WO2009078324A1 - 脆性材料基板の面取り加工方法および面取り加工装置 - Google Patents

脆性材料基板の面取り加工方法および面取り加工装置 Download PDF

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Publication number
WO2009078324A1
WO2009078324A1 PCT/JP2008/072471 JP2008072471W WO2009078324A1 WO 2009078324 A1 WO2009078324 A1 WO 2009078324A1 JP 2008072471 W JP2008072471 W JP 2008072471W WO 2009078324 A1 WO2009078324 A1 WO 2009078324A1
Authority
WO
WIPO (PCT)
Prior art keywords
chamfering
machining
laser beam
light collecting
brittle material
Prior art date
Application number
PCT/JP2008/072471
Other languages
English (en)
French (fr)
Inventor
Issei Kumatani
Tomihisa Sunata
Seiji Shimizu
Original Assignee
Mitsuboshi Diamond Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co., Ltd. filed Critical Mitsuboshi Diamond Industrial Co., Ltd.
Priority to KR1020107012767A priority Critical patent/KR101183865B1/ko
Priority to JP2009546230A priority patent/JP5102846B2/ja
Priority to CN2008801215041A priority patent/CN101903128B/zh
Priority to EP08862224.6A priority patent/EP2239085A4/en
Publication of WO2009078324A1 publication Critical patent/WO2009078324A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/40—Removing material taking account of the properties of the material involved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B23K26/0821—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head using multifaceted mirrors, e.g. polygonal mirror
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00—Articles made by soldering, welding or cutting
    • B23K2101/36—Electric or electronic devices
    • B23K2101/40—Semiconductor devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00—Materials to be soldered, welded or cut
    • B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Laser Beam Processing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)

Abstract

　Ｃ面あるいはＲ面等の面取り加工面にすることができる脆性材料基板の面取り加工方法を提供する。 　面取り加工を行うエッジラインＥＬに対し基板内を透過するようにレーザビームを照射するとともに、レーザビームの光路上に集光部材１５を配置してエッジライン近傍の基板表面又は基板内部にレーザビームの集光点を形成し、エッジラインに交差する面内で、面取り加工の加工予定幅に対応する範囲に対して集光点を走査し、集光点近傍のアブレーション処理により集光点の走査軌跡に沿った面取り加工を行う。
PCT/JP2008/072471 2007-12-19 2008-12-11 脆性材料基板の面取り加工方法および面取り加工装置 WO2009078324A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020107012767A KR101183865B1 (ko) 2007-12-19 2008-12-11 취성 재료 기판의 모따기 가공 방법 및 모따기 가공 장치
JP2009546230A JP5102846B2 (ja) 2007-12-19 2008-12-11 脆性材料基板の面取り加工方法および面取り加工装置
CN2008801215041A CN101903128B (zh) 2007-12-19 2008-12-11 脆性材料基板的倒角加工方法及倒角加工装置
EP08862224.6A EP2239085A4 (en) 2007-12-19 2008-12-11 METHOD FOR ABREASING / PROCESSING A SUBSTRATE OF SPRING MATERIAL AND ABROADING / MACHINING DEVICE

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-327599 2007-12-19
JP2007327599 2007-12-19

Publications (1)

Publication Number Publication Date
WO2009078324A1 true WO2009078324A1 (ja) 2009-06-25

Family

ID=40795440

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/072471 WO2009078324A1 (ja) 2007-12-19 2008-12-11 脆性材料基板の面取り加工方法および面取り加工装置

Country Status (6)

Country Link
EP (1) EP2239085A4 (ja)
JP (1) JP5102846B2 (ja)
KR (1) KR101183865B1 (ja)
CN (1) CN101903128B (ja)
TW (1) TW200936290A (ja)
WO (1) WO2009078324A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101181719B1 (ko) * 2010-06-22 2012-09-19 한국과학기술원 펨토초 레이저에 의해 나노 보이드 어레이 형성을 통한 절단방법
CN101987554B (zh) * 2009-08-07 2013-04-17 深圳市大族激光科技股份有限公司 一种激光雕刻装置
JP2016060677A (ja) * 2014-09-19 2016-04-25 旭硝子株式会社 ガラス板の加工方法、およびガラス板の加工装置
KR20190061028A (ko) * 2016-09-29 2019-06-04 코닝 인코포레이티드 레이저 가열을 통해서 유리 제품의 조성적 개질 및 그 제조방법
CN110757006A (zh) * 2019-10-23 2020-02-07 武汉数字化设计与制造创新中心有限公司 一种光伏玻璃通孔激光倒角装置及方法
JP6932865B1 (ja) * 2021-03-19 2021-09-08 株式会社東京精密 ウエハエッジ部の改質装置及び改質方法
JP2022145423A (ja) * 2021-03-19 2022-10-04 株式会社東京精密 ウエハエッジ部の改質装置及び改質方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101345587B1 (ko) * 2012-01-09 2013-12-27 주식회사 라미넥스 유리 모서리 가공 방법 및 장치
KR101574934B1 (ko) * 2014-05-27 2015-12-08 로체 시스템즈(주) 취성재료의 면취 방법
JP6654813B2 (ja) * 2015-06-02 2020-02-26 川崎重工業株式会社 面取り加工装置および面取り加工方法
CN106552996A (zh) * 2015-09-24 2017-04-05 武汉吉事达激光设备有限公司 玻璃激光倒角方法及设备
JP2020004889A (ja) * 2018-06-29 2020-01-09 三星ダイヤモンド工業株式会社 基板の分断方法及び分断装置
CN111974852A (zh) * 2020-07-09 2020-11-24 中船第九设计研究院工程有限公司 一种船舶t型材生产过程中的倒棱工艺
CN111843216B (zh) * 2020-07-22 2022-09-09 江苏亚威艾欧斯激光科技有限公司 一种玻璃基板侧面加工装置及其加工方法

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JP2007245235A (ja) * 2006-02-14 2007-09-27 Shibaura Mechatronics Corp レーザ加工装置及びレーザ加工方法
JP2007319881A (ja) * 2006-05-31 2007-12-13 Seiko Epson Corp 基体の製造方法、レーザ加工装置、表示装置、電気光学装置、電子機器

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JP2612332B2 (ja) * 1989-03-13 1997-05-21 株式会社東海理化電機製作所 ガラス部材の面取り方法
JPH09225665A (ja) * 1996-02-22 1997-09-02 Seiko Epson Corp ガラス基板面取り方法及びその方法を用いた液晶パネル用ガラス基板及び液晶パネル
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CN1283409C (zh) * 2001-08-10 2006-11-08 三星钻石工业股份有限公司 脆性材料基片的倒角方法以及倒角装置
JP2005178288A (ja) * 2003-12-22 2005-07-07 Shibuya Kogyo Co Ltd 脆性材料の割断方法とその装置
JP4749092B2 (ja) * 2005-02-28 2011-08-17 パナソニック電工Ｓｕｎｘ株式会社 レーザ加工方法、並びにレーザ加工装置
JP4407584B2 (ja) * 2005-07-20 2010-02-03 セイコーエプソン株式会社 レーザ照射装置およびレーザスクライブ方法

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2007245235A (ja) * 2006-02-14 2007-09-27 Shibaura Mechatronics Corp レーザ加工装置及びレーザ加工方法
JP2007319881A (ja) * 2006-05-31 2007-12-13 Seiko Epson Corp 基体の製造方法、レーザ加工装置、表示装置、電気光学装置、電子機器

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101987554B (zh) * 2009-08-07 2013-04-17 深圳市大族激光科技股份有限公司 一种激光雕刻装置
KR101181719B1 (ko) * 2010-06-22 2012-09-19 한국과학기술원 펨토초 레이저에 의해 나노 보이드 어레이 형성을 통한 절단방법
JP2016060677A (ja) * 2014-09-19 2016-04-25 旭硝子株式会社 ガラス板の加工方法、およびガラス板の加工装置
KR102491173B1 (ko) * 2016-09-29 2023-01-20 코닝 인코포레이티드 레이저 가열을 통해서 유리 제품의 조성적 개질 및 그 제조방법
KR20190061028A (ko) * 2016-09-29 2019-06-04 코닝 인코포레이티드 레이저 가열을 통해서 유리 제품의 조성적 개질 및 그 제조방법
JP2019531249A (ja) * 2016-09-29 2019-10-31 コーニング インコーポレイテッド レーザ加熱によるガラス物品の組成変更およびその製造方法
US11236017B2 (en) 2016-09-29 2022-02-01 Corning Incorporated Compositional modification of glass articles through laser heating and methods for making the same
JP7094946B2 (ja) 2016-09-29 2022-07-04 コーニング インコーポレイテッド レーザ加熱によるガラス物品の組成変更およびその製造方法
CN110757006A (zh) * 2019-10-23 2020-02-07 武汉数字化设计与制造创新中心有限公司 一种光伏玻璃通孔激光倒角装置及方法
JP6932865B1 (ja) * 2021-03-19 2021-09-08 株式会社東京精密 ウエハエッジ部の改質装置及び改質方法
JP2022145423A (ja) * 2021-03-19 2022-10-04 株式会社東京精密 ウエハエッジ部の改質装置及び改質方法
JP2022144435A (ja) * 2021-03-19 2022-10-03 株式会社東京精密 ウエハエッジ部の改質装置及び改質方法
JP7221345B2 (ja) 2021-03-19 2023-02-13 株式会社東京精密 ウエハエッジ部の改質装置及び改質方法

Also Published As

Publication number Publication date
KR101183865B1 (ko) 2012-09-19
JP5102846B2 (ja) 2012-12-19
CN101903128A (zh) 2010-12-01
EP2239085A4 (en) 2016-12-14
JPWO2009078324A1 (ja) 2011-04-28
TW200936290A (en) 2009-09-01
CN101903128B (zh) 2013-07-17
EP2239085A1 (en) 2010-10-13
KR20100087371A (ko) 2010-08-04
TWI361741B (ja) 2012-04-11

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