WO2010125347A2 - Microscopie électronique confocale à balayage inélastique - Google Patents

Microscopie électronique confocale à balayage inélastique Download PDF

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WO2010125347A2
WO2010125347A2 PCT/GB2010/000852 GB2010000852W WO2010125347A2 WO 2010125347 A2 WO2010125347 A2 WO 2010125347A2 GB 2010000852 W GB2010000852 W GB 2010000852W WO 2010125347 A2 WO2010125347 A2 WO 2010125347A2
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specimen
energy
electrons
lens system
confocal
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PCT/GB2010/000852
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WO2010125347A3 (fr
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Peter David Nellist
Peng Wang
Angus Ian Kirkland
Gavin Joseph Behan
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Isis Innovation Limited
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/265—Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/049—Focusing means
    • H01J2237/0492—Lens systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/153—Correcting image defects, e.g. stigmators
    • H01J2237/1534—Aberrations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2802—Transmission microscopes

Definitions

  • the present invention relates to confocal electron microscopy.
  • Scanning confocal electron microscopy is an imaging mode in electron microscopy.
  • Use of a confocal arrangement in an electron microscope provides improved depth resolution and selectivity over optical sectioning in the scanning transmission electron microscopy (STEM) mode.
  • Confocal scanning optical microscopy has become a successful and widespread technique in light optics. Its strength lies in its strong depth discrimination property. Scattering from points away from the confocal point, both laterally and parallel to the beam, is rejected and detected less strongly than the in-focus scattering.
  • the focusing optics act only on either the scattered radiation, as in a conventional microscope, or on the incident beam to form a focused beam scanning microscope, the out-of-focus scattering is still present in the image, forming a blurred intensity background and confusing image interpretation.
  • Confocal microscopy provides a depth discrimination property, suppressing the contribution of the out-of-focus scattering, and allowing probing of specific depths in a specimen or recordal of a stack of ID images with a transverse section at different depths in thick specimens to form a 3D image.
  • the confocal configuration leads to improved resolution in direction perpendicular to the optics axis, as compared to a scanning optical microscope.
  • the depth resolution of a 5 nm nanoparticle as an example is around 170 nm, much worse than the FWHM (full width half maximum) depth of the probe intensity about 5nm at 200keV.
  • FWHM full width half maximum
  • SCEM can be operated with two imaging modes, namely elastic SCEM or inelastic SCEM differentiated by detecting either elastically scattered electrons or inelastically scattered electrons that have sustained a particular energy loss in the specimen.
  • an energy filter is used, this leading to the alternative name of energy filtered SCEM (EFSCEM).
  • EFSCEM energy filtered SCEM
  • the energy filter is arranged between the specimen and the detector and is used to selectively detect electrons of a given energy (or energies). With knowledge of the incidence energy of electrons incident on the sample, this equates to detection of inelastically scattered electrons that have experienced a given energy loss.
  • an energy filter is a complex and expensive piece of equipment. Typically an energy filter might cost something of the order of 10- 30% of the cost of the rest of the scanning confocal microscope.
  • A* AE loss £- (1) for the inelastic scattering of electrons incident with an incidence energy E 0 and experiencing an energy loss AE loss .
  • typical energy filtered electron microscope images are recorded using electrons with energy losses that range over a window ⁇ E window of several eV to ensure a high enough signal.
  • ⁇ E window 1 OeV
  • spherical aberration correctors are becoming widespread because of their commercial availability, there is currently only one instrument fitted with a prototype chromatic aberration corrector because it is technologically much harder. The chromatic aberration corrector is also expensive.
  • a method of operating a confocal electron microscope to detect electrons scattered inelastically from a specimen with an energy loss of interest comprising: an electron source for emitting electrons with an incidence energy; a pre-specimen lens system for focussing the electrons emitted from the electron source to a point in a specimen; an electron detector for detecting electrons incident at a localised region; and a post-specimen lens system for focussing electrons scattered from the point onto the localised region, wherein the post-specimen lens system has chromatic aberration
  • the method comprising configuring the confocal electron microscope so that the post- specimen lens system in respect of electrons of the energy loss of interest below the incidence energy is confocal with the pre-specimen lens system in respect of electrons of the incidence energy.
  • a control apparatus for controlling a confocal electron microscope to perform a similar method.
  • the present invention allows the performance of inelastic SC ⁇ M.
  • this is done with a post-specimen lens system that has chromatic aberration, rather than correcting for such chromatic aberration, for example using a chromatic aberration as part of the post-specimen lens system.
  • This is in contrast to the perception that inelastic SC ⁇ M would require correction of chromatic aberration to reduce focal spread.
  • the chromatic aberration does not deteriorate the depth resolution of SC ⁇ M, but actually can provide energy selectivity in a similar manner to an energy filter.
  • advantage is taken of the fact that the focal depth of the post-specimen lens system varies with the energy of the electrons passing therethrough.
  • the confocal electron microscope is configured so that the post-specimen lens system in respect of electrons of the energy loss of interest below the incidence energy is confocal with the pre-specimen lens system in respect of electrons of the incidence energy.
  • the detector selectively detects electrons experiencing the energy loss of interest. Electrons having other energies are rejected, this energy discrimination being achieved based on substantially the same effect as that by which a confocal configuration provides depth resolution.
  • Fig.l is a schematic diagram of a scanning confocal electron microscope and associated control apparatus
  • Fig. 2 is a flow chart of a method of control implemented in the control apparatus
  • Figs. 3a to 3c are schematic diagrams of the confocal scanning electron microscope in different modes of operation;
  • Fig. 4 is an EELS spectrum of a carbon K-edge;
  • Figs. 5a to 5c are experimental images acquired using a scanning confocal electron microscope
  • Figs. 6 to 8 are graphs of the theoretical PSF and Z-response of a scanning confocal electron microscope
  • Fig. 9 is a graph of FWHM of the Z-response of a scanning confocal electron microscope against the width of an energy selecting slit of an energy filter arranged therein;
  • Fig. 10 is a graph of optical sectioning results of inelastic SCEM and inelastic STEM of a flat carbon film against the width of an energy selecting slit of an energy filter arranged in the microscope.
  • a confocal scanning electron microscope 1 and a control apparatus 2 for controlling the microscope 1 to provide inelastic SCEM are shown in Fig. 1.
  • the microscope 1 has a conventional construction comprising the following components aligned along an optical axis O.
  • the microscope 1 comprises an electron source 3 which is operable to emit electrons with a variable incidence energy, typically but without limitation of the order of lOOkeV to lOOOkeV.
  • the emitted electrons have a narrow bandwidth of energies as compared to the features of the energy spectrum of the scattering interactions with a sample, such that they may be considered as being of a single energy.
  • the microscope 1 comprises a pre-specimen lens system 4 operable to focus electrons emitted by the electron source to a point 5.
  • a pre-specimen lens system 4 operable to focus electrons emitted by the electron source to a point 5.
  • the transfer function of the pre-specimen lens system 4 causes the point 5 has some finite spread, the size of which may be characterised by a FWHM.
  • the pre-specimen lens system 4 comprises at least one lens 6 and a spherical aberration (SA) corrector 7.
  • SA spherical aberration
  • a specimen 8 is mounted on an actuator 9 that controls the position of the specimen 8.
  • the actuator 9 may take any suitable form for positioning the specimen to sufficient accuracy to match the imaging resolution of the microscope 1, for example being a piezoelectric actuator.
  • the microscope 1 comprises a detector 10 having an aperture 11 in a physical mask at the image plane.
  • the detector 10 in operation detects all electrons that are incident at the localised region of the aperture 11.
  • the detector 10 may then be a single pixel detector.
  • the aperture 11 may be artificially constructed using a detector 10 positioned at the image plane, having a wide electron-sensitive area.
  • the signal output from a localised region that is a partial area of the electron-sensitive area is used, this being the signal representative of electrons incident at that localised region.
  • the detector 10 may be of any suitable construction.
  • the detector 10 typically has a wide detection energy bandwidth capable of scattered electrons of any energy for inelastic SCEM.
  • the microscope 1 comprises a post-specimen lens system 12 also operable to focus electrons, hi a confocal configuration, the post-specimen lens system 12 focuses electrons from the point 5 onto the aperture 11 of the detector 10. Again, the transfer function of the post-specimen lens system 12 has a spread that may be characterised by a FWHM.
  • the post-specimen lens system 12 comprises at least one lens 13 and an SA corrector 14. hi operation, the lenses 6 and 13 of the pre-specimen and post-specimen lens systems 4 and 12 have the primary effect of focussing the electrons and the SA correctors 7 and 14 of the pre- specimen and post-specimen lens systems 4 and 12 have the primary effect of correcting the spherical aberration of the lenses 6 and 13.
  • the lenses 6 and 13 and SA correctors 7 and 14 have conventional constructions, consisting in essence of electromagnets. They require complex but routine tuning to achieve a confocal configuration in which the focus of the pre-specimen and post-specimen lens systems 4 and 12 are aligned, for example as described in Nellist et al., Applied Physics Letters 89, 124105 (2006).
  • the microscope 1 does not include an energy filter, but is still able to perform inelastic SCEM as described below. It is also noted that no correctors or other measures are included to correct chromatic aberration with the result that both of the pre-specimen and post-specimen lens systems 4 and 12 do have chromatic aberration.
  • the control apparatus 2 is arranged as follows.
  • the control apparatus 2 comprises a source module 15 arranged to control the electron source
  • the control apparatus 2 comprises a positioning module 16 arranged to control the actuator 9 to control the position of the specimen 8.
  • the positioning module 16 may control the actuator 9 to scan the specimen 8 in lateral directions perpendicular to the optical axis O to obtain a 2D image of a section of the specimen.
  • the positioning module 16 may control the actuator 9 to scan the specimen 8 in the depth direction along the optical axis O to obtain a 2D image of a section of the specimen.
  • the control apparatus 2 comprises a pre-specimen lens module 17 and a post-specimen lens module 18 arranged to control the pre-specimen and post-specimen lens systems 4 and 12, respectively.
  • the pre-specimen and post-specimen lens modules 17 and 18 control the power supplied to the electromagnets of the pre- specimen and post-specimen lens systems 4 and 12 to tune their deflection of electrons.
  • the control apparatus 2 comprises a controller 19 that is arranged to provide overall control of the source module 15, positioning module 16 and pre-specimen and post-specimen lens modules
  • control apparatus 2 comprises an imaging module 20 supplied with the signal output from the detector 10 and arranged to process the signal to generate and store image data as the specimen 8 is scanned, in this example under the control of the positioning module 16.
  • the imaging module 20 may also provide manipulation and display of the image on a display 21.
  • the various components of the control apparatus 2 may be implemented by one or more processors executing an appropriate program.
  • the modules 15 to 18 and 20 might be implemented in separate computers such as PCs, although this is not essential and any of the modules 15 to 18 or 20 may be implemented on the same computer.
  • the controller 19 may be implemented in the same computer as one of the modules 15 to 18 or 20 or in its own separate computer.
  • the control apparatus 2 controls the microscope to detect electrons scattered elastically from the specimen with an energy loss of interest, that may be set by user input to the control apparatus 2. This is achieved without an energy filter to select the energy of the electrons detected by the detector
  • Fig. 2a illustrates the microscope 1 in a confocal configuration but with correction of chromatic aberration.
  • both elastically and inelastically scattered electrons are deflected by the same amount and so are both focussed onto the aperture 11 of the detector 10 as illustrated by the solid line.
  • Electrons scattered from elsewhere are focussed at a different focal depths, as shown by the broken line, and so do not significantly contribute to the detected signal.
  • Fig. 2b illustrates the microscope 1 taking into account the chromatic aberration.
  • elastically scattered electrons are focused onto the aperture 11 of the detector 10 as illustrated by the solid line.
  • the chromatic aberration causes electrons of different energies to be focussed at different focal lengths
  • inelastically scattered electrons are focussed at a different focal length, as shown by the broken line, and so do not significantly contribute to the detected signal.
  • control apparatus 2 configuring the microscope 1 so that the post-specimen lens system 12 in respect electrons of the energy loss of interest below the incidence energy of electrons emitted by the electron source 2 is confocal with the pre-specimen lens system 4 in respect of electrons of the incidence energy.
  • control apparatus 2 implements a control method illustrated in Fig. 3 that achieves the confocal configuration in an advantageous manner.
  • a first step Sl the electron source 3 is controlled to emit electrons with a first incidence energy.
  • the confocal electron microscope is configured so that the post-specimen lens system 12 in respect electrons of the first incidence energy is confocal with the pre-specimen lens system 4 also in respect of electrons of the first incidence energy.
  • This is done by controlling the pre-specimen and post-specimen lens modules 17 and 18 to simultaneously tune the pre-specimen and post- specimen lens systems 4 and 12 about the mutual optical axis O. This may be achieved using conventional techniques, for example as described in Nellist et al., Applied Physics Letters 89, 124105 (2006).
  • An experimental image of the probe image in vacuum is formed in this configuration is shown in Fig. 5a.
  • the electron source 3 is controlled to emit electrons with a second incidence energy greater than the first incidence energy by an energy offset.
  • This energy offset is selected so that the post-specimen lens system 12 in respect of electrons of the energy loss of interest below the second incidence energy is confocal with the pre-specimen lens system 4 in respect of electrons of the second incidence energy.
  • the factor is Vi.
  • This factor k results in the confocal configuration being achieved for elastic scattered electrons experiencing the energy loss of interest.
  • the pre-specimen lens system 4 due to its chromatic aberration, now focuses the electrons of the second incidence energy emitted from the electrons source 3 onto the point 5 at position b shown in Fig. 2c.
  • the energy loss in the specimen 8 causes the post- specimen lens system 12, due to its chromatic aberration, to focus the electrons of the energy loss of interest ⁇ E tej below the second incidence energy from that point 5 at position b onto the aperture 11 of the detector 10, again as shown in Fig. 2c.
  • the pre-specimen and post-specimen lens systems 4 and 12 are not adjusted to change the degree of deflection so that the focal length in respect of electrons of a given energy remains unchanged.
  • this step S2 may be performed without adjusting the pre-specimen and post-specimen lens systems 4 and 12 at all.
  • the step S2 may additionally comprise adjusting or tuning the SA correctors 7 and 14 and/or the lenses 6 and 13 of the pre-specimen and post-specimen lens systems 4 and 12 to compensate for the change in spherical aberration or other parasitic aberrations.
  • step Sl the confocal configuration achieved in step Sl is maintained in step S2 without adjusting either one of the pre-specimen and post-specimen lens systems 4 and 12, and their chromatic aberration is used to obtain the desired confocal configuration for elastic scattering of electrons with the energy loss of interest ⁇ E loss simply by adjustment of the energy source 3.
  • step S3 the actuator 9 is controlled to position the specimen 8 with the desired point of the specimen 8 to be imaged at that position b.
  • Step S3 is performed without adjusting the pre-specimen and post- specimen lens systems 4 and 12 so as to maintain the confocal configuration achieved in step S2. Li this position of the specimen 8, the detector 10 is used to detect the inelastically scattered electrons experiencing the energy loss of interest ⁇ E loss , the output signal of the detector 10 being supplied to the imaging module 20.
  • the actuator 9 may be controlled to position scan the specimen 8 in order to position a scanning sequence of desired points of the specimen 8 to be imaged at that position b.
  • the detector 10 is used to detect the inelastically scattered electrons experiencing the energy loss of interest AE loss , the output signal of the detector 10 being supplied to the imaging module 20 to build up an image.
  • This method of detecting inelastically scattered electrons has been described as being implemented in the controller 19. As alternative, the method could instead be implemented by the user manually controlling the various modules 15 to 18 and 20.
  • control method allows the performance of inelastic SCEM without the need for an energy filter and without the need to correct the chromatic aberration of the pre-specimen and post- specimen lens systems 4 and 12, by instead using the chromatic aberration of the post-specimen lens system 12 to provide selective detection of inelastically scattered electrons experiencing the energy loss of interest AE loss .
  • a related point is that the energy resolution of the detection of inelastically scattered electrons by the detector 10 is dependent on the degree of chromatic aberration of the post-specimen lens system 12.
  • it is possible to implement control of the energy resolution by varying the chromatic aberration of the post-specimen lens system 12. This may be achieved by the post-specimen lens system 12 further comprising a chromatic aberration controller 22 that is controlled by the post-specimen lens module 18 so that the controller 19 can also control the degree of chromatic aberration.
  • the slit was centred with the size of the slit AE s ⁇ U at the energy loss of interest ⁇ E bss • so ⁇ at on ty electrons with that energy loss pass through the filter.
  • the microscope formed a focused inelastic probe image at the image plane, the probe image being formed with an 5eV energy-selecting slit placed at carbon K-edge (287.5-292.5eV).
  • the resultant inelastic probe image recorded at the carbon K-edge is shown in Fig. 5b and shows the same diameter and symmetry as the image formed with vacuum shown in Fig. 5a.
  • Fig. 5c shows the inelastic probe image recorded at the carbon K-edge where the specimen 8 is 56nm over the confocal point 5.
  • the Z-response of such inelastic SCEM was compared with inelastic STEM.
  • the specimen 8 was moved along the z-axis using the actuator 9 with a step size of 9.3nm.
  • a series of the probe images were recorded on a detector 10 being a 4kx4k Gatan CCD camera for each step.
  • An artificial collector aperture 11 of diameter 0.4nm was applied to the probe images by integrating the intensities within the aperture centred at each probe image.
  • the FWHM of the optical sectioning can be seen to be relatively insensitive to the energy filtering window.
  • the focal spread of the post-specimen lens system 12 due to chromatic aberration would be approximately 300 nm, yet the observed depth resolution is better than this.
  • the experiment is not sensitive to the size of the energy window of the energy filter. A corollary of this is therefore that no energy filter is actually required to do the experiment, i.e. that inelastic SCEM can be performed without an energy filter.
  • PSF is the confocal point spread function (PSF) which describes how the detected image of a point-like scattering object.
  • PSF x and PSF 2 are the PSFs of the upper and lower column optics, respectively.
  • Fig. 6 shows the PSF with a FWHM of about 5.52nm for the Oxford- JEOL 2200FS instrument, with 22 mrad apertures in the both upper and lower columns.
  • the 'plane spread function' or Z-response describes how a lateral plane is blurred.
  • V (R) is not dependent on the position R and can be take out the integral in Eq. 2.
  • Fig. 6 shows that the theoretical Z-response of the instrument has a FWHM of about 5.9 nm. Eq. 5 can be reduced to the Z-response of STEM as
  • the Z-response for STEM is flat line, which indicates the STEM does not provide the depth determination for an extended object.
  • the accelerating voltage E 0 is increased by a factor k of the
  • probe function P x is for the pre-specimen electrons + k.AE loss
  • P 2 is for the post-specimen electrons of energy E HT — k.AE loss .
  • the FSFPSF 2 of the lower column with the chromatic focus spread is a convolution of
  • Figs. 7 and 8 show the energy-selected spectrum function S , the PSF and the Z-response with a 14eV energy-selecting slit E with the confocal point at the zero loss and carbon K-edge, respectively, plotted in both the energy and position regimes.
  • the FWHMs of the PSF and Z-response are about 6.3 & 7.3 nm, and 7.7 & 9.6 nm for the zero loss and the carbon K-edge, respectively in the position regime. It is surprising that with such large energy-selecting slit the SC ⁇ M does not lose its depth resolution and especially the Z-response for the extended object.
  • the energy- selecting slit E we take out spectrum function and calculated the FWHM of the Z-response as a function of E as shown in the Fig. 9. With increasing the size of the slit, the FWHM increases from 5.9 nm to about 10 nm and flattens out.
  • the instrument has the better energy resolution it does. It is traded off with the worse longitudinal resolution of the lower column, but the total longitudinal resolution can not be worse than that of the upper column theoretically.
  • FWHM energy can be achieved to 0.84eV, which is about the energy resolution that the current energy filter can achieve.
  • Fig. 8 shows that the PSF and Z-response strongly peak at the desired energy loss of 290 eV so than only the electrons within the energy resolution of the PSF and Z-response will be selected at the confocal point. This endues the SCEM with a natural energy-selecting capability, without the external help from the energy filter component.
  • the chromatic aberration does not limit the depth determination of the SCEM for an extended object.
  • the chromatic aberration is an advantage to select an energy loss of interest and determines the energy resolution, so it acts as an energy filter and makes inelastic SCEM work without an energy filter component in the lower column.
  • the current energy resolution it is potentially capable of selecting subtle features in a spectrum to reveal chemical information, bonding information and so on of materials in the 3D SCEM imaging.

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Abstract

L'invention concerne un microscope électronique confocal qui est conçu de manière à ce que le système d'objectif post-échantillon par rapport aux électrons d'une perte d'énergie prédéfinie en dessous de l'énergie d'incidence soit confocal avec le système d'objectif pré-échantillon par rapport aux électrons d'énergie d'incidence, afin d'effectuer une détection d'électrons dispersés de manière inélastique à partir d'un échantillon. Cela évite d'avoir à corriger l'aberration chromatique et tire profit à la place de l'aberration chromatique du système d'objectif post-échantillon pour détecter de manière sélective des électrons confrontés à la perte d'énergie d'intérêt sans avoir besoin d'utiliser un filtre d'énergie coûteux. La configuration confocale est obtenue de manière pratique en configurant d'abord le microscope électronique confocal afin de parvenir à une configuration confocale avec les électrons d'une première énergie d'incidence, et en modifiant ensuite l'énergie d'incidence selon un décalage d'énergie sélectionné pour fournir un agencement confocal pour la perte d'énergie concernée.
PCT/GB2010/000852 2009-05-01 2010-04-28 Microscopie électronique confocale à balayage inélastique WO2010125347A2 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016527549A (ja) * 2013-07-18 2016-09-08 ベンタナ メディカル システムズ， インコーポレイテッド マルチスペクトル撮像のための自動焦点方法およびシステム
US11467390B2 (en) 2013-07-18 2022-10-11 Ventana Medical Systems, Inc. Auto-focus methods and systems for multi-spectral imaging

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