WO2010132589A3 - Outgassing method for inspecting a coated surface - Google Patents

Outgassing method for inspecting a coated surface Download PDF

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Publication number
WO2010132589A3
WO2010132589A3 PCT/US2010/034582 US2010034582W WO2010132589A3 WO 2010132589 A3 WO2010132589 A3 WO 2010132589A3 US 2010034582 W US2010034582 W US 2010034582W WO 2010132589 A3 WO2010132589 A3 WO 2010132589A3
Authority
WO
WIPO (PCT)
Prior art keywords
inspecting
coated surface
coating
result
outgassing method
Prior art date
Application number
PCT/US2010/034582
Other languages
French (fr)
Other versions
WO2010132589A2 (en
Inventor
Thomas E. Fisk
John Ferguson
Jonathan R. Freedman
Original Assignee
Cv Holdings, Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to SG2011083110A priority Critical patent/SG176011A1/en
Priority to RU2011150519/28A priority patent/RU2523773C2/en
Priority to MX2011012042A priority patent/MX350703B/en
Priority to JP2012510982A priority patent/JP5710600B2/en
Priority to BRPI1010569-7A priority patent/BRPI1010569B1/en
Priority to AU2010249031A priority patent/AU2010249031B2/en
Application filed by Cv Holdings, Llc filed Critical Cv Holdings, Llc
Priority to CA2761905A priority patent/CA2761905C/en
Priority to NZ596997A priority patent/NZ596997A/en
Priority to CN2010800292014A priority patent/CN102460131A/en
Priority claimed from EP10162761.0A external-priority patent/EP2251455B1/en
Publication of WO2010132589A2 publication Critical patent/WO2010132589A2/en
Publication of WO2010132589A3 publication Critical patent/WO2010132589A3/en
Priority to NZ603471A priority patent/NZ603471A/en
Priority to AU2011252925A priority patent/AU2011252925A1/en
Priority to CA2799220A priority patent/CA2799220C/en
Priority to PCT/US2011/036358 priority patent/WO2011143509A1/en
Priority to BR112012028897-0A priority patent/BR112012028897B1/en
Priority to KR1020127032502A priority patent/KR101895367B1/en
Priority to KR1020207026338A priority patent/KR102273744B1/en
Priority to MX2012013129A priority patent/MX2012013129A/en
Priority to CN2011800234615A priority patent/CN102884412A/en
Priority to EP11722664.7A priority patent/EP2569611B1/en
Priority to KR1020197028540A priority patent/KR102157254B1/en
Priority to KR1020187025058A priority patent/KR102028690B1/en
Priority to SG2012083077A priority patent/SG185520A1/en
Priority to JP2013510325A priority patent/JP2013526710A/en
Priority to EP18197314.0A priority patent/EP3437743A1/en
Priority to RU2012153671/28A priority patent/RU2561759C2/en
Priority to IL215913A priority patent/IL215913A/en
Priority to ZA2011/07871A priority patent/ZA201107871B/en
Priority to IL222932A priority patent/IL222932A0/en
Priority to ZA2012/08501A priority patent/ZA201208501B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/178—Syringes
    • A61M5/31—Details
    • A61M5/3129—Syringe barrels
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C23C16/325—Silicon carbide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61M—DEVICES FOR INTRODUCING MEDIA INTO, OR ONTO, THE BODY; DEVICES FOR TRANSDUCING BODY MEDIA OR FOR TAKING MEDIA FROM THE BODY; DEVICES FOR PRODUCING OR ENDING SLEEP OR STUPOR
    • A61M5/00—Devices for bringing media into the body in a subcutaneous, intra-vascular or intramuscular way; Accessories therefor, e.g. filling or cleaning devices, arm-rests
    • A61M5/178—Syringes
    • A61M5/31—Details
    • A61M5/3129—Syringe barrels
    • A61M2005/3131—Syringe barrels specially adapted for improving sealing or sliding
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
    • G01N21/9072—Investigating the presence of flaws or contamination in a container or its contents with illumination or detection from inside the container
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/90—Investigating the presence of flaws or contamination in a container or its contents
    • G01N21/9081—Inspection especially designed for plastic containers, e.g. preforms

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Biomedical Technology (AREA)
  • Public Health (AREA)
  • Anesthesiology (AREA)
  • General Physics & Mathematics (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Hematology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Vascular Medicine (AREA)
  • Veterinary Medicine (AREA)
  • Inorganic Chemistry (AREA)
  • Medical Preparation Storing Or Oral Administration Devices (AREA)
  • Chemical Vapour Deposition (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)
  • Spray Control Apparatus (AREA)

Abstract

A method for inspecting the product of a coating process is provided. Therein, the release of at least one volatile species from the coated surface into the gas space adjacent to the coated surface is measured and the result is compared with the result for at least one reference object measured under the same test conditions. Thus the presence or absence of the coating, and/or a physical and/or chemical property of the coating can be determined. The method is useful for inspecting any coated articles, e.g. vessels. Its application on the inspection of PECVD coatings made from organosilicon precursors, especially of barrier coatings, is also disclosed.
PCT/US2010/034582 2009-01-25 2010-05-12 Outgassing method for inspecting a coated surface WO2010132589A2 (en)

Priority Applications (29)

Application Number Priority Date Filing Date Title
RU2011150519/28A RU2523773C2 (en) 2009-05-13 2010-05-12 Gas release process for inspection of coated surfaces
MX2011012042A MX350703B (en) 2009-05-13 2010-05-12 Outgassing method for inspecting a coated surface.
JP2012510982A JP5710600B2 (en) 2009-05-13 2010-05-12 Gas release method for coating surface inspection
BRPI1010569-7A BRPI1010569B1 (en) 2009-01-25 2010-05-12 METHOD FOR INSPECTING THE PRODUCT OF A COATING PROCESS
AU2010249031A AU2010249031B2 (en) 2009-05-13 2010-05-12 Outgassing method for inspecting a coated surface
SG2011083110A SG176011A1 (en) 2009-05-13 2010-05-12 Outgassing method for inspecting a coated surface
CA2761905A CA2761905C (en) 2009-05-13 2010-05-12 Outgassing method for inspecting a coated surface
NZ596997A NZ596997A (en) 2009-05-13 2010-05-12 Outgassing method for inspecting a coated surface
CN2010800292014A CN102460131A (en) 2009-05-13 2010-05-12 Outgassing method for inspecting a coated surface
JP2013510325A JP2013526710A (en) 2010-05-12 2011-05-12 Container gas emission inspection method
EP18197314.0A EP3437743A1 (en) 2010-05-12 2011-05-12 Syringe with lubricity coating
RU2012153671/28A RU2561759C2 (en) 2010-05-12 2011-05-12 Methods of inspection of gas emission vessels
PCT/US2011/036358 WO2011143509A1 (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
EP11722664.7A EP2569611B1 (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
CA2799220A CA2799220C (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
NZ603471A NZ603471A (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
BR112012028897-0A BR112012028897B1 (en) 2010-05-12 2011-05-12 Methods for inspecting the product of a coating process
KR1020127032502A KR101895367B1 (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
KR1020207026338A KR102273744B1 (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
MX2012013129A MX2012013129A (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods.
CN2011800234615A CN102884412A (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
AU2011252925A AU2011252925A1 (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
KR1020197028540A KR102157254B1 (en) 2010-05-12 2011-05-12 A blood collection vessel
KR1020187025058A KR102028690B1 (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
SG2012083077A SG185520A1 (en) 2010-05-12 2011-05-12 Vessel outgassing inspection methods
IL215913A IL215913A (en) 2009-05-13 2011-10-25 Outgassing method for inspecting a coated surface
ZA2011/07871A ZA201107871B (en) 2009-05-13 2011-10-27 Outgassing method for inspecting a coated surface
IL222932A IL222932A0 (en) 2010-05-12 2012-11-08 Vessel outgassing inspection methods
ZA2012/08501A ZA201208501B (en) 2010-05-12 2012-11-12 Vessel outgassing inspection methods

Applications Claiming Priority (34)

Application Number Priority Date Filing Date Title
US17798409P 2009-05-13 2009-05-13
US61/177,984 2009-05-13
US22272709P 2009-07-02 2009-07-02
US61/222,727 2009-07-02
US21390409P 2009-07-24 2009-07-24
US61/213,904 2009-07-24
US23450509P 2009-08-17 2009-08-17
US61/234,505 2009-08-17
US26132109P 2009-11-14 2009-11-14
US61/261,321 2009-11-14
US26328909P 2009-11-20 2009-11-20
US61/263,289 2009-11-20
US28581309P 2009-12-11 2009-12-11
US61/285,813 2009-12-11
US29815910P 2010-01-25 2010-01-25
US61/298,159 2010-01-25
US29988810P 2010-01-29 2010-01-29
US61/299,888 2010-01-29
US31819710P 2010-03-26 2010-03-26
US61/318,197 2010-03-26
US33362510P 2010-05-11 2010-05-11
US61/333,625 2010-05-11
EP10162758.6 2010-05-12
EP10162761.0 2010-05-12
EP10162761.0A EP2251455B1 (en) 2009-05-13 2010-05-12 PECVD coating using an organosilicon precursor
EP10162758.6A EP2251671B1 (en) 2009-05-13 2010-05-12 Outgassing method for inspecting a coated surface
EP10162757.8 2010-05-12
EP10162756.0 2010-05-12
EP10162760.2 2010-05-12
EP10162755.2A EP2253735B1 (en) 2009-05-13 2010-05-12 Vessel processing
EP10162760.2A EP2251454B1 (en) 2009-05-13 2010-05-12 Vessel coating and inspection
EP10162755.2 2010-05-12
EP10162757.8A EP2251453B1 (en) 2009-05-13 2010-05-12 Vessel holder
EP10162756.0A EP2251452B1 (en) 2009-05-13 2010-05-12 Pecvd apparatus for vessel coating

Publications (2)

Publication Number Publication Date
WO2010132589A2 WO2010132589A2 (en) 2010-11-18
WO2010132589A3 true WO2010132589A3 (en) 2011-03-31

Family

ID=43085958

Family Applications (6)

Application Number Title Priority Date Filing Date
PCT/US2010/034586 WO2010132591A2 (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor
PCT/US2010/034582 WO2010132589A2 (en) 2009-01-25 2010-05-12 Outgassing method for inspecting a coated surface
PCT/US2010/034576 WO2010132584A2 (en) 2009-05-13 2010-05-12 Vessel holder
PCT/US2010/034571 WO2010132581A2 (en) 2009-05-13 2010-05-12 Vessel coating and inspection
PCT/US2010/034577 WO2010132585A2 (en) 2009-05-13 2010-05-12 Vessel processing
PCT/US2010/034568 WO2010132579A2 (en) 2009-05-13 2010-05-12 Vessel processing

Family Applications Before (1)

Application Number Title Priority Date Filing Date
PCT/US2010/034586 WO2010132591A2 (en) 2009-05-13 2010-05-12 Pecvd coating using an organosilicon precursor

Family Applications After (4)

Application Number Title Priority Date Filing Date
PCT/US2010/034576 WO2010132584A2 (en) 2009-05-13 2010-05-12 Vessel holder
PCT/US2010/034571 WO2010132581A2 (en) 2009-05-13 2010-05-12 Vessel coating and inspection
PCT/US2010/034577 WO2010132585A2 (en) 2009-05-13 2010-05-12 Vessel processing
PCT/US2010/034568 WO2010132579A2 (en) 2009-05-13 2010-05-12 Vessel processing

Country Status (3)

Country Link
KR (2) KR101823159B1 (en)
SG (2) SG176011A1 (en)
WO (6) WO2010132591A2 (en)

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EP2920567B1 (en) 2012-11-16 2020-08-19 SiO2 Medical Products, Inc. Method and apparatus for detecting rapid barrier coating integrity characteristics
US9764093B2 (en) 2012-11-30 2017-09-19 Sio2 Medical Products, Inc. Controlling the uniformity of PECVD deposition
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KR102286345B1 (en) 2014-03-03 2021-08-06 피코순 오와이 Protecting an interior of a hollow body with an ald coating
WO2015132443A1 (en) 2014-03-03 2015-09-11 Picosun Oy Protecting an interior of a gas container with an ald coating
US11066745B2 (en) 2014-03-28 2021-07-20 Sio2 Medical Products, Inc. Antistatic coatings for plastic vessels
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Citations (5)

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