WO2009100988A2 - Capteur multifonction tubulaire pour liquides, procédé de fabrication et utilisation - Google Patents

Capteur multifonction tubulaire pour liquides, procédé de fabrication et utilisation Download PDF

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Publication number
WO2009100988A2
WO2009100988A2 PCT/EP2009/050991 EP2009050991W WO2009100988A2 WO 2009100988 A2 WO2009100988 A2 WO 2009100988A2 EP 2009050991 W EP2009050991 W EP 2009050991W WO 2009100988 A2 WO2009100988 A2 WO 2009100988A2
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WO
WIPO (PCT)
Prior art keywords
micro
nanotube
substrate
sensor
sample carrier
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PCT/EP2009/050991
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German (de)
English (en)
Other versions
WO2009100988A3 (fr
Inventor
Esteban Bermudez
Yongfeng Mei
Oliver G. Schmidt
Original Assignee
Leibniz-Institut Für Festkörper- Und Werkstoffforschung Dresden E.V.
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Publication of WO2009100988A2 publication Critical patent/WO2009100988A2/fr
Publication of WO2009100988A3 publication Critical patent/WO2009100988A3/fr

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0075—Manufacture of substrate-free structures
    • B81C99/008—Manufacture of substrate-free structures separating the processed structure from a mother substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/03—Processes for manufacturing substrate-free structures
    • B81C2201/038—Processes for manufacturing substrate-free structures not provided for in B81C2201/034 - B81C2201/036

Definitions

  • Tubular multifunction sensor in liquids, process for its manufacture and use
  • the invention relates to the field of micro- and nanotechnology and relates to a magnetic, tubular multifunctional sensor in liquids, which can be used in various fields, including in the fields of medicine, biology, rheology, for example as a magnetic microtube oscillator for detecting the viscosities in the volume and / or on the surface of a liquid as well as for the detection of organisms or particles. More particularly, the present invention relates to a method of manufacturing a tubular sensor that is sensitive to the viscosity of liquids by measuring its rotational response in a magnetically rotating magnetic field.
  • Micro / nanoobjects with magnetic properties are becoming more and more important in micro and nanotechnology because they can be used uniquely in biological systems, e.g. B. chemical sensors in liquids or cells by dye-coated magnetic particles (US20060008924) and automated cell separations by cell-bound magnetic beads (US7166443B2). Such particles and / or beads can also be improved with non-toxic, organic layers Bioprocedures are stabilized (eg, fermentation processes) (US7208134B2). Coiled Micro / Nanotubes [YA.
  • ferromagnetic particles By applying external magnetic fields, ferromagnetic particles can be manipulated from outside in a liquid medium, i. H. they can be aligned and moved anew in the direction of an applied magnetic field.
  • Valberg et al, Biophysical Journal 52 (1987), 537-550 disclose the theoretical background for the rotational dynamics of externally rotated ferromagnetic particles.
  • the rate at which the particle adjusts to the external field depends on particle characteristics such as the magnetic moment and dimensions of the particle, the amplitude of the applied magnetic field, and also the viscosity of the ambient fluid.
  • the rotational speed of the particles can thus be used to measure the viscosity of the surrounding liquid.
  • US 2006000892 A1 discloses a method for the production of Brownian and magnetically modulated optical nanoprobes (MagMOONs) which, inter alia, for the measurement of the viscosity of solutions and using the concept introduced by Valberg et al., For the measurement of a particle bound to the probe can be.
  • MagMOONs Brownian and magnetically modulated optical nanoprobes
  • MagMOONs are basically obtained by two methods, on the one hand by coating the one half-shell of fluorescent polystyrene nano or microspheres containing a ferromagnetic material with a reflective metal layer; the second method is to apply by means of a vapor deposition process to regular, non-magnetic polystyrene nano- or microspheres a uniform, magnetic layer as a half-shell and / or an additional reflective metal layer; both methods yield optically asymmetric nano or microspheres.
  • structurally asymmetric MagMOONs are produced by deforming spheres into disc or tubular particles.
  • Viscosity measurements are usually made by externally modulating the respective probes with a rotating magnetic field and recording the reflectance or fluorescence intensity in the time of the spectra from the optically asymmetric structures and then performing the analysis to estimate the average reaction velocity of the spheres.
  • the method for measuring the orientation of the particles requires, in addition to a conventional optical microscope, further components and imaging techniques.
  • the object of the present invention is to provide a magnetic, tubular multifunction sensor in liquids and a method for producing a new type of ferromagnetic micro / nano-objects, which can be used as sensors in liquids.
  • the aim is to provide a process for the production of ferromagnetic tubular structures which can be used with a high degree of precision in the control of the dimensions and the magnetic content, the possibility of using them by methods generally used in microfabrication. on a substrate, so that a cost-effective mass production with an improved and more reliable supply of probes is possible.
  • the method according to the invention for the production of tubular multifunction sensors consists of the method steps: a. Applying a sacrificial layer to a substrate, b. Applying a thin film consisting of at least one ferromagnetic material to the sacrificial layer, c. selectively etching the sacrificial layer such that the thin film curls up to form a micro- or nanotube and then mechanically removes the micro- or nanotube from the substrate and onto or into a liquid medium is positioned.
  • a substrate which consists of Si, GaAs, glass or plastic.
  • a sacrificial layer which consists essentially of a polymer, salt, Ge, AIAs or AIGaAs.
  • a substrate is used which is modified and shaped into a sample carrier after the thin film has rolled up into a micro or nanotube.
  • micro- or nanotube is placed partially free-standing over a region of the substrate, in particular on a sample carrier.
  • micro- or nanotube is picked up with a sharp, needle-like instrument and transferred into a liquid medium.
  • micro- or nanotube on the top of a sample carrier is transferred by the previous recording of the sample carrier from the substrate into a liquid.
  • the tubular multifunctional sensor in liquids produced by the method according to the invention consists of at least one micro- or nanotube made of at least one ferromagnetic material.
  • the micro- or nanotube consists of a hard or soft magnetic material. It is further advantageous that the magnetic material is Fe, Co or Ni or a composition thereof, and still more advantageously the composition is NiSoFe 2 O, Co 9 oFei 0 .
  • the diameter of the micro- or nanotube is in the range of 20 nm to 30 ⁇ m, more advantageously between> 100 nm and 30 ⁇ m.
  • the length of the micro- or nanotube is in the range of 100 nm to 5 mm.
  • micro- or nanotube consists of more than one material.
  • the micro- or nanotube contains further materials which have physical and / or chemical functions, wherein even more advantageously as matehals with physical functions fluorescent, highly reflective and / or oxidation protection matehals and / or matehals with chemical functions anisotropic, hydrophilic, hydrophobic and / or catalytic Matehalen and / or markers for the targeting of organisms and / or particles are present, and further advantageously as high-reflective materials Ag and / or Au and / or in the oxidation protection Matehalen Pd, Pt, Ta and / or Au present and, advantageously, these additional functional materials have also been introduced before or after the magnetic material.
  • tubular multifunctional sensor according to the invention which is produced by the method according to the invention, is carried out for the detection of the liquid properties by measuring the rotational dynamics of micro and / or nanotubes.
  • tubular multifunction sensor for measurement with a magnifying lens in particular an optical microscope, is advantageously used with image acquisition hardware and software contained in the optical microscope and / or with a high-speed camera contained in the optical microscope.
  • tubular multifunction sensor for measuring the maximum response frequency of the sensor is used to determine the physical or chemical properties of the fluid used in the environment of the object under investigation or of the adjacent organic parts in the fluid.
  • the inventive method for producing the sensor presented here is based on the concept of the already known thin film winding nanotechnology after its detachment from a substrate, such a method being compatible with the standard processing methods of semiconductor technology, as already described in OG Schmidt et al, Advanced Materials 13 (10) 756-759 (2001).
  • the general roll-up concept is to strip thin films from a substrate by selectively etching away an underlying sacrificial layer, however, requiring that the thin film be subjected to an internal strain gradient, as is generally the case with vapor deposited or sputtered material layers.
  • the films Upon removal of the sacrificial layer, the films form themselves into tubular structures having diameters ranging from several tens of nanometers to tens of microns, depending on the thickness and strain gradient of the layers.
  • the lengths and arrangements of such micro and / or nanotubes can thin film methods, such as. As lithography techniques, are very well defined.
  • the roll-up concept offers a completely new possibility of producing well-positioned micro- and / or nanotubes according to the invention.
  • the roll-up concept offers a completely new possibility of producing well-positioned micro- and / or nanotubes according to the invention.
  • They With their low density, hollow shape and easy manipulation from the outside, they are ideal for applications in medical and biological fluids where, when properly functionalized, they can be used as magnetic carriers or for targeting organisms / particles.
  • the present invention allows for use of ferromagnetic tubular multifunction sensors as magnetic micro- or nano-oscillators in liquid media by analyzing their rotational response upon application of an external rotating magnetic field.
  • the magnetic tube may follow the rotational velocity of the external field, but after that frequency, transitions to a non-linear mode characterized by a delay in movement (contrary to the direction of rotation).
  • Cell or organism adhesion and monitoring can be achieved by adjusting the physical and chemical properties of the inner and outer surfaces of the rolled-up micro or nanotube. Proper functionalization of the inner and outer surfaces of the rolled-up micro- or nanotube enables the targeting of organisms or particles as well as monitoring the growth of the organism by measuring the rotational speeds of the tubular sensor in a liquid containing cells, organisms or other particle species ,
  • the general concept of the invention is a tubular multifunction sensor in liquids of at least one ferromagnetic material, as well as a method of manufacturing such a sensor.
  • the tubular multifunction sensor is preferably made by applying a thin film consisting of at least one ferromagnetic material to a sacrificial layer previously coated on a substrate and subsequently partially removed from the substrate by etching or dissolution. If the applied thin film is such that the film has an internal strain gradient, the film will naturally spontaneously roll up into a micro- or nanotube.
  • the prestressed thin film may consist of one or more layers of material; it is only important that at least one of the layers consists of a ferromagnetic material.
  • layers with other specific functionalities may be included, for example, oxidation-resistant layers for the ferromagnetic materials, highly reflective or fluorescent matehals that promote sensor properties, and particular markers for targeting organisms or particle bonds.
  • Hydrophilic or hydrophobic materials can also be incorporated before or after tube fabrication so that the sensors are better suited for measuring the properties inside or on the surface of a fluid.
  • the diameters of the rolled-up micro- or nanotubes can be adjusted from a few tens of nanometers or greater than a hundred nanometers to several tens of micrometers by adjusting the layer thickness and the strain gradient of the layer accordingly; the lengths of the tubes can be precisely defined using conventional lithographic techniques.
  • Micro- and / or nanotubes made in this manner can be accurately positioned on a conventional substrate or sample carrier and thus used as single multifunction measuring sensors that can be directly and conventionally inserted into a desired liquid medium, simply by bringing the sample carrier up and running Sample is brought into contact with the liquid.
  • the tube When the tube is dipped in the liquid itself or brought to its surface, the tube can be actively rotated by applying an external magnetic field to the sensor according to the invention.
  • the rotation reaction can be measured inter alia by determining the orientation of the tube in a time interval; this simple method is possible due to the tailor-made strongly asymmetrical shape of the tube.
  • the main advantage is that the particular method of making the micro- or nanotube of the present invention allows the probes to be easily applied to a substrate or to a sample carrier to serve as individual portable sensors; This makes them ideal for applications where on-site measurements are preferred. Contamination of the liquid by the introduction of additional liquids or other materials can be avoided by feeding the sensor so that only a single micro or nanotube is placed in the liquid to be examined; According to the current state of the art, particles are usually supplied in such a way that they are removed from the substrate with a moist brush or dissolved in a liquid solution, which in both cases can lead to contamination of the sample and an influence on its properties.
  • Lithography process techniques exists and therefore the dimensions of the tube sensors can be precisely controlled and adjusted for specific applications.
  • the rotational response of the sensor in a specific environment with a number of well-defined parameters depends on the size of the sensor and can be determined, for example, by changing the length of the micro- or nanotube and / or the Maximum of the reaction frequency can be set exactly as required.
  • the tubular multifunctional sensor according to the invention has the particular feature of a large surface area;
  • the available space for detecting organisms and / or particles is greater than, for example, a ball, disc or a cylinder similar to a particle.
  • This is also favorable if the sensor is used as a carrier in a liquid medium, so that, for example, medicaments can be coupled inside or outside to the tubular multifunction sensor.
  • tubular multi-functional sensors and of the method for their production and use as sensors in liquids are explained below.
  • One skilled in the art will recognize that the structures and aspects of the present invention may be generated by other suitable methods and may not be taken as an exhaustive list.
  • the pictures show:
  • FIG. 1 a top view of a silicon-on-insulator (SOI) wafer substrate
  • FIG. 2b is a plan view of the substrate after the application of a protective lacquer in the form of a protective coating
  • FIG. C shows a plan view of a substrate after coating with SiO 2
  • FIG. 3 Bottom view of the substrate after its coating and formation of a
  • FIG. 1 is a bottom view of the substrate after etching the Si layer with deep reactive ion etching (DRIE), FIG.
  • DRIE deep reactive ion etching
  • FIG. 1 shows a plan view of the finished sensor carrier after removal of the exposed SiO 2 Layers by HF etching
  • FIG. 5 shows the application or coating with a sacrificial layer on a selected region of the sample carrier
  • FIGH h the application or coating of a thin film on the
  • FIG. 1 is a plan view of the sample carrier with a micro- or nanotube formed after detachment of the thin-film layer
  • FIGIj supervision on a variety of sample slides on a larger
  • FIG. 2 shows an advantageous embodiment for the transport and use of a micro- or nanotube as a tubular multifunction sensor in liquids
  • FIG. 2 a leading a glass microcapillary to a micro- or nanotube on a substrate with a micromanipulator
  • FIG. 2b Positioning of a micro- or nanotube by introducing a
  • FIG 2c positioning of a micro or nanotube by bringing the
  • FIG. 2 d shows a sample of a micro- or nanotube in a liquid medium
  • FIG 2f example of a micro- or nanotube on the surface of a wetted
  • FIG 2g representation of an exemplary experiment setup for measuring the Rotational dynamics of a micro- or nanotube; the external rotation takes place with a rotary magnet 9 and the observation and image acquisition via an optical microscope 10 with built-in video camera
  • FIG. 3 shows a SEM image of a periodic field of uniform, well-placed microtubes with diameters and lengths of 4.5 ⁇ m and 60 ⁇ m, respectively
  • Microtube at different temperatures of glycerin Microtube at different temperatures of glycerin.
  • An exemplary embodiment of the present invention is to coat a substrate with a resist and then to form patterns therewith by lithographic techniques. Then, by vapor deposition with an electron beam evaporation apparatus, a thin film or a thin film system consisting of at least one ferromagnetic material is applied, the substrate having an angle with respect to the material vapor flow.
  • the protective lacquer serves as a sacrificial layer. After coating, the thin film system is separated from the substrate by selectively etching or dissolving the resist underlayer. In this detachment process, the layer system itself forms into a micro- or nanotube. For example, by lithographic methods, a plurality of coiled tubes can be made in parallel.
  • a particular embodiment of the present invention is to produce a rolled-up micro- or nanotube on a sample carrier by a method that achieves not only accurate tube positioning, but even a sample carrier that facilitates easy and proper transport of the sensor into the tube guaranteed to be examined liquid medium. This process is completely reproduced in FIG.
  • a resist 3 is applied by means of lithographic technology and thus structurings produced.
  • the specially designed structurings for the sample carrier are then transferred to the uppermost Si layer 1 a using RIE methods, as shown in FIG. 1 b.
  • an additional SiO 2 layer 2 b is applied on top of the structured Si layer 1 a according to FIG. 1 c, so that the sample carrier is protected against further damage by the next processing steps.
  • a layer of protective lacquer 3 on the back of the thicker Si layer 1 b is applied by spin-coating, as shown in Fig. 1d.
  • the protective lacquer layer 3 is coated with structurings such that certain regions of the Si layer 1b, as also shown in FIG. 1e, can be etched away by the DRIE method, so that the thin SiO.sub.2 layer 2a is exposed.
  • FIG. 1f shows as end product after the wet-chemical etching a sample carrier which hangs on two arms in the center of the original SOI substrate.
  • Such a sample carrier is still a part of the original substrate, so that the preparation of the rolled-up micro- or nanotubes on this substrate can still be carried out, as it is explained in the example embodiment.
  • the substrate can also be formed after application of the thin layer or after micro or nanotube formation to form a sample carrier.
  • a sacrificial layer 4 is applied to a small area of the sample carrier and then one or more thin layers are deposited, wherein at least one of these layers must be made of a magnetic material, as shown in FIG. 1h.
  • the sacrificial layer is selectively etched away, thereby partially exposing the applied layer (s) so that they can roll up to the end of the sample carrier toward micro or nanotubes (6) as in FIG. the white arrow indicating the direction of roll.
  • the end portions of the micro or protrude Nanotube 6 beyond the edge of the sensor carrier and can therefore be considered as partially standing on the substrate.
  • the shape that the rolled-up tube assumes derives from the geometry of the predetermined roll area, while the roll direction can be controlled, for example, by preferred crystallographic roll directions of the layers or by the angle of material application.
  • a single micro- or nanotube is obtained on a sample carrier, which can be mechanically removed from the wafer substrate and thus transported directly into the medium to be examined.
  • the method may also be developed via conventional thin film processing techniques such that the sample carriers are produced regularly over large areas of a wafer as in Fig. 1j and thus suitably produced a plurality of individual sensors for the respective applications.
  • a single micro- and / or nanotube for example, with a pointed needle-shaped object, such as glass microcapillaries or AFM tips, may be placed on or immersed in the surface of a liquid medium to manipulate or manipulate the structures to use the above-mentioned special design sample carrier.
  • Fig. 2 shows two examples of the embodiments of the possibilities of transport.
  • tip glass microcapillaries can be made by pulling apart a thin glass capillary which is heated in the central region by means of a hot tungsten filament; this needle-like tips can be achieved with diameters of about 3 microns.
  • the glass capillary 7 may then be manipulated by means of a micromanipulator stage incorporated in an optical microscope so as to be wetted by physical or chemical interaction between the capillary and the tube, for example electrostatic action or capillary force Surface, 8 touches and receives individual micro or nanotubes from the substrate. Thereafter, the micro- and / or nanotube can be placed on the surface of the liquid to be examined 9, which is applied to a substrate or a carrier 10, ie a glass slide, or immersed therein.
  • a micro- and / or nanotube fabricated as above on a sample carrier may be transported in an even simpler and more convenient manner become.
  • the sample carrier is held to the original substrate by only two thin arms and can be mechanically removed therefrom in a manner similar to removing an AFM cantilever from a wafer.
  • the partially free-standing tube can be moved onto or into the liquid with a simple movement and the sample carrier can be withdrawn.
  • the micro- and / or nanotube may be hydrophilic or hydrophobic and therefore either dipped in the liquid or placed on its surface, as outlined accordingly in Fig. 2b and Fig. 2c. This makes it possible to measure the liquid properties of the volume and the surface of liquids. Furthermore, as in Figure 2f, micro- and / or nanotubes can also be placed on the surface of wetted areas / thin liquid films, which further extends the range of applications of the tubular multifunction sensor.
  • the micro- and / or nanotube rotates by a magnetic field applied externally, in particular via a rotary magnet 12, whereby other types of rotary magnetic fields can also be used.
  • a magnetic field applied externally in particular via a rotary magnet 12, whereby other types of rotary magnetic fields can also be used.
  • the rotational dynamics of the actively rotating magnetic micro and / or nanotubes can be monitored with a video camera and appropriate image acquisition software installed in an optical microscope 13, preferably a high speed camera.
  • a simple method for determining the average rotational reaction velocity of a magnetic nanotube provides the asymmetric structure of such a tube.
  • the value of the maximum of the reaction frequency depends on the amplitude of the applied magnetic field as well as the physical parameters of both the particles and the liquid medium. Changes in the volume or shape of the particle can change this value. Changes in the liquid which have an influence on the rotational resistance of the object can also shift the maximum of the reaction frequency, in particular changes in the dynamic viscosity of the liquid or a surface shear action can change this value. If the amplitude of the magnetic field remains constant and the tube structure remains the same in all measurements, changes in the value of the maximum of the reaction frequency always correspond to changes in the physical properties of the surrounding fluid, in particular changes in the viscosity.
  • the detection of a particle and / or an organism also causes a change in the maximum response frequency of the sensor due to a change in the shape and volume of the rotation system now emerging from the tubular multifunction sensor in the particle consists.
  • the thin films of the three-layered Pd / Ni8oFe2o / Pd system are applied by means of an electron beam deposition apparatus to a substrate which is disposed at an angle of 70 ° to the vapor stream of the material, the substrate being a Si wafer lithographically coated with ALLRESIST photoresist ARP®. 3510 is pre-structured via a spin-coat process.
  • the photoresist served as the sacrificial layer, while the Pd layers act as oxidation protection layers for the ferromagnetic permalloy (Ni 8 oFe 2 O) layer.
  • the thicknesses of the photoresist, Pd, and permalloy layers were 2 ⁇ m, 3 nm, and 10 nm.
  • Fig. 3 shows an SEM image of an ordered array of uniform, well-positioned microtubes with average lengths and diameters of 60 ⁇ m and 4.5 ⁇ m.
  • the single Pd / Ni 8 oFe 2 O / Pd microtube was placed on a slide on top of the drop of 99.9 percent Merck glycine solution.
  • the slide was placed on a conventional hot paddle stirrer, which allowed the microtube to actively spin and change the temperature of the liquid medium.
  • the amplitude of the magnetic field was about 12 mT, and for rotation of the microtube frequencies of 0.3 Hz to 8.3 Hz were applied.
  • the rotation dynamics were recorded with a high-speed camera installed in an optical microscope with appropriate image acquisition software.
  • the orientation of the microtube was recorded in a certain time and the rotational response frequency was calculated from the average frame rate time the microtube needed to make a rotation.
  • the average rotational reaction frequency of the tube is related to the rotational speed of the external field.
  • the sudden drop in the linear response is indicated by a dashed line, with a maximum of the reaction frequency of about 2 Hz being observed at these particular conditions for the system.
  • Fig. 5 shows the results of the calculated maxima of the reaction frequencies for each temperature. The maximum of the reaction frequency changes to higher values with increasing temperature, which corresponds to the changes in the viscosity of the glycerin.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)

Abstract

L'invention se rapporte au domaine de la micro et nanotechnologie et concerne un capteur multifonction pouvant être utilisé par exemple dans le médical. Le but de l'invention est de fournir un nouveau type de micro/nano-objets ferromagnétiques s'utilisant comme capteurs dans des liquides. A cet effet, l'invention concerne un procédé consistant a. à appliquer une couche sacrificielle sur un substrat, b. à appliquer une couche mince, constituée d'au moins un matériau ferromagnétique, sur la couche sacrificielle et c. à graver sélectivement la couche sacrificielle, de sorte que la couche mince s'enroule et forme un microtube et/ou nanotube. Le procédé consiste ensuite à retirer mécaniquement le microtube et/ou nanotube du substrat puis à l'amener individuellement et d'une manière contrôlée sur ou dans un milieu liquide. L'invention concerne également un capteur multifonction tubulaire fabriqué selon le procédé de l'invention, lequel capteur est constitué d'au moins un microtube ou nanotube et d'au moins un matériau ferromagnétique.
PCT/EP2009/050991 2008-02-13 2009-01-29 Capteur multifonction tubulaire pour liquides, procédé de fabrication et utilisation WO2009100988A2 (fr)

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DE200810000292 DE102008000292B4 (de) 2008-02-13 2008-02-13 Röhrenförmiger Multifunktionssensor in Flüssigkeiten, Verfahren zu seiner Herstellung und Verwendung
DE102008000292.5 2008-02-13

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WO2009100988A2 true WO2009100988A2 (fr) 2009-08-20
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WO2018024604A1 (fr) * 2016-08-01 2018-02-08 Von Ardenne Gmbh Procédé de formation d'une couche structurée
US10369255B2 (en) 2012-09-07 2019-08-06 President And Fellows Of Harvard College Scaffolds comprising nanoelectronic components for cells, tissues, and other applications

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US8697029B2 (en) 2002-04-18 2014-04-15 The Regents Of The University Of Michigan Modulated physical and chemical sensors
JP4949041B2 (ja) 2003-12-18 2012-06-06 マサチューセッツ インスティテュート オブ テクノロジー 磁性ナノ粒子によって促進されたバイオプロセス
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170069858A1 (en) * 2012-09-07 2017-03-09 President And Fellows Of Harvard College Methods and systems for scaffolds comprising nanoelectronic components
US10355229B2 (en) * 2012-09-07 2019-07-16 President And Fellows Of Harvard College Methods and systems for scaffolds comprising nanoelectronic components
US10369255B2 (en) 2012-09-07 2019-08-06 President And Fellows Of Harvard College Scaffolds comprising nanoelectronic components for cells, tissues, and other applications
WO2018024604A1 (fr) * 2016-08-01 2018-02-08 Von Ardenne Gmbh Procédé de formation d'une couche structurée

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WO2009100988A3 (fr) 2010-04-29
DE102008000292A1 (de) 2009-08-27

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