GB0907600D0 - Inelastic scanning confocal electron microscopy - Google Patents

Inelastic scanning confocal electron microscopy

Info

Publication number
GB0907600D0
GB0907600D0 GBGB0907600.1A GB0907600A GB0907600D0 GB 0907600 D0 GB0907600 D0 GB 0907600D0 GB 0907600 A GB0907600 A GB 0907600A GB 0907600 D0 GB0907600 D0 GB 0907600D0
Authority
GB
United Kingdom
Prior art keywords
inelastic
electron microscopy
scanning confocal
confocal electron
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB0907600.1A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oxford University Innovation Ltd
Original Assignee
Oxford University Innovation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oxford University Innovation Ltd filed Critical Oxford University Innovation Ltd
Priority to GBGB0907600.1A priority Critical patent/GB0907600D0/en
Publication of GB0907600D0 publication Critical patent/GB0907600D0/en
Priority to PCT/GB2010/000852 priority patent/WO2010125347A2/en
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261Details
    • H01J37/263Contrast, resolution or power of penetration
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261Details
    • H01J37/265Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04Means for controlling the discharge
    • H01J2237/049Focusing means
    • H01J2237/0492Lens systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/153Correcting image defects, e.g. stigmators
    • H01J2237/1534Aberrations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26Electron or ion microscopes
    • H01J2237/28Scanning microscopes
    • H01J2237/2802Transmission microscopes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GBGB0907600.1A 2009-05-01 2009-05-01 Inelastic scanning confocal electron microscopy Ceased GB0907600D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB0907600.1A GB0907600D0 (en) 2009-05-01 2009-05-01 Inelastic scanning confocal electron microscopy
PCT/GB2010/000852 WO2010125347A2 (en) 2009-05-01 2010-04-28 Inelastic scanning confocal electron microscopy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB0907600.1A GB0907600D0 (en) 2009-05-01 2009-05-01 Inelastic scanning confocal electron microscopy

Publications (1)

Publication Number Publication Date
GB0907600D0 true GB0907600D0 (en) 2009-06-10

Family

ID=40792177

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB0907600.1A Ceased GB0907600D0 (en) 2009-05-01 2009-05-01 Inelastic scanning confocal electron microscopy

Country Status (2)

Country Link
GB (1) GB0907600D0 (en)
WO (1) WO2010125347A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105378538B (en) * 2013-07-18 2019-05-31 文塔纳医疗系统公司 Autofocus method and system for multispectral imaging

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6548810B2 (en) 2001-08-01 2003-04-15 The University Of Chicago Scanning confocal electron microscope
US7777185B2 (en) * 2007-09-25 2010-08-17 Ut-Battelle, Llc Method and apparatus for a high-resolution three dimensional confocal scanning transmission electron microscope

Also Published As

Publication number Publication date
WO2010125347A2 (en) 2010-11-04
WO2010125347A3 (en) 2011-01-20

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)