | 2012-06-12 |
KR101823159B1 (en) | 2018-01-29 |
WO2010132579A2 (en) | 2010-11-18 |
SG176008A1 (en) | 2011-12-29 |
WO2010132581A9 (en) | 2011-03-24 |
WO2010132585A3 (en) | 2011-03-31 |
WO2010132584A2 (en) | 2010-11-18 |
KR102003651B1 (en) | 2019-07-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2010132584A3 (en) | Vessel holder | |
EP2251453A3 (en) | Vessel holder | |
EP2389685A4 (en) | Systems and methods for detecting defects on a wafer | |
EP2283516A4 (en) | Systems and methods for detecting defects on a wafer and generating inspection results for the wafer | |
TWI369418B (en) | Wafer electroplating apparatus for reducing edge defects | |
EP2377152A4 (en) | Method and system for centering wafer on chuck | |
GB2477595B (en) | Systems for processing samples on porous substrates | |
EP2520119A4 (en) | Method and apparatus for autonomous ofdma beacon reception measurement | |
IL218799A0 (en) | Method, inspection apparatus and substrate for determining an approximate structure of an object on the substrate | |
EP2322899A4 (en) | Specimen roughness detecting method, and apparatus for the method | |
EP2515121A4 (en) | Sample processing device, sample processing method, and reaction container used in these device and method | |
EP2196722A4 (en) | Device for re-liquefaction of liquefied gas, liquefied gas storage facility and liquefied gas carrying vessel equipped with the device, and method of re-liquefaction of liquefied gas | |
IL203445A (en) | Inspection apparatus, lithographic apparatus, lithographic processing cell and inspection method | |
WO2009070765A3 (en) | Prevention of substrate edge plating in a fountain plating process | |
GB2468043B (en) | Methods for determining the permeability and diffusivity of a porous solid | |
EP2387796A4 (en) | System and method for inspecting a wafer | |
IL213218A0 (en) | Calibration method, inspection method and apparatus, lithographic apparatus, and lithographic processing cell | |
EP2420711A4 (en) | Valve block, valve block unit, and method for inspecting the valve block unit | |
WO2009070414A8 (en) | Method of detecting defective containers | |
HK1158361A1 (en) | Method for inspecting electrostatic chuck, and electrostatic chuck apparatus | |
TW201129873A (en) | Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method | |
EP2458629A4 (en) | Substrate processing system, substrate holder, substrate holder pair, substrate joining apparatus and device manufacturing method | |
EP2358920A4 (en) | Method for coating an exhaust port and apparatus for performing the method | |
UA102895C2 (en) | Device for producing absorbent article and method for producing absorbent article | |
WO2012033301A3 (en) | Wafer inspection device and wafer inspection system comprising same |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 10775484 Country of ref document: EP Kind code of ref document: A2 |
|
DPE1 | Request for preliminary examination filed after expiration of 19th month from priority date (pct application filed from 20040101) | ||
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 10775484 Country of ref document: EP Kind code of ref document: A2 |