WO2009066701A1 - 圧電アクチュエータ、駆動装置、位置決め装置およびレーザモジュール - Google Patents

圧電アクチュエータ、駆動装置、位置決め装置およびレーザモジュール Download PDF

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Publication number
WO2009066701A1
WO2009066701A1 PCT/JP2008/071033 JP2008071033W WO2009066701A1 WO 2009066701 A1 WO2009066701 A1 WO 2009066701A1 JP 2008071033 W JP2008071033 W JP 2008071033W WO 2009066701 A1 WO2009066701 A1 WO 2009066701A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric actuator
piezoelectric element
elastic layers
bonded
drive axis
Prior art date
Application number
PCT/JP2008/071033
Other languages
English (en)
French (fr)
Inventor
Kazuhiro Shibatani
Original Assignee
Konica Minolta Opto, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Opto, Inc. filed Critical Konica Minolta Opto, Inc.
Priority to US12/743,656 priority Critical patent/US8203253B2/en
Priority to JP2009542576A priority patent/JP5299284B2/ja
Priority to CN200880117318.0A priority patent/CN101868909B/zh
Publication of WO2009066701A1 publication Critical patent/WO2009066701A1/ja

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0071—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for beam steering, e.g. using a mirror outside the cavity to change the beam direction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H01S5/0092—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping for nonlinear frequency conversion, e.g. second harmonic generation [SHG] or sum- or difference-frequency generation outside the laser cavity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/06821—Stabilising other output parameters than intensity or frequency, e.g. phase, polarisation or far-fields

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Lens Barrels (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

　伸縮層（１４ａ）と電極層（１４ｂ）とを交互に積層した積層型圧電素子（１４）と、圧電素子（１４）に一端が固定された駆動軸（１５）と、駆動軸（１５）に摩擦係合する移動体とを有する圧電アクチュエータ（８）において、カラー（１７）を、圧電素子（１４）の複数の伸縮層（１４ａ）の外周に、部分的にヤング率の異なる接着剤を用いて接着したり、伸縮層（１４ａ）の外周の一部分と非接着となるように部分的に接着剤（Ｇ）で接着することで、カラー（１７）の伸縮層（１４ａ）に対する拘束力が圧電素子（１４）の断面中心から見て不均衡になるようにすれば、圧電素子（１４）を不均衡に伸縮させて歪ませ、駆動軸（１５）を傾斜させることにより、移動体を微動させられる。
PCT/JP2008/071033 2007-11-21 2008-11-19 圧電アクチュエータ、駆動装置、位置決め装置およびレーザモジュール WO2009066701A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/743,656 US8203253B2 (en) 2007-11-21 2008-11-19 Piezoelectric actuator, driving device, positioning device and laser module
JP2009542576A JP5299284B2 (ja) 2007-11-21 2008-11-19 圧電アクチュエータ、駆動装置、位置決め装置およびレーザモジュール
CN200880117318.0A CN101868909B (zh) 2007-11-21 2008-11-19 压电致动器、驱动装置、定位装置和激光模块

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007301319 2007-11-21
JP2007-301319 2007-11-21

Publications (1)

Publication Number Publication Date
WO2009066701A1 true WO2009066701A1 (ja) 2009-05-28

Family

ID=40667523

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071033 WO2009066701A1 (ja) 2007-11-21 2008-11-19 圧電アクチュエータ、駆動装置、位置決め装置およびレーザモジュール

Country Status (5)

Country Link
US (1) US8203253B2 (ja)
JP (1) JP5299284B2 (ja)
KR (1) KR20100097112A (ja)
CN (1) CN101868909B (ja)
WO (1) WO2009066701A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2439858A (en) * 1943-08-28 1948-04-20 Carnegie Illinois Steel Corp Conductor roll
JP5223803B2 (ja) * 2009-07-21 2013-06-26 コニカミノルタアドバンストレイヤー株式会社 撮像装置
US10819082B2 (en) * 2018-07-26 2020-10-27 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Multifrequency ocean lidar power optimizer
LT6796B (lt) 2020-05-14 2021-01-25 Vilniaus Gedimino technikos universitetas Optinio spindulio intensyvumo valdymo sistema su pjezoelektrine pavara

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006081348A (ja) * 2004-09-10 2006-03-23 Konica Minolta Photo Imaging Inc 駆動機構、振れ補正ユニット及びこれらを用いたカメラ
JP2007236138A (ja) * 2006-03-02 2007-09-13 Konica Minolta Opto Inc 駆動装置および振動体
JP2007282448A (ja) * 2006-04-11 2007-10-25 Fujinon Corp 駆動装置

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US3442570A (en) * 1966-03-02 1969-05-06 Hughes Aircraft Co Piezoelectric laser beam deflector
ES2071146T3 (es) * 1990-04-27 1995-06-16 Rockwell International Corp Articulacion robotica.
US5441597A (en) * 1992-12-01 1995-08-15 Honeywell Inc. Microstructure gas valve control forming method
JPH07113694B2 (ja) 1993-03-16 1995-12-06 日本電気株式会社 自動光軸合わせ装置
US7775634B2 (en) * 1997-07-15 2010-08-17 Silverbrook Research Pty Ltd Inkjet chamber with aligned nozzle and inlet
DE19914411A1 (de) * 1999-03-30 2000-10-12 Bosch Gmbh Robert Piezoelektrischer Aktor
US6265810B1 (en) * 2000-01-25 2001-07-24 The Boeing Company Piezoelectric support device
GB2378573B (en) * 2001-06-20 2003-09-10 Polatis Ltd A piezoelectric actuator
US6800987B2 (en) * 2002-01-22 2004-10-05 Measurement Specialties, Inc. Protective housing for ultrasonic transducer apparatus
JP2003298134A (ja) * 2002-01-31 2003-10-17 Toyota Motor Corp 積層型圧電アクチュエータ
JP3954434B2 (ja) 2002-05-22 2007-08-08 ペンタックス株式会社 光通信装置
DE10347774B4 (de) * 2003-10-14 2006-04-13 Siemens Ag Aufnahmehülse für einen Aktorkörper
KR100698438B1 (ko) * 2005-05-18 2007-03-22 한국과학기술연구원 변위 확대 기구를 갖는 압전 선형 모터
DE102005060779B4 (de) * 2005-12-16 2008-07-10 Eads Deutschland Gmbh Kraftgenerator
JP2007267538A (ja) * 2006-03-29 2007-10-11 Fujinon Corp 駆動装置
DE102006035038A1 (de) * 2006-07-28 2008-01-31 Epcos Ag Federelement sowie Piezoaktor mit dem Federelement

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006081348A (ja) * 2004-09-10 2006-03-23 Konica Minolta Photo Imaging Inc 駆動機構、振れ補正ユニット及びこれらを用いたカメラ
JP2007236138A (ja) * 2006-03-02 2007-09-13 Konica Minolta Opto Inc 駆動装置および振動体
JP2007282448A (ja) * 2006-04-11 2007-10-25 Fujinon Corp 駆動装置

Also Published As

Publication number Publication date
JPWO2009066701A1 (ja) 2011-04-07
KR20100097112A (ko) 2010-09-02
JP5299284B2 (ja) 2013-09-25
CN101868909B (zh) 2013-06-05
CN101868909A (zh) 2010-10-20
US8203253B2 (en) 2012-06-19
US20100245963A1 (en) 2010-09-30

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