WO2010019980A1 - Appareil de mesure pour analyse de position sur un support de circuits intégrés - Google Patents

Appareil de mesure pour analyse de position sur un support de circuits intégrés Download PDF

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Publication number
WO2010019980A1
WO2010019980A1 PCT/AU2008/001194 AU2008001194W WO2010019980A1 WO 2010019980 A1 WO2010019980 A1 WO 2010019980A1 AU 2008001194 W AU2008001194 W AU 2008001194W WO 2010019980 A1 WO2010019980 A1 WO 2010019980A1
Authority
WO
WIPO (PCT)
Prior art keywords
assembly
carrier
integrated circuits
measuring apparatus
control system
Prior art date
Application number
PCT/AU2008/001194
Other languages
English (en)
Inventor
Joseph Tharion
William Granger
Ralph Lewis Ranger
Graeme Kenneth Bowyer
Jason Mark Thelander
Original Assignee
Silverbrook Research Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Silverbrook Research Pty Ltd filed Critical Silverbrook Research Pty Ltd
Priority to PCT/AU2008/001194 priority Critical patent/WO2010019980A1/fr
Priority to KR1020107027782A priority patent/KR20110010632A/ko
Priority to EP08782942.0A priority patent/EP2326916A4/fr
Publication of WO2010019980A1 publication Critical patent/WO2010019980A1/fr

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Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/70—Determining position or orientation of objects or cameras
    • G06T7/73—Determining position or orientation of objects or cameras using feature-based methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30204—Marker

Definitions

  • the invention relates to the field of printing, in general. More specifically, the invention relates to testing of alignment printhead integrated circuits positioned on a carrier.
  • Pagewidth printers that incorporate micro-electromechanical components generally have printhead integrated circuits that include a silicon substrate with a large number of densely arranged, micro-electromechanical nozzle arrangements. Each nozzle arrangement is responsible for ejecting a stream of ink drops.
  • platform or carrier is generally required for testing such integrated circuits.
  • the carrier is required to be suitable for the attachment of printhead integrated circuits.
  • relative orientation of the printhead integrated circuits should be monitored.
  • a measuring apparatus for measuring the positions of a plurality of printhead integrated circuits relative to a carrier on which the printhead integrated circuits are located, the carrier having carrier
  • said measuring apparatus comprising: a support assembly; a receptacle positioned on the support assembly and configured to receive the carrier, the receptacle being movable relative to the support assembly between a loading position and a sensing position; a sensor configured to sense positions of the carrier and integrated circuit fiducials; and a control system configured to control the sensor to measure the positions of the carrier and integrated circuit fiducials.
  • the support assembly includes a displacement mechanism to displace the receptacle between the loading and sensing positions.
  • the receptacle includes a clamp arrangement for clamping the carrier to the receptacle.
  • the senor includes a digital camera arrangement configured to sense the fiducials and to communicate image data representing the fiducials to the control system.
  • control system includes a graphical display for displaying the image data.
  • control system is configured further to process the image data to measure positions of the carrier fiducials and the integrated circuit fiducials and to generate positional data for analysis.
  • control system includes a reader configured to read a code on the carrier.
  • the reader includes a barcode scanner for reading a barcode on the earner.
  • a method for testing an alignment of a carrier with respect to a plurality of integrated circuits on the carrier comprising the steps of: receiving the carrier in a holding assembly; sensing positions of the carrier and circuit references; and measuring the positions of the carrier and circuit references.
  • the step of receiving the carrier in the holding assembly includes the step of clamping the carrier between clamps of the holding assembly.
  • the step of sensing includes the step of sensing two of the carrier references and two of the circuit references on each integrated circuit.
  • the step of sensing includes sensing with a digital camera arrangement and generating image data.
  • the step of measuring includes the step of generating and displaying an image from the image data.
  • the step of measuring includes the step of generating co-ordinate values corresponding to positions of the carrier references and the circuit references.
  • the step of measuring includes the step of measuring an alignment of consecutive integrated circuits using the co-ordinate values.
  • MPN023 27-PCT circuit carrier positioned, in use, in a working enclosure of the machine, said safety system comprising: a sensor arrangement for sensing an operational status of the measuring apparatus; an emergency cut-off configured to deactivate the measuring apparatus automatically when an undesired operational status is sensed by the sensor arrangement; and a control system connected to the sensor arrangement and the emergency cut-off to activate the emergency cut-off on receipt of a predetermined signal from the sensor arrangement.
  • the operational status is an aspect selected from: a position of at least one measuring device of the measuring apparatus; a presence of a foreign object in the working enclosure; a fluid pressure of a pneumatic or hydraulic mechanism of the measuring apparatus; a position of the integrated circuit carrier; authenticity of the carrier; an electricity supply to the measuring apparatus; and an operator identifier of an operator operating the measuring apparatus.
  • the sensor arrangement has a plurality of micro-switches for sensing the position of the at least one movable mechanism.
  • the sensor arrangement includes a light curtain to sense the ingress of a foreign object into the enclosure.
  • the sensor arrangement includes a pressure sensor to sense the fluid pressure of a hydraulic or pneumatic movable mechanism.
  • the sensor arrangement may include proximity switches to determine the position of the integrated circuit carrier.
  • the sensor arrangement may include a barcode scanner to scan a barcode of the integrated circuit carrier.
  • the sensor arrangement may include a residual current circuit breaker to detect residual current and provide overcurrent protection.
  • a measuring apparatus comprising: a housing assembly that defines an enclosure; a control system mounted in the housing assembly; an operator interface mounted on the housing assembly and connected to the control system to allow an operator to control the measuring apparatus; a measuring table assembly mounted in the housing assembly and configured to receive a nest assembly supporting an integrated circuit carrier carrying a number of integrated circuits; and a camera assembly mounted in the housing assembly and configured to generate image data representing the integrated circuit carrier and the integrated circuits, the camera assembly being connected to the control system which is configured to carry out a positional analysis on the integrated circuit carrier and the integrated circuits to determine at least one of positions of the integrated circuits on the carrier and relative positions of consecutive integrated circuits.
  • the housing assembly may include a closure which can be opened or closed to allow or prevent access to the enclosure.
  • the closure may include a safety switch and the control system may include a controller connected to the safety switch to stop operation of the measuring apparatus if the closure is opened during operation.
  • the measuring table assembly may include a linear stage assembly to displace the nest assembly linearly into an imaging position.
  • the camera assembly may include a camera post that is mounted on the measuring bed assembly to extend operatively above the measuring bed assembly.
  • the camera assembly may include a digital camera mounted on the camera post to be displaceable with respect to the camera post for focusing purposes.
  • the digital camera may include a digital camera mounted on the camera post to be displaceable with respect to the camera post for focusing purposes.
  • MPN023 27-PCT may be connected to the control system so that the control system can receive the image data generated by the digital camera.
  • the control system may be configured to identify f ⁇ ducials on the integrated circuit carrier and the integrated circuits and to calculate co-ordinate values with respect to a predetermined reference point corresponding to said fiducials.
  • the control system may be configured to determine positions of the integrated circuits on the integrated circuit carrier and relative positions of the integrated circuits to assess alignment of the integrated circuits.
  • an imaging apparatus for imaging integrated circuits and a respective integrated circuit carrier so that positional analysis can be carried out on the integrated circuits and respective carrier
  • the imaging apparatus comprising a support structure; a bed mounted on the support structure and displaceable along an operatively horizontal axis, the bed being configured to support a nest assembly that operatively retains the integrated circuit carrier and respective integrated circuits; a support assembly operatively mountable with respect to a bed on which the integrated circuit carrier and integrated circuits are supported, in use; and an image recordal device mounted on the support assembly and configured to record an image representing the integrated circuit carrier and integrated circuits, the support assembly including an adjustment mechanism to enable adjustment of a position of the image recordal device relative to the bed.
  • the bed may include a linear stage engaged with the support structure to facilitate adjustment of a position of the bed relative to the support structure along the horizontal axis.
  • the bed may include a proximity sensor to generate a suitable signal when the nest assembly is in a predetermined position.
  • the support assembly may include a support post extending operatively vertically with respect to the bed, the adjustment mechanism being in the form of a linear displacement mechanism mounted on the support post to displace the image recordal device with respect to the support post.
  • the image recordal device includes LED assemblies incorporating LED's and positioned on the support assembly such that the LED's illuminate the integrated circuit carrier and the integrated circuits.
  • the image recordal device includes a digital camera, the adjustment mechanism being configured to adjust the position of the digital camera to achieve focus of the digital camera.
  • the digital camera is a black and white camera incorporating a CCD array.
  • the image recordal device includes a lighting controller to control operation of the LED's.
  • a software product for execution by a controller of a measuring apparatus, as described above, said software product enabling the apparatus to perform the above method.
  • a seventh aspect of the invention there is provided a computer readable medium incorporating a software product, as described above.
  • Figure 1 shows a front perspective view of a carrier for printhead integrated circuits
  • Figure 2 shows a top view of the carrier of Figure 1 showing alignment of fiducials, in accordance with one embodiment of the invention
  • Figure 3 shows a schematic front view of a measuring apparatus for measuring alignment of fiducials, in accordance with one embodiment of the invention
  • Figure 4 shows a front perspective exploded view of components forming a camera assembly, in accordance with one embodiment of the invention, of the apparatus of Figure 3;
  • Figure 5 shows a rear perspective of the camera assembly of Figure 4.
  • Figure 6 shows a front perspective view of a support assembly, in accordance with one embodiment of the invention, of the apparatus of Figure 3;
  • Figure 7 shows a block diagram for a method of testing alignment of a carrier with respect to a number of integrated circuits, in accordance with one embodiment of the invention
  • Figure 8 shows a service panel layout of the apparatus shown in Figure 3
  • Figure 9 shows a pneumatic diagram of pneumatic components of the apparatus shown in Figure 3;
  • Figure 10 shows a diagram of a number of mechanical and electrical components of the apparatus of Figure 3;
  • Figure 11 shows a control diagram for a stepper motor of a camera assembly of the apparatus of Figure 3;
  • Figure 12 shows a control diagram for a servo motor of a measuring table assembly of the apparatus of Figure 3.
  • Figure 13 shows a control diagram for a safety system of the apparatus of Figure 3.
  • a carrier 10 for a number of printhead integrated circuits (ICs)14 is shown.
  • the carrier 10 is an LCP (liquid crystal polymer) molding which has a co-efficient of thermal expansion very near that of silicon. As the printhead heats to its operational temperature, any difference in the thermal expansion of the printhead ICs and the carrier will be within acceptable tolerances.
  • MPN023 27-PCT include an array of nozzle arrangements configured to eject ink drops onto a printing medium.
  • the nozzle arrangements are MEMS (micro-electromechanical system) devices fabricated using lithographic etching and deposition processes commonly employed in semi-conductor chip production.
  • MEMS micro-electromechanical system
  • the carrier 10 defines a number of tortuous ink paths therein (not shown) which terminate in a surface on which the printhead ICs 14 are mounted.
  • the printhead ICs 14 are mounted to the carrier 10 via an adhesive laminar film 12 (often referred to as a die attach film) with suitable perforations or openings positioned to establish fluid communication between each of the ink paths and corresponding nozzles rows on the printhead ICs.
  • the ink paths in the carrier 10 facilitate the delivery of ink from a suitable ink reservoir to the printhead ICs 14.
  • the printhead ICs 14 must be aligned when mounted to the carrier 10. Misalignment of the printhead ICs 14 on the carrier 10 can lead to bad print quality or inlets of the printhead ICs 14 being out of register with the openings in the adhesive laminar film 12.
  • Figure 2 shows a closer view of the surface of the carrier 10 on which the printhead ICs 14 are mounted.
  • the carrier 10 includes a first carrier fiducial 16 and a second carrier fiducial 18.
  • the carrier f ⁇ ducials 16 and 18 are accurately located on the carrier 10 during manufacture thereof. These fiducials serve as points of reference for aligning the printhead ICs 14 on the carrier 10.
  • the printhead ICs 14 have two f ⁇ ducials each.
  • the enlarged insets of Figure 2 shows printhead IC 14.1 has first fiducial 20 located on one end thereof and a second fiducial 22 located on an opposite end.
  • the IC mounted adjacent IC 14.1 has similar f ⁇ ducials located on its ends, such that its first fiducial 24 is closely adjacent the second fiducial 24 on IC 14.1.
  • the IC fiducials e.g. 20, 22 are preferably less than 150 ⁇ m in diameter and typically less than 100 ⁇ m in diameter.
  • the f ⁇ ducials 20 and 22 are 95 ⁇ m dia. bare aluminum etched during manufacture of each printhead IC 14.
  • printhead ICs 14 mounted on the carrier 10, the last IC being indicated by reference numeral 14.2.
  • the first and last ICs 14.1 and 14.2 are mounted so that their respective fiducials lie within a predetermined tolerance to the carrier fiducials 16 and 18 respectively.
  • the intermediate printhead ICs 14 are then laid end-to-end between end printhead ICs 14.1 and 14.2 so that their respective fiducials align to within a predetermined tolerance with respect to each other. By measuring the positions of the different fiducials with respect to one another, it is possible to measure the alignment of the printhead ICs with each other and with respect to the carrier 10.
  • Figure 3 shows an embodiment of a measuring apparatus 30 for measuring the positions of the fiducials 16, 18 of the carrier 10 and the fiducials 20 and 22 of the printhead ICs 14 shown in Figure 2.
  • the apparatus 30 is configured to sense the fiducials, compare the distances between the respective fiducials to a predetermined tolerance, and display these results.
  • the apparatus 30 is also typically configured to relay the results to a remote monitoring system that manages a manufacturing process of printing equipment. More detail of the remote monitoring system is discussed below.
  • the apparatus 30 includes a support structure or housing 32 having a services panel 34.
  • the housing 32 houses a support assembly 44, a camera assembly 46 and a barcode scanner 42 (also represented in Figure 10) behind transparent panels 48.
  • the panels 48 also form a sliding door 49 to allow an operator access to the support assembly 44.
  • the door 49 includes a magnetic door switch 50 which forms part of a safety system of the apparatus, as described below.
  • a warning beacon 38 which indicates an operational status of the apparatus 30, a touch panel PC 36 and control panel 40 which allows operator interface with the apparatus 30.
  • the door 49 also provides a practical safety feature of covering the touch panel PC 36 and control panel 40 when in an open position, as the panel 48 slides over these components to provide access to the components inside the housing 32.
  • the panel 48 is open to allow access to the inside of the housing 32, access to the touch panel PC 36 and control panel 40 is effectively restricted. This prevents accidentally activating the apparatus 30 when the panel 48 of the housing 32 is open, which may injure the operator of the apparatus.
  • the camera assembly 46 includes a camera mount base 64 with rubber mountings 62 for mounting to the housing 32. Also included is camera post 74 fitted to the mount base 64, having an upright pillar 60 and a cover plate 80 with a cover 78 to form a structure for supporting a pedestal 82 to which positioning beam 76 is attached, as shown.
  • the beam 76 serves as support for the barcode scanner 42, that has a sensor 68 attached to a bracket 66, as shown.
  • the Hand Held Products Inc. IT3800 model barcode scanning sensor is suitable for this application.
  • the sensor 68 is attached to the bracket 66 with mounting screws 76, with the bracket 66 in turn fixed to the beam 76 by means of socket screws 70.
  • Camera and optics forming an optical assembly 94, are attached to the supporting pedestal 82 with a camera bracket 98 and a camera mounting base 92 operatively fast with a mounting plate 90, as shown.
  • camera lighting module 96 Also included is camera lighting module 96.
  • the lighting module includes LEDs (light emitting diodes) coupled with a Gardasoft PP610 lighting controller 146 (see Figures 8 and 10).
  • the camera is assembled with adapters and tubes, as shown, to complete the optical assembly 94.
  • the optical assembly 94 is arranged in signal communication with a controller of the apparatus to allow the controller to "see" the fiducials.
  • the mounting plate 90 is attached to the pedestal 82 by means of a camera adapter plate 84 operatively fast with a mounting member 88 via socket fasteners 86, as shown.
  • the mounting plate 90 includes a linear stepper motor 91 to facilitate focusing the camera by moving the camera in a Z-axis direction. Stepper motor 91 is controlled by a stepper motor controller 250 shown in Figure 11.
  • the controller 250 communicates with the optical assembly 94 via the contacts 252.
  • the controller 250 is configured to generate motor drive signals at contacts 254 and to receive positional feedback at contacts 256.
  • the motor 91 includes an integral Hall effect limit switch 258 for positional adjustment of the motor 91.
  • Figure 5 shows a rear perspective view of the camera assembly 46 of Figure 4, with the components assembled.
  • FIG 6 shows the support assembly or measuring table assembly 44 in more detail.
  • the support assembly 44 includes a displacement mechanism in the form of linear servo motor 110, and plate adapter 116 for mounting a carrier clamp or carrier receptacle 117 thereto.
  • the receptacle 117 is shaped and dimensioned to receive the carrier 10 shown in Figure 2, in use, and includes two pneumatic clamps 119 to hold the carrier in place.
  • the controller clamps the carrier fast in the receptacle 117, when the measuring process is actuated to ensure accuracy of fiducial detection. Operation of the clamps 119 is described with reference to Figure 10 below.
  • the servo motor 110 ( Figure 12) is controlled with a servo motor controller 152 that is described in further detail below.
  • the apparatus includes four optocouplers, two indicated at 260 to switch red, amber and green lights 264 on and off and two indicated at 262 to operate the pneumatic clamps 119 with solenoid valves 266 (Figure 10).
  • LEDs of the optocouplers 260 are connected to the stepper motor controller 250 (see Figure 11) and to the servo motor controller 152.
  • the receivers of the optocouplers 260 are, in turn, connected to the red, amber and green lights 264 so that the lights 264 can indicate an operational status of the stepper and servo motors 91, 110.
  • the servo motor controller 152 ( Figure 12) is connected at 276 to a pneumatic clamp arrangement 274 shown in Figure 10.
  • the controller 152 is connected to a pressure regulator 278 of the clamp arrangement 274, at 279.
  • Controlling software defined by the PC associated with the touch panel 36 can also communicate with the
  • a manual isolation valve 284 having the pneumatic structure indicated with reference numeral 202 in Figure 9, and described in further detail below.
  • the servo motor controller 152 controls the servo motor 110 so that the plate adapter 116 can be moved between a loading position, where an operator is able to load the carrier 10 into the clamp, and a sensing position, where the receptacle with carrier 10 is below the optical assembly 94.
  • the PBA LMS50 linear stage motor is a suitable servo motor 110.
  • the receptacle 117 also typically includes a proximity switch 121 (indicated physically in Figure 6 and in the control diagram of Figure 10).
  • the proximity switch 121 is connected to the controller 152 at 286 ( Figure 11) so that the controller 152 can stop the motor 110 once the plate 116 has reached a predetermined extent of movement.
  • the Pepperl and Fuchs NBB1,5-F79-E2 inductive proximity switches are suitable for this role.
  • the support assembly 44 also includes cable trays 112 and 114 for housing and locating electrical wires to the linear motor 110 and pneumatic lines to the clamp in a manner which allows unobstructed movement of the plate 116 relative to the motor 110.
  • Figure 7 shows a block diagram of method steps performed by an operator and the apparatus 30 to check alignment of the fiducials. It is to be appreciated that reference to a reference numeral representing a particular method step refers to a respective block indicated by such reference numeral in the accompanying drawings. As such, the method included in the invention is not limited or constrained to particular method steps referred to in this manner. A skilled person will understand that further methods are possible under this invention which might exclude some of these steps or include additional steps.
  • the apparatus 30 includes a control system or controller, discussed below, which provides a safety system and control during operation.
  • the control system uses the touch panel PC 36 as an operator interface. Accordingly, some steps of the method are performed by the control system, whilst some steps are performed by an operator, as will be apparent from the below discussion.
  • a remote monitoring system is referred to in the steps of Figure 7.
  • the remote monitoring system is typically a separate computer system arranged in signal communication with the apparatus 30, and more specifically with a network interface of the apparatus 30, as described below.
  • the remote monitoring system performs quality assurance tasks by monitoring the progress and status of the carrier 10.
  • the barcode scanner 42 of the apparatus 30 is configured to scan a barcode of each carrier placed in the clamp 117 of the plate adapter 116.
  • This barcode uniquely identifies each carrier, with the barcode sent to the remote monitoring system during an assembly and testing process of the carrier 10. If, during the assembly and testing process, any flaws are detected, the relevant carrier is recorded as flawed by the remote monitoring system. In the event a flawed carrier is not quarantined and proceeds to a next step of the process, the remote monitoring system can prevent a controller or control system of a machine forming part of the process from performing any further work on the carrier.
  • the scanner 42 is switched on by a relay 272.
  • the relay 272 is connected to the stepper motor controller 250.
  • the relay 272 serves to actuate the stepper motor controller 250 so that the camera assembly 46 can begin an auto- focusing procedure.
  • This quality assurance functionality of the remote monitoring system prevents unnecessary work done on inferior quality carriers, as well as preventing the assembly of
  • the method commences with an operator removing a carrier with ICs thereon from a clean storage environment, such as a clean cabinet. This step is indicated by block 170.
  • the operator then proceeds to scan the barcode of the carrier with the barcode scanner 42, indicated by block 172. This action serves to actuate the controller 250 so that the camera assembly 46 can begin the auto-focusing procedure.
  • the control system of the apparatus 30 relays the scanned barcode to the remote monitoring system. If there is a problem with the barcode, the remote monitoring system or the barcode scanner 42 can send a message to the touch panel PC 36 (or user interface - UI) to display a message to the operator, shown by block 176. The operator can then rescan the barcode, or discard the carrier as faulty.
  • the operator proceeds to load the carrier 10 into the clamp or test fixture 117, as at block 178.
  • the carrier 10 is then moved into the sensing position by the support assembly 44, as described above, under operation of the servo motor 110.
  • the controller or PC 36 controls movement of the support assembly 44 via the controller 250.
  • the camera assembly 46 achieves the required Z-axis movement for focusing through operation of the servo motor 91 under control of the controller 250.
  • the camera assembly 46 then enables the determination of the first and second carrier fiducials, shown at blocks 180 and 182, as well as the first and second IC fiducials of each IC, as shown at blocks 184 and 186.
  • the camera assembly 46 senses all the fiducials in this manner until the last fiducial has been sensed and its position on the carrier 10 stored by the controller. This process is indicated at block 188. Once all the fiducials have been sensed, the PC 36 is configured to generate data of the relative positions of the sensed fiducials to each other, as at block 190. This generated data is then displayed to the operator on the PC touch screen 36
  • the remote monitoring system is able to flag that respective carrier 10 as flawed.
  • the method ends with the controller moving the carrier 10 from the sensing position to the loading position where the operator can remove the carrier 10 from the clamp or test fixture 117. This is indicated at block 196.
  • Figure 8 shows the components of the control system concealed by the services panel 34 (see Figure 3).
  • the connector blocks 126 and the trunking 120 link to the PC touch screen 36 (see Figure 3) to operate the control system.
  • the trunking 120 is mounted in the support structure for connecting the relevant electrical and pneumatic wires and lines to the different components.
  • the connecting blocks 126 facilitate the electrical connections between the components.
  • the components are attached to mounting rails 128.
  • Mains isolation switch 122 forms the primary electrical connection of the apparatus to an external power source.
  • the Sprecher & Schuh LE2-12-1782 2 pole switch cam unit is suitable for this application.
  • the main pneumatic connection of the apparatus 30 is via pressure regulator 124.
  • the Festo MPPES-3-1/4-2-010 series regulator has been found suitable for this task.
  • a circuit breaker 130 (such as a Hager AC810T series circuit breaker) provides electrical protection for the electrical components, along with fuses 132.
  • Power supply 134 is a Phoenix Contact 12V 3 A DC power supply and power supply 136 is a Phoenix contact 24V 2A DC power supply.
  • the power supplies 134 and 136 supply the relevant components with electrical power.
  • Optocouplers 138 are used to facilitate operation and interconnection between the clamp arrangement 274, the lights 264 and the servo motor 110, as described above. These units 138 are two pairs of NEC PS2502-2 series optocouplers.
  • a safety relay 140 in the form of an Omron G9S-2002 plug-in safety relay is connected to a servo motor controller 152 in order to switch off the servo motor 110.
  • Safety door controller 142 is linked to magnetic door switches 50 (see Figure 3) to stop the apparatus if the doors 48 (see Figure 3) are opened.
  • the controllers and switches from the Omron D40B series are suitable for these purposes.
  • Safety contactors 144 are used to limit the motion of the support assembly 44.
  • the safety contactors are two Sprecher & Schuh CAS7 series safety contactors.
  • the LED light controller 146 is also mounted on the rail 128.
  • Control panel 40 (see Figure 3) also includes an emergency stop switch 290 ( Figure 13) for immediately stopping the apparatus 30.
  • the solenoid valves 148 and 150 such as SMC SY3160 series 5-port solenoid valves, control main air isolation and a pneumatic circuit of the clamp or test fixture 117 (see Figure 6).
  • the servo motor controller 152 such as a linear stage Motion Technologies CEL 6/200 driver is used to control operation of the stepper motor 110 (see Figure 6).
  • Capacitor 154 is a 35V 2.2mF unit from Panasonic.
  • Component 156 has an isolated converter and analog output modules to convert the outputs from the PC touch screen (see Figure 3) to control signals for the relevant components.
  • An AD AM -4520 converter is suitable for the application.
  • a Z-axis driver 158 in the form of a Zaber NA08A-16 stepper motor with a Copley STP-075-07 series driver, is responsible for camera focus of the camera assembly 46 via motor 91 (see Figure 4).
  • Figure 9 shows a pneumatic diagram for pneumatic components of the apparatus 30.
  • a main air supply 200 provides pressurised air to an isolation valve 202 in the form of an SMC VHS20-01 series manual isolation valve. This is in turn connected to mist separator 204, which is an SMC AFM20-01-C series unit.
  • Solenoid valve 206 is a SMC SY3160-5MOZ-C6 series valve used to isolate the main system, and pressure regulator 208 regulates pressure to solenoid valves 210 and 212.
  • Solenoid valves 210 and 212 are both SMC SY3160-5MOZ-C6 series valves. In the shown configuration, valve 210 is not used, but valve
  • MPN023 27-PCT 212 controls the clamp or test fixture 117 (see Figure 6) for clamping the carrier 10 to the support assembly 44.
  • the valve 212 actuates two parts of the clamp, namely clamp module 214 and 216.
  • Clamping module 218 is connected to valve 210 and therefore not operative in this particular embodiment.
  • Figures 10 to 13 provide circuit diagrams showing the interconnections of the various electrical components. As will be appreciated by the skilled person, one component typically has a number of discrete wires comprising a single connection to another component. The circuit diagrams inherently show all the wires, but these can be collectively referred to as a single connection in the above description.
  • the LEDs 264 and their operative connection to the optocouplers 260 is also shown in Figure 10.
  • the solenoid valves 266 and their operative connection to the optocouplers 262 are shown.
  • the optocouplers 260, 262 are connected to the controllers 152, 250.
  • Figure 10 also shows the circuitry of the proximity switch 121. Circuitry of the lighting controller 146 is also shown. The pneumatic clamp arrangement 274 including the pressure regulator 278, the analogue output module 282 and the signal converter 280 is shown.
  • Figure 11 shows the circuitry relating to the stepper motor controller 250. As can be seen, there is an electrical connection between the linear stepper motor 91 and the Integral Hall limit switch 258.
  • Figure 12 shows the circuitry relating to the servo motor controller 152.
  • the PC 36 is connected to the controller 152 via an RS 232 connection. As shown, the controller
  • MPN023 27-PCT 152 is connected to the servo motor 110.
  • the controller 152 is connected to the safety relay 140 ( Figure 13).
  • the controller 152 is connected to the proximity switch 121.
  • the controller 152 is connected to the pneumatic clamp arrangement 274.
  • FIG. 13 shows circuitry of a safety system, in accordance with the invention, of the measuring apparatus 30.
  • the safety relay 140 is shown connected to the safety door controller 142 and the contacts 144. Operative connection of the magnetic door switches 50 is also shown.
  • the touch panel PC 36 controls operation of the servo motor controller 152 and thus the servo motor 110 to move the plate adapter 116 with the carrier 10 below the camera assembly 46.
  • the controller 250 facilitates control of the linear stepper motor 91 to focus the optical assembly 94 on the carrier 10.
  • the controller 36 can then examine the carrier with the camera assembly 46 to determine the relative positions of the respective fiducials and if they are properly aligned.
  • controller 152 receives feedback from sensors such as the proximity switch 121 to determine the position of the carrier 10, and controls the pneumatic components, described in Figure 9, to clamp the carrier to the plate adapter 116.
  • the invention also extends to a software product for execution by the controller 36, as described above.
  • the software product enables the controller 36 to perform the functions and relevant method steps described above.
  • the invention inherently includes a computer readable memory, such as a magnetic or optical disc, incorporating such a software product.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention porte sur un appareil de mesure. L'appareil comprend un ensemble de boîtier qui définit une enceinte, un système de commande monté dans l'ensemble de boîtier, et une interface d'opérateur montée sur l'ensemble de boîtier et connectée au système de commande afin de permettre à un opérateur de commander l'appareil de mesure. L'appareil comprend également un ensemble de table de mesure monté dans l'ensemble de boîtier et configuré pour recevoir un ensemble d'emboîtements portant un support de circuits intégrés portant un certain nombre de circuits intégrés, et un ensemble de caméra monté dans l'ensemble de boîtier et configuré pour générer des données d'image représentant le support de circuits intégrés et les circuits intégrés. L'ensemble de caméra est connecté au système de commande, qui est configuré pour exécuter une analyse de position sur le support de circuits intégrés et sur les circuits intégrés, afin de déterminer au moins l'une des positions des circuits intégrés sur le support et les positions relatives de circuits intégrés suivants.
PCT/AU2008/001194 2008-08-19 2008-08-19 Appareil de mesure pour analyse de position sur un support de circuits intégrés WO2010019980A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
PCT/AU2008/001194 WO2010019980A1 (fr) 2008-08-19 2008-08-19 Appareil de mesure pour analyse de position sur un support de circuits intégrés
KR1020107027782A KR20110010632A (ko) 2008-08-19 2008-08-19 집적회로 캐리어에 대한 위치분석 수행을 위한 측정장치
EP08782942.0A EP2326916A4 (fr) 2008-08-19 2008-08-19 Appareil de mesure pour analyse de position sur un support de circuits intégrés

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/AU2008/001194 WO2010019980A1 (fr) 2008-08-19 2008-08-19 Appareil de mesure pour analyse de position sur un support de circuits intégrés

Publications (1)

Publication Number Publication Date
WO2010019980A1 true WO2010019980A1 (fr) 2010-02-25

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PCT/AU2008/001194 WO2010019980A1 (fr) 2008-08-19 2008-08-19 Appareil de mesure pour analyse de position sur un support de circuits intégrés

Country Status (3)

Country Link
EP (1) EP2326916A4 (fr)
KR (1) KR20110010632A (fr)
WO (1) WO2010019980A1 (fr)

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CN105428279A (zh) * 2015-12-14 2016-03-23 重庆远创光电科技有限公司 适用于获取芯片图像的控制方法
CN105514009A (zh) * 2015-12-14 2016-04-20 重庆远创光电科技有限公司 用于芯片视觉检测的芯片载运装置
CN105513992A (zh) * 2015-12-14 2016-04-20 重庆远创光电科技有限公司 一种用于芯片视觉检测的芯片载运装置
CN105513991A (zh) * 2015-12-14 2016-04-20 重庆远创光电科技有限公司 利用芯片运动像机静止方式来获取芯片图像的控制方法
DE202018101018U1 (de) 2017-05-11 2018-03-05 Haprotec Gmbh Bauteil-Belegungserkennungsvorrichtung eines Werkstückträgers
CN114147664A (zh) * 2021-12-09 2022-03-08 苏州华星光电技术有限公司 一种治具更换方法以及电子设备的制备方法

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Cited By (7)

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Publication number Priority date Publication date Assignee Title
CN105428279A (zh) * 2015-12-14 2016-03-23 重庆远创光电科技有限公司 适用于获取芯片图像的控制方法
CN105514009A (zh) * 2015-12-14 2016-04-20 重庆远创光电科技有限公司 用于芯片视觉检测的芯片载运装置
CN105513992A (zh) * 2015-12-14 2016-04-20 重庆远创光电科技有限公司 一种用于芯片视觉检测的芯片载运装置
CN105513991A (zh) * 2015-12-14 2016-04-20 重庆远创光电科技有限公司 利用芯片运动像机静止方式来获取芯片图像的控制方法
CN105513991B (zh) * 2015-12-14 2018-07-20 重庆远创光电科技有限公司 利用芯片运动像机静止方式来获取芯片图像的控制方法
DE202018101018U1 (de) 2017-05-11 2018-03-05 Haprotec Gmbh Bauteil-Belegungserkennungsvorrichtung eines Werkstückträgers
CN114147664A (zh) * 2021-12-09 2022-03-08 苏州华星光电技术有限公司 一种治具更换方法以及电子设备的制备方法

Also Published As

Publication number Publication date
KR20110010632A (ko) 2011-02-01
EP2326916A4 (fr) 2014-07-02
EP2326916A1 (fr) 2011-06-01

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