JP2005161467A - Driving connecting mechanism and vacuum robot having this driving connecting mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a driving connecting mechanism capable of transmitting motive power without causing slipping and cutting. <P>SOLUTION: The problem is solved by providing a first arm 62 having one end part rotatably installed around the axis of a driving rotary shaft 31, a second arm 63 having one end part rotatably installed around the axis of a passive rotary shaft 61, an intermediate shaft 64 rotatably installed in the other end part of the first arm 62 and the other end part of the second arm 63, two or more first links 65a and 65b having one end part journaled to an eccentric position of the driving rotary shaft 31 and having the other end part journaled to an eccentric position of the intermediate shaft 64, and two or more second links 66a and 66b having one end part journaled to the eccentric position of the intermediate shaft 64 and having the other end part journaled to an eccentric position of the passive rotary shaft 61; and rotatingly driving the passive rotary shaft 61 via the first links 65a and 65b and the second links 66a and 66b when the driving rotary shaft 31 is rotated. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a drive coupling mechanism that transmits a rotational driving force of a driving rotary shaft that is rotationally driven at a fixed position to a movable passive rotary shaft, and a vacuum robot including the drive coupling mechanism.

  In a semiconductor manufacturing apparatus or the like, there are a plurality of processes in which processing is performed under reduced pressure or vacuum, and among these processes, there is a process in which a substrate is transported in a vacuum container. As a device for transporting a substrate in a vacuum container, for example, a vacuum robot disclosed in Patent Document 1 is known.

In this vacuum robot, a transport unit is housed in a vacuum vessel, and a drive unit is housed in a machine base on the atmosphere side. In this vacuum robot, by driving the motor of the drive unit, the rotational driving force of the motor is transmitted to the arm or hand by two pulleys and a belt stretched around these pulleys in the vacuum container. Yes.
JP 2002-66976 A

  By the way, as a belt used in a vacuum, a steel belt and a steel belt with a dip are known. However, since the steel belt is wound around the outer periphery of the pulley and driven by the frictional force, there is a possibility that slip occurs. Even if a steel belt with sufficient stress is used in consideration of the safety factor, if the mounting accuracy is poor, for example, a location where stress is concentrated abnormally will occur, and the belt may be damaged or cut. Can be. In addition, if the pin pitch and hole pitch are not formed accurately, the steel belt with dip will correct the error with the pin and damage the belt, which may cause damage or cutting of the belt. obtain.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a drive coupling mechanism capable of transmitting power without slipping or cutting, and a vacuum robot equipped with the drive coupling mechanism. Is to provide.

  In the drive coupling mechanism that achieves the above-described object, the rotational drive force of the drive rotary shaft that is rotationally driven at a fixed position extends substantially parallel to the drive rotary shaft and is substantially orthogonal to the drive rotary shaft. A drive coupling mechanism for transmitting to a passive rotary shaft that moves along a plane, extending in a direction substantially orthogonal to the drive rotary shaft, and having one end rotatably attached about the axis of the drive rotary shaft A first arm extending in a direction substantially orthogonal to the drive rotation axis, and having one end portion rotatably attached about the axis of the passive rotation axis, and the first arm An intermediate shaft rotatably attached to the other end portion and the other end portion of the second arm, and extends in a direction substantially orthogonal to the drive rotation shaft, and one end portion is located at an eccentric position of the drive rotation shaft. Axis that can rotate in a direction substantially perpendicular to the drive rotation axis And two or more first links whose other end portions are rotatably attached to the eccentric position of the intermediate shaft in a direction substantially perpendicular to the intermediate shaft, and the axis of the drive rotation shaft Extending in a substantially orthogonal direction, one end is pivotally attached to an eccentric position of the intermediate shaft so as to be rotatable in a direction substantially orthogonal to the intermediate shaft, and the other end is attached to the eccentric position of the passive rotation shaft Two or more second links rotatably mounted in a direction substantially orthogonal to the rotation axis, and when the drive rotation axis is rotated, the passive is transmitted via the first link and the second link. The rotating shaft is rotationally driven.

  According to the present invention, when the drive rotation shaft is rotated, the intermediate shaft is rotated via the first link rotatably attached to the eccentric position of the drive rotation shaft. The passive rotary shaft is rotated via the second link rotatably attached to the eccentric position of the intermediate shaft, and the rotational driving force of the drive rotary shaft is transmitted to the passive rotary shaft. Further, when the passive rotating shaft moves, the first arm and the second arm rotate along with it, and the intermediate shaft moves. However, the intermediate shaft is always rotatably supported by the first arm and the second arm. Even if the passive rotary shaft moves, the rotational driving force of the drive rotary shaft can be transmitted to the passive rotary shaft. Therefore, since the drive coupling mechanism of the present invention does not use a belt, it can transmit the rotational driving force without cutting or slipping, and has high reliability. Further, there is no backlash and the drive transmission accuracy is high.

  In the drive coupling mechanism of the present invention, the first link is composed of two first links, and between the both ends of the first link, the axis of the drive rotation shaft or the axis of the intermediate shaft is the center. Rotating cranks are respectively arranged, and both end portions of two first links are rotatably mounted at eccentric positions of the cranks, and the second link is composed of two second links. The cranks that rotate about the axis of the intermediate shaft or the axis of the passive rotary shaft are respectively arranged between the both ends of each of the shafts, and both ends of the two second links rotate at the eccentric positions of the cranks, respectively. It is preferable that it is pivotally mounted.

  In the drive coupling mechanism of the present invention, the two first links are disposed substantially in parallel and are attached to the crank with a phase difference of approximately 30 to 150 degrees (approximately 330 to 210 degrees). The second link is arranged substantially in parallel, and is attached to the crank with a phase difference of about 30 to 150 ° (about 330 to 210 °), and the two first links are arranged substantially in parallel. Are attached to the crank with a phase difference of approximately 90 °, and the two second links are arranged substantially in parallel with each other and have a phase difference of approximately 90 ° with respect to the crank and from the first link. It is preferable that they are attached with a phase difference of about 180 °.

  According to the present invention, since the two links are attached to the crank with a phase difference of about 30 to 150 ° (about 330 to 210 °), particularly about 90 ° (about 270 °), the rotational force of the drive rotary shaft is reduced. The rotational force of the intermediate shaft and the intermediate shaft can be transmitted to the passive rotational shaft with a small driving force, which is efficient.

  In the drive coupling mechanism of the present invention, it is preferable that the crank is provided with a balance weight that positions the center of gravity of the crank on a rotating shaft. According to this invention, since the center of gravity of the crank is positioned on the rotating shaft by the balance weight, it is possible to suppress the occurrence of vibration when rotating.

  In the drive coupling mechanism of the present invention, the drive rotation shaft is disposed at a position where the first arm and the second arm are crossed when the passive rotation shaft moves on a straight line, the intermediate A shaft is rotatably supported on the other end of the first arm and the other end of the second arm via front combination angular bearings, and rotation of both ends of the first arm. It is preferable that the length between the axis | shafts to perform and the length between the shafts which the both ends of the said 2nd arm rotate differ.

  According to the present invention, when the passive rotating shaft moves on a straight line, if the first arm and the second arm cross, the first arm and the second arm are smoothly moved. Further, by supporting the first arm and the second arm with the front combination type angular bearing, it is possible to absorb an accuracy error when the first arm and the second arm overlap, and the first arm and the second arm. And move more smoothly. Further, since the length between the rotating shafts at both ends of the first arm is different from the length between the rotating shafts at both ends of the second arm, the first arm and the second arm are overlapped with each other. The movement between the arm and the second arm is performed more smoothly.

  A vacuum robot according to the present invention includes the drive coupling mechanism. Since the vacuum robot of the present invention includes the drive coupling mechanism of the present invention, it has high reliability and high drive transmission accuracy.

  As described above, according to the drive coupling mechanism of the present invention, when the drive rotation shaft is rotated, the passive rotation shaft is rotated via the first link and the second link, and the rotational driving force of the drive rotation shaft is increased. Even if the passive rotary shaft moves, the first and second arms can transmit the rotational driving force of the drive rotary shaft to the passive rotary shaft even if the passive rotary shaft moves. Can transmit driving force and is highly reliable. Also, there is no backlash and drive transmission accuracy is high. Further, since the robot according to the present invention includes the drive coupling mechanism according to the present invention, the robot has high reliability and high drive transmission accuracy.

  Hereinafter, a drive coupling mechanism of the present invention and a vacuum robot including the drive coupling mechanism will be described in detail with reference to the accompanying drawings.

(Vacuum robot)
1, 2 and 4 show an example of the vacuum robot of the present invention. FIG. 3 is a diagram showing an example of the transfer unit main body of the vacuum robot of the present invention. As shown in FIGS. 1 to 4, the vacuum robot according to the present invention includes a transport unit 3 disposed in a vacuum container 2 (see FIG. 8) and a drive unit 4 disposed outside the vacuum container 2. ing. The transport unit 3 includes a transport unit main body 11, a fork unit 12 on which a substrate and the like are loaded, and a guide unit 13 that supports the transport unit main body 11 so as to be capable of linear reciprocation.

  The transport unit body 11 is erected in the vacuum container 2. The transport unit body 11 extends in the direction of gravity and has a substantially rectangular horizontal cross section. As shown in FIG. 3, a ball screw 15 extending in the height direction (gravity direction) is provided in the transport unit body 11.

  An upper part of the ball screw 15 is rotatably attached to the upper bearing 16, and a lower part is rotatably attached to the lower bearing 17, and the ball screw 15 is rotatably supported. The upper bearing 16 and the lower bearing 17 are not particularly limited as long as they are generally known as ball screw bearings, and examples thereof include ball bearings.

  A moving part 18 is mounted between the upper bearing 16 and the lower bearing 17 of the ball screw 15, and the moving part 18 moves up and down along the ball screw 15 when the ball screw 15 is driven to rotate. ing. A fork unit 12 is attached to the moving unit 18.

  As shown in FIGS. 1, 2, and 4, the fork portion 12 includes an attachment body 20 attached to the moving portion 18 and a fork 21 attached to the attachment body 20. The attachment body 20 is formed in an elongated rectangular box shape extending in the horizontal direction. A plurality of, for example, a total of twelve forks 21, for example, six above and below, are attached to the top and bottom of the attachment body 20 in a horizontal direction and at predetermined intervals.

  At the bottom of the transport unit body 11, a guide unit 13 that supports the transport unit body 11 so as to be capable of linear reciprocation is provided. A movement motor 23 is disposed at the bottom of the vacuum vessel 2, and the conveyance unit main body 11 is guided and moved by the guide unit 13 by driving the movement motor 23. The guide portion 13 is fixed to the bottom of the vacuum vessel 2 via a flange 24. A drive unit 4 is provided at the bottom of the vacuum vessel 2 near the center of the guide unit 13.

  As shown in FIG. 8, the drive unit 4 includes a drive motor (not shown) that drives the drive rotation shaft 31 to rotate. This drive motor is a motor that can rotate forward and backward, and is disposed outside the bottom of the vacuum vessel 2. A drive rotary shaft 31 that is rotationally driven by the drive motor extends through the bottom of the vacuum vessel 2 in the vertical direction within the vacuum vessel 2. Specifically, for example, a cylindrical through hole 33 is provided at the bottom of the vacuum vessel 2, and a wall portion 34 extending in the height direction of the vacuum vessel 2 is attached to the through hole 33.

  The wall 34 is formed in a cylindrical shape whose outer diameter is smaller than the diameter of the through hole 33, for example. A drive box 35 is detachably attached to a lower portion of the wall portion 34 by a fastening member such as a bolt 36. The drive box 35 houses a drive motor and the like.

  The outer periphery below the wall 34 is attached to the bottom of the vacuum vessel 2 in a sealed state. The sealing structure between the wall portion 34 and the bottom portion of the vacuum vessel 2 is not particularly limited, and is performed using, for example, a bellows 41 and O-rings 42, 43, and 44. Specifically, for example, a fixed body 45 is attached by a fastening member such as a bolt 46 inside the bottom of the vacuum vessel 2 that forms the through hole 33. The fixed body 45 is formed in a ring shape having an outer diameter larger than the diameter of the through hole 33 and an inner diameter smaller than the diameter of the through hole 33, and is attached substantially coaxially with the through hole 33. A first O-ring 42 is provided between the fixed body 45 and the bottom of the vacuum vessel 2, and the space between them is sealed.

  A first attachment body 47 is attached to a fixed body 45 outside the vacuum vessel 2 by a fastening member such as a bolt 48. The first mounting body 47 is formed in a ring shape having an outer diameter smaller than the diameter of the through-hole 33 and a diameter larger than the inner diameter of the fixed body 45 and an inner diameter smaller than the diameter of the fixed body 45. A second O-ring 43 is provided between the attachment body 47 and the fixed body 45, and the space between them is sealed. One end of the bellows 41 is attached to the first attachment body 47.

  A flange portion 49 extending outward in the radial direction is provided on the outer periphery of the wall portion 34 located in the vacuum vessel 2, and a second member is fastened to the lower surface of the flange portion 49 by a fastening member such as a bolt 51. A mounting body 50 is attached. The second mounting body 50 is formed in a ring shape whose outer diameter is slightly smaller than the inner diameter of the fixed body 45, and a third O-ring 44 is interposed between the second mounting body 50 and the flange portion 49. It is provided and the space between them is sealed. The other end portion of the bellows 41 is attached to the second attachment body 50, and the space between the second attachment body 50 and the first attachment body 47 is sealed. The bellows 41 and the three O rings 42, 43, 44 seal between the wall 34 and the bottom of the vacuum vessel 2. The flange portion 49 of the wall portion 34 is attached to the attachment plate 55 by a fastening member such as a bolt 52 in a state where the upper surface of the flange portion 49 is in contact with the lower surface of the attachment plate 55. It is fixed to the flange 24 of the guide portion 13.

  Inside the wall portion 34, a drive rotating shaft 31 that is driven to rotate by a drive motor is provided substantially coaxially. The drive rotation shaft 31 (wall portion 34) is disposed on a line that is substantially an intermediate portion where the ball screw 15 moves linearly and is substantially orthogonal to the straight line, and is rotated by a bearing 56 provided in the wall portion 34. Supported as possible.

  The upper portion of the wall portion 34 extends from the mounting plate 55 into the vacuum vessel 2, and a seal member 57 that seals between the wall portion 34 and the drive rotating shaft 31 is provided inside the wall portion 34. The seal member 57 is not particularly limited as long as it can be sealed, and for example, a magnetic seal or the like is used. Thereby, the inside of the drive box 35 and the inside of the vacuum vessel 2 are sealed. A stepped stopper portion 31 a having a large outer diameter is formed on the upper portion of the drive rotation shaft 31. The rotational driving force of the drive rotary shaft 31 is transmitted to the passive rotary shaft 61 connected to the ball screw 15 via the drive connecting mechanism 60. As shown in FIG. 10, a passive rotary shaft 61 is connected coaxially to the lower portion of the ball screw 15 via couplings 58 and 59.

(Drive coupling mechanism)
5 to 7 are views showing an example of the drive coupling mechanism of the present invention. As shown in FIGS. 5 to 7, the drive coupling mechanism 60 of the present invention extends the rotational drive force of the drive rotary shaft 31 driven to rotate at a fixed position substantially parallel to the axis of the drive rotary shaft 31. This is transmitted to a surface that is substantially orthogonal to the drive rotation shaft 31, for example, a passive rotation shaft 61 that moves on a straight line.

  The drive coupling mechanism 60 of the present invention has a first arm 62 having one end portion rotatably attached around the axis of the drive rotary shaft 31 and one end portion attached rotatably around the axis of the passive rotary shaft 61. The second arm 63, the intermediate shaft 64 rotatably attached to the other end of the first arm 62 and the other end of the second arm 63, and one end at the eccentric position of the drive rotating shaft 31. 2 is rotatably mounted in a direction substantially orthogonal to the drive rotation shaft 31, and the other end is rotatably mounted in an eccentric position of the intermediate shaft 64 in a direction substantially orthogonal to the intermediate shaft 64. The first link 65 and one end are pivotally attached to an eccentric position of the intermediate shaft 64 so as to be rotatable in a direction substantially perpendicular to the intermediate shaft 64, and the other end is an eccentric position of the passive rotating shaft 61. Attached so as to be rotatable in a direction substantially orthogonal to the passive rotary shaft 61. Those having 2 or more and a second link 66 that.

  The first arm 62 extends in a direction substantially orthogonal to the drive rotation shaft 31, and one end of the first arm 62 is a surface substantially orthogonal to the drive rotation shaft 31 with the axis of the drive rotation shaft 31 as the center. It is attached so that it can rotate along (shaft-mounted). If the first arm 62 rotates along a plane substantially perpendicular to the axis of the drive rotation shaft 31, the rotation support structure at one end thereof is not particularly limited, and is attached to the drive rotation shaft 31 so as to be directly rotatable. However, as shown in FIG. 8, the wall portion 34 may be rotatably attached.

  Specifically, for example, as shown in FIGS. 8 and 11, a through hole 62a having an inner diameter that is substantially the same as or slightly larger than the outer diameter of the wall 34 is provided at one end of the first arm 62. The wall 34 is inserted into the through hole 62a. Concave bearing housing portions 37 and 62b for housing a bearing 70 for rotatably supporting the first arm 62 are provided on the outer periphery of the wall portion 34 and the through hole 62a facing each other. The side portions (side portions opposite to the mounting plate) 38 and 62c forming these bearing housing portions 37 and 62b are upper portions of the wall portion 34 or side ends of the first arm 62 by fastening members such as bolts 39 and 71. It is possible to attach the bearing 70 to the bearing housing portions 37 and 62b in a state where the first arm 62 is attached to the wall portion 34 (the wall portion 34 is inserted into the through hole 62a). It can be done. The bearing 70 is not particularly limited as long as the first arm 62 can be rotatably supported. However, when the first arm 62 is supported by the wall portion 34, a cross roller bearing or the like is preferable, and the first arm 62 is driven and rotated. When supported by the shaft 31, a front combination angular bearing or the like is preferable.

  The second arm 63 extends in a direction substantially orthogonal to the drive rotation shaft 31, and one end of the second arm 63 is centered on the axis of the passive rotation shaft 61 as shown in FIGS. 10 and 12. Attached so as to be rotatable along a plane substantially orthogonal to the passive rotating shaft 61 (attached to the shaft). If the second arm 63 rotates along a plane substantially orthogonal to the axis of the passive rotation shaft 61, the rotation support structure at one end thereof is not particularly limited, and the second arm 63 is rotatably attached to the transport unit body 11. Alternatively, as shown in the figure, it may be attached to the passive rotating shaft 61 (lower passive rotating shaft 61a) so as to be directly rotatable.

  Specifically, for example, a stepped stopper portion 61b having a large outer diameter is formed near the lower portion of the passive rotating shaft 61 (lower passive rotating shaft 61a). One end of the second arm 63 is provided with a through hole 63a having an inner diameter that is substantially the same as or slightly larger than the diameter of the stopper portion 61b of the passive rotary shaft 61. The passive rotary shaft 61 is provided in the through hole 63a. It has been. The through hole 63a is provided with a concave bearing accommodating portion 63b. The bearing 72 accommodated in the bearing accommodating portion 63b rotatably supports the second arm 63 and passively rotates the second arm 63. Extraction from the shaft 61 is prevented. A side part (side part on the ball screw side) 63c forming the bearing housing part 63b is detachably attached to a side end part of the second arm 63 by a fastening member such as a screw 73, and the second arm 63 is passively rotated. The bearing 72 can be attached to the bearing housing portion 63b in a state of being attached to the shaft 61 (the passive rotary shaft 61 is inserted into the through hole 63a). The bearing 72 is not particularly limited as long as the second arm 63 can be rotatably supported. However, when the second arm 63 is supported by the passive rotary shaft 61, a front combination angular bearing or the like is preferable. Is preferably supported by the transport body 11, a cross roller bearing or the like is preferable.

  As shown in FIGS. 7 and 9, an intermediate shaft 64 is rotatably attached to the other end of the first arm 62 and the other end of the second arm 63. The intermediate shaft 64 is rotatably supported by the other end of the first arm 62 and the other end of the second arm 63 so as to extend substantially parallel to the axis of the drive rotation shaft 31. Specifically, for example, a stepped stopper portion 64b having a large outer diameter is formed near the lower portion of the intermediate shaft 64 (first intermediate shaft 64a). The other end of the first arm 62 is provided with a through hole 62d having an inner diameter that is approximately the same as or slightly larger than the diameter of the stopper portion 64b of the intermediate shaft 64. The intermediate shaft 64 (first shaft) is provided in the through hole 62d. An intermediate shaft 64a) is inserted. The through hole 62d is provided with a concave bearing housing portion 62e. A bearing 74 housed in the bearing housing portion 62e rotatably supports the first arm 62, and an intermediate shaft of the first arm 62. 64 (first intermediate shaft 64a) is prevented from being pulled out. An upper side portion 62f forming the bearing housing portion 62e is detachably attached to a side end portion of the first arm 62 by a fastening member such as a screw 75, and the first arm 62 is attached to the intermediate shaft 64. The bearing 74 can be attached to the bearing housing portion 62e in a state where the intermediate shaft 64 is inserted into the through hole 62d. The bearing 74 is not particularly limited as long as the first arm 62 can be rotatably supported, but a front combination angular bearing or the like is preferable.

  A stepped stopper portion 64d having a large outer diameter is formed slightly above the central portion of the intermediate shaft 64 (second intermediate shaft 64c). The other end of the second arm 63 is provided with a through hole 63d having an inner diameter that is approximately the same as or slightly larger than the diameter of the stopper portion 64d of the intermediate shaft 64, and the intermediate shaft 64 is inserted into the through hole 63d. ing. The through hole 63d is provided with a concave bearing housing portion 63e. A bearing 76 housed in the bearing housing portion 63e rotatably supports the second arm 63, and an intermediate shaft of the second arm 63. Extraction from 64 is prevented. An upper side portion 64f forming the bearing housing portion 63e is detachably attached to a side end portion of the second arm 63 by a fastening member such as a screw 77, and the second arm 63 is attached to the intermediate shaft 64. The bearing 76 can be attached to the bearing housing portion 63e in a state where the intermediate shaft 64 is inserted into the through hole 63d. Although it will not specifically limit as this bearing 76 if the 2nd arm 63 can be rotatably supported, A front combination type angular bearing etc. are preferable. As a result, the first arm 62 and the second arm 63 rotate individually about the axis of the intermediate shaft 64 as an axis, respectively. Even if the passive rotation shaft 61 moves linearly, the first arm 62 and The second arm 63 rotates at both ends, and the drive rotating shaft 31 and the passive rotating shaft 61 are always connected via the first arm 62 and the second arm 63.

  The length of the first arm 62 (the length between the rotating shafts at both ends of the first arm 62) and the length of the second arm 63 (the length between the rotating shafts at both ends of the second arm 63) are as follows. Although not particularly limited, the passive rotary shaft 61 is formed to have a dimension that is 1/4 or more of the maximum length of linear movement. The length of the first arm 62 and the length of the second arm 63 are arbitrarily determined according to the position of the drive rotation shaft 31. The arrangement position of the drive rotary shaft 31 is preferably such a position that the first arm 62 and the second arm 63 cross when the passive rotary shaft 61 moves on a straight line. For example, FIGS. As shown in FIG. 4, it is preferable that the passive rotary shaft 61 is disposed in the vicinity of or on a straight line on which the passive rotating shaft 61 moves. This is because, when the passive rotary shaft 61 moves on a straight line, if the first arm 62 and the second arm 63 cross, the first arm 62 and the second arm 63 move smoothly. is there. As shown in FIG. 20, the drive rotary shaft 31 may be arranged so that the two arms do not overlap even when the passive rotary shaft 61 moves.

  The length of the first arm 62 and the length of the second arm 63 may be the same, but are preferably different. If the lengths of the two arms are the same, it is difficult to absorb the accuracy error when the first arm 62 and the second arm 63 overlap each other. By supporting the first arm 62 and the second arm 63, it is possible to absorb an accuracy error when the first arm 62 and the second arm 63 overlap each other. Move more smoothly. Further, the first arm 62 and the second arm 63 overlap each other because the length between the rotating shafts at both ends of the first arm 62 and the length between the rotating shafts at both ends of the second arm 63 are different. Sometimes the first arm 62 and the second arm 63 are moved more smoothly.

  The first link 65 transmits the rotational driving force of the drive rotary shaft 31 to the intermediate shaft 64, and one end portion is attached to the eccentric position of the drive rotary shaft 31, and the other end portion is the intermediate shaft 64. It is attached to the eccentric position. The number of the first links 65 is not particularly limited, but is 2 or more, for example, 2 in the embodiment shown in FIGS. The two links (the first a link 65a and the first b link 65b) are the same. The first link 65 (the first a link 65a and the first b link 65b) extends in a direction substantially orthogonal to the drive rotation shaft 31, and is one end of the first link 65 (the first a link 65a and the first b link 65b). The part is attached to an eccentric position of the drive rotary shaft 31 so as to be rotatable along a plane substantially orthogonal to the drive rotary shaft 31 (attached to the shaft).

  Specifically, for example, the first rotating member 81, one link of the first link (the first a link 65a) (the first eccentric shaft 84), the first crank 82, and the first link are arranged on the upper portion of the drive rotating shaft 31. The remaining links (first b link 65b) (second eccentric shaft 87) are sequentially attached.

  The first rotating member 81 is formed in an elongated plate shape as shown in FIG. 16, and is driven and rotated as shown in FIGS. 8 and 16 at a substantially central portion in the longitudinal direction of one surface thereof. A shaft fitting recess 81a into which the upper portion of the shaft 31 is fitted is provided. That is, the upper portion of the drive rotation shaft 31 protrudes from the wall portion 34, and the first rotation member 81 is attached to the upper portion of the drive rotation shaft 31 that protrudes.

  In the shaft fitting recess 81a, eight through holes are provided at predetermined intervals in the circumferential direction. Of these through holes, two through holes on the center line (center line extending in the longitudinal direction) of the first rotating member are positioning holes 81 b when the first rotating member is attached to the drive rotating shaft 31. The remaining six through holes are mounting holes 81c provided with screw grooves for mounting the first rotating member to the drive rotating shaft 31 by a fastening member such as a bolt 83, and the mounting holes 81c include bolts 83. An enlarged-diameter portion 81d that is enlarged in a step shape so as to accommodate a head such as the like is provided.

  On one end side of the first rotating member 81, eight through holes are provided that are arranged in substantially the same manner as the eight through holes in the shaft fitting recess 81a. Of these through holes, two through holes on the center line (center line extending in the longitudinal direction) of the first rotating member 81 are positioning holes 81e when the first eccentric shaft 84 is attached. The remaining six through-holes are mounting holes 81f provided with screw grooves for mounting the first eccentric shaft 84 by fastening members such as bolts 86, and heads such as bolts are provided in these mounting holes 81f. An enlarged-diameter portion 81g that is enlarged stepwise so as to be accommodated is provided. A first eccentric shaft 84 is attached to one end portion side of the first rotating member 81.

  One end of a first a link 65a is rotatably attached to the first eccentric shaft 84. That is, as shown in FIG. 8 and FIG. 13, a through hole 65aa is provided at one end of the first a link 65a, and the first a link is inserted with the first eccentric shaft 84 inserted into the through hole 65aa. One end of 65a is attached to (attached to) the first eccentric shaft 84. A bearing 85 that rotatably supports the first a link 65a is provided between the through hole 65aa of the first a link 65a and the first eccentric shaft 84. As the bearing 85, the first a link 65a is rotated. There is no particular limitation as long as it can be supported. Thereby, the one end part of the 1a link 65a is attached to the eccentric position of the drive rotating shaft 31. In FIG. 8, the first eccentric shaft 84, the first a link 65a, and the like are normally in positions not shown in the figure, but are shown on the drawing for easy understanding of the correspondence.

  A first crank 82 is attached to the opposite side of the first eccentric shaft 84 from the first rotating member 81. As shown in FIG. 14, the first crank 82 is formed in a substantially square plate shape having four corners formed in R, and a circular hole 82 a centering on the center is provided at the center. It has been. One of the four corners of the first crank 82 is provided with eight through holes arranged in substantially the same manner as the eight through holes of the first rotating member 81 (one end side thereof). Of these through holes, two through holes are positioning holes 82b when the first eccentric shaft 84 is attached. When the first crank 82 is attached to the first eccentric shaft 84, the center of the first crank 82 is centered. This is for positioning on the axis of the drive rotation shaft 31. The remaining six through-holes are holes 82c for attaching to the first eccentric shaft 84 by fastening members such as bolts 86, etc., and these holes 82c are stepped so that heads such as the bolts 86 and the like are accommodated. An enlarged-diameter portion 82d having an enlarged diameter is provided.

  8 for attaching the second eccentric shaft 87 to the surface opposite to the surface to which the first eccentric shaft 84 is attached at the corner of the first crank 82 adjacent to the location where the first eccentric shaft 84 is attached. Two through holes are provided. Of these through holes, two through holes are positioning holes 82e when the second eccentric shaft 87 is attached. The remaining six through-holes are holes 82f for attaching to the second eccentric shaft 87 by fastening members such as bolts 88, etc., and these holes 82f are stepped so that heads such as the bolts 88 are accommodated. An enlarged-diameter portion 82g having an enlarged diameter is provided. That is, the first rotating member 81, the first eccentric shaft 84, the first crank 82, and the second eccentric shaft 87 attached to the upper portion of the driving rotary shaft 31 are rotated together with the driving rotary shaft 31. It has become.

  Further, the first crank 82 is preferably provided with a balance weight 82h for positioning the center of gravity of the crank 82 on the drive rotation shaft 31. The balance weight 82h is not particularly limited as long as the center of gravity of the first crank 82 can be positioned on the drive rotation shaft 31, and may be provided integrally with the first crank 82 or may be provided individually.

  As shown in FIG. 8, one end portion of the first b link 65b is rotatably attached to the second eccentric shaft 87 (attached to the shaft). That is, a through hole 65ba is provided at one end of the first b link 65b, and the one end of the first b link 65b is connected to the second eccentric shaft 87 in a state where the second eccentric shaft 87 is inserted into the through hole 65ba. Is attached. A bearing 89 that rotatably supports the first b link 65b is provided between the through hole 65ba of the first a link 65a and the first eccentric shaft 87. The bearing 89 rotates the first b link 65b. There is no particular limitation as long as it can be supported. Accordingly, one end of the first b link 65b is attached to a position that is an eccentric position of the drive rotation shaft 31 and is approximately 90 ° (approximately 270 °) out of phase with the first a link 65a. The two first links 65a and 65b are not particularly limited with respect to the mounting position on the first crank 82, but are preferably mounted with a phase difference of approximately 30 to 150 degrees (approximately 330 to 210 degrees). In particular, it is particularly preferable that they are attached with a phase difference of approximately 90 ° (approximately 270 °).

  In the illustrated embodiment, two links are used as the first link, but three or more links may be used. In this case, the first b link is attached to the first a link via a crank. The third or more links can be attached in substantially the same manner as in the case of. Moreover, when using three or more links, it is preferable that these links are attached so that a phase difference becomes equal intervals. For example, when three links are used, it is preferable to attach them with a phase difference of 120 °.

  The other end of the first a link 65a and the other end of the first b link 65b are attached to an eccentric position of the intermediate shaft 64 between the first arm 62 and the second arm 63, as shown in FIGS. It has been. The other end of the first a link 65a and the other end of the first b link 65b are attached to the intermediate shaft 64 in substantially the same manner as the attachment to the drive rotating shaft 31. That is, the second rotating member 90, the first a link 65a (third eccentric shaft 91), the second crank 92, and the first b link are disposed on the first intermediate shaft 64a that is rotatably supported by the first arm 62. 65b (fourth eccentric shaft 93) and a third rotating member 94 are sequentially attached, and this third rotating member is attached to the lower portion of the second intermediate shaft 64c that is rotatably supported by the second arm 63. ing. That is, the second rotating member 90, the third eccentric shaft 91, the second crank 92, the fourth eccentric shaft 93, and the third rotating member 94 constitute a part of the intermediate shaft 64.

  The second rotating member 90 is the same as the first rotating member 81 described above. The upper part of the first intermediate shaft 64a is fitted into the shaft fitting recess 90a of the second rotating member 90, and the second rotating member 90 is attached to the first intermediate shaft 64a by a fastening member such as a bolt 96. A third eccentric shaft 91 is attached to one end of the second rotating member 90 by a fastening member such as a bolt. The other end portion of the first a link 65a is rotatably attached to the third eccentric shaft 91 via a bearing 97, and the other end portion of the first a link 65a is attached to an eccentric position of the intermediate shaft 64a. ing.

  A second crank 92 is attached on the opposite side of the third eccentric shaft 91 from the second rotating member 90 so that the center is on the axis of the intermediate shaft 64. The second crank 92 is the same as the first crank 82. A fourth eccentric shaft 93 is attached to the second crank 92 with a phase difference of approximately 90 ° (approximately 270 °) with respect to the third eccentric shaft 91. The fourth eccentric shaft 93 is substantially the same as the first a link 65a. The other end of the first b link 65b is rotatably attached via a bearing 98 so as to be arranged in parallel (axially attached).

  A third rotating member 94 is attached to the upper part of the fourth eccentric shaft 93. The third rotating member 94 is formed in substantially the same shape as the first rotating member 81, except that the two side portions extending in the longitudinal direction of the third rotating member 94 out of the eight through holes are different. Two adjacent through holes are formed as positioning holes 94a and 94b. The upper part of the third eccentric shaft 93 is attached to one end portion side of the third rotating member 94 by a fastening member such as a bolt 99, and the second rotating member 90 and the third rotating member 94 are substantially orthogonal to each other. It is attached as follows. A lower part of the second rotating shaft 64c is attached to a central portion of the third rotating member 94 opposite to the surface on which the third eccentric shaft 93 is attached by a fastening member such as a bolt 100. Thus, between the intermediate shafts 64 (between the first intermediate shaft 64a and the second intermediate shaft 64c), the second rotating member 90, the third eccentric shaft 91, the second crank 92, the fourth eccentric shaft 93, and the second A three-rotation member 94 is provided, and when the drive rotary shaft 31 is rotationally driven, the intermediate shaft 64 is rotationally driven by the first a link 65a and the first b link 65b.

  As shown in FIGS. 5 to 7 and 9, the second link 66 transmits the rotational driving force of the intermediate shaft 64 to the passive rotational shaft 61, and one end thereof is attached to the eccentric position of the intermediate shaft 64. In addition, the other end is pivotally attached to the eccentric position of the passive rotary shaft 61. The number of the second links 66 is not particularly limited, but is preferably the same as the number of the first links 65, for example, 2 or the like.

  The attachment structure of the second link 66 to the intermediate shaft 64 and the passive rotary shaft 61 is configured in substantially the same manner as the attachment structure of the first link 65. In other words, the second link 66 is composed of a second a link 66a and a second b link 66b, and the second a link 66a and the second b link 66b are the same. The second a link 66a and the second b link 66b are formed in the same shape except for the length of the first link 65 in the longitudinal direction. A fourth rotating member 101, a fifth eccentric shaft 102 (second a link 66a), a third crank 103, and a sixth eccentric shaft 104 (second b link 66b) are sequentially attached to the upper portion of the second intermediate shaft 64c. The fourth rotating member 101, the fifth eccentric shaft 102, the third crank 103, and the sixth eccentric shaft 104 constitute a part of the intermediate shaft 64. The fourth rotating member 101, the fifth eccentric shaft 102, the third crank 103, and the sixth eccentric shaft 104 are the same as the first rotating member 81, the first eccentric shaft 84, the first crank 82, and the second eccentric shaft 87, respectively. Things are used. In FIG. 9, the third eccentric shaft 91, the first a link 65a, the fifth eccentric shaft 102, the second a link 66a, etc. are normally not shown, but are shown on the drawing for easy understanding of the correspondence. It is.

  The upper part of the second intermediate shaft 64c is fitted into the shaft fitting recess 101a of the fourth rotating member 101, and the fourth rotating member 101 is attached to the second intermediate shaft 64c by a fastening member such as a bolt 106. At this time, the 4th rotation member 101 is 2nd so that the attachment position of the 2a link 66a may become the position (position shifted about 180 degrees) opposite to the 2nd rotation member 91 centering on the axis of intermediate shaft 64. It is attached to the intermediate shaft 64c. A fifth eccentric shaft 102 is attached to one end portion side of the fourth rotating member 101 by a fastening member such as a bolt. One end portion of the second a link 66a is rotatably attached to the fifth eccentric shaft 102 via a bearing 107, and one end portion of the second a link 66a is attached to an eccentric position of the intermediate shaft 64. .

  A third crank 103 is attached to the opposite side of the fifth eccentric shaft 102 to the fourth rotating member 101 so that the center is on the axis of the intermediate shaft 64. The third crank 103 has a sixth eccentric shaft 104 attached thereto with a phase difference of approximately 90 ° (approximately 270 °) with respect to the fifth eccentric shaft 102, and the fourth rotating member 101 and the fifth eccentric shaft 102 together with the intermediate shaft 64. The third crank 103 and the sixth eccentric shaft 104 are configured to rotate. One end of a second b link 66b is rotatably mounted on the sixth eccentric shaft 104 via a bearing 108, and the two second links 66a and 66b are approximately 180 ° from the first links 65a and 65b. That is, the four links 66a, 66b, 65a, 65b are arranged with a phase difference of approximately 90 °.

  The other end of the second a link 66a and the other end of the second b link 66b are respectively attached to the eccentric positions of the passive rotating shaft 61 as shown in FIGS. The other end of the second a link 66a and the other end of the second b link 66b are attached to the passive rotary shaft 61 to the other end of the first a link 65a and the other end of the first b link 65b to the intermediate shaft 64. It is performed in substantially the same way as the mounting. That is, the sixth rotary member 111, the seventh eccentric shaft 112 (the second a link 66a), the fourth crank 113, the eighth, and the eighth arm 63 are rotatably supported on the second arm 63. The eccentric shaft 114 (second b link 66b) and the seventh rotating member 115 are sequentially attached. The sixth rotating member 111, the seventh eccentric shaft 112, the fourth crank 113, the eighth eccentric shaft 114, and the seventh rotating member 115 constitute a part of the passive rotating shaft 61. The sixth rotating member 111, the seventh eccentric shaft 112, the fourth crank 113, and the eighth eccentric shaft 114 are the same as the second rotating member 90, the third eccentric shaft 91, the second crank 92, and the fourth eccentric shaft 93. The seventh rotating member 115 is substantially the same in function as the third rotating member 94 except for the shape. In FIG. 10, the seventh eccentric shaft 112, the second a link 66a, and the like are normally in positions not shown, but are shown on the drawing for easy understanding of the correspondence.

  The upper part of the lower passive rotary shaft 61a is fitted into the shaft fitting recess 111a of the sixth rotary member 111, and the sixth rotary member 111 is attached to the lower passive rotary shaft 61a by a fastening member such as a bolt 120. A seventh eccentric shaft 112 is attached to one end portion side of the sixth rotating member 111 by a fastening member such as a bolt. The other end of the second a link 66a is rotatably attached to the seventh eccentric shaft 112 via a bearing 121, and the other end of the second a link 66a is attached to the eccentric position of the passive rotation shaft 61. It has been.

  A fourth crank 113 is attached to the opposite side of the seventh eccentric shaft 112 to the sixth rotating member 111 so that the center is on the axis of the passive rotating shaft 61. An eighth eccentric 114 shaft is attached to the fourth crank 113 with a phase difference of approximately 90 ° (approximately 270 °) with respect to the seventh eccentric shaft 112, and the eighth eccentric shaft 114 is connected to the second eccentric link 114b. The other end is rotatably mounted via a bearing 122.

  A seventh rotating member 115 is attached to the upper portion of the eighth eccentric shaft 114 by a fastening member such as a bolt 123. As shown in FIG. 17, the seventh rotating member 115 is substantially the same in function as the third rotating member 94 except for the shape of the third rotating member 94. Eight through holes are provided on one end side of the seventh rotating member 115 in substantially the same manner as the third rotating member 94, but the central portion of the seventh rotating member 115 is coaxial with the ball screw 15. Eight through holes 115a attached to the upper passive rotating shaft 61c for connection by couplings 58 and 59 are provided at predetermined intervals. The seventh rotating member 115 is connected to the ball screw 15 via the upper passive rotating shaft 61c, so that the ball screw 15 is rotated when the passive rotating shaft 61 is rotated.

  Next, the operation of the drive coupling mechanism of the present invention will be described. When the drive motor is driven and the drive rotation shaft 31 rotates, the first rotation member 81, the first eccentric shaft 84, the first crank 82, and the second eccentric shaft 87 attached to the drive rotation shaft 31 rotate. The first eccentric shaft 84 and the second eccentric shaft 87 rotate eccentrically, and the intermediate shaft 64 is connected via the first a link 65a and the first b link 65b attached to the first eccentric shaft 84 and the second eccentric shaft 87. Rotate. When the intermediate shaft 64 rotates, the fourth rotating member 101, the fifth eccentric shaft 102, the third crank 103, and the sixth eccentric shaft 104 attached to the intermediate shaft 64 (second rotating shaft) rotate. The fifth eccentric shaft 102 and the sixth eccentric shaft 104 rotate eccentrically, and the passive rotational shaft 61 is connected to the fifth eccentric shaft 102 and the sixth eccentric shaft 104 via the second a link 66a and the second b link 66b. Is rotated, the ball screw 15 is rotationally driven, and the fork portion 12 moves in either the up or down direction. Thereby, the board | substrate etc. can be unloaded by the fork part 12. FIG.

  Each of the first link 65 and the second link 66 includes two links, and these links 65a, 65b, 66a, 66b are attached with a phase difference of approximately 90 ° (approximately 270 °). Can be transmitted to the intermediate shaft 64 and the rotational force of the intermediate shaft 64 to the passive rotating shaft 61 with a small driving force, which is efficient.

  In addition, the first crank 82, the second crank 92, the third crank 103, and the fourth crank 113 are provided with balance weights 82h so that the centers of gravity of the cranks 82, 92, 103, and 113 rotate. Therefore, the occurrence of vibration when rotating can be suppressed. In addition, in the intermediate shaft 64, it is possible to further suppress the occurrence of vibrations particularly in the intermediate shaft 64 by attaching the four links with a 90 ° phase shift. Thereby, it can respond also to high-speed rotation.

  Further, when the transport unit body 11 linearly moves along the guide unit 13 by driving the moving motor 23, one end portion of the first arm 62 is rotatably supported by the wall portion 34 and the other end portion is intermediate. Since one end of the second arm 63 is rotatably supported by the intermediate shaft 64 and the other end is rotatably supported by the passive rotation shaft 61. The 1st arm 62 and the 2nd arm 63 rotate in connection with it, and the intermediate shaft 64 moves. Even if the intermediate shaft 64 moves, the intermediate shaft 64 is always rotatably supported by the first arm 62 and the second arm 63, so that the rotational driving force of the drive rotating shaft 31 can be transmitted to the passive rotating shaft 61. That is, if the intermediate shaft 64 is not rotatably supported by the first arm 62 and the second arm 63, the intermediate shaft 64 does not rotate and cannot transmit rotational power.

  Therefore, the drive coupling mechanism 60 of the present invention can transmit the rotational driving force without using a belt, and is highly reliable without cutting or slipping. Further, there is no backlash and the drive transmission accuracy is high. Moreover, since a driving force can be output to an arbitrary place on a plane, versatility is good.

  Further, since the drive coupling mechanism 60 of the present invention uses the arms 62 and 63, the links 65 and 66, etc., the rigidity is higher than that of a belt, for example, a steel belt. It becomes possible to transmit power. Moreover, since there is almost no slip compared with a belt, there is almost no dust generation and a clean environment can be maintained. Further, since the members themselves such as the arms 62 and 63 and the links 65 and 66 are not bent or deformed, they have a long life and excellent durability.

  In the embodiment of the present invention, the rotational power is transmitted using the two arms of the first arm and the second arm and the two types of links of the first link and the second link. Alternatively, the rotational power may be transmitted using the third link, or the rotational power may be transmitted using the fourth and fifth arms.

It is a side view which shows an example of the vacuum robot of this invention. It is a top view which shows an example of the vacuum robot of this invention. It is a partial schematic sectional drawing which shows an example of the conveyance part main body of the vacuum robot of this invention. It is a perspective view which shows an example of the vacuum robot of this invention. It is a perspective view which shows an example of the drive connection mechanism of this invention. It is a top view which shows an example of the drive connection mechanism of this invention. It is a block diagram which shows an example of the drive connection mechanism of this invention. It is an expanded sectional view of the part shown by A in FIG. It is an expanded sectional view of the part shown by B in FIG. It is an expanded sectional view of the part shown by C in FIG. It is a figure which shows an example of the 1st arm of this invention, (a) is a top view, (b) is sectional drawing. It is a figure which shows an example of the 2nd arm of this invention, (a) is a top view, (b) is sectional drawing. It is a figure which shows an example of the link of this invention, (a) is a top view, (b) is sectional drawing. It is a figure which shows an example of the crank of this invention, (a) is a top view, (b) is sectional drawing. It is a figure which shows an example of the 1st rotation member of this invention, (a) is sectional drawing, (b) is the DD line arrow view in (a), (c) is E- in (a). FIG. It is a figure which shows an example of the 2nd rotation member of this invention, (a) is sectional drawing, (b) is the FF arrow directional view in (a), (c) is G- in (a). FIG. It is a figure which shows an example of the 3rd rotation member of this invention, (a) is sectional drawing, (b) is a top view. It is a figure which shows the locus | trajectory of a 1st arm and a 2nd arm when a drive rotating shaft moves linearly. It is a figure which shows the locus | trajectory of a 1st arm and a 2nd arm when a drive rotating shaft moves linearly. It is a figure which shows the locus | trajectory of a 1st arm and a 2nd arm when a drive rotating shaft moves linearly.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Vacuum robot 31 Drive rotary shaft 61 Passive rotary shaft 62 1st arm 63 2nd arm 64 Intermediate shaft 65 1st link 66 2nd link 82 1st crank 92 2nd crank 103 3rd crank 113 4th crank

Claims (9)

The rotational driving force of the drive rotary shaft that is rotationally driven at a fixed position is transmitted to a passive rotary shaft that extends substantially parallel to the drive rotary shaft and moves along a plane substantially orthogonal to the drive rotary shaft. A drive coupling mechanism,
A first arm that extends in a direction substantially orthogonal to the drive rotation shaft and has one end rotatably attached around the axis of the drive rotation shaft;
A second arm that extends in a direction substantially perpendicular to the drive rotation axis and has one end rotatably attached around the axis of the passive rotation axis;
An intermediate shaft rotatably attached to the other end of the first arm and the other end of the second arm;
The one end extends in a direction substantially orthogonal to the drive rotation axis, and one end is pivotally attached to an eccentric position of the drive rotation axis in a direction substantially orthogonal to the drive rotation axis, and the other end is the Two or more first links that are rotatably attached to an eccentric position of the intermediate shaft so as to be rotatable in a direction substantially orthogonal to the intermediate shaft;
The drive rotating shaft extends in a direction substantially orthogonal to the axis of the drive rotation shaft, and one end is pivotally attached to the eccentric position of the intermediate shaft in a direction substantially orthogonal to the intermediate shaft, and the other end is Two or more second links rotatably mounted in a direction substantially orthogonal to the passive rotation shaft at an eccentric position of the passive rotation shaft;
When the driving rotation shaft is rotated, the passive rotation shaft is driven to rotate through the first link and the second link. The first link consists of two first links,
Between each end of each of these first links, a crank that rotates around the axis of the drive rotation shaft or the axis of the intermediate shaft is disposed, respectively.
At the eccentric positions of these cranks, both end portions of the two first links are rotatably mounted respectively.
The second link comprises two second links;
Between each end of each of these second links, a crank that rotates around the axis of the intermediate shaft or the axis of the passive rotation shaft is arranged, respectively.
2. The drive coupling mechanism according to claim 1, wherein both end portions of the two second links are rotatably attached to the eccentric positions of the cranks.   The two first links are arranged substantially in parallel and are attached to the crank with a phase difference of about 30 to 150 °, and the two second links are arranged substantially in parallel and are connected to the crank. The drive coupling mechanism according to claim 2, wherein the drive coupling mechanism is attached with a phase difference of approximately 30 to 150 °.   The two first links are disposed substantially in parallel and are attached to the crank with a phase difference of approximately 90 °, and the two second links are disposed substantially in parallel and approximately 90 to the crank. 4. The drive coupling mechanism according to claim 2, wherein the drive coupling mechanism is attached with a phase difference of about 180 ° and a phase difference of about 180 ° from the first link.   The drive coupling mechanism according to any one of claims 2 to 4, wherein the crank is provided with a balance weight for positioning a center of gravity of the crank on a rotating shaft.   6. The drive rotary shaft according to claim 1, wherein the drive rotary shaft is disposed at a position where the first arm and the second arm are crossed when the passive rotary shaft moves on a straight line. The drive coupling mechanism according to claim 1.   The said intermediate shaft is rotatably supported by the other end part of the said 1st arm, and the other end part of the said 2nd arm through the front combination type angular bearing, respectively. Drive coupling mechanism.   8. The drive coupling mechanism according to claim 6, wherein a length between rotating shafts at both ends of the first arm is different from a length between rotating shafts at both ends of the second arm.   A vacuum robot comprising the drive coupling mechanism according to any one of claims 1 to 8.

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