WO2010011200A1 - Edge coating apparatus and methods for non-circular solar cell substrates - Google Patents
Edge coating apparatus and methods for non-circular solar cell substrates Download PDFInfo
- Publication number
- WO2010011200A1 WO2010011200A1 PCT/US2008/008863 US2008008863W WO2010011200A1 WO 2010011200 A1 WO2010011200 A1 WO 2010011200A1 US 2008008863 W US2008008863 W US 2008008863W WO 2010011200 A1 WO2010011200 A1 WO 2010011200A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substrate
- edge
- applicator
- coating material
- roller
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 132
- 238000000576 coating method Methods 0.000 title claims abstract description 85
- 239000011248 coating agent Substances 0.000 title claims abstract description 81
- 238000000034 method Methods 0.000 title claims description 12
- 239000000463 material Substances 0.000 claims abstract description 53
- 230000005540 biological transmission Effects 0.000 claims abstract description 5
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000000284 resting effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/006—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to the edges of essentially flat articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
Definitions
- the present invention relates generally to solar cells, and more particularly but not exclusively to solar cell fabrication processes and tools.
- Solar cells are well known devices for converting solar radiation to electrical energy. They may be fabricated on a semiconductor wafer using semiconductor processing technology.
- a solar cell includes P-type and N-type diffusion regions. Solar radiation impinging on the solar cell creates electrons and holes that migrate to the diffusion regions, thereby creating voltage differentials between the diffusion regions.
- both the diffusion regions and the metal contact fingers coupled to them are on the backside of the solar cell. The contact fingers allow an external electrical circuit to be coupled to and be powered by the solar cell.
- An edge of a solar cell substrate may be coated with a dielectric for electrical isolation and to prevent metal deposition or growth on the substrate perimeter.
- the present disclosure pertains to apparatus and methods for edge coating of solar cell substrates suitable for mass production.
- An edge coating apparatus is configured to apply a coating material to an edge of a non-circular solar cell substrate.
- the substrate is placed on a rotatable substrate support in the form of a chuck configured to hold and rotate the substrate.
- a coating material dispenser includes an applicator in the form of a roller having a recessed portion in the form of a groove. During the edge coating process, the roller is positioned such that the edge of the substrate is received in the groove. Knurled surface of the roller contacts the edge of the substrate to apply the coating material to the edge of the substrate.
- a motor rotates the chuck by way of a transmission belt and a shaft to rotate the substrate for edge coating.
- FIGS. 1A and 1B schematically show a plan view and a side view, respectively, of an edge coating tool in accordance with an embodiment of the present invention.
- FIG. 2A shows a schematic diagram of an edge coating tool in accordance with another embodiment of the present invention.
- FIG. 2B shows a non-circular substrate received in a groove of a roller in the edge coating tool of FIG. 2A.
- FIGS. 4A and 4B show a side view and a side cross-sectional view, respectively, of a coating material dispenser in accordance with an embodiment of the present invention.
- FIG. 5 shows an exploded view of the coating material dispenser of FIGS. 4A and 4B.
- FIGS. 6A and 6B schematically show the principle of operation of a main cylinder for a coating material dispenser in accordance with an embodiment of the present invention.
- FIGS. 7A, 7B 1 7C, and 7D show features of the coating material dispenser of FIG. 5 for controlling the coating width and thickness uniformity of coating material applied on a substrate edge, in accordance with an embodiment of the present invention.
- the use of the same reference label in different drawings indicates the same or like components.
- FIGS. 1A and 1 B schematically show a plan view and a side view, respectively, of an edge coating tool 100 in accordance with an embodiment of the present invention.
- the edge coating tool 100 includes a coating material dispenser 110 for applying a coating material on an edge of a non-circular solar cell substrate 101 , which may comprise a semiconductor substrate, held by a rotatable vacuum chuck 102 (FIG. 1B).
- the dispenser 110 includes a barrel 113 with an ink plunger 114 and a roller 112.
- the barrel 113 pivots on a spring loaded fulcrum 111 so that it can keep applying pressure on the wafer edges.
- a production operator manually guides the dispenser 110 to avoid hard collisions with the substrate 101 and manually activates the plunger 114 to deliver ink to the roller 112, which applies the ink to coat an edge of the substrate 101.
- the substrate 101 is rotated on the chuck 102 to have the entire perimeter edge of the substrate 101 coated with the coatirig material. While the tool
- FIG. 2A shows a schematic diagram of an edge coating tool 200 for coating an edge of a solar cell substrate in accordance with an embodiment of the present invention.
- the edge coating tool 200 includes a coating material dispenser 308 with an applicator in the form of a roller 309.
- the roller 309 has a recessed portion in the form of a groove 310, as shown in the side view of the roller 309 in FIG. 2B.
- FIG. 2B also shows a non-circular substrate 371 received in the groove 310 during the edge coating process and a nozzle 311 for flowing coating material onto the groove 310 for application on the edge of the substrate 371.
- the substrate 371 may comprise a semiconductor wafer with a pseudo- square shape, for example.
- a coating material supply system 150 includes a cartridge 153 containing the coating material, which may comprise thermal or UV ink.
- the plunger 151 is adjusted to force the coating material from the chamber 154 of the cartridge 153 to the nozzle 311 by way of the supply tube 152.
- the coating material flows to the groove 310 for application to the edge of the substrate 371 received in the groove 310 (see FIG. 2B).
- the groove 310 is pushed against the edge of the substrate 371 to receive the edge and apply the coating material thereon.
- the tool 200 is a "contact" edge coater in that the roller 309 physically contacts the substrate 371 to apply coating material to the edge of the substrate 371.
- the substrate 371 is on a rotatable substrate support in the form of a chuck 303, which may hold the substrate 371 by vacuum force.
- the substrate 371 rotates with the chuck 303 to have the coating material applied on the entire perimeter edge of the substrate 371.
- FIG. 3 which comprises FIGS. 3A, 3B, and 3C, shows an edge coating tool 300 for coating an edge of a solar cell substrate in accordance with an embodiment of the present invention.
- the tool 300 is a particular embodiment of the tool 200.
- FIG. 3A shows a perspective view of the edge coating tool 300.
- the tool 300 is configured to receive and apply a coating material on an edge of the non-circular solar cell substrate 371.
- the tool 300 may include the coating material dispenser 308 with an applicator in the form of the roller 309.
- the roller 309 includes a recessed portion in the form of the groove 310 for receiving and coating the edge of the substrate 371 (see FIG. 2B).
- a substrate support in the form of the rotatable chuck 303 supports the substrate 371.
- a vacuum system 304 directly underneath the chuck 303 allows for holding of the substrate 371 by vacuum force.
- the substrate 371 may be placed manually or by using an automated handling system (e.g., pick and place robot) on a pre-aligner station 301 , which provides a stop for positioning and aligning the substrate 371 over the chuck 303.
- a pneumatic slide 302 is configured to lower and raise the station 301. In the raised position, the station 301 keeps the substrate 371 above the chuck 303. The slide 302 may be actuated to lower the station 301 such that the substrate 371 is resting on and supported by the chuck 303 (see FIG. 3B).
- a shaft 305 i.e., 305-1 and 305- 2
- a transmission belt 306 mechanically couples the shaft 305 to a motor 307.
- FIG. 3B shows a perspective view of the tool 300 with the substrate 371 lowered onto the chuck 303.
- a pneumatic main cylinder 314 (see FIG. 5) is actuated to move the dispenser 308 in coating position towards the substrate 371 once the substrate 371 is positioned on the chuck 303.
- the motor 307 drives the shaft 305 by way of the transmission belt 306 to rotate the chuck 303 and thus the substrate 371.
- the groove 310 receives and contacts the edge of the substrate 371 to apply the coating material thereon.
- FIG. 3C shows an exploded view of the tool 300. The components shown in
- FIG. 3C have been previously described with reference to FIGS. 3A and 3B.
- FIGS. 4A and 4B show a side view and a side cross-sectional view, respectively, of the coating material dispenser 308 in accordance with an embodiment of the present invention.
- a coating material supply system 150 provides the coating material (e.g., thermal ink, or UV ink) to the dispenser 308 by way of the supply tube 152, which is fitted to an inlet 403 of the nozzle 311.
- the groove 310 may be machined on the surface of the roller 309 to have a specific depth and width for the type of coating material and the substrate to be coated. When coating material is pushed on one side of the roller 309 surface by means of the nozzle 311 , the groove 310 gets completely filled with ink material.
- a doctor blade (not shown) positioned closely to the roller surface removes excess coating material, leaving the coating material only in the depth of the groove 310.
- the dispenser 308 includes a tray 312 for collecting excess coating material scraped with the doctor blade.
- the substrate 371 is positioned on the opposite side of the roller 309 (see FIG. 2B) 1 with the edge of the substrate within the groove 310 touching the surface of the roller 309. Once the substrate 371 spins around the axis of the chuck 303 (see FIG. 3B), the substrate 371 will collect ink on its perimeter edge.
- a slider mechanism 313 allows the dispenser 308 to be moved towards and away from the substrate 371 along a single axis.
- FIG. 5 shows an exploded view of the coating material dispenser 308 in accordance with an embodiment of the present invention.
- the dispenser 308 is mounted on the slider mechanism 313.
- the pneumatic main cylinder 314 pushes the dispenser 308 in coating position towards the edge of the substrate 371.
- an auxiliary cylinder may be used to apply an opposite force to the cylinder 314.
- the dispenser 308 is positioned back to its starting position away from the substrate 371 at the end of the edge coating process.
- Other components shown in FIG. 5 have been previously discussed with reference to FIGS. 4A and 4B.
- FIGS. 6A and 6B schematically show the principle of operation of the main cylinder 314 in accordance with an embodiment of the present invention.
- the cylinder 314 includes a chamber 451 and a portion 452. In the example of FIGS.
- the main cylinder 314 is configured to keep the pressure P1 and thus the force applied to the substrate 371 by the roller 309 relatively constant independent of the profile of the substrate 371.
- the portion 452 on the other side of the chamber 451 is at atmospheric pressure. Accordingly, no pressure or resistance is applied in the portion 452.
- the piston 454 is mechanically coupled to the slider mechanism 313 supporting the dispenser 308 (see FIG. 5).
- the cylinder 314 applies an active force on the dispenser 308 pushing the roller 309 towards the edge of the substrate 371.
- the dispenser 308 is pushed out and the cylinder 314 is pressed by a force directly coming from the edge of the substrate 371 as illustrate in FIG. 6B.
- the air volume in chamber 452 bottom chamber decreases, making pressure P/ tend to increase. At this point some air starts flowing out from the vent 453, keeping the pressure P1 relatively constant.
- FIGS. 7A, 7B, 7C, and 7D show features of the coating material dispenser 308 for controlling the coating width and thickness uniformity of coating material applied on the substrate edge, in accordance with an embodiment of the present invention.
- the rotational speed of the substrate and the amount of coating material transferred from the grove 310 to the substrate edge.
- the speed of the motor 307 rotating the chuck 303 is controlled and small knurls 315 are machined in the groove 310.
- FIG. 7A shows the knurls 315 on the surface (“contact surface") of the roller 309 contacting the substrate edge during edge coating.
- the knurls 315 prevent the substrate edge from sliding with respect to the contact surface, increasing the friction at the interface between the contact surface and the substrate in the groove 310.
- the width (see 502) and depth (see 501) of the groove 310 and the position of the groove 310 with respect to the substrate edge control the amount of coating material applied on the edge of the substrate.
- the position of the groove 310 relative to the upper surface of the substrate may be adjusted.
- the roller 309 is raised to a height H1 (e.g., 32mm) relative to the slider mechanism 313 to position the groove 310 such that the substrate 371 is on the bottom portion of the groove 310.
- the roller 309 is lowered to a height H2 (e.g., 28.5 mm) relative to the slider mechanism 313 to position the groove 310 such that the substrate 371 is on the upper portion of the groove 310.
- the roller 309 may be continuously adjusted such that the substrate 371 is between the upper and lower portions of the groove 310. Doing so controls the coating material compression between the upper surface of the substrate 371 and the wall of the groove 310 and thus the width of the coating material on the edge of the substrate 371. The more the coating material is squeezed, the more will overflow out of the groove 310.
- the aforementioned components of the edge coating tool 300 are particularly suited for automated control.
- a computer (not shown) with appropriate control software and data acquisition system may control the speed and direction of motor components and actuate pneumatic components.
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Photovoltaic Devices (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2008359693A AU2008359693A1 (en) | 2008-07-21 | 2008-07-21 | Edge coating apparatus and methods for non-circular solar cell substrates |
KR1020117003760A KR101555081B1 (en) | 2008-07-21 | 2008-07-21 | Edge coating apparatus and methods for non-circular solar cell substrates |
JP2011520010A JP5329664B2 (en) | 2008-07-21 | 2008-07-21 | Edge coating apparatus and method for non-circular solar cell substrate |
DE112008003942T DE112008003942T5 (en) | 2008-07-21 | 2008-07-21 | Device and method for coating edges of non-circular solar cell substrates |
PCT/US2008/008863 WO2010011200A1 (en) | 2008-07-21 | 2008-07-21 | Edge coating apparatus and methods for non-circular solar cell substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/US2008/008863 WO2010011200A1 (en) | 2008-07-21 | 2008-07-21 | Edge coating apparatus and methods for non-circular solar cell substrates |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2010011200A1 true WO2010011200A1 (en) | 2010-01-28 |
Family
ID=41570509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2008/008863 WO2010011200A1 (en) | 2008-07-21 | 2008-07-21 | Edge coating apparatus and methods for non-circular solar cell substrates |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP5329664B2 (en) |
KR (1) | KR101555081B1 (en) |
AU (1) | AU2008359693A1 (en) |
DE (1) | DE112008003942T5 (en) |
WO (1) | WO2010011200A1 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8322300B2 (en) * | 2008-02-07 | 2012-12-04 | Sunpower Corporation | Edge coating apparatus with movable roller applicator for solar cell substrates |
US20150326178A1 (en) * | 2010-02-10 | 2015-11-12 | Jose Francisco Capulong | Chucks for supporting solar cell in hot spot testing |
CN107983602A (en) * | 2017-12-04 | 2018-05-04 | 安徽家思特涂料有限责任公司 | The automatic transfer sizing integral process of plate surface coating |
US10435589B2 (en) | 2016-03-03 | 2019-10-08 | Robatech Ag | Device and method for applying adhesive to a substrate |
CN110302919A (en) * | 2019-05-13 | 2019-10-08 | 杭州谈笑电子商务有限公司 | A kind of stem cell cultivation ware |
US11598018B2 (en) | 2018-03-30 | 2023-03-07 | Sunpower Corporation | Dual wafer plating fixture for a continuous plating line |
WO2023125394A1 (en) * | 2021-12-31 | 2023-07-06 | 苏州太阳井新能源有限公司 | Edge coating apparatus and coating method for photovoltaic cell sheets |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101531529B1 (en) * | 2015-03-17 | 2015-06-26 | 엘지전자 주식회사 | Mobile terminal and controlling method thereof, and recording medium thereof |
KR102213240B1 (en) * | 2019-06-18 | 2021-02-08 | (주)한보이앤씨 | Coating apparatus for finishing the cutting edge |
CN112474171B (en) * | 2020-11-20 | 2021-08-24 | 济南连昌机械有限公司 | Glass plate edge bonding machine |
JP7137239B2 (en) * | 2020-12-22 | 2022-09-14 | 株式会社エナテック | Coating device and coating method |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4135290A (en) * | 1977-06-06 | 1979-01-23 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method for fabricating solar cells having integrated collector grids |
US6231327B1 (en) * | 1999-07-02 | 2001-05-15 | Mastercraft Industries, L.P. | Composite extrusion and patterning machine for irregularly curved edges and method of manufacture thereof |
US6265328B1 (en) * | 1998-01-30 | 2001-07-24 | Silicon Genesis Corporation | Wafer edge engineering method and device |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5212667U (en) * | 1975-07-15 | 1977-01-28 | ||
JPS6329577Y2 (en) * | 1980-02-18 | 1988-08-09 | ||
JPS6332676U (en) * | 1986-08-13 | 1988-03-02 | ||
JPH01176469A (en) * | 1987-12-28 | 1989-07-12 | Nissha Printing Co Ltd | Apparatus for coating side surface of thin plate |
US5131349A (en) * | 1990-04-05 | 1992-07-21 | Libbey-Owens-Ford Co. | Application of primer coating |
JPH0567357U (en) * | 1992-02-20 | 1993-09-07 | エヌ・オー・ケー・メグラスティック株式会社 | Adhesive applicator |
JPH07263474A (en) * | 1994-03-22 | 1995-10-13 | Toshiba Corp | Coating apparatus for semiconductor wafer |
BR9914523A (en) * | 1998-10-14 | 2001-07-03 | Designetics | Deformation mechanism |
JP2002118276A (en) * | 2000-10-06 | 2002-04-19 | Sharp Corp | Solar battery module and its manufacturing method |
JP2004127979A (en) * | 2002-09-30 | 2004-04-22 | Nikon Corp | Substrate supporting device, and inspection apparatus and aligner having the same |
JP2004337778A (en) * | 2003-05-16 | 2004-12-02 | Fuji Photo Film Co Ltd | Edge coating dispenser |
US8662008B2 (en) * | 2008-02-07 | 2014-03-04 | Sunpower Corporation | Edge coating apparatus for solar cell substrates |
-
2008
- 2008-07-21 DE DE112008003942T patent/DE112008003942T5/en not_active Ceased
- 2008-07-21 WO PCT/US2008/008863 patent/WO2010011200A1/en active Application Filing
- 2008-07-21 AU AU2008359693A patent/AU2008359693A1/en not_active Abandoned
- 2008-07-21 KR KR1020117003760A patent/KR101555081B1/en active IP Right Grant
- 2008-07-21 JP JP2011520010A patent/JP5329664B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4135290A (en) * | 1977-06-06 | 1979-01-23 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Method for fabricating solar cells having integrated collector grids |
US6265328B1 (en) * | 1998-01-30 | 2001-07-24 | Silicon Genesis Corporation | Wafer edge engineering method and device |
US6231327B1 (en) * | 1999-07-02 | 2001-05-15 | Mastercraft Industries, L.P. | Composite extrusion and patterning machine for irregularly curved edges and method of manufacture thereof |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8322300B2 (en) * | 2008-02-07 | 2012-12-04 | Sunpower Corporation | Edge coating apparatus with movable roller applicator for solar cell substrates |
US20150326178A1 (en) * | 2010-02-10 | 2015-11-12 | Jose Francisco Capulong | Chucks for supporting solar cell in hot spot testing |
US9435848B2 (en) * | 2010-02-10 | 2016-09-06 | Sunpower Corporation | Chucks for supporting solar cell in hot spot testing |
US10435589B2 (en) | 2016-03-03 | 2019-10-08 | Robatech Ag | Device and method for applying adhesive to a substrate |
CN107983602A (en) * | 2017-12-04 | 2018-05-04 | 安徽家思特涂料有限责任公司 | The automatic transfer sizing integral process of plate surface coating |
CN107983602B (en) * | 2017-12-04 | 2021-04-30 | 安徽家思特涂料有限责任公司 | Automatic transfer and shaping integrated process for coating surface of plate |
US11598018B2 (en) | 2018-03-30 | 2023-03-07 | Sunpower Corporation | Dual wafer plating fixture for a continuous plating line |
US12024785B2 (en) | 2018-03-30 | 2024-07-02 | Maxeon Solar Pte. Ltd. | Dual wafer plating fixture for a continuous plating line |
CN110302919A (en) * | 2019-05-13 | 2019-10-08 | 杭州谈笑电子商务有限公司 | A kind of stem cell cultivation ware |
WO2023125394A1 (en) * | 2021-12-31 | 2023-07-06 | 苏州太阳井新能源有限公司 | Edge coating apparatus and coating method for photovoltaic cell sheets |
Also Published As
Publication number | Publication date |
---|---|
AU2008359693A1 (en) | 2010-01-28 |
JP2011528618A (en) | 2011-11-24 |
DE112008003942T5 (en) | 2011-06-09 |
KR101555081B1 (en) | 2015-09-22 |
JP5329664B2 (en) | 2013-10-30 |
KR20110043690A (en) | 2011-04-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2010011200A1 (en) | Edge coating apparatus and methods for non-circular solar cell substrates | |
US10493588B2 (en) | Polishing apparatus and polishing method | |
KR101606215B1 (en) | Control system for non-contact edge coating apparatus for solar cell substrates | |
JP5416139B2 (en) | Non-contact edge coating equipment for solar cell substrates | |
KR20100020432A (en) | Method and apparatus for joining protective tape to semiconductor wafer | |
KR102146999B1 (en) | Adhesive tape joining method and adhesive tape joining apparatus | |
US20100144080A1 (en) | Method and apparatus to transfer coat uneven surface | |
JP2008034709A (en) | Method for sticking adhesive tape to semiconductor wafer, and method for detaching protective tape from semiconductor wafer | |
JP2008034710A (en) | Method for sticking adhesive tape to semiconductor wafer, and method for detaching protective tape from semiconductor wafer | |
KR101042997B1 (en) | soldering apparatus and soldering method for manufacturing solar cell module | |
KR20200024188A (en) | Method and apparatus for mounting semiconductor wafer | |
WO2011102201A1 (en) | Application method and application device | |
JP5015857B2 (en) | Protective tape pasting device | |
TW201533205A (en) | Adhesive tape attaching method and adhesive tape attaching apparatus | |
KR102494032B1 (en) | Apparatus for debonding substrate | |
JP5050374B2 (en) | Manufacturing method of semiconductor device | |
CN108889566B (en) | Solid wax sticking machine | |
JP4845742B2 (en) | Equipment for applying liquid dopant solutions to wafers | |
JP6298381B2 (en) | Substrate laminating method and substrate laminating apparatus | |
KR20170027289A (en) | Protective tape joining method and protective tape joining apparatus | |
US20240165651A1 (en) | Chain-type roller coating apparatus and use thereof | |
JP2006237085A (en) | Semiconductor wafer bonding method and apparatus thereof | |
CN114243080A (en) | Battery material loading rubber coating equipment | |
KR20210158282A (en) | Film Taping Device for PCB Substrate | |
WO2017065005A1 (en) | Adhesive tape affixing method and adhesive tape affixing device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08780274 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008359693 Country of ref document: AU |
|
ENP | Entry into the national phase |
Ref document number: 2011520010 Country of ref document: JP Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 2008359693 Country of ref document: AU Date of ref document: 20080721 Kind code of ref document: A |
|
ENP | Entry into the national phase |
Ref document number: 20117003760 Country of ref document: KR Kind code of ref document: A |
|
RET | De translation (de og part 6b) |
Ref document number: 112008003942 Country of ref document: DE Date of ref document: 20110609 Kind code of ref document: P |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 08780274 Country of ref document: EP Kind code of ref document: A1 |