WO2010087220A1 - Electronic component and method of manufacturing same - Google Patents

Electronic component and method of manufacturing same Download PDF

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Publication number
WO2010087220A1
WO2010087220A1 PCT/JP2010/050143 JP2010050143W WO2010087220A1 WO 2010087220 A1 WO2010087220 A1 WO 2010087220A1 JP 2010050143 W JP2010050143 W JP 2010050143W WO 2010087220 A1 WO2010087220 A1 WO 2010087220A1
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WIPO (PCT)
Prior art keywords
electrode
coil
hole conductor
electronic component
coil electrode
Prior art date
Application number
PCT/JP2010/050143
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French (fr)
Japanese (ja)
Inventor
智之 前田
Original Assignee
株式会社村田製作所
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Publication date
Application filed by 株式会社村田製作所 filed Critical 株式会社村田製作所
Priority to CN2010800057457A priority Critical patent/CN102301436B/en
Priority to KR1020117014536A priority patent/KR101266307B1/en
Priority to JP2010548454A priority patent/JP5703754B2/en
Publication of WO2010087220A1 publication Critical patent/WO2010087220A1/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00Fixed inductances of the signal type 
    • H01F17/0006Printed inductances
    • H01F17/0013Printed inductances with stacked layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/02Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
    • H01F41/04Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
    • H01F41/041Printed circuit coils
    • H01F41/046Printed circuit coils structurally combined with ferromagnetic material

Definitions

  • the present invention relates to an electronic component and a manufacturing method thereof, and relates to an electronic component in which an insulating layer and a coil electrode are laminated and a manufacturing method thereof.
  • FIG. 10 is a perspective view of a conventional electronic component 200.
  • FIG. 11 is an exploded perspective view of a multilayer body 202 of a conventional electronic component 200.
  • the electronic component 200 includes a rectangular parallelepiped laminated body 202 including a coil inside, and two external electrodes 212 a and 212 b formed on opposite side surfaces of the laminated body 202.
  • the laminate 202 is configured by laminating a plurality of coil electrodes and a plurality of magnetic layers. Specifically, it is as follows. As shown in FIG. 11, the multilayer body 202 includes a plurality of magnetic layers 204a to 204f, 206a to 206d made of ferromagnetic ferrite (for example, Ni—Zn—Cu ferrite or Ni—Zn ferrite). It is constituted by. Coil electrodes 208a to 208f constituting coils are formed on the magnetic layers 204a to 204f. In addition, via hole conductors B51 to B55 are formed in the magnetic layers 204a to 204e.
  • ferromagnetic ferrite for example, Ni—Zn—Cu ferrite or Ni—Zn ferrite
  • the via hole conductors B51 to B55 are formed, for example, by forming a via hole by irradiating a laser and filling the via hole with a conductor. Therefore, as shown in FIG. 10, the via-hole conductors B51 to B55 have a shape in which the area of one end is relatively large and the area of the other end is relatively small.
  • the coil electrodes 208a to 208f are electrodes having a “U” shape and a length of 3/4 turns.
  • the via-hole conductors B1 to B5 are provided so as to penetrate the magnetic layers 204a to 204e in the vertical direction at one end of each of the coil electrodes 208a to 208e.
  • the coil electrodes 208a to 208f are connected to each other by via hole conductors B51 to B55, thereby forming a spiral coil.
  • extraction electrodes 210a and 210b are provided on the coil electrodes 208a and 208f formed on the uppermost and lowermost sides in the stacking direction, respectively.
  • the lead electrodes 210a and 210b serve to connect the coil and the external electrodes 212a and 212b.
  • the conventional electronic component 200 configured as described above has a problem in that disconnection is likely to occur between the coil electrode 208f and the via-hole conductor B55.
  • the length of the coil electrode 208f is longer than the length of the coil electrode 208a. Therefore, when a current is passed through the coil, the amount of heat generated in the coil electrode 208f is greater than the amount of heat generated in the coil electrode 208a. Further, the end portion of the via hole conductor B55 having the smaller area is connected to the coil electrode 208f. Therefore, heat is intensively generated particularly at the connection portion between the coil electrode 208f and the via-hole conductor B55. As a result, disconnection is likely to occur between the coil electrode 208f and the via-hole conductor B55.
  • Patent Document 1 describes a multilayer electronic component in which the uppermost coil conductor and the lowermost coil conductor have the same shape. However, Patent Document 1 does not mention the problem of disconnection at the connection portion between the via conductor and the coil conductor.
  • an object of the present invention is to provide an electronic component that can prevent disconnection between a via-hole conductor and a coil electrode, and a manufacturing method thereof.
  • An electronic component is A plurality of coil electrodes constituting a coil; A plurality of insulating layers laminated together with the plurality of coil electrodes to form a laminate; Two external electrodes provided on the surface of the laminate, two connection portions for connecting the coil and the two external electrodes, A via-hole conductor connecting the plurality of coil electrodes and having a shape in which the area of one end is larger than the area of the other end; With Of the coil electrodes provided at both ends in the stacking direction, the coil electrode having a relatively large DC resistance value between the connected via-hole conductor and the connecting portion is defined as a start electrode and connected.
  • the coil electrode having a relatively small direct current resistance value between the via-hole conductor and the connecting portion is defined as an end electrode, and the coil electrode other than the start electrode and the end electrode is defined as an intermediate electrode.
  • the start electrode is connected to the via-hole conductor connected to the intermediate electrode via the one end; It is characterized by.
  • the end electrode has a length equal to or greater than the number of turns obtained by subtracting the number of turns of the intermediate electrode from one turn, and the via-hole conductor connected to the intermediate electrode; It may be connected via the other end.
  • the via-hole conductor that connects the end electrode and the intermediate electrode may be integrally formed with the end electrode in the insulating layer.
  • the end electrode may overlap the via-hole conductor connected to the intermediate electrode when viewed in plan from the stacking direction.
  • the via-hole conductor that connects the start electrode and the intermediate electrode may be formed integrally with the start electrode in the insulating layer.
  • the one end portion when the direction from the end electrode toward the start electrode is defined as a first direction, in each via-hole conductor, the one end portion is more first than the other end portion. It may be located on the direction side.
  • the end electrode may be configured to be connectable to the via-hole conductor at a plurality of locations.
  • the end electrode may have a shape in which a portion connectable to the via-hole conductor is thicker than other portions.
  • a via-hole conductor connecting the end electrode and the intermediate electrode may be connected to a portion other than both ends of the end electrode.
  • connection portion may be a via hole conductor.
  • connection portion may be a lead electrode provided on the insulating layer and connected to the start electrode or the end electrode.
  • the method for manufacturing the electronic component includes: Forming the via-hole conductor in the insulating layer; Forming the connecting portion in the insulating layer; Forming the start electrode and the intermediate electrode on the insulating layer; Forming the end electrode on the insulating layer; The insulating layer in which the start electrode is formed, the insulating layer in which the end electrode is formed, and the intermediate electrode are formed so that the intermediate electrode is positioned between the start electrode and the end electrode Laminating insulating layers to form a laminate; Providing It is characterized by.
  • the step of forming the via-hole conductor and the step of forming the start electrode and the intermediate electrode may be performed simultaneously.
  • disconnection between the via-hole conductor and the coil electrode can be prevented.
  • FIG. 1 is an external perspective view of an electronic component according to an embodiment of the present invention. It is a disassembled perspective view of the laminated body of the electronic component of FIG. It is a disassembled perspective view of the laminated body of an electronic component when changing the number of turns of a coil. It is the figure which saw through the electronic component of FIG. 1 from the y-axis direction. It is a disassembled perspective view of the laminated body of the conventional electronic component. It is a disassembled perspective view of the laminated body of the conventional electronic component. It is the figure which saw through the conventional electronic component from the y-axis direction. It is the figure which showed the coil electrode produced on the ceramic green sheet in experiment. The figure which showed the modification of the coil electrode.
  • the perspective view of the conventional electronic component The exploded perspective view of the laminated body of the conventional electronic component.
  • the electronic component is used in, for example, an inductor, an impeder, an LC filter, and an LC filter array.
  • FIG. 1 is an external perspective view of an electronic component 10 according to an embodiment of the present invention.
  • FIG. 2 is an exploded perspective view of the laminate 12 of the electronic component 10 of FIG.
  • the stacking direction of the stacked body 12 is defined as the z-axis direction
  • the directions orthogonal to the z-axis direction are defined as the x-axis direction and the y-axis direction.
  • the x-axis direction and the y-axis direction are parallel to the sides of the stacked body 12.
  • the electronic component 10 includes a laminate 12 and external electrodes 14a and 14b as shown in FIG.
  • the laminated body 12 has a rectangular parallelepiped shape and includes a coil L therein.
  • the external electrodes 14 a and 14 b are provided on the surfaces positioned at both ends in the z-axis direction of the multilayer body 12, and are connected to the coil L.
  • the laminate 12 is configured by laminating a plurality of coil electrodes and a plurality of insulating layers together. Specifically, it is as follows. As shown in FIG. 2, the laminate 12 includes a plurality of magnetic layers 16a to 16l made of ferromagnetic ferrite (for example, Ni—Zn—Cu ferrite, Ni—Zn ferrite, etc.) in the positive direction side in the z-axis direction. Are stacked so as to be arranged in this order from the negative direction side to the negative direction side.
  • the plurality of magnetic layers 16a to 16l are insulating layers having substantially the same area and the same rectangular shape. Coil electrodes 18a to 18e and 20 constituting the coil L are provided on the main surfaces of the magnetic layers 16d to 16i, respectively.
  • via hole conductors B1 to B12 are provided in the magnetic layers 16a to 16l, respectively.
  • a dielectric or an insulator may be used instead of the magnetic layers 16a to 16l made of ferrite.
  • an alphabet is added after the reference symbol, and the magnetic layers 16a to 16l and the coil electrodes 18a to 18e are collectively referred to. Shall omit the alphabet after the reference sign.
  • the individual via-hole conductors B1 to B12 are shown, a number is added after B, and when the via-hole conductors B1 to B12 are generically referred to, the number after B is omitted.
  • the coil electrodes 18 and 20 are made of a conductive material made of Ag and have a shape in which a part of the ring is cut away.
  • the coil electrodes 18 and 20 are U-shaped. Thereby, each coil electrode 18 and 20 comprises the electrode which has the length of 3/4 turn.
  • the coil electrodes 18 and 20 may be made of a conductive material such as a noble metal mainly composed of Pd, Au, Pt or the like, or an alloy thereof.
  • the coil electrodes 18 and 20 may have a shape in which a part of a circle or an ellipse is cut out.
  • the configuration of each of the coil electrodes 18a to 18e, 20 will be described.
  • the coil electrode 18a is provided on the magnetic layer 16d arranged on the most positive side in the z-axis direction among the magnetic layers 16d to 16i, and is called a start electrode.
  • the coil electrode 18a has the same number of turns as the coil electrodes 18b to 18e.
  • a contact portion C1 is provided at one end of the coil electrode 18a, and a contact portion C2 is provided at the other end of the coil electrode 18a.
  • the contact part C1 is electrically connected to the external electrode 14a via the via-hole conductors B1 to B3. Therefore, the contact portion C1 is provided at a position overlapping the via-hole conductors B1 to B3 when viewed in plan from the z-axis direction.
  • the contact portion C1 is formed thicker than other portions of the coil electrode 18a so as to be easily connected to the via-hole conductor B3.
  • the contact portion C2 is formed thicker than other portions of the coil electrode 18a so as to be easily connected to the via-hole conductor B4, and is formed integrally with the via-hole conductor B4.
  • the coil electrode 18b is provided on the magnetic layer 16e and is called an intermediate electrode.
  • a contact portion C3 is provided at one end of the coil electrode 18b, and a contact portion C4 is provided at the other end of the coil electrode 18b.
  • the contact portion C3 is formed thicker than other portions of the coil electrode 18b so that the contact portion C3 can be easily connected to the via-hole conductor B4 when the magnetic layer 16d and the magnetic layer 16e are laminated.
  • the contact portion C4 is formed thicker than other portions of the coil electrode 18b so as to be easily connected to the via-hole conductor B5, and is formed integrally with the via-hole conductor B5.
  • the coil electrode 18c is provided on the magnetic layer 16f and is called an intermediate electrode.
  • a contact portion C5 is provided at one end of the coil electrode 18c, and a contact portion C6 is provided at the other end of the coil electrode 18c.
  • the contact portion C5 is formed thicker than other portions of the coil electrode 18c so that the contact portion C5 can be easily connected to the via-hole conductor B5 when the magnetic layer 16e and the magnetic layer 16f are laminated.
  • the contact portion C6 is formed thicker than other portions of the coil electrode 18c so as to be easily connected to the via-hole conductor B6, and is formed integrally with the via-hole conductor B6.
  • the coil electrode 18d is provided on the magnetic layer 16g and is called an intermediate electrode.
  • a contact portion C7 is provided at one end of the coil electrode 18d, and a contact portion C8 is provided at the other end of the coil electrode 18d.
  • the contact part C7 is formed thicker than the other part of the coil electrode 18d so that it can be easily connected to the via-hole conductor B6 when the magnetic layer 16f and the magnetic layer 16g are laminated.
  • the contact portion C8 is formed thicker than other portions of the coil electrode 18d so as to be easily connected to the via-hole conductor B7, and is formed integrally with the via-hole conductor B7.
  • the coil electrode 18e is provided on the magnetic layer 16h and is called an intermediate electrode.
  • a contact portion C9 is provided at one end of the coil electrode 18e, and a contact portion C10 is provided at the other end of the coil electrode 18e.
  • the contact portion C9 is formed thicker than the other portions of the coil electrode 18e so that it can be easily connected to the via-hole conductor B7 when the magnetic layer 16g and the magnetic layer 16h are laminated. Further, the contact portion C10 is formed thicker than other portions of the coil electrode 18e so as to be easily connected to the via-hole conductor B8, and is formed integrally with the via-hole conductor B8.
  • the coil electrode 20 is provided on the magnetic layer 16i disposed on the most negative side in the z-axis direction among the magnetic layers 16d to 16i, and is called an end electrode.
  • the coil electrode 20 has a length equal to or greater than the number of turns obtained by subtracting the number of turns of the coil electrodes 18b to 18e that are intermediate electrodes from one turn (in this embodiment, the number of turns of the coil electrode 20). And the number of turns of the coil electrodes 18b to 18e is equal).
  • a contact portion C11 is provided at one end of the coil electrode 20, and a contact portion C14 is provided at the other end of the coil electrode 20.
  • the coil electrode 20 has contact portions C12 and C13 so that the coil electrode 20 can be connected to the via-hole conductor B at a plurality of locations. More specifically, the coil electrode 18 has a U-shape and can be connected to the via-hole conductor B at its four corners. Therefore, the coil electrode 20 has contact portions C11 to C14 at the four corners so as to be connectable to the via-hole conductors B provided at the four corners.
  • the contact portion C13 is formed thicker than other portions of the coil electrode 20 so that the magnetic layer 16h and the magnetic layer 16i are easily connected to the via-hole conductor B8 when the magnetic layer 16h and the magnetic layer 16i are laminated.
  • the contact portion C14 is electrically connected to the external electrode 14b via the via-hole conductors B9 to B12. Therefore, the contact portion C14 is provided at a position overlapping the via-hole conductors B9 to B12 when viewed in plan from the z-axis direction. Further, the contact portion C14 is formed thicker than other portions of the coil electrode 20 so as to be easily connected to the via-hole conductor B9, and is formed integrally with the via-hole conductor B9.
  • the contact portions C11 and C12 are formed thicker than other portions of the coil electrode 20 so as to be easily connected to the via-hole conductor B.
  • a number is appended to the C, and when the contact portions C1 to C14 are generically referred to, the number after the C is omitted.
  • the coil L is composed of the electrode 20) and four kinds of intermediate electrodes (coil electrodes 18b to 18e) other than the start electrode and the end electrode.
  • an appropriate coil electrode among the coil electrodes 18b to 18e serving as intermediate coils is interposed between the coil electrode 20 serving as an end electrode and the coil electrode 18e serving as an intermediate electrode. 18 is inserted.
  • FIG. 3 is an exploded perspective view of the multilayer body 12 of the electronic component 10 when the number of turns of the coil L is changed.
  • a coil electrode is interposed between the magnetic layer 16h and the magnetic layer 16i. What is necessary is just to insert the magnetic body layer 16m provided with 18f and the via-hole conductor B13.
  • the magnetic layer 16m, the coil electrode 18f, and the via hole conductor B13 have the same structure as the magnetic layer 16e, the coil electrode 18b, and the via hole conductor B5. Thereby, the number of turns of the coil can be changed.
  • the contact portion C13 is used for connection to the via-hole conductor B8.
  • the contact portion C12 is used for connection to the via-hole conductor B13.
  • the coil electrode 20 overlaps with the via-hole conductor B connected to the coil electrodes 18e and 18f, which are intermediate electrodes, when viewed in plan from the z-axis direction. Both can be connected.
  • the coil electrode 20 has a configuration that can be connected to the coil electrode 18c by overlapping with the via-hole conductor B connected to the coil electrode 18c that is an intermediate electrode when viewed in plan from the z-axis direction. ing.
  • FIG. 4 is a perspective view of the electronic component 10 seen from the y-axis direction.
  • the via-hole conductor B is provided so as to penetrate the magnetic layer 16 in the z-axis direction.
  • the via-hole conductor B when viewed from the y-axis direction, has one end t1. The area is larger than the area of the other end t2. More specifically, the area of the end t1 located on the positive side in the z-axis direction is larger than the area of the end t2 located on the negative side in the z-axis direction.
  • the connection relationship of each via-hole conductor B is demonstrated.
  • the via-hole conductors B1 to B3 are connected so as to be arranged in a straight line in the z-axis direction.
  • An end t2 of the via-hole conductor B3 is connected to the coil electrode 18a.
  • An end t1 of the via-hole conductor B4 is connected to the coil electrode 18a, and an end t2 of the via-hole conductor B4 is connected to the coil electrode 18b.
  • An end t1 of the via-hole conductor B5 is connected to the coil electrode 18b, and an end t2 of the via-hole conductor B5 is connected to the coil electrode 18c.
  • An end t1 of the via-hole conductor B6 is connected to the coil electrode 18c, and an end t2 of the via-hole conductor B6 is connected to the coil electrode 18d.
  • An end t1 of the via-hole conductor B7 is connected to the coil electrode 18d, and an end t2 of the via-hole conductor B7 is connected to the coil electrode 18e.
  • An end t1 of the via-hole conductor B8 is connected to the coil electrode 18e, and an end t2 of the via-hole conductor B8 is connected to the coil electrode 20.
  • the via-hole conductors B9 to B12 are connected so as to be arranged in a straight line in the z-axis direction.
  • An end t1 of the via-hole conductor B9 is connected to the coil electrode 20.
  • the end t1 is positioned closer to the positive side in the z-axis direction than the end t2.
  • the coil electrode 20 is different for each of the via-hole conductors B8 and B13 connected to the coil electrodes 18e and 18f, which are intermediate electrodes, as shown in FIGS. They are connected via contact parts C12 and C13. Therefore, when the number of turns of the coil L changes, the distance between the two via-hole conductors B connected to the coil electrode 20 also changes. More specifically, in the state shown in FIG. 2, the distance between the two via-hole conductors B8 and B9 connected to the coil electrode 20 is relatively short, and in the state shown in FIG. The distance between the two via-hole conductors B9 and B13 is relatively long.
  • both the coil electrode 18a and the coil electrode 20 have a length of 3/4 turns, the DC resistance value between the two via-hole conductors B connected to the coil electrode 20 that is an end electrode is The DC resistance value between the two via-hole conductors B connected to the coil electrode 18a as the start electrode is relatively large.
  • one electronic component 10 is manufactured by a sheet lamination method.
  • a mother laminate may be produced using a large ceramic green sheet and cut into individual laminates 12.
  • a ceramic green sheet to be the magnetic layer 16 is produced as follows. Ratio of ferric oxide (Fe 2 O 3 ) 48.0 mol%, zinc oxide (ZnO) 25.0 mol%, nickel oxide (NiO) 18.0 mol%, copper oxide (CuO) 9.0 mol% Each material weighed in step 1 is put into a ball mill as a raw material and wet blended. The obtained mixture is dried and pulverized, and the obtained powder is calcined at 750 ° C. for 1 hour. The obtained calcined powder is wet pulverized by a ball mill, dried and then crushed to obtain a ferrite ceramic powder.
  • a binder (vinyl acetate, water-soluble acrylic, etc.), a plasticizer, a wetting material, and a dispersing agent are added and mixed with a ball mill, and then defoamed under reduced pressure.
  • the obtained ceramic slurry is formed into a sheet by a doctor blade method and dried to produce a ceramic green sheet having a desired film thickness (for example, 35 ⁇ m).
  • a via-hole conductor B is formed on the ceramic green sheet to be the magnetic layer 16. Specifically, a through hole is formed in a ceramic green sheet using a laser beam. Here, the laser beam passes through the ceramic green sheet while being attenuated. Therefore, the through hole has a tapered shape in which the area of the opening on the side irradiated with the laser beam is large and the area of the opening on the opposite side is small. Next, the through holes are filled with a conductive paste such as Ag, Pd, Cu, Au, or an alloy thereof by a method such as printing. As a result, as shown in FIG. 4, a via-hole conductor B having a shape in which the area of one end t1 is larger than the area of the other end t2 when viewed from the y-axis direction is formed.
  • a conductive paste mainly composed of Ag, Pd, Cu, Au, or an alloy thereof is applied on the ceramic green sheets to be the magnetic layers 16d to 16h by a method such as a screen printing method or a photolithography method.
  • coil electrodes 18a to 18e which are start electrodes and intermediate electrodes are formed.
  • the coil electrode 18 is formed on the main surface on the end t1 side of the via-hole conductor B so that the contact portion C and the via-hole conductor B overlap each other. .
  • the coil electrode 18 and the via-hole conductor B may be simultaneously formed on the ceramic green sheet.
  • a conductive paste mainly composed of Ag, Pd, Cu, Au, or an alloy thereof is applied on the ceramic green sheet to be the magnetic layer 16i by a method such as a screen printing method or a photolithography method.
  • the coil electrode 20 which is an end electrode is formed.
  • the coil electrode 20 is formed on the main surface on the end t1 side of the via-hole conductor B9 so that the contact portion C14 and the via-hole conductor B9 overlap. Note that the coil electrode 20 and the via-hole conductor B9 may be simultaneously formed on the ceramic green sheet.
  • the ceramic green sheets are laminated to form an unfired laminate 12.
  • the coil electrodes 18b to 18e intermediate electrodes are located between the coil electrode 18a (start electrode) and the coil electrode 20 (end electrode), and the coil electrode 20 is connected to the coil electrode 18e.
  • the direct-current resistance value between the via-hole conductors B3 and B4 connected to the conductor B8 via the end t2 and connected to the coil electrode 18a is equal to the direct-current resistance between the via-hole conductors B8 and B9 connected to the coil electrode 20
  • the stacked body 12 is formed so as to be larger than the value. Specifically, a ceramic green sheet to be the magnetic layer 16l is disposed.
  • the ceramic green sheet to be the magnetic layer 16k is disposed and temporarily pressed onto the ceramic green sheet to be the magnetic layer 16l. Thereafter, the ceramic green sheets to be the magnetic layers 16j, 16i, 16h, 16g, 16f, 16e, 16d, 16c, 16b, and 16a are also temporarily bonded by the same procedure. Thereby, the unfired laminated body 12 is formed.
  • the green laminate 12 is subjected to main pressure bonding by an isostatic press or the like.
  • the laminate 12 is subjected to binder removal processing and firing.
  • the firing temperature is 900 ° C., for example.
  • the baked laminated body 12 is obtained.
  • an electrode paste whose main component is silver is applied and baked by a method such as an immersion method, thereby forming silver electrodes to be the external electrodes 14 a and 14 b.
  • Ni plating / Sn plating is performed on the surface of the silver electrode to be the external electrodes 14a and 14b.
  • the end t1 of the via-hole conductor B4 is connected to the coil electrode 18a.
  • the end t1 has a larger area than the end t2. Therefore, in the electronic component 10, the DC resistance value at the connection portion between the coil electrode 18a and the via-hole conductor B4 is reduced, and the connection portion is prevented from generating heat intensively. As a result, occurrence of disconnection at the boundary portion between the coil electrode 18a and the via-hole electrode B4 is suppressed.
  • the inventor of the present application conducted the electrostatic discharge test shown below to evaluate the disconnection occurrence rate in order to make the effect clearer.
  • the first prototype and the second prototype were used.
  • the first prototype corresponds to the electronic component 10 according to the present embodiment.
  • the electronic component 10 shown in FIGS. 2 and 3 was used.
  • the second prototype used the electronic component 10 shown in FIGS. 2 and 3 with the via hole conductor B reversed in the z-axis direction.
  • the details of the first prototype and the second prototype are as follows.
  • the electronic component 10 can suppress the occurrence of disconnection.
  • the via-hole conductor B4 that connects the coil electrode 18a that is the start electrode and the coil electrode 18b that is the intermediate electrode is formed integrally by being formed simultaneously with the coil electrode 18a in the manufacturing process. ing. For this reason, the connection between the coil electrode 18a and the via-hole conductor B4 is strengthened, and disconnection is less likely to occur at the connection portion between the coil electrode 18a and the via-hole conductor B4.
  • FIG. 5 and 6 are exploded perspective views of the multilayer body 112 of the conventional electronic component 110.
  • FIG. FIG. 7 is a perspective view of the electronic component 110 seen from the y-axis direction.
  • the stacking direction of the stacked body 112 is defined as the z-axis direction
  • the directions orthogonal to the z-axis direction are defined as the x-axis direction and the y-axis direction.
  • the x-axis direction and the y-axis direction are parallel to the sides of the stacked body 112.
  • the electronic component 110 includes a rectangular parallelepiped laminated body 112 including a coil therein, and two external electrodes 114 a provided on the surfaces of the laminated body 112 positioned at both ends in the z-axis direction. 114b.
  • the laminated body 112 is configured by laminating a plurality of coil electrodes and a plurality of magnetic layers. Specifically, it is as follows. As shown in FIG. 5, the multilayer body 112 includes a plurality of magnetic layers 116a to 116l made of ferromagnetic ferrite (for example, Ni—Zn—Cu ferrite, Ni—Zn ferrite, etc.) in the negative direction side in the z-axis direction. Are stacked so as to be arranged in this order from the positive side to the positive direction side.
  • the magnetic layers 116d to 116i are provided with coil electrodes 118a to 118e, 120 constituting a coil.
  • via hole conductors b1 to b12 are provided in the magnetic layers 116a to 116l.
  • the coil electrodes 118a to 118e, 120 are U-shaped, and are linear electrodes having a length of 3/4 turns.
  • the via-hole conductors b5 to b8 are provided so as to penetrate the magnetic layers 116e to 116h in the z-axis direction at one ends of the coil electrodes 118b to 118e, respectively.
  • the via-hole conductor b9 is provided so as to penetrate the magnetic layer 116i in the z-axis direction at the corner portion located at the lower left of the coil electrode 120.
  • the coil electrodes 118a to 118e and 120 are connected to each other by the via-hole conductors b5 to b9, thereby forming a spiral coil.
  • the via-hole conductors b1 to b4 are provided so as to penetrate the magnetic layers 116a to 116d in the z-axis direction, respectively, and electrically connect the coil electrode 118a and the external electrode 114a.
  • the via-hole conductors b10 to b12 are provided so as to penetrate the magnetic layers 116j to 116l in the z-axis direction, respectively, and electrically connect the coil electrode 120 and the external electrode 114b.
  • FIG. 6 is an exploded perspective view of the laminate 112 when the number of turns of the coil is changed.
  • a coil electrode 118f and a via hole are provided between the magnetic layer 116h and the magnetic layer 116i.
  • the magnetic layer 116m provided with the conductor b13 may be inserted.
  • the coil electrode 118f and the via hole conductor b13 have the same structure as the coil electrode 118b and the via hole conductor b5. Thereby, the number of turns of the coil can be changed.
  • the same structure as that of the magnetic layer 116f is provided between the magnetic layer 116m and the magnetic layer 116i. It is sufficient to insert a magnetic layer 116 having
  • the position of the end of the coil electrode 118 located on the negative side of the z-axis direction of the coil electrode 120 changes. To do. Therefore, in order to connect the coil electrode 118 and the coil electrode 120 located on the negative side of the z-axis direction of the coil electrode 120, the position of the via-hole conductor b9 must be changed. That is, in the electronic component 110, it is necessary to redesign the position of the via-hole conductor b9 when changing the number of turns of the coil.
  • the coil electrode 20 as an end electrode is provided on the lowermost side in the stacking direction.
  • the coil electrode 18 provided immediately above the coil electrode 20 changes depending on the number of turns of the coil L. Therefore, when the number of turns of the coil L changes, the position of the end of the coil electrode 18 changes.
  • the coil electrode 18 and the coil electrode 20 are connected by a via-hole conductor B formed integrally with the coil electrode 18. Therefore, when the number of turns of the coil L changes and the position of the end of the coil electrode 18 changes, the position of the via-hole conductor B also changes together with the position of the end of the coil electrode 18.
  • the coil electrode 18 provided immediately above the coil electrode 20 has the same structure as the coil electrodes 18b to 18e. Therefore, in the electronic component 10, even if the position of the end portion of the coil electrode 18 and the position of the via-hole conductor B are changed, it is not necessary to redesign the position of the via-hole conductor B.
  • the via hole conductor B being integrally formed with the coil electrode 18 refers to a state in which the via hole conductor B8 and the coil electrode 18e are simultaneously formed in the manufacturing process.
  • the coil electrode 20 that is an end electrode overlaps with the via-hole conductor B that is connected to the coil electrodes 18b to 18e that are intermediate electrodes when viewed in plan from the z-axis direction. Therefore, even if the position of the via-hole conductor B connected to the coil electrode 20 changes by changing the number of turns of the coil L, the coil electrode 20 and the via-hole conductor B are connected to any one of the contact portions C11 to C14. Can be connected. As a result, in the electronic component 10, it is not necessary to redesign the coil electrode 20 when changing the number of turns of the coil L. That is, in the electronic component 10, it is sufficient to prepare only one type of coil electrode 20 that is an end electrode.
  • the coil electrode 20 is not necessarily required to have a length (3/4 turn) that overlaps the via-hole conductor B connected to the coil electrodes 18b to 18e.
  • the coil electrode 20 only needs to have at least a length equal to or greater than the number of turns obtained by subtracting the number of turns of the coil electrodes 18a to 18e that are intermediate electrodes from one turn. Thereby, the coil electrode 20 can be connected to the via-hole conductor B at at least two places. More specifically, when the coil electrode 20 has a length of 1/4 turn, the coil electrode 20 can be connected to the via-hole conductors B8 and B9 as shown in FIG.
  • the coil electrode 20 When the coil electrode 20 has a length of 1/2 turn, the coil electrode 20 can be connected to the via-hole conductors B9 and B13 as shown in FIG. However, in this case, if the length of the coil L is changed, the coil electrode 20 needs to be redesigned.
  • the electronic component 10 it is possible to suppress the occurrence of poor formation of the via-hole conductor B9 connected to the coil electrode 20 as described below. More specifically, in the conventional electronic component 110 shown in FIGS. 5 and 6, a via-hole conductor b ⁇ b> 9 is provided in the middle of the coil electrode 120.
  • the via hole conductor B9 is provided at the end of the coil electrode 20, as shown in FIG.
  • the 20 wires are not extended. Therefore, when the coil electrode 20 is formed by the screen printing method, the conductive paste is used for forming the wiring of the coil electrode 20 and also for forming the via-hole conductor B9. As a result, in the electronic component 10, the problem of poor formation of the via-hole conductor B9 hardly occurs.
  • FIG. 8 is a view showing the coil electrode 20 produced on the ceramic green sheet in the experiment.
  • the formation defect rate of the via-hole conductors Ba and Bd located at the end of the coil electrode 20 was 0%.
  • the formation defect rates of the via-hole conductors Bb and Bc located in the middle of the coil electrode 20 were 15% and 17%. Therefore, it can be understood that the formation failure rate of the via-hole conductor can be reduced when the via-hole conductor is provided at the end of the coil electrode than when the via-hole conductor is provided in the middle of the coil electrode. That is, in the electronic component 10, since the via-hole conductor B9 is provided at the end of the coil electrode 20, it can be understood that the formation failure of the via-hole conductor B9 hardly occurs.
  • the electronic component according to the present invention is not limited to the above embodiments, and can be changed within the scope of the gist.
  • the contact portion C is formed thicker than the other portions of the coil electrodes 18 and 20, but the contact portion C is not necessarily formed thick.
  • the contact portion C may not be formed thicker than the other portions of the coil electrodes 18 and 20.
  • the coil electrode 20 of FIG. 9 does not have a clear contact portion C, unlike the coil electrode 20 of FIG. Therefore, it is difficult to determine that the coil electrode 20 is configured to be connectable to the via-hole conductor B8 at a plurality of locations only by looking at the coil electrode 20 alone.
  • the via-hole conductor B8 when the via-hole conductor B8 is connected to a portion (for example, points M and N in FIG. 9) other than the end opposite to the end to which the via-hole conductor B9 of the coil electrode 20 is connected, It can be said that the via-hole conductor B8 can be connected from the point where the via-hole conductor B8 is connected to the end portion where the via-hole conductor B9 is not connected. Therefore, when the via-hole conductor B8 is connected to the coil electrode 20 leaving the end portion to which the via-hole conductor B9 is not connected, the coil electrode 20 is configured to be connectable to the via-hole conductor B8 at a plurality of locations. Judge that
  • the 3/4 turn coil electrode 18 is used in the electronic component 10. However, for example, a 5/6 turn coil electrode 18 or a 7/8 turn coil electrode 18 may be used.
  • the electronic component 10 was produced by the sheet
  • the manufacturing method of this electronic component 10 is not restricted to this.
  • the electronic component 10 may be manufactured by a printing method.
  • the coil electrode 18a is formed longer than the coil electrode 20, so that the first DC resistance from the via-hole conductor B3 to the via-hole conductor B4 is reduced. It is larger than the second DC resistance up to the conductor B9.
  • the method of making the first DC resistance larger than the second DC resistance is not limited to this. For example, you may implement
  • both ends of the coil L are connected to the external electrodes 14a and 14b by via-hole conductors B, respectively.
  • either one end of the coil L may be connected to the external electrode 14a or the external electrode 14b by a lead portion connected to the coil conductor 18 on the magnetic layer 16.
  • the present invention is useful for an electronic component and a manufacturing method thereof, and is particularly excellent in that a disconnection between a via-hole conductor and a coil electrode can be prevented.

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Abstract

A multilayer electronic component wherein disconnection between a via hole conductor and coil electrodes can be prevented; and a method of manufacturing the same.  The via hole conductor (B) is connected to a plurality of coil electrodes (18) and has a shape in which the area of one end part (t1) is larger than the area of the other end part (t2).  A coil electrode (18a) is defined as a start electrode, a coil conductor (20) is defined as an end electrode, and coil electrodes (18b to 18e) other than the start electrode and end electrode are defined as intermediate electrodes.  The start electrode is connected to the via hole conductor (B4), which is connected to the intermediate electrodes, by the larger end part (t1) of the same.

Description

電子部品及びその製造方法Electronic component and manufacturing method thereof
 本発明は、電子部品及びその製造方法に関し、絶縁層とコイル電極とが積層されてなる電子部品及びその製造方法に関する。 The present invention relates to an electronic component and a manufacturing method thereof, and relates to an electronic component in which an insulating layer and a coil electrode are laminated and a manufacturing method thereof.
 以下に、コイルを内蔵した従来の電子部品の構造について図面を参照しながら説明する。図10は、従来の電子部品200の透視図である。図11は、従来の電子部品200の積層体202の分解斜視図である。 Hereinafter, the structure of a conventional electronic component incorporating a coil will be described with reference to the drawings. FIG. 10 is a perspective view of a conventional electronic component 200. FIG. 11 is an exploded perspective view of a multilayer body 202 of a conventional electronic component 200.
 電子部品200は、図10に示すように、内部にコイルを含む直方体状の積層体202と、積層体202の対向する側面に形成される2つの外部電極212a,212bとを備える。 As shown in FIG. 10, the electronic component 200 includes a rectangular parallelepiped laminated body 202 including a coil inside, and two external electrodes 212 a and 212 b formed on opposite side surfaces of the laminated body 202.
 積層体202は、複数のコイル電極と複数の磁性体層とが積層されて構成されている。具体的には、以下の通りである。積層体202は、図11に示すように、強磁性のフェライト(例えば、Ni-Zn-Cuフェライト又はNi-Znフェライト等)からなる複数の磁性体層204a~204f,206a~206dが積層されることにより構成されている。磁性体層204a~204fには、コイルを構成するコイル電極208a~208fが形成されている。また、磁性体層204a~204eには、ビアホール導体B51~B55が形成されている。ビアホール導体B51~B55は、例えば、レーザを照射してビアホールを形成し、該ビアホールに対して導体を充填して形成される。そのため、図10に示すように、ビアホール導体B51~B55は、一端の面積が相対的に大きく、かつ、他端の面積が相対的に小さい形状を有している。 The laminate 202 is configured by laminating a plurality of coil electrodes and a plurality of magnetic layers. Specifically, it is as follows. As shown in FIG. 11, the multilayer body 202 includes a plurality of magnetic layers 204a to 204f, 206a to 206d made of ferromagnetic ferrite (for example, Ni—Zn—Cu ferrite or Ni—Zn ferrite). It is constituted by. Coil electrodes 208a to 208f constituting coils are formed on the magnetic layers 204a to 204f. In addition, via hole conductors B51 to B55 are formed in the magnetic layers 204a to 204e. The via hole conductors B51 to B55 are formed, for example, by forming a via hole by irradiating a laser and filling the via hole with a conductor. Therefore, as shown in FIG. 10, the via-hole conductors B51 to B55 have a shape in which the area of one end is relatively large and the area of the other end is relatively small.
 コイル電極208a~208fは、「コ」字状の形状を有し、3/4ターンの長さを有する電極である。ビアホール導体B1~B5はそれぞれ、各コイル電極208a~208eの一端において磁性体層204a~204eを上下方向に貫通するように設けられている。コイル電極208a~208fは、ビアホール導体B51~B55により互いに接続されることにより、螺旋状のコイルを構成する。更に、積層方向において最も上側及び最も下側に形成されたコイル電極208a,208fにはそれぞれ、引き出し電極210a,210bが設けられている。この引き出し電極210a,210bは、コイルと外部電極212a,212bとを接続する役割を果たす。 The coil electrodes 208a to 208f are electrodes having a “U” shape and a length of 3/4 turns. The via-hole conductors B1 to B5 are provided so as to penetrate the magnetic layers 204a to 204e in the vertical direction at one end of each of the coil electrodes 208a to 208e. The coil electrodes 208a to 208f are connected to each other by via hole conductors B51 to B55, thereby forming a spiral coil. Furthermore, extraction electrodes 210a and 210b are provided on the coil electrodes 208a and 208f formed on the uppermost and lowermost sides in the stacking direction, respectively. The lead electrodes 210a and 210b serve to connect the coil and the external electrodes 212a and 212b.
 以上のように構成された従来の電子部品200では、以下に説明するように、コイル電極208fとビアホール導体B55との間において断線が発生し易いという問題がある。 As described below, the conventional electronic component 200 configured as described above has a problem in that disconnection is likely to occur between the coil electrode 208f and the via-hole conductor B55.
 図11に示すように、コイル電極208fの長さは、コイル電極208aの長さよりも長い。そのため、コイルに電流を流した場合には、コイル電極208fにおける発熱量は、コイル電極208aにおける発熱量よりも多くなる。更に、コイル電極208fには、ビアホール導体B55の面積が小さい方の端部が接続されている。そのため、特に、コイル電極208fとビアホール導体B55との接続部分において集中的に発熱する。その結果、コイル電極208fとビアホール導体B55との間において、断線が発生し易い。 As shown in FIG. 11, the length of the coil electrode 208f is longer than the length of the coil electrode 208a. Therefore, when a current is passed through the coil, the amount of heat generated in the coil electrode 208f is greater than the amount of heat generated in the coil electrode 208a. Further, the end portion of the via hole conductor B55 having the smaller area is connected to the coil electrode 208f. Therefore, heat is intensively generated particularly at the connection portion between the coil electrode 208f and the via-hole conductor B55. As a result, disconnection is likely to occur between the coil electrode 208f and the via-hole conductor B55.
 なお、特許文献1には、最も上層のコイル導体と最も下層のコイル導体とが同じ形状を有する積層型電子部品が記載されている。しかしながら、特許文献1では、ビア導体とコイル導体との接続部分における断線の問題については言及されていない。 Note that Patent Document 1 describes a multilayer electronic component in which the uppermost coil conductor and the lowermost coil conductor have the same shape. However, Patent Document 1 does not mention the problem of disconnection at the connection portion between the via conductor and the coil conductor.
特開2005-167130号公報JP 2005-167130 A
 そこで、本発明の目的は、ビアホール導体とコイル電極との間の断線を防止できる電子部品及びその製造方法を提供することである。 Therefore, an object of the present invention is to provide an electronic component that can prevent disconnection between a via-hole conductor and a coil electrode, and a manufacturing method thereof.
 本発明の一形態に係る電子部品は、
 コイルを構成している複数のコイル電極と、
 前記複数のコイル電極と共に積層されて積層体を構成している複数の絶縁層と、
 前記積層体の表面に設けられている2つの外部電極と
 前記コイルと前記2つの外部電極とを接続する2つの接続部と、
 前記複数のコイル電極を接続し、かつ、一方の端部の面積が他方の端部の面積よりも大きい形状を有しているビアホール導体と、
 を備え、
 積層方向の両端に設けられている前記コイル電極の内、接続されている前記ビアホール導体と前記接続部との間の直流抵抗値が相対的に大きい前記コイル電極をスタート電極と定義し、接続されている前記ビアホール導体と前記接続部との間の直流抵抗値が相対的に小さい前記コイル電極をエンド電極と定義し、該スタート電極及び該エンド電極以外の前記コイル電極を、中間電極と定義したときに、
 前記スタート電極は、前記中間電極と接続されている前記ビアホール導体と、前記一方の端部を介して接続されていること、
 を特徴とする。
An electronic component according to an aspect of the present invention is
A plurality of coil electrodes constituting a coil;
A plurality of insulating layers laminated together with the plurality of coil electrodes to form a laminate;
Two external electrodes provided on the surface of the laminate, two connection portions for connecting the coil and the two external electrodes,
A via-hole conductor connecting the plurality of coil electrodes and having a shape in which the area of one end is larger than the area of the other end;
With
Of the coil electrodes provided at both ends in the stacking direction, the coil electrode having a relatively large DC resistance value between the connected via-hole conductor and the connecting portion is defined as a start electrode and connected. The coil electrode having a relatively small direct current resistance value between the via-hole conductor and the connecting portion is defined as an end electrode, and the coil electrode other than the start electrode and the end electrode is defined as an intermediate electrode. sometimes,
The start electrode is connected to the via-hole conductor connected to the intermediate electrode via the one end;
It is characterized by.
 前記電子部品において、前記エンド電極は、1ターンから前記中間電極のターン数を引いて得られるターン数以上の長さを有していると共に、前記中間電極と接続されている前記ビアホール導体と、前記他方の端部を介して接続されていてもよい。 In the electronic component, the end electrode has a length equal to or greater than the number of turns obtained by subtracting the number of turns of the intermediate electrode from one turn, and the via-hole conductor connected to the intermediate electrode; It may be connected via the other end.
 前記電子部品において、前記エンド電極と前記中間電極とを接続している前記ビアホール導体は、前記絶縁層において前記エンド電極と一体的に形成されていてもよい。 In the electronic component, the via-hole conductor that connects the end electrode and the intermediate electrode may be integrally formed with the end electrode in the insulating layer.
 前記電子部品において、前記エンド電極は、積層方向から平面視したときに、前記中間電極に接続されている前記ビアホール導体と重なっていてもよい。 In the electronic component, the end electrode may overlap the via-hole conductor connected to the intermediate electrode when viewed in plan from the stacking direction.
 前記電子部品において、前記スタート電極と前記中間電極とを接続している前記ビアホール導体は、前記絶縁層において該スタート電極と一体的に形成されていてもよい。 In the electronic component, the via-hole conductor that connects the start electrode and the intermediate electrode may be formed integrally with the start electrode in the insulating layer.
 前記電子部品において、前記エンド電極から前記スタート電極に向かう方向を、第1の方向と定義した場合において、前記各ビアホール導体において、前記一方の端部は、前記他方の端部よりも第1の方向側に位置していてもよい。 In the electronic component, when the direction from the end electrode toward the start electrode is defined as a first direction, in each via-hole conductor, the one end portion is more first than the other end portion. It may be located on the direction side.
 前記電子部品において、前記エンド電極は、複数個所において前記ビアホール導体と接続可能に構成されていてもよい。 In the electronic component, the end electrode may be configured to be connectable to the via-hole conductor at a plurality of locations.
 前記電子部品において、前記エンド電極は、前記ビアホール導体と接続可能な部分が、他の部分よりも太い形状を有していてもよい。 In the electronic component, the end electrode may have a shape in which a portion connectable to the via-hole conductor is thicker than other portions.
 前記電子部品において、前記エンド電極と前記中間電極とを接続しているビアホール導体は、該エンド電極の両端以外の部分に接続されていてもよい。 In the electronic component, a via-hole conductor connecting the end electrode and the intermediate electrode may be connected to a portion other than both ends of the end electrode.
 前記電子部品において、前記接続部は、ビアホール導体であってもよい。 In the electronic component, the connection portion may be a via hole conductor.
 前記電子部品において、前記接続部は、前記絶縁層上に設けられ、かつ、前記スタート電極又は前記エンド電極のそれぞれに接続されている引き出し電極であってもよい。 In the electronic component, the connection portion may be a lead electrode provided on the insulating layer and connected to the start electrode or the end electrode.
 前記電子部品の製造方法は、
 前記ビアホール導体を、前記絶縁層に形成する工程と、
 前記接続部を前記絶縁層に形成する工程と、
 前記スタート電極及び前記中間電極を前記絶縁層に形成する工程と、
 前記エンド電極を前記絶縁層に形成する工程と、
 前記中間電極が前記スタート電極と前記エンド電極との間に位置するように、該スタート電極が形成された前記絶縁層、該エンド電極が形成された前記絶縁層及び該中間電極が形成された前記絶縁層を積層して、積層体を形成する工程と、
 を備えること、
 を特徴とする。
The method for manufacturing the electronic component includes:
Forming the via-hole conductor in the insulating layer;
Forming the connecting portion in the insulating layer;
Forming the start electrode and the intermediate electrode on the insulating layer;
Forming the end electrode on the insulating layer;
The insulating layer in which the start electrode is formed, the insulating layer in which the end electrode is formed, and the intermediate electrode are formed so that the intermediate electrode is positioned between the start electrode and the end electrode Laminating insulating layers to form a laminate;
Providing
It is characterized by.
 前記電子部品の製造方法において、前記ビアホール導体を形成する工程と、前記スタート電極及び前記中間電極を形成する工程とは、同時に行われてもよい。 In the electronic component manufacturing method, the step of forming the via-hole conductor and the step of forming the start electrode and the intermediate electrode may be performed simultaneously.
 本発明によれば、ビアホール導体とコイル電極との間の断線を防止できる。 According to the present invention, disconnection between the via-hole conductor and the coil electrode can be prevented.
本発明の一実施形態に係る電子部品の外観斜視図である。1 is an external perspective view of an electronic component according to an embodiment of the present invention. 図1の電子部品の積層体の分解斜視図である。It is a disassembled perspective view of the laminated body of the electronic component of FIG. コイルのターン数を変化させた場合における電子部品の積層体の分解斜視図である。It is a disassembled perspective view of the laminated body of an electronic component when changing the number of turns of a coil. 図1の電子部品をy軸方向から透視した図である。It is the figure which saw through the electronic component of FIG. 1 from the y-axis direction. 従来の電子部品の積層体の分解斜視図である。It is a disassembled perspective view of the laminated body of the conventional electronic component. 従来の電子部品の積層体の分解斜視図である。It is a disassembled perspective view of the laminated body of the conventional electronic component. 従来の電子部品をy軸方向から透視した図である。It is the figure which saw through the conventional electronic component from the y-axis direction. 実験においてセラミックグリーンシート上に作製したコイル電極を示した図である。It is the figure which showed the coil electrode produced on the ceramic green sheet in experiment. コイル電極の変形例を示した図。The figure which showed the modification of the coil electrode. 従来の電子部品の透視図。The perspective view of the conventional electronic component. 従来の電子部品の積層体の分解斜視図。The exploded perspective view of the laminated body of the conventional electronic component.
 以下に、本発明の一実施形態に係る電子部品及びその製造方法について説明する。該電子部品は、例えば、インダクタ、インピーダ、LCフィルタ、LCフィルタアレイに用いられる。 Hereinafter, an electronic component and a manufacturing method thereof according to an embodiment of the present invention will be described. The electronic component is used in, for example, an inductor, an impeder, an LC filter, and an LC filter array.
(電子部品の構成)
 まず、本発明の一実施形態に係る電子部品の構成について、図面を参照しながら説明する。図1は、本発明の一実施形態に係る電子部品10の外観斜視図である。図2は、図1の電子部品10の積層体12の分解斜視図である。以下では、積層体12の積層方向をz軸方向と定義し、z軸方向に直交する方向をx軸方向及びy軸方向と定義する。x軸方向及びy軸方向は、積層体12の辺に平行である。
(Configuration of electronic parts)
First, the configuration of an electronic component according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an external perspective view of an electronic component 10 according to an embodiment of the present invention. FIG. 2 is an exploded perspective view of the laminate 12 of the electronic component 10 of FIG. Hereinafter, the stacking direction of the stacked body 12 is defined as the z-axis direction, and the directions orthogonal to the z-axis direction are defined as the x-axis direction and the y-axis direction. The x-axis direction and the y-axis direction are parallel to the sides of the stacked body 12.
 電子部品10は、図1に示すように、積層体12及び外部電極14a,14bを備えている。積層体12は、直方体状をなしており、内部にコイルLを含んでいる。外部電極14a,14bは、積層体12のz軸方向の両端に位置する面に設けられ、コイルLに接続されている。 The electronic component 10 includes a laminate 12 and external electrodes 14a and 14b as shown in FIG. The laminated body 12 has a rectangular parallelepiped shape and includes a coil L therein. The external electrodes 14 a and 14 b are provided on the surfaces positioned at both ends in the z-axis direction of the multilayer body 12, and are connected to the coil L.
 積層体12は、複数のコイル電極と複数の絶縁層とが共に積層されて構成されている。具体的には、以下の通りである。積層体12は、図2に示すように、強磁性のフェライト(例えば、Ni-Zn-Cuフェライト又はNi-Znフェライト等)からなる複数の磁性体層16a~16lがz軸方向の正方向側から負方向側へとこの順に並ぶように積層されることにより構成されている。複数の磁性体層16a~16lは、それぞれ略同じ面積及び同じ長方形状を有する絶縁層である。磁性体層16d~16iの主面上にはそれぞれ、コイルLを構成しているコイル電極18a~18e,20が設けられている。更に、磁性体層16a~16lにはそれぞれ、ビアホール導体B1~B12が設けられている。なお、フェライトからなる磁性体層16a~16lの代わりに、誘電体や絶縁体が用いられてもよい。以下では、個別の磁性体層16a~16l及びコイル電極18a~18eを示す場合には、参照符号の後ろにアルファベットを付し、磁性体層16a~16l及びコイル電極18a~18eを総称する場合には、参照符号の後ろのアルファベットを省略するものとする。また、個別のビアホール導体B1~B12を示す場合には、Bの後ろに数字を付し、ビアホール導体B1~B12を総称する場合には、Bの後ろの数字を省略するものとする。 The laminate 12 is configured by laminating a plurality of coil electrodes and a plurality of insulating layers together. Specifically, it is as follows. As shown in FIG. 2, the laminate 12 includes a plurality of magnetic layers 16a to 16l made of ferromagnetic ferrite (for example, Ni—Zn—Cu ferrite, Ni—Zn ferrite, etc.) in the positive direction side in the z-axis direction. Are stacked so as to be arranged in this order from the negative direction side to the negative direction side. The plurality of magnetic layers 16a to 16l are insulating layers having substantially the same area and the same rectangular shape. Coil electrodes 18a to 18e and 20 constituting the coil L are provided on the main surfaces of the magnetic layers 16d to 16i, respectively. Further, via hole conductors B1 to B12 are provided in the magnetic layers 16a to 16l, respectively. A dielectric or an insulator may be used instead of the magnetic layers 16a to 16l made of ferrite. In the following, when the individual magnetic layers 16a to 16l and the coil electrodes 18a to 18e are shown, an alphabet is added after the reference symbol, and the magnetic layers 16a to 16l and the coil electrodes 18a to 18e are collectively referred to. Shall omit the alphabet after the reference sign. In addition, when the individual via-hole conductors B1 to B12 are shown, a number is added after B, and when the via-hole conductors B1 to B12 are generically referred to, the number after B is omitted.
 各コイル電極18,20は、Agからなる導電性材料からなり、環の一部が切り欠かれた形状を有する。本実施形態では、コイル電極18,20は、コ字型をなしている。これにより、各コイル電極18,20は、3/4ターンの長さを有する電極を構成している。なお、コイル電極18,20は、Pd,Au,Pt等を主成分とする貴金属やこれらの合金などの導電性材料からなっていてもよい。また、コイル電極18,20は、円又は楕円の一部が切り欠かれた形状であってもよい。以下に、コイル電極18a~18e,20のそれぞれの構成について説明する。 The coil electrodes 18 and 20 are made of a conductive material made of Ag and have a shape in which a part of the ring is cut away. In the present embodiment, the coil electrodes 18 and 20 are U-shaped. Thereby, each coil electrode 18 and 20 comprises the electrode which has the length of 3/4 turn. The coil electrodes 18 and 20 may be made of a conductive material such as a noble metal mainly composed of Pd, Au, Pt or the like, or an alloy thereof. The coil electrodes 18 and 20 may have a shape in which a part of a circle or an ellipse is cut out. Hereinafter, the configuration of each of the coil electrodes 18a to 18e, 20 will be described.
 コイル電極18aは、磁性体層16d~16iの内、z軸方向の最も正方向側に配置された磁性体層16d上に設けられており、スタート電極と呼ばれる。コイル電極18aは、コイル電極18b~18eと等しいターン数を有している。該コイル電極18aの一端には、コンタクト部C1が設けられており、該コイル電極18aの他端には、コンタクト部C2が設けられている。コンタクト部C1は、ビアホール導体B1~B3を介して外部電極14aに電気的に接続されている。よって、コンタクト部C1は、z軸方向から平面視したときに、ビアホール導体B1~B3と重なる位置に設けられている。また、コンタクト部C1は、ビアホール導体B3と接続し易いように、コイル電極18aの他の部分よりも太く形成されている。コンタクト部C2は、ビアホール導体B4と接続し易いように、コイル電極18aの他の部分よりも太く形成されており、ビアホール導体B4と一体的に形成されている。 The coil electrode 18a is provided on the magnetic layer 16d arranged on the most positive side in the z-axis direction among the magnetic layers 16d to 16i, and is called a start electrode. The coil electrode 18a has the same number of turns as the coil electrodes 18b to 18e. A contact portion C1 is provided at one end of the coil electrode 18a, and a contact portion C2 is provided at the other end of the coil electrode 18a. The contact part C1 is electrically connected to the external electrode 14a via the via-hole conductors B1 to B3. Therefore, the contact portion C1 is provided at a position overlapping the via-hole conductors B1 to B3 when viewed in plan from the z-axis direction. Further, the contact portion C1 is formed thicker than other portions of the coil electrode 18a so as to be easily connected to the via-hole conductor B3. The contact portion C2 is formed thicker than other portions of the coil electrode 18a so as to be easily connected to the via-hole conductor B4, and is formed integrally with the via-hole conductor B4.
 コイル電極18bは、磁性体層16e上に設けられており、中間電極と呼ばれる。該コイル電極18bの一端には、コンタクト部C3が設けられており、該コイル電極18bの他端には、コンタクト部C4が設けられている。コンタクト部C3は、磁性体層16dと磁性体層16eとが積層されたときに、ビアホール導体B4と接続し易いように、コイル電極18bの他の部分よりも太く形成されている。また、コンタクト部C4は、ビアホール導体B5と接続し易いように、コイル電極18bの他の部分よりも太く形成されており、ビアホール導体B5と一体的に形成されている。 The coil electrode 18b is provided on the magnetic layer 16e and is called an intermediate electrode. A contact portion C3 is provided at one end of the coil electrode 18b, and a contact portion C4 is provided at the other end of the coil electrode 18b. The contact portion C3 is formed thicker than other portions of the coil electrode 18b so that the contact portion C3 can be easily connected to the via-hole conductor B4 when the magnetic layer 16d and the magnetic layer 16e are laminated. The contact portion C4 is formed thicker than other portions of the coil electrode 18b so as to be easily connected to the via-hole conductor B5, and is formed integrally with the via-hole conductor B5.
 コイル電極18cは、磁性体層16f上に設けられており、中間電極と呼ばれる。該コイル電極18cの一端には、コンタクト部C5が設けられており、該コイル電極18cの他端には、コンタクト部C6が設けられている。コンタクト部C5は、磁性体層16eと磁性体層16fとが積層されたときに、ビアホール導体B5と接続し易いように、コイル電極18cの他の部分よりも太く形成されている。また、コンタクト部C6は、ビアホール導体B6と接続し易いように、コイル電極18cの他の部分よりも太く形成されており、ビアホール導体B6と一体的に形成されている。 The coil electrode 18c is provided on the magnetic layer 16f and is called an intermediate electrode. A contact portion C5 is provided at one end of the coil electrode 18c, and a contact portion C6 is provided at the other end of the coil electrode 18c. The contact portion C5 is formed thicker than other portions of the coil electrode 18c so that the contact portion C5 can be easily connected to the via-hole conductor B5 when the magnetic layer 16e and the magnetic layer 16f are laminated. Further, the contact portion C6 is formed thicker than other portions of the coil electrode 18c so as to be easily connected to the via-hole conductor B6, and is formed integrally with the via-hole conductor B6.
 コイル電極18dは、磁性体層16g上に設けられており、中間電極と呼ばれる。該コイル電極18dの一端には、コンタクト部C7が設けられており、該コイル電極18dの他端には、コンタクト部C8が設けられている。コンタクト部C7は、磁性体層16fと磁性体層16gとが積層されたときに、ビアホール導体B6と接続し易いように、コイル電極18dの他の部分よりも太く形成されている。また、コンタクト部C8は、ビアホール導体B7と接続し易いように、コイル電極18dの他の部分よりも太く形成されており、ビアホール導体B7と一体的に形成されている。 The coil electrode 18d is provided on the magnetic layer 16g and is called an intermediate electrode. A contact portion C7 is provided at one end of the coil electrode 18d, and a contact portion C8 is provided at the other end of the coil electrode 18d. The contact part C7 is formed thicker than the other part of the coil electrode 18d so that it can be easily connected to the via-hole conductor B6 when the magnetic layer 16f and the magnetic layer 16g are laminated. Further, the contact portion C8 is formed thicker than other portions of the coil electrode 18d so as to be easily connected to the via-hole conductor B7, and is formed integrally with the via-hole conductor B7.
 コイル電極18eは、磁性体層16h上に設けられており、中間電極と呼ばれる。該コイル電極18eの一端には、コンタクト部C9が設けられており、該コイル電極18eの他端には、コンタクト部C10が設けられている。コンタクト部C9は、磁性体層16gと磁性体層16hとが積層されたときに、ビアホール導体B7と接続し易いように、コイル電極18eの他の部分よりも太く形成されている。また、コンタクト部C10は、ビアホール導体B8と接続し易いように、コイル電極18eの他の部分よりも太く形成されており、ビアホール導体B8と一体的に形成されている。 The coil electrode 18e is provided on the magnetic layer 16h and is called an intermediate electrode. A contact portion C9 is provided at one end of the coil electrode 18e, and a contact portion C10 is provided at the other end of the coil electrode 18e. The contact portion C9 is formed thicker than the other portions of the coil electrode 18e so that it can be easily connected to the via-hole conductor B7 when the magnetic layer 16g and the magnetic layer 16h are laminated. Further, the contact portion C10 is formed thicker than other portions of the coil electrode 18e so as to be easily connected to the via-hole conductor B8, and is formed integrally with the via-hole conductor B8.
 コイル電極20は、磁性体層16d~16iの内、z軸方向の最も負方向側に配置された磁性体層16i上に設けられており、エンド電極と呼ばれる。コイル電極20は、1ターンから中間電極であるコイル電極18b~18eのターン数を引いて得られるターン数以上の長さを有している(なお、本実施形態では、コイル電極20のターン数とコイル電極18b~18eのターン数とは等しい)。コイル電極20の一端には、コンタクト部C11が設けられており、該コイル電極20の他端には、コンタクト部C14が設けられている。更に、コイル電極20は、複数個所においてビアホール導体Bと接続可能とするために、コンタクト部C12,C13を有している。より具体的には、コイル電極18は、コ字型を有しており、その4つの角部においてビアホール導体Bと接続され得る。そのため、この4つの角部に設けられたビアホール導体Bと接続可能なように、コイル電極20は、4つの角部においてコンタクト部C11~C14を有している。 The coil electrode 20 is provided on the magnetic layer 16i disposed on the most negative side in the z-axis direction among the magnetic layers 16d to 16i, and is called an end electrode. The coil electrode 20 has a length equal to or greater than the number of turns obtained by subtracting the number of turns of the coil electrodes 18b to 18e that are intermediate electrodes from one turn (in this embodiment, the number of turns of the coil electrode 20). And the number of turns of the coil electrodes 18b to 18e is equal). A contact portion C11 is provided at one end of the coil electrode 20, and a contact portion C14 is provided at the other end of the coil electrode 20. Furthermore, the coil electrode 20 has contact portions C12 and C13 so that the coil electrode 20 can be connected to the via-hole conductor B at a plurality of locations. More specifically, the coil electrode 18 has a U-shape and can be connected to the via-hole conductor B at its four corners. Therefore, the coil electrode 20 has contact portions C11 to C14 at the four corners so as to be connectable to the via-hole conductors B provided at the four corners.
 コンタクト部C13は、磁性体層16hと磁性体層16iとが積層されたときに、ビアホール導体B8と接続し易いように、コイル電極20の他の部分よりも太く形成されている。コンタクト部C14は、ビアホール導体B9~B12を介して外部電極14bに電気的に接続されている。よって、コンタクト部C14は、z軸方向から平面視したときに、ビアホール導体B9~B12と重なる位置に設けられている。また、コンタクト部C14は、ビアホール導体B9と接続し易いように、コイル電極20の他の部分よりも太く形成されており、ビアホール導体B9と一体的に形成されている。また、コンタクト部C11,C12は、ビアホール導体Bと接続し易いように、コイル電極20の他の部分よりも太く形成されている。以下では、個別のコンタクト部C1~C14を示す場合には、Cの後ろに数字を付し、コンタクト部C1~C14を総称する場合には、Cの後ろの数字を省略するものとする。 The contact portion C13 is formed thicker than other portions of the coil electrode 20 so that the magnetic layer 16h and the magnetic layer 16i are easily connected to the via-hole conductor B8 when the magnetic layer 16h and the magnetic layer 16i are laminated. The contact portion C14 is electrically connected to the external electrode 14b via the via-hole conductors B9 to B12. Therefore, the contact portion C14 is provided at a position overlapping the via-hole conductors B9 to B12 when viewed in plan from the z-axis direction. Further, the contact portion C14 is formed thicker than other portions of the coil electrode 20 so as to be easily connected to the via-hole conductor B9, and is formed integrally with the via-hole conductor B9. Further, the contact portions C11 and C12 are formed thicker than other portions of the coil electrode 20 so as to be easily connected to the via-hole conductor B. In the following, when the individual contact portions C1 to C14 are shown, a number is appended to the C, and when the contact portions C1 to C14 are generically referred to, the number after the C is omitted.
 以上のように、電子部品10では、z軸方向の正方向側の端に位置しているスタート電極(コイル電極18a)、z軸方向の負方向側の端に位置しているエンド電極(コイル電極20)、及び、スタート電極及びエンド電極以外の4種類の中間電極(コイル電極18b~18e)によりコイルLが構成されている。そして、コイルLのターン数を調整する場合には、エンド電極であるコイル電極20と中間電極であるコイル電極18eとの間に、中間コイルであるコイル電極18b~18eの内の適切なコイル電極18を挿入する。具体的には、以下の通りである。図3は、コイルLのターン数を変化させた場合における電子部品10の積層体12の分解斜視図である。 As described above, in the electronic component 10, the start electrode (coil electrode 18a) located at the end on the positive direction side in the z-axis direction and the end electrode (coil) located at the end on the negative direction side in the z-axis direction. The coil L is composed of the electrode 20) and four kinds of intermediate electrodes (coil electrodes 18b to 18e) other than the start electrode and the end electrode. When the number of turns of the coil L is adjusted, an appropriate coil electrode among the coil electrodes 18b to 18e serving as intermediate coils is interposed between the coil electrode 20 serving as an end electrode and the coil electrode 18e serving as an intermediate electrode. 18 is inserted. Specifically, it is as follows. FIG. 3 is an exploded perspective view of the multilayer body 12 of the electronic component 10 when the number of turns of the coil L is changed.
 例えば、図2に示した積層体12のコイルLのターン数を1ターンだけ増加させたい場合には、図3に示すように、磁性体層16hと磁性体層16iとの間に、コイル電極18f及びビアホール導体B13が設けられた磁性体層16mを挿入すればよい。磁性体層16m、コイル電極18f及びビアホール導体B13は、磁性体層16e、コイル電極18b及びビアホール導体B5と同じ構造を有している。これにより、コイルのターン数を変化させることができる。 For example, when it is desired to increase the number of turns of the coil L of the laminate 12 shown in FIG. 2 by one turn, as shown in FIG. 3, a coil electrode is interposed between the magnetic layer 16h and the magnetic layer 16i. What is necessary is just to insert the magnetic body layer 16m provided with 18f and the via-hole conductor B13. The magnetic layer 16m, the coil electrode 18f, and the via hole conductor B13 have the same structure as the magnetic layer 16e, the coil electrode 18b, and the via hole conductor B5. Thereby, the number of turns of the coil can be changed.
 図2のように磁性体層16mが挿入されない場合には、コンタクト部C13が、ビアホール導体B8との接続に用いられる。図3のように磁性体層16mが挿入される場合には、コンタクト部C12が、ビアホール導体B13との接続に用いられる。このように、コイル電極20は、z軸方向から平面視したときに、中間電極であるコイル電極18e,18fと接続されているビアホール導体Bと重なっていることにより、コイル電極18e,18fのいずれとも接続可能な構成を有している。更に、コイル電極20は、z軸方向から平面視したときに、中間電極であるコイル電極18cと接続されているビアホール導体Bと重なっていることにより、コイル電極18cとも接続可能な構成を有している。 When the magnetic layer 16m is not inserted as shown in FIG. 2, the contact portion C13 is used for connection to the via-hole conductor B8. When the magnetic layer 16m is inserted as shown in FIG. 3, the contact portion C12 is used for connection to the via-hole conductor B13. Thus, the coil electrode 20 overlaps with the via-hole conductor B connected to the coil electrodes 18e and 18f, which are intermediate electrodes, when viewed in plan from the z-axis direction. Both can be connected. Further, the coil electrode 20 has a configuration that can be connected to the coil electrode 18c by overlapping with the via-hole conductor B connected to the coil electrode 18c that is an intermediate electrode when viewed in plan from the z-axis direction. ing.
 次に、ビアホール導体Bについて説明する。図4は、電子部品10をy軸方向から透視した図である。ビアホール導体Bは、図2に示すように、磁性体層16をz軸方向に貫通するように設けられ、図4に示すように、y軸方向から見たときに、一方の端部t1の面積が他方の端部t2の面積よりも大きい形状を有している。より詳細には、z軸方向の正方向側に位置する端部t1の面積は、z軸方向の負方向側に位置する端部t2の面積より大きい。以下に、各ビアホール導体Bの接続関係について説明する。 Next, the via-hole conductor B will be described. FIG. 4 is a perspective view of the electronic component 10 seen from the y-axis direction. As shown in FIG. 2, the via-hole conductor B is provided so as to penetrate the magnetic layer 16 in the z-axis direction. As shown in FIG. 4, when viewed from the y-axis direction, the via-hole conductor B has one end t1. The area is larger than the area of the other end t2. More specifically, the area of the end t1 located on the positive side in the z-axis direction is larger than the area of the end t2 located on the negative side in the z-axis direction. Below, the connection relationship of each via-hole conductor B is demonstrated.
 ビアホール導体B1~B3は、z軸方向に直線上に並ぶように接続されている。ビアホール導体B3の端部t2は、コイル電極18aに接続されている。ビアホール導体B4の端部t1は、コイル電極18aに接続され、ビアホール導体B4の端部t2は、コイル電極18bに接続されている。ビアホール導体B5の端部t1は、コイル電極18bに接続され、ビアホール導体B5の端部t2は、コイル電極18cに接続されている。ビアホール導体B6の端部t1は、コイル電極18cに接続され、ビアホール導体B6の端部t2は、コイル電極18dに接続されている。ビアホール導体B7の端部t1は、コイル電極18dに接続され、ビアホール導体B7の端部t2は、コイル電極18eに接続されている。ビアホール導体B8の端部t1は、コイル電極18eに接続され、ビアホール導体B8の端部t2は、コイル電極20に接続されている。ビアホール導体B9~B12は、z軸方向に直線上に並ぶように接続されている。ビアホール導体B9の端部t1は、コイル電極20に接続されている。これにより、全てのビアホール導体B1~B12において、端部t1は、端部t2よりもz軸方向の正方向側に位置するようになる。 The via-hole conductors B1 to B3 are connected so as to be arranged in a straight line in the z-axis direction. An end t2 of the via-hole conductor B3 is connected to the coil electrode 18a. An end t1 of the via-hole conductor B4 is connected to the coil electrode 18a, and an end t2 of the via-hole conductor B4 is connected to the coil electrode 18b. An end t1 of the via-hole conductor B5 is connected to the coil electrode 18b, and an end t2 of the via-hole conductor B5 is connected to the coil electrode 18c. An end t1 of the via-hole conductor B6 is connected to the coil electrode 18c, and an end t2 of the via-hole conductor B6 is connected to the coil electrode 18d. An end t1 of the via-hole conductor B7 is connected to the coil electrode 18d, and an end t2 of the via-hole conductor B7 is connected to the coil electrode 18e. An end t1 of the via-hole conductor B8 is connected to the coil electrode 18e, and an end t2 of the via-hole conductor B8 is connected to the coil electrode 20. The via-hole conductors B9 to B12 are connected so as to be arranged in a straight line in the z-axis direction. An end t1 of the via-hole conductor B9 is connected to the coil electrode 20. As a result, in all the via-hole conductors B1 to B12, the end t1 is positioned closer to the positive side in the z-axis direction than the end t2.
 以上のような構成を有する電子部品10では、コイル電極20は、図2及び図3に示すように、中間電極であるコイル電極18e,18fに接続されているビアホール導体B8,B13毎に、異なるコンタクト部C12,C13を介して接続されている。故に、コイルLのターン数が変化すると、コイル電極20に接続されている2つのビアホール導体B間の距離も変化する。より詳細には、図2に示す状態では、コイル電極20に接続されている2つのビアホール導体B8,B9間の距離が相対的に短くなり、図3に示す状態では、コイル電極20に接続されている2つのビアホール導体B9,B13間の距離が相対的に長くなる。そして、コイル電極18aとコイル電極20とは、共に3/4ターンの長さを有しているので、エンド電極であるコイル電極20に接続されている2つのビアホール導体B間の直流抵抗値は、相対的に小さくなっており、スタート電極であるコイル電極18aに接続されている2つのビアホール導体B間の直流抵抗値は、相対的に大きくなっている。 In the electronic component 10 having the above-described configuration, the coil electrode 20 is different for each of the via-hole conductors B8 and B13 connected to the coil electrodes 18e and 18f, which are intermediate electrodes, as shown in FIGS. They are connected via contact parts C12 and C13. Therefore, when the number of turns of the coil L changes, the distance between the two via-hole conductors B connected to the coil electrode 20 also changes. More specifically, in the state shown in FIG. 2, the distance between the two via-hole conductors B8 and B9 connected to the coil electrode 20 is relatively short, and in the state shown in FIG. The distance between the two via-hole conductors B9 and B13 is relatively long. Since both the coil electrode 18a and the coil electrode 20 have a length of 3/4 turns, the DC resistance value between the two via-hole conductors B connected to the coil electrode 20 that is an end electrode is The DC resistance value between the two via-hole conductors B connected to the coil electrode 18a as the start electrode is relatively large.
(電子部品の製造方法)
 以下に図1及び図2を参照しながら電子部品10の製造方法について説明する。以下に説明する製造方法では、シート積層法により1つの電子部品10を作製するものとする。ただし、該製造方法において、大判のセラミックグリーンシートを用いて、マザー積層体を作製し、個別の積層体12にカットするようにしてもよい。
(Method for manufacturing electronic parts)
Hereinafter, a method for manufacturing the electronic component 10 will be described with reference to FIGS. 1 and 2. In the manufacturing method described below, one electronic component 10 is manufactured by a sheet lamination method. However, in the manufacturing method, a mother laminate may be produced using a large ceramic green sheet and cut into individual laminates 12.
 まず、磁性体層16となるべきセラミックグリーンシートを、以下のようにして作製する。酸化第二鉄(Fe23)を48.0mol%、酸化亜鉛(ZnO)を25.0mol%、酸化ニッケル(NiO)を18.0mol%、酸化銅(CuO)を9.0mol%の比率で秤量したそれぞれの材料を原材料としてボールミルに投入し、湿式調合を行う。得られた混合物を乾燥してから粉砕し、得られた粉末を750℃で1時間仮焼する。得られた仮焼粉末をボールミルにて湿式粉砕した後、乾燥してから解砕し、フェライトセラミック粉末を得る。 First, a ceramic green sheet to be the magnetic layer 16 is produced as follows. Ratio of ferric oxide (Fe 2 O 3 ) 48.0 mol%, zinc oxide (ZnO) 25.0 mol%, nickel oxide (NiO) 18.0 mol%, copper oxide (CuO) 9.0 mol% Each material weighed in step 1 is put into a ball mill as a raw material and wet blended. The obtained mixture is dried and pulverized, and the obtained powder is calcined at 750 ° C. for 1 hour. The obtained calcined powder is wet pulverized by a ball mill, dried and then crushed to obtain a ferrite ceramic powder.
 このフェライトセラミック粉末に対して結合剤(酢酸ビニル、水溶性アクリル等)と可塑剤、湿潤材、分散剤を加えてボールミルで混合を行い、その後、減圧により脱泡を行う。得られたセラミックスラリーをドクターブレード法により、シート状に形成して乾燥させ、所望の膜厚(例えば、35μm)のセラミックグリーンシートを作製する。 To this ferrite ceramic powder, a binder (vinyl acetate, water-soluble acrylic, etc.), a plasticizer, a wetting material, and a dispersing agent are added and mixed with a ball mill, and then defoamed under reduced pressure. The obtained ceramic slurry is formed into a sheet by a doctor blade method and dried to produce a ceramic green sheet having a desired film thickness (for example, 35 μm).
 磁性体層16となるべきセラミックグリーンシートに、ビアホール導体Bを形成する。具体的には、セラミックグリーンシートにレーザビームを用いて貫通孔を形成する。ここで、レーザビームは、減衰しながらセラミックグリーンシート内を通過する。そのため、貫通孔は、レーザビームが照射された側の開口部の面積が大きく、反対側の開口部の面積が小さいテーパ形状を有する。次に、この貫通孔にAg,Pd,Cu,Auやこれらの合金などの導電性ペーストを印刷塗布などの方法により充填する。これにより、図4に示すような、y軸方向から見たときに、一方の端部t1の面積が他方の端部t2の面積よりも大きい形状を有したビアホール導体Bが形成される。 A via-hole conductor B is formed on the ceramic green sheet to be the magnetic layer 16. Specifically, a through hole is formed in a ceramic green sheet using a laser beam. Here, the laser beam passes through the ceramic green sheet while being attenuated. Therefore, the through hole has a tapered shape in which the area of the opening on the side irradiated with the laser beam is large and the area of the opening on the opposite side is small. Next, the through holes are filled with a conductive paste such as Ag, Pd, Cu, Au, or an alloy thereof by a method such as printing. As a result, as shown in FIG. 4, a via-hole conductor B having a shape in which the area of one end t1 is larger than the area of the other end t2 when viewed from the y-axis direction is formed.
 次に、磁性体層16d~16hとなるべきセラミックグリーンシート上に、Ag,Pd,Cu,Auやこれらの合金などを主成分とする導電性ペーストをスクリーン印刷法やフォトリソグラフィ法などの方法で塗布することにより、スタート電極及び中間電極であるコイル電極18a~18eを形成する。具体的には、磁性体層16d~16hとなるべきセラミックグリーンシートにおいて、ビアホール導体Bの端部t1側の主面に、コンタクト部Cとビアホール導体Bとが重なるようにコイル電極18を形成する。なお、コイル電極18及びビアホール導体Bを、同時にセラミックグリーンシートに形成してもよい。 Next, a conductive paste mainly composed of Ag, Pd, Cu, Au, or an alloy thereof is applied on the ceramic green sheets to be the magnetic layers 16d to 16h by a method such as a screen printing method or a photolithography method. By applying, coil electrodes 18a to 18e which are start electrodes and intermediate electrodes are formed. Specifically, in the ceramic green sheets to be the magnetic layers 16d to 16h, the coil electrode 18 is formed on the main surface on the end t1 side of the via-hole conductor B so that the contact portion C and the via-hole conductor B overlap each other. . The coil electrode 18 and the via-hole conductor B may be simultaneously formed on the ceramic green sheet.
 次に、磁性体層16iとなるべきセラミックグリーンシート上に、Ag,Pd,Cu,Auやこれらの合金などを主成分とする導電性ペーストをスクリーン印刷法やフォトリソグラフィ法などの方法で塗布することにより、エンド電極であるコイル電極20を形成する。具体的には、磁性体層16iとなるべきセラミックグリーンシートにおいて、ビアホール導体B9の端部t1側の主面に、コンタクト部C14とビアホール導体B9とが重なるようにコイル電極20を形成する。なお、コイル電極20及びビアホール導体B9を、同時にセラミックグリーンシートに形成してもよい。 Next, a conductive paste mainly composed of Ag, Pd, Cu, Au, or an alloy thereof is applied on the ceramic green sheet to be the magnetic layer 16i by a method such as a screen printing method or a photolithography method. Thereby, the coil electrode 20 which is an end electrode is formed. Specifically, in the ceramic green sheet to be the magnetic layer 16i, the coil electrode 20 is formed on the main surface on the end t1 side of the via-hole conductor B9 so that the contact portion C14 and the via-hole conductor B9 overlap. Note that the coil electrode 20 and the via-hole conductor B9 may be simultaneously formed on the ceramic green sheet.
 次に、各セラミックグリーンシートを積層して、未焼成の積層体12を形成する。この際、コイル電極18b~18e(中間電極)がコイル電極18a(スタート電極)とコイル電極20(エンド電極)との間に位置すると共に、コイル電極20が、コイル電極18eと接続されているビアホール導体B8と、端部t2を介して接続され、かつ、コイル電極18aに接続されるビアホール導体B3,B4間の直流抵抗値が、コイル電極20に接続されるビアホール導体B8,B9間の直流抵抗値よりも大きくなるように、積層体12を形成する。具体的には、磁性体層16lとなるべきセラミックグリーンシートを配置する。次に、磁性体層16lとなるべきセラミックグリーンシート上に、磁性体層16kとなるべきセラミックグリーンシートの配置及び仮圧着を行う。この後、磁性体層16j,16i,16h,16g,16f,16e,16d,16c,16b,16aとなるべきセラミックグリーンシートについても同様の手順により仮圧着を行う。これにより、未焼成の積層体12が形成される。この未焼成の積層体12には、静水圧プレスなどにより本圧着が施される。 Next, the ceramic green sheets are laminated to form an unfired laminate 12. At this time, the coil electrodes 18b to 18e (intermediate electrodes) are located between the coil electrode 18a (start electrode) and the coil electrode 20 (end electrode), and the coil electrode 20 is connected to the coil electrode 18e. The direct-current resistance value between the via-hole conductors B3 and B4 connected to the conductor B8 via the end t2 and connected to the coil electrode 18a is equal to the direct-current resistance between the via-hole conductors B8 and B9 connected to the coil electrode 20 The stacked body 12 is formed so as to be larger than the value. Specifically, a ceramic green sheet to be the magnetic layer 16l is disposed. Next, the ceramic green sheet to be the magnetic layer 16k is disposed and temporarily pressed onto the ceramic green sheet to be the magnetic layer 16l. Thereafter, the ceramic green sheets to be the magnetic layers 16j, 16i, 16h, 16g, 16f, 16e, 16d, 16c, 16b, and 16a are also temporarily bonded by the same procedure. Thereby, the unfired laminated body 12 is formed. The green laminate 12 is subjected to main pressure bonding by an isostatic press or the like.
 次に、積層体12に、脱バインダー処理及び焼成を行う。焼成温度は、例えば、900℃である。これにより、焼成された積層体12が得られる。積層体12の表面には、例えば、浸漬法等の方法により主成分が銀である電極ペーストを塗布及び焼き付けすることにより、外部電極14a,14bとなる銀電極を形成する。 Next, the laminate 12 is subjected to binder removal processing and firing. The firing temperature is 900 ° C., for example. Thereby, the baked laminated body 12 is obtained. On the surface of the laminate 12, for example, an electrode paste whose main component is silver is applied and baked by a method such as an immersion method, thereby forming silver electrodes to be the external electrodes 14 a and 14 b.
 最後に、外部電極14a,14bとなる銀電極の表面に、Niめっき/Snめっきを施す。以上の工程を経て、図1に示すような電子部品10が完成する。 Finally, Ni plating / Sn plating is performed on the surface of the silver electrode to be the external electrodes 14a and 14b. Through the above steps, the electronic component 10 as shown in FIG. 1 is completed.
(効果)
 電子部品10によれば、ビアホール導体B4とコイル電極18aとの間の断線を防止できる。具体的には、電子部品10では、コイル電極18aは、コイル電極20よりも長く形成されているので、コイルLに電流を流した際に、コイル電極20に比べて強く発熱する。特に、コイル電極18aとビアホール導体B4との接続部分において集中的に発熱する。
(effect)
According to the electronic component 10, disconnection between the via-hole conductor B4 and the coil electrode 18a can be prevented. Specifically, in the electronic component 10, the coil electrode 18 a is formed longer than the coil electrode 20, so that when current is passed through the coil L, heat is generated more strongly than the coil electrode 20. In particular, heat is intensively generated at the connection portion between the coil electrode 18a and the via-hole conductor B4.
 そこで、電子部品10では、図4に示すように、コイル電極18aには、ビアホール導体B4の端部t1が接続されている。この端部t1は、端部t2よりも大きな面積を有する。そのため、電子部品10では、コイル電極18aとビアホール導体B4との接続部分における直流抵抗値が低減され、該接続部分が集中的に発熱することが抑制される。その結果、コイル電極18aとビアホール電極B4との境界部分において断線が発生することが抑制される。 Therefore, in the electronic component 10, as shown in FIG. 4, the end t1 of the via-hole conductor B4 is connected to the coil electrode 18a. The end t1 has a larger area than the end t2. Therefore, in the electronic component 10, the DC resistance value at the connection portion between the coil electrode 18a and the via-hole conductor B4 is reduced, and the connection portion is prevented from generating heat intensively. As a result, occurrence of disconnection at the boundary portion between the coil electrode 18a and the via-hole electrode B4 is suppressed.
 本願発明者は、前記効果をより明確なものとするために、以下に示す静電気放電試験を行って、断線発生率を評価した。試験には、第1の試作品及び第2の試作品を用いた。第1の試作品は、本実施形態に係る電子部品10に相当する。具体的には、図2及び図3に示す電子部品10を用いた。また、第2の試作品は、図2及び図3に示す電子部品10において、ビアホール導体Bのz軸方向の向きを反転させたものを用いた。なお、第1の試作品及び第2の試作品の詳細は以下の通りである。 The inventor of the present application conducted the electrostatic discharge test shown below to evaluate the disconnection occurrence rate in order to make the effect clearer. For the test, the first prototype and the second prototype were used. The first prototype corresponds to the electronic component 10 according to the present embodiment. Specifically, the electronic component 10 shown in FIGS. 2 and 3 was used. The second prototype used the electronic component 10 shown in FIGS. 2 and 3 with the via hole conductor B reversed in the z-axis direction. The details of the first prototype and the second prototype are as follows.
サイズ:1.00mm×0.50mm×0.50mm
磁性体層の材質:Ni-Cu-Zn系フェライト
外部電極の材質:銀電極上にNi-Snめっき
コイル電極の材質:銀
コイル電極の長さ:3/4ターン
コイルのターン数:10ターン
製造方法:シート積層法
Size: 1.00mm x 0.50mm x 0.50mm
Material of magnetic layer: Ni—Cu—Zn ferrite external electrode material: Ni—Sn plated coil electrode material on silver electrode: Silver coil electrode length: 3/4 turn Coil turn number: 10 turns manufacture Method: Sheet lamination method
 第1の試作品及び第2の試作品をそれぞれ多数個作製し、このうちRdc≧平均+3σの条件(ただし、平均とは多数個のRdcの平均値である)に合致するものをそれぞれ10個抽出し、この100個ずつの第1の試作品及び第2の試作品に対して、正負方向に各30回ずつ0.1秒間隔で30kVの電圧を印加した。これにより得られた結果を表1に示す。 A large number of first prototypes and second prototypes are produced, each of which satisfies the condition of Rdc ≧ average + 3σ (where the average is the average value of a large number of Rdcs) Extraction was performed, and a voltage of 30 kV was applied to the 100 first prototypes and the second prototypes 30 times each in the positive and negative directions at 0.1 second intervals. The results obtained are shown in Table 1.
Figure JPOXMLDOC01-appb-T000001
Figure JPOXMLDOC01-appb-T000001
 以上のように、第2の試作品では、一部のものに断線が発生したが、第1の試作品では、全く断線が発生しなかった。従って、本実施形態に係る電子部品10では、断線の発生を抑制できていることが理解できる。 As described above, in the second prototype, a disconnection occurred in some of the products, but in the first prototype, no disconnection occurred. Therefore, it can be understood that the electronic component 10 according to the present embodiment can suppress the occurrence of disconnection.
 また、電子部品10では、スタート電極であるコイル電極18aと中間電極であるコイル電極18bとを接続するビアホール導体B4が、コイル電極18aと製造工程において同時に形成されることにより、一体的に形成されている。そのため、コイル電極18aとビアホール導体B4との接続が強固になり、コイル電極18aとビアホール導体B4との接続部分において断線が発生しにくくなっている。 Further, in the electronic component 10, the via-hole conductor B4 that connects the coil electrode 18a that is the start electrode and the coil electrode 18b that is the intermediate electrode is formed integrally by being formed simultaneously with the coil electrode 18a in the manufacturing process. ing. For this reason, the connection between the coil electrode 18a and the via-hole conductor B4 is strengthened, and disconnection is less likely to occur at the connection portion between the coil electrode 18a and the via-hole conductor B4.
 また、電子部品10及びその製造方法によれば、以下に説明するように、ビアホール導体Bの位置を設計しなおすことなく、コイルLのターン数を変化させることができる。図5及び図6は、従来の電子部品110の積層体112の分解斜視図である。図7は、電子部品110をy軸方向から透視した図である。以下では、積層体112の積層方向をz軸方向と定義し、z軸方向に直交する方向をx軸方向及びy軸方向と定義する。x軸方向及びy軸方向は、積層体112の辺に平行である。 Moreover, according to the electronic component 10 and the manufacturing method thereof, as described below, the number of turns of the coil L can be changed without redesigning the position of the via-hole conductor B. 5 and 6 are exploded perspective views of the multilayer body 112 of the conventional electronic component 110. FIG. FIG. 7 is a perspective view of the electronic component 110 seen from the y-axis direction. Hereinafter, the stacking direction of the stacked body 112 is defined as the z-axis direction, and the directions orthogonal to the z-axis direction are defined as the x-axis direction and the y-axis direction. The x-axis direction and the y-axis direction are parallel to the sides of the stacked body 112.
 電子部品110は、図1に示すように、内部にコイルを含んでいる直方体状の積層体112と、積層体112のz軸方向の両端に位置する面に設けられている2つの外部電極114a,114bとを備えている。 As shown in FIG. 1, the electronic component 110 includes a rectangular parallelepiped laminated body 112 including a coil therein, and two external electrodes 114 a provided on the surfaces of the laminated body 112 positioned at both ends in the z-axis direction. 114b.
 積層体112は、複数のコイル電極と複数の磁性体層とが積層されて構成されている。具体的には、以下の通りである。積層体112は、図5に示すように、強磁性のフェライト(例えば、Ni-Zn-Cuフェライト又はNi-Znフェライト等)からなる複数の磁性体層116a~116lがz軸方向の負方向側から正方向側へとこの順に並ぶように積層されることにより構成されている。磁性体層116d~116iには、コイルを構成するコイル電極118a~118e,120が設けられている。また、磁性体層116a~116lには、ビアホール導体b1~b12が設けられている。 The laminated body 112 is configured by laminating a plurality of coil electrodes and a plurality of magnetic layers. Specifically, it is as follows. As shown in FIG. 5, the multilayer body 112 includes a plurality of magnetic layers 116a to 116l made of ferromagnetic ferrite (for example, Ni—Zn—Cu ferrite, Ni—Zn ferrite, etc.) in the negative direction side in the z-axis direction. Are stacked so as to be arranged in this order from the positive side to the positive direction side. The magnetic layers 116d to 116i are provided with coil electrodes 118a to 118e, 120 constituting a coil. In addition, via hole conductors b1 to b12 are provided in the magnetic layers 116a to 116l.
 コイル電極118a~118e,120は、コ字型をなし、3/4ターンの長さを有する線状電極である。ビアホール導体b5~b8はそれぞれ、各コイル電極118b~118eの一端において磁性体層116e~116hをz軸方向に貫通するように設けられている。また、ビアホール導体b9は、コイル電極120の左下に位置している角部において磁性体層116iをz軸方向に貫通するように設けられている。これにより、コイル電極118a~118e,120は、ビアホール導体b5~b9により互いに接続されることにより、螺旋状のコイルを構成している。 The coil electrodes 118a to 118e, 120 are U-shaped, and are linear electrodes having a length of 3/4 turns. The via-hole conductors b5 to b8 are provided so as to penetrate the magnetic layers 116e to 116h in the z-axis direction at one ends of the coil electrodes 118b to 118e, respectively. Further, the via-hole conductor b9 is provided so as to penetrate the magnetic layer 116i in the z-axis direction at the corner portion located at the lower left of the coil electrode 120. As a result, the coil electrodes 118a to 118e and 120 are connected to each other by the via-hole conductors b5 to b9, thereby forming a spiral coil.
 更に、ビアホール導体b1~b4はそれぞれ、磁性体層116a~116dをz軸方向に貫通するように設けられており、コイル電極118aと外部電極114aとを電気的に接続している。また、ビアホール導体b10~b12はそれぞれ、磁性体層116j~116lをz軸方向に貫通するように設けられており、コイル電極120と外部電極114bとを電気的に接続している。 Further, the via-hole conductors b1 to b4 are provided so as to penetrate the magnetic layers 116a to 116d in the z-axis direction, respectively, and electrically connect the coil electrode 118a and the external electrode 114a. The via-hole conductors b10 to b12 are provided so as to penetrate the magnetic layers 116j to 116l in the z-axis direction, respectively, and electrically connect the coil electrode 120 and the external electrode 114b.
 以上のように構成された従来の電子部品110では、以下に説明するように、コイルのターン数を変化させることができる。図6は、コイルのターン数を変化させたときにおける積層体112の分解斜視図である。 In the conventional electronic component 110 configured as described above, the number of turns of the coil can be changed as described below. FIG. 6 is an exploded perspective view of the laminate 112 when the number of turns of the coil is changed.
 図5に示した積層体112のコイルのターン数を1ターンだけ増加させたい場合には、図6に示すように、磁性体層116hと磁性体層116iとの間に、コイル電極118f及びビアホール導体b13が設けられた磁性体層116mを挿入すればよい。コイル電極118f及びビアホール導体b13は、コイル電極118b及びビアホール導体b5と同じ構造を有している。これにより、コイルのターン数を変化させることができる。なお、図6の状態から、更に、積層体112のコイルのターン数を1ターンだけ増加させたい場合には、磁性体層116mと磁性体層116iとの間に、磁性体層116fと同じ構造を有する磁性体層116を挿入すればよい。 When it is desired to increase the number of turns of the coil of the laminated body 112 shown in FIG. 5 by one turn, as shown in FIG. 6, between the magnetic layer 116h and the magnetic layer 116i, a coil electrode 118f and a via hole are provided. The magnetic layer 116m provided with the conductor b13 may be inserted. The coil electrode 118f and the via hole conductor b13 have the same structure as the coil electrode 118b and the via hole conductor b5. Thereby, the number of turns of the coil can be changed. In the case where it is desired to further increase the number of turns of the coil of the laminated body 112 by one turn from the state of FIG. 6, the same structure as that of the magnetic layer 116f is provided between the magnetic layer 116m and the magnetic layer 116i. It is sufficient to insert a magnetic layer 116 having
 しかしながら、電子部品110では、図5及び図6に示すように、コイルのターン数を変化させると、コイル電極120のz軸方向の負方向側に位置するコイル電極118の端部の位置が変化する。よって、コイル電極120のz軸方向の負方向側に位置するコイル電極118とコイル電極120とを接続するためには、ビアホール導体b9の位置を変化させなければならない。すなわち、電子部品110では、コイルのターン数を変化させる際に、ビアホール導体b9の位置を設計しなおす必要がある。 However, in the electronic component 110, as shown in FIGS. 5 and 6, when the number of turns of the coil is changed, the position of the end of the coil electrode 118 located on the negative side of the z-axis direction of the coil electrode 120 changes. To do. Therefore, in order to connect the coil electrode 118 and the coil electrode 120 located on the negative side of the z-axis direction of the coil electrode 120, the position of the via-hole conductor b9 must be changed. That is, in the electronic component 110, it is necessary to redesign the position of the via-hole conductor b9 when changing the number of turns of the coil.
 これに対して、図2に示した電子部品10では、エンド電極であるコイル電極20は、積層方向の最も下側に設けられている。該コイル電極20の直上に設けられるコイル電極18は、コイルLのターン数により変化する。そのため、コイルLのターン数が変化すると、該コイル電極18の端部の位置が変化する。 On the other hand, in the electronic component 10 shown in FIG. 2, the coil electrode 20 as an end electrode is provided on the lowermost side in the stacking direction. The coil electrode 18 provided immediately above the coil electrode 20 changes depending on the number of turns of the coil L. Therefore, when the number of turns of the coil L changes, the position of the end of the coil electrode 18 changes.
 ところが、コイル電極18とコイル電極20とは、コイル電極18と一体的に形成されているビアホール導体Bにより接続される。そのため、コイルLのターン数が変化してコイル電極18の端部の位置が変化した場合には、ビアホール導体Bの位置もコイル電極18の端部の位置と一緒に変化する。ただし、コイル電極20の直上に設けられるコイル電極18は、コイル電極18b~18eと同じ構造を有している。そのため、電子部品10では、コイル電極18の端部の位置及びビアホール導体Bの位置が変化したとしても、ビアホール導体Bの位置を新たに設計しなおす必要はない。なお、ビアホール導体Bがコイル電極18と一体的に形成されているとは、ビアホール導体B8とコイル電極18eとが製造工程において同時に形成されている状態を指す。 However, the coil electrode 18 and the coil electrode 20 are connected by a via-hole conductor B formed integrally with the coil electrode 18. Therefore, when the number of turns of the coil L changes and the position of the end of the coil electrode 18 changes, the position of the via-hole conductor B also changes together with the position of the end of the coil electrode 18. However, the coil electrode 18 provided immediately above the coil electrode 20 has the same structure as the coil electrodes 18b to 18e. Therefore, in the electronic component 10, even if the position of the end portion of the coil electrode 18 and the position of the via-hole conductor B are changed, it is not necessary to redesign the position of the via-hole conductor B. The via hole conductor B being integrally formed with the coil electrode 18 refers to a state in which the via hole conductor B8 and the coil electrode 18e are simultaneously formed in the manufacturing process.
 更に、電子部品10では、エンド電極であるコイル電極20が、z軸方向から平面視したときに、中間電極であるコイル電極18b~18eに接続されているビアホール導体Bと重なっている。そのため、コイルLのターン数を変化させることにより、コイル電極20に接続されるビアホール導体Bの位置が変化しても、コイル電極20と該ビアホール導体Bとをコンタクト部C11~C14のいずれかを用いて接続することができる。その結果、電子部品10では、コイルLのターン数を変化させる際に、コイル電極20を設計しなおす必要がない。すなわち、電子部品10では、エンド電極であるコイル電極20を1種類準備するだけで足りる。 Furthermore, in the electronic component 10, the coil electrode 20 that is an end electrode overlaps with the via-hole conductor B that is connected to the coil electrodes 18b to 18e that are intermediate electrodes when viewed in plan from the z-axis direction. Therefore, even if the position of the via-hole conductor B connected to the coil electrode 20 changes by changing the number of turns of the coil L, the coil electrode 20 and the via-hole conductor B are connected to any one of the contact portions C11 to C14. Can be connected. As a result, in the electronic component 10, it is not necessary to redesign the coil electrode 20 when changing the number of turns of the coil L. That is, in the electronic component 10, it is sufficient to prepare only one type of coil electrode 20 that is an end electrode.
 ただし、コイル電極20は、図2に示すように、コイル電極18b~18eに接続されているビアホール導体Bと重なるだけの長さ(3/4ターン)を有している必要は必ずしもない。コイル電極20は、1ターンから中間電極であるコイル電極18a~18eのターン数を引いて得られるターン数以上の長さを少なくとも有していればよい。これにより、コイル電極20は、少なくとも2箇所以上にて、ビアホール導体Bと接続することが可能となる。より具体的には、コイル電極20が1/4ターンの長さを有している場合には、コイル電極20は、図2に示すように、ビアホール導体B8,B9と接続可能である。また、コイル電極20が1/2ターンの長さを有している場合には、コイル電極20は、図3に示すように、ビアホール導体B9,B13と接続可能である。ただし、この場合には、コイルLの長さを変化させると、コイル電極20を設計しなおす必要がある。 However, as shown in FIG. 2, the coil electrode 20 is not necessarily required to have a length (3/4 turn) that overlaps the via-hole conductor B connected to the coil electrodes 18b to 18e. The coil electrode 20 only needs to have at least a length equal to or greater than the number of turns obtained by subtracting the number of turns of the coil electrodes 18a to 18e that are intermediate electrodes from one turn. Thereby, the coil electrode 20 can be connected to the via-hole conductor B at at least two places. More specifically, when the coil electrode 20 has a length of 1/4 turn, the coil electrode 20 can be connected to the via-hole conductors B8 and B9 as shown in FIG. When the coil electrode 20 has a length of 1/2 turn, the coil electrode 20 can be connected to the via-hole conductors B9 and B13 as shown in FIG. However, in this case, if the length of the coil L is changed, the coil electrode 20 needs to be redesigned.
 また、本実施形態に係る電子部品10によれば、以下に説明するように、コイル電極20と接続されているビアホール導体B9の形成不良の発生を抑制できる。より詳細には、図5及び図6に示す従来の電子部品110では、コイル電極120の途中にビアホール導体b9が設けられている。 Moreover, according to the electronic component 10 according to the present embodiment, it is possible to suppress the occurrence of poor formation of the via-hole conductor B9 connected to the coil electrode 20 as described below. More specifically, in the conventional electronic component 110 shown in FIGS. 5 and 6, a via-hole conductor b <b> 9 is provided in the middle of the coil electrode 120.
 ところが、図5及び図6に示すようなコイル電極120の途中にビアホール導体b9が形成されたコイル導体120では、ビアホール導体b9の形成不良が発生してしまう可能性がある。具体的には、図5及び図6に示すコイル導体120では、ビアホール導体b9がコイル電極120の途中に形成されているので、ビアホール導体b9から2方向にコイル電極120の配線が延びている。そのため、スクリーン印刷法によりコイル導体120を形成した場合には、導電性ペーストがコイル電極120の配線の形成に使用されてしまい、ビアホール導体b9に十分な導電性ペーストが供給されない。その結果、図5及び図6に示すコイル導体120では、ビアホール導体b9の形成不良が発生するおそれがある。 However, in the coil conductor 120 in which the via-hole conductor b9 is formed in the middle of the coil electrode 120 as shown in FIGS. 5 and 6, there is a possibility that a formation defect of the via-hole conductor b9 occurs. Specifically, in the coil conductor 120 shown in FIGS. 5 and 6, since the via-hole conductor b9 is formed in the middle of the coil electrode 120, the wiring of the coil electrode 120 extends in two directions from the via-hole conductor b9. Therefore, when the coil conductor 120 is formed by the screen printing method, the conductive paste is used for forming the wiring of the coil electrode 120, and sufficient conductive paste is not supplied to the via-hole conductor b9. As a result, in the coil conductor 120 shown in FIGS. 5 and 6, there is a possibility that a formation defect of the via-hole conductor b9 may occur.
 これに対して、本実施形態に係る電子部品10では、ビアホール導体B9は、図2に示すように、コイル電極20の端部に設けられているので、ビアホール導体B9から1方向にしかコイル電極20の配線が延びていない。そのため、スクリーン印刷法によりコイル電極20を形成した場合に、導電性ペーストがコイル電極20の配線の形成に使用されると共に、ビアホール導体B9の形成にも使用されるようになる。その結果、電子部品10では、ビアホール導体B9の形成不良の問題が発生しにくい。 On the other hand, in the electronic component 10 according to the present embodiment, the via hole conductor B9 is provided at the end of the coil electrode 20, as shown in FIG. The 20 wires are not extended. Therefore, when the coil electrode 20 is formed by the screen printing method, the conductive paste is used for forming the wiring of the coil electrode 20 and also for forming the via-hole conductor B9. As a result, in the electronic component 10, the problem of poor formation of the via-hole conductor B9 hardly occurs.
 本願発明者は、前記効果をより明確なものとするために、以下に示す実験を行って、ビアホール導体の形成不良率を評価した。図8は、実験においてセラミックグリーンシート上に作製したコイル電極20を示した図である。 In order to make the effect more clear, the inventor of the present application evaluated the via hole conductor formation defect rate by performing the following experiment. FIG. 8 is a view showing the coil electrode 20 produced on the ceramic green sheet in the experiment.
 実験では、図8に示すように、ビアホール導体Ba~Bdの位置にそれぞれ貫通孔を有する90mm×90mmのセラミックグリーンシートに、19044個のコイル電極をスクリーン印刷により形成した。そして、19044個のコイル電極中に1つでもビアホール導体の形成不良が発生した場合には、そのセラミックグリーンシートにビアホール導体の形成不良が発生したものとみなした。このような作業を、200枚のセラミックグリーンシートに対して実行した。表2に実験結果を示す。 In the experiment, as shown in FIG. 8, 19044 coil electrodes were formed by screen printing on a 90 mm × 90 mm ceramic green sheet having through holes at the positions of the via-hole conductors Ba to Bd. When even one via hole conductor formation defect occurred in 19044 coil electrodes, it was considered that the formation defect of the via hole conductor occurred in the ceramic green sheet. Such an operation was performed on 200 ceramic green sheets. Table 2 shows the experimental results.
Figure JPOXMLDOC01-appb-T000002
Figure JPOXMLDOC01-appb-T000002
 表2に示すように、コイル電極20の端部に位置するビアホール導体Ba,Bdの形成不良率は、0%であった。コイル電極20の途中に位置するビアホール導体Bb,Bcの形成不良率は、15%及び17%であった。従って、ビアホール導体がコイル電極の途中に設けられた場合よりも、ビアホール導体がコイル電極の端部に設けられた場合の方が、ビアホール導体の形成不良率を低減できることが理解できる。すなわち、電子部品10では、ビアホール導体B9がコイル電極20の端部に設けられるので、ビアホール導体B9の形成不良が発生しにくいことが理解できる。 As shown in Table 2, the formation defect rate of the via-hole conductors Ba and Bd located at the end of the coil electrode 20 was 0%. The formation defect rates of the via-hole conductors Bb and Bc located in the middle of the coil electrode 20 were 15% and 17%. Therefore, it can be understood that the formation failure rate of the via-hole conductor can be reduced when the via-hole conductor is provided at the end of the coil electrode than when the via-hole conductor is provided in the middle of the coil electrode. That is, in the electronic component 10, since the via-hole conductor B9 is provided at the end of the coil electrode 20, it can be understood that the formation failure of the via-hole conductor B9 hardly occurs.
(その他の実施形態)
 なお、本発明に係る電子部品は前記各実施形態に限定するものではなく、その要旨の範囲内で変更することができる。例えば、図2では、コンタクト部Cは、コイル電極18,20の他の部分よりも太く形成されているが、コンタクト部Cは、必ずしも太く形成される必要はない。例えば、十分にコイル電極18,20の線幅が太い場合には、コンタクト部Cは、コイル電極18,20の他の部分よりも太く形成されなくてもよい。
(Other embodiments)
The electronic component according to the present invention is not limited to the above embodiments, and can be changed within the scope of the gist. For example, in FIG. 2, the contact portion C is formed thicker than the other portions of the coil electrodes 18 and 20, but the contact portion C is not necessarily formed thick. For example, when the line width of the coil electrodes 18 and 20 is sufficiently large, the contact portion C may not be formed thicker than the other portions of the coil electrodes 18 and 20.
 ここで、図9のコイル電極20が用いられた場合について説明する。図9のコイル電極20は、図2のコイル電極20と異なり、明確なコンタクト部Cを有さない。そのため、コイル電極20が複数個所においてビアホール導体B8と接続可能に構成されていることは、コイル電極20単体を見ただけでは判別が困難である。 Here, the case where the coil electrode 20 of FIG. 9 is used will be described. The coil electrode 20 of FIG. 9 does not have a clear contact portion C, unlike the coil electrode 20 of FIG. Therefore, it is difficult to determine that the coil electrode 20 is configured to be connectable to the via-hole conductor B8 at a plurality of locations only by looking at the coil electrode 20 alone.
 しかしながら、コイル電極20のビアホール導体B9が接続されている端部とは反対側の端部以外の部分(例えば、図9の点M,N)にビアホール導体B8が接続されている場合には、ビアホール導体B8が接続されている点からビアホール導体B9が接続されていない方の端部までの間において、ビアホール導体B8が接続可能であると言える。そこで、ビアホール導体B9が接続されていない方の端部を余してビアホール導体B8がコイル電極20に接続されている場合には、コイル電極20が複数個所においてビアホール導体B8と接続可能に構成されていると判断する。 However, when the via-hole conductor B8 is connected to a portion (for example, points M and N in FIG. 9) other than the end opposite to the end to which the via-hole conductor B9 of the coil electrode 20 is connected, It can be said that the via-hole conductor B8 can be connected from the point where the via-hole conductor B8 is connected to the end portion where the via-hole conductor B9 is not connected. Therefore, when the via-hole conductor B8 is connected to the coil electrode 20 leaving the end portion to which the via-hole conductor B9 is not connected, the coil electrode 20 is configured to be connectable to the via-hole conductor B8 at a plurality of locations. Judge that
 なお、電子部品10では、3/4ターンのコイル電極18が用いられているが、例えば、5/6ターンのコイル電極18や7/8ターンのコイル電極18が用いられてもよい。 In the electronic component 10, the 3/4 turn coil electrode 18 is used. However, for example, a 5/6 turn coil electrode 18 or a 7/8 turn coil electrode 18 may be used.
 なお、電子部品10の製造方法では、シート積層法によって電子部品10を作製したが、該電子部品10の製造方法はこれに限らない。例えば、電子部品10は、印刷法により作製されてもよい。 In addition, in the manufacturing method of the electronic component 10, the electronic component 10 was produced by the sheet | seat lamination method, However, The manufacturing method of this electronic component 10 is not restricted to this. For example, the electronic component 10 may be manufactured by a printing method.
 なお、電子部品10では、図2に示すように、コイル電極18aをコイル電極20よりも長く形成することにより、ビアホール導体B3からビアホール導体B4までの第1の直流抵抗を、ビアホール導体B8からビアホール導体B9までの第2の直流抵抗よりも大きくしている。しかしながら、第1の直流抵抗を第2の直流抵抗よりも大きくする方法はこれに限らない。例えば、コイル電極18aとコイル電極20の線幅や厚さを調整することによって実現してもよい。 In the electronic component 10, as shown in FIG. 2, the coil electrode 18a is formed longer than the coil electrode 20, so that the first DC resistance from the via-hole conductor B3 to the via-hole conductor B4 is reduced. It is larger than the second DC resistance up to the conductor B9. However, the method of making the first DC resistance larger than the second DC resistance is not limited to this. For example, you may implement | achieve by adjusting the line | wire width and thickness of the coil electrode 18a and the coil electrode 20. FIG.
 また、電子部品10では、コイルLの両端はそれぞれ、ビアホール導体Bにより外部電極14a,14bと接続されている。しかしながら、コイルLのいずれか一方の端部は、磁性体層16上においてコイル導体18と接続された引き出し部により外部電極14a又は外部電極14bと接続されていてもよい。 In the electronic component 10, both ends of the coil L are connected to the external electrodes 14a and 14b by via-hole conductors B, respectively. However, either one end of the coil L may be connected to the external electrode 14a or the external electrode 14b by a lead portion connected to the coil conductor 18 on the magnetic layer 16.
 本発明は、電子部品及びその製造方法に有用であり、特に、ビアホール導体とコイル電極との間の断線を防止できる点において優れている。 The present invention is useful for an electronic component and a manufacturing method thereof, and is particularly excellent in that a disconnection between a via-hole conductor and a coil electrode can be prevented.
 B1~B13 ビアホール導体
 C1~C16 コンタクト部
 L コイル
 t1,t2 端部
 10 電子部品
 12 積層体
 14a,14b 外部電極
 16a~16m 磁性体層
 18a~18f,20 コイル電極
B1 to B13 Via hole conductor C1 to C16 Contact portion L Coil t1, t2 End portion 10 Electronic component 12 Laminated body 14a, 14b External electrode 16a-16m Magnetic layer 18a-18f, 20 Coil electrode

Claims (13)

  1.  コイルを構成している複数のコイル電極と、
     前記複数のコイル電極と共に積層されて積層体を構成している複数の絶縁層と、
     前記積層体の表面に設けられている2つの外部電極と
     前記コイルと前記2つの外部電極とを接続する2つの接続部と、
     前記複数のコイル電極を接続し、かつ、一方の端部の面積が他方の端部の面積よりも大きい形状を有しているビアホール導体と、
     を備え、
     積層方向の両端に設けられている前記コイル電極の内、接続されている前記ビアホール導体と前記接続部との間の直流抵抗値が相対的に大きい前記コイル電極をスタート電極と定義し、接続されている前記ビアホール導体と前記接続部との間の直流抵抗値が相対的に小さい前記コイル電極をエンド電極と定義し、該スタート電極及び該エンド電極以外の前記コイル電極を、中間電極と定義したときに、
     前記スタート電極は、前記中間電極と接続されている前記ビアホール導体と、前記一方の端部を介して接続されていること、
     を特徴とする電子部品。
    A plurality of coil electrodes constituting a coil;
    A plurality of insulating layers laminated together with the plurality of coil electrodes to form a laminate;
    Two external electrodes provided on the surface of the laminate, two connection portions for connecting the coil and the two external electrodes,
    A via-hole conductor connecting the plurality of coil electrodes and having a shape in which the area of one end is larger than the area of the other end;
    With
    Of the coil electrodes provided at both ends in the stacking direction, the coil electrode having a relatively large DC resistance value between the connected via-hole conductor and the connecting portion is defined as a start electrode and connected. The coil electrode having a relatively small direct current resistance value between the via-hole conductor and the connecting portion is defined as an end electrode, and the coil electrode other than the start electrode and the end electrode is defined as an intermediate electrode. sometimes,
    The start electrode is connected to the via-hole conductor connected to the intermediate electrode via the one end;
    Electronic parts characterized by
  2.  前記エンド電極は、1ターンから前記中間電極のターン数を引いて得られるターン数以上の長さを有していると共に、前記中間電極と接続されている前記ビアホール導体と、前記他方の端部を介して接続されていること、
     を特徴とする請求項1に記載の電子部品。
    The end electrode has a length equal to or longer than the number of turns obtained by subtracting the number of turns of the intermediate electrode from one turn, the via-hole conductor connected to the intermediate electrode, and the other end. Connected through
    The electronic component according to claim 1.
  3.  前記エンド電極と前記中間電極とを接続している前記ビアホール導体は、前記絶縁層において前記エンド電極と一体的に形成されていること、
     を特徴とする請求項1又は請求項2のいずれかに記載の電子部品。
    The via-hole conductor connecting the end electrode and the intermediate electrode is formed integrally with the end electrode in the insulating layer;
    The electronic component according to claim 1, wherein:
  4.  前記エンド電極は、積層方向から平面視したときに、前記中間電極に接続されている前記ビアホール導体と重なっていること、
     を特徴とする請求項1ないし請求項3のいずれかに記載の電子部品。
    The end electrode overlaps with the via-hole conductor connected to the intermediate electrode when viewed in plan from the stacking direction;
    The electronic component according to any one of claims 1 to 3, wherein:
  5.  前記スタート電極と前記中間電極とを接続している前記ビアホール導体は、前記絶縁層において該スタート電極と一体的に形成されていること、
     を特徴とする請求項1ないし請求項4のいずれかに記載の電子部品。
    The via-hole conductor connecting the start electrode and the intermediate electrode is formed integrally with the start electrode in the insulating layer;
    The electronic component according to claim 1, wherein:
  6.  前記エンド電極から前記スタート電極に向かう方向を、第1の方向と定義した場合において、前記各ビアホール導体において、前記一方の端部は、前記他方の端部よりも第1の方向側に位置していること、
     を特徴とする請求項1ないし請求項5のいずれかに記載の電子部品。
    In the case where the direction from the end electrode toward the start electrode is defined as a first direction, in each via-hole conductor, the one end is positioned on the first direction side with respect to the other end. That
    The electronic component according to claim 1, wherein:
  7.  前記エンド電極は、複数個所において前記ビアホール導体と接続可能に構成されていること、
     を特徴とする請求項1ないし請求項6のいずれかに記載の電子部品。
    The end electrode is configured to be connectable to the via-hole conductor at a plurality of locations;
    The electronic component according to claim 1, wherein:
  8.  前記エンド電極は、前記ビアホール導体と接続可能な部分が、他の部分よりも太い形状を有していること、
     を特徴とする請求項7に記載の電子部品。
    The end electrode has a portion that can be connected to the via-hole conductor has a thicker shape than other portions,
    The electronic component according to claim 7.
  9.  前記エンド電極と前記中間電極とを接続しているビアホール導体は、該エンド電極の両端以外の部分に接続されていること、
     を特徴とする請求項7又は請求項8のいずれかに記載の電子部品。
    The via-hole conductor connecting the end electrode and the intermediate electrode is connected to a portion other than both ends of the end electrode;
    The electronic component according to claim 7, wherein:
  10.  前記接続部は、ビアホール導体であること、
     を特徴とする請求項1ないし請求項9のいずれかに記載の電子部品。
    The connecting portion is a via-hole conductor;
    The electronic component according to claim 1, wherein:
  11.  前記接続部は、前記絶縁層上に設けられ、かつ、前記スタート電極又は前記エンド電極のそれぞれに接続されている引き出し電極であること、
     を特徴とする請求項1ないし請求項9のいずれかに記載の電子部品。
    The connecting portion is an extraction electrode provided on the insulating layer and connected to each of the start electrode or the end electrode;
    The electronic component according to claim 1, wherein:
  12.  請求項1に記載の電子部品の製造方法において、
     前記ビアホール導体を、前記絶縁層に形成する工程と、
     前記接続部を前記絶縁層に形成する工程と、
     前記スタート電極及び前記中間電極を前記絶縁層に形成する工程と、
     前記エンド電極を前記絶縁層に形成する工程と、
     前記中間電極が前記スタート電極と前記エンド電極との間に位置するように、該スタート電極が形成された前記絶縁層、該エンド電極が形成された前記絶縁層及び該中間電極が形成された前記絶縁層を積層して、積層体を形成する工程と、
     を備えること、
     を特徴とする電子部品の製造方法。
    In the manufacturing method of the electronic component of Claim 1,
    Forming the via-hole conductor in the insulating layer;
    Forming the connecting portion in the insulating layer;
    Forming the start electrode and the intermediate electrode on the insulating layer;
    Forming the end electrode on the insulating layer;
    The insulating layer in which the start electrode is formed, the insulating layer in which the end electrode is formed, and the intermediate electrode are formed so that the intermediate electrode is positioned between the start electrode and the end electrode Laminating insulating layers to form a laminate;
    Providing
    A method of manufacturing an electronic component characterized by the above.
  13.  前記ビアホール導体を形成する工程と、前記スタート電極及び前記中間電極を形成する工程とは、同時に行われること、
     を特徴とする請求項12に記載の電子部品の製造方法。
    The step of forming the via-hole conductor and the step of forming the start electrode and the intermediate electrode are performed simultaneously;
    The method of manufacturing an electronic component according to claim 12.
PCT/JP2010/050143 2009-01-30 2010-01-08 Electronic component and method of manufacturing same WO2010087220A1 (en)

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