WO2010090487A2 - Touch screen and manufacturing method thereof - Google Patents

Touch screen and manufacturing method thereof Download PDF

Info

Publication number
WO2010090487A2
WO2010090487A2 PCT/KR2010/000762 KR2010000762W WO2010090487A2 WO 2010090487 A2 WO2010090487 A2 WO 2010090487A2 KR 2010000762 W KR2010000762 W KR 2010000762W WO 2010090487 A2 WO2010090487 A2 WO 2010090487A2
Authority
WO
WIPO (PCT)
Prior art keywords
manufacturing
touch screen
conductive film
resist pattern
etching resist
Prior art date
Application number
PCT/KR2010/000762
Other languages
French (fr)
Korean (ko)
Other versions
WO2010090487A3 (en
Inventor
황지영
황인석
전상기
이동욱
손용구
박민춘
이승헌
구범모
홍영준
김기환
김수진
최현
Original Assignee
주식회사 엘지화학
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020090127756A external-priority patent/KR20100090628A/en
Application filed by 주식회사 엘지화학 filed Critical 주식회사 엘지화학
Priority to CN201080007008.0A priority Critical patent/CN102308366B/en
Priority to US13/148,220 priority patent/US8921726B2/en
Priority to JP2011549070A priority patent/JP5474097B2/en
Publication of WO2010090487A2 publication Critical patent/WO2010090487A2/en
Publication of WO2010090487A3 publication Critical patent/WO2010090487A3/en
Priority to US14/518,464 priority patent/US9524043B2/en

Links

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04112Electrode mesh in capacitive digitiser: electrode for touch sensing is formed of a mesh of very fine, normally metallic, interconnected lines that are almost invisible to see. This provides a quite large but transparent electrode surface, without need for ITO or similar transparent conductive material

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacture Of Switches (AREA)
  • Position Input By Displaying (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)

Abstract

The present invention relates to a touch screen and a manufacturing method thereof. The manufacturing method comprises the steps of: a) forming a conductive film on a substrate; b) forming an etching resist pattern on the conductive film; c) over-etching the conductive film using the etching resist pattern to form a conductive pattern whose linear width is smaller than the width of the etching resist pattern. According to the present invention, a touch screen having an ultra-fine linear width conductive pattern is provided in an efficient and economical manner.
PCT/KR2010/000762 2009-02-06 2010-02-08 Touch screen and manufacturing method thereof WO2010090487A2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201080007008.0A CN102308366B (en) 2009-02-06 2010-02-08 Touch-screen and preparation method thereof
US13/148,220 US8921726B2 (en) 2009-02-06 2010-02-08 Touch screen and manufacturing method thereof
JP2011549070A JP5474097B2 (en) 2009-02-06 2010-02-08 Touch screen and manufacturing method thereof
US14/518,464 US9524043B2 (en) 2009-02-06 2014-10-20 Touch screen and manufacturing method thereof

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
KR20090009750 2009-02-06
KR10-2009-0009750 2009-02-06
KR20090065106 2009-07-16
KR10-2009-0065106 2009-07-16
KR20090065103 2009-07-16
KR10-2009-0065103 2009-07-16
KR1020090127756A KR20100090628A (en) 2009-02-06 2009-12-21 Preparation method for insulated conductive pattern
KR10-2009-0127756 2009-12-21

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US13/148,220 A-371-Of-International US8921726B2 (en) 2009-02-06 2010-02-08 Touch screen and manufacturing method thereof
US14/518,464 Division US9524043B2 (en) 2009-02-06 2014-10-20 Touch screen and manufacturing method thereof

Publications (2)

Publication Number Publication Date
WO2010090487A2 true WO2010090487A2 (en) 2010-08-12
WO2010090487A3 WO2010090487A3 (en) 2010-11-18

Family

ID=42542531

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2010/000762 WO2010090487A2 (en) 2009-02-06 2010-02-08 Touch screen and manufacturing method thereof

Country Status (1)

Country Link
WO (1) WO2010090487A2 (en)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013051527A1 (en) * 2011-10-05 2013-04-11 富士フイルム株式会社 Conductive sheet, touch panel, and display device
CN103168285A (en) * 2010-10-19 2013-06-19 Lg化学株式会社 Touch panel comprising an electrically-conductive pattern and a production method therefor
JP2013127657A (en) * 2011-12-16 2013-06-27 Fujifilm Corp Conductive sheet and touch panel
JP2013131156A (en) * 2011-12-22 2013-07-04 Fujifilm Corp Conductive sheet and touch panel
US20140144679A1 (en) * 2011-09-27 2014-05-29 Lg Chem, Ltd. Conductive substrate comprising conductive pattern and touch panel comprising same
JP2014513845A (en) * 2012-04-19 2014-06-05 深▲セン▼欧菲光科技股▲フン▼有限公司 Conductive component and preparation method thereof
JP2014519129A (en) * 2012-05-09 2014-08-07 ナンチャン オー−フィルム テック カンパニー リミテッド Metal mesh conductive layer and touch panel having the same
US8933906B2 (en) 2011-02-02 2015-01-13 3M Innovative Properties Company Patterned substrates with non-linear conductor traces
EP2796967A4 (en) * 2011-12-23 2015-08-05 Lg Chemical Ltd Touch panel and display device including same
JP2016076270A (en) * 2011-03-28 2016-05-12 エルジー・ケム・リミテッド Conductive substrate and touch screen having the same
CN108292185A (en) * 2015-11-17 2018-07-17 三菱制纸株式会社 Transparent conductive material

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990013298A (en) * 1997-07-29 1999-02-25 구자홍 Thin film transistor, liquid crystal display device and manufacturing method
KR20060045260A (en) * 2004-11-12 2006-05-17 엘지.필립스 엘시디 주식회사 Method of fabricating thin film transistor substrate of poly-type
KR20060060795A (en) * 2004-11-30 2006-06-05 삼성전자주식회사 Method for fabricating thin film transistor and display pixel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990013298A (en) * 1997-07-29 1999-02-25 구자홍 Thin film transistor, liquid crystal display device and manufacturing method
KR20060045260A (en) * 2004-11-12 2006-05-17 엘지.필립스 엘시디 주식회사 Method of fabricating thin film transistor substrate of poly-type
KR20060060795A (en) * 2004-11-30 2006-06-05 삼성전자주식회사 Method for fabricating thin film transistor and display pixel

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103168285A (en) * 2010-10-19 2013-06-19 Lg化学株式会社 Touch panel comprising an electrically-conductive pattern and a production method therefor
US9946377B2 (en) 2010-10-19 2018-04-17 Lg Chem, Ltd. Structured body with conducting and light absorption layers
CN103168285B (en) * 2010-10-19 2016-05-11 Lg化学株式会社 Comprise touch panel of conductive pattern and preparation method thereof
US8933906B2 (en) 2011-02-02 2015-01-13 3M Innovative Properties Company Patterned substrates with non-linear conductor traces
US9775233B2 (en) 2011-02-02 2017-09-26 3M Innovative Properties Company Patterned substrates with non-linear conductor traces
JP2016076270A (en) * 2011-03-28 2016-05-12 エルジー・ケム・リミテッド Conductive substrate and touch screen having the same
US20140144679A1 (en) * 2011-09-27 2014-05-29 Lg Chem, Ltd. Conductive substrate comprising conductive pattern and touch panel comprising same
JP2014526100A (en) * 2011-09-27 2014-10-02 エルジー・ケム・リミテッド CONDUCTIVE SUBSTRATE CONTAINING CONDUCTIVE PATTERN AND TOUCH PANEL CONTAINING THE SAME {CONDUCTINGSUBSTRATECOMPRISINGCONDUCTINGPATTERNANDOUUCPANELCOMPRISINGTHESAME}
US9345130B2 (en) 2011-09-27 2016-05-17 Lg Chem, Ltd. Conductive substrate comprising conductive pattern and touch panel comprising same
KR20140074329A (en) * 2011-10-05 2014-06-17 후지필름 가부시키가이샤 Conductive sheet, touch panel, and display device
WO2013051527A1 (en) * 2011-10-05 2013-04-11 富士フイルム株式会社 Conductive sheet, touch panel, and display device
KR101642798B1 (en) 2011-10-05 2016-07-26 후지필름 가부시키가이샤 Conductive sheet, touch panel, and display device
JP2013127657A (en) * 2011-12-16 2013-06-27 Fujifilm Corp Conductive sheet and touch panel
JP2013131156A (en) * 2011-12-22 2013-07-04 Fujifilm Corp Conductive sheet and touch panel
EP2796967A4 (en) * 2011-12-23 2015-08-05 Lg Chemical Ltd Touch panel and display device including same
JP2014513845A (en) * 2012-04-19 2014-06-05 深▲セン▼欧菲光科技股▲フン▼有限公司 Conductive component and preparation method thereof
JP2014519129A (en) * 2012-05-09 2014-08-07 ナンチャン オー−フィルム テック カンパニー リミテッド Metal mesh conductive layer and touch panel having the same
CN108292185A (en) * 2015-11-17 2018-07-17 三菱制纸株式会社 Transparent conductive material
CN108292185B (en) * 2015-11-17 2021-05-28 三菱制纸株式会社 Light-transmitting conductive material

Also Published As

Publication number Publication date
WO2010090487A3 (en) 2010-11-18

Similar Documents

Publication Publication Date Title
WO2010090487A2 (en) Touch screen and manufacturing method thereof
TW200802536A (en) Method of manufacturing semiconductor device
TW200705564A (en) Method for manufacturing a narrow structure on an integrated circuit
SG144148A1 (en) Stabilized photoresist structure for etching process
WO2010090394A3 (en) Method for manufacturing an insulated conductive pattern
WO2012071193A3 (en) Double patterning with inline critical dimension slimming
TW200834245A (en) Method for manufacturing semiconductor device with four-layered laminate
GB2487309A (en) Multiple width features in integrated circuits
WO2009085564A3 (en) Etch with high etch rate resist mask
WO2011149199A3 (en) Touch panel using a metal thin film, and method for manufacturing same
TW200723474A (en) High thermal conducting circuit substrate and manufacturing process thereof
WO2012082955A3 (en) Etched wafers and methods of forming the same
WO2009078190A1 (en) Pattern forming method and pattern formed body
TW200634983A (en) Method of forming a plug
WO2013036806A3 (en) Methods for manufacturing integrated circuit devices having features with reduced edge curvature
WO2009008407A1 (en) Process for producing organic semiconductor element, organic semiconductor element, and organic semiconductor device
WO2008139745A1 (en) Manufacturing method for display device and display device
WO2011046389A3 (en) Touch panel and manufacturing method thereof
TW200743140A (en) Method for fabricating fine pattern in semiconductor device
WO2013012195A3 (en) Method for manufacturing substrate and method or manufacturing electronic device using same
WO2010018029A3 (en) Method for producing a micromechanical component comprising electrodes on two levels, and micromechanical component
TW200943397A (en) Semiconductor device and method of fabricating the same
WO2012047014A3 (en) Electrostatic capacity-type touch panel device and method for manufacturing same
WO2010090488A3 (en) Conductive pattern and manufacturing method thereof
TW200721388A (en) Method of manufacturing semiconductor device

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201080007008.0

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10738771

Country of ref document: EP

Kind code of ref document: A2

WWE Wipo information: entry into national phase

Ref document number: 2011549070

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

WWE Wipo information: entry into national phase

Ref document number: 13148220

Country of ref document: US

122 Ep: pct application non-entry in european phase

Ref document number: 10738771

Country of ref document: EP

Kind code of ref document: A2