WO2010125701A1

WO2010125701A1 - Movable stage, and conveying device and charged particle beam device both having same

Info

Publication number: WO2010125701A1
Application number: PCT/JP2009/067063
Authority: WO
Inventors: 猛宗石; 幸治明石
Original assignee: 京セラ株式会社
Priority date: 2009-04-27
Filing date: 2009-09-30
Publication date: 2010-11-04
Also published as: KR20120022818A; JPWO2010125701A1; JP5274656B2; CN102414811A

Abstract

A movable stage has a first stage (12) movable in a first direction, a second stage (13) having at least a portion thereof located on the first stage (12) and movable in a second direction crossing the first direction, a generating section (MY) for generating drive power for moving the second stage (13) in the second direction, and power transmitting section (17, 20) for transmitting the drive power from the generating section (MY) to the second stage (13) and having at least a portion thereof adapted to operate as the first stage (12) moves.

Description

Moving stage, transfer device having moving stage, and charged particle beam device

The present invention relates to a moving stage used for transporting a sample in a semiconductor manufacturing apparatus or a liquid crystal manufacturing apparatus, a transport apparatus having the same, and a charged particle beam apparatus, for example.

As an apparatus used when manufacturing a semiconductor device, there are a pattern drawing apparatus and an inspection apparatus using an electron beam or an ion beam. For example, an X stage that moves in the X-axis direction is arranged on the base, and the Y stage that moves in the Y-axis direction on the X stage is used as the moving stage used to move the sample to the target position in these apparatuses. A stage is placed. A configuration is proposed in which a slider is provided so as to be parallel to the moving direction of the X stage with respect to the Y stage, and a roller hook portion including a fixed roller and a pressing roller is provided on the Y drive shaft as a power transmission portion. (For example, JP 2007-184193 A). In this configuration, the Y drive shaft is fixed to the linear motor, and the slider can move in the X-axis direction between the fixed roller and the pressing roller.

However, in the configuration of Patent Document 1, slipping is likely to occur between the slide and the pressing roller and the fixed roller, resulting in a problem that the position accuracy of the Y stage is deteriorated.

Therefore, it is required to suppress deterioration of the position accuracy of the stage.

The moving stage according to an aspect of the present invention includes a first stage, a second stage, a generation unit, and a power transmission unit. The first stage is movable in the first direction. The second stage is at least partially located on the first stage and is movable in a second direction that intersects the first direction. The generating unit generates a driving force for moving the second stage in the second direction. The power transmission unit transmits the driving force from the generation unit to the second stage, and at least a part thereof operates as the first stage moves.

The conveyance device according to an aspect of the present invention includes a moving stage and a controller that controls the operation of the generation unit.

A charged particle beam apparatus according to an aspect of the present invention includes a transport device that can place a sample on a second stage, and a charged particle beam source that is provided above the second stage and that irradiates the sample with the charged particle beam. Have.

According to the moving stage and the transfer device according to one aspect of the present invention, it is possible to suppress deterioration in the position accuracy of the stage.

The charged particle beam apparatus according to one aspect of the present invention can irradiate a desired position of a symmetrical object with a charged particle beam with higher accuracy.

It is a top view of the movement stage by the 1st Embodiment of this invention. It is a side view of the movement stage by the 1st Embodiment of this invention, and is the side view seen from the direction of arrow A of FIG. FIG. 3 is a cross-sectional view taken along line BB in FIG. FIG. 3 is a cross-sectional view of a portion surrounded by a dotted line C in FIG. 1, and is a view when a cross section taken along a line DD in FIG. 2 is viewed from above. It is a top view of the movement stage by the 2nd Embodiment of this invention. It is a side view of the movement stage by the 2nd Embodiment of this invention, and is the side view seen from the direction of arrow E of FIG. FIG. 7 is a view showing a part of a rotating shaft and a cross section of a gear portion taken along line FF in FIG. 6. It is a top view of the modification of the movement stage by the 2nd Embodiment of this invention. FIG. 9 is a view of a part of a rotation shaft and a cross section of a gear portion taken along line HH in FIG. It is a top view of the movement stage by the 3rd Embodiment of this invention, and is the figure which showed the structure of the fine adjustment means in detail especially. It is sectional drawing in the JJ line of FIG. It is a top view of the modification of the movement stage by the 3rd Embodiment of this invention. It is the figure which showed the structure of the fine adjustment means of the movement stage of FIG. 12 in detail. It is sectional drawing in the KK line | wire of FIG. It is a top view which shows the structural example of the conveying apparatus of this invention. It is a side view which shows the structural example of the charged particle beam apparatus using the movement stage by embodiment of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. All drawings other than FIG. 4 show the X axis, the Y axis, and the Z axis in the orthogonal coordinate system. For the sake of explanation, FIG. 1, FIG. 5, FIG. 8, FIG. 10, FIG. 12, FIG.

(First embodiment)
As shown in FIGS. 1 to 3, the moving stage 1A according to the first embodiment includes a base 11, an X stage 12 that can move linearly on the base 11 along the X-axis direction, And a Y stage 13 movable linearly along the Y-axis direction on the stage 12. Further, the moving stage 1A has an X linear guide 14 provided on the upper surface of the base 11 so as to extend along the X-axis direction, and an upper surface of the X stage 12 so as to extend along the Y-axis direction. Y linear guide 15 provided. The X stage 12 is guided by an X linear guide 14, and the Y stage 13 is guided by a Y linear guide 15. The base 11, the X stage 12, and the Y stage 13 are disposed in a vacuum chamber 3 made of pure iron, low carbon steel, or permalloy that is a ferromagnetic material.

Since the X linear guide 14 and the Y linear guide 15 are installed so as to be orthogonal when viewed in plan, a sample such as a wafer arranged on the moving stage 1A can freely move on the XY plane. .

An X ball screw 16 is provided on the surface of the X stage 12 facing the base 11. The screw shaft of the X ball screw 16 is rotated by a driving torque generated from the X electromagnetic motor MX. The X stage 12 moves while being guided by the X linear guide 14 in accordance with the rotation of the screw shaft of the X ball screw 16.

Similarly, the Y stage 13 is also driven by the Y electromagnetic motor MY. Specifically, the screw shaft of the Y ball screw 17 provided on the surface of the Y stage 13 facing the X stage 12 is rotated by the driving torque generated by the Y electromagnetic motor MY. Here, the Y ball screw 17 is attached to the center of the Y stage 13 in the X-axis direction. When the screw shaft of the Y ball screw 17 rotates, the Y stage 13 is guided and moved by the Y linear guide 15 on the X stage 12. The Y stage 13 is at least partially positioned on the X stage 12. In the moving stage 1A according to the present embodiment, the driving torque generated by the X electromagnetic motor MX and the Y electromagnetic motor MY is rotational torque.

Note that the X electromagnetic motor MX and the Y electromagnetic motor MY are attached to the outer wall surface of the vacuum chamber 3 because they generate heat and may cause fluctuations in the surrounding magnetic field. Thereby, it can suppress that the internal space of the vacuum chamber 3 is influenced by these heat_generation | fever and a magnetic field fluctuation | variation. For example, when drawing on a semiconductor wafer inside the vacuum chamber 3, it is possible to prevent the charged particle beam from being bent by a magnetic field.

In addition, the movement of the X stage 12 in the X-axis direction can be controlled by changing the rotational speed and rotational speed of the X ball screw 16 by the X electromagnetic motor MX. Similarly, it is possible to control the movement of the Y stage 13 in the Y-axis direction by changing the rotational speed and rotational speed of the Y ball screw 17 by the Y electromagnetic motor MY.

Here, the Y ball screw 17 transmits the drive torque from the Y electromagnetic motor MY via the drive torque transmission unit 20. Hereinafter, a detailed configuration of the drive torque transmission unit 20 will be described with reference to FIG.

The drive torque transmitting unit 20 is disposed so as to be rotatable by bearings or the like at the intermediate rotating shaft 21, two

arms

22 and 23 that can freely rotate around the intermediate rotating shaft 21, and both ends of the first arm 22. Two flat belt wheels (hereinafter also referred to as “pulleys”) 24 and 25, and two flat belt wheels (pulleys) 26 that are rotatably disposed at both ends of the second arm 23 by bearings or the like. , 27. Further, the drive torque transmission unit 20 includes an annular flat belt 28 spanned between the pulley 24 and the pulley 25, an annular flat belt 29 spanned between the pulley 26 and the pulley 27, and each flat belt 28. , 29 and

tension wheels

30 and 31 for applying a constant tension.

The drive torque transmission unit 20 connects the Y electromagnetic motor MY and the Y stage 13. Below, the connection state of the drive torque transmission part 20, Y stage 13, and Y electromagnetic motor MY is demonstrated. The pulley 24 is connected to the motor shaft 40 of the Y electromagnetic motor MY via a coupling 41 and a drive shaft 42. The drive shaft 42 is firmly connected to the pulley 24 and transmits the rotational torque of the Y electromagnetic motor MY to the pulley 24.

The drive shaft 42 is held by a bearing 43 so as to be concentric with the sleeve 44. The first arm 22 is fixed to the sleeve 44. Thereby, the drive shaft 42 can freely rotate with respect to the first arm 22. The sleeve 44 is held by the fixed holder 46 via a pair of bearings 45. As a result, the pulley 24 and the first arm 22 can rotate around the motor shaft 40 so as to be concentric with the motor shaft 40 without interfering with each other.

Further, the first arm 22 is fixed to the intermediate rotation shaft 21. The

pulleys

25 and 26 are attached to the intermediate rotating shaft 21 via a pair of bearings 48. Therefore, the

pulleys

25 and 26 can rotate without being interfered by the first arm 22. Here, the

pulleys

25 and 26 are integrally formed.

The flat belt 28 is stretched between the pulley 24 and the pulley 25. The flat belt 28 rotates around the drive shaft 42 and the intermediate rotation shaft 21 while maintaining a constant tension according to the rotation of the pulley 24, and the driving torque from the Y electromagnetic motor MY transmitted to the pulley 24 is supplied to the pulley 25. , 26.

Next, the intermediate rotating shaft 21 is connected to the second arm 23 via a pair of bearings 49. Thereby, the intermediate rotation shaft 21 can rotate with respect to the second arm 23.

The second arm is fixed to the transmission shaft 51 via a pair of bearings 50. That is, the transmission shaft 51 can rotate with respect to the second arm 23. A pulley 27 is fixed to the transmission shaft 51.

The flat belt 29 is stretched between the pulley 26 and the pulley 27. The flat belt 29 rotates around the intermediate rotation shaft 21 and the transmission shaft 51 while maintaining a constant tension according to the rotation of the pulley 26, and the driving torque from the Y electromagnetic motor MY transmitted to the pulley 26 is transmitted to the pulley 27. To communicate. As a result, the drive torque transmitted from the Y electromagnetic motor MY to the

pulleys

25 and 26 is transmitted to the transmission shaft 51 via the pulley 27.

The transmission shaft 51 is connected to the Y ball screw 17 by a coupling 52. The Y ball screw 17 rotates in accordance with the rotation of the transmission shaft 51. By this rotation, the Y stage 13 moves along the Y-axis direction.

The first arm 22 and the second arm 23 can rotate around the intermediate rotation shaft 21. When the X stage 12 moves, the intermediate rotation shaft 21 moves in the Z-axis direction perpendicular to the X-axis and the Y-axis, and the angle formed by the first arm 22 and the second arm 23 changes. Specifically, when the distance between the drive shaft 40 and the transmission shaft 51 decreases as the X stage 12 moves, the intermediate rotation shaft 21 moves along the X-axis direction and moves upward along the Z-axis direction. The angle formed by the first arm 22 and the second arm 23 decreases. That is, the drive torque transmission unit 20 having the first arm 22 and the second arm 23 is contracted along the X-axis direction.

On the other hand, when the distance between the drive shaft 40 and the transmission shaft 51 increases with the movement of the X stage 12, the intermediate rotation shaft 21 moves along the X-axis direction and the intermediate rotation shaft 21 along the Z-axis direction. And the drive shaft 40 (and the transmission shaft 51) move so that the distance between them decreases, and the angle formed by the first arm 22 and the second arm 23 increases. That is, the drive torque transmission unit 20 is extended along the X-axis direction.

As described above, in the moving stage 1A, the ball screw 17 is fixed to the Y stage 13, and as the X stage 12 moves, the drive torque transmission unit 20 having the first arm 22 and the second arm 23 moves in the X-axis direction. Stretch along.

As described above, in the moving stage 1A according to the present embodiment, the driving torque transmission unit that transmits the driving force from the Y electromagnetic motor MY to the Y stage 13 is deformed as the X stage 12 moves. The drive torque transmission unit is deformed as the X stage 11 moves. Here, the drive torque transmission unit 20 includes a drive shaft 42 that is rotationally driven by a Y electromagnetic motor MY, an intermediate rotation shaft 21, a transmission shaft 51,

flat belts

28 and 29, a first arm 22, a second arm 23, and the like. .

The drive torque transmission unit 20 is connected to a Y ball screw 17 that is rotatably attached to the Y stage 13. The drive torque transmission unit 20 changes in length in the X-axis direction as the X stage 12 moves. In the moving stage 1A, the configuration including the drive torque transmission unit 20 and the Y ball screw 17 is referred to as a power transmission unit. Moreover, when the drive torque transmission part 20 deform | transforms, it can be said that the whole power transmission part is also deform | transforming.

As described above, in the moving stage 1A according to the present embodiment, the power transmission unit operates as the X stage 11 moves. Therefore, even when the Y stage 13 moves in the X-axis direction, the power transmission unit can transmit the driving force while maintaining the positional accuracy of the Y stage 13. Further, in the moving stage 1A, since the power transmission unit operates as the X stage 11 moves, the power transmission unit is added to the power transmission unit as compared with the case where the power transmission unit is fixed at a fixed position in the X-axis direction. The load can be reduced. Thereby, since it can suppress that the Y stage 13 receives reaction force from a power transmission part, the deterioration of the attitude | position precision and position accuracy of the Y stage 13 can be suppressed. Thereby, the deviation between the target position of the sample to be moved by the moving stage 1A and the actual position of the moved sample (hereinafter also simply referred to as “sample position deviation”) can be further reduced. .

Further, in the moving stage 1A according to the present embodiment, the driving force from the Y electromagnetic motor MY is applied to the central portion in the X-axis direction of the Y stage 13 via the Y ball screw 17, so that it is unnecessary for the Y stage 13. It is possible to suppress the rotation in the pitching direction and the yawing direction from being applied to the Y stage 13 by applying a rotational moment. Thereby, the attitude | position precision of the Y stage 13 can be kept more favorable, and it can suppress that a sample inclines with respect to a X, Y direction, and XY plane. Thereby, the position shift of the sample can be further reduced.

In addition, it is preferable that the outer peripheral surfaces which contact the

flat belts

28 and 29 are the convex curved surfaces of the

pulleys

24, 25, 26, and 27. Thus, if the outer peripheral surfaces of the

pulleys

24, 25, 26, 27 are convex curved surfaces, the

flat belts

28, 29 are difficult to come off.

In the moving stage 1A according to the present embodiment, the

flat belts

28 and 29 are made of, for example, stainless steel (SUS). The

flat belts

28 and 29 have, for example, a thickness of 0.08 mm and a width of 5 mm.

Also, the width of the portions of the

pulleys

24, 25, 26, 27 that the

flat belts

28, 29 contact, that is, the length in the same direction as the width direction of the

flat belts

28, 29 is, for example, 7 mm, and the

pulleys

24, 25, When the outer peripheral surfaces of 26 and 27 are convex curved surfaces, the curvature of the convex curved surfaces is, for example, a radius of 90 mm.

Further, in the moving stage 1A according to the present embodiment, the

flat belts

28 and 29 are used. However, if the rotating belt can be rotated while maintaining a constant tension and the rotational torque can be transmitted from the drive shaft 42 to the transmission shaft 51, for example, a chain Other tension lines such as may be used.

The X stage 12 and the Y stage 13 are preferably made of ceramics. Ceramics generally have a smaller specific gravity and higher rigidity than metals, and therefore, the X stage 12 and the Y stage 13 (hereinafter also referred to as “stages 12 and 13” when the X stage 12 and the Y stage 13 are not distinguished). Is made of ceramics, it is difficult to deform even if the thickness of the

stages

12 and 13 is thin, and the driving force for driving the

stages

12 and 13 can be small. This brings about an effect that the durability period of the belt becomes longer and the power consumption can be reduced. Further, when the

stages

12 and 13 are made of ceramics, they are not easily deformed even when stress is applied to the

stages

12 and 13 and can be moved immediately by applying a driving force. As a result, the position accuracy and posture accuracy of the stage can be further increased.

Also, since ceramic has a smaller coefficient of thermal expansion than metal, the dimensions are unlikely to change even if the temperature of the

stages

12 and 13 changes, and the position of the stage can be determined with higher accuracy.

Furthermore, the X linear guide 14 and the Y linear guide 15 are preferably made of ceramics. In the moving stage 1A according to the present embodiment, an LM guide (Linear Motion Guide) is used. When the X linear guide 14 and the Y linear guide 15 are made of ceramic, wear resistance and specific rigidity are improved. Therefore, the

linear guides

14 and 15 are less likely to be worn and maintenance management is facilitated, and the position accuracy and posture accuracy of the stage are further increased. It becomes possible to do.

In order to further reduce the magnetic field fluctuation, it is preferable that the screw shafts of the X ball screw 16 and the Y ball screw 17 are made of nonmagnetic stainless steel, and the ball inside the nut is made of high strength ceramic such as silicon nitride.

(Second Embodiment)
Next, a second embodiment of the present invention will be described. The moving stage according to the second embodiment is different from the moving stage according to the first embodiment in the configuration of the power transmission unit. As shown in FIGS. 5 to 7, the power transmission unit of the moving stage 1 </ b> B includes a rotating shaft 60 and a gear unit 61. The rotating shaft 60 is connected to the Y electromagnetic motor MY, and is fixed at a fixed position in the X-axis direction. The gear unit 61 is connected to the rotary shaft 60 and can move in the X-axis direction as the X stage 12 moves. Further, the gear unit 61 rotates with the rotation of the rotating shaft 60. A screw shaft of the ball screw 17 is connected to the gear portion 61. The rotating shaft 60 is rotated by the driving force applied by the Y electromagnetic motor MY, and the screw shaft of the ball screw 17 rotates according to the rotation of the gear portion 61. In FIG. 5 to FIG. 7, a worm gear is used as the gear portion 61.

The gear unit 61 includes a screw gear 61a and a helical gear 61b (helical gear). The bevel gear 61 b is connected to the rotation shaft 60. The screw gear 61 a is connected to the screw shaft of the ball screw 17. Thereby, when the rotating shaft 60 rotates, the inclined gear 61b also rotates, and the screw gear 61a meshed with the inclined gear 61b also rotates. As a result, the screw shaft of the ball screw 17 connected to the screw gear 61a also rotates. The bevel gear 61 b is connected to the rotary shaft 60 via a linear roller bearing 62.

The linear roller bearing 62 has a roller groove inside. Moreover, the rotating shaft 60 has a linear groove 63 parallel to the axial direction on the surface thereof. The linear roller bearing 62 has a plurality of spherical rollers. The roller groove and the groove 63 of the rotating shaft 60 act as a guide for these rollers. The plurality of rollers can circulate while rotating themselves along the roller groove and the groove 63 of the rotating shaft 60. Thereby, the linear roller bearing 62 can move along the groove 63 of the rotating shaft 60. As a result, the inclined gear 62b can move in the X-axis direction.

The bevel gear 61 b is held by the gear holding portion 65 via the bearing 64. The bevel gear 61 b can rotate with respect to the gear holding portion 65 by the bearing 64. Thereby, the inclined gear 61b can rotate with the rotation of the rotating shaft 60.

With the above configuration, the gear unit 61 can move in the X-axis direction as the X-stage 12 moves, and can rotate according to the rotation of the rotary shaft 60. Therefore, by rotating the rotating shaft 60 by the Y electromagnetic motor MY, the ball screw 17 can be rotated and the Y stage 13 can be moved. Further, by changing the rotational speed and rotational speed of the Y ball screw 17 by the Y electromagnetic motor MX, the movement of the Y stage 11 in the Y-axis direction can be controlled.

Further, as shown in FIGS. 8 and 9, another type of gear may be used as the gear unit 61. The gear portion 61 of the moving stage 1C shown in FIGS. 8 and 9 has two

bevel gears

61a and 61b. One bevel gear 61 b is connected to the rotating shaft 60, and the other bevel gear 61 a is connected to the screw shaft of the ball screw 17. Thereby, when the rotating shaft 60 rotates, the bevel gear 61b also rotates, and the bevel gear 61a meshed with the bevel gear 61b also rotates. As a result, the screw shaft of the ball screw 17 connected to the bevel gear 61a also rotates. The bevel gear 61 b is connected to the rotary shaft 60 via a linear roller bearing 62.

The linear roller bearing 62 has a roller groove inside. Moreover, the rotating shaft 60 has a linear groove 63 parallel to the axial direction on the surface thereof. The linear roller bearing 62 has a plurality of spherical rollers. The roller groove and the groove 63 of the rotating shaft 60 act as a guide for these rollers. The plurality of rollers can circulate while rotating themselves along the roller groove and the groove 63 of the rotating shaft 60. Thereby, the linear roller bearing 62 can move along the groove 63 of the rotating shaft 60. As a result, the bevel gear 61b can move in the X-axis direction.

Further, the bevel gear 61 b is held by the gear holding portion 65 via the bearing 64. The bevel gear 61 b can rotate with respect to the gear holding portion 65 by the bearing 64. Thereby, the bevel gear 61b can rotate with the rotation of the rotating shaft 60.

With the above configuration, the bevel gear 61 b can move in the X-axis direction with the movement of the X stage 12, and can rotate according to the rotation of the rotating shaft 60. Therefore, by rotating the rotating shaft 60 by the Y electromagnetic motor MY, the ball screw 17 can be rotated and the Y stage 13 can be moved. Further, by changing the rotational speed and rotational speed of the Y ball screw 17 by the Y electromagnetic motor MX, the movement of the Y stage 11 in the Y-axis direction can be controlled.

In the above-described moving

stages

1B and 1C, the power transmission unit includes a rotating shaft 60 fixed at a fixed position in the X-axis direction and a gear unit 61 connected to the rotating shaft 60 so as to be movable in the X-axis direction. Have. According to this configuration, since the gear part 61 of the power transmission unit operates in accordance with the movement of the X stage 11, the power transmission unit can operate the Y stage 13 even when the Y stage 13 moves in the X-axis direction. The driving force can be transmitted while maintaining the positional accuracy. In the moving

stages

1B and 1C, since the power transmission unit operates as the X stage 11 moves, the power transmission unit is compared with the case where the power transmission unit is fixed at a fixed position in the X-axis direction. The applied load can be reduced. Thereby, since it can suppress that the Y stage 13 receives reaction force from a power transmission part, the deterioration of the attitude | position precision and position accuracy of the Y stage 13 can be suppressed. Thereby, the position shift of the sample can be further reduced.

(Third embodiment)
Next, a third embodiment of the present invention will be described. The moving stage according to the third embodiment is different from the moving stage according to the first embodiment in that it has fine adjustment means for finely adjusting the position of the Y stage 13 in the Y-axis direction. The fine adjustment means is provided on the Y stage 13. By this fine adjustment means, the position of the Y stage 13 in the Y-axis direction can be finely adjusted.

In the moving stage according to the present embodiment, the fine adjustment means includes an adjustment member 70 attached to the Y stage 13 and a plurality of piezoelectric elements 71 as shown in FIGS. The adjustment member 70 is attached to the back surface of the Y stage 13, that is, the surface facing the X stage 11 with a screw 72 via a roller 73. As will be described later, when finely adjusting the position of the Y stage 13, the Y stage 13 moves relative to the adjustment member 70 by bending the screw 72. The adjustment member 70 is fixed to a nut 75 attached to the screw shaft of the ball screw 17. Thereby, the Y stage 13 can move relative to the adjustment member 70 fixed to the nut 75. As a result, the position of the Y stage 13 in the Y-axis direction can be finely adjusted.

The Y stage 13 has a plurality of through holes 73 arranged along the Y-axis direction. Here, as an example, the Y stage 13 has two through holes 73. Hereinafter, a part of the Y stage 13 positioned between the two through holes 73 is also referred to as a “stage part”.

The adjusting member 70 has a base portion 70a located on the back surface of the Y stage 13 and a plurality of fastening portions 70b located on both sides of the stage portion along the Y-axis direction. These fastening portions 70b are positioned so as to sandwich the stage portion of the Y stage 13, and are spaced apart from the side surfaces of the stage portion of the Y stage 13 that face each other. The fastening portion 70b is connected to the base portion 70a by, for example, a screw.

The fastening portions 70b are preferably provided in the same number on both sides of the stage portion along the Y-axis direction so that the Y stage 13 can move by the same pressing force in either direction in the Y-axis direction. 10 and 11, a pair of fastening portions 70b are provided on both sides of the stage portion.

The plurality of piezoelectric elements 71 correspond to the plurality of fastening portions 70b. Each piezoelectric element 71 is disposed between the corresponding fastening portion 70 b and the Y stage 13. Each fastening portion 70 b is positioned on both sides of the Y stage 13 in the Y-axis direction so as to press the piezoelectric element 71 before voltage application against the Y stage 13.

These piezoelectric elements 71 are initially arranged between the fastening portion 70b and the Y stage 13 without applying a voltage. At this time, the piezoelectric element 71 is arranged such that there is as little gap as possible between the piezoelectric element 71 and the Y stage 13 and between the piezoelectric element 71 and the fastening portion 70b. Next, a voltage is applied to the piezoelectric element 71 to extend the piezoelectric element 71 in the Y direction to about half of the maximum extension amount. As a result, the gaps between the piezoelectric element 71 and the Y stage 13 and between the piezoelectric element 71 and the fastening portion 70b are completely eliminated or can be ignored.

Thereafter, when adjusting the position of the Y stage 13, among the plurality of piezoelectric elements 71 located on both sides of the stage part of the Y stage 13, the piezoelectric element 71 a located on one side with respect to the stage part is expanded, and the other The piezoelectric element 71b positioned on the side is contracted by the same amount as the expansion amount of the piezoelectric element 71a. Thereby, the Y stage 13 moves relative to the adjustment member 70, and as a result, the Y stage 13 moves in the Y-axis direction.

Although not shown, the piezoelectric elements 71 are expanded and contracted by applying a voltage to these piezoelectric elements 71.

According to the moving stage according to the present embodiment, since the fine adjustment means is provided, the X stage 11 and the Y stage 13 are moved to predetermined positions by the X electromagnetic motor MX and the Y electromagnetic motor MY, and then the Y stage 13 is moved. Can be finely adjusted in the Y-axis direction.

Further, the fine adjustment means may be realized with other configurations. The fine adjustment means shown in FIGS. 12 to 14 are different from the fine adjustment means shown in FIGS. 10 and 11 in that the length of the base portion 70a in the Y-axis direction is longer than the length of the Y stage 13 in the Y-axis direction. The fastening portion 70 b is also provided outside the outer peripheral portion of the Y stage 13, and the piezoelectric element 71 is disposed so as to be in contact with the outer peripheral portion of the Y stage 13.

Since the base portion 70a is long, the number of screws 72 for attaching the adjusting member 70 to the Y stage 13 is large.

Also in this configuration, the position of the Y stage 13 in the Y-axis direction can be finely adjusted by expanding and contracting the piezoelectric element 71.

10 and 11, the fine adjustment means applies a pressing force to the Y stage 13 along the Y-axis direction in which the Y stage 13 can move, so that the Y of the Y stage 13 Adjust the position in the axial direction.

Further, when the fine adjustment means has the configuration shown in FIGS. 10 and 11, deterioration of the posture accuracy of the Y stage 13 can be suppressed as compared with the configuration shown in FIGS. This is because if the Z-direction component force is applied to the Y stage 13 due to the expansion and contraction of the piezoelectric element 71, the Z-direction component force is more likely to be disposed outside the outer periphery of the Y stage 13. It is because the influence which is received by is small.

Also, as shown in FIGS. 12 and 13, fine adjustment means can be provided on the X stage 11. The types of fine adjustment means provided on the Y stage 13 and fine adjustment means provided on the X stage 11 may be the same or different. However, when the fine adjustment means provided on the Y stage 13 and the fine adjustment means provided on the X stage 11 are the same, for example, some systems such as a power source for applying a voltage to the piezoelectric element are connected to the X stage 11 and the Y stage. It can be used in common for the stage 13. Therefore, the entire configuration of the moving stage can be simplified.

Further, as shown in FIG. 15, the operations of the X electromagnetic motor MX and the Y electromagnetic motor MY are sufficiently controlled by the controller 80. The controller 80 can also be used for the moving stage according to the second and third embodiments.

FIG. 16 is a side view showing a configuration example of a charged particle beam apparatus using the moving stage 1A according to the present embodiment. As shown in FIG. 16, the charged particle beam apparatus 90 includes a moving stage 1 </ b> A and a charged particle beam source 91. The sample can be placed on the upper surface of the Y stage 13. The charged particle beam source 91 generates a charged particle beam such as an electron beam or an ion beam and irradiates the sample. When the charged particle beam apparatus 90 is an electron beam drawing apparatus, for example, an electron beam is irradiated to a sample such as a silicon wafer. The exit of the moving stage 1 </ b> A and the charged particle beam source 91 from which the charged particle beam is emitted is arranged inside the vacuum chamber 3.

When the moving stage 1A according to the present embodiment is used for the charged particle beam apparatus 91, it is possible to reduce the deviation between the target position of the sample to be moved and the position of the sample after the sample is actually moved. Therefore, it is possible to reduce a deviation between a position where the charged particle beam is irradiated on the sample and an actual charged particle beam irradiation position on the sample. Thereby, it is possible to realize finer drawing or more precise inspection on the sample.

12 First stage 13 Second stage 17 Drive shaft MY, MY Motor

Claims

A first stage movable in a first direction;
A second stage at least partially located on the first stage and movable in a second direction intersecting the first direction;
A generating unit that generates a driving force for moving the second stage in the second direction;
A moving stage that transmits the driving force from the generating unit to the second stage and has a power transmitting unit that operates at least partially in accordance with the movement of the first stage.
The moving stage according to claim 1, wherein the power transmission unit is deformed as the first stage moves.
The power transmission unit is
A first drive shaft rotatably attached to the second stage;
The moving stage according to claim 2, further comprising: a deforming unit that deforms with the movement of the first stage between the generating unit and the first drive shaft.
The moving stage according to claim 3, wherein the first drive shaft is attached to a central portion of the second stage in the first direction.
The moving stage according to claim 3 or 4, wherein the deforming portion changes in length in the first direction as the first stage moves.
The deformation part is
A second rotating shaft that is rotationally driven by the generator;
A third rotating shaft provided between the second rotating shaft and the first rotating shaft;
An annular first tension line surrounding the second rotating shaft and the third rotating shaft while maintaining a constant tension, the first tension line transmitting the rotation of the second rotating shaft to the third rotating shaft; ,
An annular second tension line surrounding the third rotating shaft and the first rotating shaft while maintaining a constant tension, and a second tension line transmitting the rotation of the third rotating shaft to the first rotating shaft; With
6. The moving stage according to claim 4, wherein the third rotating shaft is displaced in a direction perpendicular to the first direction in accordance with the movement of the first stage.
The deforming portion includes a first pulley connected to the first rotating shaft, a second pulley connected to the second rotating shaft, a third pulley and a fourth pulley connected to the third rotating shaft, Have
The first tension line is a belt spanned between the second pulley and the third pulley, and the second tension line is a belt spanned between the fourth pulley and the first pulley. The moving stage according to claim 6.
8. The moving stage according to claim 7, wherein outer peripheral surfaces of the first pulley, the second pulley, and the third pulley that are in contact with the belt are convex curved surfaces.
9. The method according to claim 1, further comprising fine adjustment means for finely adjusting a position of the second stage in the second direction by applying a pressing force to the second stage along the second direction. The moving stage described.
The fine adjustment means includes
A member attached to the second stage, the member having a plurality of fastening portions provided on both sides of the second stage in the second direction so as to be positioned away from the second stage;
The moving stage according to claim 9, comprising a plurality of piezoelectric elements provided between the second stage and the plurality of fastening portions.
The second stage has a plurality of through holes arranged along the second direction,
The fine adjustment means includes
A member attached to the second stage, on both sides in the second direction of a part of the second stage located between the adjacent through holes among the plurality of through holes, and the second stage A member having a plurality of fastening portions provided so as to be located away from a part of the stage;
The moving stage according to claim 9, comprising a plurality of piezoelectric elements provided between the second stage and the plurality of fastening portions.
The power transmission unit is
A first drive shaft rotatably attached to the second stage;
A fixed portion connected to the generator and fixed at a fixed position in the first direction;
A moving unit connected to the fixed unit and the first drive shaft and moving in the first direction as the first stage moves;
The moving stage according to any one of claims 1 to 3, further comprising:
The fixed portion has a second drive shaft that is rotationally driven by the generator.
The moving stage according to claim 12, wherein the moving unit includes a gear unit that rotates according to the rotation of the second drive shaft.
The moving stage according to claim 13, wherein the first drive shaft is attached to a central portion in the first direction of the second stage.
The moving stage according to any one of claims 1 to 14, wherein the first stage and the second stage are arranged inside a vacuum vessel, and the generation unit is arranged outside the vacuum vessel.
A moving stage according to any one of claims 1 to 15,
And a controller that controls the operation of the generating unit.
The transport apparatus according to claim 16, wherein a transport apparatus capable of placing a sample on the second stage;
A charged particle beam apparatus including a charged particle beam source provided above the second stage and irradiating the sample with a charged particle beam.