WO2009157281A1 - ガラス溶着方法 - Google Patents

ガラス溶着方法 Download PDF

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Publication number
WO2009157281A1
WO2009157281A1 PCT/JP2009/060157 JP2009060157W WO2009157281A1 WO 2009157281 A1 WO2009157281 A1 WO 2009157281A1 JP 2009060157 W JP2009060157 W JP 2009060157W WO 2009157281 A1 WO2009157281 A1 WO 2009157281A1
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WIPO (PCT)
Prior art keywords
glass
glass layer
temperature
layer
laser beam
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PCT/JP2009/060157
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English (en)
French (fr)
Japanese (ja)
Inventor
聡 松本
敏光 和久田
丈典 大宮
Original Assignee
浜松ホトニクス株式会社
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Priority to JP2009549320A priority Critical patent/JP5535655B2/ja
Publication of WO2009157281A1 publication Critical patent/WO2009157281A1/ja

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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing

Definitions

  • the present invention relates to a glass welding method for producing a glass welded body by welding glass members together.
  • a glass layer containing a laser light-absorbing pigment is baked on one glass member along the planned welding region, and then the other glass is placed on the glass member via the glass layer.
  • a method is known in which one glass member and the other glass member are welded by overlapping the members and irradiating a laser beam along a planned welding region.
  • the glass layer is fixed to the glass member by removing the organic solvent and the binder from the paste layer containing the glass frit, the laser light absorbing pigment, the organic solvent and the binder. Then, the technique which fuses a glass layer by heating the glass member which the glass layer fixed in the baking furnace, and bakes a glass layer on a glass member is common (for example, refer patent document 1).
  • the glass layer fixed to the glass member is irradiated with laser light.
  • Has proposed a technique for melting a glass layer and baking the glass layer on a glass member see, for example, Patent Document 2).
  • the glass layer when the glass layer is baked on the glass member by laser light irradiation, the glass member may be damaged during baking or subsequent welding of the glass members, such as cracks in the glass member.
  • this invention is made
  • the inventor of the present invention leads to breakage of the glass member due to laser light irradiation, as shown in FIG. It has been found out that when the temperature of the glass layer exceeds the melting point Tm, the laser light absorption rate of the glass layer is rapidly increased. That is, in the glass layer fixed to the glass member, light scattering exceeding the absorption characteristics of the laser light absorbing pigment occurs due to the voids due to the removal of the binder and the particle properties of the glass frit, resulting in a low laser light absorption rate. (For example, it looks whitish in visible light). Therefore, as shown in FIG.
  • the glass layer actually reaches a temperature Ta higher than the crystallization temperature Tc, as shown in FIG.
  • the portion of the glass layer located on the opposite side of the glass member to be baked that is, the portion of the glass layer located on the glass member side to be welded
  • the melting point of that portion becomes high. Therefore, at the time of subsequent welding of the glass members, it is necessary to increase the irradiation power and irradiate the laser beam in order to melt the portion located on the glass member side to be welded in the glass layer.
  • the glass member is cracked by heat shock due to excessive heat input.
  • the present inventor has further studied based on this finding and has completed the present invention. It should be noted that the color change of the glass layer under visible light when the laser light absorption rate of the glass layer is increased by melting the glass layer is not limited to that changing from a whitish state to a blackish state, for example, a near infrared laser Some laser-absorbing pigments for light exhibit a green color when the glass layer melts.
  • the glass welding method according to the present invention is a glass welding method for producing a glass welded body by welding a first glass member and a second glass member, and comprises glass powder, a laser light absorbing material, and an organic solvent. And a step of arranging the glass layer formed by removing the organic solvent and the binder from the paste layer containing the binder on the first glass member along the planned welding region, and the temperature of the glass layer is higher than the melting point The glass layer is melted by irradiating the first laser beam along the planned welding region while controlling the irradiation conditions so as to be higher and lower than the crystallization temperature, and the glass layer is applied to the first glass member.
  • a step of fixing a second glass member is superimposed on the first glass member on which the glass layer has been fixed via the glass layer, and the second laser beam is irradiated along the planned welding region. Characterized in that it comprises the step of welding the first glass member and the second glass member.
  • this glass welding method when the glass layer is melted by irradiating the first laser beam along the planned welding region, irradiation is performed so that the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature.
  • the glass layer is fixed on the first glass member by controlling the conditions. At the time of fixing the glass layer, the laser light absorption rate of the glass layer rapidly increases due to melting of the glass layer, but the irradiation conditions are set so that the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature. Since it controls, it will be suppressed that a glass layer will be in a state with excessive heat input.
  • the irradiation conditions may be controlled so that the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature based on the heat radiation emitted from the glass layer.
  • the irradiation conditions are ensured so that the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature. It becomes possible to control to.
  • irradiation conditions are set such that the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature based on the reflected light of the first laser beam reflected by the glass layer.
  • the light reflectance by the reflected light is constant until the temperature of the glass layer reaches the melting point, and shows a decreasing tendency when the temperature of the glass layer exceeds the melting point, and then the temperature of the glass layer exceeds the crystallization temperature and crystallizes. It has the characteristic of showing an increasing trend as the process progresses.
  • the irradiation of the first laser light is controlled based on the reflected light that is the reference of the light reflectance having such characteristics, the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature. As a result, the irradiation conditions can be more reliably controlled.
  • the irradiation condition is the irradiation power of the first laser beam, and the irradiation power is increased or decreased so that the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature. It is preferable to make it. In this case, since the control is performed by increasing or decreasing the irradiation power, it is possible to reliably control the temperature of the glass layer to be higher than the melting point and lower than the crystallization temperature.
  • the irradiation condition is the traveling speed of the first laser light with respect to the glass layer, and the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature. It is preferable to increase or decrease the speed.
  • the control since the control is performed by increasing / decreasing the traveling speed of the first laser beam, it is possible to reliably control the temperature of the glass layer to be higher than the melting point and lower than the crystallization temperature.
  • the traveling speed of the first laser light is often increased. The time required for fixing can be shortened.
  • the “advance speed of the first laser light relative to the glass layer” means the relative advance speed of the first laser light, and when the first laser light is fixed and the glass layer moves, glass is moved.
  • the case where the first laser beam moves while the layer is fixed includes the case where each of the first laser beam and the glass layer moves.
  • a glass layer fixing device is a glass layer for fixing a glass layer formed by removing an organic solvent and a binder from a paste layer containing glass powder, a laser light absorber, an organic solvent and a binder to a glass member.
  • a fixing device for irradiating a glass layer disposed on a glass member with a laser beam; and a laser beam irradiation means for causing the temperature of the glass layer to be higher than a melting point and lower than a crystallization temperature.
  • an irradiation condition control means for controlling the irradiation condition.
  • this glass layer fixing device when irradiating laser light from the laser light irradiation means to melt the glass layer, irradiation condition control is performed so that the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature.
  • the irradiation conditions are controlled by means to fix the glass layer on the first glass member.
  • the laser light absorptance of the glass layer rapidly increases, but the laser light irradiation means is controlled so that the temperature of the glass layer is higher than the melting point and lower than the crystallization temperature. Therefore, it is suppressed that a glass layer will be in a state with excessive heat input. Thereby, even if the glass layer is fixed to the glass member with the laser beam from the laser beam irradiation means, the glass member is cracked at the time of fixing the glass layer or at the subsequent welding of the glass members. It can be prevented from being damaged.
  • the present invention it is possible to prevent the glass members from being damaged and to weld the glass members efficiently.
  • FIG. 1 is a perspective view of a glass welded body manufactured by the glass welding method of the first embodiment.
  • the glass welded body 1 includes a glass member (first glass member) 4 and a glass member (second glass member) through a glass layer 3 formed along the planned welding region R. ) 5 is welded.
  • the glass members 4 and 5 are, for example, rectangular plate-shaped members having a thickness of 0.7 mm made of alkali-free glass, and the welding planned region R is set in a rectangular ring shape along the outer edges of the glass members 4 and 5.
  • the glass layer 3 is made of, for example, low-melting glass (vanadium phosphate glass, lead borate glass, etc.), and is formed in a rectangular ring shape along the planned welding region R.
  • a paste layer 6 is formed on the surface 4a of the glass member 4 along the planned welding region R by applying a frit paste by a dispenser, screen printing or the like.
  • the frit paste is, for example, powdery glass frit (glass powder) 2 made of amorphous low-melting glass (vanadium phosphate glass, lead borate glass, etc.), or an inorganic pigment such as iron oxide.
  • An organic solvent such as luminescent pigment (laser light absorbing material), amyl acetate and the like, and a binder which is a resin component (acrylic or the like) that thermally decomposes below the softening point temperature of glass.
  • the frit paste may be obtained by kneading a glass frit (glass powder) obtained by powdering a low-melting glass to which a laser light absorbing pigment (laser light absorbing material) is added in advance, an organic solvent, and a binder. That is, the paste layer 6 includes the glass frit 2, the laser light absorbing pigment, the organic solvent, and the binder.
  • the paste layer 6 is dried to remove the organic solvent, and the paste layer 6 is heated to remove the binder, whereby the glass layer 3 is formed on the surface 4a of the glass member 4 along the planned welding region R. Secure.
  • the glass layer 3 fixed to the surface 4a of the glass member 4 has light scattering exceeding the absorption characteristics of the laser light absorbing pigment due to the voids due to the removal of the binder and the particle property of the glass frit 2, and the laser light absorption rate is increased. It is in a low state (eg, it looks whitish in visible light).
  • the melting point and crystallization temperature of the glass layer 3 are low melting point glass contained in the glass layer 3 (glass frit contained in the paste layer 6). 2) melting point and crystallization temperature.
  • the glass member 4 is placed on the surface 11 a (here, the polished surface) of the plate-like mounting table 11 of the glass layer fixing device 10 via the glass layer 3.
  • the glass layer 3 formed by removing the organic solvent and the binder from the paste layer 6 is disposed between the glass member 4 and the mounting table 11 so as to be along the planned welding region R.
  • the glass layer fixing device 10 includes a mounting table 11 on which the glass member 4 on which the glass layer 3 is formed, and a laser beam (first laser beam) by combining the light condensing spot on the glass layer 3.
  • the glass layer fixing device 10 is driven, and as shown in FIG. 3 and FIG.
  • the glass layer 3 is melted by irradiating the laser beam L ⁇ b> 1 along and the glass layer 3 is baked on the glass member 4.
  • the temperature of the glass layer 3 at which the laser light absorptance rapidly increases due to melting is higher than the melting point and higher than the crystallization temperature.
  • the control unit 16 controls the irradiation power (irradiation conditions) of the laser light L1 as described below so that the temperature becomes low.
  • the irradiation of the laser beam L1 when the irradiation of the laser beam L1 is started, first, it is confirmed whether or not the temperature of the glass layer 3 is within a predetermined range higher than the melting point Tm and lower than the crystallization temperature Tc (S1). If the temperature of the glass layer 3 is within this predetermined range, the irradiation power of the laser beam L1 is maintained as it is, and the irradiation of the laser beam L1 along the planned welding region R is continued (S2). On the other hand, if the temperature of the glass layer 3 is outside this predetermined range, it is next determined whether the temperature of the glass layer 3 is higher or lower than the predetermined range (S3), and if higher, the irradiation power of the laser light L1 is set.
  • a certain amount is reduced (S4), and if low, the irradiation power of the laser beam L1 is increased by a certain amount (S5), and the irradiation of the laser beam L1 along the planned welding region R is continued. Such control is repeated until baking along the planned welding region R of the glass layer 3 is completed (S6).
  • the glass layer 3 disposed between the glass member 4 and the mounting table 11 is melted and recrystallized in a state where crystallization is suppressed. It solidifies and the glass layer 3 is baked on the surface 4a of the glass member 4.
  • the glass layer 4 since the baking that irradiates the laser beam L1 from the glass member 4 side is performed, the glass layer 4 is securely fixed to the glass member 4 in addition to the glass member 4. Crystallization of the surface 3a of the glass layer 3 which becomes a welding surface when 5 is welded together is further suppressed.
  • the glass layer 3 baked on the surface 4a of the glass member 4 is filled with voids due to melting of the glass frit 2 and its particle property is lost, the absorption characteristic of the laser light absorbing pigment appears remarkably, and the laser light absorption rate Becomes high (eg, it looks dark in visible light).
  • the glass member 4 on which the glass layer 3 has been baked is removed from the mounting table 11.
  • the difference in linear expansion coefficient between the glass frit 2 and the mounting table 11 is larger than the difference in linear expansion coefficient between the glass frit 2 and the glass member 4
  • the glass layer 3 is fixed to the mounting table 11. It is supposed not to.
  • the glass layer 3 baked on the surface 4a of the glass member 4 has the surface 11a of the mounting table 11 polished, the unevenness of the surface 3a opposite to the glass member 4 is flattened. ing.
  • the glass member 5 is superimposed on the glass member 4 on which the glass layer 3 is baked through the glass layer 3. Since the surface 3a of the glass layer 3 is planarized at this time, the surface 5a of the glass member 5 contacts the surface 3a of the glass layer 3 without a gap.
  • the overlapped glass members 4 and 5 are placed on a glass member welding device (not shown), and as shown in FIG.
  • the laser beam L2 is irradiated along the planned welding region R.
  • the glass members 4 and 5 are moved with respect to the laser beam L2 by the glass member welding apparatus, and irradiation is performed.
  • the laser beam L2 is absorbed by the glass layer 3 in a state where the laser beam absorption rate is high over the entire circumference of the planned welding region R, and the glass layer 3 and its peripheral part (the surfaces 4a, 4 of the glass members 4 and 5). 5a portion) is melted and re-solidified, and the glass member 4 and the glass member 5 are welded.
  • the surface 5a of the glass member 5 is in contact with the surface 3a of the glass layer 3 without a gap, and the glass layer 3 baked on the glass member 4 is formed in a state in which crystallization is suppressed over the entire circumference of the planned welding region R. Therefore, the glass member 4 and the glass member 5 are uniformly welded along the planned welding region R without increasing the melting point of the glass layer 3, and damage is prevented.
  • the temperature of the glass layer 3 is the melting point.
  • the glass layer 3 is fixed to the glass member 4 by controlling the irradiation condition of the laser beam L1 so as to be higher than Tm and lower than the crystallization temperature Tc.
  • the laser light absorption rate of the glass layer 3 is rapidly increased by melting of the glass layer 3, but the temperature of the glass layer 3 is higher than the melting point Tm and lower than the crystallization temperature Tc.
  • the irradiation conditions of the laser beam L1 are controlled, it is suppressed that the glass layer 3 will be in the state of excessive heat input.
  • the glass members 4, 5 are fixed when the glass layer 3 is fixed or when the glass members 4, 5 are subsequently welded together. It is possible to prevent the glass members 4 and 5 from being damaged, for example, cracks are generated. Therefore, according to this glass welding method, it becomes possible to prevent the glass members 4 and 5 from being damaged and to weld the glass members 4 and 5 efficiently.
  • the laser beam L1 is set so that the temperature of the glass layer 3 is higher than the melting point Tm and lower than the crystallization temperature Tc based on the heat radiation emitted from the glass layer 3.
  • the irradiation conditions are controlled.
  • the temperature of the glass layer 3 is measured by measuring the heat radiation emitted from the glass layer 3, the temperature of the glass layer 3 is higher than the melting point Tm and lower than the crystallization temperature Tc. It becomes possible to control the irradiation conditions of the laser beam L1 with certainty.
  • the laser beam L1 is irradiated to the glass layer 3 from the glass member 4 side. Therefore, the interface portion between the glass member 4 and the glass layer 3 is sufficiently heated, and the melting temperature on the surface 3a side of the glass layer 3 is controlled to be lower than the melting temperature on the interface portion side. Therefore, not only the glass layer 3 can be firmly baked and fixed on the glass member 4, but also the portion of the glass layer 3 located on the side of the glass member 5 to be welded (the surface 3a portion of the glass layer 3) has excessive heat input. Thus, crystallization can be more reliably suppressed. [Second Embodiment]
  • the temperature of the glass layer 3 is higher than the melting point Tm and the crystallization temperature Tc based on the reflected light of the laser light L1 reflected by the glass layer 3. This is different from the first embodiment in that the irradiation power of the laser beam L1 is controlled to be low.
  • the laser beam reflectance of the laser beam L1 has the following characteristics. That is, as shown in FIG. 8, until the temperature of the glass layer 3 reaches the melting point Tm, the laser beam reflectance is substantially constant, and the intensity of the reflected light is also substantially constant. On the other hand, when the temperature of the glass layer 3 exceeds the melting point Tm and the glass layer 3 starts to melt, the scattering due to binder holes (bubbles) and the particle nature of the glass frit 2 is reduced and the light absorption rate is increased by the laser absorbing pigment. As a result, the laser beam reflectance tends to gradually decrease with an increase in temperature, and the intensity of the reflected light also gradually decreases.
  • the reflectance of the laser beam becomes substantially constant for a while, and when the temperature of the glass layer 3 rises to the crystallization temperature Tc, crystallization starts and crystallization occurs. As the scattering increases, the laser beam reflectance tends to increase again as the temperature rises, and the intensity of the reflected light gradually increases. Thereafter, when the temperature of the glass layer 3 becomes Tc1 and the glass layer 3 is completely crystallized, the laser light reflectance becomes substantially constant again, and the intensity of the reflected light becomes substantially constant.
  • the glass layer 3 is baked on the glass member 4 using the intensity of the reflected light having such characteristics. The steps other than baking in the glass welding method are the same as those in the first embodiment.
  • the glass layer fixing device 20 used in this embodiment will be described.
  • the glass layer fixing device 20 includes a light receiving head 23, a reflected light monitor 24, and a control in addition to the mounting table 11, the laser light irradiation unit 12, and the XY stage 15 used in the first embodiment.
  • Part (irradiation condition control means) 26 is provided.
  • the light receiving head 23 receives the reflected light from the glass layer 3 by the irradiation of the laser light L 1, and outputs intensity information of the received reflected light to the reflected light monitor 24.
  • the reflected light monitor 24 performs reflectance conversion based on the intensity information of the reflected light from the light receiving head 23 and the irradiation power information from the control unit 26, and outputs the intensity information of the reflected light and the laser beam reflectance to the control unit 26.
  • the control unit 26 controls the laser light irradiation unit 12 and the XY stage 15 based on the input reflected light intensity information and laser light reflectance.
  • the glass layer fixing device 20 is driven, a focused spot is aligned with the glass layer 3, and the laser beam L 1 is irradiated along the planned welding region R to melt the glass layer 3.
  • the glass layer 3 is baked on the glass member 4.
  • the temperature of the glass layer 3 at which the laser light absorption rate has suddenly increased due to melting is higher than the melting point Tm and the crystal
  • the control unit 26 controls the irradiation power of the laser light L1 as follows so that the temperature becomes lower than the activation temperature Tc.
  • the irradiation power of the laser beam L1 from the laser beam irradiation unit 12 is gradually increased so that the glass layer 3 is not suddenly crystallized. (S11). Then, it is confirmed whether the intensity of the reflected light received by the light receiving head 23 is within a predetermined range where the temperature of the glass layer 3 does not exceed the melting point Tm (S12). Since the laser beam reflectance is constant until the temperature reaches the melting point Tm, it is confirmed by measuring the intensity of the reflected light that the temperature of the glass layer 3 does not exceed the melting point Tm.
  • the irradiation power of the laser light L1 is maintained as it is, and the irradiation of the laser light L1 along the planned welding region R is continued (S13).
  • the temperature of the glass layer exceeded the melting point Tm, and the laser beam absorptance increased. In this case, the laser beam reflectance from the glass layer 3 is obtained, and it is determined whether or not the laser beam reflectance is lowered (S14).
  • step S14 if the laser beam reflectance tends to decrease, the irradiation power of the laser beam L1 is increased by a certain amount (S15), and the temperature of the glass layer 3 is between the melting point Tm and the crystallization temperature Tc.
  • the laser beam L1 is controlled so as to be within the optimum melting temperature range Tm1 to Tc (see FIG. 8), and the irradiation of the laser beam L1 along the planned welding region R is continued.
  • the optimum melting temperature range Tm1 to Tc coincides with the region where the laser light reflectance is switched from the decreasing tendency to the increasing tendency, and the laser light reflectance is substantially constant. .
  • the laser light reflectance is not lowered, it is determined whether the irradiation power of the laser light reaching the predetermined crystallization temperature Tc, that is, the upper limit value or more (S16). If the irradiation power of the laser beam L1 is equal to or higher than the upper limit value, the glass layer 3 is likely to be crystallized (S17), and the processing is stopped (S18). On the other hand, if the irradiation power of the laser beam L1 is smaller than the upper limit value, the power of the laser beam is increased (S15). Such control is repeated until the baking of the glass layer 3 is completed along the planned welding region R (S19).
  • the temperature of the glass layer 3 is higher than the melting point Tm and crystallized based on the light reflection of the laser light L1 reflected by the glass layer 3.
  • the irradiation power is controlled so that the temperature is lower than the temperature Tc.
  • the laser beam reflectance by the reflected light is constant until the temperature of the glass layer 3 reaches the melting point Tm, and shows a tendency to decrease when the temperature of the glass layer 3 exceeds the melting point Tm. It has a characteristic of showing an increasing tendency as crystallization proceeds beyond the crystallization temperature Tc.
  • the irradiation of the laser light L1 is controlled based on the reflected light that is the reference of the laser light reflectance having such characteristics, the temperature of the glass layer 3 is higher than the melting point Tm and lower than the crystallization temperature Tc.
  • the irradiation power can be reliably controlled so as to reach the temperature.
  • the change region in which the laser beam reflectance tends to increase from the decreasing tendency coincides with the optimum melting temperature range Tm1 to Tc, the laser beam L1 is controlled on the basis of the laser beam reflectance, so that the glass The melting of the layer 3 can be further optimized.
  • the glass members 4 and 5 that are made thinner are used. Therefore, the material of the glass members 4 and 5 should be less likely to be cracked. Low expansion glass is often selected.
  • a filler made of ceramics or the like is added to the glass layer 3. In a large amount. If the glass layer 3 contains a large amount of filler, the laser light absorption rate of the glass layer 3 will change much more before and after the irradiation with the laser light L1. Therefore, the glass welding method described above is particularly effective when low expansion glass is selected as the material of the glass members 4 and 5.
  • the present invention is not limited to the embodiment described above.
  • the amount of heat input to the glass layer 3 that moves at a constant speed is adjusted by changing the irradiation power of the laser beam L1, which is the irradiation condition.
  • the amount of heat input to the glass layer 3 is adjusted by changing the relative irradiation speed of the laser light L1 (that is, the traveling speed of the laser light L1 with respect to the glass layer 3) as the irradiation condition while keeping the irradiation power of the light L1 constant. You may do it.
  • the control is performed by increasing or decreasing the relative speed of the laser light L1, the temperature of the glass layer 3 can be reliably controlled within a predetermined range.
  • the amount of heat input by laser irradiation is often reduced after the melting of the glass layer 3 has progressed and the laser light absorption rate has increased, the relative speed of the laser light L1 is often increased. 3 can be shortened.
  • the glass layer 3 is irradiated with the laser light L1 through the glass member 4 side.
  • the glass layer 3 may be directly irradiated with the laser light L1.
  • the laser beams L1 and L2 are fixed and the glass members 4 and 5 are moved by the XY stage 15 or the like. 4 and 5, the glass members 4 and 5 may be fixed and the laser beams L1 and L2 may be moved, or the glass members 4 and 5 and the laser beams L1 and L2 may be moved. May be moved respectively.
  • the laser light L1 from the laser light irradiation unit 12 for melting the glass layer 3 is used to obtain the intensity of the reflected light and the laser light reflectance.
  • a dedicated laser beam irradiation unit for obtaining the laser beam reflectance may be provided, and the laser beam from such a dedicated laser beam irradiation unit may be used.
  • the present invention it is possible to prevent the glass members from being damaged and to weld the glass members efficiently.
  • SYMBOLS 1 Glass welded body, 2 ... Glass frit (glass powder), 3 ... Glass layer, 4 ... Glass member (1st glass member), 5 ... Glass member (2nd glass member), 6 ... Paste layer, 10 , 20 ... Glass layer fixing device, 12 ... Laser light irradiation unit (laser light irradiation means), 13, 23 ... Light receiving head, 14 ... Radiation thermometer, 15 ... XY stage, 16, 26 ... Control unit (irradiation condition control means) ), 24... Reflected light monitor, R... Expected welding region, L 1... Laser light (first laser light), L 2... Laser light (second laser light).
PCT/JP2009/060157 2008-06-23 2009-06-03 ガラス溶着方法 WO2009157281A1 (ja)

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WO2011010489A1 (ja) * 2009-07-23 2011-01-27 旭硝子株式会社 封着材料層付きガラス部材の製造方法及び製造装置、並びに電子デバイスの製造方法
WO2011065103A1 (ja) * 2009-11-25 2011-06-03 浜松ホトニクス株式会社 ガラス溶着方法及びガラス層定着方法
JP2011246320A (ja) * 2010-05-28 2011-12-08 Hamamatsu Photonics Kk ガラス溶着方法
US9021836B2 (en) 2009-11-25 2015-05-05 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9045365B2 (en) 2008-06-23 2015-06-02 Hamamatsu Photonics K.K. Fusion-bonding process for glass
US9073778B2 (en) 2009-11-12 2015-07-07 Hamamatsu Photonics K.K. Glass welding method
US9181126B2 (en) 2008-05-26 2015-11-10 Hamamatsu Photonics K.K. Glass fusion method
US9227871B2 (en) 2009-11-25 2016-01-05 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9236213B2 (en) 2009-11-25 2016-01-12 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9233872B2 (en) 2009-11-25 2016-01-12 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9701582B2 (en) 2009-11-25 2017-07-11 Hamamatsu Photonics K.K. Glass welding method and glass layer fixing method
US9887059B2 (en) 2009-11-25 2018-02-06 Hamamatsu Photonics K.K. Glass welding method
US9922790B2 (en) 2009-11-25 2018-03-20 Hamamatsu Photonics K.K. Glass welding method
US10322469B2 (en) 2008-06-11 2019-06-18 Hamamatsu Photonics K.K. Fusion bonding process for glass

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JP5413309B2 (ja) * 2010-06-11 2014-02-12 旭硝子株式会社 封着材料層付きガラス部材の製造方法及び製造装置、並びに電子デバイスの製造方法

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