WO2009066371A1 - Ｄ／ａ変換器及び電子ビーム露光装置 - Google Patents

Ｄ／ａ変換器及び電子ビーム露光装置 Download PDF

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Publication number
WO2009066371A1
WO2009066371A1 PCT/JP2007/072455 JP2007072455W WO2009066371A1 WO 2009066371 A1 WO2009066371 A1 WO 2009066371A1 JP 2007072455 W JP2007072455 W JP 2007072455W WO 2009066371 A1 WO2009066371 A1 WO 2009066371A1
Authority
WO
WIPO (PCT)
Prior art keywords
converter
current source
unit
bit
bit current
Prior art date
Application number
PCT/JP2007/072455
Other languages
English (en)
French (fr)
Inventor
Hidefumi Yabara
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Priority to DE112007003714T priority Critical patent/DE112007003714T5/de
Priority to PCT/JP2007/072455 priority patent/WO2009066371A1/ja
Priority to JP2009542430A priority patent/JP4856250B2/ja
Publication of WO2009066371A1 publication Critical patent/WO2009066371A1/ja
Priority to US12/800,568 priority patent/US8223045B2/en

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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/10—Calibration or testing
    • H03M1/1009—Calibration
    • H03M1/1033—Calibration over the full range of the converter, e.g. for correcting differential non-linearity
    • H03M1/1038—Calibration over the full range of the converter, e.g. for correcting differential non-linearity by storing corrected or correction values in one or more digital look-up tables
    • H03M1/1052—Calibration over the full range of the converter, e.g. for correcting differential non-linearity by storing corrected or correction values in one or more digital look-up tables using two or more look-up tables each corresponding to a different type of error, e.g. for offset, gain error and non-linearity error respectively
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03M—CODING; DECODING; CODE CONVERSION IN GENERAL
    • H03M1/00—Analogue/digital conversion; Digital/analogue conversion
    • H03M1/66—Digital/analogue converters
    • H03M1/68—Digital/analogue converters with conversions of different sensitivity, i.e. one conversion relating to the more significant digital bits and another conversion to the less significant bits
    • H03M1/687—Segmented, i.e. the more significant bit converter being of the unary decoded type and the less significant bit converter being of the binary weighted type

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Analogue/Digital Conversion (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

【課題】高分解能であってデジタル値に対する直線性がよいＤ／Ａ変換器及びそのＤ／Ａ変換器を搭載した電子ビーム露光装置を提供すること。 【解決手段】Ｄ／Ａ変換器３０は、上位ビットのＤ／Ａ変換を行う第１のＤ／Ａ変換部と下位ビットのＤ／Ａ変換を行う第２のＤ／Ａ変換部で構成され、最下位ビットと同一の重み付けの補助ビットを備えたＤ／Ａ変換基本部３５と、補正用Ｄ／Ａ変換部３８と、補正用Ｄ／Ａ変換部３８のＤ／Ａ変換器に設定するデジタルコードを生成する誤差検出処理部３３と、制御部３４とを備える。制御部３４は、ビット電流源と当該ビット電流源より下位のビット電流源とを比較して、ビット電流源の値が変動したと判定したとき、補正用Ｄ／Ａ変換器に設定するデジタルコードを誤差検出処理部３３に生成させ、ビット電流源の値を補正する。
PCT/JP2007/072455 2007-11-20 2007-11-20 Ｄ／ａ変換器及び電子ビーム露光装置 WO2009066371A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE112007003714T DE112007003714T5 (de) 2007-11-20 2007-11-20 D/A-Wandler und Elekronenstrahl-Belichtungsgerät
PCT/JP2007/072455 WO2009066371A1 (ja) 2007-11-20 2007-11-20 Ｄ／ａ変換器及び電子ビーム露光装置
JP2009542430A JP4856250B2 (ja) 2007-11-20 2007-11-20 Ｄ／ａ変換器及び電子ビーム露光装置
US12/800,568 US8223045B2 (en) 2007-11-20 2010-05-18 D/A converter and electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/072455 WO2009066371A1 (ja) 2007-11-20 2007-11-20 Ｄ／ａ変換器及び電子ビーム露光装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/800,568 Continuation US8223045B2 (en) 2007-11-20 2010-05-18 D/A converter and electron beam exposure apparatus

Publications (1)

Publication Number Publication Date
WO2009066371A1 true WO2009066371A1 (ja) 2009-05-28

Family

ID=40667209

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/072455 WO2009066371A1 (ja) 2007-11-20 2007-11-20 Ｄ／ａ変換器及び電子ビーム露光装置

Country Status (4)

Country Link
US (1) US8223045B2 (ja)
JP (1) JP4856250B2 (ja)
DE (1) DE112007003714T5 (ja)
WO (1) WO2009066371A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010206665A (ja) * 2009-03-05 2010-09-16 Yamaha Corp Ｄ／ａ変換器の補正回路
CN110308751A (zh) * 2019-07-24 2019-10-08 深圳市瑞之辰科技有限公司 温控校正电路及温控校正方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5095364B2 (ja) * 2007-11-26 2012-12-12 株式会社ニューフレアテクノロジー トラッキング制御方法および電子ビーム描画システム
KR101831696B1 (ko) * 2011-12-06 2018-02-23 삼성전자주식회사 디지털-아날로그 변환 장치 및 동작 방법
JP5438161B2 (ja) * 2012-04-13 2014-03-12 株式会社アドバンテスト Ｄａ変換装置
CN114389611A (zh) * 2021-12-31 2022-04-22 芯海科技（深圳）股份有限公司 信号检测电路、集成电路以及电子设备

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122524A (en) * 1980-03-04 1981-09-26 Nippon Telegr & Teleph Corp <Ntt> Digital-to-analog converter
JPS59167112A (ja) * 1983-03-14 1984-09-20 Hitachi Ltd デイジタル・アナログ変換器

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59186416A (ja) 1983-04-08 1984-10-23 Hitachi Micro Comput Eng Ltd ディジタル―アナログ変換器
JP2799712B2 (ja) * 1988-08-20 1998-09-21 株式会社日立製作所 Ｄａ変換器
JP3039791B2 (ja) * 1990-06-08 2000-05-08 富士通株式会社 Ｄａコンバータ
JPH11329322A (ja) 1998-05-11 1999-11-30 Advantest Corp 電子ビーム露光方法及び電子ビーム露光装置
US7148827B2 (en) * 2002-03-04 2006-12-12 Lg Electronics Inc. Offset compensating apparatus and method of digital/analog converter

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122524A (en) * 1980-03-04 1981-09-26 Nippon Telegr & Teleph Corp <Ntt> Digital-to-analog converter
JPS59167112A (ja) * 1983-03-14 1984-09-20 Hitachi Ltd デイジタル・アナログ変換器

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010206665A (ja) * 2009-03-05 2010-09-16 Yamaha Corp Ｄ／ａ変換器の補正回路
CN110308751A (zh) * 2019-07-24 2019-10-08 深圳市瑞之辰科技有限公司 温控校正电路及温控校正方法
CN110308751B (zh) * 2019-07-24 2024-03-19 深圳市瑞之辰科技有限公司 温控校正电路及温控校正方法

Also Published As

Publication number Publication date
JP4856250B2 (ja) 2012-01-18
US8223045B2 (en) 2012-07-17
US20100314560A1 (en) 2010-12-16
DE112007003714T5 (de) 2010-12-02
JPWO2009066371A1 (ja) 2011-03-31

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