WO2010081246A1 - Dispositif de raccordement pour une installation à vide - Google Patents

Dispositif de raccordement pour une installation à vide Download PDF

Info

Publication number
WO2010081246A1
WO2010081246A1 PCT/CH2010/000010 CH2010000010W WO2010081246A1 WO 2010081246 A1 WO2010081246 A1 WO 2010081246A1 CH 2010000010 W CH2010000010 W CH 2010000010W WO 2010081246 A1 WO2010081246 A1 WO 2010081246A1
Authority
WO
WIPO (PCT)
Prior art keywords
pipe socket
pipe
connecting device
flange
end portion
Prior art date
Application number
PCT/CH2010/000010
Other languages
German (de)
English (en)
Other versions
WO2010081246A8 (fr
Inventor
Philipp Wagner
Gian-Reto Peter Monauni
Original Assignee
Oerlikon Solar Ip Ag, Trübbach
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Solar Ip Ag, Trübbach filed Critical Oerlikon Solar Ip Ag, Trübbach
Priority to EP10700693A priority Critical patent/EP2379927A1/fr
Priority to JP2011545605A priority patent/JP5438129B2/ja
Priority to CN2010800054459A priority patent/CN102282405B/zh
Publication of WO2010081246A1 publication Critical patent/WO2010081246A1/fr
Publication of WO2010081246A8 publication Critical patent/WO2010081246A8/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/02—Universal joints, i.e. with mechanical connection allowing angular movement or adjustment of the axes of the parts in any direction
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/02—Universal joints, i.e. with mechanical connection allowing angular movement or adjustment of the axes of the parts in any direction
    • F16L27/026—Universal and axially displaceable joints
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/10—Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/10—Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F16L27/1012—Flanged joints
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L27/00—Adjustable joints, Joints allowing movement
    • F16L27/10—Adjustable joints, Joints allowing movement comprising a flexible connection only, e.g. for damping vibrations
    • F16L27/1017—Joints with sleeve or socket
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L51/00—Expansion-compensation arrangements for pipe-lines

Definitions

  • the invention relates to a connection device for a vacuum system.
  • Such connecting devices are used in the connection of assemblies such as vacuum chambers, pumps, etc. through lines. They must be vacuum-tight, even if the connected parts have manufacturing tolerances, vibrations are exposed and subjected to different thermal expansions. In addition, they must withstand corrosive gases, such as those used above all for the cleaning of system parts.
  • a known generic connection device which is described in more detail below, comprises a bellows made of metal, e.g. corrosion-resistant spring steel, INCONEL or aluminum, which ensures the required flexibility.
  • metal e.g. corrosion-resistant spring steel, INCONEL or aluminum
  • Such connecting devices have proven themselves, but are very expensive, especially when a bellows from INCONEL is used.
  • the invention is based on the object to provide a generic connection device, which is also releasable and reliable gas-tight and offers sufficient flexibility, but can be made much cheaper.
  • This object is solved by the features in the characterizing part of claim 1.
  • the connecting device according to the invention can be easily produced and adjusted when the system is stationary, but nevertheless provides a reliable gastight seal both under operating conditions and outside the operating times. Under operating conditions, it is stable against corrosive gases. The cost savings over known generic
  • Connecting devices is considerable. It can be 50% or more.
  • FIG. 1 shows a longitudinal section through a known generic connection device
  • Fig. 2 shows a corresponding longitudinal section through an inventive connecting device, which represents only one embodiment.
  • the known generic connection device has a bellows 1 made of metal, eg corrosion-resistant spring steel, INCONEL or aluminum, one end, the opening surrounding the opening, with the flange 2 and the other end is welded to a ring 3, which also by a screw 4 is connected to the flange 2.
  • the ring 3 is also releasably connected by a screw 5 with a piece of pipe 6, but gas-tight.
  • the bellows 1 allows movement of the ring 3 relative to the flange 1 both in the longitudinal direction as well as limited across.
  • the additional mechanical connection through the screw 4 with at least one bolt, which is surrounded by a compression spring and is biased by it, is designed so that it does not affect these possibilities.
  • the connecting device 15 comprises two flanges 10, 11 each having a pipe section or pipe socket 16 arranged thereon; 18, which are arranged one inside the other, that the pipe section 16 and the pipe socket 18 are aligned on at least a partial section substantially coaxially and enclose a circumferential annular gap.
  • a main sealing ring 12 made of plastic, preferably Teflon is arranged in this annular gap (on the said section) between the outer surface of the pipe section 16 and the inner surface of the tube piece 16 surrounding raw pipe 18, a main sealing ring 12 made of plastic, preferably Teflon is arranged. It is dimensioned so that in said portion of an inner sealing surface of the same abuts against the outside of the pipe section 16 and an outer lateral surface on the inside of the pipe socket 18.
  • an auxiliary seal between the pipe section 16 and the pipe socket 18 used, for example a radial shaft seal 13.
  • the pipe piece 16 heats up to an operating temperature which, for example, is reached. 50 ° or more, above the ambient temperature.
  • Plastic, in particular Teflon, the preferred material for the main seal ring 12 is a very good thermal insulator, so that the pipe socket 18 remains substantially at ambient temperature, resulting in a temperature difference between the same and the pipe section 16.
  • the pipe section 16 expands and presses against the inner sealing surface of the main sealing ring 12, the outer surface thereof is thereby pressed against the inside of the pipe socket 18. This causes the connection pipe socket 18 -
  • Main seal ring 12 - pipe section 16 is gas-tight or vacuum-tight and the underlying radial shaft seal 13 against aggressive gases such. Fluorine is protected. The possibility of expansion in the longitudinal direction of the pipe section 16 and the pipe socket 18 is still guaranteed. Experiments even showed a higher tightness of the connecting device according to the present invention as the welded solution according to the prior art.
  • Inconel bellows can achieve cost savings of> 50%.
  • the production of turned and milled parts is less expensive than the known design of the connecting device.
  • a spring-clamped with a spring screw 17 fulfills the same function as the screw 4 in Fig. 1st

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Joints Allowing Movement (AREA)
  • Joints With Pressure Members (AREA)

Abstract

L'invention concerne un raccord tubulaire (18), entouré d'une bride (11) et logeant une section d'extrémité d'une pièce tubulaire (16). Une bague d'étanchéité principale (12) en plastique, de préférence en Téflon, est agencée dans une fente annulaire située entre le raccord et la section d'extrémité, un dispositif d'étanchéité auxiliaire muni par exemple d'un joint d'arbre radial (13) étant agencé contre l'extrémité du raccord tubulaire (18). En dehors des périodes de fonctionnement, lorsque le raccord tubulaire (18) et la pièce tubulaire (16) présentent approximativement la même température ambiante, la pièce tubulaire (16) est mobile, c'est-à-dire déplaçable et inclinable, de manière limitée par rapport au raccord tubulaire (18), tandis que la fonction d'étanchéité est principalement assurée par le dispositif d'étanchéité auxiliaire. En fonctionnement, la pièce tubulaire (16) atteint une température de fonctionnement plus élevée et se dilate, de sorte que la bague d'étanchéité principale (12) soit pressée contre la face intérieure du raccord tubulaire (18) et assume la fonction d'étanchéité, de sorte que le joint d'arbre radial (13) soit protégé contre les gaz corrosifs. La pièce tubulaire (16) est également mobile par rapport au raccord tubulaire (18).
PCT/CH2010/000010 2009-01-19 2010-01-14 Dispositif de raccordement pour une installation à vide WO2010081246A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP10700693A EP2379927A1 (fr) 2009-01-19 2010-01-14 Dispositif de raccordement pour une installation à vide
JP2011545605A JP5438129B2 (ja) 2009-01-19 2010-01-14 真空ユニット用の連結デバイス
CN2010800054459A CN102282405B (zh) 2009-01-19 2010-01-14 用于真空设备的连接装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14561309P 2009-01-19 2009-01-19
US61/145,613 2009-01-19

Publications (2)

Publication Number Publication Date
WO2010081246A1 true WO2010081246A1 (fr) 2010-07-22
WO2010081246A8 WO2010081246A8 (fr) 2010-10-14

Family

ID=42062302

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CH2010/000010 WO2010081246A1 (fr) 2009-01-19 2010-01-14 Dispositif de raccordement pour une installation à vide

Country Status (5)

Country Link
EP (1) EP2379927A1 (fr)
JP (1) JP5438129B2 (fr)
KR (1) KR20110107380A (fr)
CN (1) CN102282405B (fr)
WO (1) WO2010081246A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3082912A1 (fr) * 2018-06-25 2019-12-27 Safran Aircraft Engines Dispositif de raccordement fluidique pour un circuit d'air d'un moteur d'aeronef
EP3722647A1 (fr) * 2019-04-08 2020-10-14 TMT Machinery, Inc. Dispositif de couplage et système de rattrapage de fil fin

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1542302A (fr) * 1967-11-06 1968-10-11 Tiroler Roehren & Metallwerk Dispositif d'assujettissement des tuyauteries sous pression contre le coulissement
US4415169A (en) * 1981-09-28 1983-11-15 Baker International Corporation Seal for concentric tubular member
DE4028225C1 (en) * 1990-09-06 1991-10-02 Mtu Friedrichshafen Gmbh Joint for vehicle exhaust - has soft seal between two radial ring surfaces on pipes
US5601316A (en) * 1994-02-22 1997-02-11 Le Carbone Lorraine Bellows for connecting hoses or apparatus for operation in a vacuum
DE102007061188A1 (de) * 2007-12-17 2009-06-18 Vat Holding Ag Flanscheinrichtung

Family Cites Families (15)

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AT269007B (de) * 1965-05-15 1969-03-10 Deutsche Steinzeug Muffenrohrdichtung für Steinzeugkanalisationsrohre
JPS589589U (ja) * 1981-07-14 1983-01-21 川崎製鉄株式会社 異径管はめ合わせ接続部のシ−ル構造
JPS5844427U (ja) * 1981-09-18 1983-03-25 本田技研工業株式会社 内燃機関用排気管
JPS5919188Y2 (ja) * 1981-10-20 1984-06-02 理研工機株式会社 管継手
US4506919A (en) * 1983-01-03 1985-03-26 Amsted Industries Incorporated Restrained mechanical pipe joint
JPH0629549B2 (ja) * 1985-07-23 1994-04-20 ヤマハ発動機株式会社 エンジンの排気管連結装置
JP2745220B2 (ja) * 1988-09-12 1998-04-28 ヤマハ発動機株式会社 排気管の接続構造
JP2788994B2 (ja) * 1989-03-22 1998-08-20 雅弘 西川 密封装置
JP4379834B2 (ja) * 1999-01-12 2009-12-09 日立金属株式会社 伸縮自在継手
US6302402B1 (en) * 1999-07-07 2001-10-16 Air Products And Chemicals, Inc. Compliant high temperature seals for dissimilar materials
JP4266775B2 (ja) * 2003-10-30 2009-05-20 株式会社栗本鐵工所 伸縮式ダクト
JP2006009614A (ja) * 2004-06-23 2006-01-12 Matsushita Electric Ind Co Ltd スクロール圧縮機
CN100343572C (zh) * 2006-08-11 2007-10-17 宋章根 管道用耐高压旋转补偿器
DE102006039958A1 (de) * 2006-08-25 2008-02-28 Busch Produktions Gmbh Drehschieber-Vakuumpumpe bzw.-Verdichter in Blockbauweise mit fliegend gelagertem Scheibenläufer-Synchronmotor
EP1992849B1 (fr) * 2007-05-15 2016-12-21 Carl Freudenberg KG Arrangement d'étanchéité

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1542302A (fr) * 1967-11-06 1968-10-11 Tiroler Roehren & Metallwerk Dispositif d'assujettissement des tuyauteries sous pression contre le coulissement
US4415169A (en) * 1981-09-28 1983-11-15 Baker International Corporation Seal for concentric tubular member
DE4028225C1 (en) * 1990-09-06 1991-10-02 Mtu Friedrichshafen Gmbh Joint for vehicle exhaust - has soft seal between two radial ring surfaces on pipes
US5601316A (en) * 1994-02-22 1997-02-11 Le Carbone Lorraine Bellows for connecting hoses or apparatus for operation in a vacuum
DE102007061188A1 (de) * 2007-12-17 2009-06-18 Vat Holding Ag Flanscheinrichtung

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3082912A1 (fr) * 2018-06-25 2019-12-27 Safran Aircraft Engines Dispositif de raccordement fluidique pour un circuit d'air d'un moteur d'aeronef
EP3722647A1 (fr) * 2019-04-08 2020-10-14 TMT Machinery, Inc. Dispositif de couplage et système de rattrapage de fil fin
CN111795232A (zh) * 2019-04-08 2020-10-20 日本Tmt机械株式会社 联轴装置以及纺丝牵引设备
EP3885626A1 (fr) 2019-04-08 2021-09-29 TMT Machinery, Inc. Dispositif de couplage
EP4224049A1 (fr) 2019-04-08 2023-08-09 TMT Machinery, Inc. Dispositif de couplage
EP4224048A1 (fr) 2019-04-08 2023-08-09 TMT Machinery, Inc. Dispositif de couplage
CN111795232B (zh) * 2019-04-08 2024-03-15 日本Tmt机械株式会社 联轴装置以及纺丝牵引设备

Also Published As

Publication number Publication date
CN102282405B (zh) 2013-06-19
JP2012515306A (ja) 2012-07-05
KR20110107380A (ko) 2011-09-30
CN102282405A (zh) 2011-12-14
JP5438129B2 (ja) 2014-03-12
WO2010081246A8 (fr) 2010-10-14
EP2379927A1 (fr) 2011-10-26

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